CN105965380B - 用于晶片表面金属薄膜抛光过程的电涡流测量装置 - Google Patents
用于晶片表面金属薄膜抛光过程的电涡流测量装置 Download PDFInfo
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- CN105965380B CN105965380B CN201610290914.5A CN201610290914A CN105965380B CN 105965380 B CN105965380 B CN 105965380B CN 201610290914 A CN201610290914 A CN 201610290914A CN 105965380 B CN105965380 B CN 105965380B
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- eddy current
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- 238000007517 polishing process Methods 0.000 title claims abstract description 15
- 239000002184 metal Substances 0.000 title abstract description 17
- 238000001514 detection method Methods 0.000 claims abstract description 34
- 230000005284 excitation Effects 0.000 claims abstract description 23
- 238000005259 measurement Methods 0.000 claims description 28
- 230000003321 amplification Effects 0.000 claims description 23
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 23
- 108010076504 Protein Sorting Signals Proteins 0.000 claims description 8
- 230000003750 conditioning effect Effects 0.000 claims description 7
- 238000001914 filtration Methods 0.000 claims description 7
- 238000002156 mixing Methods 0.000 claims description 5
- 230000008859 change Effects 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 230000001186 cumulative effect Effects 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 8
- 230000005611 electricity Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000010363 phase shift Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002847 impedance measurement Methods 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 206010016256 fatigue Diseases 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000005055 memory storage Effects 0.000 description 1
- 238000007540 photo-reduction reaction Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000011896 sensitive detection Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/10—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving electrical means
- B24B49/105—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving electrical means using eddy currents
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
- G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
- G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610290914.5A CN105965380B (zh) | 2016-05-04 | 2016-05-04 | 用于晶片表面金属薄膜抛光过程的电涡流测量装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610290914.5A CN105965380B (zh) | 2016-05-04 | 2016-05-04 | 用于晶片表面金属薄膜抛光过程的电涡流测量装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105965380A CN105965380A (zh) | 2016-09-28 |
CN105965380B true CN105965380B (zh) | 2017-09-19 |
Family
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Family Applications (1)
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CN201610290914.5A Active CN105965380B (zh) | 2016-05-04 | 2016-05-04 | 用于晶片表面金属薄膜抛光过程的电涡流测量装置 |
Country Status (1)
Country | Link |
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CN (1) | CN105965380B (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108489373B (zh) * | 2018-03-29 | 2020-06-16 | 清华大学 | 用于金属膜厚测量的差分探头装置 |
CN110263482B (zh) * | 2019-07-01 | 2023-05-02 | 贵州装备制造职业学院 | 一种基于互相关算法的涡流阻抗求解方法及装置 |
CN114589617B (zh) * | 2022-03-03 | 2022-10-21 | 清华大学 | 金属膜厚测量方法、膜厚测量装置和化学机械抛光设备 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4207520A (en) * | 1978-04-06 | 1980-06-10 | The United States Of America As Represented By The Secretary Of The Air Force | Multiple frequency digital eddy current inspection system |
US6433541B1 (en) * | 1999-12-23 | 2002-08-13 | Kla-Tencor Corporation | In-situ metalization monitoring using eddy current measurements during the process for removing the film |
CN101311715A (zh) * | 2007-05-23 | 2008-11-26 | 通用电气检查技术有限合伙人公司 | 用于涡流信号的数字测量的方法和设备 |
CN104907920A (zh) * | 2014-03-12 | 2015-09-16 | 株式会社荏原制作所 | 膜厚测定值的补正方法、膜厚补正器、及涡流传感器 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6798197B2 (en) * | 2002-10-08 | 2004-09-28 | Zetec, Inc. | Dynamic gain control in a digital eddy current signal processor |
US8628384B2 (en) * | 2010-09-30 | 2014-01-14 | Nexplanar Corporation | Polishing pad for eddy current end-point detection |
-
2016
- 2016-05-04 CN CN201610290914.5A patent/CN105965380B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4207520A (en) * | 1978-04-06 | 1980-06-10 | The United States Of America As Represented By The Secretary Of The Air Force | Multiple frequency digital eddy current inspection system |
US6433541B1 (en) * | 1999-12-23 | 2002-08-13 | Kla-Tencor Corporation | In-situ metalization monitoring using eddy current measurements during the process for removing the film |
CN101311715A (zh) * | 2007-05-23 | 2008-11-26 | 通用电气检查技术有限合伙人公司 | 用于涡流信号的数字测量的方法和设备 |
CN104907920A (zh) * | 2014-03-12 | 2015-09-16 | 株式会社荏原制作所 | 膜厚测定值的补正方法、膜厚补正器、及涡流传感器 |
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CN105965380A (zh) | 2016-09-28 |
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Effective date of registration: 20200813 Address after: 101, 2 / F, building 2, No. 1, third Taihe street, Beijing Economic and Technological Development Zone, Daxing District, Beijing 100176 Patentee after: Beijing ShuoKe precision electronic equipment Co.,Ltd. Address before: 100176, No. 1, Tai Street, Beijing economic and Technological Development Zone, Daxing District, Beijing Patentee before: THE 45TH Research Institute OF CETC |
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CP03 | Change of name, title or address | ||
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Address after: 100176 101, floor 2, building 2, No. 1, Taihe Third Street, economic and Technological Development Zone, Daxing District, Beijing Patentee after: Beijing Jingyi Precision Technology Co.,Ltd. Address before: 100176 Room 101, floor 2, building 2, No. 1, Taihe 3rd Street, Beijing Economic and Technological Development Zone, Daxing District, Beijing Patentee before: Beijing ShuoKe precision electronic equipment Co.,Ltd. |