CN106052556B - A kind of three coordinate measuring machine spatial domain coordinates compensation method - Google Patents

A kind of three coordinate measuring machine spatial domain coordinates compensation method Download PDF

Info

Publication number
CN106052556B
CN106052556B CN201610461034.XA CN201610461034A CN106052556B CN 106052556 B CN106052556 B CN 106052556B CN 201610461034 A CN201610461034 A CN 201610461034A CN 106052556 B CN106052556 B CN 106052556B
Authority
CN
China
Prior art keywords
coordinate
formula
correction value
erect
measuring point
Prior art date
Application number
CN201610461034.XA
Other languages
Chinese (zh)
Other versions
CN106052556A (en
Inventor
陈洪芳
郑博文
石照耀
孙衍强
Original Assignee
北京工业大学
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 北京工业大学 filed Critical 北京工业大学
Priority to CN201610461034.XA priority Critical patent/CN106052556B/en
Publication of CN106052556A publication Critical patent/CN106052556A/en
Application granted granted Critical
Publication of CN106052556B publication Critical patent/CN106052556B/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical means
    • G01B11/002Measuring arrangements characterised by the use of optical means for measuring two or more coordinates
    • G01B11/005Measuring arrangements characterised by the use of optical means for measuring two or more coordinates coordinate measuring machines
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof in so far as they are not adapted to particular types of measuring means of the preceding groups
    • G01B21/02Measuring arrangements or details thereof in so far as they are not adapted to particular types of measuring means of the preceding groups for measuring length, width, or thickness
    • G01B21/04Measuring arrangements or details thereof in so far as they are not adapted to particular types of measuring means of the preceding groups for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/045Correction of measurements

Abstract

A kind of three coordinate measuring machine spatial domain coordinates compensation method measured based on laser traces instrument multi-court position, measuring point mesh generation is carried out first in three coordinate measuring engine measurement spatial dimension and determines measuring point coordinate, running target mirror is to each measuring point when measurement, laser traces instrument carries out turning station measurement outside mesh space range, and the relative interference for obtaining each measuring point to first measuring point under different erect-positions surveys long value.Then 2 range formulas and principle of least square method is utilized to solve the distance of the coordinate and corresponding erect-position to first measuring point of each erect-position.Each erect-position coordinate, measuring point coordinate and erect-position is recycled to solve the correction value of each measuring point by interference length-measuring error equation to the distance of first measuring point.Again, more accurate measuring point correction value is obtained using erect-position coordinate precision, erect-position to the alternative manner of first measuring point range accuracy is improved.Tri-linear interpolation methods are finally utilized to obtain the correction value of any point in mesh space, to improve the measurement accuracy of three coordinate measuring machine.

Description

A kind of three coordinate measuring machine spatial domain coordinates compensation method

Technical field

The present invention relates to a kind of raising three coordinate measuring machine (Coordinate Measuring Machine, abbreviation CMM) The analysis method of measurement accuracy is based particularly on the three coordinate measuring machine spatial domain coordinate modification side of laser traces instrument multi-court position measurement Method belongs to Technology of Precision Measurement and coordinate measuring technology field.

Background technology

Three coordinate measuring machine is as efficient precision measurement system in coordinate measuring technology, with its high certainty of measurement, speed The features such as degree is fast, flexible strong, increasingly important role is played in the fields such as the manufacturing of modernization and Aeronautics and Astronautics, It is key foundation measuring apparatus and the crucial test of quality testing and control in civilian industry production of advanced manufacturing field The 3 d space coordinate of equipment, the geometric element, curve and curved surface that can complete various parts measures, and can realize on-line checking And automatic measurement.With the development of the progress and Ultraprecision Machining of science and technology, to three coordinate measuring engine measurement precision Requirement it is also higher and higher.And fast and accurately CMM is demarcated, detect every error of CMM and carries out error benefit It repays, is one of the important channel for improving CMM measurement accuracy, is a kind of elder generation increasing substantially CMM measurement accuracy at lower cost Into technological means.

