CN105972970B - The technique that FPD panel glass wet-chemical processes low wind speed purging raffinate - Google Patents
The technique that FPD panel glass wet-chemical processes low wind speed purging raffinate Download PDFInfo
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- CN105972970B CN105972970B CN201610454767.0A CN201610454767A CN105972970B CN 105972970 B CN105972970 B CN 105972970B CN 201610454767 A CN201610454767 A CN 201610454767A CN 105972970 B CN105972970 B CN 105972970B
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- wind speed
- air
- low wind
- purging
- raffinate
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B15/00—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form
- F26B15/10—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions
- F26B15/12—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions the lines being all horizontal or slightly inclined
- F26B15/122—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions the lines being all horizontal or slightly inclined the objects or batches of material being carried by transversely moving rollers or rods which may rotate
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Cleaning In General (AREA)
- Surface Treatment Of Glass (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention discloses FPD panel glass wet-chemicals to process the device that low wind speed purges raffinate, belong to plate glass and the surface moisturizing processing technique field of semi-conductor silicon chip, the device has setting in the upper and lower of workpiece comprising port, air intake vent, air duct and air outlet；One end of port is connected with air pressure pump, and the other end in port is equipped with air intake vent, and air intake vent is connected with the one end in air duct, and the other end in air duct is equipped with air outlet；Air outlet, air duct are connected with air intake vent.The invention also discloses the technique for applying of the device.The present invention can well remove the liquid of the workpiece surfaces such as sheet glass, and the service life of the reaction solutions such as etching solution can be improved；The consumption that high purity water can be reduced reduces the generation of cleaning sullage；The difference of leaving air temp and environment temperature is not more than 5 DEG C, that is, eliminates the chemical liquid of glass sheet surface, and is unlikely to, due to wind-warm syndrome apparent increase, to interfere the chemical reaction on surface, cause the difficulty of technology controlling and process, influence the quality of product.
Description
Technical field
The invention belongs to plate glass and the surface moisturizing processing technique field of semi-conductor silicon chip, and in particular to FPD
The technique that panel glass wet-chemical processes low wind speed purging raffinate.
Background technology
Surface moisturizing processing is production display screen glass, including etching glass, AG glass, chemical cleavage glass, photovoltaic
The common processing method of the multiple products such as glass and semi-conductor silicon chip, process are related to：Soda acid, surfactant washing,
It is thinned, antireflective, polishes, etching, the series of processes such as making herbs into wool, sheet glass and semi-conductor silicon chip need and different chemical liquids
Carry out chemical reaction appropriate.Utilize horizontal production line, the sheet glass and semi-conductor silicon chip that are moved horizontally in these inter processes etc.
Surface often all carries the chemical raffinate or ejected wash water of a large amount of previous processs.
The chemical raffinate of previous process or ejected wash water enter next procedure in order to prevent, influence next procedure it is normal into
Row, conventional method are to carry out water cleaning to processed sheet glass and semi-conductor silicon chip etc. between process, i.e., are first rushed with water
Chemical raffinate and its surface of High Voltage gas flow purging with air knife are washed, makes its surface rapid draing, enters back into next procedure.
The cleaning between frequent process will produce a large amount of sewage as a result, not only increase the consumption of high purity water, and
These sewage need to discharge by complicated disposition, otherwise can seriously affect pollution environment.Meanwhile High Voltage gas used
Air knife is flowed, although dry quick, is not suitable for the raffinate for purging surface.Because of the structure of conventional high pressure air blast air knife
It is characterized in, total air-out area is less than inlet air open area, quilt in air duct chamber of the wind between wide air inlet and narrow air outlet
Acutely compression, convolution friction, and temperature increases, formation be high intensity hot wind, general wind-warm syndrome can reach 45 DEG C, even more
It is high.With the chemical raffinate on this hot-air blowing surface, meeting severe jamming surface chemical reaction causes technology controlling and process difficult, even
Product quality is influenced, such as thickness deviation, glossiness, mist degree, roughness wait a series of performances, generate striped, ripple, bright spot etc.
