CN105974342A - Magnetic flux density measuring apparatus and measuring method thereof - Google Patents

Magnetic flux density measuring apparatus and measuring method thereof Download PDF

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Publication number
CN105974342A
CN105974342A CN201610523599.6A CN201610523599A CN105974342A CN 105974342 A CN105974342 A CN 105974342A CN 201610523599 A CN201610523599 A CN 201610523599A CN 105974342 A CN105974342 A CN 105974342A
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CN
China
Prior art keywords
guide rail
positioner
controller
measuring probe
magnetic density
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Granted
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CN201610523599.6A
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Chinese (zh)
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CN105974342B (en
Inventor
吴加富
缪磊
吴旭东
高迎辉
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Suzhou RS Technology Co Ltd
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Suzhou RS Technology Co Ltd
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Priority to CN201610523599.6A priority Critical patent/CN105974342B/en
Publication of CN105974342A publication Critical patent/CN105974342A/en
Priority to PCT/CN2016/106479 priority patent/WO2018006532A1/en
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Publication of CN105974342B publication Critical patent/CN105974342B/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/12Measuring magnetic properties of articles or specimens of solids or fluids
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/07Hall effect devices

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

The invention discloses a magnetic flux density measuring apparatus which includes: a platform which has a first guide rail; a positioning apparatus which is in slide connection to the platform through the first guide rail and is intended for accommodating and positioning a magnetized magnet; a measuring apparatus which includes a measuring probe which is in fixed connection to the platform and is arranged right above the first guide rail, the measuring probe being intended for acquiring a Hall voltage signal generated when the positioning apparatus slides on the first guide rail and passes below the measuring probe; a control apparatus which includes a controller, a data acquisition card and a driving mechanism. The first guide rail is provided with a first scale raster, and the positioning apparatus is provided with a raster reading head which reads first displacement information of the positioning apparatus sliding along the first guide rail and transmits the first displacement information to the controller so as to output a triggering interval signal to the data acquisition card which reads the Hall voltage signal every one triggering interval and converts the Hall voltage signal to a magnetic flux density value and transmits the magnetic flux density value to the controller. According to the invention, the apparatus realizes high speed automated online measuring of one-dimensional contour of the space of the magnetized magnetic flux density, and has high measuring efficiency and precision.

Description

Magnetic density measurement apparatus and measuring method thereof
Technical field
The present invention relates to the technical field of automation equipment that magnetic flux density is measured, more specifically, the present invention Relate to a kind of magnetic density measurement apparatus and measuring method thereof.
Background technology
Magnetic density, reflects that the density degree of the magnetic line of force, magnetic density size are to judge in quantity The important indicator whether the Magnet quality that magnetizes reaches a standard, therefore, measures aobvious to the magnetic density of the Magnet that magnetizes Obtain the most necessary.
In prior art, the measurement apparatus measuring magnetic density mostly is handheld measuring device, there is survey Amount time length, the measurement shortcomings such as efficiency is low, certainty of measurement is low, it is difficult to meet when producing in enormous quantities the most complete The demand of inspection, is also unfavorable for improving the quality of the Magnet that magnetizes.
Summary of the invention
For weak point present in above-mentioned technology, the present invention provides a kind of magnetic density measurement apparatus, By position measurement and the measurement system integration, it is achieved that the height to the one-dimensional profile of the magnetic flux density that magnetizes Speed automatic online is measured, and measures efficiency height, certainty of measurement height;
The present invention also provides for the measuring method of a kind of magnetic density, between data collecting card triggers every one Away from read measuring probe collection Hall voltage signal and convert thereof into magnetic density value be sent to control Device, i.e. data collecting card realize location triggered collection, and the single measurement time is short, trigger distance less, survey Amount efficiency is high.
In order to realize according to object of the present invention and further advantage, the present invention is by the following technical programs Realize:
The present invention provides a kind of magnetic density measurement apparatus, comprising: platform, which is provided with for level The first guide rail that direction is slided;
Positioner, it is for accommodating and magnetize Magnet in location, described in magnetize Magnet and described positioner Surface flushes;Described positioner is connected on described platform by described first slide;
Measurement apparatus, it includes being fixedly attached to described platform and being positioned at the survey directly over described first guide rail Amount probe, slides and logical for gathering the described positioner being loaded with the Magnet that magnetizes on described first guide rail The Hall voltage signal produced when crossing below described measuring probe;And,
Controlling device, it includes controller, data collecting card and drive mechanism;Described drive mechanism connects To described controller, it is used for driving described positioner to slide along described first guide rail;
Wherein, described first guide rail is provided with the first scale grating being flush with it, and described positioner is provided with Grating reading head is to read the first displacement information of sliding along described first guide rail of described positioner and to send To described controller;Described controller triggers distance signal to described according to described first displacement information output Data collecting card, described data collecting card triggers spacing every one and reads described Hall voltage signal and incite somebody to action It is converted into magnetic density value and is sent to described controller.