There are many kinds of approach and the measures for improving coordinate measuring machine accuracy, such as improves mechanical structure precision, reduces power change Shape, thermal deformation improve scale precision and using sampling policy appropriate etc..Since coordinate measuring machine is complicated, from raising The means of mechanical structure precision ensure its precision, not only of high cost, and the precision improved is extremely limited.Therefore in high precision, efficiently The coordinate measuring machine calibration technique of rate becomes the advanced technology means for improving coordinate measuring machine measurement accuracy, and Error Compensation Technology exists It is widely applied in coordinate measuring machine.What coordinate measuring machine scaling method was more commonly used at present is laser interferometer, autocollimatic The high precision instruments such as straight instrument, optical sqaure are directly separated 21 errors, and coordinate is detached indirectly using bat, ball row, ball plate etc. 21 errors of measuring machine.

It is to grow up on the basis of robot meterological that laser tracks three-dimensional coordinate measurement technology the eighties in last century A kind of novel coordinate measuring technology.Since laser tracking measurement system is developed out for the first time, towards the portable of scene Formula coordinate system --- laser tracker solves the problems, such as that coordinate measuring machine calibration efficiency and precision improve.It is tracked based on laser The measuring principle of instrument passes through the positioning of the global positioning system (Global Positioning System, GPS) under more base stations The calibration of CMM may be implemented in method.

The follower of traditional laser tracking system is the shaft precise rotation device that can intersect around two vertical axis of space, The rotation direction of tracking lens or interferometer beam is controlled respectively using two fixed joints, if two rotation when shaft rotates The intersection point of shaft axis is unstable, will cause measurement error, or even laser interferometer can be caused to break light, and whole system is caused to measure It interrupts.Rigging error, structural instability and the thermal deformation etc. of tracking mirror also bring along error simultaneously.It can be seen that comparing In linear measure longimetry, angle measurement can more influence the uncertainty of measurement of laser tracking system.Three are being carried out using laser tracker In the calibration of coordinate measuring machine, although only having used laser tracker precise interference surveys the long measurement method in conjunction with multi-court position, swash The three-dimensional ball measurement of coordinates of optical tracker system is not used, but due to the limitation of conventional commercial laser tracker mechanical structure, So that conventional laser tracking system precision is difficult to improve.

German National quantitative study institute (PTB) and United Kingdom National physics laboratory (NPL) joint research and development are dedicated for school The laser traces instrument of quasi- numerically-controlled machine tool and coordinate measuring machine, is capable of providing the range measurement of full accuracy.Interferometer is mounted in universal Around only as the movement of the fixation sphere of the reference mirror of interferometer in regulating device.Due to this principle, the radial direction of rotating machinery shaft Measurement accuracy can't be significantly affected with lateral deviation.The precision of laser tracking is not influenced by mechanical structure, is depended primarily on With reference to the quality of spherical surface and the variation of spatial position.Measurement accuracy can be increased substantially and shorten entire detection cycle.

It is necessary to design a kind of three coordinate measuring machine spatial domain coordinate modification measured based on laser traces instrument multi-court position thus Method, can high-precision calibrating three coordinate measuring machine, to improve the measurement accuracy of three coordinate measuring machine space measurement point.

Invention content

It is an object of the invention to propose a kind of three coordinate measuring machine spatial domain coordinates compensation method, it is therefore an objective to provide a kind of base It is measured in laser traces instrument multi-court position and using Tri linear interpolation (Trilinear interpolation) to space any point The error compensating method being modified enables the measurement accuracy that three coordinate measuring machine is improved in actually measuring.It compares existing Some analysis methods, this method have the characteristics that high certainty of measurement, measurement cost are relatively low and easy to operate.

To achieve the above objectives, the present invention adopts the following technical scheme that:

A kind of three coordinate measuring machine spatial domain coordinates compensation method measured based on laser traces instrument multi-court position, this method include Following step:

Step 1:Build laser traces instrument multi-court position measurement model.Under CMM coordinate systems, if CMM measures tested point in space For Ai(xi,yi,zi), wherein i=1,2,3 ..., n;The centre of sphere of laser traces instrument internal standard ball is O;The station of laser traces instrument Position coordinate is Pj(Xj,Yj,Zj), wherein j=1,2,3 ..., m;PjTo A1The distance of point is dj;Laser traces instrument in measurement process Measurement data be lij, such as Fig. 1.Following relationship is established by 2 range formulas of three dimensions:

Equation number is m × n, and unknown number number is 4m+3n.For make equation group can solution should meet:

m×n≥4m+3n (2)

Then m and n meets m >=4, n >=16.

