CN105928960A - Precision air-bearing turntable - Google Patents
Precision air-bearing turntable Download PDFInfo
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- CN105928960A CN105928960A CN201610550596.1A CN201610550596A CN105928960A CN 105928960 A CN105928960 A CN 105928960A CN 201610550596 A CN201610550596 A CN 201610550596A CN 105928960 A CN105928960 A CN 105928960A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
- G01N23/046—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using tomography, e.g. computed tomography [CT]
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Abstract
The invention discloses a precision air-bearing turntable. The precision air-bearing turntable comprises a shell, an air bearing, a motor and a revolution mandrel, the air bearing comprises a main shaft system and an air guiding system, the main shaft system comprises a hollow shaft I, a hollow shaft II, an upper thrust plate and a lower thrust plate, the hollow shaft I is arranged between the upper thrust plate and the lower thrust plate, and the hollow shaft I is in clearance fit with the hollow shaft II, the upper thrust plate and the lower thrust plate; the revolution mandrel is sleeved in the hollow shaft II, and the hollow shaft II is in interference fit with the revolution mandrel; and the air guiding system comprises an air guiding ring, an air inlet channel and an air outlet channel. The precision air-bearing turntable overcomes the disadvantages of severe mechanical wearing, high friction loss and low precision of traditional turntables, has the advantages of no noises or friction force disturbance, no oil stain or particle pollution to environment, and improved precision and stability, and fully meets requirements of industrial CT scanning systems for turntables.
Description
Technical field
The invention belongs to industrial computed tomography equipment technical field, be specifically related to a kind of accurate air-float turntable.
Background technology
Computerized tomography (Computed Tomography, CT) technology is a kind of in not defective work piece material and the condition of structure
Under, the Dynamic Non-Destruction Measurement of inside workpiece structural relation and defect condition can be detected, have high-resolution, high sensitivity and
The inferior advantage of multilamellar.Industry CT scanning system typically uses vertical structure, and its feature is: in scanning process x-ray source with
Detector is static, and workpiece is placed and rotated around center of rotation axle on a spinstand.The effect of its intermediate station is realize workpiece the evenest
Speed rotates or multi-angle rotary location, to meet X-ray to workpiece different parts, different aspects, the real time scan of different angles,
Sufficient array information is provided for image reconstruction.Thus, turntable is the vitals in industry CT scanning system, and its precision is to obtaining
Take array information and there is material impact.But the frictional dissipation in rotary course of traditional turntable is high, precision is low, it is impossible to provide
High-accuracy rotary work, it is impossible to meet the required precision of high accuracy CT system.
Along with the application of gas lubricant is increasingly extensive, the research of air bearing the most increasingly comes into one's own, and air bearing has
Rotating accuracy is high, and stationarity is good；And frictional heat is little when high speed rotating, thermal deformation errors is the least, drives power requirement little,
It is difficult to the advantages such as pollution.Therefore, air bearing is used widely in ultraprecise turntable, therefore, for current demand,
It is necessary to design a kind of accurate air-float turntable so that it is have the advantages that rotating accuracy is high, frictional dissipation is low, it is adaptable to superhigh precision
The requirement of CT scan system.
Summary of the invention
In view of this, being of the present invention provides a kind of accurate air-float turntable, to overcome that tradition turntable mechanical wear is serious, to rub
Shortcomings such as consumption of wearing is high and precision is low, and this turntable will not produce noise and frictional force disturbance, environment will not be caused greasy dirt,
Granules etc. pollute, and also improve turntable precision and stability, it is possible to fully meet the requirement to turntable of the industry CT scanning system.