Major quality defect.As processed product is more and more thinner, single-piece size is smaller and smaller, and the air knife using high pressure air blast can also
Interference is processed the conveying and arrangement of product, or even the abnormal phenomenon such as chases after piece and crash.
Invention content
Goal of the invention：The purpose of the present invention is to provide FPD panel glass and semi-conductor silicon chip wet-chemical to process low wind
The technique of speed purging raffinate, can blow off the chemical raffinate of processed product surface, reduce chemical raffinate to next procedure
Interference, reduces the consumption of cleaning high purity water, and the chemical process of workpiece surface will not be interfered due to purging, influences product
Processing quality.
FPD panel glass wet-chemical processes the technique of low wind speed purging raffinate, and workpiece often carries out a wet-chemical processing
Primary low wind speed purging is carried out with regard to purging the device of raffinate using low wind speed afterwards, is included the following steps：
1) workpiece enters next step 2 after carrying out front end cleaning)；
2) after the cleaning of workpiece front end, low wind speed purging is first carried out, a wet-chemical is then carried out under the conveying of delivery wheel
Processing, after carry out low wind speed purging, then carry out the processing of wet-chemical again under the conveying of delivery wheel, terminate laggard
The low wind speed purging of row；Low wind speed purging is wind speed≤8m/s of air outlet；
3) back segment cleans, air knife drying；
The device of low wind speed purging raffinate has setting in the upper and lower of workpiece comprising port, air intake vent, air duct and
Air outlet；One end of the port is connected with air pressure pump, and the other end in port is equipped with air intake vent, air intake vent and air duct
One end be connected, air duct the other end be equipped with air outlet；The air outlet, air duct are connected with air intake vent.
Screw adjustment mechanism is equipped with outside the air duct, screw adjustment mechanism is symmetricly set on the both sides in air duct, uses
In the device of fixed purging raffinate, and adjust the direction of purging.
It is adjusted by screw adjustment mechanism, the distance between air outlet edge and workpiece are no more than 25mm.
The angle of the device and workpiece is 15~45 °.
The air duct is hollow flat interior air duct.
The low wind speed purging is wind speed≤8m/s of air outlet.
The length of the air outlet is more than the width of air outlet, the width >=1mm and≤10mm of air outlet.
The ratio between the area of section of the air intake vent and the area of section of air outlet≤6.
Advantageous effect：Compared with prior art, the present invention has the following advantages：
1) by designing purging process between different processes and low wind speed purging device being arranged, when sheet glass and semiconductor silicon
When the workpiece such as piece pass through upper and lower purging device under conveying roller drive, the wind energy blown out from purging device air outlet is well by glass
The liquid of the workpiece surfaces such as glass piece removes, and the service life of the reaction solutions such as etching solution can be improved；
2) liquid of glass sheet surface is removed with purging device can be reduced instead of the frequent intermediate purge operation of traditional handicraft
The consumption of high purity water reduces the generation of cleaning sullage；
3) due to designing flat, small reduction ratio purging device so that wind is blown out from upper purging device air intake vent to air outlet
During, it is not compressed significantly in interior air duct, the difference of leaving air temp and environment temperature is not more than 5 DEG C, that is, eliminates glass
The chemical liquid on piece surface, and be unlikely to, due to wind-warm syndrome apparent increase, to interfere the chemical reaction of glass surface, cause technology controlling and process
Difficulty, influence the quality of product；
4) since small reduction ratio, flat purging device, outlet air speed are obviously reduced than traditional air knife, be unlikely to due to
Wind pressure is excessive and interferes the conveying of sheet glass, or even causes the broken of thin glass sheet.