Step 2:It divides and measures space, the vertex of such as Fig. 2, small cubes space are tested point, determine tested point Ai CMM measures the coordinate value (x in spatial dimensioni,yi,zi), the mobile route of object of planning target mirror is as shown in Fig. 3.Laser traces The erect-position of instrument is P1, control CMM movement target mirrors and be moved to tested point A according to the path plannedi, and measure at this time swash The measurement data l of light trackeri1.Laser traces instrument is moved successively to each erect-position Pj, wherein j=1,2,3 ..., m, and by rule It draws path running target mirror and completes all tested point measurement data lijMeasurement.

Step 3:By formula (1) equal sign both sides simultaneously square and transplant obtain equation:

It enablesThen formula (3) is converted into:

Object function is defined as according to least square method:

Make F (Xj,Yj,Zj, k) and minimum, (5) formula should meet following condition:

Meet simultaneously:

Write formula (6) as matrix form:

Erect-position coordinate P can be obtained in solution formula (8)i(Xj,Yj,Zj) and dj

Step 4:Write formula (1) as error equation:

The error sum of squares obtained using Least Square in Processing formula (9) is:

Formula (10) is a nonlinear equation, and following calculating process is used for convenience of solving:

It enables

Taylor series expansion is carried out to formula (11) using Taylor series expansion, obtains following equation:

Formula (12) is substituted into formula (9), abbreviation has after arranging:

Wherein:Equation (13) is after optimizing Solving model.In formula (12), (13), it is designated as |0It is the approximation of the numerical value, xi|0、yi|0、zi|0It is provided by CMM, Xj|0、Yj |0、Zj|0、djIt is obtained by solution equation group formula (8).

Enable vij=0, formula (13) is write as to the form of matrix:

Ax=B (14)

Wherein:

Wherein dxi、dyi、dziAnd dXj、dYj、dZjFor the correction value and erect-position P of tested point corresponding coordinatejCorresponding coordinate Correction value.Tested point A can be obtained in solving equations (14)iCorrection value (dxi,dyi,dzi)。

Step 5:According to formula (12), tested point A is influencediCorrection value (dxi,dyi,dzi) variable of precision has xi|0、 yi|0、 zi|0And Xj|0、Yj|0、Zj|0、dj, wherein xi|0、yi|0、zi|0It is determined as constant, therefore X after completing step 1j|0、Yj|0、 Zj|0、djThe precision of solution directly affects (dxi,dyi,dzi) solving precision.X is improved using recursion alternative mannerj|0、Yj|0、Zj |0、djThe precision of solution.

The step of alternative manner, is as follows:

1. by point coordinates (x to be measuredi|0,yi|0,zi|0) with obtained correction value (dxi,dyi,dzi) be added, obtain (xi |0',yi|0',zi|0');

2. by (xi|0',yi|0',zi|0') and step 2 in obtained lijSubstitution formula (8), solution obtain Pj'(Xj',Yj', Zj') and dj';

3. by (xi|0',yi|0',zi|0')、Pj'(Xj',Yj',Zj') and dj' formula (14) is substituted into, solution obtains in iteration Between correction value (dxi',dyi',dz'i).When iterations are equal to 1, by (dxi',dyi',dz'i) obtained with step 4 (dxi,dyi,dzi) be compared;It, will be in the intermediate correction value and last iteration of current iteration when iterations are more than 1 Between correction value be compared, see whether the order of magnitude of numerical value is reducing, if there is reduction trend then need to subsequently continue iteration, Iteration is terminated if without reducing;

4. by (xi|0,yi|0,zi|0)、Pj'(Xj',Yj',Zj') and dj' formula (14) is substituted into, it solves equation group and obtains high-precision Correction value;

5. 1. repeating step arrive process 4., wherein in 1. and (xi|0,yi|0,zi|0) carry out add operation correction value it is total Newest solution obtains, until iteration ends.