For reaching above-mentioned purpose, the present invention is achieved through the following technical solutions:
One precision air-float turntable of the present invention, the turntable body including housing, being located on housing, drive turntable body rotate motor,
Fixing connection motor turns round mandrel with turntable body rotating shaft and is sleeved on the air bearing on revolution mandrel, described air bearing bag
Include axis system and gas directing system, described axis system include hollow axle I, be sleeved in hollow axle I rotating hollow
Axle II and be respectively and fixedly connected with thrust plate and lower thrust plate in the axial both sides of hollow axle II, described hollow axle I is located at thrust
Between plate and lower thrust plate, and hollow axle I and hollow axle II, upper thrust plate and lower thrust plate matched in clearance respectively；Described hollow
Described revolution mandrel and hollow axle II and revolution mandrel interference fit it is set with in axle II；Described gas directing system includes suit
Guide ring outside hollow axle I, be arranged on hollow axle I in and the inlet channel that connects with guide ring and be arranged on thrust plate
And in lower thrust plate and by hollow axle I and hollow in II, between upper thrust plate and lower thrust plate formed clearance channel respectively with
The outlet passageway of inlet channel connection.
Further, on described, the week of thrust plate and lower thrust plate it is provided with several upwardly along its axial direction equally distributed
Fixing hole, the most adjacent spacing between described fixing hole is equal, is provided with chamfering at described fixing hole peritreme；At described hollow axle
The week of II it is provided with the fixing hole with described upper thrust plate and lower thrust plate upwardly along its axial direction to match the axially extending bore being connected.
Further, described guide ring and hollow axle I interference fit, described hollow axle I outer wall is provided with and coordinates with described guide ring
The stage installed, is provided with several equally distributed installing holes in the week of described guide ring upwardly along its axial direction, and two is biphase
The adjacent spacing between described installing hole is equal, is provided with chamfering at described installing hole peritreme.
Further, described housing is included in the axial both sides of guide ring and is respectively arranged with upper shell and lower house and is arranged at lower house
The shrouding of bottom, the rotating disk of described turntable body is positioned at the top of upper shell, described upper shell and lower house by screw and guide ring
Upper set installing hole is fixing to be connected；Being fixedly connected with electric machine stand in described lower house, described electric machine stand is sleeved in revolution
On mandrel and being provided with stator and rotor between the two, described stator is fixedly installed on electric machine stand inwall, and described rotor is fixed
It is connected to turn round on outside mandrel；Described motor is torque motor.
Further, the rotating shaft of described turntable body being provided with Circular gratings, described Circular gratings is positioned in air bearing on thrust plate.
Further, the inwall of described guide ring is provided with the annular groove connected with inlet channel, in the radial direction of described guide ring
Being provided with a passage on direction, one end of described passage is connected to bottom annular groove, and the other end is connected to external air source；
Described guide ring by gluing connect airtight with hollow axle I.
Further, the circumference of described hollow axle I is provided with several equally distributed described inlet channels, the most adjacent
Described inlet channel between spacing equal, described inlet channel is by the horizontal air intake duct run through along hollow axle I radial direction and edge
The orthogonal crisscrossing channels that longitudinal air intake duct that hollow axle I axial direction runs through is constituted.
Further, on described, in the axial direction of thrust plate and lower thrust plate, it is provided with several equally distributed described outlet passageways,
The most adjacent spacing between described outlet passageway is equal, and described outlet passageway includes along upper thrust plate or lower thrust plate axially side
With at upper thrust plate or lower thrust plate to the longitudinal gas off-take run through connect with longitudinal gas off-take and be extending outwardly away from the radial direction
The radial direction gas off-take at upper thrust plate or lower thrust plate center, described longitudinal gas off-take is formed in alignment with between hollow axle I and hollow axle II
Clearance channel.
Further, described inlet channel is equal in the one end near hollow axle II at the two ends and horizontal air intake duct being positioned at longitudinal air intake duct
It is provided with orifice plug；Described orifice plug by gluing connect all airtight with inlet channel.
Further, described orifice plug is provided with one or more slits or hole shape flow channel.
Compared with prior art, it is an advantage of the current invention that:
1, the present invention ensure that the jerk value of axle system is in claimed range.
2, the present invention ensure that turntable axle to tie up under duty to operate steadily, friction, noiselessness etc..
3, the present invention has control accuracy height, the feature that load capacity is higher；And it is little to possess frictional dissipation when high speed rotating, no
The advantages such as easy pollution.
Other advantages, target and the feature of the present invention will be illustrated to a certain extent in the following description, and at certain
In kind of degree, will be apparent to those skilled in the art based on to investigating hereafter, or can be from this
Bright practice is instructed.The target of the present invention and other advantages can be realized by description below and obtain.
