CN105991064B - Touch sensor and tactile sensing device of robot's sensory perceptual system based on friction generator - Google Patents
Touch sensor and tactile sensing device of robot's sensory perceptual system based on friction generator Download PDFInfo
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- CN105991064B CN105991064B CN201610297099.5A CN201610297099A CN105991064B CN 105991064 B CN105991064 B CN 105991064B CN 201610297099 A CN201610297099 A CN 201610297099A CN 105991064 B CN105991064 B CN 105991064B
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/04—Friction generators
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/005—Measuring force or stress, in general by electrical means and not provided for in G01L1/06 - G01L1/22
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Abstract
The invention discloses a kind of touch sensor based on friction generator and tactile sensing device of robot's sensory perceptual system, which includes：At least one friction generator；Wherein, friction generator includes：The first electrode layer being cascading, the first high polymer insulating layer, and the second electrode lay；Wherein, two opposite surfaces of friction generator form frictional interface, and when external force is acted in friction generator, frictional interface phase mutual friction, friction generator exports electric pressure signal corresponding with external force；First electrode layer and the second electrode lay form the output terminal of friction generator.Touch sensor and tactile sensing device of robot's sensory perceptual system provided by the invention based on friction generator, simple in structure, sensitivity and accuracy are high.
Description
Technical field
The present invention relates to sensor technical field, and in particular to a kind of touch sensor and machine based on friction generator
People's tactilely-perceptible system.
Background technology
Robot is widely used to industrial production and has progressed into daily life.The development of sensor technology
Make robot increasingly intelligent with application, gradually possess vision, tactile and hearing ability.Tactile can be such that robot accurately obtains
Know the shape of object, situations such as size, so that it is determined that appropriate pickup dynamics, guarantee is picked object and is not damaged, and also ensures that
The safety of robot itself.
The robot of the prior art is mostly based on pressure sensor, piezoelectric element, contact electrode etc. and realizes tactilely-perceptible, but
These sensors are there are complicated, and sensitivity is low, the deficiencies such as accuracy is low, have when changing for external force it is larger it is non-linear,
The signal of output is also weaker.Therefore, based on such pressure sensor, piezoelectric element, contact electrode robot in tactile response
Aspect can have situations such as slow reaction, error in judgement.
The content of the invention
The goal of the invention of the present invention is the defects of being directed to the prior art, there is provided a kind of tactile based on friction generator passes
Sensor and tactile sensing device of robot's sensory perceptual system, complicated for solving sensor construction of the prior art, sensitivity is low, and accuracy is low
The problems such as.
According to an aspect of the invention, there is provided a kind of touch sensor based on friction generator, including：At least one
A friction generator；Wherein, friction generator includes：The first electrode layer being cascading, the first high molecular polymer are exhausted
Edge layer, and the second electrode lay；Wherein, two opposite surfaces of friction generator form frictional interface, rub when external force acts on
When wiping on generator, frictional interface phase mutual friction, friction generator exports electric pressure signal corresponding with external force；First electrode layer
The output terminal of friction generator is formed with the second electrode lay.
Further, further include：At least one fine motion enhancement layer, is arranged on inside friction generator and does not form frictional interface
Between two surfaces, the electric pressure signal exported during external force effect is being sensed for strengthening friction generator.
Further, the first high polymer insulating layer two surfaces opposite with the second electrode lay form frictional interface；
Fine motion enhancement layer is arranged between first electrode layer and the first high polymer insulating layer.
Further, friction generator further includes：Second high polymer insulating layer；Second high polymer insulating layer
It is arranged between the first high polymer insulating layer and the second electrode lay；Wherein, the first high polymer insulating layer and the
Two opposite surfaces of two high polymer insulating layers form frictional interface；
Fine motion enhancement layer is arranged between first electrode layer and the first high polymer insulating layer；And/or it is arranged on
Between two high polymer insulating layers and the second electrode lay.
Further, friction generator further includes：Second high polymer insulating layer and between two parties film layer；Second macromolecule
Polymer insulation layer is stacked on the second electrode layer, and film layer is arranged on the first high polymer insulating layer and between two parties
Between two high polymer insulating layers；Wherein, the first high polymer insulating layer and film layer between two parties, and/or thin between two parties
Film layer two surfaces opposite with the second high polymer insulating layer form frictional interface；
Fine motion enhancement layer is arranged between first electrode layer and the first high polymer insulating layer；And/or it is arranged on
Between one high polymer insulating layer and between two parties film layer；And/or it is arranged on film layer between two parties and the second high molecular polymer
Between insulating layer；And/or it is arranged between the second high polymer insulating layer and the second electrode lay.
Further, friction generator further includes：Second high polymer insulating layer and intervening electrode layer；Second macromolecule
Polymer insulation layer is stacked on the second electrode layer, and intervening electrode layer is arranged on the first high polymer insulating layer and
Between two high polymer insulating layers；Wherein, the first high polymer insulating layer is with intervening electrode layer, and/or electric between two parties
Layer two surface opposite with the second high polymer insulating layer in pole form frictional interface, first electrode layer and the second electrode lay
After being connected and intervening electrode layer forms the output terminal of friction generator；
Fine motion enhancement layer is arranged between first electrode layer and the first high polymer insulating layer；And/or it is arranged on
Between one high polymer insulating layer and intervening electrode layer；And/or it is arranged on intervening electrode layer and the second high molecular polymer
Between insulating layer；And/or it is arranged between the second high polymer insulating layer and the second electrode lay.
Further, first electrode layer, the first high polymer insulating layer, the second high polymer insulating layer, second
Electrode layer, between two parties film layer, intervening electrode layer are flexible material.
Further, at least one face formed in two surfaces of frictional interface is equipped with array of protrusions.
Further, array of protrusions is arranged for diamond shape.
Further, fine motion enhancement layer is slab construction or is the engraved structure that array offers geometry through hole.
Further, the material of fine motion enhancement layer is plastics or rubber.
Further, multiple friction generators are connected in a manner of in parallel and/or series connection, wherein, multiple in parallel and/or series connection
The friction generator that mode connects is set by tile mode and/or overlapped way.
Further, further include：The insulating layer, shielded layer and protective layer of cladding are stacked gradually in friction generator periphery；Its
In, insulating layer, for preventing friction generator from contacting with each other with shielded layer, reduces the loss of electric pressure signal；Shielded layer, is used for
Outside electromagnetic interference is shielded, to protect the electric pressure signal that friction generator exports；Protective layer, for sealing protection triboelectricity
Machine, prevents friction generator to be damaged under external force.
