CN106025776A - Laser coherent beam combination coupled resonant cavity of polarization diffraction grating - Google Patents
Laser coherent beam combination coupled resonant cavity of polarization diffraction grating Download PDFInfo
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- CN106025776A CN106025776A CN201610588778.8A CN201610588778A CN106025776A CN 106025776 A CN106025776 A CN 106025776A CN 201610588778 A CN201610588778 A CN 201610588778A CN 106025776 A CN106025776 A CN 106025776A
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- diffraction grating
- laser
- polarizing diffraction
- mirror
- grating
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
- H01S3/082—Construction or shape of optical resonators or components thereof comprising three or more reflectors defining a plurality of resonators, e.g. for mode selection or suppression
- H01S3/0823—Construction or shape of optical resonators or components thereof comprising three or more reflectors defining a plurality of resonators, e.g. for mode selection or suppression incorporating a dispersive element, e.g. a prism for wavelength selection
- H01S3/0826—Construction or shape of optical resonators or components thereof comprising three or more reflectors defining a plurality of resonators, e.g. for mode selection or suppression incorporating a dispersive element, e.g. a prism for wavelength selection using a diffraction grating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
- H01S3/0941—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
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- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
The invention discloses a laser coherent beam combination coupled resonant cavity of a polarization diffraction grating, which comprises semiconductor lasers, grain units, a polarization diffraction grating, reflecting mirrors and an output mirror, and is characterized in that the grain units and the polarization diffraction grating are arranged in the coupled resonant cavity; the reflecting mirrors and the output mirror are distributed at two ends of a coherent beam combination system respectively; the semiconductor laser light is pump light, wherein the central wavelength of the semiconductor laser light is matched with an absorption spectrum of the grain units in the resonant cavity; and the polarization diffraction grating is a beam splitting/combining device, and the theoretical beam splitting/combining efficiency of the polarization diffraction grating reaches 99%. The laser coherent beam combination coupled resonant cavity can overcome a heat effect, a nonlinear effect and the like caused along with increase in output power of a traditional laser system, and the high efficiency of the grating device can reduce the cost and the size of the coherent beam combination system. Meanwhile, the laser coherent beam combination coupled resonant cavity can realize laser output with high power and high beam combination efficiency.
Description
One, technical field
The invention belongs to laser technology field and relate to the coherent laser beam combination coupling of a kind of polarizing diffraction grating
Resonator cavity, restraints efficiency, the coherent laser beam combination coupled resonator of high coherence particularly to a kind of high conjunction.
Two, background technology
Along with industry and the development of military technology, superlaser output energy and beam quality are proposed more
Carry out the highest requirement.Laser by its monochromaticity, directivity and the advantage of coherence, industry,
The fields such as agricultural, military, medical treatment and scientific and technical innovation all play very important role, and these
Application is required for laser instrument high power and high light beam quality.Based on the demand, one polarization is proposed
The coherent laser beam combination coupled resonator of diffraction grating.
Dynamic and the subject matter of coherent laser beam combination coupled system at present:
1, conventional laser system along with the increase of output can run into heat effect, nonlinear effect and
The physics bottlenecks such as physical damnification are so that cannot continue to improve output.By using novel cavity shape structure
Laser instrument, as permissible in video disc laser instrument, slab laser and big mode field area optical fiber laser slow
Solve the problems referred to above, but its output also can be subject to certain restrictions.
2, coherent laser beam combination technology is not conceived to promote the physics limit of single laser instrument, but passes through
Coupled resonator or MOPA structure (Master Oscillator Power Amplifier) are by some
The output of laser element carry out optics coherence tomography.Traditional laser closes the efficiency of beam system and is extremely difficult to
50%, and can increase along with the laser cell closing bundle and reduce, and this invention is to make with polarizing diffraction grating
Using bundling device part, its theoretical bundle efficiency of closing is up to 99%, and in closing beam system, closes bundle due to each
The operation power of unit, within its physics limit, so above-mentioned bottleneck problem will not be run into, and owns
The output sum closing Shu Danyuan then brings the tremendous increase closing beam system gross output.Close Shu Danyuan
The high coherence of light beam in turn ensure that higher beam quality.