Preferably, described measurement apparatus includes:
Probe fixing device, it is used for fixing described measuring probe;
First alignment pin, it is for being fixedly attached to described platform by described probe fixing device.
Preferably, described platform be additionally provided with slide for vertical direction the second guide rail, be positioned at described measurement The laser displacement sensor on probe side, described laser displacement sensor is connected to described controller;
Described measurement apparatus includes the probe fixing device of fixing described measuring probe, the fixing dress of described probe Put and the most vertically slided by described second guide rail;
Wherein, described laser displacement sensor for read its with described magnetize vertical between magnet surface First distance is sent to described controller.
Preferably, described platform is provided with the 3rd guide rail slided for horizontal direction;Described 3rd guide rail Line of travel is vertical with the line of travel of described first guide rail;Described first slide is connected to described On three guide rails.
Preferably, described 3rd guide rail is provided with the second scale grating flushed with described 3rd guide rail, institute State grating reading head and read described positioner along described 3rd guide rail under described second scale grating coordinates The second displacement information of sliding also is sent to described controller.
Preferably, described positioner includes:
Locating piece, it is provided with the groove accommodating the Magnet that magnetizes;
Second alignment pin, several described second alignment pins are respectively fixedly connected with two phases of described groove Adjacent side;
Elastic device, it is the first elastic parts and laying respectively at described two other sides adjacent of groove Two elastic partss;
Wherein, described locating piece is additionally provided with the first chute, the second chute;Described first elastic parts edge Described first chute slides, described second elastic parts slides to realize the most relatively along described second chute Flicking or returning in described locating piece.
Preferably, the first elastic parts, it includes being positioned at the first bullet block outside described groove, runs through Described locating piece and be connected to the second bullet block of described first bullet block, the first spring and run through described location Button outside block one;Described second bullet block one end by described first spring be connected to described locating piece, The described second bullet block other end is fixing with described button to be connected;
Second elastic parts, it includes being positioned at the 3rd bullet block outside described groove, runs through described locating piece And it is connected to the 4th bullet block of described 3rd bullet block, the second spring;Described 4th bullet block passes through described second Spring is connected to described locating piece;
Wherein, lay respectively at two other of described groove with described second bullet block adjacent for described first bullet block Side;
Described second bullet block is provided with projection, and the side that described 4th bullet block is contrary with described second spring is provided with Stopper slot, described projection is supported with described stopper slot.
The measuring method of a kind of magnetic density, comprises the following steps:
Before measurement starts, the Magnet that will magnetize is positioned on positioner, adjusts described positioner and makes its position On the first guide rail immediately below described measuring probe;
When measuring beginning, motor is driven to drive described positioner to slide along described first guide rail;Grating is read Several are read the first displacement information of sliding along described first guide rail of described positioner and are sent to described control Device processed;Described measuring probe gathers described positioner and slides and by described survey on described first guide rail The Hall voltage signal produced time below amount probe;
Described controller receives described first displacement information output and triggers distance signal to described data acquisition Card;
Described data collecting card triggers spacing every one and reads the Hall voltage letter that described measuring probe gathers Number and convert thereof into magnetic density value and be sent to described controller;
After single measurement completes, system reset, controller outgoing position-magnetic density curve is with display.
Preferably, measure before starting, further comprise the steps of:
Adjust measuring probe and the relative altitude magnetized between Magnet and described measuring probe is fixed.
Preferably, adjust described positioner and be located at immediately below described measuring probe, including step:
Drive motor drive be loaded with described first guide rail of described positioner along described 3rd guide rail slide to Stop when described positioner is positioned at immediately below described measuring probe;
Described grating reading head reads the second displacement information that described first guide rail slides along described 3rd guide rail And it is sent to described controller.