According to another aspect of the present invention, there is provided a kind of tactile sensing device of robot's sensory perceptual system, including above-mentioned tactile pass
Sensor, further includes：Signal acquisition module, central control module and power module；Wherein, touch sensor exists for induction effect
External force thereon, exports electric pressure signal corresponding with external force；Signal acquisition module is connected with touch sensor, at collection
Manage the electric pressure signal of touch sensor output；Central control module is connected with signal acquisition module, for according to signal acquisition
The electric pressure signal of module output, regulating system operation；Power module is connected with signal acquisition module, for for signal acquisition mould
Block is powered.
Further, switch module is further included；Wherein, switch module is connected with signal acquisition module and power module respectively,
For controlling power module to power for signal acquisition module.
Further, signal acquisition module includes：Amplifying circuit, rectification circuit, filter circuit and analog to digital conversion circuit；Its
In, amplifying circuit is connected with touch sensor, for amplifying the electric pressure signal of touch sensor output；Rectification circuit and amplification
Circuit is connected, and the amplified electric pressure signal for amplifying circuit to be exported carries out rectification processing；Filter circuit and rectified current
Road is connected, the interference noise in electric pressure signal for filtering out rectification circuit output；Analog to digital conversion circuit and filter circuit phase
Even, the simulated pressure electric signal for filter circuit to be exported is converted to digital pressure electric signal.
Further, central control module is further used for：The electric pressure signal exported according to signal acquisition module carries out power
Degree is adjusted and/or orientation angle is adjusted.
Further, power module is energy-storage travelling wave tube or the electric modular converter being connected by cable with external power supply.
Further, tactile sensing device of robot's sensory perceptual system includes multiple touch sensors；Multiple touch sensors are in the form of an array
Arrangement, forms the tactile sensor array of M rows N row, often an output of the friction generator included by capable touch sensor
End is interconnected with one another, and forms row output terminal；Another output terminal of friction generator included by the touch sensor of each column
It is interconnected with one another, forms row output terminal；For when external force effect with touch sensor when, output pressure electric signal.
Further, touch sensor is arranged on the surface that robot is directly contacted with object.
Further, the surface that robot and object directly contact is the hand of robot, arm, foot, leg, head, chest,
And/or back.
The touch sensor and tactile sensing device of robot's sensory perceptual system based on friction generator provided according to the present invention, friction hair
Motor deforms upon under external force, exports corresponding electric pressure signal, further, the center of tactile sensing device of robot's sensory perceptual system
Control module carries out the adjusting of dynamics and/or orientation angle according to the electric pressure signal after processing.Touching based on friction generator
Feel sensor and tactile sensing device of robot's sensory perceptual system is simple in structure, sensitivity and accuracy are high.
Brief description of the drawings
Fig. 1 is a structure diagram of the touch sensor embodiment one provided by the invention based on friction generator；
Fig. 2 is another structure diagram of the touch sensor embodiment one provided by the invention based on friction generator；
Fig. 3 a are a signal output data of the touch sensor embodiment one provided by the invention based on friction generator
Figure；
Fig. 3 b are another logarithmic output signal of the touch sensor embodiment one provided by the invention based on friction generator
According to figure；
Fig. 4 is the structure diagram of the touch sensor embodiment two provided by the invention based on friction generator；
Fig. 5 is the structure diagram of the touch sensor embodiment three provided by the invention based on friction generator；
Fig. 6 is the structure diagram of the touch sensor example IV provided by the invention based on friction generator；
Fig. 7 a are the functional block diagram of one embodiment of tactile sensing device of robot's sensory perceptual system provided by the invention；
Fig. 7 b are the functional block diagram of another embodiment of tactile sensing device of robot's sensory perceptual system provided by the invention；
Fig. 8 is the functional block diagram of signal acquisition module in Fig. 7 a and Fig. 7 b；
Fig. 9 a- Fig. 9 b are the structure diagram that touch sensor is set in tactile sensing device of robot's sensory perceptual system embodiment；
Figure 10 is the structure diagram that tactile sensor array is arranged in Fig. 9 b.
Embodiment
To be fully understood by the purpose of the present invention, feature and effect, by following specific embodiments, the present invention is done in detail
Describe in detail bright, but the present invention is not restricted to this.
Touch sensor provided by the invention based on friction generator includes：At least one friction generator, wherein, rub
Wipe two opposite surfaces of generator and form frictional interface, when external force is acted in friction generator, frictional interface mutually rubs
Wipe, friction generator exports electric pressure signal corresponding with external force.Wherein, the touch sensor based on friction generator can wrap
A friction generator is included, multiple friction generators can also be included, those skilled in the art can make choice as needed,
Do not limit herein.If the touch sensor based on friction generator includes multiple friction generators, multiple friction generators
It can be connected in a manner of in parallel and/or series connection, and the friction generator of multiple in parallel and/or series system connections can also pass through
Tile mode and/or overlapped way are set, so as to increase the intensity of the electric pressure signal of friction generator output, and then make to be based on
The sensitivity higher of the touch sensor of friction generator.
Fig. 1 is a structure diagram of the touch sensor embodiment one provided by the invention based on friction generator.Such as
Shown in Fig. 1, being somebody's turn to do the touch sensor based on friction generator includes：One friction generator.Wherein, the friction hair shown in Fig. 1
Motor is the friction generator of three-decker, it includes：The first electrode layer 110 that is cascading, the first high molecular polymerization
Thing insulating layer 120 and the second electrode lay 130；Specifically, the first side surface of the first high polymer insulating layer 120 is set
There are first electrode layer 110, the second side surface of the first high polymer insulating layer 120 and the first side of the second electrode lay 130
Surface is oppositely arranged composition frictional interface, when external force is acted in friction generator, the first high polymer insulating layer 120
The two frictional interface phase mutual friction opposite with the second electrode lay 130, export electric pressure signal corresponding with external force；First electrode
Layer 110 and the second electrode lay 130 form the output terminal of friction generator.