Accompanying drawing explanation
In order to make the object, technical solutions and advantages of the present invention clearer, below in conjunction with accompanying drawing, the present invention is made further
Describe in detail, wherein:
Fig. 1 precision of the present invention integrally-built schematic diagram of air-float turntable；
The upward view of Fig. 2 Fig. 1；
The A-A sectional view of Fig. 3 Fig. 2；
The B-B sectional view of Fig. 4 Fig. 2
Fig. 5 is the structure sectional view of high-precision static pressure air bearing of the present invention；
Fig. 6 is the schematic diagram of guide ring in high-precision static pressure air bearing of the present invention；
Fig. 7 is the structure sectional view of Fig. 6；
Fig. 8 is the schematic diagram of upper thrust plate in high-precision static pressure air bearing of the present invention；
Fig. 9 is the structure sectional view of Fig. 8；
Figure 10 is the schematic diagram of high-precision static pressure air bearing hollow mandrel II of the present invention；
Figure 11 is the structure sectional view of Figure 10；
Figure 12 is the schematic diagram of high-precision static pressure air bearing hollow mandrel I of the present invention；
Figure 13 is the structure sectional view of Figure 12；
Reference: 1-hollow axle I, 2-hollow axle II, the upper thrust plate of 3-, 4-lower thrust plate, 5-guide ring, 6-air inlet is led to
Road, 7-outlet passageway, 8-orifice plug, 9-turns round mandrel, 10-upper shell, 11-lower house, 12-shrouding, 13-rotating shaft, 14-
Rotating disk, 15-stator, 16-rotor, 17-electric machine stand, 18-Circular gratings, 19-grating fixed bit dish, 20-grating power interface,
21-motor power interface, 22-directintermination joint；
Wherein, 201-axially extending bore, 301-fixing hole, 501-annular groove, 502-passage, 503-installing hole, 601-is horizontal
To air intake duct, 602-longitudinal direction air intake duct, the horizontal gas off-take of 701-, 702-longitudinal direction gas off-take.
Detailed description of the invention
Below with reference to accompanying drawing, the preferred embodiments of the present invention are described in detail；Should be appreciated that preferred embodiment is only
The explanation present invention rather than in order to limit the scope of the invention.
As shown in figures 1-13, one precision air-float turntable of the present invention, the turntable body including housing, being located on housing, driving turntable
The motor that body rotates, fixing connection motor turn round mandrel 9 with turntable body rotating shaft 13 and are sleeved on the air on revolution mandrel 9
Bearing, this housing includes upper shell 10, lower house 11 and shrouding 12, upper shell 10 and lower house 11 and lays respectively at inducing QI
On the axial both sides of ring 5, shrouding 12 is connected to lower house 11, and this turntable body includes rotating shaft 13 and rotating disk 14, rotating disk 14
Being positioned at the top of upper shell 10, this motor includes stator 15 and rotor 16, is fixedly connected with electric machine stand in lower house 11
17, this electric machine stand 17 is sleeved on revolution mandrel 9 and is provided with between the two stator 15 and rotor 16, and stator 15 is solid
Dingan County is contained on electric machine stand 17 inwall, and rotor 16 is fixedly mounted on outside revolution mandrel 9, and motor is torque motor；
This air bearing is mainly made up of axis system and gas directing system, and wherein axis system includes hollow axle I 1, is sleeved on sky
Rotating hollow axle II 2 in mandrel I 1 and being respectively and fixedly connected with by screw (unmarked) in the axial both sides of hollow axle II 2
There are upper thrust plate 3 and lower thrust plate 4, and hollow axle I 1 is also mounted between thrust plate 3 and lower thrust plate 4, hollow axle I
Difference matched in clearance between 1 and hollow axle II 2, upper thrust plate 3 and lower thrust plate 4, and by upper thrust plate 3 and lower thrust
The week of plate 4 is provided with several equally distributed fixing holes 301 upwardly along its axial direction, and the most adjacent fixing hole 301
Between spacing equal, be provided with chamfering at fixing hole 301 peritreme, be beneficial to consolidate, Fast Installation；Circumference at hollow axle II 2
On be provided with the fixing hole 301 with upper thrust plate 3 and lower thrust plate 4 along its axial direction and match the axially extending bore 201 being connected,