The present invention at least includes following beneficial effect:
1) the magnetic density measurement apparatus that the present invention provides, is fixedly attached to platform and is positioned at positioner The measuring probe collection of top is loaded with the positioner of the Magnet that magnetizes and slides on the first guide rail and by measuring The Hall voltage signal produced time below probe, grating reading head reads positioner and slides along the first guide rail The first displacement information and be sent to controller, controller according to first displacement signal output trigger spacing letter Number give data collecting card, data collecting card every one trigger spacing read this Hall voltage signal and by it It is converted into magnetic density value and is sent to controller, it is achieved that the first guide rail line of travel magnetic density three The high-speed automated on-line measurement of dimension data, integrates position measurement with magnetic density measurement, Measure efficiency height, certainty of measurement height;
2) probe fixing device is popped one's head in for fixation measuring, and measuring probe is Hall element, the most fragile, Measuring probe is played a good protection by probe fixing device;Meanwhile, probe fixing device is by the One alignment pin is fixedly attached to platform, and measuring probe serves good fixation;
3) platform be provided with vertically slide for probe fixing device the second guide rail, be positioned at measuring probe The laser displacement sensor on side, laser displacement sensor read itself and magnetize between magnet surface first Distance is sent to controller, and controller sets according to measuring in advance and be saved in after the first distance and mechanical erection Laser displacement sensor in standby program calculates with the vertical drop second distance of measuring probe, defeated Go out measuring probe and the relative altitude magnetizing between magnet surface;
4) platform is provided with the 3rd guide rail slided for horizontal direction, and the line of travel of the 3rd guide rail and first is led The line of travel of rail is vertical, and the first slide is connected on the 3rd guide rail;3rd guide rail is that locating piece is remote There is provided convenient from measuring probe, it is simple to take out or place the Magnet that magnetizes;3rd guide rail and the first guide rail coordinate, Provide for positioner and measuring probe aligned beneath and slide based on the two-dimensional coordinate formula on platform level Regulation;3rd guide rail, the second guide rail coordinate with the first guide rail respectively, under positioner and measuring probe Side's alignment provides three-dimensional coordinate formula based on platform and slides regulation;
5) described 3rd guide rail is provided with the second scale grating flushed with described 3rd guide rail, grating reading head Under the second scale grating coordinates, read the second displacement information of sliding along the 3rd guide rail of positioner and send To controller;Realize the displacement that positioner slides along the 3rd guide rail can recognize that;
6) positioner includes that groove accommodates the locating piece of the Magnet that magnetizes, is respectively fixedly connected with groove two Several second alignment pins, the first elastic parts and second elastic parts of sides adjacent, locating piece is provided with One chute, the second chute;Under the cooperation of several the second alignment pins, the first elastic parts is sliding along first Groove slides, the second elastic parts slides to realize respective flicking or returning relative to locating piece along institute's two chutes Return, for the Magnet that magnetizes taking-up, place and fixing provide convenient;
7) by pressing the button of the first elastic parts, drive the second bullet block extrude the first spring, drive with The 4th bullet block that projection is supported extrudes the second spring, it is achieved the first bullet block, the 3rd bullet block are each relative to recessed Flicking of groove, can facilitate and pick and place the Magnet that magnetizes;Release button, the first bullet block, the 3rd bullet block return respectively To the sides adjacent of groove, under the cooperation of several the second alignment pins, it is achieved fixing of the Magnet that magnetizes.
Part is embodied by the further advantage of the present invention, target and feature by description below, and part also will By the research of the present invention and practice are understood by the person skilled in the art.
Accompanying drawing explanation
Fig. 1 is the overall structure schematic diagram of magnetic density measurement apparatus of the present invention;
Fig. 2 is the terrace part structural representation of magnetic density measurement apparatus of the present invention;
Fig. 3 is the structural representation of the measuring probe of magnetic density measurement apparatus of the present invention;
Fig. 4 is the locating piece Facad structure schematic diagram of magnetic density measurement apparatus of the present invention;
Fig. 5 is the locating piece inverse layer structure schematic diagram of magnetic density measurement apparatus of the present invention;
Fig. 6 is the Magnet instrumentation plan that magnetizes of magnetic density measurement apparatus of the present invention;
Fig. 7 is the position-magnetic density curve of magnetic density measurement apparatus of the present invention output;
Fig. 8 is the measuring method that magnetic density measurement apparatus of the present invention carries out magnetic density.
In figure:
10-platform;11-the first guide rail;12-the first scale grating;13-the second guide rail;14-laser displacement passes Sensor;15-the 3rd guide rail;16-the second scale grating;
20-positioner;21-magnetizes Magnet;
22-locating piece;221-the first chute;222-the second chute;
23-the second alignment pin;
24-the first elastic parts;241-the first bullet block;242-the second bullet block;243-the first spring;244- Button;
25-the second elastic parts;251-the 3rd bullet block;252-the 4th bullet block;253-the second spring;
30-measurement apparatus;31-measuring probe;32-probe fixing device;33-the first alignment pin;
Detailed description of the invention
The present invention is described in further detail below in conjunction with the accompanying drawings, to make those skilled in the art's reference Description word can be implemented according to this.