When external force acts on friction generator, the first high polymer insulating layer 120 in friction generator and
Two opposite surface phase mutual friction of two electrode layers 130 produce electrostatic charges, and the generation of electrostatic charge can make first electrode layer 110 and the
Two electrode layers 130 produce charge inducing, so as to cause electrical potential difference occur between first electrode layer 110 and the second electrode lay 130.By
The presence of electrical potential difference between first electrode layer 110 and the second electrode lay 130, free electron will be low by potential by external circuit
Side flows to the high side of potential, so as to form electric current in external circuit.When each layer of friction generator returns to original state
When, the built-in potential being at this moment formed between first electrode layer 110 and the second electrode lay 130 disappears, at this time Balanced first electricity
Reverse electrical potential difference will be produced again, then free electron is formed reversely by external circuit between pole layer 110 and the second electrode lay 130
Electric current.By rubbing and recovering repeatedly, it is possible to form periodic ac pressure electric signal in external circuit.
In addition to the friction generator of three-decker as shown in Figure 1, those skilled in the art can also be according to actual implementation
Situation, using four-layer structure, five layers between two parties membrane structure, five layers of intervening electrode structure friction generator, do not do herein specific
Limit.
Further, as shown in Figure 1, the friction generator in the touch sensor based on friction generator further includes：
Friction generator periphery stacks gradually the insulating layer 200, shielded layer 300 and protective layer 400 of cladding；Wherein, insulating layer 200 is used for
Prevent friction generator from contacting with each other with shielded layer, reduce the loss of the electric pressure signal of friction generator output；Shielded layer 300
For shielding outside electromagnetic interference, to protect the electric pressure signal that friction generator exports；Protective layer 400, for sealing protection
Friction generator, prevents friction generator to be damaged under external force.
Since shielded layer 300 is in most cases using metal materials such as copper or aluminium, in its first with friction generator
When electrode layer 110 and the second electrode lay 130 directly contact so that the electric pressure signal of friction generator output can be by shielded layer
300 mask a part, influence the output of the electric pressure signal of friction generator generation, therefore in friction generator and shielded layer
Insulating layer 200 is provided between 300, friction generator integral coating is lived, to prevent the first electrode layer 110 of friction generator
Contact with each other with the second electrode lay 130 and shielded layer 300, reduce the loss of the electric pressure signal of friction generator output.Insulation
Layer 200 can use high molecular polymer material, such as polyethylene terephthalate (PET), Kynoar (PVDF), fluorination
Second propylene copolymer (FEP), soluble poly tetrafluoroethene (PFA), polytrifluorochloroethylene (PCTFE), polypropylene (PP), polyethylene
(PE) etc..
Shielded layer 300 is arranged between insulating layer 200 and protective layer 400, is coated on insulating layer 200, for shielding
Outside electromagnetic interference, to protect the electric pressure signal that friction generator exports.
Protective layer 400 is arranged on the outermost layer of the touch sensor based on friction generator, be coated on shielded layer 300 it
On, for sealing protection friction generator, prevent friction generator to be damaged under external force, while also function to it is dust-proof,
Moisture-proof, etch-proof effect, to increase the service life of friction generator.
As shown in Fig. 2, in this embodiment, still further comprise：For strengthening friction generator in sensing external force effect
When the fine motion enhancement layer 500 of electric pressure signal that is exported.Increase fine motion enhancement layer 500 in this embodiment, can reduce and rub
The local deformation that generator is occurred when sensing external force and acting on is wiped, accelerates the separating rate of each interlayer, so as to strengthen friction hair
Output of the motor to the electric pressure signal of small external force.Wherein, fine motion enhancement layer 500 can be arranged on inside friction generator not
Between two surfaces for forming frictional interface.As shown in Fig. 2, to be arranged on first electrode layer 110 and first high for fine motion enhancement layer 500
Between Molecularly Imprinted Polymer insulating layer 120.
As shown in Fig. 2, the friction generator includes：The first electrode layer 110 that is cascading, fine motion enhancement layer 500,
First high polymer insulating layer 120 and the second electrode lay 130；Specifically, the of the first high polymer insulating layer 120
One side surface is provided with fine motion enhancement layer 500, the second side surface of the first high polymer insulating layer 120 and the second electrode lay
130 the first side surface is oppositely arranged composition frictional interface, when external force is acted in friction generator, the first high molecular polymerization
The two frictional interface phase mutual friction opposite with the second electrode lay 130 of thing insulating layer 120, first electrode layer 110 and second electrode
Layer 130 forms the output terminal of friction generator.
One signal output data figure of Fig. 3 a touch sensor embodiments one provided by the invention based on friction generator.
Another signal output data figure of Fig. 3 b touch sensor embodiments one provided by the invention based on friction generator.Fig. 3 a with
Fig. 3 b difference lies in, fine motion enhancement layer is not provided with Fig. 3 a, fine motion enhancement layer is equipped with Fig. 3 b, in addition, two
The structure setting of embodiment is identical, and the external force that both are applied is also identical.It is can be seen that from Fig. 3 a and Fig. 3 b
The fluctuating of the electric pressure signal of output is smaller, illustrates its continuous uniform stress.In continuous uniform loading process, it can be seen that micro-
Dynamic perception of the enhancement layer to stress caused by minor motion is still sensitive.
The touch sensor based on friction generator provided according to the present invention, friction generator are sensing external force effect
When, corresponding electric pressure signal is exported, to perceive the size of external force.Touch sensor based on friction generator is simple in structure,
Sensitivity and accuracy are high.
Fig. 4 is the structure diagram of the touch sensor embodiment two provided by the invention based on friction generator.Such as Fig. 4
Shown, the touch sensor based on friction generator in the embodiment includes：One friction generator.Wherein, shown in Fig. 4
Friction generator is the friction generator of four-layer structure, it includes：The first electrode layer 110 that is cascading, the first high score
Sub- polymer insulation layer 120, the second high polymer insulating layer 140, fine motion enhancement layer 500 and the second electrode lay 130；Specifically
Ground, the first side surface of the first high polymer insulating layer 120 are provided with first electrode layer 110, the first high molecular polymer
Second side surface of insulating layer 120 and the first side surface of the second high polymer insulating layer 140 are oppositely arranged composition friction
Interface, the second side surface of the second high polymer insulating layer 140 are provided with fine motion enhancement layer 500, rub when external force acts on
When wiping on generator, two opposite with the second high polymer insulating layer 140 of the first high polymer insulating layer 120 rub
Interface phase mutual friction is wiped, first electrode layer 110 and the second electrode lay 130 form the output terminal of friction generator.