By using between screw and this fixing hole 301 and axially extending bore 201 under the effect of cooperating, by hollow axle I 1 and upper thrust plate 3
Connection fixing with lower thrust plate 4；This revolution mandrel 9 and hollow axle II 2 and revolution mandrel 9 interference it is set with in hollow axle II 2
Coordinate；So, on hollow axle II 2, thrust plate 3 and lower thrust plate 4 constitute a revolving body, and hollow axle II 2 is sleeved on revolution
On mandrel 9, this revolving body can rotate motion relative to hollow axle I 1 with revolution mandrel 9 under the driving of motor；
This gas directing system include be sleeved on outside hollow axle I 1 guide ring 5, be arranged on hollow axle I 1 in and with guide ring 5 even
Logical inlet channel 6 and in being arranged on thrust plate 3 and lower thrust plate 4 and by hollow axle I 1 with hollow in II 2, upper only
The outlet passageway 7 that the clearance channel (unmarked) formed between push pedal 3 and lower thrust plate 4 connects with inlet channel 6 respectively；
And it is provided with the annular groove 501 connected with inlet channel 6 on the inwall of guide ring 5, setting in the radial direction of guide ring 5
Being equipped with a passage 502, one end of passage 502 is connected to bottom annular groove 501, and the other end is connected to external air source (not
Draw), this example make passage 502 connect with external air source by directintermination joint 22；This inlet channel 6 is at hollow axle
Being evenly distributed with several in the circumference of I 1, and the spacing between the most adjacent inlet channel 6 is equal, inlet channel 6 is by edge
Horizontal air intake duct 601 that hollow axle I 1 radial direction runs through and longitudinal air intake duct 602 structure run through along hollow axle I 1 axial direction
The orthogonal crisscrossing channels become, wherein laterally one end of air intake duct 601 is connected to the annular groove 501 of guide ring 5, the other end
Being connected between hollow axle I 1 and hollow axle II 2 clearance channel formed, the two ends of longitudinal air intake duct 602 then connect and hollow axle
Clearance channel between I 1 and upper thrust plate 3 and lower thrust plate 4；This outlet passageway 7 is at upper thrust plate 3 and lower thrust plate 4
Being evenly distributed with several on Zhou Xiang, and the spacing between the most adjacent outlet passageway 7 is equal, outlet passageway 7 includes along upper
Longitudinal gas off-take 702 that thrust plate 3 or lower thrust plate 4 axial direction run through and in upper thrust plate 3 or lower thrust plate 4 radial direction side
Upwards connect and be extending outwardly away from upper thrust plate 3 or the radial direction gas off-take 701 at lower thrust plate 4 center with longitudinal gas off-take 702,
This longitudinal direction gas off-take 702 is in alignment with the clearance channel formed between hollow axle I 1 and hollow axle II 2；So, external air source is successively
Delivered the air to each inlet channel in hollow axle I by the passage on guide ring and annular groove, portion of air is led to
Cross horizontal air intake duct to be input to after the clearance channel between hollow axle I and hollow axle II through outlet passageway and hollow axle I and upper thrust plate
With the clearance channel between lower thrust plate exports outside this bearing body, portion of air by longitudinal air intake duct be input to hollow axle I with
After clearance channel between hollow axle II outside this clearance channel and outlet passageway export this bearing body, wherein, by outlet passageway to
The air of outer output is then jointly to get rid of bearing body by longitudinal gas off-take and the horizontal gas off-take connected of giving vent to anger with this longitudinal direction
Outward；It is exactly briefly, during this, respectively between hollow axle I and hollow axle II, and hollow axle I and upper thrust plate
And form air film between lower thrust plate, using air as lubricant so that hollow axle I and hollow axle II, upper thrust plate and under
Relative motion is kept, the supporting surface of the most this relative motion and relied on air between supporting surface between the revolving body that thrust plate is constituted
Film separates both, thus has low friction, high-low temperature resistant and radiation-resistant feature.
