CN106017356A - Three-dimensional microscopic surface profile measuring device based on Greenough-type stereomicroscope and a method of device - Google Patents

Three-dimensional microscopic surface profile measuring device based on Greenough-type stereomicroscope and a method of device Download PDF

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CN106017356A
CN106017356A CN201610617404.4A CN201610617404A CN106017356A CN 106017356 A CN106017356 A CN 106017356A CN 201610617404 A CN201610617404 A CN 201610617404A CN 106017356 A CN106017356 A CN 106017356A
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camera
optical path
phase
projector
height
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CN106017356B (en
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陈钱
胡岩
左超
顾国华
张玉珍
冯世杰
陶天阳
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Nanjing University of Science and Technology
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Nanjing University of Science and Technology
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/254—Projection of a pattern, viewing through a pattern, e.g. moiré

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  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention discloses a three-dimensional microscopic surface profile measuring device based on a Greenough-type stereomicroscope and a method of the device. A camera and a projector are installed in two imaging light paths of the Greenough-type stereomicroscope, so driving structured light three-dimensional microscopic surface profile measuring is achieved. During measuring, when a measurement system is calibrated, the method is combined with a phase shift profile measuring technology for non-linear fitting calibration between height and a fringe phase on the microscope projection light paths, then internal and external parameters of the camera light path are calibrated by means of a perspective model, accordingly a homograph matrix of the camera is obtained, height distribution information of three-dimensional point cloud data of a to-be-detected object is obtained according to the relation between the height and the phase, and then transverse position distribution of the three-dimensional point cloud data of the object is obtained according to an equation set determined by the obtained homograph matrix of the camera. The device and the method have the advantages of being simple, efficient and low in cost, and three-dimensional point cloud data of tiny object surface can be quickly obtained by projecting multiple sets of phase shift period fringes and combining system calibration parameters.

Description

Three-dimensional macroscopic surface contour outline measuring set based on lattice Reno type Stereo microscope and Method
Technical field
The invention belongs to optical measurement, imaging technique, a kind of three-dimensional based on lattice Reno type Stereo microscope shows Micro-surface profiling device and method thereof.
Background technology
Along with the development of Modern Manufacturing Technology, electronics miniaturization becomes to become more and more popular and important.Miniaturization is permissible Device is made to possess more more complicated function so that businessman can easy to make carry, it is easy to transplants even human implantable Microminiaturization device.Such as, electrical braking component is coordinated to be incorporated into one piece of silicon chip together mechanical organ, electronic component, sensor On just produced microelectromechanical systems (Micro-electromechanical Systems, MEMS), the device of similar MEMS Part has quite varied purposes in scientific research with engineer applied.Meanwhile, as MEMS, micro devices is being made Different phase during work needs strict monitoring and screening, and the kinetic measurement of these miniature devices is outstanding with parameter acquiring simultaneously For important, the especially acquisition of three-dimensional data.Some technology of developed recently can be successfully used to three-dimensional measurement, such as copolymerization Focusing microscope (H.J.Tiziani, M.Wegner, and D.Steudle, " Confocal principle for macro-and Microscopic surface and defect analysis, " Opt.Eng.39 (1), 32-39 (2000) .), white light interference Instrument (L.Deck, and P.De Groot, " High-speed noncontact profiler based on scanning White-light interferometry, " Appl.) and holographic microscope (Opt.33 (31), 7334-7338 (1994) .3.Yamaguchi,and T.Zhang,“Phase-shifting digital holography,”Opt.Lett.22(16), 1268–1270(1997).).But Laser Scanning Confocal Microscope by measuring acquisition sample surfaces three-dimensional information point by point to sample, this Cause its measuring speed the slowest, it is impossible to realize the quick detection of sample three-dimensional appearance.White light interferometer and holographic microscope Being required for the interference of light beam to obtain information, this proposes the highest requirement in the stability of light path, is also required to multiple simultaneously Miscellaneous interference fringe image processing procedure.