It should be noted that fine motion enhancement layer 500 can not only be arranged on the insulation of the second high molecular polymer as shown in Figure 4
Between layer 140 and the second electrode lay 130；110 and first high polymer insulating layer 120 of first electrode layer can also be arranged on
Between；Can also above-mentioned two position (i.e. between the second high polymer insulating layer 140 and the second electrode lay 130 and
Between 110 and first high polymer insulating layer 120 of first electrode layer) it is respectively provided with fine motion enhancement layer 500, that is to say, that it is micro-
Dynamic enhancement layer 500 can be arranged between two surfaces for not forming frictional interface inside friction generator, do not limited herein.
Except it is above-mentioned it is different in addition to, the touch sensor based on friction generator of embodiment two is with embodiment one based on rubbing
The touch sensor of wiping generator is identical, and details are not described herein again.
Fig. 5 is the structure diagram of the touch sensor embodiment three provided by the invention based on friction generator.Such as Fig. 5
Shown, the touch sensor based on friction generator in the embodiment includes：One friction generator.Wherein, shown in Fig. 5
Friction generator is the friction generator of five layers of membrane structure between two parties, it includes：The first electrode layer 110 that is cascading,
Fine motion enhancement layer 500, between two parties the first high polymer insulating layer 120, film layer 150, the second high polymer insulating layer
140 and the second electrode lay 130；Specifically, the first side surface of the first high polymer insulating layer 120 is provided with fine motion reinforcement
Layer 500, the second side surface of the first high polymer insulating layer 120 is opposite with the first side surface of film layer 150 between two parties to be set
Composition frictional interface is put, the second side surface of film layer 150 is provided with the second high polymer insulating layer 140 between two parties, when outer
When power acts on friction generator, the first high polymer insulating layer 120 two friction circles opposite with film layer 150 between two parties
Face phase mutual friction, first electrode layer 110 and the second electrode lay 130 form the output terminal of friction generator.
It should be noted that fine motion enhancement layer 500 can not only be arranged on first electrode layer 110 and first as shown in Figure 5
Between high polymer insulating layer 120；The second high polymer insulating layer 140 and the second electrode lay can also be arranged on
Between 130；It can also be arranged between 150 and second high polymer insulating layer 140 of film layer between two parties；In addition, can also be
Above three position (i.e. between 110 and first high polymer insulating layer 120 of first electrode layer, the second high molecular polymer
Between insulating layer 140 and the second electrode lay 130 and between two parties between 150 and second high polymer insulating layer 140 of film layer)
Fine motion enhancement layer 500 is set, that is to say, that fine motion enhancement layer 500, which can be arranged on inside friction generator, does not form friction circle
Between two surfaces in face, do not limit herein.
In addition, it can not only make the second side surface of the first high polymer insulating layer 120 and film between two parties as shown in Figure 5
First side surface of layer 150 is oppositely arranged composition frictional interface；Also the second side surface of film layer 150 between two parties and second high can be made
First side surface of Molecularly Imprinted Polymer insulating layer 140 is oppositely arranged composition frictional interface；It can also make the first high molecular polymer exhausted
Second side surface of edge layer 120 and the first side surface of film layer 150 between two parties, and the second side surface of film layer 150 between two parties
Composition frictional interface is oppositely arranged with the first side surface of the second high polymer insulating layer 140, those skilled in the art can
To make choice as needed, do not limit herein.
If make the second side surface of film layer between two parties is opposite with the first side surface of the second high polymer insulating layer to set
Composition frictional interface is put, fine motion enhancement layer not only may be provided between first electrode layer and the first high polymer insulating layer；
It can also be arranged between the second high polymer insulating layer and the second electrode lay；The first high molecular polymerization can also be arranged on
Between thing insulating layer and between two parties film layer；In addition, can also be in above three position (i.e. first electrode layer and the first high molecular polymerization
Between thing insulating layer, between the second high polymer insulating layer and the second electrode lay and the first high polymer insulating layer with
Between two parties between film layer) it is respectively provided with fine motion enhancement layer, that is to say, that and fine motion enhancement layer can be arranged on inside friction generator not
Between two surfaces for forming frictional interface, do not limit herein.
If make the second side surface and the first side surface of film layer between two parties of the first high polymer insulating layer, Yi Jiju
Between the second side surface of film layer and the first side surface of the second high polymer insulating layer be oppositely arranged composition frictional interface,
Fine motion enhancement layer not only may be provided between first electrode layer and the first high polymer insulating layer；Second can also be arranged on
Between high polymer insulating layer and the second electrode lay；Can also be in above-mentioned two position (i.e. first electrode layer and the first high score
Between sub- polymer insulation layer between the second high polymer insulating layer and the second electrode lay) fine motion enhancement layer is respectively provided with,
That is, fine motion enhancement layer can be arranged between two surfaces for not forming frictional interface inside friction generator, herein
Do not limit.
Except it is above-mentioned it is different in addition to, the touch sensor based on friction generator of embodiment three is with embodiment one based on rubbing
The touch sensor of wiping generator is identical, and details are not described herein again.
Fig. 6 is the structure diagram of the touch sensor example IV provided by the invention based on friction generator.Such as Fig. 6
Shown, the touch sensor based on friction generator in the embodiment includes：One friction generator.Wherein, shown in Fig. 6
Friction generator is the friction generator of five layers of intervening electrode structure, it includes：The first electrode layer 110 that is cascading,
Fine motion enhancement layer 500, the first high polymer insulating layer 120, intervening electrode layer 160, the second high polymer insulating layer
140 and the second electrode lay 130；Specifically, the first side surface of the first high polymer insulating layer 120 is provided with fine motion reinforcement
Layer 500, the second side surface of the first high polymer insulating layer 120 is opposite with the first side surface of intervening electrode layer 160 to be set
Composition frictional interface is put, the second side surface of intervening electrode layer 160 is provided with the second high polymer insulating layer 140, when outer
When power acts on friction generator, the first high polymer insulating layer 120 two friction circles opposite with intervening electrode layer 160
After face phase mutual friction, first electrode layer 110 and the second electrode lay 130 are connected and intervening electrode layer 160 forms friction generator
Output terminal.