Three, summary of the invention
For disadvantages described above and the Improvement requirement of prior art, the invention provides a kind of high power, height
The coherent laser beam combination coupled resonator of beam quality, it is therefore intended that solve to close the output work in beam system
The problems such as rate is the highest, transformation efficiency is low.
The present invention proposes a kind of coherent laser beam combination coupled resonator comprising polarizing diffraction grating, including
Upper, middle and lower reflecting mirror, upper, middle and lower gain unit, upper, middle and lower semiconductor laser, partially
Shake diffraction grating and outgoing mirror；
Described upper, middle and lower reflecting mirror is symmetrical arranged from top to bottom, wherein, and middle reflecting mirror and outgoing mirror
Coaxial being oppositely arranged, both optical axis center lines are provided with polarizing diffraction grating, in the reflection of each reflecting mirror
The heart is all equidistant with the optical axis center of polarizing diffraction grating；Light between each reflecting mirror and polarizing diffraction grating
Upper, middle and lower gain unit it is respectively equipped with on road；Outgoing mirror collectively constitutes with upper, middle and lower reflecting mirror
Resonator cavity；
Described upper, middle and lower semiconductor laser is arranged respectively close to upper, middle and lower gain unit, respectively
Laser output window is directed at the positive middle part of each gain unit of each gain unit side；
Described semiconductor laser is used for producing pump light；Described gain unit is arranged on for amplifying coupling
Close the laser of intracavity transmission；Described polarizing diffraction grating is for endovenous laser beam splitting/conjunction bundle；Described output
Mirror is positioned at resonator cavity right-hand member, exports for laser beam；
During work, each semiconductor laser produces initial pump light, after each gain unit amplifies
Three beams pump light, after each reflecting mirror reflects, arrive and be combined into after polarizing diffraction grating a branch of, close bundle
After laser power without reaching the threshold value of resonator cavity, close Shu Guanghui and reflect through outgoing mirror, by
Polarizing diffraction grating is divided into three beams, and three light beams amplify through each gain unit again, is again reflected and closes bundle,
Until after reaching the threshold value of resonator cavity, outgoing mirror output closing the laser after bundle.
Further, described each reflecting mirror is made up of the odd number mirror coating more than 3, higher to obtain
Laser power.
Further, described each reflecting mirror circle centrosymmetry polarizing diffraction grating, higher sharp to obtain
Luminous power.
Further, the substrate of described polarizing diffraction grating is that low-expansion monocrystal silicon is through overexposure
Light, develop, etch grating pattern carve on the monosilicon.
Further, described each reflecting mirror is high reflection mirror, is the back side at optical glass, by very
Empty plated film plating layer of metal silver or aluminum thin film.
Further, described each gain unit be Nd:YAG crystal or other there is the crystal of gain function
Composition, controls element by high-accuracy mechanical and fixes.
Further, described polarizing diffraction grating is sub-wave length grating, and grating is divided into etc. high
Wide multiple boxed area, the optical grating construction in each region is binary form.Can be by controlling each region
Structural parameters, realize homenergic and any number of beam splitting.
Further, the cycle of structure of grid in each region of described polarizing diffraction grating, deflection,
Dutycycle is different, and its installation site can control element by high-accuracy mechanical and carry out minute movement.
Further, described polarizing diffraction grating is replaced can be Darman raster.
Further, the polarizing diffraction of the coherent laser beam combination coupled resonator of described polarizing diffraction grating
The substrate of grating be low-expansion monocrystal silicon through Wafer Cleaning, front baking and pre-treatment, spin coating,
Mask and alignment, expose, expose after bake, development, figure inspection, etching obtain polarizing diffraction grating.
Further, the polarizing diffraction of the coherent laser beam combination coupled resonator of described polarizing diffraction grating
The cycle of structure of grid in each region of grating, deflection, dutycycle difference, its installation site can
Control element by high-accuracy mechanical and carry out minute movement.
It is big that polarizing diffraction grating of the present invention refers to select the polarization direction of incident illumination
Measure the optical element that the parallel slits of the most wide Unequal distance is constituted.