The present embodiment intermediate station is to use torque motor directly to drive, and electric machine stand 17 and stator 15 connector are fixedly mounted on down
On housing 11, rotor 16, revolution mandrel 9, hollow axle II 2, upper thrust plate 3, lower thrust plate 4 and turntable body are connected
And under motor effect, rotor 16 drives revolution mandrel 9, hollow axle II 2, upper thrust plate 3, lower thrust plate 4 and turntable body one
Rising and make gyration relative to hollow axle I 1, whole revolving body is supported by its hollow mandrel I 1, air film thickness scalable
Control within the specific limits, simultaneously as a high-precision static pressure air bearings support on gyratory directions, i.e. fixed by revolving body
The heart and support use high-precision static pressure air bearing structure, improve the precision and stability of accurate air-float turntable, have control essence
Degree height, stationarity is good, the feature that load capacity is higher；And it is little to possess frictional dissipation when high speed rotating, is difficult to the advantages such as pollution.
In the present embodiment, the contact surface between preferred described hollow axle I 1 and hollow axle II 2 is set to the conical surface, and this structure is favourable
In revolving body there being on gyratory directions a high-precision static pressure air bearing supporting, improve workbench load so that it is can bear relatively
Big heeling moment.
In the present embodiment, described guide ring 5 and hollow axle I 1 matched in clearance, the most in different embodiments, between the two also
Can be interference fits or interference fit；This hollow axle I 1 outer wall is provided with and coordinates the stage (unmarked) installed with guide ring 5,
So, but hollow axle I is shelved on guide ring, can be held up this hollow axle I by guide ring；Meanwhile, at guide ring 5
Week is provided with several equally distributed installing holes 503, the most adjacent spacing between installing hole 503 upwardly along its axial direction
Equal, it is provided with chamfering at installing hole 503 peritreme, so, guide ring can be made to be fixedly connected on foreign object by installing hole, thus
Make hollow axle I also obtain fixed position to place.In this example, described upper shell 10 and lower house 11 are through screw and (do not mark
Note) installing hole 503 set with on guide ring 5 fix and be connected.
In the present embodiment, the rotating shaft of described turntable body is provided with Circular gratings 18, described Circular gratings 8 is only positioned in air bearing
In push pedal, so, it is provided by a high accuracy circular grating, carries out closed loop control；Described lower thrust plate 11 and electric machine stand
It is provided with friction plate (not shown) between 17, so, is reached by the frictional force friction existed between friction plate and lower thrust plate 11
To braking effect, and this friction plate can be controlled by hydraulic control or startup.Additionally, be provided with on upper shell 10 for for round
The grating power interface 20 of grating 18 energy supply, is provided with for the motor power interface 21 for motor energy supply on lower house 11.
In the present embodiment, described guide ring 5 by gluing connect airtight with hollow axle I 1.Described gluing connecing uses anaerobism with viscose glue
Glue 342, can meet use condition.Certainly the most in various embodiments, to be positioned at annular recessed on the inwall of described guide ring 5
The both sides of groove 501 are also provided with sealed groove (not shown), and so, guide ring 5 just can be by being arranged at sealed groove
Interior O RunddichtringO (not shown) is airtight with hollow axle I 1, equally reaches above-mentioned purpose.
In the present embodiment, described inlet channel 6 is being positioned at the two ends of longitudinal air intake duct 602 and horizontal air intake duct 601 near empty
One end of mandrel II 2 all can be provided with orifice plug 8 by copper sheathing (not shown), thus it is possible, on the one hand, the peace that orifice plug can consolidate
It is contained in inlet channel, on the other hand can be regulated the flow of the air draught of inlet channel outlet by orifice plug, with satisfied sky
Mandrel I and hollow axle II, the use condition of the air film of formation between upper thrust plate and lower thrust plate.In this example, turntable can be put
Air supporting revolution work is obtained under 0.4～0.6MPa Supplying gas condition.