It should be noted that fine motion enhancement layer 500 can not only be arranged on first electrode layer 110 and first as shown in Figure 6
Between high polymer insulating layer 120；The second high polymer insulating layer 140 and the second electrode lay can also be arranged on
Between 130；It can also be arranged between 160 and second high polymer insulating layer 140 of intervening electrode layer；In addition, can also be
Above three position (i.e. between 110 and first high polymer insulating layer 120 of first electrode layer, the second high molecular polymer
Between insulating layer 140 and the second electrode lay 130 between 160 and second high polymer insulating layer 140 of intervening electrode layer)
Fine motion enhancement layer 500 is set, that is to say, that fine motion enhancement layer 500, which can be arranged on inside friction generator, does not form friction circle
Between two surfaces in face, do not limit herein.
In addition, it can not only make the second side surface and the intervening electrode of the first high polymer insulating layer 120 as shown in Figure 6
First side surface of layer 160 is oppositely arranged composition frictional interface；Also the second side surface of intervening electrode layer 160 and second high can be made
First side surface of Molecularly Imprinted Polymer insulating layer 140 is oppositely arranged composition frictional interface；It can also make the first high molecular polymer exhausted
Second side surface of edge layer 120 and the first side surface of intervening electrode layer 160, and the second side surface of intervening electrode layer 160
Composition frictional interface is oppositely arranged with the first side surface of the second high polymer insulating layer 140, those skilled in the art can
To make choice as needed, do not limit herein.
If make the second side surface of intervening electrode layer is opposite with the first side surface of the second high polymer insulating layer to set
Composition frictional interface is put, fine motion enhancement layer not only may be provided between first electrode layer and the first high polymer insulating layer；
It can also be arranged between the second high polymer insulating layer and the second electrode lay；The first high molecular polymerization can also be arranged on
Between thing insulating layer and intervening electrode layer；In addition, can also be in above three position (i.e. first electrode layer and the first high molecular polymerization
Between thing insulating layer, between the second high polymer insulating layer and the second electrode lay and the first high polymer insulating layer with
Between intervening electrode layer) it is respectively provided with fine motion enhancement layer, that is to say, that and fine motion enhancement layer can be arranged on inside friction generator not
Between two surfaces for forming frictional interface, do not limit herein.
If make the second side surface of the first high polymer insulating layer and the first side surface of intervening electrode layer, Yi Jiju
Between the second side surface of electrode layer and the first side surface of the second high polymer insulating layer be oppositely arranged composition frictional interface,
Fine motion enhancement layer not only may be provided between first electrode layer and the first high polymer insulating layer；Second can also be arranged on
Between high polymer insulating layer and the second electrode lay；Can also be in above-mentioned two position (i.e. first electrode layer and the first high score
Between sub- polymer insulation layer between the second high polymer insulating layer and the second electrode lay) fine motion enhancement layer is respectively provided with,
That is, fine motion enhancement layer can be arranged between two surfaces for not forming frictional interface inside friction generator, herein
Do not limit.
Except it is above-mentioned it is different in addition to, the touch sensor based on friction generator of example IV is with embodiment one based on rubbing
The touch sensor of wiping generator is identical, and details are not described herein again.
In above-mentioned each embodiment, each layer mentioned in friction generator is flexible material, i.e., first electrode layer,
First high polymer insulating layer, the second high polymer insulating layer, between two parties the second electrode lay, film layer, intervening electrode
Layer is flexible material.
In above-mentioned each embodiment, formed in friction generator at least one face in two surfaces of frictional interface
Array of protrusions can be equipped with.The preferred micron order of the array of protrusions or nano level bulge-structure, can be by the way of diamond shape arrangement
Arrange.The array of protrusions can effectively increase CONTACT WITH FRICTION area, increase frictional resistance, improve the defeated of electric pressure signal
Go out efficiency.
In above-mentioned each embodiment, the appearance and size of fine motion enhancement layer is suitable with the appearance and size of touch sensor, and one
As can according to its setting specific location be finely adjusted, thickness may be provided between 0.1-2.0mm.Fine motion enhancement layer can use flat
Harden structure, or the engraved structure for using array to offer geometry through hole.The material of fine motion enhancement layer select mostly plastics or
Rubber.
More than specific set be for example, during actual implementation, can as the case may be configured, not do and have herein
Body limits.
The touch sensor based on friction generator provided according to the present invention, can be right by adding fine motion enhancement layer
The perception of stress caused by minor motion is sensitiveer, improves the sensitivity of touch sensor.
Fig. 7 a are the functional block diagram of one embodiment of tactile sensing device of robot's sensory perceptual system provided by the invention, as shown in Figure 7a, machine
Device people's tactilely-perceptible system, including touch sensor 10, signal acquisition module 20, central control module 30 and power module 40.
Touch sensor 10 can use the touch sensor based on friction generator in above-mentioned each embodiment, referring to above-described embodiment
In the touch sensor based on friction generator description, details are not described herein.
Signal acquisition module 20 is connected with touch sensor 10, i.e. the input terminal and touch sensor of signal acquisition module 20
10 output terminal is connected, the electric pressure signal for the output of acquisition process touch sensor.As shown in figure 8, signal acquisition module
20 include：Amplifying circuit 21, rectification circuit 22, filter circuit 23 and analog to digital conversion circuit 24.The input terminal of amplifying circuit 21 is (i.e.
The input terminal of signal acquisition module 20) it is connected with the output terminal of touch sensor 10, for amplifying the output of touch sensor 10
Electric pressure signal.The input terminal of rectification circuit 22 is connected with the output terminal of amplifying circuit 21, for export amplifying circuit 21
Amplified electric pressure signal carries out rectification processing.The input terminal of filter circuit 23 is connected with the output terminal of rectification circuit 22, uses
Interference noise in the electric pressure signal for filtering out the output of rectification circuit 22.The input terminal and filter circuit of analog to digital conversion circuit 24
23 output terminal is connected, and the simulated pressure electric signal for filter circuit 23 to be exported is converted to digital pressure electric signal, output
To central control module 30.Amplifying circuit 21, rectification circuit 22, the power input of filter circuit 23 and analog to digital conversion circuit 24
(i.e. the power input of signal acquisition module 20) is all connected (not shown) with the output terminal of power module 40, and then uses
Electric energy in power module 40.