Description of the drawings
Fig. 1 is the front view that FPD panel glass wet-chemical processes that low wind speed purges the device of raffinate；
Fig. 2 is the side view that FPD panel glass wet-chemical processes that low wind speed purges the device of raffinate；
Fig. 3 is the technical process schematic diagram for the device that low wind speed purges raffinate；
Fig. 4 is schematic diagram after technical process amplification.
Specific implementation mode
In the following with reference to the drawings and specific embodiments, the present invention is furture elucidated.
As shown in Figs. 1-2, FPD panel glass wet-chemical processes device (the hereinafter referred to as low wind of low wind speed purging raffinate
The device 4 of speed purging raffinate), including port 41, air intake vent 42, air duct 43, screw adjustment mechanism 44 and air outlet 45.Port 41
One end be connected with air pressure pump, port 41 the other end be equipped with air intake vent 42, one end phase of air intake vent 42 and air duct 43
Even, it is equipped with air outlet 45 in the other end in air duct 43；Air outlet 45, air duct 43 are connected with air intake vent 42.
Screw adjustment mechanism 44 is equipped with outside air duct 43, screw adjustment mechanism 44 is symmetricly set on the both sides in air duct 43,
For the device of fixed purging raffinate, and adjust the direction of purging.Air duct 43 is hollow flat interior air duct.
The low wind speed purges the device 4 of raffinate as resistant material, and especially fluorine-resistant is corroded, high mechanical strength, and just
The good material of property；The device 4 of low wind speed purging raffinate has setting in the upper and lower of workpiece, is adjusted by screw adjustment mechanism 44,
The distance between 45 edge of air outlet and workpiece are no more than 25mm；The device of low wind speed purging raffinate and the angle of workpiece be 15~
45°；Wind speed≤8m/s of air outlet 45.The length of air outlet 45 is more than the width of air outlet 45, and 45 width of air outlet >=
1mm but≤10mm.The ratio between the area of section of air intake vent 43 and the area of section of air outlet 45≤6.
By being passed through the air of purification into air duct 43, purging wind is formed under the action of air pressure pump, through air outlet
45 blow out respectively to reverse inclined direction, the angle of inclination of the device 4 of low wind speed purging raffinate and between the workpiece such as sheet glass
Distance can independently adjust, by between the device that low wind speed purges raffinate by the workpiece surfaces such as sheet glass chemistry it is residual
Liquid or ejected wash water purge.
The technique of the device of low wind speed purging raffinate, workpiece just use the low wind after often carrying out a wet-chemical processing
The device of speed purging raffinate carries out primary low wind speed purging, and low wind speed purging is wind speed≤8m/s of air outlet 45；May include
Following steps：
1) workpiece enters next step 2 after carrying out front end cleaning)；
2) after the cleaning of workpiece front end, low wind speed purging is first carried out, a wet-chemical is then carried out under the conveying of delivery wheel
Processing, after carry out low wind speed purging, then carry out the processing of wet-chemical again under the conveying of delivery wheel, terminate laggard
The low wind speed purging of row；Low wind speed purging is wind speed≤8m/s of air outlet 45；
3) back segment cleans, air knife drying.
As shown in Figure 3-4, the device 4 of low wind speed purging raffinate is symmetrical arranged in the upper and lower faces of workpiece, low wind speed purging
The angle that the device 4 of raffinate passes through direction with workpiece is 15~45 °；Workpiece is display screen glass substrate 1, in display screen glass
The lower section of 1 pass course of glass substrate is equidistantly equipped with delivery wheel 5, convenient for conveying display screen glass substrate 1.By for the first time
After the flushing reaction of reaction solution 2, display screen on glass substrate 1 there are first time raffinate 3, display screen with glass substrate 1 into
Between the device 4 for entering two symmetrically arranged low wind speed purging raffinates, the purging process of first time is carried out；After, display screen
With glass substrate 1 by the conveying of delivery wheel 5, after the reaction of second of reaction solution 6, in display screen on glass substrate 1
There are second of raffinate 7, display screen glass substrate 1 enters between the device 4 that two symmetrically arranged low wind speed purge raffinate,
Carry out secondary purging process.It is equipped with below first time purging process and second of purging process for recycling reaction
The collecting pit 8 of liquid.
