CN105953930B - Picosecond narrow spaces test device - Google Patents
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- CN105953930B CN105953930B CN201610309365.1A CN201610309365A CN105953930B CN 105953930 B CN105953930 B CN 105953930B CN 201610309365 A CN201610309365 A CN 201610309365A CN 105953930 B CN105953930 B CN 105953930B
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- 238000012360 testing method Methods 0.000 title claims abstract description 44
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- 238000001069 Raman spectroscopy Methods 0.000 claims abstract description 36
- 239000013307 optical fiber Substances 0.000 claims description 21
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J11/00—Measuring the characteristics of individual optical pulses or of optical pulse trains
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Abstract
The present invention relates to a kind of picosecond narrow spaces test devices, including the first light splitting coupler, the second light splitting coupler, third light splitting coupler, the first optics regulating platform, the second optics regulating platform, the first fiber amplifier, the second fiber amplifier, beam merging apparatus, the first measuring device, the second measuring device and third measuring device.First light splitting coupler connects the first optics regulating platform and the second optics regulating platform, the first optics regulating platform, the first fiber amplifier and the second light splitting coupler are sequentially connected, and the second light splitting coupler connects the first measuring device and beam merging apparatus.Second optics regulating platform, the second fiber amplifier and third light splitting coupler are sequentially connected, and third light splitting coupler connects the second measuring device and beam merging apparatus, and beam merging apparatus connects third measuring device.Measure picosecond pulse using stimulated Raman scattering principle, it is structural visual, easy to operate and at low cost, reduce the testing cost of picosecond narrow spaces.
Description
Technical field
The present invention relates to laser technology fields, more particularly to a kind of picosecond narrow spaces test device.
Background technique
With the continuous development of science and technology, picosecond laser technology achieves the progress to attract people's attention, becomes industry
The reliable tools of microfabrication.Ps pulse width is extremely short, suitable with the electric light relaxation time, and picosecond pulse often has
Very high peak power enables it that material surface hit into ionic state using peak value in processing to complete to process and to adding
Fuel factor very little around work point, this characteristic are so-called " cold working " and micro Process, are the laser institute nothings of nanosecond
What method was realized.Picosecond laser be adapted to nearly all material micro-dimension processing, including metal, semiconductor, jewel, ceramics,
Polymer etc..
Due to extensive use of the picosecond laser in material processing, develops and use the mechanism of picosecond laser increasingly
It is more, it is also increasing to the testing requirement of picosecond narrow spaces.The test device of traditional picosecond rank narrow spaces generally requires
Photodetector using autocorrelation function analyzer or high-speed response adds high-speed oscilloscope, both test methods to equipment requirement all very
Height, autocorrelation function analyzer need hundreds of thousands first, and high-speed oscilloscope needs the high purchasing price of members up to a million, considerably increase test at
This.
Summary of the invention
Based on this, it is necessary in view of the above-mentioned problems, providing a kind of picosecond narrow spaces test dress that can reduce testing cost
It sets.
A kind of picosecond narrow spaces test device, including the first light splitting coupler, the second light splitting coupler, third are divided coupling
Clutch, the first optics regulating platform, the second optics regulating platform, the first fiber amplifier, the second fiber amplifier, beam merging apparatus,
One measuring device, the second measuring device and third measuring device, first light splitting coupler connect first optics and adjust
Platform and the second optics regulating platform；The first optics regulating platform, the first fiber amplifier and second light splitting coupler
It is sequentially connected, second light splitting coupler connects first measuring device and the beam merging apparatus；The second optics tune
Section platform, second fiber amplifier and the third light splitting coupler are sequentially connected, and the third light splitting coupler connects institute
State the second measuring device and the beam merging apparatus；The beam merging apparatus connects the third measuring device；
First light splitting coupler receives to be measured picosecond of light, the to be measured picosecond of light is divided into defeated respectively after two-way light beam
It send to the first optics regulating platform and the second optics regulating platform, the first optics regulating platform is by received light beam through institute
It states the first fiber amplifier and is transmitted to second light splitting coupler, the second optics regulating platform will be described in received light beam warp
Second fiber amplifier is transmitted to the third light splitting coupler；Received light beam is divided into two-way by second light splitting coupler
After be transmitted separately to first measuring device and the beam merging apparatus, received light beam is divided by the third light splitting coupler
Second measuring device and the beam merging apparatus are transmitted separately to after two-way；The beam merging apparatus passes received two-way light beam
Transport to the third measuring device；
First fiber amplifier and second fiber amplifier are respectively used to the light beam of transmission being amplified to generation
The critical point of stimulated Raman scattering；First measuring device and second measuring device are respectively used to detect corresponding light beam
Stimulated Raman scattering light；
The first optics regulating platform and the second optics regulating platform are used in first fiber amplifier and described
Second fiber amplifier by the light beam of transmission be amplified to generate stimulated Raman scattering critical point after, adjust transmission light beam it
Between path length difference；The third measuring device is used to adjust in the first optics regulating platform and the second optics regulating platform and pass
When path length difference between defeated light beam, the two-way beam combination for detecting access generates the initial time and knot of stimulated Raman scattering light
The beam moment obtains pulsewidth test result and shows.
