CN105938014A - Infrared imaging spectrometer - Google Patents
Infrared imaging spectrometer Download PDFInfo
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- CN105938014A CN105938014A CN201610344238.5A CN201610344238A CN105938014A CN 105938014 A CN105938014 A CN 105938014A CN 201610344238 A CN201610344238 A CN 201610344238A CN 105938014 A CN105938014 A CN 105938014A
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- 238000003331 infrared imaging Methods 0.000 title claims abstract description 26
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
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Abstract
The invention discloses an infrared imaging spectrometer. The infrared imaging spectrometer comprises a moving mirror driving apparatus, a laser interference calibration system and a moving mirror control circuit. The moving mirror driving apparatus comprises a support base, a stepping motor, a ball screw, an intersection roller guide rail and a slide block, wherein the slide block is provided with a moving stereo pyramid prism. The laser interference calibration system comprises a laser, a reflective mirror, a beam splitter mirror, a compensation mirror, a one-eighth wave plate, a right-angle reflector, a fixed solid angle mirror, a polarization beam splitting prism, a laser detector and a half-wave plate. The moving mirror control circuit comprises a controller, a detection circuit acting on orthogonal interference signals and a driving circuit connected with the stepping motor. According to the invention, the system load capacity is high, a large-volume solid angle mirror can be driven to perform heavy-load motion, and different requirements of different spectrum resolutions and different application environments for a moving mirror control speed can be satisfied.
Description
Technical field
The invention belongs to Infrared Imaging Spectrometer field, relate to a kind of Infrared Imaging Spectrometer.
Background technology
Infrared Imaging Spectrometer is that a new generation grown up the beginning of the eighties collects infrared imaging and spectral information is detected on integral optical instrument, two-dimensional space information and high-resolution spectroscopy information can be provided simultaneously, be widely used in environmental monitoring, gas analysis, infrared radiation characteristics research field.
Infrared Imaging Spectrometer specific works principle is: in a high accuracy michelson interferometer optical path, by index glass scanning technique, obtains the interferogram of a series of different optical path difference, obtains corresponding spectrogram by Fourier transformation.
Index glass controls technology in high precision is one of Infrared Imaging Spectrometer core and difficult point, during motor control, index glass movement velocity uniformity should be kept, it is simultaneous for different targets and spectral resolution and index glass scanning speed is had different requirements, require the non-constant width of index glass speed adjustable range, span is very big, and can realize low-down microinching.
From grinding and from the point of view of the Infrared Imaging Spectrometer of success development, mostly use classical Michelson mechanism, utilize plane mirror or angle mirror light splitting；The driving means of index glass uses door case type (porch swing) mostly, utilizes voice coil motor or torque motor to drive, and the type device does not has mechanical reduction gear, carrying load ability and speed adjustable range all to limit.
Summary of the invention
The problem to be solved in the present invention is contemplated to overcome the deficiencies in the prior art, there is provided a kind of load capacity strong, large volume solid angle mirror heavy duty can be driven to move, different spectral resolutions and different application environment can be met simultaneously and index glass is controlled rate request, realizes the Infrared Imaging Spectrometer of wide scope speed controlling.
The technical solution adopted for the present invention to solve the technical problems is: a kind of Infrared Imaging Spectrometer, including index glass driving means, laser interference calibration system and index glass control circuit；
Described index glass driving means includes being fixed on the motor supporting base one end and the ball screw being connected by shaft coupling with motor output shaft, support and be fixed with crossed roller guide rail inside base, the slide block being connected with ball screw is installed on crossed roller guide rail, slide block is provided with dynamic solid angle cone prism, and described support base side is provided with zero-bit photoswitch；
Described laser interference calibration system includes optical axis O vertical with the two of corner cube mirror reflectings surface respectively11With optical axis O22, described dynamic three-dimensional angle mirror is arranged on optical axis O22On, optical axis O22On be also equipped with polarization beam splitter prism, described optical axis O11On be sequentially installed with illuminator, 1/8 wave plate and fixed three-dimensional angle mirror, described optical axis O11With optical axis O22Intersection point G at be provided with the parallel beam splitter being close to and compensating glass, the polarization laser sent from laser instrument, it is divided into reflection light and transmission light by mirror reflection to beam splitter after 1/2 wave plate, reflection light arrives corner cube mirror again through backtracking G point after dynamic three-dimensional angle mirror, described transmission light first passes through 1/8 wave plate and then arrives corner cube mirror through fixed three-dimensional angle mirror again, again through backtracking G point, and incide polarization beam splitter prism in the lump with reflection light formation interference, received by laser detector, obtain two-way quadrature interference signals；
Described index glass control circuit includes controller, the testing circuit acting on quadrature interference signals and the drive circuit being connected with motor.