The coherent laser beam combination coupled resonator that the present invention proposes, combines polarizing diffraction grating and divides/close bundle
The advantage that efficiency is high, effectively solves conventional laser system and can run into along with the increase of output
Heat effect, nonlinear effect and physical damnification, it is possible to achieve high power, the laser of high light beam quality
Output.This coupled resonator can effectively solve coherent laser beam combination system low conversion efficiency problem,
Make to reduce the volume of cooling device, the optics coherence tomography of optical fiber laser had important evocation,
And it is expected to rise to laser power new magnitude.It is different from traditional coherent laser beam combination system,
Polarizing diffraction grating is as dividing/bundling device part, and its efficiency is far above other device, and in this invention
Grating device is divided into a lot of boxed area through quantification treatment, and the direction in each region, cycle, accounts for
Empty ratio, the polarization state of incident illumination can be regulated and controled, thus obtain by the difference of these parameters arbitrarily
Homenergic and any number of beamlet, then carry out Laser coherent combining through gain unit amplification, from
And realize high power, high light beam quality laser output, compared with prior art, this grating have as
Lower advantage:
(1) add polarizing diffraction grating as point/clutch part, coherent laser beam combination system mould can be changed
Formula selects, random phase wave characteristic, can solve by controlling element based on active polarization or alleviate phase
The problem of random phase fluctuation in dry conjunction beam system.So can substitute for conventional laser and use choosing
Mould (phase-locked) mechanism, improves the conversion efficiency of laser instrument, the beneficially output of high power laser light.
(2) pumping semiconductor laser is by end pumping to gain unit, improve its pump intensity and
Efficiency, adds the collision area of itself and gain unit particle, thus adds both collision probabilities,
Therefore pumping quality and the pumping efficiency of semiconductor laser it are greatly improved.
(3) polarizing diffraction rastering laser coherently combined system is made up of multiple gain units, gain unit
Positional symmetry arrangement, this kind of structure is that the splitting properties according to polarizing diffraction grating is determined, permissible
Effectively carry out transmission and the amplification of laser, to improve the power of laser output.
Accompanying drawing explanation
Fig. 1 is the end face of the coherent laser beam combination coupled resonator of the polarizing diffraction grating that the present invention provides
Schematic diagram；
Fig. 2 is the polarization of the coherent laser beam combination coupled resonator of the polarizing diffraction grating that the present invention provides
The mask plate schematic diagram of diffraction grating；
In all of the figs, identical reference is used for representing identical element or structure, wherein:
11,12,13---reflecting mirror, 21,22,23---gain unit, 31,32,33---quasiconductor swashs
Light device, 4---polarizing diffraction grating, 5---outgoing mirror.
Four, detailed description of the invention
In order to make the purpose of the present invention, technical scheme and advantage clearer, below in conjunction with accompanying drawing
And embodiment, the present invention is further elaborated.Should be appreciated that described herein specifically
Embodiment only in order to explain the present invention, is not intended to limit the present invention.Additionally, it is disclosed below
Just may be used as long as technical characteristic involved in each embodiment of the present invention does not constitutes conflict each other
To be mutually combined.