Above-mentioned picosecond narrow spaces test device, the first fiber amplifier and the second fiber amplifier are respectively by the light of transmission
Beam is amplified to the critical point for generating stimulated Raman scattering, and the first measuring device and the second measuring device detect corresponding light beam respectively
Stimulated Raman scattering light.First optics regulating platform and the second optics regulating platform are in the first fiber amplifier and the second fiber amplifier
After the light beam of transmission is amplified to the critical point for generating stimulated Raman scattering, the path length difference between the light beam of transmission is adjusted.The
The two-way beam combination of three measuring devices detection access generates initial time and the finish time of stimulated Raman scattering light, obtains arteries and veins
Wide test result is simultaneously shown.Picosecond pulse, structural visual, easy to operate and cost are measured using stimulated Raman scattering principle
It is low, reduce the testing cost of picosecond narrow spaces.
Detailed description of the invention
Fig. 1 is the schematic diagram of picosecond narrow spaces test device in an embodiment；
Fig. 2 is the schematic illustration of picosecond narrow spaces test in an embodiment；
Fig. 3 is the structure chart of the first fiber amplifier in an embodiment.
Specific embodiment
A kind of picosecond narrow spaces test device, as shown in Figure 1, including the light splitting coupling of the first light splitting coupler 102, second
Device 104, third light splitting coupler 106, the first optics regulating platform 108, the second optics regulating platform 110, the first fiber amplifier
112, the second fiber amplifier 114, beam merging apparatus 116, the first measuring device 118, the second measuring device 120 and third measurement dress
Set 122.First light splitting coupler 102 connects the first optics regulating platform 108 and the second optics regulating platform 110, the first light splitting coupling
Device 102 can also connect to be measured picosecond of light source 300, receive to be measured picosecond of light of to be measured picosecond of light source 300 output.First optics is adjusted
Platform 108, the first fiber amplifier 112 and the second light splitting coupler 104 are sequentially connected, the second light splitting coupler 104 connection first
Measuring device 118 and beam merging apparatus 116.Second optics regulating platform 110, the second fiber amplifier 114 and third light splitting coupler
106 are sequentially connected, and third light splitting coupler 106 connects the second measuring device 120 and beam merging apparatus 116, and beam merging apparatus 116 connects
Third measuring device 122.Specifically, the first light splitting coupler 102, the second light splitting coupler 104, third light splitting coupler 106,
First optics regulating platform 108, the first fiber amplifier 112, the second fiber amplifier 114, closes beam at second optics regulating platform 110
It can be connected by optical fiber between device 116, the first measuring device 118, the second measuring device 120 and third measuring device 122.
First light splitting coupler 102 receives to be measured picosecond of light, and to be measured picosecond of light is divided into after two-way light beam and is delivered to respectively
First optics regulating platform 108 and the second optics regulating platform 110, the first optics regulating platform 108 is by received light beam through the first optical fiber
Amplifier 112 is transmitted to the second light splitting coupler 104, and the second optics regulating platform 110 is by received light beam through the second fiber amplifier
Device 114 is transmitted to third light splitting coupler 106.Received light beam is divided into after two-way by the second light splitting coupler 104 to be transmitted respectively
To the first measuring device 118 and beam merging apparatus 116, received light beam is divided into after two-way by third light splitting coupler 106 to be passed respectively
Transport to the second measuring device 120 and beam merging apparatus 116.Received two-way beam Propagation to third is measured and is filled by beam merging apparatus 116
Set 122.
