CN106025782A - Feedback control-based closed-loop power control system and method for CO2 radio frequency excited laser - Google Patents
Feedback control-based closed-loop power control system and method for CO2 radio frequency excited laser Download PDFInfo
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- CN106025782A CN106025782A CN201610574321.1A CN201610574321A CN106025782A CN 106025782 A CN106025782 A CN 106025782A CN 201610574321 A CN201610574321 A CN 201610574321A CN 106025782 A CN106025782 A CN 106025782A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/102—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
- H01S3/104—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation in gas lasers
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Abstract
The invention relates to a feedback control-based closed-loop power control system and method for a CO2 radio frequency excited laser, and relates to the field of power control of CO2 radio frequency excited lasers. The purpose of the invention is solve the problem of instable output power and poor control effect due to the fact that power control of a conventional CO2 radio frequency excited laser employs an open loop power control means. High-speed real-time detection of output optical power in combination with a specific feedback control algorithm realizes closed-loop negative feedback power control of the CO2 radio frequency excited laser, and the stability of the output optical power of the CO2 radio frequency excited laser can be greatly improved to satisfy applications with high requirement on optical power stability. Feedback control can improve the power control linearity of the CO2 radio frequency excited laser, which makes power adjustment easy to realize. Output power fluctuation of the CO2 radio frequency excited laser is suppressed to realize high stability of laser output power.
Description
Technical field
The present invention relates to CO2 radio frequency laser power control field.
Background technology
In general laser processing application, such as laser marking, cut etc., under open loop control mode
Laser power fluctuation amplitude be acceptable, but at some row the highest to laser power required precision
Industry, such as medical treatment, fused fiber splice processing and other fields, then can not meet requirement.In medical applications, CO2
Laser may be used for the destruction of tumor tissues and kills, and for preventing the injury of normal tissue, laser power must
The control of strict and steady must be carried out.At fused fiber splice, draw in the optical fiber processing application such as cone, only stable control
The system heating power of CO2 laser, guarantee processing effect.
Now widely used CO2 radio frequency laser many employings pwm power control mode regulation laser instrument
Output.Typically by one PWM square wave control signal of conveying to the input control of laser instrument radio-frequency power supply
End processed so that it is output is with the dutycycle linear change of PWM square wave, then by the output of radio-frequency power supply
Excitation CO2 radio frequency laser sends laser, thus realizes the output power to CO2 radio frequency laser.
Above-mentioned control process is the simple opened loop control by realizing the power adjustments of excitation power supply.
It practice, the laser output power of CO2 radio frequency laser is except by radio-frequency power supply exciting power shadow
Outside sound, the also many factors such as Stimulated Light device temperature, intracavity particle distribution impact, cause final output to swash
Luminous power is the cyclic fluctuation state of certain amplitude, and fluctuating margin is the highest up to ± 5%.
In terms of CO2 radio frequency laser power control, there is the academic article that many is published, but all collect
In in how realizing the open Loop Power control of CO2 laser instrument, such as:
1, " rf-excited co2 laser power controls and controller design "
It is published in: JournalofOptoelectronics Laser Vol.12No.2Feb.2001
2, " design of radio frequency CO2 laser instrument practicality power controller "
It is published in: " laser magazine ", 2004,25 (4): 20-21
3, " 2kW RF board bar CO2 laser power controls technical research "
It is published in: the Central China University of Science and Technology, 2014, master thesis, author: Wan Wen
But by it was verified that simple open Loop Power control mode is difficulty with laser output power
Highly stable.
Summary of the invention
The technical problem to be solved is to provide a kind of CO2 radio frequency laser based on feedback control
Closed loop power control system and method, it is therefore intended that solve current CO2 radio frequency laser power and control to use
The problem that the output that open Loop Power control mode causes is unstable, control poor effect.