In the present embodiment, described orifice plug 8 also by gluing connect airtight with inlet channel 6.Described gluing connecing is also adopted by with viscose glue
Anaerobic adhesive 342, can meet use condition.
In the present embodiment, described orifice plug 8 is provided with one or more slits or hole shape flow channel.
Finally illustrating, preferred embodiment above is only in order to illustrate technical scheme and unrestricted, although by above-mentioned
The present invention is described in detail by preferred embodiment, it is to be understood by those skilled in the art that can in form and
In details, it is made various change, without departing from claims of the present invention limited range.
Claims (10)
1. the motor that an accurate air-float turntable, the turntable body including housing, being located on housing and driving turntable body rotate, its
It is characterised by: also include the fixing revolution mandrel (9) connecting motor and turntable body rotating shaft (13) and be sleeved on revolution mandrel
Air bearing, described air bearing includes that axis system and gas directing system, described axis system include hollow axle I (1), set
The rotating hollow axle II (2) that is contained in hollow axle I and be respectively and fixedly connected with thrust plate (3) in the axial both sides of hollow axle II
With lower thrust plate (4), described hollow axle I is located between thrust plate and lower thrust plate, and hollow axle I and hollow axle II, on
Thrust plate and lower thrust plate matched in clearance respectively；It is set with described revolution mandrel and hollow axle II in described hollow axle II and returns
Turn mandrel interference fit；
Described gas directing system include be sleeved on outside hollow axle I guide ring (5), be arranged on hollow axle I in and with guide ring even
Logical inlet channel (6) and in being arranged on thrust plate and lower thrust plate and by hollow axle I with hollow in II, upper thrust plate
And the outlet passageway (7) that the clearance channel formed between lower thrust plate connects with inlet channel respectively.
A kind of accurate air-float turntable the most according to claim 1, it is characterised in that: thrust plate and lower thrust plate on described
Week be provided with several equally distributed fixing holes (301) upwardly along its axial direction, between the most adjacent described fixing hole
Spacing equal, be provided with chamfering at described fixing hole peritreme；It is provided with and institute upwardly along its axial direction in the week of described hollow axle II
State the fixing hole of thrust plate and lower thrust plate to match the axially extending bore (201) connected.
A kind of accurate air-float turntable the most according to claim 1, it is characterised in that: described guide ring and hollow axle I gap
Coordinating, described hollow axle I outer wall is provided with the stage coordinating installation with described guide ring, in week of described guide ring upwardly along it
Axial direction is provided with several equally distributed installing holes (503), and the most adjacent spacing between described installing hole is equal, institute
State and be provided with chamfering at installing hole peritreme.
A kind of accurate air-float turntable the most according to claim 3, it is characterised in that: it is axial that described housing is included in guide ring
Both sides are respectively arranged with upper shell (10) and lower house (11) and are arranged at the shrouding (12) bottom lower house, described turntable
The rotating disk (14) of body is positioned at the top of upper shell, described upper shell and lower house by installing hole set on screw and guide ring
Fixing connection；Be fixedly connected with electric machine stand (17) in described lower house, described electric machine stand be sleeved on revolution mandrel on and two
Being provided with stator (15) and rotor (16) between person, described stator is fixedly installed on electric machine stand inwall, and described rotor is fixed
It is connected to turn round on outside mandrel；Described motor is torque motor.
A kind of accurate air-float turntable the most according to claim 4, it is characterised in that: it is provided with in the rotating shaft of described turntable body
Circular gratings (18), described Circular gratings is positioned in air bearing on thrust plate.
A kind of accurate air-float turntable the most according to claim 1, it is characterised in that: it is provided with on the inwall of described guide ring
The annular groove (501) connected with inlet channel, is provided with a passage (502), institute in the radial direction at described guide ring
The one end stating passage is connected to bottom annular groove, and the other end is connected to external air source；Described guide ring is connect with empty by gluing
Mandrel I is airtight.
A kind of accurate air-float turntable the most according to claim 1, it is characterised in that: set in the circumference of described hollow axle I
Being equipped with several equally distributed described inlet channels, the most adjacent spacing between described inlet channel is equal, described air inlet
Passage is by the horizontal air intake duct (601) run through along hollow axle I radial direction and the longitudinal air inlet run through along hollow axle I axial direction
The orthogonal crisscrossing channels that road (602) is constituted.
