CN105928884B - Multiple gases sensor-based system and its detection method based on 2 D photon crystal - Google Patents
Multiple gases sensor-based system and its detection method based on 2 D photon crystal Download PDFInfo
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- CN105928884B CN105928884B CN201610273413.6A CN201610273413A CN105928884B CN 105928884 B CN105928884 B CN 105928884B CN 201610273413 A CN201610273413 A CN 201610273413A CN 105928884 B CN105928884 B CN 105928884B
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
Abstract
Multiple gases sensor-based system based on 2 D photon crystal, including tunable optical source, 2 D photon crystal and optical power detector；Different resonant cavity there are three being set on 2 D photon crystal；Two parallel photonic crystal waveguides are set above and below above-mentioned resonant cavity；After the light wave that tunable optical source issues imports 2 D photon crystal importing waveguide by optical fiber, it is coupled into resonant cavity, the light for meeting resonance wavelength is coupled into export photonic crystal waveguide, then exports 2 D photon crystal by optical fiber；Optical power detector is located at light wave export optical fiber end；The step of detection method are as follows: 1) light imports photonic crystal waveguide；2) input light wave is coupled into resonant cavity；3) resonance wave, export waveguide and under test gas act on, and generate RESONANCE ABSORPTION；4) Output optical power measures；The sensing unit that the present invention designs is simple, and compact is stable and reliable for performance, and detection accuracy is high.This sensor can detect the concentration of multiple gases simultaneously.
Description
Technical field
The invention belongs to gas sensor technical fields, and in particular to the multiple gases based on 2 D photon crystal sense system
System and its detection method, build sensing by optical fiber, fibre-optical tunable wave laser, photonic crystal resonant cavity and photonic crystal waveguide
System realizes the sensing measurement of the gases such as methane, carbon dioxide, hydrogen sulfide.
Background technique
Hazardous environment is the high-risk area that safety accident takes place frequently, and about gas explosion, natural gas line explosion, nitrogen oxidation is closed
The toxic and harmful gas such as object, sulfide, hydrogen sulfide cause casualties to happen occasionally with the accident of heavy economic losses.Therefore fast
Fast, sensitive, effective real-time gas detection means to prevent the generation of major accident in the production practices of the mankind have very
Important meaning.Optical detecting method is compared with other detection sides in the high-risk environments such as coal mine roadway, gas in natural gas pipeline
Formula has unique advantage.Such as: optics sensor has very high detection sensitivity, stronger resolution ratio, flexible color
Dissipate the dynamic frequency response range of characteristic and super large.
Presently, there are optics detection method in the method based on gas characteristic spectrum detection it is the most mature and answered extensively
With, but large volume of gas chamber limits the use of such sensor-based system in this detection system.The micro- resonance of photonic crystal
The features such as chamber is easily integrated since its size is extremely small, and resonance frequency is single, especially in light-wave band, traditional optical resonance
The loss of chamber is larger, quality factor value very little.And the quality factor of photon crystal micro cavity is very high, is with other any material systems
What the resonant cavity of work was unable to reach.By constructing gas chamber in 2 D photon crystal, " biography " and " sense " of light wave can be had
Effect be combined together, photonic crystal because its microstructure parameters is flexible and changeable, designability force photonic crystal sensors by
To domestic and international researcher highest attention and be widely used in various sensor-based systems.Currently invention addresses will be two-dimentional
Photonic crystal applications are in gas sensing, and then the measurement for pernicious gas in high-risk environment solves the problems, such as in Science and Technology
New thinking is provided.
Summary of the invention
To overcome above-mentioned the deficiencies in the prior art, the purpose of the present invention is to provide a variety of gas based on 2 D photon crystal
Body sensor-based system and its detection method, it is only necessary to by making photonic crystal in photonic crystal introducing resonant cavity and parallel waveguide
The variation of transmitted light light intensity, the variation by monitoring light intensity determine gas concentration, and detection accuracy is high, further by designing and manufacturing
The measurement of multiple gases may be implemented in multiple resonant cavity arrays；With simple, compact, feature stable and reliable for performance.