Described a kind of Infrared Imaging Spectrometer, its controller is provided with the ADC interface receiving sinusoidal signal, the eQEP interface of recipient's wave pulse signal, and receives zero signal and control the I/O interface that drive circuit realizes controlling motor moving sweep.
Further, described controller is 2000 series DSP of TI company.
Described a kind of Infrared Imaging Spectrometer, its testing circuit has included the sample circuit of laser interference signals collecting, filter amplification circuit and shaping circuit.
Described a kind of Infrared Imaging Spectrometer, its motor be stepping angle be the two-phase hybrid stepping motor of 1.8 °.
Described a kind of Infrared Imaging Spectrometer, its laser instrument is the He-Ne laser instrument of 632.8nm.
Described a kind of Infrared Imaging Spectrometer, its laser detector is photodiode.
The invention has the beneficial effects as follows:
1, index glass driving means of the present invention uses special screw mandrel and guide rail, adds load driving force, uses ball screw to rotarily drive load movement, increasing speed reducing ratio from design, increasing load driving force, such as screw mandrel pitch is 1mm, then motor often rotates a circle, and index glass moves just 1mm；Use crossed roller line slideway, its high intensity, high rigidity and low frictional resistance, it is ensured that index glass can run steadily in the long term, laterally offset does not occur；Use step motor drive ball screw band movable slider and dynamic three-dimensional angle mirror traversing of probe motion, increase carrying load ability, big three-dimensional angle mirror motion can be driven, create condition for large area, high-resolution infrared focal plane array image-forming and spectrum analysis；
2, laser interference of the present invention calibration light path uses Michelson's interferometer, replaces plane mirror with three-dimensional angle mirror, tilts, when decreasing index glass scanning, the impact brought, reduces and index glass is controlled requirement.In optical interference circuit, increase 1/2 wave plate, 1/8 wave plate and polarization beam splitter prism simultaneously, the interference signal that two-way is orthogonal can be obtained, control to judge the direction of motion for motor, interference signal can be finely divided, realize triggering sampling less than the optical path difference of optical maser wavelength, obtain the spectrum of higher resolution；
3, control circuit of the present invention uses digital signal processor TMS320F28335 and high Multi-level microstep chip to simplify circuit design, digital signal processor TMS320F28335 its be internally integrated eQEP, ADC, the Peripheral Interface that SCI etc. are abundant, it is very easy to realize laser interference signal-count, and interference signal frequency dividing and frequency multiplication output are triggered the sampling of infrared data aplanatism difference；Up to 128 times micro-stepping control chips have only to pulse and direction signal just can realize step motor drive control；The highest micro-stepping control ensure that motor even running at low speeds.Just can control the speed of motor by controlling pulse frequency, and use digital signal processor regulation pulse frequency to be easier, therefore can realize the debugging of large span speed.
Accompanying drawing explanation
Fig. 1 is the structural representation of index glass driving means of the present invention；
Fig. 2 is the structural representation of laser interference of the present invention calibration system；
Fig. 3 is the block diagram of this index glass control circuit.
Each reference is: 101 motors, 102 support base, 103 shaft couplings, 104 crossed roller guide rails, 105 ball screws, 106 slide blocks, 107 dynamic three-dimensional angle mirrors, 108 zero-bit photoswitches, 201 laser instrument, 202 illuminators, 203 beam splitters, 204 compensating glass, 206 1/8 wave plates, 207 corner cube mirrors, 208 fixed three-dimensional angle mirrors, 209 polarization beam splitter prisms, 210 laser detectors, 211 1/2 wave plates, 301 controllers, 302 drive circuits, 303 sample circuits, 304 filter amplification circuit, 305 shaping circuits, 310 testing circuits.
Detailed description of the invention
Below in conjunction with the accompanying drawings the present invention is described in further detail.