Different from said method, fringe projection technology of profiling is different from the point-to-point measurement of Laser Scanning Confocal Microscope, but uses complete The method that field is measured simultaneously, it is possible to be significantly improved on measuring speed.It addition, fringe projection technology of profiling utilizes projector equipment Directly projection sine streak replaces optical interference circuit to interfere the sine streak produced, and light channel structure is simpler compared to optical interference circuit Monostable fixed.The process of image procossing is the most convenient relative to the process of interference image simply with difficulty simultaneously.Further, striped is thrown Shadow technology of profiling possesses the feature of three-dimensional non-contact measurement and it is had a wide range of applications in three-dimensional measurement field.For minim The surface profile measurement of body, need to combine fringe projection technology of profiling with binocular microscopy apparatus.Existing set based on binocular is micro- Standby three-dimensional macroscopic surface contour measuring method is based primarily upon telecentric lens and is total to object lens stereomicroscope.But, based on telecentricity The subject matter of the three-dimensional macroscopic surface contour measuring method of lens is that the relatively low numerical aperture of its telecentric lens limits into Resolution as system.Subject matter based on common object lens stereomicroscope three-dimensional macroscopic surface contour measuring method is that it becomes As the decentralization of light causes bigger aberration, this problem makes imaging optical path model become complicated and is difficult to easy number It is fixed that value matrix model describes rower of going forward side by side accurately to its light path.(G.Danuser,and O.Kbler, “Calibration of CMO-Stereo-Microscopes in a Micro Robot System,”in International Archives of Photogrammetry and Remote Sensing,30/5W1:345-353 (Citeseer,1991).).In sum, it is achieved one can possess high-NA with accurate calibration, it is possible to achieve the most non- The three-dimensional micro-profiling object surface of contact type measurement becomes a technical barrier.
Summary of the invention
It is an object of the invention to provide a kind of accurate calibration, possess high-NA, and realize rapid non-contact survey The three-dimensional micro-profiling object surface measurement apparatus of amount and method thereof.
The technical solution realizing the object of the invention is: a kind of micro-table of three-dimensional based on lattice Reno type Stereo microscope Facial contour measurement apparatus and method thereof, including camera, projector, comprise amplify light channel structure two microscopes optical path, data Transmission line, computer, sample stage, continuously adjustabe light intensity attenuator, rotatable camera interface, described projector is fixedly installed in first Projecting light path, the camera lens surface 0.2-of camera lens surface distance first microscopes optical path of projector is constituted before microscopes optical path 0.8cm, this projector moves up and down with the first microscopes optical path and mobile, simultaneously the optical axis of projector and the first microscopes optical path Keeping parallelism and before being positioned over the first microscopes optical path, the projector distance of projector and imaging magnification are by regulation first Amplification light channel structure in microscopes optical path realizes；Variable optical attenuator is arranged between projector and the first microscopes optical path, protects The minute surface holding variable optical attenuator is vertical with the optical axis of the first microscopes optical path；
It is second micro-with this that described camera is fixedly mounted on the front end of the second microscopes optical path by rotatable camera interface Mirror light path composition imaging optical path, computer controls projector by data line and obtains camera data；Test sample is put In the upper and lower 2mm of object plane of imaging optical path.
The present invention compared with prior art, its remarkable advantage: (1) relative to Laser Scanning Confocal Microscope, white light interferometer and complete Breath microscopie unit, this apparatus structure is simple, measures quickly, and low cost.(2) it is different from common object lens stereomicroscope, in lattice Promise type Stereo microscope has two the coaxial light paths being kept completely separate, and this characteristic makes the type microscope easily facilitate mark Fixed.(3) effectively N is walked phase shift algorithm and multifrequency (hierarchical) phase unwrapping algorithm solves fringe phase and is applied to In micro-fringe projector apparatus.Obtain object height information by rapid solving phase place, obtain thing by simple numerical computations Body three dimensional point cloud.(4) freely adjustable microscope height is measured for the sample of differing heights, it is to avoid repeatedly demarcate.(5) Experiment shows that these system and method can successfully measure the body surface of different-shape, experimental result draw certainty of measurement Within several microns.
Below in conjunction with the accompanying drawings the present invention is described in further detail.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention three-dimensional macroscopic surface contour outline measuring set based on lattice Reno type Stereo microscope Figure.
Fig. 2 is the chip measurement result schematic diagram of BGA package.
Fig. 3 is standard flat measurement result schematic diagram.