To achieve the above object, the technical solution that the present invention just has is: the multiple gases sensing based on 2 D photon crystal
System, including a tunable optical source, 2 D photon crystal and optical power detector；It is different there are three being set on 2 D photon crystal
Resonant cavity；Two parallel photonic crystal waveguides are set above and below above-mentioned resonant cavity；The light that tunable optical source issues
Wave imports Two-Dimensional Photonic Crystal Waveguide by optical fiber, then exports 2 D photon crystal by optical fiber；Optical power detector is located at light
Waveguide goes out the optical fiber end of 2 D photon crystal.
It is to form the direction of propagation for row's silicon column is removed in complete photonic crystal after the parallel air waveguide
Photonic crystal waveguide.
The light source is tuned laser.
The optical power detector is semiconductor light power probe.
The method for carrying out gas detection using photonic crystal multiple gases sensor-based system, comprising the following steps:
1) photonic crystal sensor unit makes, and specific practice is:
Three resonant cavities and two parallel photonic crystal waveguides are made on 2 D photon crystal, deposit silica-
Deposit silicon-photoetching-dry etching-wet etching and etc. completion；
The resonant cavity introduced in 2 D photon crystal generates perturbation to original spatial symmetry, forms different microcavitys,
Microcavity has respective resonant frequency, only allows the light wave of specific wavelength that can penetrate；
2) light wave is inputted: probing wave a length of 1.65um, 1.57um, the 1.58um selected by tuned laser, these three
Detection wavelength respectively corresponds the absorbing wavelength of methane, carbon dioxide and hydrogen sulfide gas；
3) light wave couples: the light wave that tuned laser issues is coupled by input optical fibre to first parallel photon
After crystal waveguide, a part is coupled into resonant cavity, and another part light wave is projected from parallel photonic crystal waveguide,
Light wave forms stable mode after entering resonant cavity, equally, light wave in resonant cavity will some be coupled into
It exports after being coupled in two air waveguides with output optical fibre to optical power detector；
4) Output optical power measure: when measurement environment in containing various concentration methane, carbon dioxide, hydrogen sulfide gaseous mixture
When body, the RESONANCE ABSORPTION of resonant cavity and output waveguide to the methane of various concentration, carbon dioxide, hydrogen sulfide gas in mixed gas
It is of different sizes, by measurement output light wave optical power can realize methane, carbon dioxide, sulfureted hydrogen gas concentration simultaneously
Detection.Beneficial effects of the present invention:
The present invention proposes the method that 2 D photon crystal realizes methane gas detection.The sensing unit that the present invention designs is very
Simply, compact, it is stable and reliable for performance, it is only necessary to by making photon brilliant in photonic crystal introducing resonant cavity and parallel waveguide
The transmitted light light intensity of body changes, and the variation by monitoring light intensity determines gas concentration, and detection accuracy is high, further by design and
Multiple resonant cavity arrays are manufactured, the measurement of multiple gases may be implemented.
The present invention proposes a kind of based on 2 D photon crystal resonator, waveguide, tunable laser and optical power detector
Gas sensing system, photonic crystal be by different refractivity medium be in periodic arrangement optical material.Institute of the invention this
Several photonic crystals is constituted by growing the silicon column of periodic arrangement in silicon substrate, if in this periodic structure
Defect (this defect can be a part of silicon column of removal, can also be formed by changing the size of silicon column) is introduced, can be made
A micro-resonant cavity is formed inside photonic crystal, the specific frequency of the resonant cavity and the absorption frequency of under test gas are identical.Light wave
Only the light wave of specific frequency can be stabilized after into the resonant cavity, and the light wave of other frequencies is dispersed into outside chamber, the frequency
The waveguide optically coupling to the other side of rate and spread out of.In the presence of having under test gas in resonant cavity and export waveguide, gas molecule
RESONANCE ABSORPTION will be generated to the light wave transmitted in resonant cavity and output waveguide, and then lead to output wave changed power, pass through spy
It surveys Output optical power and realizes gas detection；The present invention constitutes three with specific by introducing three defects in the photonic crystal
The resonant cavity of frequency, these three characteristic frequencies are opposite with the characteristic absorption wavelength of methane, carbon dioxide, hydrogen sulfide gas respectively
It answers.
