CN106019526A - Fine adjustment device for lens barrel focusing - Google Patents
Fine adjustment device for lens barrel focusing Download PDFInfo
- Publication number
- CN106019526A CN106019526A CN201610586054.XA CN201610586054A CN106019526A CN 106019526 A CN106019526 A CN 106019526A CN 201610586054 A CN201610586054 A CN 201610586054A CN 106019526 A CN106019526 A CN 106019526A
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- CN
- China
- Prior art keywords
- seat
- lens barrel
- adjustment
- plummer
- screw
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
- G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
- G03F9/7026—Focusing
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Lens Barrels (AREA)
Abstract
The invention relates to a fine adjustment device for lens barrel focusing. Compared with the prior art, the fine adjustment device solves the defect that fine adjustment of a lens barrel is difficult to perform. The fine adjustment device comprises a fixed base and an adjusting base, wherein an upper surface of the fixed base and an upper surface of an adjusting base are each of a slope structure, the fixed base and the adjusting base are placed on a table board and are in mirror image correspondence, when the fixed base and the adjusting base are connected, the upper surface of the fixed base and the upper surface of an adjusting base form an inverted truncated-cone structure, a plurality of ball grooves are formed in each of the upper surface of the fixed base and the upper surface of an adjusting base, and balls are installed in the plurality of ball grooves; and the bottom part of a bearing stand is of an inverted truncated-cone structure, the bearing stand is placed on the fixed base and the adjusting base, an annular lug boss is installed on the bearing stand, and the lens barrel passes through the bearing stand and the table board. The fine adjustment device adopts the ingenious structural design of the balls and the slopes, pushes the up-down movement of the bearing stand through controlling the distance change between the fixed base and the adjusting base, thereby changing the distance between the lens tube and a focal plane.
Description
Technical field
The present invention relates to litho machine technique of laser imaging field, a kind of micromatic setting for lens barrel focusing.
Background technology
Exposure components is the core component of PCB lithographic equipment, is exposed photoresists on PCB by exposure components, produces corresponding figure, then produces required pcb board by a series of technique.Owing to the live width of present pcb board circuit is very thin, reaching micron order, the exposure effect of exposure components requires the highest, and exposure components is the heaviest in a device, how to the focal plane of exposure components can intense adjustment the most crucial.Therefore work out a kind of device that the focal length of lens barrel in exposure components can carry out fine adjustment to have become as urgent need and solve the technical problem that.
Summary of the invention
The invention aims to solve lens barrel in prior art and be difficult to the defect of fine adjustment, it is provided that a kind of micromatic setting for lens barrel focusing solves the problems referred to above.
To achieve these goals, technical scheme is as follows:
A kind of micromatic setting for lens barrel focusing, including lens barrel and table top, the outer wall of lens barrel is provided with annular boss,
Also include plummer, fixing seat and adjustment seat, fixing seat and adjustment seat are semicircular structure, the fixing upper surface of seat and the upper surface of adjustment seat are ramp structure, fixing seat is placed on table top with adjustment seat and both are that mirror image is corresponding, when fixing seat is connected together with adjustment seat, fixing seat upper surface and adjustment seat upper surface form inverted round table structure, and the fixing upper surface of seat and the upper surface of adjustment seat are equipped with several ball grooves, are mounted on ball in several ball grooves；The bottom of plummer is inverted round table structure, and plummer is placed in fixing seat and adjustment seat, and annular boss is arranged on plummer and lens barrel is through plummer and table top.
Also include auxiliary adjustment assembly, described auxiliary adjustment assembly includes screw seat and screw bolt seat, screw seat is arranged on the lateral part of fixing seat, screw bolt seat is arranged on the lateral part of adjustment seat, screw seat is provided with screw, and wing bolt is arranged on screw bolt seat and the front end of wing bolt is fixed in the screw of screw seat.
The diameter of described plummer lower surface connects with adjustment seat more than fixing seat and combines the diameter of formed round platform lower surface, and the outer wall of plummer upper surface is all the most corresponding with the outer wall of the outer wall of fixing seat, adjustment seat.
Beneficial effect
A kind of micromatic setting for lens barrel focusing of the present invention, compared with prior art designed by the ingenious structure of ball and slope, make to control the fixing change of distance between seat and adjustment seat and promote moving up and down of plummer, thus change the distance between lens barrel and focal plane, reach the result of preferable imaging.The present invention can facilitate and adjusts distance in real time, it is ensured that whole light path exposure effect is intact, effectively solves the problem that board regulates focal plane in installation process.
Accompanying drawing explanation
Fig. 1 is the structure front view of the present invention；
Fig. 2 is plummer in the present invention, fixing seat and the mounting structure axonometric chart of adjustment seat；
Fig. 3 is the longitudinal sectional view of Fig. 1；
Fig. 4 is that the A-A of Fig. 2 is to sectional view；
Wherein, 1-plummer, 2-fix seat, 3-adjustment seat, 4-wing bolt, 5-lens barrel, 6-table top, 7-ball, 8-annular boss, 9-screw seat, 10-screw bolt seat.