The technical scheme is that a kind of CO2 based on feedback control penetrates
Frequency laser closed loop power control system, described system includes:
Feedback control module, controls input pwm signal for receiving the power of external control input input
With the power feedback signal of CO2 laser power detection module output, output drive power supply after controlling computing
Input signal is to radio-frequency (RF) excited power supply；
Radio-frequency (RF) excited power supply, is used for receiving excitation power supply input signal, and by the most defeated for this signal
Go out radio-frequency pulse to CO2 radio-frequency cavity；
CO2 radio-frequency cavity, is used for receiving radio-frequency pulse and inspiring CO2 laser sending to CO2 laser power
Detection module；
CO2 laser power detection module, generates transmission laser after CO2 laser carries out light-splitting processing
And power feedback signal.
The invention has the beneficial effects as follows: the present invention proposes a kind of sharp for realizing high power degree of stability CO2
The closed loop power control system of light device, by detecting the high speed of Output optical power in real time, coordinates specific
Feedback control algorithm, it is achieved control closed loop, the negative feedback power of CO2 radio frequency laser, can be significantly
Improve the output optical power stability of CO2 radio frequency laser, thus meet some and light power stabilising degree is had
The application scenario of high requirement.Feedback control can also improve the power control line degree of CO2 radio frequency laser,
Make power adjust to be more easily implemented.
The present invention uses CO2 laser power detection module that the output of CO2 radio frequency laser is carried out reality
Time detection, and the dynamic responding speed of detection module meets feedback control to use MCT detector ensure that
Requirement.And in CO2 radio frequency laser power controls, introduce closed loop feedback, by feedback CO2 radio frequency
Laser output power fluctuation suppresses, it is achieved laser output power highly stable, power swing width
Degree is better than ± 0.5%.
On the basis of technique scheme, the present invention can also do following improvement.
Further, described feedback control module includes:
PWM pulsewidth counting module, the power for being inputted by external control input controls input PWM letter
Number pulse width be converted to power target setting value, each pulse one set-point data of output；
Feedback control computing module, drives for calculating power supply according to power target setting value and Feedback of Power value
Dynamic execution value；
PWM pulse width modulation module, defeated for power drives execution value is converted into PWM pulse-width signal
Go out；
Power feedback signal AD conversion module, for controlling the rising edge of input pwm signal according to power
Start, each impulse sampling of Feedback of Power voltage signal is carried out an AD conversion, generates a merit
Rate value of feedback.
Further, described feedback control computing module includes:
Latch module, for latching power target setting value a and Feedback of Power value b；
Power target setting value clipping module, for carrying out amplitude limit to power target setting value a；
Computing module, holds for calculating power drives according to power target setting value a and Feedback of Power value b
Row value c；
Power drives execution value clipping module, for carrying out amplitude limit to power drives execution value c.
Further, described power drives execution value c=(a-b) * K, wherein, K is proportional control factor.
Further, described CO2 laser power detection module includes:
Spectroscope, for carrying out light-splitting processing, wherein the power warp of the 99% of CO2 laser to CO2 laser
Crossing spectroscope and form transmission laser output, the power of the 1% of CO2 laser forms reflection laser through spectroscope
It is incident to attenuator；
Attenuator, for decaying to reflection laser；
MCT infrared detector, sends extremely for the reflection laser after decay is converted to power feedback signal
Feedback control module.
Another technical scheme that the present invention solves above-mentioned technical problem is as follows: a kind of based on feedback control
CO2 radio frequency laser close-loop power controlling method, described method includes:
Feedback control step, controls input pwm signal for receiving the power of external control input input
And power feedback signal, output drive power supply input signal after controlling computing；
Radio-frequency (RF) excited step, for exporting RF pulse-to-pulse after processing and amplifying by excitation power supply input signal
Punching；
CO2 Laser emission step, for inspiring CO2 laser by radio-frequency pulse；
CO2 laser power detection step, generates transmission laser after CO2 laser carries out light-splitting processing
And power feedback signal.
The invention has the beneficial effects as follows: the present invention proposes a kind of sharp for realizing high power degree of stability CO2
The close-loop power controlling method of light device, by detecting the high speed of Output optical power in real time, coordinates specific
Feedback control algorithm, it is achieved control closed loop, the negative feedback power of CO2 radio frequency laser, can be significantly
Improve the output optical power stability of CO2 radio frequency laser, thus meet some and light power stabilising degree is had
The application scenario of high requirement.Feedback control can also improve the power control line degree of CO2 radio frequency laser,
Make power adjust to be more easily implemented.
