CN106041722A - Universal center-adjustment loading mechanism for upper disc - Google Patents
Universal center-adjustment loading mechanism for upper disc Download PDFInfo
- Publication number
- CN106041722A CN106041722A CN201610566983.4A CN201610566983A CN106041722A CN 106041722 A CN106041722 A CN 106041722A CN 201610566983 A CN201610566983 A CN 201610566983A CN 106041722 A CN106041722 A CN 106041722A
- Authority
- CN
- China
- Prior art keywords
- bearing
- universal
- mandrel
- upper dish
- cross shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
Abstract
The invention discloses a universal center-adjustment loading mechanism for an upper disc. The loading mechanism comprises a main air cylinder. A piston rod of the main air cylinder is connected with a sensor and a connecting shaft. The connecting shaft is connected with a universal cross shaft upper joint. A universal joint and a universal cross shaft lower joint are arranged below the universal cross shaft upper joint. A mandrel is arranged at the outer sides of the universal cross shaft upper joint, the universal cross shaft lower joint and the universal joint in a sleeving manner. An upper bearing is arranged at the upper side of the mandrel, and a lower bearing is arranged at the lower side of the mandrel. An outer supporting sleeve is connected to the outer sides of the upper bearing, the lower bearing and the mandrel in a sleeving manner. A swivel joint upper flange is arranged at the top ends of the mandrel, the outer supporting sleeve and a rotary connecting sleeve, and a water-cooling universal shaft assembly is formed. The lower end of the outer supporting sleeve is connected with the upper disc through an upper disc bracket. By means of the mechanism, the center can be adjusted automatically; the radial load or the axial load or the combined load existing in the radial direction and the axial direction at the same time can be borne, and thus center adjustment and stress of an upper disc system are guaranteed; and in addition, buffered unloading of the pressure inertia generated when the upper disc is combined with a lower disc can also be guaranteed.
Description
Technical field
The present invention relates to grinder or buffing machine technical field, be specifically related to the universal regulation of mental activities load maintainer of dish in one.
Background technology
Two sides milling and polishing equipment be by upper and lower two work faces reverse utilize abrasive medium to enter around center as gyration
Row carries out two-sided grinding, Stress control aspect to surface of the work, and traditional all employings multistage pressure, pressure stage is by user
Self-defined, but produce impact when so there is pressure switching, thus produce the jumping phenomenon of workpiece stress, on the other hand, due to
The instability of system pressure, makes the processing of working process parameter (pressure, time, speed and lapping liquid granularity, concentration, flow)
Efficiency changes.This kind equipment has tended to efficient the most at present, and high-accuracy or ultrahigh precision direction is developed, and the upper and lower work of equipment
The laminating goodness of fit making face is critically important to converted products qualitative effects, directly contacts laminating according to two work surface rigidity, and they are two years old
The work surface goodness of fit and the depth of parallelism cannot ensure, and easy damage and crack processing workpiece during the contact of two work surfaces, it is therefore necessary to use one
Upper dish has automatic aligning band pressure buffer and the structure of pressure feedback complementation closed loop control function, in order to ensure two work surfaces
Flexible contact, reaches the purpose that the two work surface laminating goodnesses of fit, the depth of parallelism and pressure accurately control.
Summary of the invention
The problem that it is an object of the invention to overcome prior art to exist, it is provided that dish universal regulation of mental activities load maintainer in one,
Realize the flexible contact of two work surfaces, accomplish that the two work surface laminating goodnesses of fit, the depth of parallelism and pressure accurately control.
For realizing above-mentioned technical purpose, reaching above-mentioned technique effect, the present invention is achieved through the following technical solutions:
Dish universal regulation of mental activities load maintainer in one, including master cylinder, the piston rod of described master cylinder connects sensor respectively and connects
Axle, described spindle is connected with an articulated cross shaft top connection, is provided with universal joint and ten thousand below described articulated cross shaft top connection
Solid to it at the two ends up and down of universal joint respectively to cross axle lower contact, articulated cross shaft top connection and articulated cross shaft lower contact
Fixed location, the outer sheath at articulated cross shaft top connection, articulated cross shaft lower contact and universal joint has mandrel, described mandrel upper
Under be respectively provided on two sides with upper bearing (metal) and lower bearing, described upper bearing (metal), lower bearing and mandrel outer are socketed with outer support set, for right
Upper bearing (metal) and lower bearing carry out being respectively equipped with upper ball cover and lower axle outside the end face of horizontal direction location, upper bearing (metal) and lower bearing
Hold lid, described mandrel, outer support set and rotation female connector top and be provided with swivel coupling upper flange, form water-cooled universal drive shaft assembly,
Plate rail connection on one is passed through in the lower end of outer support set upper dish.