Should be appreciated that used herein such as " have ", " comprising " and " including " term not Allot other element one or more or the existence of a combination thereof or interpolation.
<embodiment 1>
The present invention provides a kind of magnetic density measurement apparatus, as depicted in figs. 1 and 2, comprising:
Platform 10, which is provided with the first guide rail 11 slided for horizontal direction;Positioner 20, it is used In accommodating and magnetize Magnet 21 in location, the Magnet 21 that magnetizes flushes with positioner 20 surface;Positioner It is slidably connected on platform 10 by the first guide rail 11;Measurement apparatus 30, it includes being fixedly attached to put down Platform 10 and be positioned at the measuring probe 31 directly over the first guide rail 11, is loaded with the Magnet 21 that magnetizes for collection Positioner 20 slide on the first guide rail 11 and by the Hall electricity produced time below measuring probe 31 Pressure signal;And, controlling device (not shown), it includes controller, data collecting card and driving Mechanism;Drive mechanism is connected to controller, is used for driving positioner 20 to slide along the first guide rail 11;
Wherein, the first guide rail 11 is provided with the first scale grating 12 being flush with it, and positioner 20 is provided with Grating reading head (not shown), grating reading head reads location under the first scale grating 12 coordinates The first displacement information that device 20 slides along the first guide rail 11 is also sent to controller;Controller is according to One displacement information output triggers distance signal and triggers spacing to data collecting card, data collecting card every one Read Hall voltage signal and convert thereof into magnetic density value and be sent to controller.
Originally stating in embodiment, the first guide rail 11 is the X-direction setting along platform 10, and magnetize Magnet 21 is five pieces of integrated little magnetic piece, and the centrage of the length direction of the Magnet 21 that magnetizes also is along X-direction. Measuring probe 31 is Hall element, and certainty of measurement is 0.2mT.Because measuring probe 31 is relative to filling The height of magnetic Magnet is different, and the measured value of magnetic density will have very large deviation, therefore, measuring probe 31 are in the position relative to the Magnet level altitude that magnetizes, this level altitude by actual experiments of measuring gained, The present invention is not specifically limited.It is loaded with the positioner 20 of the Magnet 21 that magnetizes below measuring probe 31 Slide on first guide rail 11, when positioner 20 passes through below measuring probe 31, and the Magnet 21 that magnetizes Centrage alignment measuring probe 31 time, measuring probe 31 gather produce Hall voltage signal, with this Meanwhile, grating reading head reads the first real-time displacement letter that positioner 20 slides along the first guide rail 11 Ceasing and be sent to controller, controller triggers distance signal to data acquisition according to the first displacement signal output Card, triggers distance signal and goes trigger data acquisition card to read current location for being spaced the distance triggering spacing Hall voltage signal and convert thereof into magnetic density value and be sent to controller, it is achieved that lead along first Magnetic flux at rail 11 line of travel (i.e. along the X-direction of platform 10), current measuring probe 31 height The high-speed automated on-line measurement of metric density outline data, measures efficiency high.Number in embodiment of the present invention It is 0.4 μm, sample frequency according to the accessible minimum spacing that triggers of capture card > 3000sps.It addition, will be fixed The real time position that position device 20 slides is measured and is integrated with magnetic density measurement, passes through positioner The real time position that 20 slide is measured output triggering distance signal and is read out with trigger data acquisition card;Each The triggering of individual position, the magnetic density of the Magnet 21 that obtains magnetizing, in the data of three dimension profiles, is measured Precision is high.As preferably, triggering spacing is 0.4 μm, while meeting high-speed automated on-line measurement, Ensure the certainty of measurement of magnetic density.
In above-mentioned embodiment, as it is shown on figure 3, measurement apparatus 30 includes: probe fixing device 32, It is for fixation measuring probe 31;First alignment pin 33, it is for connecting fixing for probe fixing device 32 Receive platform 10.Because measuring probe 31 is the most fragile, grazing is easily damaged, fixing device 32 is to survey Amount probe 31 plays a good protection, and meanwhile, probe fixing device 32 is by the first location Pin 33 is fixedly attached to platform 10, and measuring probe 31 is served good fixation so that measure Probe 31 is in the position relative to the Magnet level altitude that magnetizes.The Magnet that magnetizes includes five blocks of integrated little magnetic Block, is loaded with the positioner 20 of the Magnet 21 that magnetizes and slides and magnetize on the first guide rail 11 Magnet 21 Time below centrage alignment measuring probe 31, in order to ensure that measuring probe 31 gathers Hall voltage signal Accuracy, when the overall dimensions of the Magnet 21 that magnetizes is about 30 × 8.5mm, the measurement of measuring probe 31 Induction region is set to 150 μ m 150 μm, has relatively large measured area, improves measurement Accuracy rate.