Detailed description of the invention
In conjunction with Fig. 1, the present invention three-dimensional macroscopic surface contour outline measuring set based on lattice Reno type Stereo microscope, including phase Machine 1, projector 2, comprise amplify two microscopes optical path 3 of light channel structure 8,4, data line 5, computer 6, sample stage 7, even Continuous adjustable light intensity attenuator 9, rotatable camera interface 10, described projector 2 is fixedly installed in structure before the first microscopes optical path 3 Become projecting light path, the camera lens surface 0.2-0.8cm of camera lens surface distance first microscopes optical path 3 of projector 2, this projector 2 Move up and down with the first microscopes optical path 3 and mobile, simultaneously the optical axis of projector 2 and the first microscopes optical path 3 keeping parallelism and Before being positioned over the first microscopes optical path 3, the projector distance of projector 2 and imaging magnification are by regulating the first microscope light Amplification light channel structure 8 in road 3 realizes；The imaging surface of projector 2 is positioned at the first microscope after the first microscopes optical path 3 Below light path 3 adjustable between 5-30cm.Variable optical attenuator 9 is arranged between projector 2 and the first microscopes optical path 3, keeps light The minute surface of strong attenuator 9 is vertical with the optical axis of the first microscopes optical path 3.Wherein first and second microscopes optical path 3,4 all contains Amplify light channel structure 8.Amplify light channel structure 8 to be made up of compound lens, by adjusting the distance between each eyeglass of compound lens, The amplification of light path can be adjusted while keeping image planes invariant position.
Described camera 1 by rotatable camera interface 10 be fixedly mounted on the front end of the second microscopes optical path 4 with this second Microscopes optical path 4 forms imaging optical path, and camera 1 can be changed by regulation interface 10 with direction relative to the distance of microscopes optical path 4 Become, change the distance between the object plane of imaging optical path and the image planes of projecting light path with this.Computer 6 is controlled by data line 5 Projector 2 and obtain camera 1 data；Test sample 7 is placed in the upper and lower 2mm of object plane of imaging optical path, Ye Shi projecting light path Imaging surface near.
Camera 1 and the projector 2 of the present invention are respectively and fixedly installed on first and second microscopes optical path 3,4, aobvious in regulation During micro mirror height of observation, camera 1 and projector 2 keep constant relative to microscopical position, and unnecessary repetition can be avoided to adjust Projector and the position of camera.Utilize the amplification light channel structure 8 installed in first and second microscopes optical path 3,4, be used for regulating light path Amplification is to adapt to various sizes of Measuring Object and to meet the measurement requirement of the different depth of field.Employ the decay of continuously adjustabe light intensity Device 9, the light intensity utilizing the function of its regulation light intensity transmitance to project projector 2 carries out suitable decay, to ensure projection Pattern has suitable contrast.Camera 1 is installed to microscopes optical path 4 by rotatable camera interface 10, have focusing and The function of regulation image direction.
The present invention three-dimensional macroscopic surface contour measuring method based on lattice Reno type Stereo microscope, including measurement apparatus System calibrating and object under test surface profile measurement step, wherein the system calibrating of measurement apparatus is divided into two steps, i.e.
The first step, phase height is demarcated the coefficient of nonlinear fitting and is demarcated part, and plane reference plate is different at several Setting height z1…znPlace, try to achieve each by N step phase shift algorithm and multifrequency (hierarchical) phase unwrapping algorithm PHASE DISTRIBUTION φ of height and position flat board1…φn, utilize nonlinear fitting to obtain each pixel of camera (u, height v) and phase Position relation:
φ 1 - φ 1 z 1 1 · · · · · · · · · φ n - φ n z n 1 m 1 n 1 m 0 = z 1 · · · z n , n ≥ 3 - - - ( 1 )
Wherein, z represents pixel (u, the height value of object v) photographed, φ representative use N step phase shift algorithm and multifrequency (hierarchical) phase place that phase unwrapping algorithm is tried to achieve, m0,m1,n0Represent the coefficient of the nonlinear fitting needing demarcation； m0,m1,n0Tried to achieve by following formula:
m 1 n 1 m 0 = φ 1 - φ 1 z 1 1 · · · · · · · · · φ n - φ n z n 1 + z 1 · · · z n - - - ( 2 )
'+' expression solves generalized inverse matrix；
Second step, the perspective model homography matrix of camera parameter is demarcated part, the parameter of camera 1 is carried out perspective model Demarcate: use camera light path that the some groups of random attitudes of scaling board are shot, from the image photographed, extract characteristic point also Perspective model is utilized to model:
[u,v,w]T=M [R, T] X=HX (3)
Wherein, H represents the homography matrix that needs solve, and it is obtained by camera internal reference matrix and outer ginseng matrix multiple, w table Showing the zoom factor of camera space, M represents the internal reference matrix of camera, and [R, T] represents the outer ginseng matrix of camera, and X represents scaling board Characteristic point world space coordinate；According to extract from the scaling board of different attitudes some stack features dot informations (u, v, w) and X Try to achieve M, R, T, and then obtained homography matrix H by formula (3).