The invention discloses a kind of interference correction system, including index glass driving means, laser interference calibration system and index glass control circuit.
nullAs shown in Figure 1，Described index glass driving means includes being fixed on the motor 101 supporting base 102 one end and the ball screw 105 being connected by shaft coupling 103 with motor output shaft，Motor 101 is two-phase hybrid stepping motor，Stepping angle is 1.8 °，Motor 101 drives ball screw 105 to rotate，Ball screw 105 return difference and frictional resistance are the least，Support and be fixed with crossed roller guide rail 104 inside base 102，The slide block 106 being connected with ball screw 105 is installed on crossed roller guide rail 104，Crossed roller guide rail 104 be a kind of two as the V-shaped biplane track platform of rail groove between load the linear guide of cylindrical roller of subsidiary retainer，Owing to cylindrical roller replaces orthogonal configuration，The load of all directions can be born，Carry out the linear motion smoothly of very high degree of precision，There is precision good，Rigidity is high，The advantage that frictional resistance is little，Solve in slide block linear motion simultaneously and be partial to problem，Ensure that slide block moves along a straight line the most smoothly and will not be partial to，So motor 101 drives ball screw 105 to rotate when rotating and then promotes slide block 106 to move forward and backward，Owing to slide block 106 is fixed on the interior wood side-guide of crossed roller guide rail 104，The outside slide rail of crossed roller guide rail 104 is fixed on support base 102，Within the orbital plane depth of parallelism of datum clamp face can reach 3um，Dynamic solid angle cone prism 107 is placed on slide block 106，Owing to frictional resistance is little，Add the retarding efffect of ball screw 105，Even if causing the motor using less driving force also can drive the dynamic solid angle cone prism 107 of larger volume and mass loading，Thus large area array high-resolution infrared imaging is created condition，And dynamic solid angle cone prism 107 is when moving forward and backward 15mm distance，Within deflection can control 3 seconds，Described base 102 side that supports is provided with the zero-bit photoswitch 108 detecting closed loop for zero optical path difference labelling and position，Zero-bit photoswitch 108 is arranged on zero optical path difference position，It is mainly used to labelling zero optical path difference position，As index glass scan position benchmark，Accomplishing during design can fine setting front and back，Zero-bit photoswitch 108 is position signalling positioning datum，Can reset through position signalling every time，Eliminate cumulative error，Can move forward and backward and be installed on zero light path point position，The highest to the tilt requirements of index glass owing to using dynamic three-dimensional angle mirror，During installation，Its position is determined by detection infrared signal amplitude，When the gray value at zero light path point position infrared image has an obvious fluctuation.Moving photoconductor switchs near zero light path position.
As in figure 2 it is shown, the laser interference calibration system with infrared light path altogether includes optical axis O vertical with the two of corner cube mirror 207 reflectings surface respectively based on Michelson's interferometer11With optical axis O22, described dynamic three-dimensional angle mirror 107 is arranged on optical axis O22On, optical axis O22On be also equipped with the polarization beam splitter prism 209 of polarization direction for regulating laser, described optical axis O11On be sequentially installed with illuminator 202,1/8 wave plate 206 and fixed three-dimensional angle mirror 208, described optical axis O11With optical axis O22Intersection point G at be provided with beam splitter 203 and compensating glass 204, beam splitter 203 and compensating glass 204 and optical axis O11null45 ° of angles，The polarization laser sent from laser instrument 201，Beam splitter 203 is reflexed to by illuminator 202 after 1/2 wave plate 211，Reflection light and transmission light it is divided in beam splitter 203 second surface half-reflection and half-transmission face，Reflection light arrives corner cube mirror 207 again through backtracking G point after dynamic three-dimensional angle mirror 107，Described transmission light first passes through 1/8 wave plate 206 and then arrives corner cube mirror 207 through fixed three-dimensional angle mirror 208 again，Again through backtracking G point，And incide polarization beam splitter prism 209 in the lump with reflection light formation interference，Make Orthogonal Decomposition in the horizontal and vertical directions，Separate P light and the S light of phase 90 °，I.e. obtain mutually orthogonal two-way interference signal，Received by laser detector，Obtain laser interference signal，1/2 wave plate 211 is for regulating the polarization direction of laser instrument，Transmission light twice is through 1/8 wave plate 206，Be equivalent to have passed through a quarter wave plate，Line polarisation can be become rotatory polarization，And the light of two different polarization states is branched away by polarization beam splitter prism；The present invention replaces plane mirror with three-dimensional angle mirror, and in Michelson light path, add corner cube mirror 207, 1/2 wave plate 211, 1/8 wave plate 206, polarization beam splitter prism 209, the He-Ne laser that laser instrument 201 sends is through forming, with the michelson interferometer optical path of infrared signal light path altogether, the optical signal interfered, two-way quadrature interference signals is obtained by light-dividing device, sample through testing circuit 310 again, amplify, filtering, shaping obtains two-way sinusoidal signal and pulse signal, this signal represents the change of actual infrared light path difference, control for index glass and infrared aplanatism difference data gathers.