First fiber amplifier 112 and the second fiber amplifier 114 be respectively used to for the light beam of transmission to be amplified to generation by
Swash the critical point of Raman scattering.First measuring device 118 and the second measuring device 120 are respectively used to detect being excited for corresponding light beam
Raman diffused light.
First optics regulating platform 108 and the second optics regulating platform 110 are used in the first fiber amplifier 112 and the second optical fiber
After the light beam of transmission is amplified to the critical point for generating stimulated Raman scattering by amplifier 114, adjust between the light beam of transmission
Path length difference.Third measuring device 122 is used to adjust the light of transmission in the first optics regulating platform 108 and the second optics regulating platform 110
When path length difference between beam, detect access two-way beam combination generate stimulated Raman scattering light initial time and at the end of
It carves, obtains pulsewidth test result and show.
First optics regulating platform 108, the first fiber amplifier 112 and the second light splitting coupler 104 form the first branch, the
Two optics regulating platforms 110, the second fiber amplifier 114 and third light splitting coupler 106 form second branch.First light splitting coupling
To be measured picosecond of light is divided into two-way light beam by device 102, is again divided into two-way after the first branch and second branch transmission respectively
Output.First light splitting coupler 102, the second light splitting coupler 104 and third light splitting coupler 106 are used as carrying out at light splitting
Reason, exports, specific splitting ratio is not unique after light beam is divided into two-way.In the present embodiment, point of the first light splitting coupler 102
Light ratio is 50%, is exported after to be measured picosecond of light is divided into the equal light beam of two-way, so as to follow-up test observation, improves test just
Benefit.The splitting ratio of second light splitting coupler 104 and third light splitting coupler 106 is 1:999, respectively by the one thousandth of light beam
Part is sent to corresponding first measuring device 118 and the second measuring device 120.Specifically, the second light splitting coupler 104 docks
The light beam of receipts carries out light-splitting processing, and 1/1000 part of light beam is sent to the first measuring device 118 as testing, by light
Beam merging apparatus 116 is accessed in 999/1000 part of beam.Third light splitting coupler 106 carries out light-splitting processing to received light beam, will
1/1000 part of light beam is sent to the second measuring device 120 as being tested, and 999/1000 part of light beam is accessed and is closed
Bundle device 116.Second light splitting coupler 104 and third light splitting coupler 106 extract the one thousandth part output of light beam for
It is tested, is convenient for test observation.
By adjusting the first fiber amplifier 112 and the second fiber amplifier 114, so that corresponding light beam is amplified to generation and be excited
The critical point of Raman scattering.Stimulated Raman scattering is the electron excitation in the optical electric field and atom of light laser, the vibration in molecule
Or in crystal lattice generate, have it is very strong be excited characteristic, there are threshold values for stimulated Raman scattering, when optical path peak value
Power is smaller, when under this threshold value, the only common scattering of generation, and power very little, once and peak power improves
To threshold value is reached, scattering light just shows apparent laser characteristics, has good monochromaticjty, coherence and directionality, simultaneously
Scattering optical power is by sharply increasing exponentially.First fiber amplifier 112 and 114 structure of the second fiber amplifier and specification can
Unanimously can also be inconsistent, in the present embodiment, the first fiber amplifier 112 is consistent with 114 structure of the second fiber amplifier and specification,
It avoids influencing test because of amplifier cause diversified in specifications, improves test accuracy.Further, since to be measured picosecond of light source 300, first
Fiber amplifier 112 is consistent with the parameter of the second fiber amplifier 114, and the first light splitting coupler 102 is divided obtained two-way light
The parameter of beam is consistent, so that the parameter of the amplified light beam of two-way is also consistent, it is ensured that subsequent test is accurate and reliable.