Further, this mechanism also includes mechanism's crossbeam, and described master cylinder is connected with mechanism's crossbeam by cylinder mounting plate.
Further, use adjustment screw to fix between described mandrel with cross axle lower contact to be connected.
Further, described upper bearing (metal) and lower bearing are thrust bearing.
Further, described support overcoat outer sheath is connected to rotate female connector, for protecting support overcoat.
Further, described outer support set is arranged over adjusting nut and upper ball cover, for upper bearing (metal) location and
Fixing.
Further, the top of described upper bearing (metal) and the bottom of lower bearing are provided with sealing ring, and the bottom of lower bearing is provided with
One adjusts screw fastens sealing ring, and the top of upper bearing (metal) is provided with the second adjustment screw and fastens sealing ring.
Further, described outer support is arranged over sealing ring, for protecting every liquid-tight envelope with the second adjustment screw below set
Protect bearing.
Further, described upper dish is connected with dish and drives plate, for the location when upper dish is combined.
The invention has the beneficial effects as follows:
The pressure that in the present invention, disc system is applied by cylinder, is provided with universal regulation of mental activities oscillating bearing between connecting rod and bearing block,
It can bear radial load, axial load or the most simultaneous joint load with Self-aligning, thus very well
The regulation of mental activities that ensure that disc system and stress, it is ensured that upper dish work surface and the flexible laminating completely of lower wall work surface, prevent
The twisting of two work surfaces, and then ensure that the quality problem such as flatness of processing part.Carrier is direct and upper dish by pole
Connecting, for the remaining installing space of upper dish water-cooled flow liquid, when also avoiding using two dishes to be directly connected to work, polishing fluid penetrates into two dishes
It is detained between face and forms impurity, protect cleaner working environment, be connected to countercylinder under master cylinder simultaneously, carry out the slow of pressure
Punching, it is ensured that upper dish buffering off-load of pressure inertia when lower wall is combined, and then protect the wink that processing part combines at two dishes
Between should not rupture.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention；
Fig. 2 is universal regulation of mental activities part partial enlargement structure chart in Fig. 1.
Label declaration in figure: 1, master cylinder；2, cylinder mounting plate；3, spindle；4, articulated cross shaft top connection；5, pulling force passes
Sensor；6, universal joint；7, articulated cross shaft lower contact；8, mandrel；9, outer support set；10, the first regulation screw；11, rotation connects
Set；12, upper bearing (metal)；13, lower bearing；14, swivel coupling upper flange；15, upper dish；16, upper plate rail；17, upper dish drives plate；18、
Lower ball cover；19, sealing ring；20, upper ball cover；21, second screw is adjusted.
Detailed description of the invention
Below with reference to the accompanying drawings and in conjunction with the embodiments, the present invention is described in detail.
Shown in seeing figures.1.and.2, dish universal regulation of mental activities load maintainer in one, including master cylinder 1, the work of described master cylinder 1
Stopper rod connects sensor 5 and spindle 3 respectively, and described spindle 3 is connected with an articulated cross shaft top connection 4, described universal cross
It is provided with universal joint 6 and articulated cross shaft lower contact 7 below axle top connection 4, connects under articulated cross shaft top connection 4 and articulated cross shaft
7 respectively at the two ends up and down of universal joint 6 to its stationary positioned, in articulated cross shaft top connection 4, articulated cross shaft lower contact 7
Have mandrel 8 with the outer sheath of universal joint 6, described mandrel 8 be respectively provided on two sides with upper bearing (metal) 12 and lower bearing 13 up and down, described on
Bearing 12, lower bearing 13 and mandrel 8 outer sheath are connected to outer support set 9, for upper bearing (metal) 12 and lower bearing 13 are carried out level side
To location, outside the end face of upper bearing (metal) 12 and lower bearing 13, it is respectively equipped with upper ball cover 20 and lower ball cover 18, described mandrel 8,
Outer support set 9 and rotation female connector 11 top are provided with swivel coupling upper flange 14, form water-cooled universal drive shaft assembly, outer support set 9
Lower end connected by plate rail 16 on and have upper dish 15.