During installation, on the basis of the reflecting surface of corner cube mirror 207, the optical axis (O of horizontal glass and index glass11, O22) vertical with two faces of corner cube mirror respectively.Beam splitter 203 is close to parallel fixing, with horizontal glass optical axis O with compensating glass 20411Angle at 45 °, the laser that laser instrument 201 sends and index glass optical axis O22Parallel, angle at 45 ° with illuminator 202,1/2 wave plate 211 is placed on after laser instrument 201,1/8 wave plate 206 is placed between fixed three-dimensional angle mirror 208 and compensating glass 204, polarization beam splitter prism 209 is for light splitting, owing to reflection more or less can be played in polarization beam splitter prism 209 and each surface of compensating glass 204, if above placing dark slide at polarizing beam splitter mirror 209, can be appreciated that a lot of hot spot: have flare, also have transmission hot spot；Flare and transmission hot spot that polarization beam splitter prism 209 second surface is formed should be chosen, debugging makes its formation that overlaps interfere, and incide polarization beam splitter prism by certain angle and make its light splitting, the exit direction at P light and S light is installed laser pick-off diode and is received interference signal.
As shown in Figure 3, index glass control circuit includes testing circuit 310, controller 301 and the drive circuit 302 being linked in sequence, drive circuit 302 uses high-precision fine driving chip, described drive circuit 302 is connected with motor 101, wherein testing circuit 310 has included the sample circuit 303 of laser interference signals collecting, complete laser interference signal to amplify and the filter amplification circuit 304 of filtering, and complete the comparison of laser interference signal, sinusoidal signal is shaped to the shaping circuit 305 of square-wave pulse signal.
Controller 301 uses digital signal processor TMS320F28335, it is internally integrated eQEP, ADC, the Peripheral Interface that SCI etc. are abundant, for completing the communication with host computer and the reception of interference signal, sinusoidal signal is received, by eQEP recipient's wave pulse signal, by I/O port reception zero signal, by IO control drive circuit realization to motor movement scan control by ADC.
Drive circuit 302 uses up to 128 times segmentation stepper motor driver chip, have only to the several I/O signal of processor and just can realize the control to motor 101, mainly have direction signal, pulse signal and segmentation that signal is set: direction signal controls the direction of motion of motor；Pulse signal controls stepper motor speed；Subdivision's signal arranges segmentation number.One pulse signal controls one micro-stepping of motor, and the frequency of pulse directly determines motor speed, and pulse signal passes through the timer interruption of processor TMS320F28335, controls IO and produces.Owing to intervalometer is 32, master clock is 150M, and therefore pulse frequency can a wide range of regulate.Pulse frequency can also realize motor by even acceleration or sinusoidal rule change and accelerate to start and speed reducing stopping, and the stability of frequency, the velocity-stabilization of corresponding motor.
The He-Ne laser of the 632.8nm sent from laser instrument 201 is through above-mentioned michelson interferometer optical path, become two-way quadrature interference light, receive through photodiode, become, after over-sampling circuit 303, filter amplification circuit 304, the sinusoidal signal that two-way is orthogonal again, received by the AD conversion module of processor TMS320F28335, this signal becomes, also by comparing shaping circuit 305, the pulse signal that two-way is orthogonal simultaneously, receives (eQEP) by the quadrature coding pulse module of processor TMS320F28335 and receives.
On the one hand interference signal feeds back for index glass position, does position-force control, on the other hand also serves as the synchronous triggering signal that infrared picture data gathers.When sampling with He-Ne optical maser wavelength multiple benchmark, it is only necessary to by the comparison module of the quadrature coding pulse module of TMS320F28335, orthogonal pulse signal is finely divided.Owing to two-way orthogonal pulses signal has carried out quadruple He-Ne laser, the optical maser wavelength aplanatism difference samplings such as 1/4,1/2,1,2,4,8 therefore can be realized.
If needing less optical path difference to sample, triggering signal after being finely divided, can be exported by the sinusoidal signal that two-way is orthogonal.
The present invention meets high spectral resolution and high-resolution infrared focal plane array image-forming requirement by index glass stable operation under the conditions of extremely low speed, realize under different spectrum rate, the aplanatism difference of different velocity of wave is sampled, use motor as driving motor, uniform motion and location can be realized by high Multi-level microstep, positioning precision reaches Nano grade, in the case of extremely low speed, also has bigger driving force simultaneously, it is susceptible to the interference effect in the external world, keep low speed even running, the most also have that mechanism is compact, volume is little, lightweight advantage；Use screw mandrel reducing gear and the crossed roller guide rail of low frictional resistance, drive coordinating high micro-stepping control, it is possible to achieve the speed governing campaign of wide scope, traveling at the uniform speed of extremely low speed can be realized simultaneously.