Further, described feedback control step includes:
PWM pulsewidth counting step, the power for being inputted by external control input controls input PWM letter
Number pulse width be converted to power target setting value, each pulse one set-point data of output；
Feedback control calculation step, drives for calculating power supply according to power target setting value and Feedback of Power value
Dynamic execution value；
PWM pulse-width modulating step, defeated for power drives execution value is converted into PWM pulse-width signal
Go out；
Power feedback signal AD conversion step, for controlling the rising edge of input pwm signal according to power
Perform, each impulse sampling of Feedback of Power voltage signal is carried out an AD conversion, generates a merit
Rate value of feedback.
Further, described feedback control calculation step includes:
Latching step, for latching power target setting value a and Feedback of Power value b；
Power target setting value clipping step, for carrying out amplitude limit to power target setting value a；
Calculation procedure, holds for calculating power drives according to power target setting value a and Feedback of Power value b
Row value c；
Power drives execution value clipping step, for carrying out amplitude limit to power drives execution value c.
Further, described power drives execution value c=(a-b) * K, wherein, K is proportional control factor.
Further, described CO2 laser power detection step includes:
Spectroscopic step, for carrying out light-splitting processing, the wherein power of the 99% of CO2 laser to CO2 laser
Forming transmission laser output through light-splitting processing, the power of the 1% of CO2 laser is formed instead through light-splitting processing
Penetrate laser；
Attenuation step, for decaying to reflection laser；
MCT infrared detection steps, for the reflection laser after decay is converted to power feedback signal, and
Perform feedback control step.
Accompanying drawing explanation
Fig. 1 is the principle schematic of the closed loop power control system described in the embodiment of the present invention；
Fig. 2 is the principle schematic of the feedback control module 1 described in the embodiment of the present invention；
Fig. 3 is the principle schematic of the feedback control computing module 6 described in the embodiment of the present invention；
Fig. 4 is the principle schematic of the CO2 laser power detection module 4 described in the embodiment of the present invention；
Fig. 5 is the flow chart of the close-loop power controlling method described in the embodiment of the present invention；
Fig. 6 is the flow chart of the feedback control step described in the embodiment of the present invention；
Fig. 7 is the flow chart of the feedback control calculation step described in the embodiment of the present invention；
Fig. 8 is the flow chart of the CO2 laser power detection step described in the embodiment of the present invention.
In accompanying drawing, the list of parts representated by each label is as follows:
1, feedback control module, 2, radio-frequency (RF) excited power supply, 3, CO2 radio-frequency cavity, 4, CO2 laser merit
Rate detection module, 5, PWM pulsewidth counting module, 6, feedback control computing module, 7, PWM pulsewidth adjusts
Molding block, 8, power feedback signal AD conversion module, 9, latch module, 10, power target sets
Value clipping module, 11, computing module, 12, power drives execution value clipping module, 13, spectroscope,
14, attenuator, 15, MCT infrared detector.
Detailed description of the invention
Being described principle and the feature of the present invention below in conjunction with accompanying drawing, example is served only for explaining this
Invention, is not intended to limit the scope of the present invention.
Embodiment 1
As it is shown in figure 1, the present embodiment proposes a kind of CO2 radio frequency laser closed loop merit based on feedback control
Rate control system, described system includes:
Feedback control module 1, controls input PWM letter for receiving the power of external control input input
Number and the power feedback signal of CO2 laser power detection module 4 output, through controlling output drive after computing
Power supply input signal is to radio-frequency (RF) excited power supply 2.
Feedback control module 1 realizes based on CPLD/FPGA or DSP, is responsible for receiving external control input
The power control signal of input, generally PWM pulse-width signal, and from CO2 laser power detection
The power feedback signal of module 4, generally analog voltage signal, through internal control algorithm computing, give
Go out excitation power supply input signal to radio-frequency power supply.Excitation power supply input signal is still PWM pulse-width signal.