Detailed description of the invention
Fig. 1 is photonic crystal sensor cellular construction and 2 D photon crystal light wave coupling process schematic diagram of the present invention.
Fig. 2 is the schematic diagram of 2 D photon crystal gas system of the present invention.
Specific embodiment
The present invention is described in further detail below in conjunction with the accompanying drawings.
The photonic crystal waveguide production side that the present invention is referred to using the patent document of Publication No. (CN103592720 A)
Method carries out the production that resonant cavity designed in the present invention is led with parallel air wave.
Production method are as follows:
SOI Substrate surface is cleaned, it is defeated in SOI Substrate top layer silicon surface etch using focused ion lithographic method
Enter-output end connection waveguide, coats PMMA positive photoresist in substrate surface with after the dry SOI Substrate of N2；SOI Substrate is got rid of
Substrate is placed on drying glue platform after film and is toasted, front baking processing is completed；SOI Substrate after solid glue is placed under electron beam and is exposed, is exposed
Light pattern is the 2-d plane graph comprising cavity resonator structure and air slit waveguiding structure, and the substrate after exposure is placed on
Develop in mad332 solution, the 2-d plane graph of cavity resonator structure and air slit waveguiding structure is transferred to PMMA positivity light
In photoresist, reactive ion etching is carried out using dry be then placed in SF6 plasma of N2 after development, at this time resonant cavity and air slit
The 2-d plane graph of waveguiding structure is just transferred in SOI substrate top layer silicon from PMMA positive photoresist, finally will be remaining
Photoresist washes away.
Fig. 1 show a kind of gas sensing device based on 2 D photon crystal, including a tuning source, two-dimentional light
Sub- crystal sensing unit and optical power detector.The lattice constant of photonic crystal is a, and as a kind of selection of optimization, photon is brilliant
The width of every parallel waveguide is 0.2a in body, and the diameter of airport 5 is 0.46a.The structure size of above-described embodiment is only made
For a part of the preferred solution of the invention, it can be designed and adjust as the case may be in practical applications.Narrowband tuning swashs
The light wave of 1.57um, 1.58um and 1.65um that radiant issues respectively, light wave is after importing optical fiber and photonic crystal are compound, again
Through export optical fiber output to optical power detector.When the methane of various concentration, carbon dioxide and vulcanization hydrogen mixed gas enter
In above-mentioned resonant cavity and when output waveguide, as the concentration of gas changes, the corresponding transmitted light intensity of above three characteristic wavelength
Change therewith.The light intensity of light power meter detection is corresponding with gas concentration, can be real by the optical power of measurement output light wave
The gas concentrations detection such as existing methane, carbon dioxide and hydrogen sulfide.
Multiple gases sensor-based system based on 2 D photon crystal, including a tunable optical source 1,2 and of 2 D photon crystal
Optical power detector 6；Different resonant cavity 3 there are three being set on 2 D photon crystal；It is set above and below above-mentioned resonant cavity 3
It sets 4 after two parallel air waveguides；The light wave that tunable optical source 1 issues imports 2 D photon crystal by optical fiber 7, then passes through
Optical fiber exports 2 D photon crystal；Optical power detector 6 is located at the optical fiber end of light wave export 2 D photon crystal.
It is to make direction of propagation shape for row's silicon column 5 is removed in complete photonic crystal after the parallel air waveguide
At photonic crystal waveguide.
The light source is tuned laser.
The optical power detector is semiconductor light power probe.