Example 1
To (the leading portion cleaning → air knife drying → AG liquid etching → hydrofluoric acid etch → back segment cleaning → air knife of traditional handicraft 1
It is dry) AG glass production lines, with the technology path of patent of the present invention, improved technique 2 (leading portion cleaning → air knife drying →
AG liquid etching → low wind speed purging → hydrofluoric acid etch → low wind speed purging → back segment cleaning → air knife drying) it is improved, i.e.,
Increase low wind speed purge operations between the etching of AG liquid and hydrofluoric acid etch process, is installed between above-mentioned operation of the invention special
The upper and lower low wind speed purging device of profit, high fluorine wastewater flow rate reduce by 50%, and waste water fluoro-containing concentration falls to 400mg/L by 1000mg/L,
But AG glass surfaces also frequently occur the laid defect of cloud form, it is unqualified.
The technique of the present invention, is further improved technique 2：Leading portion cleaning → low wind speed purging → AG liquid etching → low wind
Fast purging → hydrofluoric acid etch → low wind speed purging → back segment cleaning → air knife drying；Changing air knife drying after leading portion cleaning is
Low wind speed purge operations are arranged with hydrofluoric acid etch process in the etching of AG liquid in low wind speed purge operations, are set after hydrofluoric acid etch
Wind speed purging device is set low, the laid defect of cloud form is eliminated, and AG liquid etching solution and the service life of hydrofluoric acid etch liquid extend one times,
Consumption declines 30%, and high fluorine wastewater flow rate reduces by 40%, and waste water fluoro-containing concentration falls to 300mg/L. by 1000mg/L.
The technique and device of the present invention carries out making herbs into wool or wet etching processing to semiconductor silicon chip of solar cell, appearance
Phenomenon is similar with the advantageous effect of generation.
Example 2
OGS (One Glass Solution) glass, which refers to one piece, can play protection panels simultaneously and touch sensor is dual
The display screen glass of effect, after cutting, easily there is slight crack in glass-cutting face, can cause the machinery of OGS touch screen product
Compressive resistance declines.For this purpose, carry out wet-chemical treatment to its cut surface, with the mix acid liquor of hydrofluoric acid/hydrochloric acid, sulfuric acid or nitric acid into
Row etching, repairs the micro-crack at glass-cutting, improves its intensity, be commonly called as secondary hardening.
To the OGS mobile phone glass pieces of secondary hardening, traditional handicraft is first used, in the mixed of hydrofluoric acid/hydrochloric acid, sulfuric acid or nitric acid
Water cleaning is carried out after closing acid solution etching, the OGS mobile phone glass pieces of 1 square metre of production need to generate the high fluorine waste water of about 5kg, by
It is easy to happen sheet glass in the hot wind rapid draing blown out with high speed air knife, and in conveying and the abnormal phenomenon such as chases after piece and crash.
The device of the invention and then technique are used instead, after the mix acid liquor etching of hydrofluoric acid/hydrochloric acid, sulfuric acid or nitric acid
OGS mobile phone glass pieces first pass through the mix acid liquor of online low-pressure air purging device removal glass sheet surface, it is clear then to carry out water again
It washes, the OGS mobile phone glass pieces of 1 square metre of production only generate the fluoride waste of about 0.5-2kg same concentrations, and mixed acid
The consumption of liquid declines 18%, the abnormal phenomenon such as also chases after piece without sheet glass and crash.
The technique and device of the present invention carries out making herbs into wool or wet etching processing to semiconductor silicon chip of solar cell, appearance
Phenomenon is similar with the advantageous effect of generation.