CO2 radio frequency laser frequency to PWM pulse-width signal in different application has Different Optimization requirement,
General upper limiting frequency is 100KHz.Feedback control module 1 needs each input pwm pulse is carried out computing
Processing, Pulse by Pulse provides excitation power supply input signal, and therefore its operational capability is complete in needing to reach 10 μ s
Become once-through operation.Feedback control module 1 needs to be acquired Feedback of Power voltage signal, and its AD turns
Change circuit picking rate and should be higher than that 100Ksps.
Radio-frequency (RF) excited power supply 2, is used for receiving excitation power supply input signal, and by this signal after treatment
Output radio-frequency pulse is to CO2 radio-frequency cavity 3.
Radio-frequency (RF) excited power supply 2 receives excitation power supply input signal, and the radio frequency within control occurs and amplifies electricity
Road, the high power RF pulse producing corresponding dutycycle exports CO2 radio-frequency cavity 3.
CO2 radio-frequency cavity 3, is used for receiving radio-frequency pulse and inspiring CO2 laser sending to CO2 laser merit
Rate detection module 4；
CO2 laser power detection module 4, generates transmission after CO2 laser carries out light-splitting processing and swashs
Light and power rate feedback signal.
The present embodiment proposes a kind of close-loop power control for realizing high power degree of stability CO2 laser instrument
System, by detecting the high speed of Output optical power in real time, coordinates specific feedback control algorithm, it is achieved
Closed loop, the negative feedback power of CO2 radio frequency laser is controlled, CO2 radio frequency laser can be greatly improved
Output optical power stability, thus meet some applied field that light power stabilising degree is had higher requirements
Close.Feedback control can also improve the power control line degree of CO2 radio frequency laser, makes power adjust and is more easy to
In realization.
Preferably, as in figure 2 it is shown, described feedback control module 1 includes:
PWM pulsewidth counting module 5, the power for being inputted by external control input controls input PWM
The pulse width of signal is converted to power target setting value, each pulse one set-point data of output.Number
Can select between 12bit to 16bit according to precision.
Feedback control computing module 6, for calculating power supply according to power target setting value and Feedback of Power value
Driving execution value；
PWM pulse width modulation module 7, for being converted into PWM pulse-width signal by power drives execution value
Output；And it is identical that the frequency of PWM pulse-width signal controls input pwm signal with power.
Power feedback signal AD conversion module 8, for controlling the rising edge of input pwm signal according to power
Start, each impulse sampling of Feedback of Power voltage signal is carried out an AD conversion, generates a merit
Rate value of feedback.
The a/d converter that power feedback signal AD conversion module 8 can be selected for portion's independence in or beyond DSP sheet is real
Existing, AD conversion accuracy selection 12bit to 16bit, AD conversion speed is not less than 100Ksps, concrete core
Sheet can be chosen according to practical situation.
In this preferred version, all modules can realize inside DSP, when feedback control module 1 by
When FPGA realizes, power feedback signal AD conversion module 8 needs to increase special AD conversion chip and realizes.
Preferably, as it is shown on figure 3, described feedback control computing module 6 includes:
Latch module 9, for latching power target setting value a and Feedback of Power value b；
Power target setting value clipping module 10, for carrying out amplitude limit to power target setting value a；
Computing module 11, for calculating power drives according to power target setting value a and Feedback of Power value b
Execution value c；
Power drives execution value clipping module 12, for carrying out amplitude limit to power drives execution value c.
Described power drives execution value c=(a-b) * K, wherein, K is proportional control factor.
Preferably, as shown in Figure 4, described CO2 laser power detection module 4 includes:
Spectroscope 13, for carrying out light-splitting processing, the wherein power of the 99% of CO2 laser to CO2 laser
Forming transmission laser output through spectroscope 13, the power of the 1% of CO2 laser is formed through spectroscope 13
Reflection laser light incident is to attenuator 14；
Attenuator 14, for decaying to reflection laser；
MCT infrared detector 15, sends for the reflection laser after decay is converted to power feedback signal
To feedback control module 1.
In this preferred version, CO2 laser power detection module 4 is by spectroscope 13, attenuator 14 and MCT
Infrared detector 15 3 part forms.The power of incident laser 99% forms transmission through spectroscope 13 and swashs
Light export, the power of the 1% of CO2 laser through spectroscope 13 formed reflection laser light incident to attenuator 14,
The parameter of attenuator 14 is measured power decision by incident laser power and the maximum of MCT infrared detector 15.