The object under test surface profile measurement of the present invention is divided into fringe projection, phase solution, height mapping and three-dimensional to solve Four steps, specific as follows:
The first step, fringe projection, utilize N step phase shift algorithm and multifrequency (hierarchical) phase unwrapping algorithm, throw The instruction specific phase shift cycle striped of projection that shadow instrument 2 sends according to computer 6, the object that camera 1 sync pulse jamming is irradiated by striped, Obtain bar graph In；
Second step, phase solution, utilize N step phase shift algorithm and multifrequency (hierarchical) phase unwrapping algorithm, by In(u v) tries to achieve PHASE DISTRIBUTION φ modulated by object height；
3rd step, height mapping, utilize formula (1), it is known that calibrating parameters m0,m1,n0The φ tried to achieve with previous step, calculates Height z to object；
4th step, three-dimensional solves, it is known that pixel coordinate (u, v), the height z tried to achieve and camera parameter H, utilize formula (3) to ask Obtain pixel coordinate (u, v) the vertical and horizontal position of corresponding object, i.e. X.X contains the cloud data of the profile of object under test.
In order to test the present invention three-dimensional macroscopic surface contour outline measuring set based on lattice Reno type Stereo microscope and side thereof The effectiveness of method, elite take two groups of experiments and is illustrated.
(1) chip pin of a BGA package is chosen as experimental subject.As in figure 2 it is shown, (a) is a BGA package Chip pin picture；B () is for using the present invention three-dimensional macroscopic surface contour outline measuring set based on lattice Reno type Stereo microscope To this chip three-dimensional point cloud measurement result of the pin in dotted yellow line region in (a)；C () is the three-dimensional point cloud result of (b) Display effect under another viewing angle；D () is the three-dimensional point of chip pin on the cross section that (a) Green dotted line is corresponding Cloud data.A the scale in () is 0.8mm.Chip pin standard has concurrently as 0.8mm.
(2) standard flat is chosen as experimental subject.Measurement result is as it is shown on figure 3, (a) is fringe phase scattergram； B () is the height scattergram that pixel is corresponding；C () is the height distribution of the 330th row pixel in (b)；D () plane survey error approximates Distribution.
Being shown by the result of (d) of Fig. 2 He (d) of Fig. 3, present invention three-dimensional based on lattice Reno type Stereo microscope shows Micro-surface profiling device and method thereof have micron-sized certainty of measurement.

Claims (3)

1. a three-dimensional macroscopic surface contour outline measuring set based on lattice Reno type Stereo microscope, it is characterised in that include camera (1), projector (2), comprise amplify light channel structure (8) two microscopes optical path (3,4), data line (5), computer (6), Sample stage (7), continuously adjustabe light intensity attenuator (9), rotatable camera interface (10), described projector (2) is fixedly installed in Projecting light path is constituted, the mirror of the camera lens surface distance the first microscopes optical path (3) of projector (2) before one microscopes optical path (3) Head surface 0.2-0.8cm, this projector (2) moves up and down with the first microscopes optical path (3) and mobile, simultaneously projector (2) Optical axis and the first microscopes optical path (3) keeping parallelism and before being positioned over the first microscopes optical path (3), the throwing of projector (2) Shadow distance and imaging magnification realize by regulating the amplification light channel structure (8) in the first microscopes optical path (3)；Variable optical attenuator (9) it is arranged between projector (2) and the first microscopes optical path (3), keeps minute surface and first microscope of variable optical attenuator (9) The optical axis of light path (3) is vertical；
Described camera (1) by rotatable camera interface (10) be fixedly mounted on the front end of the second microscopes optical path (4) with this Two microscopes optical path (4) composition imaging optical path, computer (6) controls projector (2) by data line (5) and obtains camera (1) data；Test sample (7) is placed in the upper and lower 2mm of object plane of imaging optical path.