The magnetize magnetic density size of Magnet 21 certain altitude of measuring probe 31 distance is to judge to magnetize magnetic The important indicator whether ferrum 21 mass reaches a standard, therefore, magnetizes between Magnet 21 to measuring probe 31 distance Relative altitude measure and adjustment seems particularly necessary.Another kind of specific embodiment party as the present invention Formula, platform 10 be additionally provided with slide for vertical direction the second guide rail (not shown), be positioned at measurement and visit The laser displacement sensor 14 on 31 sides, the second guide rail is arranged along the Z-direction of platform 10, laser Displacement transducer 14 is connected to controller;Measurement apparatus 30 includes that the probe of fixation measuring probe 31 is fixed Device 32, probe fixing device 32 is the most vertically slided by the second guide rail;Wherein, Laser displacement sensor 14 is for reading itself and the first distance H vertical between Magnet 21 surface that magnetizes1Send out Give controller.Controller is according to the first distance H1With measure in advance after mechanical erection and be saved in equipment journey Laser displacement sensor 14 in sequence and the vertical drop second distance H of measuring probe 312Count Calculate, output measuring probe 31 and relative altitude H magnetized between Magnet 21 surface, then relative altitude H=H1-H2.The repeatable accuracy of laser displacement sensor 14 is 0.02 μm, and laser displacement sensor 14 exists Under the cooperation of the second guide rail, it is achieved measuring probe 31 and the essence of relative altitude H magnetized between Magnet 21 Really measure, and provide the possibility that relative altitude H adjusts.
Measuring probe 31 and relative altitude H magnetized between Magnet 21 affect magnetic density measured value, So when measuring probe 31 and magnetize joining at the second guide rail and laser displacement sensor 14 between Magnet 21 When being adjusted to optimal relative altitude H under conjunction, fixation measuring probe 31.So, measuring probe 31 it is positioned at On the first guide rail 11 of lower section, taking-up or the placement of the Magnet 21 that magnetizes in positioner 20 necessarily receive measurement Probe 31 stop and the profit that brings inconvenience.As one embodiment of the present invention, platform 10 is provided with confession The 3rd guide rail 15 that horizontal direction slides;The line of travel of the 3rd guide rail 15 and sliding of the first guide rail 11 Direction is vertical, and the first guide rail 11 is arranged along the X-direction of platform 10, then the 3rd guide rail is along platform 10 Y direction arrange.First guide rail 11 is slidably connected on the 3rd guide rail 15, drives the first guide rail 11 On positioner 20 carry out Y direction along the 3rd guide rail 15 and slide.Therefore, survey when magnetic density At the end of amount, driving the first guide rail 11 to drive by drive mechanism, it is slidably connected is loaded with the Magnet that magnetizes The positioner 20 of 21 along the 3rd guide rail 15 sliding horizontal, below the measuring probe 31 that slips away after, carry out Magnetize the taking-up of Magnet 21 or placement, easy to operate.
Preferred as above-mentioned embodiment, the 3rd guide rail 15 is provided with second flushed with the 3rd guide rail 15 Scale grating 16, grating reading head reads positioner 20 along the 3rd under the second scale grating 16 coordinates The second displacement information that guide rail 15 slides also is sent to controller.Grating reading head is at the second scale grating Under 16 coordinate, read the second displacement information of sliding along the 3rd guide rail 15 of positioner 20 and be sent to control Device processed, controller receives this second displacement information, it is judged that whether positioner 20 is positioned at measuring probe 21 Lower section.Positioner 20 along the 3rd guide rail 15 slide into immediately below measuring probe 21 time, controller send Stopping signal, to drive mechanism, stops sliding.