In the 114 pairs of corresponding light beam amplifications of the first fiber amplifier 112 and the second fiber amplifier, filled by the first measurement
Set 118 and second measuring device 120 detection amplification light stimulated Raman scattering light.Specifically, the first fiber amplifier is incrementally increased
The power of device 112 and the second fiber amplifier 114 is to improve enlargement ratio, when amplification light peak power is in stimulated Raman scattering
When under threshold value, the first measuring device 118 and the detection substantially of the second measuring device 120 amplify light peak work less than scattering light
When rate reaches stimulated Raman scattering threshold value, amount of scattered light, which sharply increases, to be become obviously survey, at this time again by the first fiber amplifier
112 and second the power of fiber amplifier 114 turn down to scattering light is not observed, at this moment amplify light and reached stimulated Raman scattering
Critical point.
It completes that two beams are amplified combiner after amplification light is adjusted, and carries out pulsewidth test.Pass through the first optics regulating platform 108
And second optics regulating platform 110 change the path length difference between two-beam, the first optics regulating platform 108 and the second optics regulating platform
110 degree of regulation can select according to the actual situation, and degree of regulation is 1mm in the present embodiment, based on light beam 3*10^8m/s
It calculates, the pulse width precision of test is 3.3ps, can accurately complete the pulsewidth test of picosecond, it is ensured that test accuracy.
Picosecond narrow spaces test philosophy is referred to as light beam 1 and light beam 2 as shown in Fig. 2, two beams are amplified light, makes light beam
1 light path remains unchanged, and adjusts the corresponding optics regulating platform of light beam 2, makes its relative position with light beam 1 in time by Fig. 2
Direction change shown in middle arrow.Because two-beam is in the critical point that stimulated Raman scattering occurs, so that two beams after closing beam
(T1) peak power is sufficiently high at the time of light wave peak starts to be superimposed, and starts to detect stimulated Raman scattering light, this latter segment limit
Interior (T1-T2) scattering light always exists, until T2 two-beam wave crest is staggered, excited Raman light disappears, and measures the range of T1-T2 i.e.
The pulse width of light to be measured can be obtained.
First measuring device 118, the second measuring device 120 and third measuring device 122 are both used as detection excited Raman and dissipate
Light is penetrated, specifically detection two-way beam combination generates the initial time of stimulated Raman scattering light at the end of to third measuring device 122
It carves, obtains pulsewidth test result and show.First measuring device 118, the second measuring device 120 and third measurement in the present embodiment
Device 122 is spectrometer, and easy to operate and testing reliability is high.It is appreciated that in other embodiments, the first measuring device
118, the second measuring device 120 and third measuring device 122 can also add power meter to replace with bandpass filter.
Third measuring device 122 shows that the mode of pulsewidth test result is not unique, specifically can be two-way light directly
Beam superposition generates the initial time of stimulated Raman scattering light and finish time is shown as pulsewidth test result, tester
The pulsewidth of to be measured picosecond of light can be calculated according to initial time and finish time；It is also possible to calculate initial time and end
The difference at moment shows that tester can be directly viewable the pulsewidth of to be measured picosecond of light as pulsewidth test result.
Above-mentioned picosecond narrow spaces test device, the first fiber amplifier 112 and the second fiber amplifier 114 will pass respectively
Defeated light beam is amplified to the critical point for generating stimulated Raman scattering, and the first measuring device 118 and the second measuring device 120 are examined respectively
Survey the stimulated Raman scattering light of corresponding light beam.First optics regulating platform 108 and the second optics regulating platform 110 are in the first fiber amplifier
After the light beam of transmission is amplified to the critical point for generating stimulated Raman scattering by device 112 and the second fiber amplifier 114, adjusts and pass
The two-way beam combination of path length difference between defeated light beam, the detection access of third measuring device 122 generates stimulated Raman scattering light
Initial time and finish time, obtain pulsewidth test result and show.Picosecond is measured using stimulated Raman scattering principle
Pulse, it is structural visual, easy to operate and at low cost, reduce the testing cost of picosecond narrow spaces.