Central control module 30 is connected with signal acquisition module 20, i.e. the input terminal and signal acquisition of central control module 30
The output terminal of module 20 is connected, for the electric pressure signal exported according to signal acquisition module 20, regulating system operation.According to letter
The electric pressure signal that number acquisition module 20 exports, central control module 30 can be adjusted dynamics and/or orientation angle.For example,
Touch sensor is arranged on the manipulator of robot, when the manipulator picks up object, after touching object, due to object
External force to manipulator acts on, and makes the touch sensor stress on manipulator, output pressure electric signal, through signal acquisition module 20
After acquisition process, export to central control module 30.Central control module 30 receive processing after electric pressure signal after, into
Row judges.If when the electric pressure signal does not export persistently, central control module may determine that the object does not have continuous disturbances work
For manipulator, i.e. the object is not lifted.Central control module further according to electric pressure signal, judges manipulator stress
Position, when forced position is whole palm, can determine whether out that manipulator touches whole object, but dynamics is smaller, be not enough to by
Object picks up.The mechanical hand pickup dynamics of central control module automatic adjustment, enables the object to be picked.Work as central control module
According to electric pressure signal, manipulator forced position is judged.When forced position is single finger, it can determine whether out that manipulator is
Object part is touched, at this time, the angle of the mechanical hand pickup object of central control module automatic adjustment, enables manipulator to touch
To whole object, so as to pick up object.Herein by way of example only, it is necessary to carry out as the case may be during actual implementation
Set.
Power module 40 is connected with signal acquisition module 20, i.e. the input terminal of power module 40 and signal acquisition module 20
Power input is connected, for powering for signal acquisition module 20.The power module 40 can use dismountable energy-storage travelling wave tube, such as
Storage battery, super capacitor etc., or using external power supply, using the mode of wired power supply, be connected, incited somebody to action with external power supply by cable
The electric energy of external power supply is supplied to signal acquisition module 20 and central control module 30 to use.Though it should be appreciated that in Fig. 7 a
Central control module 30 so is not shown with power module 40 to be connected, still, it uses power supply indirectly by signal acquisition module 20
Electric energy in module 40.
As shown in Figure 7b, tactile sensing device of robot's sensory perceptual system provided by the invention can further include：Switch module 50,
It is connected with signal acquisition module 20 and power module 40 respectively, i.e. the output of the input terminal of switch module 50 and power module 40
End is connected, and the output terminal of switch module 50 is connected with the power input of signal acquisition module 20, for controlling power module 40
Power for signal acquisition module 20.The power module 40 can use dismountable energy-storage travelling wave tube, such as storage battery, super capacitor,
Or using external power supply, using the mode of wired power supply, it is connected by cable with external power supply, the electric energy of external power supply is provided
Used to signal acquisition module 20 and central control module 30.It should be appreciated that although control mould in center is not shown in Fig. 7 b
Block 30 is connected by switch module 50 with power module 40, and still, it uses power module indirectly by signal acquisition module 20
Electric energy in 40.
As shown in figure 8, signal acquisition module 20 includes：Amplifying circuit 21, rectification circuit 22, filter circuit 23 and modulus turn
Change circuit 24.The output terminal phase of the input terminal (i.e. the input terminal of signal acquisition module 20) and touch sensor 10 of amplifying circuit 21
Even, the electric pressure signal exported for amplifying touch sensor 10.The input terminal of rectification circuit 22 and the output of amplifying circuit 21
End is connected, and the amplified electric pressure signal for amplifying circuit 21 to be exported carries out rectification processing.The input of filter circuit 23
End is connected with the output terminal of rectification circuit 22, the interference noise in electric pressure signal for filtering out the output of rectification circuit 22.Mould
The input terminal of number conversion circuit 24 is connected with the output terminal of filter circuit 23, for the simulated pressure electricity for exporting filter circuit 23
Signal is converted to digital pressure electric signal, exports to central control module 30.Amplifying circuit 21, rectification circuit 22, filter circuit
23 and analog to digital conversion circuit 24 power input (i.e. the power input of signal acquisition module 20) all with switch module 50
Output terminal is connected (not shown), and then passes through switch module 50 and use the electric energy in power module 40.
Fig. 9 a and Fig. 9 b are two kinds of setting structures that touch sensor is different in tactile sensing device of robot's sensory perceptual system embodiment
Schematic diagram.In Fig. 9 a, touch sensor is entirely provided to the surface of mechanical palms.In Fig. 9 b, by multiple touch sensors with
Array format is arranged as tactile sensor array.Figure 10 is the structure diagram of tactile sensor array arrangement.As shown in Figure 10,
Multiple touch sensors arrange in the form of an array, form the tactile sensor array of M rows N row, and often capable touch sensor is wrapped
One output terminal of the friction generator included is interconnected with one another, and obtains the first row output terminal M1, the second row output terminal M2 and
Three row output terminal M3, form row output terminal.Another output terminal of friction generator included by the touch sensor of each column that
This is connected with each other, and obtains first row output terminal N1, secondary series output terminal N2 and the 3rd row output terminal N3, forms row output terminal.Will
It is defeated when external force is acted on touch sensor after row output terminal and row output terminal are connected by interface with signal acquisition module
Go out electric pressure signal.The tactile sensing for producing electric pressure signal is identified according to the output terminal of electric pressure signal by signal acquisition module
The position of device.Touch sensor quantity included by tactile sensor array can according to measurement accuracy requirement and setting area come
Determine, do not limit herein.
In addition to touch sensor is arranged on mechanical palms shown in Fig. 9 a and Fig. 9 b, touch sensor can also be arranged on machine
Touch sensor, can also such as be arranged on the arm of robot, work as machine by the body surface that device people directly contacts with object
During people's carry an object, strength of adjustment and/or angle can be perceived by the external force that object acts on arm, it is steady to guarantee
Carry an object, object is dropped.Or touch sensor can also be arranged on to foot, leg, head, chest, back etc.
Position, when robot is touched such as barrier, can flexibly adjust direction, situations such as with avoiding barrier.Or such as machine
When people plays football, position that foot, leg, head, chest etc. can directly be contacted with ball after being contacted with ball, is acted on according to ball
The external force of touch sensor, can flexibly adjust the stress point at each position, and then the trend of control ball.It is to illustrate above
Bright, when specific implementation, can be configured according to actual conditions, be not specifically limited herein.
The tactile sensing device of robot's sensory perceptual system provided according to the present invention, central control module are automatic to adjust according to electric pressure signal
Save the dynamics and/or angle of tactile sensing device of robot's sensory perceptual system, it is possible to achieve automatic selection of objects etc. operates.The tactile sensing device of robot feels
Know that system structure is simple, high sensitivity.When touch sensor is set using array way, the measurement accuracy higher of system can be made.