Spectroscope 13 can select the zinc selenide light splitting eyeglass of two or six optics, and attenuator 14 can be according to actual need
CFNT64-354 to be selected (transmitance 1%) or CFNT64-353 (transmitance 0.1%).
The Output of laser wavelength of CO2 laser instrument is generally 9.6 μm or 10.6 μm, thus be accordingly used in detection CO2
The infrared light power detector of laser power tackles the far red light of 9.6 μm to 10.6 μm to be had enough
Sensitivity.On the other hand, the response speed of infrared light power detector should be able to support the needs of closed loop control,
Its responsive bandwidth should be not less than 10KHz.
MCT infrared detector 15 can select J15D12-M204-S02M-60 (sensitivity 500V/W) or
J15D12-M204-S02M-60 (sensitivity 100V/W).
Embodiment 2
As it is shown in figure 5, the present embodiment proposes a kind of CO2 radio frequency laser closed loop based on feedback control
Poewr control method, described method includes:
Feedback control step, controls input pwm signal for receiving the power of external control input input
And power feedback signal, output drive power supply input signal after controlling computing；
Described feedback control step is to realize based on CPLD/FPGA or DSP, is responsible for receiving external control defeated
Enter to hold the power control signal of input, generally PWM pulse-width signal, and from CO2 laser power
The power feedback signal of detecting step, generally analog voltage signal, through control algolithm computing, output
Excitation power supply input signal.Excitation power supply input signal is still PWM pulse-width signal.CO2 radio frequency swashs
Light device frequency to PWM pulse-width signal in different application has Different Optimization requirement, general upper limit frequency
Rate is 100KHz.Feedback control step needs each input pwm pulse is carried out calculation process, by arteries and veins
Punching provides excitation power supply input signal, and therefore its operational capability completes once-through operation in needing to reach 10 μ s.
Further, need Feedback of Power voltage signal is acquired in feedback control step, its AD conversion electricity
Road picking rate should be higher than that 100Ksps.
Radio-frequency (RF) excited step, for exporting RF pulse-to-pulse after processing and amplifying by excitation power supply input signal
Punching；
Excitation power supply input signal is carried out radio frequency generation and amplification by radio-frequency (RF) excited step, produces and account for accordingly
The high power RF pulse of empty ratio also exports.
CO2 Laser emission step, for inspiring CO2 laser by radio-frequency pulse；
CO2 laser power detection step, generates transmission laser after CO2 laser carries out light-splitting processing
And power feedback signal.
The present embodiment proposes a kind of close-loop power control for realizing high power degree of stability CO2 laser instrument
Method, by detecting the high speed of Output optical power in real time, coordinates specific feedback control algorithm, it is achieved
Closed loop, the negative feedback power of CO2 radio frequency laser is controlled, CO2 radio frequency laser can be greatly improved
Output optical power stability, thus meet some applied field that light power stabilising degree is had higher requirements
Close.Feedback control can also improve the power control line degree of CO2 radio frequency laser, makes power adjust and is more easy to
In realization.
Preferably, as shown in Figure 6, described feedback control step includes:
PWM pulsewidth counting step, the power for being inputted by external control input controls input PWM letter
Number pulse width be converted to power target setting value, each pulse one set-point data of output.Data
Precision can select between 12bit to 16bit.
Feedback control calculation step, drives for calculating power supply according to power target setting value and Feedback of Power value
Dynamic execution value；
PWM pulse-width modulating step, defeated for power drives execution value is converted into PWM pulse-width signal
Go out；And it is identical that the frequency of PWM pulse-width signal controls input pwm signal with power.
Power feedback signal AD conversion step, for controlling the rising edge of input pwm signal according to power
Start, each impulse sampling of Feedback of Power voltage signal is carried out an AD conversion, generates a merit
Rate value of feedback.
Power feedback signal AD conversion step can be selected for the a/d converter of portion's independence in or beyond DSP sheet and realizes,
AD conversion accuracy selection 12bit to 16bit, AD conversion speed is not less than 100Ksps, and concrete chip can
Choose according to practical situation.
