CN105928625A - Metal surface dynamic temperature point measurement system based on reflectivity change and method - Google Patents
Metal surface dynamic temperature point measurement system based on reflectivity change and method Download PDFInfo
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- CN105928625A CN105928625A CN201610442219.6A CN201610442219A CN105928625A CN 105928625 A CN105928625 A CN 105928625A CN 201610442219 A CN201610442219 A CN 201610442219A CN 105928625 A CN105928625 A CN 105928625A
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- 229910052751 metal Inorganic materials 0.000 title claims abstract description 57
- 239000002184 metal Substances 0.000 title claims abstract description 57
- 230000008859 change Effects 0.000 title claims abstract description 24
- 238000000034 method Methods 0.000 title claims abstract description 19
- 238000005259 measurement Methods 0.000 title claims abstract description 13
- 238000002310 reflectometry Methods 0.000 title abstract description 3
- 239000000463 material Substances 0.000 claims abstract description 62
- 238000010438 heat treatment Methods 0.000 claims abstract description 20
- 238000006243 chemical reaction Methods 0.000 claims abstract description 14
- 230000000694 effects Effects 0.000 claims abstract description 14
- 239000007769 metal material Substances 0.000 claims abstract description 14
- 238000012360 testing method Methods 0.000 claims abstract description 11
- 239000000523 sample Substances 0.000 claims description 27
- 239000012528 membrane Substances 0.000 claims description 16
- 239000006101 laboratory sample Substances 0.000 claims description 15
- 230000005693 optoelectronics Effects 0.000 claims description 12
- 238000001514 detection method Methods 0.000 claims description 9
- 239000007924 injection Substances 0.000 claims description 4
- 238000002347 injection Methods 0.000 claims description 4
- 238000007747 plating Methods 0.000 claims description 4
- 238000005507 spraying Methods 0.000 claims description 4
- 238000002474 experimental method Methods 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims description 3
- 230000001360 synchronised effect Effects 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- 230000008020 evaporation Effects 0.000 claims description 2
- 238000004093 laser heating Methods 0.000 claims description 2
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 2
- 230000008569 process Effects 0.000 abstract description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract description 7
- 229910052802 copper Inorganic materials 0.000 abstract description 7
- 239000010949 copper Substances 0.000 abstract description 7
- 238000012545 processing Methods 0.000 abstract description 7
- 238000004140 cleaning Methods 0.000 abstract description 4
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 238000003698 laser cutting Methods 0.000 abstract 1
- 238000005457 optimization Methods 0.000 abstract 1
- 230000001678 irradiating effect Effects 0.000 description 9
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 8
- 239000010931 gold Substances 0.000 description 8
- 229910052737 gold Inorganic materials 0.000 description 8
- 229910000838 Al alloy Inorganic materials 0.000 description 6
- 238000003466 welding Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 230000035900 sweating Effects 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 238000011088 calibration curve Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000009529 body temperature measurement Methods 0.000 description 2
- 238000000205 computational method Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 230000001052 transient effect Effects 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000002372 labelling Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000002277 temperature effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0896—Optical arrangements using a light source, e.g. for illuminating a surface
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention discloses a metal surface dynamic temperature point measurement system based on reflectivity change and a method. The system comprises a heating light source which is connected with a metal sample. A metal film material is plated on the metal sample. The metal sample is arranged on the path of a heating laser beam emitted from the heating light source. The metal sample is connected with a reflection light intensity change test system which is connected with a photoelectric conversion trigger. The system can acquire the dynamic temperature data of the surface of commonly used metal materials, such as aluminum, copper and the like, wherein the metal materials cannot be welded with a thermocouple due to a high thermal conductivity property. The laser irradiation thermal effect of the metal materials is analyzed and evaluated. A basis is provided for laser parameter optimization in the laser processing processes of laser cutting, laser cleaning and the like. The laser energy utilization efficiency is improved. The processing cost is reduced, and other economic benefits are acquired.