In an embodiment of the present invention, the laser coherence using the polarizing diffraction grating of present invention offer closes
The working method of bundle coupled resonator, specific as follows:
Refer to shown in Fig. 1, Fig. 2, as seen from the figure, in the present embodiment, the laser of polarizing diffraction grating
Coherently combined coupled resonator includes reflecting mirror (11,12,13), gain unit (21,22,23),
Semiconductor laser (31,32,33), polarizing diffraction grating, outgoing mirror.Wherein reflecting mirror (11,
12,13) light beam amplified through gain unit (21,22,23) has to make it ensure by coating technique
High reflection characteristic, described reflecting mirror (11,12,13) is had to be made up of three pieces of mirror coatings, upper and lower two
Block is symmetrically placed in the left end of coherent laser beam combination system, and multiple reflecting mirrors use to improve system simultaneously
Output；Described semiconductor laser is used for producing pump light, and the pump light sent is by excitation
Gain unit (21,22,23), obtains the pump light of coherently combined, and seed light is at coupled resonator not
Disconnected round-trip transmission, and constantly amplified by gain unit (21,22,23), finally obtain laser defeated
Go out；Described outgoing mirror 5 is partially reflecting mirror, be positioned at close beam system right-hand member, with reflecting mirror (11,
12,13) collectively constitute resonator cavity, most luminous reflectance can be gone back, the power after closing bundle
When reaching the threshold value of coupled resonator, through outgoing mirror 5 Output of laser；4, described polarizing diffraction grating
In the centre of coupled resonator, its substrate be low-expansion monocrystal silicon then expose, develop,
Etch and parallel lines carved on the monosilicon, for beam splitting/conjunction Shu Zuoyong, by gain unit (21,22,
23), after the seed light produced is reflected mirror (11,12,13) reflection, polarizing diffraction grating 4 is arrived
The rear bundle that closes, after reflect through outgoing mirror 5, polarizing diffraction grating 4 be split, the son after beam splitting
Light beam amplifies through gain unit again, be different from traditional phase place, amplitude grating be that this grating can be real
Now enter any regulation and control of polarization state, to realize homenergic and any number of beam splitting；Described gain
Unit (21,22,23) is distributed in reflecting mirror (11,12,13) and polarization spreads out by angled
Penetrate the centre of grating 4, form, for real for Nd:YAG crystal or other crystal with gain function
The amplification of existing light beam；Described reflecting mirror (11,12,13) is high reflection mirror, at optical glass
The back side, by vacuum coating plating layer of metal silver (or aluminum) thin film；Described polarizing diffraction grating 4 is
Sub-wave length grating, and grating is processed as multiple boxed area, the optical grating construction in each region by quantization
For binary form, and the cycle of the structure of grid in each region, deflection, dutycycle are different, its peace
Holding position can control element by high-accuracy mechanical and carry out minute movement.
Selecting as one, described polarizing diffraction grating is used as Darman raster, and it can be by one
Bundle coherent light is divided into the equicohesive coherent light of some bundles, or will meet the coherent beam battle array of phase relation
Row synthesis light beam, but its theoretical beam splitting efficiency is lower.
In general, the present invention is in terms of restrainting efficiency and high-power laser output etc. with high efficiency conjunction
Consider, it is provided that the coherent laser beam combination coupled resonator of a kind of polarizing diffraction grating.
As it will be easily appreciated by one skilled in the art that and the foregoing is only presently preferred embodiments of the present invention,
Not in order to limit the present invention, all made within the spirit and principles in the present invention any amendment, etc.
With replacement and improvement etc., should be included within the scope of the present invention.
Claims (9)
1. a coherent laser beam combination coupled resonator for polarizing diffraction grating, anti-including upper, middle and lower
Penetrate mirror (11,12,13), upper, middle and lower gain unit (21,22,23), upper, middle and lower half
Conductor laser (31,32,33), polarizing diffraction grating (4) and outgoing mirror (5), its feature exists
In:
Upper, middle and lower reflecting mirror (11,12,13) is symmetrical arranged from top to bottom, wherein, and middle reflection
Mirror (12) and outgoing mirror (5) is coaxial is oppositely arranged, both are provided with polarizing diffraction light by optical axis center line
Grid (4), the reflection kernel of each reflecting mirror is all equidistant with the optical axis center of polarizing diffraction grating (4)；Respectively
Be respectively equipped with in light path between reflecting mirror and polarizing diffraction grating (4) upper, middle and lower gain unit (21,
22、23)；Outgoing mirror (5) and upper, middle and lower reflecting mirror (11,12,13) collectively constitute resonance
Chamber；
Upper, middle and lower semiconductor laser (31,32,33) is respectively close to upper, middle and lower gain list
Unit (21,22,23) is arranged, and each laser output window is directed at each gain list of each gain unit side
The positive middle part of unit；
Described semiconductor laser (31,32,33) is used for producing pump light；Described gain unit (21,
22,23) laser of transmission it is arranged in amplifying coupled cavity；Described polarizing diffraction grating (4) is used
In endovenous laser beam splitting/conjunction bundle；Described outgoing mirror (5) is positioned at resonator cavity right-hand member, exports for laser beam；
During work, each semiconductor laser (31,32,33) produces initial pump light, through each
Three beams pump light after gain unit (21,22,23) amplification, through each reflecting mirror (11,12,13)
After reflection, be combined into a branch of after arriving polarizing diffraction grating (4), close the laser power after bundle without
Reach the threshold value of resonator cavity, close Shu Guanghui and reflect through outgoing mirror (5), by polarizing diffraction grating (4)
Being divided into three beams, three light beams amplify through each gain unit again, are again reflected and close bundle, until reaching humorous
After the threshold value in chamber of shaking, outgoing mirror (5) output close the laser after bundle.