Above-mentioned picosecond narrow spaces test device, with traditional test method phase based on autocorrelation function analyzer and high-speed oscilloscope
Than the testing cost of hundreds of thousands or million or more are reduced to 20,000 yuan or less.Simultaneously as the device used is in structure
On it is more concise, greatly reduce the threshold of picosecond narrow spaces test.
The first optics regulating platform 108 includes the first adjusting mounting and is set to the first adjusting in one of the embodiments,
The first export head, the first collimation lens, the first coupled lens and the first input head of mounting, the first light splitting of the first export head connection
Coupler 102, the first input head connect the first fiber amplifier 112, and first adjusts mounting for adjusting the first export head and the
The distance between one input head.Light beam is from the first export head by the first collimation lens, the first coupled lens again from the first input
Head reenters optical fiber, adjusts mounting by first and adjusts the distance between the first export head and the first input head to change light beam
Distance.It is appreciated that the specific structure of the first optics regulating platform 108 is not unique, it need to only meet the distance of adjustment beam
?.
The second optics regulating platform 110 includes the second adjusting mounting and is set to the second adjusting in one of the embodiments,
The second export head, the second collimation lens, the second coupled lens and the second input head of mounting, the first light splitting of the second export head connection
Coupler 102, the second input head connect the second fiber amplifier 114, and second adjusts mounting for adjusting the second export head and the
The distance between two input heads.The concrete outcome and working principle and 108 class of the first optics regulating platform of second optics regulating platform 110
Seemingly, details are not described herein.
In one of the embodiments, as shown in figure 3, the first fiber amplifier 112 includes the first Active Optical Fiber 240, the
One bundling device 260 and first laser device 280, the first Active Optical Fiber 240 connect the first optics regulating platform 108 and the first bundling device
260, the first bundling device 260 connects first laser device 280 and the second light splitting coupler 104.First Active Optical Fiber 240 is used for the
The light beam of one optics regulating platform 108 output amplifies, and amplified light beam is delivered to the second light splitting coupling by the first bundling device 260
Clutch 104.
Transmission and enhanced processing are carried out by 240 pairs of light of the first Active Optical Fiber, it is technically simple and be easily achieved.First laser
Device 280 is for energizing the first Active Optical Fiber 240, the concretely semiconductor laser of first laser device 280.First laser
The quantity of device 280 is either one or more, and the quantity of first laser device 280 is two in the present embodiment, raising pair
First Active Optical Fiber 240 for stabilizability.Using the first Active Optical Fiber 240 as gain media, the first bundling device 260 coupling the
The output light of one laser 280 is as pumping source, by controlling the output light size of first laser device 280, to adjust the first light
The enlargement ratio of fiber amplifier 112.It is appreciated that the specific structure of the first fiber amplifier 112 is not unique, need to only meet can
Light beam is amplified.
Further, the first fiber amplifier 112 may also include first mode adaptation 220, and the first Active Optical Fiber 240 is logical
It crosses first mode adaptation 220 and connects the first optics regulating platform 108.First mode adaptation 220 is for different core optical fibers
Beam Propagation is convenient in butt coupling transition.
The second fiber amplifier 114 includes the second Active Optical Fiber, the second bundling device and second in one of the embodiments,
Laser, the second Active Optical Fiber connect the second optics regulating platform 110 and the second bundling device, and the second bundling device connects second laser
With third light splitting coupler 106.Further, the second fiber amplifier 114 further includes second mode adaptation, the second active light
Fibre connects the second optics regulating platform 110 by second mode adaptation.The specific structure of second fiber amplifier 114 and work are former
Reason is similar with the first fiber amplifier 112, and details are not described herein.
The embodiments described above only express several embodiments of the present invention, and the description thereof is more specific and detailed, but simultaneously
It cannot therefore be construed as limiting the scope of the patent.It should be pointed out that coming for those of ordinary skill in the art
It says, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to protection of the invention
Range.Therefore, the scope of protection of the patent of the invention shall be subject to the appended claims.