The principle of above-described embodiment only illustrative present invention and effect thereof; and the embodiment that part is used, for the person of ordinary skill of the art, without departing from the concept of the premise of the invention; can also make some deformation and improvement, these broadly fall into protection scope of the present invention.
Claims (7)
1. an Infrared Imaging Spectrometer, it is characterised in that: include index glass driving means, laser interference calibration system and index glass control circuit；
Described index glass driving means includes being fixed on the motor (101) supporting base (102) one end and the ball screw (105) being connected by shaft coupling (103) with motor output shaft, support base (102) inner side and be fixed with crossed roller guide rail (104), the slide block (106) being connected with ball screw (105) is installed on crossed roller guide rail (104), slide block (106) is provided with dynamic solid angle cone prism (107), and described support base (102) side is provided with zero-bit photoswitch (108)；
Described laser interference calibration system includes optical axis O vertical with two reflectings surface of corner cube mirror (207) respectively11With optical axis O22, described dynamic three-dimensional angle mirror (107) is arranged on optical axis O22On, optical axis O22On be also equipped with polarization beam splitter prism (209), described optical axis O11On be sequentially installed with illuminator (202), 1/8 wave plate (206) and fixed three-dimensional angle mirror (208), described optical axis O11With optical axis O22Intersection point G at be provided with the parallel beam splitter (203) being close to and compensating glass (204), the polarization laser sent from laser instrument (201), after 1/2 wave plate (211), reflexed to beam splitter (203) by illuminator (202) be divided into reflection light and transmission light, reflection light arrives corner cube mirror (207) again through backtracking G point after dynamic three-dimensional angle mirror (107), described transmission light first passes through 1/8 wave plate (206) and then arrives corner cube mirror (207) through fixed three-dimensional angle mirror (208) again, again through backtracking G point, and incide polarization beam splitter prism (209) in the lump with reflection light formation interference, received by laser detector (210), obtain two-way quadrature interference signals；
Described index glass control circuit includes controller (301), the testing circuit (310) acting on quadrature interference signals and the drive circuit (302) being connected with motor (101).
A kind of Infrared Imaging Spectrometer the most according to claim 1, it is characterized in that, described controller (301) is provided with the ADC interface receiving sinusoidal signal, the eQEP interface of recipient's wave pulse signal, and receive zero signal and control the I/O interface that drive circuit (302) realizes controlling motor (101) moving sweep.
A kind of Infrared Imaging Spectrometer the most according to claim 2, it is characterised in that described 2000 series DSP that controller (301) is TI company.
A kind of Infrared Imaging Spectrometer the most according to claim 1, it is characterised in that described testing circuit (310) has included the sample circuit (303) of laser interference signals collecting, filter amplification circuit (304) and shaping circuit (305).
A kind of Infrared Imaging Spectrometer the most according to claim 1, it is characterised in that described motor (101) be stepping angle be the two-phase hybrid stepping motor of 1.8 °.
A kind of Infrared Imaging Spectrometer the most according to claim 1, it is characterised in that the described He-Ne laser instrument that laser instrument (201) is 632.8nm.
A kind of Infrared Imaging Spectrometer the most according to claim 1, it is characterised in that described laser detector (210) is photodiode.
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| CN201610344238.5A CN105938014A (en) | 2016-05-23 | 2016-05-23 | Infrared imaging spectrometer |
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| CN201610344238.5A CN105938014A (en) | 2016-05-23 | 2016-05-23 | Infrared imaging spectrometer |
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| CN111562009A (en) * | 2020-04-27 | 2020-08-21 | 中国科学院西安光学精密机械研究所 | Common-path angle mirror interferometer and interference method |
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| US20140240711A1 (en) * | 2013-02-25 | 2014-08-28 | Seiko Epson Corporation | Measurement device |
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Address after: 430223 No. 9 Ming Ze street, mien Shan development area, Jiangxia District, Wuhan, Hubei Applicant after: Jiuzhiyang Infrared System Co., Ltd. Address before: 430223 Jiangxia City, Wuhan province sunshine road, No. 717, Applicant before: Jiuzhiyang Infrared System Co., Ltd. |
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Application publication date: 20160914 |