A kind of accurate air-float turntable the most according to claim 1, it is characterised in that: thrust plate and lower thrust plate on described
Axial direction on be provided with several equally distributed described outlet passageways, the most adjacent spacing between described outlet passageway is equal,
Described outlet passageway includes the longitudinal gas off-take (702) run through along upper thrust plate or lower thrust plate axial direction and at upper thrust plate
Or the radial direction that lower thrust plate connected and be extending outwardly away from upper thrust plate or lower thrust plate center with longitudinal gas off-take in the radial direction goes out
Air flue (701), described longitudinal gas off-take is in alignment with the clearance channel formed between hollow axle I and hollow axle II.
A kind of accurate air-float turntable the most according to claim 7, it is characterised in that: described inlet channel is being positioned at longitudinally to enter
Two ends and the horizontal air intake duct of air flue are provided with orifice plug (8) in the one end near hollow axle II, and described orifice plug is by gluing
Connect airtight with inlet channel.
A kind of accurate air-float turntable the most according to claim 9, it is characterised in that: described orifice plug be provided with one or
Multiple slits or hole shape flow channel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201610550596.1A CN105928960A (en) | 2016-07-13 | 2016-07-13 | Precision air-bearing turntable |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610550596.1A CN105928960A (en) | 2016-07-13 | 2016-07-13 | Precision air-bearing turntable |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107179051A (en) * | 2017-06-27 | 2017-09-19 | 中国航空工业集团公司北京长城航空测控技术研究所 | A kind of big angle of visual field 3 D measuring instrument |
| CN107953117A (en) * | 2017-11-24 | 2018-04-24 | 哈工大机器人集团（哈尔滨）华粹智能装备有限公司 | A kind of large-scale heavy duty ultraprecise Horizontal hollow air-float turntable |
| CN108188417A (en) * | 2018-02-06 | 2018-06-22 | 中国计量大学 | A kind of multiple throttle type static pressure air-bearing electro spindle and its application method |
| CN112849440A (en) * | 2021-01-04 | 2021-05-28 | 哈尔滨工业大学 | Friction type automatic braking system and method for single-shaft air floatation platform |
| CN114523453A (en) * | 2022-03-15 | 2022-05-24 | 合肥御微半导体技术有限公司 | Precise air-floating rotary table |
| CN115467896A (en) * | 2022-08-04 | 2022-12-13 | 宁波亿文特自动化科技有限公司 | Turntable structure supported by air bearing |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107179051A (en) * | 2017-06-27 | 2017-09-19 | 中国航空工业集团公司北京长城航空测控技术研究所 | A kind of big angle of visual field 3 D measuring instrument |
| CN107953117A (en) * | 2017-11-24 | 2018-04-24 | 哈工大机器人集团（哈尔滨）华粹智能装备有限公司 | A kind of large-scale heavy duty ultraprecise Horizontal hollow air-float turntable |
| CN108188417A (en) * | 2018-02-06 | 2018-06-22 | 中国计量大学 | A kind of multiple throttle type static pressure air-bearing electro spindle and its application method |
| CN108188417B (en) * | 2018-02-06 | 2024-03-08 | 中国计量大学 | Multiple throttling type static pressure air floatation motorized spindle and application method thereof |
| CN112849440A (en) * | 2021-01-04 | 2021-05-28 | 哈尔滨工业大学 | Friction type automatic braking system and method for single-shaft air floatation platform |
| CN112849440B (en) * | 2021-01-04 | 2021-11-19 | 哈尔滨工业大学 | Friction type automatic braking system and method for single-shaft air floatation platform |
| CN114523453A (en) * | 2022-03-15 | 2022-05-24 | 合肥御微半导体技术有限公司 | Precise air-floating rotary table |
| CN115467896A (en) * | 2022-08-04 | 2022-12-13 | 宁波亿文特自动化科技有限公司 | Turntable structure supported by air bearing |
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Application publication date: 20160907 |