The various modules that are previously mentioned in the present invention, circuit are by hard-wired circuit, although some of which module, electricity
Road is integrated with software, but the present invention it is claimed be the corresponding function of integrated software hardware circuit, rather than just software
Itself.
It should be appreciated by those skilled in the art that the apparatus structure shown in attached drawing or embodiment is only schematical, table
Show logical construction.Wherein it is probably as the module that separating component is shown or may not be physically separate, as module
The component of display is probably or may not be physical module.
Finally it should be noted that be：Listed above be only the present invention specific embodiment, the technology of certain this area
The present invention can be modified by personnel and modification, if these modifications and variations belong to the claims in the present invention and its equivalent skill
Within the scope of art, protection scope of the present invention is considered as.
Claims (23)
- A kind of 1. touch sensor based on friction generator, it is characterised in that including：At least one friction generator；Wherein, The friction generator includes：The first electrode layer being cascading, the first high polymer insulating layer, and the second electricity Pole layer；Wherein, two opposite surfaces of the friction generator form frictional interface, when external force acts on the friction generator When upper, the frictional interface phase mutual friction, the friction generator exports electric pressure signal corresponding with the external force；The first electrode layer and the second electrode lay form the output terminal of the friction generator；The touch sensor further includes：At least one fine motion enhancement layer, is arranged on not form inside the friction generator and rubs Between two surfaces for wiping interface, the pressure telecommunications exported during external force effect is being sensed for strengthening the friction generator Number.
- 2. the touch sensor according to claim 1 based on friction generator, it is characterised in that first macromolecule Polymer insulation layer two surfaces opposite with the second electrode lay form the frictional interface；The fine motion enhancement layer is set Between the first electrode layer and first high polymer insulating layer.
- 3. the touch sensor according to claim 1 based on friction generator, it is characterised in that the friction generator Further include：Second high polymer insulating layer；Second high polymer insulating layer is arranged on first macromolecule Between polymer insulation layer and the second electrode lay；Wherein, first high polymer insulating layer and described second high Two opposite surfaces of Molecularly Imprinted Polymer insulating layer form the frictional interface；The fine motion enhancement layer is arranged between the first electrode layer and first high polymer insulating layer；And/or It is arranged between second high polymer insulating layer and the second electrode lay.
- 4. the touch sensor according to claim 1 based on friction generator, it is characterised in that the friction generator Further include：Second high polymer insulating layer and between two parties film layer；Second high polymer insulating layer is stacked On the second electrode lay, the film layer between two parties is arranged on first high polymer insulating layer and described second high Between Molecularly Imprinted Polymer insulating layer；Wherein, first high polymer insulating layer and the film layer between two parties, and/or institute State two surfaces opposite with second high polymer insulating layer of film layer between two parties and form the frictional interface.
- 5. the touch sensor according to claim 1 based on friction generator, it is characterised in that the friction generator Further include：Second high polymer insulating layer and intervening electrode layer；Second high polymer insulating layer is stacked On the second electrode lay, the intervening electrode layer is arranged on first high polymer insulating layer and described second high Between Molecularly Imprinted Polymer insulating layer；Wherein, first high polymer insulating layer and the intervening electrode layer, and/or institute State intervening electrode layer two surface opposite with second high polymer insulating layer and form the frictional interface, described the One electrode layer and the second electrode lay are connected the rear output terminal that the friction generator is formed with the intervening electrode layer.
- 6. the touch sensor according to claim 1 or 2 based on friction generator, it is characterised in that first electricity Pole layer, first high polymer insulating layer, the second electrode lay are flexible material.
- 7. the touch sensor according to claim 3 based on friction generator, it is characterised in that the first electrode Layer, first high polymer insulating layer, second high polymer insulating layer, the second electrode lay are soft Property material.
- 8. the touch sensor according to claim 4 based on friction generator, it is characterised in that the first electrode It is layer, first high polymer insulating layer, second high polymer insulating layer, the second electrode lay, described Film layer is flexible material between two parties.
- 9. the touch sensor according to claim 5 based on friction generator, it is characterised in that the first electrode It is layer, first high polymer insulating layer, second high polymer insulating layer, the second electrode lay, described Intervening electrode layer is flexible material.
- 10. according to touch sensor of the claim 1-5 any one of them based on friction generator, it is characterised in that form At least one face in two surfaces of the frictional interface is equipped with array of protrusions.
- 11. the touch sensor according to claim 10 based on friction generator, it is characterised in that the array of protrusions Arrange for diamond shape.
- 12. according to touch sensor of the claim 1-5 any one of them based on friction generator, it is characterised in that described Fine motion enhancement layer is slab construction or is the engraved structure that array offers geometry through hole.
- 13. according to touch sensor of the claim 1-5 any one of them based on friction generator, it is characterised in that described The material of fine motion enhancement layer is plastics or rubber.
- 14. the touch sensor according to claim 1 based on friction generator, it is characterised in that multiple frictions Generator is connected in a manner of in parallel and/or series connection, wherein, the triboelectricity of multiple in parallel and/or series system connections Machine is set by tile mode and/or overlapped way.
- 15. the touch sensor according to claim 1 based on friction generator, it is characterised in that further include：Described Friction generator periphery stacks gradually the insulating layer, shielded layer and protective layer of cladding；Wherein,The insulating layer, for preventing the friction generator from contacting with each other with the shielded layer, reduces the electric pressure signal Loss；The shielded layer, for shielding outside electromagnetic interference, to protect the electric pressure signal of the friction generator output；The protective layer, for friction generator described in sealing protection, prevents the friction generator to be subject under external force Damage.
- 16. a kind of tactile sensing device of robot's sensory perceptual system, it is characterised in that including any one of the claim 1-15 tactile sensings Device, further includes：Signal acquisition module, central control module and power module；Wherein,The touch sensor is used for the external force of induction effect on it, exports electric pressure signal corresponding with the external force；The signal acquisition module is connected with the touch sensor, the pressure exported for touch sensor described in acquisition process Electric signal；The central control module is connected with the signal acquisition module, for the pressure exported according to the signal acquisition module Electric signal, regulating system operation；The power module is connected with the signal acquisition module, for powering for signal acquisition module.
- 17. tactile sensing device of robot's sensory perceptual system according to claim 16, it is characterised in that further include switch module；Wherein, The switch module is connected with the signal acquisition module and the power module respectively, for controlling the power module as institute State signal acquisition module power supply.