This preferred version can realize in steps inside DSP, when feedback control step is by FPGA
When realizing, power feedback signal AD conversion step needs increase special AD conversion chip and realizes.
Preferably, as it is shown in fig. 7, described feedback control calculation step includes:
Latching step, for latching power target setting value a and Feedback of Power value b；
Power target setting value clipping step, for carrying out amplitude limit to power target setting value a；
Calculation procedure, holds for calculating power drives according to power target setting value a and Feedback of Power value b
Row value c；
Power drives execution value clipping step, for carrying out amplitude limit to power drives execution value c.
Described power drives execution value c=(a-b) * K, wherein, K is proportional control factor.
Preferably, as shown in Figure 8, described CO2 laser power detection step includes:
Spectroscopic step, for carrying out light-splitting processing, the wherein power of the 99% of CO2 laser to CO2 laser
Forming transmission laser output through light-splitting processing, the power of the 1% of CO2 laser is formed instead through light-splitting processing
Penetrate laser
Attenuation step, for decaying to reflection laser；
MCT infrared detection steps, for the reflection laser after decay is converted to power feedback signal, and
Perform feedback control step.
In this preferred version, spectroscopic step uses spectroscope to realize, and attenuation step uses attenuator to realize,
MCT infrared detection steps uses MCT infrared detector to realize.
The power of incident laser 99% forms transmission laser output, the power of the 1% of CO2 laser through light splitting
Form reflection laser light incident to attenuator through spectroscope, the parameter of attenuator by incident laser power and
The maximum of MCT infrared detector measures power decision.Spectroscope can select the zinc selenide of two or six optics to divide
Light eyeglass, attenuator can select according to actual needs CFNT64-354 (transmitance 1%) or
CFNT64-353 (transmitance 0.1%).
The Output of laser wavelength of CO2 laser instrument is generally 9.6 μm or 10.6 μm, thus be accordingly used in detection CO2
The infrared light power detector of laser power tackles the far red light of 9.6 μm to 10.6 μm to be had enough
Sensitivity.On the other hand, the corresponding speed of infrared light power detector should be able to support the needs of closed loop control,
Its responsive bandwidth should be not less than 10KHz.
MTC infrared detector can select J15D12-M204-SO2M-60 (sensitivity 500V/W) or
J15D12-M204-SO2M-60 (sensitivity 100V/W).
The foregoing is only presently preferred embodiments of the present invention, not in order to limit the present invention, all in the present invention
Spirit and principle within, any modification, equivalent substitution and improvement etc. made, should be included in this
Within bright protection domain.
Claims (10)
1. a CO2 radio frequency laser closed loop power control system based on feedback control, its feature exists
In, it includes:
Feedback control module (1), controls input PWM for receiving the power of external control input input
The power feedback signal that signal and CO2 laser power detection module (4) export, defeated after controlling computing
Go out excitation power supply input signal；
Radio-frequency (RF) excited power supply (2), is used for receiving excitation power supply input signal, and by this signal process
Radio-frequency pulse is exported after reason；
CO2 radio-frequency cavity (3), is used for receiving radio-frequency pulse and inspiring CO2 laser；
CO2 laser power detection module (4), generates transmission after CO2 laser carries out light-splitting processing
Laser and power feedback signal.
A kind of CO2 radio frequency laser closed loop merit based on feedback control the most according to claim 1
Rate control system, it is characterised in that described feedback control module (1) including:
PWM pulsewidth counting module (5), controls input for the power inputted by external control input
The pulse width of pwm signal is converted to power target setting value, each pulse one set-point data of output；
Feedback control computing module (6), for calculating according to power target setting value and Feedback of Power value
Power drives execution value:
PWM pulse width modulation module (7), for being converted into PWM pulsewidth modulation letter by power drives execution value
Number output；
Power feedback signal AD conversion module (8), for controlling input pwm signal according to power
Rise along starting, each impulse sampling of Feedback of Power voltage signal is carried out an AD conversion, generate one
Individual Feedback of Power value.