Step 6:Assuming that Q is any point that CMM is measured in measurement spatial dimension, coordinate is (xQ,yQ,zQ).It determines Q points small cubes space affiliated in grid division space.If cubical 8 vertex are A, B, C, D, E, F, G, H, wherein For plane ADHE perpendicular to the x-axis of CMM, the distance of Q points to plane ADHE is Lx;Plane ABFE is perpendicular to the y-axis of CMM, and Q points are to flat The distance of face ABFE is Ly;For plane ABCD perpendicular to the z-axis of CMM, the distance of Q points to plane ABCD is Lz

The measuring point correction value of A, B, C, D, E, F, G, H are obtained by step 5.Correction value using 8 vertex passes through formula (17) method of Tri linear interpolation finds out the error correction values of the measuring point.

WhereinΔA、ΔB、ΔC、ΔD、ΔE、ΔF、ΔG、ΔH、ΔQ, be respectively A, the coordinate modification value of B, C, D, E, F, G, H, Q.

The Δ acquired using formula (17)QThe spatial correction values of as Q points sit the correction value plus the measuring point that CMM is provided Mark (xQ,yQ,zQ), as finally optimize obtained high-precision coordinate value.

In conclusion based on laser traces instrument multi-court position measuring technique, is interfered with the high-precision of laser traces instrument and surveyed Long value is constraints, and processing is iterated to correction value, finally by the modification method of Tri linear interpolation, can effectively be carried The precision that high CMM measuring points measure.

Description of the drawings

Fig. 1 is laser traces instrument interference length-measuring schematic diagram;

Fig. 2 is to measure space to divide schematic diagram;

Fig. 3 is the mobile route of target mirror;

Fig. 4 is CMM laser traces instrument multistation level measuring systems;

Fig. 5 a are the curve graphs of x-axis direction correction value;

Fig. 5 b are the curve graphs of y-axis adjustment in direction value;

Fig. 5 c are the curve graphs of z-axis adjustment in direction value;

Fig. 6 is to measure space lattice to divide and Tri linear interpolation schematic diagram;

Fig. 7 a are the space coordinate correction values of x-axis direction;

Fig. 7 b are the space coordinate correction values in y-axis direction;

Fig. 7 c are the space coordinate correction values in z-axis direction.

Specific implementation mode

Present invention will be described in further detail below with reference to the accompanying drawings, to enable those skilled in the art with reference to specification text Word can be implemented according to this.

Long value is surveyed to carry out relative interference using CMM laser traces instrument multistation level measuring system as shown in Figure 4 in experiment Measurement, therefore analyzed by following step:

Step 1:Build laser traces instrument multi-court position measurement model.The time required to considering measurement accuracy and experiment, determines and swash The number of light tracker erect-position is 5,5 erect-positions not in approximately the same plane.Number of the space tested point under CMM coordinate systems For 4 × 4 × 4=64, the measuring point number under sustained height is 4 × 4=16.

Step 2:It divides and measures space, determine the coordinate of 64 tested points, corresponding coordinate such as table 1,

The coordinate of 1 tested point of table

Laser traces instrument is positioned over default erect-position P1, as shown in figure 4, by the preset path running target mirror of Fig. 3, it is recorded The data l measured up to laser traces instrument when tested pointi1, the measurement until completing all 64 measuring points.It then carries out turning station, successively Laser traces instrument is moved to erect-position P2, erect-position P3, erect-position P4, erect-position P5, all tested points are completed by planning path running target mirror It measures and records measurement data lij, 5 × 64=320 numerical value is measured altogether.

Step 3:By 64 measuring point coordinates and the 320 measurement data l measuredijSubstitution formula (8) simultaneously solves equation group, i.e., The erect-position coordinate P of laser traces instrument can be solvedj(Xj,Yj,Yj)、PjTo A1The distance of point.

Step 4:By the coordinate of 64 measuring points, 320 measurement data lij, laser traces instrument erect-position coordinate Pj(Xj,Yj, Yj) and PjTo A1The distance d of pointjSubstitution formula (14) solves the space coordinate correction value that equation group can be obtained 64 measuring points.