In above-mentioned embodiment, as shown in Figure 4 and Figure 5, positioner 20 includes: locating piece 22, It is provided with the groove accommodating the Magnet 21 that magnetizes;Second alignment pin 23, several second alignment pins 23 are respectively It is fixedly attached to two sides adjacent of groove, Magnet 21 avris that magnetizes is played and stops firm effect;Bullet Property device, it is the first elastic parts 24 and the second elastic group laying respectively at two other sides adjacent of groove Part 25;Wherein, locating piece 22 is additionally provided with slide for the first elastic parts 24 the first chute 221, The second chute 222 slided for the second elastic parts 25.Second fixed at several of two sides adjacent of groove Under the firm effect of position pin 23 coordinates, the first elastic parts 24 of two other sides adjacent of groove and The corresponding respectively of second elastic parts 25 slides at the first chute 221 and the second chute 222, it is achieved each Flicking or returning relative to locating piece 22, flicks or returns and correspond to magnetize the picking and placeing or solid of Magnet 21 Surely it is convenient to provide.It should be noted that the shape of several the second alignment pins 23 does not limits, the present invention Figure give the circular and example of rectangle;The number of several the second alignment pins 23 does not limits, this The figure of invention gives 1, the Magnet 21 width side alignment pin 23 that magnetizes, Magnet 21 length side of magnetizing To the example of 2 alignment pins 23 in side, improve the steadiness of Magnet 21 length direction that magnetizes.
One as above-mentioned embodiment is concrete preferably, as shown in Figure 4 and Figure 5, and the first elastic parts 24 include being positioned at the first bullet block 241 outside groove, run through locating piece 22 and be connected to the first bullet block 241 Second bullet block the 242, first spring 243 and run through the button 244 outside locating piece 22 1;Second Bullet block 242 one end by the first spring 243 be connected to locating piece the 22, second bullet block 242 other end with by Button 244 is fixing to be connected;Second elastic parts 25 includes being positioned at the 3rd bullet block 251 outside groove, runs through Locating piece 22 and be connected to the 4th bullet block the 252, second spring 253 of the 3rd bullet block 251;4th bullet block 252 are connected to locating piece 22 by the second spring 253;Wherein, the first bullet block 241 and the second bullet block 242 Lay respectively at two other sides adjacent of groove;Second bullet block 242 is provided with protruding 242A, the 4th bullet block 252 sides contrary with the second spring 253 are provided with stopper slot 252A, projection 242A and stopper slot 252A Support.By pressing the button 244 in the first elastic parts 24, the second bullet block 242 is driven to extrude first The 4th bullet block 252 that spring 243, drive are supported with projection 242A extrudes the second spring 253, it is achieved the One respective the flicking relative to groove of bullet block the 241, the 3rd bullet block 251, can facilitate and pick and place the Magnet 21 that magnetizes; Release button 244, the first bullet block the 241, the 3rd bullet block 25 returns to the sides adjacent of groove respectively, if Under the cooperation of dry the second alignment pin 23, it is achieved fixing of the Magnet 21 that magnetizes.By the first spring 243 Elastic reaction with the second spring 253: during pressing button 244, the first bullet block 241 and the 3rd bullet block 251 It is issued to preferably flick state at elastic reaction;During release button 244, the first bullet block 241 and Three bullet blocks 251 return under elastic reaction and clamp, with several second detent fit, the Magnet 21 that magnetizes, Play good fixation.
The magnetic density measurement apparatus that the present invention provides, as shown in Figure 6 and Figure 7, passes through measuring probe 31 collections are loaded with the positioner 20 of the Magnet 21 that magnetizes and slide and visited by measurement on the first guide rail 11 The Hall voltage signal produced time below 31, grating reading head reads positioner 20 along the first guide rail 11 the first displacement informations slided also are sent to controller, and controller triggers according to the first displacement signal output Distance signal triggers spacing every one read this Hall voltage signal to data collecting card, data collecting card And convert thereof into magnetic density value and be sent to controller, it is achieved that the first guide rail 11 line of travel magnetic flux The high-speed automated on-line measurement of metric density three-D profile, measures integrated by position measurement with magnetic density Together, efficiency height, certainty of measurement height are measured.
<embodiment 2>
On the basis of embodiment 1, present embodiment provides the measuring method of a kind of magnetic density, As shown in Figure 8, comprise the following steps:
S10, measures before starting, and the Magnet 21 that will magnetize is positioned on positioner 20, adjusts positioner 20 are located on the first guide rail 11 immediately below measuring probe 31;
S20, when measuring beginning, drives motor to drive positioner 20 to slide along the first guide rail 11;Grating Read head reads the first displacement information of sliding along the first guide rail 11 of positioner 20 and is sent to controller; Measuring probe 31 gathers positioner 20 and slides on the first guide rail 11 and by below measuring probe 31 Time produce Hall voltage signal;
S30, controller receives the first displacement information output and triggers distance signal to data collecting card;
S40, data collecting card triggers spacing every one and reads the Hall voltage letter that measuring probe 31 gathers Number and convert thereof into magnetic density value and be sent to controller;
S50, after single measurement completes, system reset, controller outgoing position-magnetic density curve with Display.