2. a three-dimensional macroscopic surface contour measuring method based on lattice Reno type Stereo microscope, it is characterised in that include measuring The system calibrating of device and object under test surface profile measurement step, wherein the system calibrating of measurement apparatus is divided into two steps, I.e.
The first step, phase height is demarcated the coefficient of nonlinear fitting and is demarcated part, by plane reference plate in several different setting Fixed height z1···znPlace, try to achieve each by N step phase shift algorithm and multifrequency (hierarchical) phase unwrapping algorithm PHASE DISTRIBUTION φ of height and position flat board1···φn, utilize nonlinear fitting to obtain each pixel of camera (u, height v) With phase relation:
φ 1 - φ 1 z 1 1 . . . . . . . . . φ n - φ n z n 1 m 1 n 1 m 0 = z 1 . . . z n , n ≥ 3 - - - ( 1 )
Wherein, z represents pixel (u, the height value of object v) photographed, φ representative use N step phase shift algorithm and multifrequency (hierarchical) phase place that phase unwrapping algorithm is tried to achieve, m0,m1,n0Represent the coefficient of the nonlinear fitting needing demarcation； m0,m1,n0Tried to achieve by following formula:
m 1 n 1 m 0 = φ 1 - φ 1 z 1 1 . . . . . . . . . φ n - φ n z n 1 + z 1 . . . z n - - - ( 2 )
'+' expression solves generalized inverse matrix；
Second step, the perspective model homography matrix of camera parameter is demarcated part, the parameter of camera (1) is carried out perspective model mark Fixed: to use camera light path that the some groups of random attitudes of scaling board are shot, from the image photographed, extract characteristic point profit Model with perspective model:
[u,v,w]T=M [R, T] X=HX (3)
Wherein, H represents the homography matrix that needs solve, and it is obtained by camera internal reference matrix and outer ginseng matrix multiple, and w represents phase The zoom factor in machine space, M represents the internal reference matrix of camera, and [R, T] represents the outer ginseng matrix of camera, and X represents the spy of scaling board Levy a world space coordinate；According to the some stack features dot informations extracted from the scaling board of different attitudes, (u, v w) try to achieve with X M, R, T, and then obtained homography matrix H by formula (3).
Three-dimensional macroscopic surface contour measuring method based on lattice Reno type Stereo microscope the most according to claim 2, its It is characterised by that object under test surface profile measurement step is as follows:
The first step, fringe projection, utilize N step phase shift algorithm and multifrequency (hierarchical) phase unwrapping algorithm, projector (2) instruction sent according to computer (6) projects specific phase shift cycle striped, the thing that camera (1) sync pulse jamming is irradiated by striped Body, obtains bar graph In；
Second step, phase solution, utilize N step phase shift algorithm and multifrequency (hierarchical) phase unwrapping algorithm, by In(u, V) PHASE DISTRIBUTION φ modulated by object height is tried to achieve；
3rd step, height mapping, utilize formula (1), it is known that calibrating parameters m0,m1,n0The φ tried to achieve with previous step, is calculated thing The height z of body；
4th step, three-dimensional solves, it is known that pixel coordinate (u, v), the height z tried to achieve and camera parameter H, utilize formula (3) to try to achieve picture Element coordinate (u, v) the vertical and horizontal position of corresponding object, i.e. X.
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CN110006364A (en) * 2019-03-18 2019-07-12 南京师范大学 The real-time microscopic measuring method of three-dimensional based on round bar line radial space carrier phase
CN111678429A (en) * 2020-06-09 2020-09-18 江苏瑞奇海力科技有限公司 Microscopic measurement system and microscopic measurement method
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CN113052797A (en) * 2021-03-08 2021-06-29 江苏师范大学 BGA solder ball three-dimensional detection method based on depth image processing
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