Step 5:The precision of measuring point coordinate correction value is improved using iterative algorithm.It is as follows:

1. by 64 point coordinates (x to be measuredi|0,yi|0,zi|0) with obtained correction value (dxi,dyi,dzi) be added, obtain 64 A coordinate (xi|0',yi|0',zi|0');

2. by 64 coordinate (xi|0',yi|0',zi|0') and step 2 in obtained 320 lijSubstitution formula (8), solves To Pj'(Xj',Yj',Zj') and dj';

3. by (xi|0',yi|0',zi|0')、Pj'(Xj',Yj',Zj') and dj' formula (14) is substituted into, solution obtains in iteration Between correction value (dxi',dyi',dz'i).When iterations are equal to 1, by (dxi',dyi',dzi') obtained with step 4 (dxi,dyi,dzi) be compared;It, will be in the intermediate correction value and last iteration of current iteration when iterations are more than 1 Between correction value be compared, see whether the order of magnitude of numerical value is reducing, if there is reduction trend then need to subsequently continue iteration, Iteration is terminated if without reducing;

4. by (xi|0,yi|0,zi|0)、Pj'(Xj',Yj',Zj') and dj' substitute into formula (14), solve equation group obtain precision compared with High correction value;

5. 1. repeating step arrive process 4., wherein in 1. and (xi|0,yi|0,zi|0) carry out add operation correction value it is total Newest solution obtains, until iteration ends.

To determine that iterative algorithm is effective in the present invention, an emulation experiment has also been carried out herein to be verified. Emulation uses 18 measuring points, 4 erect-positions, the error of introducing and the result such as table 2 acquired.

3 error, non-iteration correction value, 1 correction value of iteration, iteration correction value (units of table 2x axis directions introducing: mm)

3 not iteration correction value, 1 correction value of iteration, iteration correction values are made comparisons with the error of introducing respectively, also may be used To be clear that, the error of the correction value acquired the introducing more more close than the correction value for being not added with iteration after iteration is added, Therefore iterative algorithm is effective, and the algorithm of iteration is added can obtain more accurately correction value than method before.

The data that previous experiments obtain are calculated by algorithm, the x-axis direction amendment of 64 finally acquired measuring point Value such as Fig. 5 a, y-axis adjustment in direction value such as Fig. 5 b, z-axis adjustment in direction value such as Fig. 5 c.It can be seen from the figure that CMM is without compensation X-axis measurement error is between -0.0026mm to 0.0035mm;Y-axis measurement error is between -0.0025mm to 0.0019mm;Z-axis Measurement error is between -0.0056mm to 0.0060mm.

Step 6:CMM is (x in the coordinate for measuring the Q points measured in spatial dimensionQ,yQ,zQ), determine that Q points are surveyed in grid Small cubes space belonging in quantity space, cubical eight vertex are respectively A, B, C, D, E, F, G, H, such as Fig. 6, and Determine corresponding coordinate, the space coordinate correction value of this 8 points is calculated by step 5, respectively ΔA、ΔB、ΔC、ΔD、 ΔE、ΔF、ΔG、ΔH、ΔQ, calculate corresponding k1、k2、k3, substitute into formula (17), you can and the space coordinate correction value of P points is found out, This completes the space coordinate amendments to pre-set space, such as Fig. 7 a, Fig. 7 b, Fig. 7 c.

By Fig. 7 a, Fig. 7 b, Fig. 7 c, it is clear that the x-axis of CMM, y-axis precision are preferable, and the precision of z axis is opposite It is poor;(270~340mm) × (700~800mm) × (- 500~-450mm), (200~240mm) × (800~850mm) × (- 540~-400mm) is that this grid measures the optimal measurement space divided.