Claims (10)
1. a kind of picosecond narrow spaces test device, which is characterized in that including the first light splitting coupler, the second light splitting coupler,
Third light splitting coupler, the second optics regulating platform, the first fiber amplifier, the second fiber amplifier, closes the first optics regulating platform
Bundle device, the first measuring device, the second measuring device and third measuring device, the first light splitting coupler connection described first
Optics regulating platform and the second optics regulating platform；The first optics regulating platform, first fiber amplifier and described
Two light splitting couplers are sequentially connected, and second light splitting coupler connects first measuring device and the beam merging apparatus；Institute
It states the second optics regulating platform, second fiber amplifier and the third light splitting coupler to be sequentially connected, the third light splitting
Coupler connects second measuring device and the beam merging apparatus；The beam merging apparatus connects the third measuring device；
First light splitting coupler receives to be measured picosecond of light, and the to be measured picosecond of light is divided into after two-way light beam and is delivered to respectively
The first optics regulating platform and the second optics regulating platform, the first optics regulating platform is by received light beam through described
One fiber amplifier is transmitted to second light splitting coupler, and the second optics regulating platform is by received light beam through described second
Fiber amplifier is transmitted to the third light splitting coupler；Second light splitting coupler divides after received light beam is divided into two-way
Supplementary biography transports to first measuring device and the beam merging apparatus, and received light beam is divided into two-way by the third light splitting coupler
After be transmitted separately to second measuring device and the beam merging apparatus；The beam merging apparatus by received two-way beam Propagation extremely
The third measuring device；
First fiber amplifier and second fiber amplifier, which are respectively used to the light beam of transmission being amplified to generation, is excited
The critical point of Raman scattering；First measuring device and second measuring device are respectively used to detect being excited for corresponding light beam
Raman diffused light；
The first optics regulating platform and the second optics regulating platform are used in first fiber amplifier and described second
After the light beam of transmission is amplified to the critical point for generating stimulated Raman scattering by fiber amplifier, adjust between the light beam of transmission
Path length difference；The third measuring device is used to adjust transmission in the first optics regulating platform and the second optics regulating platform
When path length difference between light beam, detect access two-way beam combination generate stimulated Raman scattering light initial time and at the end of
It carves, obtains pulsewidth test result and show.
2. the apparatus according to claim 1, which is characterized in that the first optics regulating platform include first adjust mounting and
It is set to the described first the first export head, the first collimation lens, the first coupled lens and the first input head for adjusting mounting, it is described
First export head connects first light splitting coupler, and first input head connects first fiber amplifier, and described the
One adjusting mounting is for adjusting the distance between first export head and first input head.
3. the apparatus according to claim 1, which is characterized in that the second optics regulating platform include second adjust mounting and
It is set to the described second the second export head, the second collimation lens, the second coupled lens and the second input head for adjusting mounting, it is described
Second export head connects first light splitting coupler, and second input head connects second fiber amplifier, and described the
Two adjusting mountings are for adjusting the distance between second export head and second input head.
4. the apparatus according to claim 1, which is characterized in that the first optics regulating platform and second optics are adjusted
The degree of regulation of platform is 1mm.
5. the apparatus according to claim 1, which is characterized in that first fiber amplifier include the first Active Optical Fiber,
First bundling device and first laser device, first Active Optical Fiber connect the first optics regulating platform and described first and close beam
Device, first bundling device connect the first laser device and second light splitting coupler.
6. device according to claim 5, which is characterized in that first fiber amplifier further includes first mode matching
Device, first Active Optical Fiber connect the first optics regulating platform by the first mode adaptation.
7. the apparatus according to claim 1, which is characterized in that second fiber amplifier include the second Active Optical Fiber,
Second bundling device and second laser, second Active Optical Fiber connect the second optics regulating platform and described second and close beam
Device, second bundling device connect the second laser and the third light splitting coupler.
8. device according to claim 7, which is characterized in that second fiber amplifier further includes second mode matching
Device, second Active Optical Fiber connect the second optics regulating platform by the second mode adaptation.
9. the apparatus according to claim 1, which is characterized in that the splitting ratio of first light splitting coupler is 50%；It is described
The splitting ratio of second light splitting coupler and the third light splitting coupler is 1:999, respectively sends out the one thousandth part of light beam
It send to corresponding first measuring device and second measuring device.
10. the apparatus according to claim 1, which is characterized in that first measuring device, second measuring device and
The third measuring device is spectrometer.
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