This mechanism also includes that mechanism's crossbeam, described master cylinder 1 are connected with mechanism's crossbeam by cylinder mounting plate 2.
Use adjustment screw 10 to fix between described mandrel 8 and cross axle lower contact 7 to be connected.
Described upper bearing (metal) 12 and lower bearing 13 are thrust bearing.
Described support overcoat 9 outer sheath is connected to rotate female connector 11, for protecting support overcoat 9.
Described outer support set 9 is arranged over adjusting nut 21 and upper ball cover 20, for positioning upper bearing (metal) 12 and consolidating
Fixed.
The top of described upper bearing (metal) 12 and the bottom of lower bearing 13 are provided with sealing ring 19, and the bottom of lower bearing 13 is provided with first
Adjusting screw 10 to fasten sealing ring 19, the top of upper bearing (metal) 12 is provided with the second adjustment screw 21 and carries out sealing ring 19 tightly
Gu.
Described outer support is arranged over sealing ring 19, for protecting axle every liquid-tight envelope with the second adjustment screw 21 below set 9
Hold.
It is connected with dish on described upper dish 15 and drives plate 17, for the location when upper dish 15 is combined.
Furthermore, it is necessary to explanation, unless stated otherwise or point out, otherwise the term in description " first ", " the
Two ", " the 3rd " etc. describe be used only for distinguishing in description each assembly, element, step etc. rather than for representing each
Logical relation between assembly, element, step or ordering relation etc..
The foregoing is only the preferred embodiments of the present invention, be not limited to the present invention, for the skill of this area
For art personnel, the present invention can have various modifications and variations.All within the spirit and principles in the present invention, that is made any repaiies
Change, equivalent, improvement etc., should be included within the scope of the present invention.
Claims (9)
1. a upper dish universal regulation of mental activities load maintainer, including master cylinder (1), it is characterised in that the piston rod of described master cylinder (1)
Connecting sensor (5) and spindle (3) respectively, described spindle (3) is connected with an articulated cross shaft top connection (4), described universal
Cross axle top connection (4) lower section is provided with universal joint (6) and articulated cross shaft lower contact (7), articulated cross shaft top connection (4) and ten thousand
To cross axle lower contact (7) respectively at the two ends up and down of universal joint (6) to its stationary positioned, articulated cross shaft top connection (4),
The outer sheath of articulated cross shaft lower contact (7) and universal joint (6) has mandrel (8), being respectively provided on two sides with up and down of described mandrel (8)
Upper bearing (metal) (12) and lower bearing (13), described upper bearing (metal) (12), lower bearing (13) and mandrel (8) outer sheath are connected to outer support set
(9), for upper bearing (metal) (12) and lower bearing (13) are carried out horizontal direction location, upper bearing (metal) (12) and the end face of lower bearing (13)
Outside is respectively equipped with upper ball cover (20) and lower ball cover (18), described mandrel (8), outer support set (9) and rotation female connector (11)
Top is provided with swivel coupling upper flange (14), forms water-cooled universal drive shaft assembly, and plate rail on is passed through in the lower end of outer support set (9)
(16) connection has upper dish (15).
Upper dish the most according to claim 1 universal regulation of mental activities load maintainer, it is characterised in that this mechanism also includes that mechanism is horizontal
Beam, described master cylinder (1) is connected with mechanism's crossbeam by cylinder mounting plate (2).
Upper dish the most according to claim 1 universal regulation of mental activities load maintainer, it is characterised in that described mandrel (8) and cross axle
Use between lower contact (7) and adjust the fixing connection of screw (10).
Upper dish the most according to claim 1 universal regulation of mental activities load maintainer, it is characterised in that described upper bearing (metal) (12) and lower axle
Holding (13) is thrust bearing.