Description
Technical field
The invention belongs to the measurement system of optical field, be specifically related to a kind of metal surface dynamic temperature point based on reflectance change and measure system and method.
Background technology
Laser has purposes and wide expansion prospect widely, such as laser welding, laser cleaning, cut etc. at military, civil area.The heat effect that laser irradiation metal material produces is the one in all manifold effects of Reciprocity of Laser & Materials, and temperature, as characterization parameter important in heat effect, is the parameter needing in material laser irradiation effect and study mechanism primarily to measure.Therefore, state, the inside and outside foundation the most all taking much count of metal material surface dynamic temperature measurement System and method for and improvement, to meet the demand of associated laser technology application.
At present, home and abroad is for the measurement of temperature effects parameter in Reciprocity of Laser & Materials research, how to use device or the equipment such as thermocouple, thermal infrared imager and radiant-energy thermometer.Aluminium alloy, copper etc. are as more conventional metal material, due to the thermophysical property that its thermal conductivity is big, thermocouple cannot be stabilized in material non-Stimulated Light irradiating surface by existing thermocouple welding mode (electric discharge welding, laser welding, argon arc welding etc.), implements to measure.Need to be stabilized in measurement position to the measurement of material temperature furthermore with thermocouple, there is certain bulk requirement, utilize thermocouple to carry out temperature survey simultaneously, probe reaches hygral equilibrium need the regular hour with measuring point so that it cannot preferably obtain such as material transient temperature change histories in the range of nanosecond time scales.The thermal infrared imager measurement to temperature, needing premised on the emissivity knowing material exactly, have certain limitation, Product-level thermal infrared imager is relatively slow at measurement response time simultaneously, it mostly is a millisecond magnitude, it is impossible to meet higher than the transient temperature measuring under millisecond magnitude time scale scope；Product-level thermal infrared imager response time is the fastest simultaneously, and instrument price is the most expensive.Radiant-energy thermometer can preferably be used in the temperature range of more than 2000K, but cannot realize accurately measuring for this temperature range of room temperature to 1000K.
Summary of the invention
For obtaining in laser irradiation process, have high heat conductance, cause cannot the dynamic temperature data of the sweating heat galvanic couple such as metal material such as aluminium alloy, copper non-Stimulated Light irradiating surface focus, the invention provides metal surface dynamic temperature point based on reflectance change and measure system and method.
The present invention is achieved through the following technical solutions:
Metal surface dynamic temperature point based on reflectance change measures system, including heated light sources, described heated light sources connects metal sample, light beam is that transmitting effect forms connection on experimental test target sample, metal-plated membrane layer material on metal sample, on the path of the heating laser bundle that metal sample is arranged on heated light sources injection, metal sample connects has reflective light intensity to change test system, and reflective light intensity change test system connects opto-electronic conversion trigger.For obtaining in laser irradiation process, aluminium alloy, copper etc. have high heat conductance characteristic, cause the dynamic temperature data that cannot weld thermocouple material non-Stimulated Light irradiating surface focus, realize the accurate evaluation of material laser irradiation heat effect, and then reduce Laser Processing cost and improve efficiency of energy utilization, need the measurement system of a kind of metal material surface dynamic temperature change badly, assess with heat effect for preferably disclosing material laser irradiation effect mechanism.At present, from the point of view of the document of the openest report, there is not yet the technology solving the problems referred to above.By the metallic diaphragm material of spraying plating mirror status after one of them surface finish of metal laboratory sample to be measured, for in metal laboratory sample laser action process to be measured, the reflective light intensity delta data that metallic diaphragm material varies with temperature is provided, this programme is while laser irradiation metal sample, synchro measure is illuminated on metal sample non-laser irradiating surface the reflective light intensity of metal-plated membrane layer material to obtain reflectance delta data, by mirror status metallic diaphragm material reflectance and Temperature Scaling data unique corresponding relation, obtain the dynamic temperature data being illuminated metal sample in laser irradiation process, and make the data accuracy obtained high.