Detailed description of the invention
By making the architectural feature to the present invention and effect of being reached have a better understanding and awareness, coordinate detailed description in order to preferred embodiment and accompanying drawing, be described as follows:
As shown in figures 1 and 3, a kind of micromatic setting for lens barrel focusing of the present invention, including lens barrel 5 and table top 6, the outer wall of lens barrel 5 is provided with annular boss 8, annular boss 8 and lens barrel 5 are integrative-structure of the prior art, and annular boss 8 is fixed for the installation of lens barrel 5.In order to make lens barrel 5 can carry out upper and lower displacement, as shown in Figure 2 and Figure 4, design plummer 1, fixing seat 2 and adjustment seat 3 at this.Fixing seat 2 and adjustment seat 3 are semicircular structure, are ramp structure at the upper surface of fixing seat 2 and the upper surface of adjustment seat 3, and the upper surface of the upper surface and adjustment seat 3 of i.e. fixing seat 2 is the conical design of oblique indent.Fixing seat 2 is placed on table top 6 with adjustment seat 3 and both are that mirror image is corresponding, fixing seat 2 and adjustment seat 3 are due to needs left and right displacement, it is not fixed with table top 6, if for the displacement stability increasing fixing seat 2 and adjustment seat 3, then can between fixing seat 2 or adjustment seat 3 and table top 6 designed path so that fixing seat 2 and adjustment seat 3 can carry out spacing slip at table top 6.When fixing seat 2 is connected together with adjustment seat 3, fixing seat 2 upper surface and adjustment seat 3 upper surface form inverted round table structure, and the inverted round table structure that fixing seat 2 upper surface is formed with adjustment seat 3 upper surface uses for coordinating the bottom inverted round table structure of plummer 1.
The bottom of plummer 1 is inverted round table structure, and its inverted round table structure is frustum cone structure shape in turn, i.e. inverted round table structure unlike round platform is that upper circle circle big, lower is little.Inverted round table structure bottom plummer 1 is to coordinate the modular design of fixing seat 2 and adjustment seat 3, and plummer 1 is placed in fixing seat 2 and adjustment seat 3.Annular boss 8 is arranged on plummer 1 and lens barrel 5 is through plummer 1 and table top 6, by moving up and down of plummer 1, can drive moving up and down of annular boss 8.The upper and lower displacement of plummer 1 is caused in order to realize the relative motion of fixing seat 2 and adjustment seat 3, it is equipped with several ball grooves at the upper surface of fixing seat 2 and the upper surface of adjustment seat 3, be mounted on ball 7 in several ball grooves, then the quantity of ball 7 is also multiple.The most just formed based on fixing seat 2 and adjustment seat 3 between the two away from change and form moving up and down of plummer 1.
The distance controlling fixing seat 2 and both adjustment seats 3 for convenience, it is also possible to Design assistant adjusting part, the quantity of auxiliary adjustment assembly is preferably 2, and 2 auxiliary adjustment assemblies are that mirror image correspondence is arranged, its stability is preferable.Auxiliary adjustment assembly includes screw seat 9 and screw bolt seat 10, and screw seat 9 is provided with screw, and screw seat 9 inserts for the front end of wing bolt 4, and screw bolt seat 10 is used for installing wing bolt 4.Screw seat 9 is arranged on the lateral part of fixing seat 2, and screw bolt seat 10 is arranged on the lateral part of adjustment seat 3, and fixing seat 2 is corresponding with both adjustment seats 3 position.Wing bolt 4 is arranged on screw bolt seat 10 and the front end of wing bolt 4 is fixed in the screw of screw seat 9, so by rotate the wing nut of wing bolt 4 just can based on screw seat 9 lead-screw seat 10 to its closer or far from, it is achieved fixing seat 2 and adjustment seat 3 closer or far from.
In order to the spacing of convenient fixing seat 2 with adjustment seat 3 controls to drive the raising and lowering of plummer 1, the diameter of plummer 1 lower surface can be designed connect with adjustment seat 3 more than fixing seat 2 and combine the diameter of formed round platform lower surface, and the outer wall of plummer 1 upper surface is all the most corresponding with the outer wall of the outer wall of fixing seat 2, adjustment seat 3, as shown in Figure 2, the most just can form the line space design between fixing seat 2 and adjustment seat 3, provide certain displacement range for the displacement movement between fixing seat 2 and adjustment seat 3.
When actually used, when needs lens barrel 5 rises, rotate the wing nut of wing bolt 4 so that it is lead-screw seat 10 moves to screw seat 9 direction, i.e. adjustment seat 3 is moved to fixing seat 2 direction.Owing to adjustment seat 3 and fixing seat 2 upper surface are provided with multiple ball 7, and the upper surface of adjustment seat 3 and fixing seat 2 is the round platform design matched with the lower surface of plummer 1, therefore plummer 1 is conditioned seat 3 and fixing seat 2 to jack-up under the rotation of ball 7, the i.e. surrounding of plummer 1 is positioned at adjustment seat 3 and the top of fixing seat 2 upper surface ramp structure, thus realize plummer 1 and rise, the rising of plummer 1 band moving lens barrel 5.When needs lens barrel 5 declines, reversely rotate the wing nut of wing bolt 4 so that it is lead-screw seat 10 moves to away from screw seat 9 direction, i.e. adjustment seat 3 spaces out with fixing seat 2.Now plummer 1 is conditioned seat 3 and fixing seat 2 to avaling under the rotation of ball 7, i.e. the surrounding of plummer 1 is positioned at adjustment seat 3 and the bottom of fixing seat 2 upper surface ramp structure, thus realizes plummer 1 and decline, the decline of plummer 1 then band moving lens barrel 5.