Upper dish the most according to claim 1 universal regulation of mental activities load maintainer, it is characterised in that described support overcoat (9) outside
It is socketed with rotation female connector (11), for support overcoat (9) is protected.
Upper dish the most according to claim 5 universal regulation of mental activities load maintainer, it is characterised in that on described outer support set (9)
Side is provided with adjusting nut (21) and upper ball cover (20), for upper bearing (metal) (12) is positioned and fixed.
Upper dish the most according to claim 1 universal regulation of mental activities load maintainer, it is characterised in that the top of described upper bearing (metal) (12)
Being provided with sealing ring (19) with the bottom of lower bearing (13), the bottom of lower bearing (13) is provided with the first adjustment screw (10) to sealing ring
(19) fastening, the top of upper bearing (metal) (12) is provided with the second adjustment screw (21) and fastens sealing ring (19).
8. according to the upper dish universal regulation of mental activities load maintainer described in claim 6 or 7, it is characterised in that described outer support is overlapped under (9)
Side and second adjusts screw (21) and is arranged over sealing ring (19), for protecting bearing every liquid-tight envelope.
Upper dish the most according to claim 1 universal regulation of mental activities load maintainer, it is characterised in that be connected with on described upper dish (15)
Upper dish drives plate (17), the location in time combining with upper dish (15).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610566983.4A CN106041722A (en) | 2016-07-19 | 2016-07-19 | Universal center-adjustment loading mechanism for upper disc |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610566983.4A CN106041722A (en) | 2016-07-19 | 2016-07-19 | Universal center-adjustment loading mechanism for upper disc |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106041722A true CN106041722A (en) | 2016-10-26 |
Family
ID=57187990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610566983.4A Pending CN106041722A (en) | 2016-07-19 | 2016-07-19 | Universal center-adjustment loading mechanism for upper disc |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106041722A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109514419A (en) * | 2018-12-21 | 2019-03-26 | 浙江晶盛机电股份有限公司 | A kind of precision twin grinder upper fixed disk core-regulating mechanism |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020077051A1 (en) * | 2000-12-14 | 2002-06-20 | Thomas Keller | Holder for flat workpieces, particularly semiconductor wafers |
| TW200426970A (en) * | 2003-04-28 | 2004-12-01 | Strasbaugh | Wafer carrier pivot mechanism |
| CN104772692A (en) * | 2015-03-27 | 2015-07-15 | 苏州赫瑞特电子专用设备科技有限公司 | Universal aligning and loading mechanism for upper plate |
| CN204565906U (en) * | 2015-03-27 | 2015-08-19 | 苏州赫瑞特电子专用设备科技有限公司 | A kind of universal aligning load maintainer of upper dish of Twp-sided polishing machine |
| CN206154089U (en) * | 2016-07-19 | 2017-05-10 | 苏州赫瑞特电子专用设备科技有限公司 | Universal aligning load mechanism of hanging wall |
-
2016
- 2016-07-19 CN CN201610566983.4A patent/CN106041722A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020077051A1 (en) * | 2000-12-14 | 2002-06-20 | Thomas Keller | Holder for flat workpieces, particularly semiconductor wafers |
| TW200426970A (en) * | 2003-04-28 | 2004-12-01 | Strasbaugh | Wafer carrier pivot mechanism |
| CN104772692A (en) * | 2015-03-27 | 2015-07-15 | 苏州赫瑞特电子专用设备科技有限公司 | Universal aligning and loading mechanism for upper plate |
| CN204565906U (en) * | 2015-03-27 | 2015-08-19 | 苏州赫瑞特电子专用设备科技有限公司 | A kind of universal aligning load maintainer of upper dish of Twp-sided polishing machine |
| CN206154089U (en) * | 2016-07-19 | 2017-05-10 | 苏州赫瑞特电子专用设备科技有限公司 | Universal aligning load mechanism of hanging wall |
Non-Patent Citations (1)
| Title |
|---|
| 苑希昌，张荣珍: "《制造技术小窍门集》", 30 November 1993, 兵器工业出版社 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109514419A (en) * | 2018-12-21 | 2019-03-26 | 浙江晶盛机电股份有限公司 | A kind of precision twin grinder upper fixed disk core-regulating mechanism |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20161026 |
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| RJ01 | Rejection of invention patent application after publication |