Claims (1)

1. a kind of three coordinate measuring machine spatial domain coordinates compensation method measured based on laser traces instrument multi-court position, it is characterised in that: This method includes the following steps:
Step 1:Build laser traces instrument multi-court position measurement model;Under CMM coordinate systems, if it is A that CMM, which measures tested point in space,i (xi,yi,zi), wherein i=1,2,3 ..., n;The centre of sphere of laser traces instrument internal standard ball is O;The erect-position of laser traces instrument is sat It is designated as Pj(Xj,Yj,Zj), wherein j=1,2,3 ..., m;PjTo A1The distance of point is dj;The survey of laser traces instrument in measurement process Amount data are lij, following relationship is established by 2 range formulas of three dimensions:
Equation number is m × n, and unknown number number is 4m+3n;For make equation group can solution should meet:
m×n≥4m+3n (2)
Then m and n meets m >=4, n >=16;
Step 2:It divides and measures space, the vertex in small cubes space is tested point, determines tested point AiSpace model is measured in CMM Enclose interior coordinate value (xi,yi,zi);The erect-position of laser traces instrument is P1, control CMM movement target mirrors are according to the road planned Diameter is moved to tested point Ai, and measure the measurement data l of laser traces instrument at this timei1;Laser traces instrument is moved successively to each Erect-position Pj, wherein j=1,2,3 ..., m, and complete all tested point measurement data l by planning path running target mirrorijMeasurement;
Step 3:By formula (1) equal sign both sides simultaneously square and transplant obtain equation:
It enablesThen formula (3) is converted into:
Object function is defined as according to least square method:
Make F (Xj,Yj,Zj, k) and minimum, (5) formula should meet following condition:
Meet simultaneously:
Write formula (6) as matrix form:
Erect-position coordinate P can be obtained in solution formula (8)i(Xj,Yj,Zj) and dj
Step 4:Write formula (1) as error equation:
The error sum of squares obtained using Least Square in Processing formula (9) is:
Formula (10) is a nonlinear equation, and following calculating process is used for convenience of solving:
It enables
Taylor series expansion is carried out to formula (11) using Taylor series expansion, obtains following equation:
Formula (12) is substituted into formula (9), abbreviation has after arranging:
Wherein:Equation (13) is the solution after optimizing Model;In formula (12), (13), it is designated as |0It is the approximation of the numerical value, xi|0、yi|0、zi|0It is provided by CMM, Xj|0、Yj|0、Zj |0、djIt is obtained by solution equation group formula (8);
Enable vij=0, formula (13) is write as to the form of matrix:
Ax=B (14)
Wherein:
Wherein dxi、dyi、dziAnd dXj、dYj、dZjFor the correction value and erect-position P of tested point corresponding coordinatejThe amendment of corresponding coordinate Value;Tested point A can be obtained in solving equations (14)iCorrection value (dxi,dyi,dzi);
Step 5:According to formula (12), tested point A is influencediCorrection value (dxi,dyi,dzi) variable of precision has xi|0、yi|0、zi|0With Xj|0、Yj|0、Zj|0、dj, wherein xi|0、yi|0、zi|0It is determined as constant, therefore X after completing step 1j|0、Yj|0、Zj|0、dj The precision of solution directly affects (dxi,dyi,dzi) solving precision;X is improved using recursion alternative mannerj|0、Yj|0、Zj|0、dj The precision of solution;
The step of alternative manner, is as follows:
1. by point coordinates (x to be measuredi|0,yi|0,zi|0) with obtained correction value (dxi,dyi,dzi) be added, obtain (xi|0',yi |0',zi|0');
2. by (xi|0',yi|0',zi|0') and step 2 in obtained lijSubstitution formula (8), solution obtain Pj'(Xj',Yj',Zj') And dj';
3. by (xi|0',yi|0',zi|0')、Pj'(Xj',Yj',Zj') and dj' formula (14) is substituted into, the centre that solution obtains iteration is repaiied Positive value (dxi',dyi',dz'i);When iterations are equal to 1, by (dxi',dyi',dz'i) (the dx that obtains with step 4i,dyi, dzi) be compared;When iterations are more than 1, by the intermediate correction value of current iteration and the intermediate correction value of last iteration into Row compares, and sees whether the order of magnitude of numerical value is reducing, and if there is reduction trend then need to subsequently continue iteration, does not reduce such as Then terminate iteration;
4. by (xi|0,yi|0,zi|0)、Pj'(Xj',Yj',Zj') and dj' formula (14) is substituted into, it solves equation group and obtains high-precision repair Positive value;
5. 1. repeating step arrive process 4., wherein in 1. and (xi|0,yi|0,zi|0) carry out the correction value of add operation always most What new solution obtained, until iteration ends;
Step 6:Assuming that Q is any point that CMM is measured in measurement spatial dimension, coordinate is (xQ,yQ,zQ);Determine that Q points exist Small cubes space belonging in grid division space;If cubical 8 vertex are A, B, C, D, E, F, G, H, wherein plane For ADHE perpendicular to the x-axis of CMM, the distance of Q points to plane ADHE is Lx;Plane ABFE is perpendicular to the y-axis of CMM, Q points to plane The distance of ABFE is Ly;For plane ABCD perpendicular to the z-axis of CMM, the distance of Q points to plane ABCD is Lz
The measuring point correction value of A, B, C, D, E, F, G, H are obtained by step 5;Pass through formula (17) three using the correction value on 8 vertex The method of linear interpolation finds out the error correction values of the measuring point;
WhereinΔA、ΔB、ΔC、ΔD、ΔE、ΔF、ΔG、ΔH、ΔQ, be respectively A, B, C, D, the coordinate modification value of E, F, G, H, Q;
The Δ acquired using formula (17)QThe correction value is added the measuring point coordinate (x that CMM is provided by the spatial correction values of as Q pointsQ, yQ,zQ), as finally optimize obtained high-precision coordinate value.
CN201610461034.XA 2016-06-22 2016-06-22 A kind of three coordinate measuring machine spatial domain coordinates compensation method CN106052556B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610461034.XA CN106052556B (en) 2016-06-22 2016-06-22 A kind of three coordinate measuring machine spatial domain coordinates compensation method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610461034.XA CN106052556B (en) 2016-06-22 2016-06-22 A kind of three coordinate measuring machine spatial domain coordinates compensation method