In said method step, gathered the positioner 20 being loaded with the Magnet 21 that magnetizes by measuring probe 31 First guide rail 11 slides and by the Hall voltage signal produced time below measuring probe 31, grating Read head reads the first displacement information of sliding along the first guide rail 11 of positioner 20 and is sent to controller, Controller triggers distance signal to data collecting card according to the first displacement signal output, data collecting card every One trigger spacing read this Hall voltage signal and convert thereof into magnetic density value be sent to control Device, it is achieved that the high-speed automated online survey of the first guide rail 11 line of travel magnetic density three-dimensional data Amount, position measurement is integrated with magnetic density measurement, outgoing position-magnetic density curve with Display, as shown in Figure 7.
In this measuring method, the accessible minimum spacing that triggers of data collecting card is 0.4 μm, sample frequency More than 3000sps, the certainty of measurement of measuring probe 31 is 0.2mT, the survey of magnetic density single measurement The amount time can be less than equal to 2.5s.
This measuring method can realize GRR, and (Gauge Repeatability and Reproducibility measures The repeatability of system and repdocutbility) < magnetic density of 20% is measured.
Preferred as one, measure before starting, further comprise the steps of: adjustment measuring probe 31 and the Magnet that magnetizes Measuring probe 31 is also fixed by relative altitude between 21.
Because the magnetize magnetic density size of Magnet 21 certain altitude of measuring probe 31 distance is to judge The important indicator whether Magnet 21 mass that magnetizes reaches a standard, therefore, magnetize Magnet to measuring probe 31 distance Relative altitude between 21 measures and adjustment seems particularly necessary, specifically, can pass through platform 10 Upper laser displacement sensor 14, under the cooperation of the second guide rail, reads laser displacement sensor 14 and magnetizes The first distance H vertical between Magnet 21 surface1It is sent to controller.Controller is according to the first distance H1With The laser displacement sensor 14 measured in advance after mechanical erection and be saved in device program and measuring probe The vertical drop second distance H of 312Calculate, output measuring probe 31 and Magnet 21 surface of magnetizing Between relative altitude H, then relative altitude H=H1-H2.Finally, then by drive mechanism drive to measure and visit 31 slide to carry out the adjustment of relative altitude H along the second guide rail.
Preferred as one, in step 10, adjust positioner 20 be located at measuring probe 31 just under Side, including step:
Motor is driven to drive the first guide rail 11 being loaded with positioner to slide to location dress along the 3rd guide rail 15 Put 20 to stop when being positioned at immediately below measuring probe 31;
Grating reading head reads the second displacement information that the first guide rail 11 slides along the 3rd guide rail 15 and sends To controller.
Drive mechanism drives the first guide rail 11 of positioner 20 to slide to positioner along the 3rd guide rail 15 20 are positioned at immediately below measuring probe 31, the second displacement letter that the first guide rail 11 slides along the 3rd guide rail 15 Ceasing and be sent to controller, controller receives this second displacement information, it is judged that whether positioner 20 is positioned at Below measuring probe 21.First guide rail 11 of positioner 20 slides into location dress along the 3rd guide rail 15 Putting 20 when being positioned at immediately below measuring probe 21, controller sends and stops signal to drive mechanism, stops sliding OK.
Although embodiment of the present invention are disclosed as above, but it is not restricted to description and embodiment party Listed utilization in formula.It can be applied to various applicable the field of the invention completely.For being familiar with ability Other amendment it is easily achieved for the personnel in territory.Therefore without departing substantially from claim and equivalency range Under the general concept limited, the present invention is not limited to specific details and shown here as the legend with description.

Claims (10)

1. a magnetic density measurement apparatus, it is characterised in that including:
Platform, which is provided with the first guide rail slided for horizontal direction;
Positioner, it is for accommodating and magnetize Magnet in location, described in magnetize Magnet and described positioner Surface flushes;Described positioner is connected on described platform by described first slide;
Measurement apparatus, it includes being fixedly attached to described platform and being positioned at the survey directly over described first guide rail Amount probe, slides and logical for gathering the described positioner being loaded with the Magnet that magnetizes on described first guide rail The Hall voltage signal produced when crossing below described measuring probe;And,
Controlling device, it includes controller, data collecting card and drive mechanism;Described drive mechanism connects To described controller, it is used for driving described positioner to slide along described first guide rail;
Wherein, described first guide rail is provided with the first scale grating being flush with it, and described positioner is provided with Grating reading head, described grating reading head reads described positioner under described first scale grating coordinates The first displacement information of sliding along described first guide rail is also sent to described controller;Described controller according to Described first displacement information output triggering distance signal gives described data collecting card, and described data collecting card is every Trigger spacing every one read described Hall voltage signal and convert thereof into magnetic density value and be sent to institute State controller.