The ultimate principle of the present invention, principal character and advantages of the present invention have more than been shown and described.Skilled person will appreciate that of the industry; the present invention is not restricted to the described embodiments; the principle of the simply present invention described in above-described embodiment and description; the present invention also has various changes and modifications without departing from the spirit and scope of the present invention, and these changes and improvements both fall within the range of claimed invention.The protection domain of application claims is defined by appending claims and equivalent thereof.
Claims (3)
1., for a micromatic setting for lens barrel focusing, including lens barrel (5) and table top (6), the outer wall of lens barrel (5) is provided with annular boss (8), it is characterised in that:
Also include plummer (1), fixing seat (2) and adjustment seat (3), fixing seat (2) and adjustment seat (3) are semicircular structure, the fixing upper surface of seat (2) and the upper surface of adjustment seat (3) are ramp structure, fixing seat (2) is placed on table top (6) with adjustment seat (3), and above and both are that mirror image is corresponding, when fixing seat (2) is connected together with adjustment seat (3), fixing seat (2) upper surface forms inverted round table structure with adjustment seat (3) upper surface, the fixing upper surface of seat (2) and the upper surface of adjustment seat (3) are equipped with several ball grooves, ball (7) it is mounted in several ball grooves；The bottom of plummer (1) is inverted round table structure, and plummer (1) is placed in fixing seat (2) and adjustment seat (3), and annular boss (8) is arranged on plummer (1), and above and lens barrel (5) is through plummer (1) and table top (6).
A kind of micromatic setting for lens barrel focusing the most according to claim 1, it is characterized in that: also include auxiliary adjustment assembly, described auxiliary adjustment assembly includes screw seat (9) and screw bolt seat (10), screw seat (9) is arranged on the lateral part of fixing seat (2), screw bolt seat (10) is arranged on the lateral part of adjustment seat (3), screw seat (9) is provided with screw, and wing bolt (4) is arranged on upper and wing bolt (4) the front end of screw bolt seat (10) and is fixed in the screw of screw seat (9).
A kind of micromatic setting for lens barrel focusing the most according to claim 1, it is characterized in that: the diameter of described plummer (1) lower surface connects with adjustment seat (3) more than fixing seat (2) and combines the diameter of formed round platform lower surface, and the outer wall of plummer (1) upper surface is all the most corresponding with the outer wall of the outer wall of fixing seat (2), adjustment seat (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610586054.XA CN106019526A (en) | 2016-07-22 | 2016-07-22 | Fine adjustment device for lens barrel focusing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610586054.XA CN106019526A (en) | 2016-07-22 | 2016-07-22 | Fine adjustment device for lens barrel focusing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106019526A true CN106019526A (en) | 2016-10-12 |
Family
ID=57116412
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610586054.XA Pending CN106019526A (en) | 2016-07-22 | 2016-07-22 | Fine adjustment device for lens barrel focusing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106019526A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2537990Y (en) * | 2002-04-19 | 2003-02-26 | 玉晶光电(厦门)有限公司 | Lens module group |
| CN101526664A (en) * | 2008-03-06 | 2009-09-09 | 一品光学工业股份有限公司 | Lens shifting mechanism |
| CN103344225A (en) * | 2011-11-17 | 2013-10-09 | 蒋红娟 | High-production-efficiency laser linear light source assembly and assembly method thereof |
| CN203275742U (en) * | 2013-05-21 | 2013-11-06 | 河南平原光电有限公司 | CCD focusing mechanism |
| CN205910400U (en) * | 2016-07-22 | 2017-01-25 | 合肥芯碁微电子装备有限公司 | Fine adjusting device for be used for lens cone focusing |
-
2016
- 2016-07-22 CN CN201610586054.XA patent/CN106019526A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2537990Y (en) * | 2002-04-19 | 2003-02-26 | 玉晶光电(厦门)有限公司 | Lens module group |
| CN101526664A (en) * | 2008-03-06 | 2009-09-09 | 一品光学工业股份有限公司 | Lens shifting mechanism |
| CN103344225A (en) * | 2011-11-17 | 2013-10-09 | 蒋红娟 | High-production-efficiency laser linear light source assembly and assembly method thereof |
| CN203275742U (en) * | 2013-05-21 | 2013-11-06 | 河南平原光电有限公司 | CCD focusing mechanism |
| CN205910400U (en) * | 2016-07-22 | 2017-01-25 | 合肥芯碁微电子装备有限公司 | Fine adjusting device for be used for lens cone focusing |
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| C06 | Publication | ||
| PB01 | Publication | ||
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Application publication date: 20161012 |