A kind of CO2 radio frequency laser closed loop merit based on feedback control the most according to claim 2
Rate control system, it is characterised in that described feedback control computing module (6) including:
Latch module (9), for latching power target setting value a and Feedback of Power value b；
Power target setting value clipping module (10), for carrying out amplitude limit to power target setting value a；
Computing module (11), for calculating power supply according to power target setting value a and Feedback of Power value b
Driving execution value c:
Power drives execution value clipping module (12), for carrying out amplitude limit to power drives execution value c.
A kind of CO2 radio frequency laser closed loop merit based on feedback control the most according to claim 3
Rate control system, it is characterised in that described power drives execution value c=(a-b) * K, wherein, K is
Proportional control factor.
A kind of CO2 radio frequency laser closed loop merit based on feedback control the most according to claim 1
Rate control system, it is characterised in that described CO2 laser power detection module (4) including:
Spectroscope (13), for CO2 laser being carried out light-splitting processing, wherein the 99% of CO2 laser
Power forms transmission laser output through spectroscope (13), and the power of the 1% of CO2 laser is through spectroscope
(13) reflection laser light incident is formed to attenuator (14)；
Attenuator (14), for decaying to reflection laser；
MCT infrared detector (15), for being converted to power feedback signal by the reflection laser after decay
Send to feedback control module (1).
6. a CO2 radio frequency laser close-loop power controlling method based on feedback control, its feature exists
In, described method includes:
Feedback control step, controls input pwm signal for receiving the power of external control input input
And power feedback signal, output drive power supply input signal after controlling computing；
Radio-frequency (RF) excited step, for exporting radio-frequency pulse after treatment by excitation power supply input signal；
CO2 Laser emission step, for inspiring CO2 laser by radio-frequency pulse；
CO2 laser power detection step, generates transmission laser after CO2 laser carries out light-splitting processing
And power feedback signal.
A kind of CO2 radio frequency laser closed loop merit based on feedback control the most according to claim 6
Rate control method, it is characterised in that described feedback control step includes:
PWM pulsewidth counting step, the power for being inputted by external control input controls input PWM letter
Number pulse width be converted to power target setting value, each pulse one set-point data of output；
Feedback control calculation step, drives for calculating power supply according to power target setting value and Feedback of Power value
Dynamic execution value:
PWM pulse-width modulating step, defeated for power drives execution value is converted into PWM pulse-width signal
Go out:
Power feedback signal AD conversion step, for controlling the rising edge of input pwm signal according to power
Perform, each impulse sampling of Feedback of Power voltage signal is carried out an AD conversion, generates a merit
Rate value of feedback.
A kind of CO2 radio frequency laser closed loop merit based on feedback control the most according to claim 7
Rate control method, it is characterised in that described feedback control calculation step includes:
Latching step, for latching power target setting value a and Feedback of Power value b；
Power target setting value clipping step, for carrying out amplitude limit to power target setting value a；
Calculation procedure, holds for calculating power drives according to power target setting value a and Feedback of Power value b
Row value c:
Power drives execution value clipping step, for carrying out amplitude limit to power drives execution value c.
A kind of CO2 radio frequency laser closed loop merit based on feedback control the most according to claim 8
Rate control method, it is characterised in that described power drives execution value c=(a-b) * K, wherein, K is
Proportional control factor.
A kind of CO2 radio frequency laser closed loop merit based on feedback control the most according to claim 6
Rate control method, it is characterised in that described CO2 laser power detection step includes:
Spectroscopic step, for carrying out light-splitting processing, the wherein power of the 99% of CO2 laser to CO2 laser
Forming transmission laser output through light-splitting processing, the power of the 1% of CO2 laser is formed instead through light-splitting processing
Penetrate laser:
Attenuation step, for decaying to reflection laser；
MCT infrared detection steps, for the reflection laser after decay is converted to power feedback signal, and
Perform feedback control step.
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| CN113075894A (en) * | 2021-03-24 | 2021-07-06 | 中国科学院空天信息创新研究院 | CO based on radio frequency power supply2Intelligent development control system for laser |
| WO2023184857A1 (en) * | 2022-03-31 | 2023-10-05 | 广州童心制物科技有限公司 | Laser system and laser driving method |
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Application publication date: 20161012 |