Publications (2)

Publication Number Publication Date
CN106052556A CN106052556A (en) 2016-10-26
CN106052556B true CN106052556B (en) 2018-07-13

Family

ID=57168904

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201610461034.XA CN106052556B (en) 2016-06-22 2016-06-22 A kind of three coordinate measuring machine spatial domain coordinates compensation method

Country Status (1)

Country Link
CN (1) CN106052556B (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108007347B (en) * 2017-12-10 2019-07-26 北京工业大学 One kind being used for laser traces instrument geometric error compensation method
CN108170096B (en) * 2017-12-25 2019-11-22 南京鑫业诚智能科技有限公司 A kind of method that more laser feelers synchronize detection
CN108180831B (en) * 2017-12-30 2019-06-14 北京工业大学 Three coordinate measuring machine error of coordinate update the system uncertainty analysis method based on the measurement of laser traces instrument multi-court position
CN108225177B (en) * 2017-12-30 2020-03-13 北京工业大学 Standard ball fine-adjustment device for laser tracking measurement system
CN108375337B (en) * 2018-02-28 2020-02-11 邱观雄 Robot and method and device for measuring relative pose of process equipment of robot
CN109163675A (en) * 2018-08-01 2019-01-08 成都飞机工业(集团)有限责任公司 A method of angle swing shaft position precision is detected based on laser tracker
CN109884658A (en) * 2019-03-04 2019-06-14 北京工业大学 Laser traces instrument locating method based on laser traces instrument multistation level measuring system
CN109884659A (en) * 2019-03-04 2019-06-14 北京工业大学 Large-scale precision turntable scaling method based on laser traces instrument multistation level measuring system

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102062575A (en) * 2010-11-10 2011-05-18 西安交通大学 Method for detecting geometric accuracy of numerically-controlled machine tool based on multi-channel laser time-sharing measurement
CN102200429A (en) * 2011-04-06 2011-09-28 西安交通大学 Precision detection method for numerical control machine based on laser-tracking combined measurement
CN103447884A (en) * 2013-08-02 2013-12-18 西安交通大学 Numerical control machine tool translational shaft geometric error measuring device and measuring and identifying method
CN103499293A (en) * 2013-09-02 2014-01-08 西安交通大学 Virtual multi-station type measurement method of laser tracker of numerically-controlled machine tool
CN103712557A (en) * 2013-12-13 2014-04-09 北京工业大学 Laser tracking multi-station positioning method for super-large gears
CN104374317A (en) * 2014-11-06 2015-02-25 北京工业大学 Machine tool error calibration method based on multi-point measurement technology of laser tracker