2. magnetic density measurement apparatus as claimed in claim 1, it is characterised in that described measurement fills Put and include:
Probe fixing device, it is used for fixing described measuring probe;
First alignment pin, it is for being fixedly attached to described platform by described probe fixing device.
3. magnetic density measurement apparatus as claimed in claim 1, it is characterised in that
Described platform be additionally provided with slide for vertical direction the second guide rail, be positioned at described measuring probe side Laser displacement sensor, described laser displacement sensor is connected to described controller;
Described measurement apparatus includes the probe fixing device of fixing described measuring probe, the fixing dress of described probe Put and the most vertically slided by described second guide rail;
Wherein, described laser displacement sensor for read its with described magnetize vertical between magnet surface First distance is sent to described controller.
4. the magnetic density measurement apparatus as described in claim 1 or 3, it is characterised in that
Described platform is provided with the 3rd guide rail slided for horizontal direction;The line of travel of described 3rd guide rail with The line of travel of described first guide rail is vertical;Described first slide is connected on described 3rd guide rail.
5. magnetic density measurement apparatus as claimed in claim 4, it is characterised in that
Described 3rd guide rail is provided with the second scale grating flushed with described 3rd guide rail, described grating reading Head reads second that described positioner slides along described 3rd guide rail under described second scale grating coordinates Displacement information is also sent to described controller.
6. magnetic density measurement apparatus as claimed in claim 1, it is characterised in that described location fills Put and include:
Locating piece, it is provided with the groove accommodating the Magnet that magnetizes;
Second alignment pin, several described second alignment pins are respectively fixedly connected with two phases of described groove Adjacent side;
Elastic device, it is the first elastic parts and laying respectively at described two other sides adjacent of groove Two elastic partss;
Wherein, described locating piece is additionally provided with the first chute, the second chute;Described first elastic parts edge Described first chute slides, described second elastic parts slides to realize the most relatively along described second chute Flicking or returning in described locating piece.
7. magnetic density measurement apparatus as claimed in claim 6, it is characterised in that
Described first elastic parts, it includes being positioned at the first bullet block outside described groove, runs through described fixed Position block and be connected to the second bullet block of described first bullet block, the first spring and run through outside described locating piece one The button of side;Described second bullet block one end by described first spring be connected to described locating piece, described The two bullet block other ends are fixing with described button to be connected;
Described second elastic parts, it includes being positioned at the 3rd bullet block outside described groove, runs through described fixed Position block and be connected to the 4th bullet block of described 3rd bullet block, the second spring;Described 4th bullet block is by described Second spring is connected to described locating piece;
Wherein, lay respectively at two other of described groove with described second bullet block adjacent for described first bullet block Side;
Described second bullet block is provided with projection, and the side that described 4th bullet block is contrary with described second spring is provided with Stopper slot, described projection is supported with described stopper slot.
8. apply the magnetic density measurement apparatus as according to any one of claim 1-7 to carry out magnetic for one kind The measuring method of flux density, it is characterised in that comprise the following steps:
Before measurement starts, the Magnet that will magnetize is positioned on positioner, adjusts described positioner and makes its position On the first guide rail immediately below described measuring probe;
When measuring beginning, motor is driven to drive described positioner to slide along described first guide rail;Grating is read Several are read the first displacement information of sliding along described first guide rail of described positioner and are sent to described control Device processed;Described measuring probe gathers described positioner and slides and by described survey on described first guide rail The Hall voltage signal produced time below amount probe;
Described controller receives described first displacement information output and triggers distance signal to described data acquisition Card;
Described data collecting card triggers spacing every one and reads the Hall voltage letter that described measuring probe gathers Number and convert thereof into magnetic density value and be sent to described controller;
After single measurement completes, system reset, controller outgoing position-magnetic density curve is with display.
9. the measuring method of magnetic density as claimed in claim 8, it is characterised in that measure and start Before, further comprise the steps of:
Adjust measuring probe and the relative altitude magnetized between Magnet and described measuring probe is fixed.
10. the measuring method of magnetic density as claimed in claim 8, it is characterised in that adjust institute State positioner and be located at immediately below described measuring probe, including step:
Drive motor drive be loaded with described first guide rail of described positioner along described 3rd guide rail slide to Stop when described positioner is positioned at immediately below described measuring probe;
Described grating reading head reads the second displacement information that described first guide rail slides along described 3rd guide rail And it is sent to described controller.
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