Reflective light intensity change test system includes exploring laser light bundle, integrating sphere, photodetector and data acquiring and recording memory, the path of exploring laser light bundle is provided with beam splitter, photodetector is arranged on integrating sphere outer wall, and photodetector is connected with data acquiring and recording memory, data acquiring and recording memory is connected with opto-electronic conversion trigger；It is hundred micron dimensions that exploring laser light bundle acts on the beam size of metallic diaphragm material surface, is considered as a measurement；Exploring laser light bundle acts perpendicularly to metallic diaphragm material surface after beam splitter and is directed in integrating sphere, and the light intensity of its reflection light beam is changed to vertical angle state.Integrating sphere is the collection device of reflective light intensity change, photodetector is the measurement device of reflective light intensity change, it is arranged on integrating sphere detection mouth, while the variable signal that the photodetector being arranged on integrating sphere detection mouth starts to measure metallic diaphragm material reflective light intensity, data acquiring and recording memory synchronous acquisition and record variable signal data.Above-mentioned parts are all existing matured products, it is possible to be the most directly commercially available.
It is provided with spectroscope on the path of the heating laser bundle of heated light sources injection, by spectroscope, light beam is guided to the surface and opto-electronic conversion trigger of metal sample non-metal-plated membrane layer material.Heating laser bundle output action is while metal sample material surface, and heating laser bundle triggers opto-electronic conversion trigger, causes the photodetector being arranged on integrating sphere detection mouth to start the variable signal of synchro measure metallic diaphragm material reflective light intensity.Metallic diaphragm material reflection light variable signal can be realized synchro measure by opto-electronic conversion trigger, and spectroscope is existing matured product, it is possible to be the most directly commercially available.
This programme associative multiplication bulb separation measures reflectance, by the metallic diaphragm material of spraying plating mirror status after one of them surface finish of metal laboratory sample to be measured, for in metal laboratory sample laser action process to be measured, the reflective light intensity delta data that metallic diaphragm material varies with temperature is provided, this programme is while laser irradiation metal sample, synchro measure is illuminated on metal sample non-laser irradiating surface the reflective light intensity of metal-plated membrane layer material to obtain reflectance delta data, by mirror status metallic diaphragm material reflectance and Temperature Scaling data unique corresponding relation, obtain the dynamic temperature data being illuminated metal sample in laser irradiation process, and make the data accuracy obtained high.
The present invention is compared with prior art, have such advantages as and beneficial effect: native system can obtain have high heat conductance characteristic, cause cannot sweating heat galvanic couple such as the dynamic temperature data of the common metal material surface such as aluminium alloy, copper, realize analysis and the assessment of metal material laser irradiation heat effect, there is provided foundation for the laser processing procedure such as cut, laser cleaning optimizes laser parameter, reach to improve laser energy utilizing rate, reduce the economic interests such as processing cost.
Accompanying drawing explanation
Accompanying drawing described herein is used for providing being further appreciated by the embodiment of the present invention, constitutes the part of the application, is not intended that the restriction to the embodiment of the present invention.In the accompanying drawings:
Fig. 1 is present configuration schematic diagram；
Gold membrane material reflectance and the calibration relation figure of temperature when Fig. 2 is probing wave a length of 488nm.
The parts title of labelling and correspondence in accompanying drawing:
1-heating laser bundle, 2-spectroscope, 3-metal sample, 4-metallic diaphragm material, 5-beam splitter, 6-exploring laser light bundle, 7-integrating sphere, 8-photodetector, 9-data acquiring and recording memory, 10-opto-electronic conversion trigger, 11-guides light.
Detailed description of the invention
For making the object, technical solutions and advantages of the present invention clearer, below in conjunction with embodiment and accompanying drawing, the present invention is described in further detail, and the exemplary embodiment of the present invention and explanation thereof are only used for explaining the present invention, not as a limitation of the invention.