Resonator cavity the most according to claim 1, it is characterised in that described each reflecting mirror is by being more than
The odd number mirror coating composition of 3, to obtain higher laser power.
Resonator cavity the most according to claim 2, it is characterised in that described each reflecting mirror circle center
Symmetric polarized diffraction grating, to obtain higher laser power.
Resonator cavity the most according to claim 1, it is characterised in that described polarizing diffraction grating
Substrate is low-expansion monocrystal silicon through overexposure, develops, etches grating pattern is engraved in monocrystalline
On silicon.
Resonator cavity the most according to claim 1 and 2, it is characterised in that described each reflecting mirror is
High reflection mirror, is the back side at optical glass, by vacuum coating plating layer of metal silver or aluminum thin film.
Resonator cavity the most according to claim 1 and 2, it is characterised in that described each gain unit
Form for Nd:YAG crystal or other crystal with gain function, control element by high-accuracy mechanical
Fixing.
Resonator cavity the most according to claim 1 and 2, it is characterised in that described polarizing diffraction light
Grid are sub-wave length grating, and grating is divided into contour wide multiple boxed area, each region
Optical grating construction is binary form.
8. according to the resonator cavity described in claim 1,2 or 6, it is characterised in that described polarizing diffraction
The cycle of structure of grid in each region of grating, deflection, dutycycle difference, its installation site can
Control element by high-accuracy mechanical and carry out minute movement.
Resonator cavity the most according to claim 1 and 2, it is characterised in that described polarizing diffraction grating
It can be Darman raster.
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| CN201610588778.8A CN106025776B (en) | 2016-07-25 | 2016-07-25 | Laser coherent beam combination coupling resonant cavity of polarization diffraction grating |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111313221A (en) * | 2020-03-19 | 2020-06-19 | 长春理工大学 | Laser for directly generating double-path coherent light |
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| CN1652021A (en) * | 2005-02-07 | 2005-08-10 | 中国科学院光电技术研究所 | Raster polarization photomask plate and its application in projection photoetching system |
| US20060077552A1 (en) * | 2003-10-07 | 2006-04-13 | Rene Helbing | Wavelength selective switching device and method for selectively transmitting optical signals based on wavelength |
| CN101159365A (en) * | 2007-09-27 | 2008-04-09 | 中国人民解放军空军工程大学 | Multi-path optical fiber laser coherent beam combination device and coherent beam combination method |
| CN205985737U (en) * | 2016-07-25 | 2017-02-22 | 华中科技大学 | Coupling resonant cavity is restrainted to polarization diffraction grating's relevant closing of laser |
-
2016
- 2016-07-25 CN CN201610588778.8A patent/CN106025776B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63244333A (en) * | 1987-03-31 | 1988-10-11 | Hitachi Ltd | Waveguide type optical head |
| CN1495977A (en) * | 2002-08-28 | 2004-05-12 | ������������ʽ���� | Semiconductor laser device and optical read-writing device |
| US20060077552A1 (en) * | 2003-10-07 | 2006-04-13 | Rene Helbing | Wavelength selective switching device and method for selectively transmitting optical signals based on wavelength |
| CN1652021A (en) * | 2005-02-07 | 2005-08-10 | 中国科学院光电技术研究所 | Raster polarization photomask plate and its application in projection photoetching system |
| CN101159365A (en) * | 2007-09-27 | 2008-04-09 | 中国人民解放军空军工程大学 | Multi-path optical fiber laser coherent beam combination device and coherent beam combination method |
| CN205985737U (en) * | 2016-07-25 | 2017-02-22 | 华中科技大学 | Coupling resonant cavity is restrainted to polarization diffraction grating's relevant closing of laser |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111313221A (en) * | 2020-03-19 | 2020-06-19 | 长春理工大学 | Laser for directly generating double-path coherent light |
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