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102062575A (en) * 2010-11-10 2011-05-18 西安交通大学 Method for detecting geometric accuracy of numerically-controlled machine tool based on multi-channel laser time-sharing measurement
CN102200429A (en) * 2011-04-06 2011-09-28 西安交通大学 Precision detection method for numerical control machine based on laser-tracking combined measurement
CN103447884A (en) * 2013-08-02 2013-12-18 西安交通大学 Numerical control machine tool translational shaft geometric error measuring device and measuring and identifying method
CN103499293A (en) * 2013-09-02 2014-01-08 西安交通大学 Virtual multi-station type measurement method of laser tracker of numerically-controlled machine tool
CN103712557A (en) * 2013-12-13 2014-04-09 北京工业大学 Laser tracking multi-station positioning method for super-large gears
CN104374317A (en) * 2014-11-06 2015-02-25 北京工业大学 Machine tool error calibration method based on multi-point measurement technology of laser tracker

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
基于空间坐标的三线性插值视觉定标算法;张景瑞等;《计算机工程与应用》;20020401;第84-85、97页 *
摄像机参数的三线性插值误差补偿标定方法;崔岸等;《农业机械学报》;20081031;第39卷(第10期);第187-190页 *

Also Published As

Publication number Publication date
CN106052556A (en) 2016-10-26

Similar Documents

Publication Publication Date Title
CN104515478B (en) A kind of automatic method for three-dimensional measurement of high-precision blade of aviation engine and system
CN103447884B (en) The measurement mechanism of Digit Control Machine Tool translation shaft geometric error and measurement and discrimination method
Aguado et al. Identification strategy of error parameter in volumetric error compensation of machine tool based on laser tracker measurements
CN101804521B (en) Galvanometer system correction device and correction method thereof
CN105404238B (en) A kind of linearisation scaling method of the gauge head pose in machine laser measurement
CN103737426B (en) A kind of Digit Control Machine Tool rotating shaft geometric error three line mensuration
ES2457791T3 (en) Procedure to determine geometric errors in a machine tool or measuring machine
CN101551240B (en) Large-scale gear measuring method based on laser tracking technology
CN105136031B (en) A kind of geometric error method for continuous measuring of five-axis linkage machine tools rotary shaft
CN102785129B (en) The online test method of the surface machining accuracy of complex parts
CN103389038B (en) Laser tracker set the goal multistation measure numerically-controlled machine geometric accuracy detection method
CN104858870A (en) Industrial robot measurement method based on tail end numbered tool
CN101655344B (en) Method for calibrating spatial coordinate measuring system of electronic theodolite
CN106354094B (en) Lathe slave laser scanning coordinate scaling method based on space criteria ball
CN103453849B (en) The complex curved surface parts method for three-dimensional measurement that many optical sensors are collaborative and system
CN102706277B (en) Industrial robot online zero position calibration device based on all-dimensional point constraint and method
Wang et al. The technical method of geometric error measurement for multi-axis NC machine tool by laser tracker
CN103256916B (en) Evaluation method of part flatness error based on minimum area
CN104374317B (en) Machine tool error scaling method based on laser tracker multimetering technology
Schmitt et al. Performance evaluation of iGPS for industrial applications
CN103218475B (en) A kind of complex space type surface Error Feedback compensation method based on testing and assessing at machine
CN103438798B (en) Initiative binocular vision system overall calibration
CN103143984B (en) Based on the machine tool error dynamic compensation method of laser tracker
CN103115593B (en) Scanning test head calibrating method
WO2013044677A1 (en) Large-scale, three-dimensional coordinate measuring method and apparatus with laser tracking

Legal Events

Date Code Title Description
PB01 Publication
C06 Publication
SE01 Entry into force of request for substantive examination
C10 Entry into substantive examination
GR01 Patent grant
GR01 Patent grant