Embodiment:
As shown in Figure 1, one of them surface optical of the metal sample 3 of heating laser bundle irradiation is polished, the mode utilizing evaporation or magnetron sputtering forms metal laboratory sample to be measured at the metallic diaphragm material 4 of this surface spraying plating micron dimension thickness, and the present embodiment uses gold as metallic diaphragm material 4.Before metal laboratory sample to be measured is heated laser beam 1 effect, exploring laser light bundle 6 is coated with by beam splitter 5 perpendicular acting to metal laboratory sample to be measured the focus of golden membranous layer material surface, beam diameter is hundred micron dimensions, and its reflection light is directed in integrating sphere 7 again by beam splitter 5；Photodetector 8 is connected with data acquiring and recording memory 9 so that it is be in state to be measured.
Utilize and guide light 11 by heating laser bundle 1 by spectroscope 2 beam splitting, it is achieved a branch of be directed to metal laboratory sample to be measured and be not coated with the surface of golden membranous layer material；Another bundle is directed to opto-electronic conversion trigger 10, when making heating laser bundle 1 irradiation metal to be measured laboratory sample, golden membranous layer material reflection light variable signal can be arranged on the photodetector 8 of integrating sphere detection mouth simultaneously and measure, and synchronization is gathered by data acquiring and recording memory 9, record.
When experiment is measured, open heated light sources output heating laser bundle 1, while heating laser bundle 1 adds Thermal test gold, opto-electronic conversion trigger 10 is heated laser beam 1 and acts on, quickly form electricity and trigger signal, make to be arranged on the photodetector 8 synchro measure golden membranous layer material reflective light intensity variable signal of integrating sphere detection mouth, and data acquiring and recording memory 9 synchronous acquisition with record golden membranous layer material reflective light intensity delta data, the coefficient of correlation formed with corresponding reflective light intensity voltage data by the known initial reflectance of golden membranous layer material, during metal sample LASER HEATING can be calculated, it is coated with the reflectance delta data of golden membranous layer material.Calibration corresponding relation one by one based on gold membrane material reflectance with temperature, as shown in Figure 2, can be gold membrane material golden film reflectance vary with temperature calibration curve, detection light beam wavelength 488nm, the temperature variation data of available golden membranous layer material, owing to golden membranous layer material is micron dimension, this temperature-visualized is in laser irradiation process, the dynamic temperature data of metal laboratory sample non-Stimulated Light irradiating surface focus.Other wavelength can also be used to be used as detecting light beam, and different metal has the reflectance of correspondence irradiating, and by utilizing this programme to obtain corresponding reflectivity values, searches corresponding calibration curve, so that it may obtain the temperature variation data of golden membranous layer material.
nullUtilize integrating sphere to measure reflectance and computational methods itself are conventional means，The report utilizing the method to obtain reflectance is had at open source literature，So integrating sphere not being discussed in detail in this programme measure reflectance and computational methods thereof，But existing measurement technology but cannot obtain having high heat conductance、Causing cannot sweating heat galvanic couple such as aluminium alloy、The dynamic temperature data of the metal materials such as copper non-Stimulated Light irradiating surface focus，And this programme is by while laser irradiation metal sample，Synchro measure is illuminated the reflective light intensity being coated with golden membranous layer material on metal sample non-laser irradiating surface to obtain reflectance delta data，By mirror status golden membranous layer material reflectance and Temperature Scaling data unique corresponding relation，Obtain the dynamic temperature data being illuminated gold sample in laser irradiation process，And make the data accuracy obtained high.Its temperature is to utilize the unique corresponding relation having grasped golden membrane material reflectance with Temperature Scaling, is obtained by one-to-one relationship.Or the unique corresponding relation having grasped golden membrane material reflectance and Temperature Scaling can fit to the expression formula of temperature and reflectance, as shown in Figure 2, can be gold membrane material golden film reflectance vary with temperature calibration curve, detection light beam wavelength 488nm, the temperature variation data of available golden membranous layer material, temperature measurement range is relevant with the range of temperature of material reflectance change in gold membrane material reflectance and the scope of vs. temperature and test experiments, therefore without the restriction numerical value of temperature range.