- 18. tactile sensing device of robot's sensory perceptual system according to claim 16 or 17, it is characterised in that the signal acquisition module Including：Amplifying circuit, rectification circuit, filter circuit and analog to digital conversion circuit,The input terminal of the amplifying circuit is connected with the output terminal of the touch sensor, defeated for amplifying the touch sensor The electric pressure signal gone out；The input terminal of the rectification circuit is connected with the output terminal of the amplifying circuit, is put for export the amplifying circuit Electric pressure signal after big carries out rectification processing；The input terminal of the filter circuit is connected with the output terminal of the rectification circuit, for filtering out the rectification circuit output Interference noise in electric pressure signal；The input terminal of analog-digital conversion circuit as described is connected with the output terminal of the filter circuit, for the filter circuit to be exported Simulated pressure electric signal be converted to digital pressure electric signal.
- 19. tactile sensing device of robot's sensory perceptual system according to claim 16 or 17, it is characterised in that the central control module It is further used for：The electric pressure signal exported according to the signal acquisition module carries out dynamics adjusting and/or orientation angle is adjusted.
- 20. tactile sensing device of robot's sensory perceptual system according to claim 16 or 17, it is characterised in that the power module is storage Energy element or the electric modular converter being connected by cable with external power supply.
- 21. tactile sensing device of robot's sensory perceptual system according to claim 16 or 17, it is characterised in that tactile sensing device of robot's sense Know that system includes multiple touch sensors；Multiple touch sensors arrange in the form of an array, form touching for M rows N row Feel sensor array, often an output terminal of the friction generator included by the touch sensor of row is interconnected with one another, Form row output terminal；Another output terminal of friction generator included by the touch sensor of each column connects each other Connect, form row output terminal；For when external force effect with the touch sensor when, output pressure electric signal.
- 22. tactile sensing device of robot's sensory perceptual system according to claim 16 or 17, it is characterised in that the touch sensor is set Put on the surface that robot is directly contacted with object.
- 23. tactile sensing device of robot's sensory perceptual system according to claim 22, it is characterised in that the robot and object are direct The surface of contact is hand, arm, foot, leg, head, chest, and/or the back of robot.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610297099.5A CN105991064B (en) | 2016-05-06 | 2016-05-06 | Touch sensor and tactile sensing device of robot's sensory perceptual system based on friction generator |
| PCT/CN2016/105528 WO2017190485A1 (en) | 2016-05-06 | 2016-11-11 | Sensor based on friction power generation, apparatus for collecting physiological signal of human body, and robot tactile perception system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610297099.5A CN105991064B (en) | 2016-05-06 | 2016-05-06 | Touch sensor and tactile sensing device of robot's sensory perceptual system based on friction generator |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2017190485A1 (en) * | 2016-05-06 | 2017-11-09 | 纳智源科技（唐山）有限责任公司 | Sensor based on friction power generation, apparatus for collecting physiological signal of human body, and robot tactile perception system |
| CN107968592B (en) * | 2016-10-21 | 2020-03-17 | 北京纳米能源与系统研究所 | Packaging structure and packaging method |
| CN109077730B (en) * | 2017-06-13 | 2022-03-04 | 北京纳米能源与系统研究所 | Muscle micro-motion control element, switch device, man-machine interaction system and front-end device |
| CN108051027B (en) * | 2017-11-23 | 2019-12-31 | 清华-伯克利深圳学院筹备办公室 | Sliding sense sensor capable of measuring pressure and sliding simultaneously |
| CN108453735B (en) * | 2018-03-15 | 2021-03-02 | 河南大学 | Grabbing method and device based on bionic manipulator of friction nano generator |
| CN111104659A (en) * | 2018-10-26 | 2020-05-05 | 北京纳米能源与系统研究所 | Film for intelligent identification and intelligent identification system |
| CN109713946B (en) * | 2019-01-22 | 2020-08-07 | 东北大学 | Modularized touch perception control device and method |
| CN110388869B (en) * | 2019-08-23 | 2021-01-05 | 任干支 | Sensor, coil array, positioning method and touch collector for bionic skin |
| CN110426633A (en) * | 2019-09-06 | 2019-11-08 | 中国科学院兰州化学物理研究所 | A kind of triboelectricity apparatus test device |
| CN111721456B (en) * | 2020-03-06 | 2022-03-25 | 中国科学院上海微系统与信息技术研究所 | Composite touch sensor, control system and control method thereof |
| CN111664875B (en) * | 2020-05-27 | 2022-05-20 | 江苏大学 | Self-powered sliding sensor with surface microtexture and variable contact area structure |
| WO2021253278A1 (en) * | 2020-06-17 | 2021-12-23 | 中国科学院深圳先进技术研究院 | Touch sensor, manufacturing method, and intelligent device comprising touch sensor |
| CN112072949B (en) * | 2020-09-18 | 2021-07-13 | 郑州科技学院 | Tactile sensor for determining contact surface area |
| CN113074840B (en) * | 2021-03-30 | 2023-03-24 | 西交利物浦大学 | Active pressure sensor and preparation method thereof |
| CN113147938B (en) * | 2021-04-09 | 2022-04-15 | 苏州大学 | Self-powered sensing device for spheroid robot |
| CN113162457B (en) * | 2021-04-23 | 2023-10-20 | 大连海事大学 | Bionic touch sensor based on friction nano generator |
| CN114739539B (en) * | 2022-04-08 | 2024-01-05 | 苏州大学 | Laminated friction voltage sensor and preparation method thereof |
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| CN101206544B (en) * | 2006-12-22 | 2010-05-19 | 财团法人工业技术研究院 | Man machine interactive touch sensing device and method thereof |
| CN103532425B (en) * | 2012-07-05 | 2015-07-29 | 纳米新能源（唐山）有限责任公司 | A kind of nano friction generator of field drives |
| CN103368448B (en) * | 2013-01-16 | 2015-07-08 | 北京纳米能源与系统研究所 | Self-driven acoustic wave transducer |
| CN104167950B (en) * | 2013-05-16 | 2017-03-08 | 纳米新能源（唐山）有限责任公司 | Friction generator |
| CN104253561B (en) * | 2013-06-25 | 2018-06-08 | 北京纳米能源与系统研究所 | Sliding friction generator, electricity-generating method and vector shift sensor |
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| CN205647296U (en) * | 2016-05-06 | 2016-10-12 | 纳智源科技（唐山）有限责任公司 | Touch sensing ware and tactile sensing system of robot based on friction electric generator |
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