Claims (7)
1. the technique that FPD panel glass wet-chemical processes low wind speed purging raffinate, it is characterised in that：Workpiece often carries out once
It purges, includes the following steps with regard to purging the primary low wind speed of device progress of raffinate using low wind speed after wet-chemical processing：
1) workpiece enters next step 2 after carrying out front end cleaning)；
2) after the cleaning of workpiece front end, low wind speed purging is first carried out, a wet-chemical processing is then carried out under the conveying of delivery wheel,
After carry out low wind speed purging, then carry out the processing of wet-chemical again under the conveying of delivery wheel, after carry out it is low
Wind speed purges；Low wind speed purging is wind speed≤8m/s of air outlet (45)；
3) back segment cleans, air knife drying；
The device of the low wind speed purging raffinate has setting in the upper and lower of workpiece comprising port (41), air intake vent (42), wind
Road (43) and air outlet (45)；One end of the port (41) is connected with air pressure pump, and the other end in port (41) is set
There are air intake vent (42), air intake vent (42) to be connected with the one end of air duct (43), the other end in air duct (43) is equipped with air outlet (45)；
The air outlet (45), air duct (43) are connected with air intake vent (42).
2. FPD panel glass wet-chemical according to claim 1 processes the technique of low wind speed purging raffinate, feature
It is：Screw adjustment mechanism (44) is equipped with outside the air duct (43), screw adjustment mechanism (44) is symmetricly set on air duct
(43) both sides for the device of fixed purging raffinate, and adjust the direction of purging.
3. FPD panel glass wet-chemical according to claim 2 processes the technique of low wind speed purging raffinate, feature
It is：It is adjusted by screw adjustment mechanism (44), air outlet (45) the distance between edge and workpiece is no more than 25mm.
4. FPD panel glass wet-chemical according to claim 1 processes the technique of low wind speed purging raffinate, feature
It is：The angle of the device and workpiece is 15~45 °.
5. FPD panel glass wet-chemical according to claim 1 processes the technique of low wind speed purging raffinate, feature
It is：The air duct (43) is hollow flat interior air duct.
6. FPD panel glass wet-chemical according to claim 1 processes the technique of low wind speed purging raffinate, feature
It is：The length of the air outlet (45) be more than air outlet (45) width, width >=1mm of air outlet (45) and≤
10mm。
7. FPD panel glass wet-chemical according to claim 1 processes the technique of low wind speed purging raffinate, feature
It is：The ratio between the area of section of the air intake vent (42) and the area of section of air outlet (45)≤6.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610454767.0A CN105972970B (en) | 2016-06-21 | 2016-06-21 | The technique that FPD panel glass wet-chemical processes low wind speed purging raffinate |
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| CN105972970B true CN105972970B (en) | 2018-08-10 |
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| CN205718344U (en) * | 2016-06-21 | 2016-11-23 | 盐城工学院 | Flat pannel display panel glass wet-chemical processes the device of low wind speed purging residual liquid |
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2016
- 2016-06-21 CN CN201610454767.0A patent/CN105972970B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101633568A (en) * | 2008-07-24 | 2010-01-27 | 洛阳兰迪玻璃机器有限公司 | Method for tempering glass and glass tempering machine set applying method |
| CN201561627U (en) * | 2009-12-17 | 2010-08-25 | 无锡尚德太阳能电力有限公司 | Silicon wafer blow-drying system |
| CN102706116A (en) * | 2012-01-15 | 2012-10-03 | 刘芝英 | Printed circuit board drying device |
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Address after: 224051 middle road of hope Avenue, Yancheng City, Jiangsu Province, No. 1 Patentee after: YANCHENG INSTITUTE OF TECHNOLOGY Patentee after: Suzhou Xinwu optoelectronics Co.,Ltd. Address before: 224051 middle road of hope Avenue, Yancheng City, Jiangsu Province, No. 1 Patentee before: YANCHENG INSTITUTE OF TECHNOLOGY Patentee before: Suzhou Shinwu Optronics Technology Co.,Ltd. |