After the light wave that tunable optical source issues enters first parallel photonic crystal waveguide, some is coupled into
Into three resonant cavities, another part light is projected from parallel photonic crystal waveguide；Light wave is formed respectively after entering resonant cavity
Stable mode；Equally, the light wave in resonant cavity will some be coupled into another photonic crystal waveguide and export；
When in above-mentioned resonant cavity containing various concentration methane, carbon dioxide, hydrogen sulfide mixed gas when, various concentration in mixed gas
Methane, carbon dioxide, hydrogen sulfide gas it is different to the absorption of resonant cavity with the light wave in output photon crystal waveguide, pass through survey
The optical power of amount output light wave can realize methane, carbon dioxide, sulfureted hydrogen gas concentration while detect.
The method for carrying out gas detection using photonic crystal multiple gases sensor-based system, comprising the following steps:
1) photonic crystal sensor unit makes, and specific practice is:
Three resonant cavities and two parallel air waveguides are made on 2 D photon crystal, deposit silica-deposit
Silicon-photoetching-dry etching-wet etching and etc. completion；(step is the technology having disclosed)
The resonant cavity introduced in 2 D photon crystal generates perturbation to original spatial symmetry, forms different microcavitys,
Microcavity has respective resonant frequency, only allows the light wave of specific wavelength that can penetrate；
2) light wave is inputted: probing wave a length of 1.65um, 1.57um, the 1.58um selected by tuned laser, these three
Detection wavelength respectively corresponds the absorbing wavelength of methane, carbon dioxide and hydrogen sulfide gas；
3) light wave couples: the light wave that tuned laser issues is coupled by input optical fibre to first parallel photon
After crystal waveguide, a part is coupled into resonant cavity, and another part light wave is projected from parallel photonic crystal waveguide,
Light wave forms stable mode after entering resonant cavity, equally, light wave in resonant cavity will some be coupled into
It exports after being coupled in two air waveguides with output optical fibre to optical power detector；
4) Output optical power measures: the mixed gas in resonant cavity containing various concentration methane, carbon dioxide, hydrogen sulfide
When, methane, carbon dioxide, the hydrogen sulfide gas of various concentration are total to the light wave in resonant cavity and output waveguide in mixed gas
Vibration absorbs difference, and the absorption of light wave is of different sizes, can realize methane, titanium dioxide by the optical power of measurement output light wave
Carbon, sulfureted hydrogen gas concentration detect simultaneously.
Claims (1)
1. the method for carrying out gas detection using photonic crystal multiple gases sensor-based system, which comprises the following steps:
1) photonic crystal sensor unit makes, and specific practice is:
Three resonant cavities and two parallel photonic crystal waveguides are made on 2 D photon crystal, deposit silica-deposit
Silicon-photoetching-dry etching-wet etching step is completed；
The resonant cavity introduced in 2 D photon crystal generates perturbation to original spatial symmetry, forms different microcavitys, microcavity
There is respective resonant frequency, only allows the light wave of specific wavelength that can penetrate；
2) light wave is inputted: probing wave a length of 1.65um, 1.57um, the 1.58um selected by tuned laser, these three detections
Wavelength respectively corresponds the absorbing wavelength of methane, carbon dioxide and hydrogen sulfide gas；
3) light wave couples: the light wave that tuned laser issues is coupled by input optical fibre to first parallel photonic crystal
After waveguide, a part is coupled into resonant cavity, and another part light wave is projected from parallel photonic crystal waveguide, light wave
Form stable mode after entering resonant cavity, equally, light wave in resonant cavity will some be coupled into Article 2
It exports after being coupled in air waveguide with output optical fibre to optical power detector；
4) Output optical power measures: when the mixed gas containing various concentration methane, carbon dioxide, hydrogen sulfide in measurement environment
When, resonant cavity and output waveguide are to the RESONANCE ABSORPTION of the methane of various concentration, carbon dioxide, hydrogen sulfide gas in mixed gas
It is of different sizes, methane, carbon dioxide, sulfureted hydrogen gas concentration can be realized by the optical power of measurement output light wave while being examined
It surveys.
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