Can accurately be obtained by the present invention have high heat conductance characteristic, cause cannot sweating heat galvanic couple such as the dynamic temperature data of the common metal material surface such as aluminium alloy, copper, realize analysis and the assessment of metal material laser irradiation heat effect, there is provided foundation for the laser processing procedure such as cut, laser cleaning optimizes laser parameter, reach to improve laser energy utilizing rate, reduce the economic interests such as processing cost.
Above-described detailed description of the invention; the purpose of the present invention, technical scheme and beneficial effect are further described; it is it should be understood that; the foregoing is only the detailed description of the invention of the present invention; the protection domain being not intended to limit the present invention; all within the spirit and principles in the present invention, any modification, equivalent substitution and improvement etc. done, should be included within the scope of the present invention.
Claims (6)
1. metal surface dynamic temperature point based on reflectance change measures system, it is characterized in that, including heated light sources, described heated light sources connects metal sample (3), the upper metal-plated membrane layer material (4) of metal sample (3), on the path of the heating laser bundle (1) that metal sample (3) is arranged on heated light sources injection, metal sample (3) connects has reflective light intensity to change test system, and reflective light intensity change test system connects opto-electronic conversion trigger (10).
Metal surface dynamic temperature point based on reflectance change the most according to claim 1 measures system, it is characterized in that, described reflective light intensity change test system includes exploring laser light bundle (6), integrating sphere (7), photodetector (8) and data acquiring and recording memory (9), the path of exploring laser light bundle (6) is provided with beam splitter (5), photodetector (8) is arranged on integrating sphere (7) outer wall, and photodetector (8) is connected with data acquiring and recording memory (9), data acquiring and recording memory (9) is connected with opto-electronic conversion trigger (10).
Metal surface dynamic temperature point based on reflectance change the most according to claim 1 measures system, it is characterized in that, it is provided with spectroscope (2) on the path of the heating laser bundle (1) of described heated light sources injection, by spectroscope (2), light beam is guided to the surface and opto-electronic conversion trigger (10) of metal sample (3) non-metal-plated membrane layer material (4).
Metal surface dynamic temperature point based on reflectance change the most according to claim 2 measures system, it is characterised in that the beam size that described exploring laser light bundle (6) acts on metallic diaphragm material (4) surface is hundred micron dimensions, is considered as a measurement.
Metal surface dynamic temperature point based on reflectance change the most according to claim 2 measures system, it is characterized in that, described exploring laser light bundle (6) acts perpendicularly to metallic diaphragm material (4) surface after beam splitter (5) and is directed in integrating sphere (7), and the light intensity of its reflection light beam is changed to vertical angle state.
6. metal surface dynamic temperature point measuring method based on reflectance change, it is characterised in that comprise the following steps:
(1) one of them surface optical of the metal sample (3) of heating laser bundle irradiation is polished, utilize the mode of evaporation or magnetron sputtering at the metallic diaphragm material (4) of this surface spraying plating micron dimension thickness, form metal laboratory sample to be measured；
(2) before metal laboratory sample to be measured is heated laser beam (1) effect, by the exploring laser light bundle (6) focus by beam splitter (5) perpendicular acting to metal laboratory sample metal-plated membrane layer material surface to be measured, beam diameter is hundred micron dimensions, and its reflection light is directed in integrating sphere (7) again by beam splitter (5)；Photodetector (8) is connected with data acquiring and recording memory (9) so that it is be in state to be measured；
(3) utilize guiding light (11) by heating laser bundle (1) by spectroscope (2) beam splitting, it is achieved a branch of surface being directed to metal laboratory sample to be measured non-metal-plated membrane layer material；Another bundle is directed to opto-electronic conversion trigger (10), when making heating laser bundle (1) irradiation metal to be measured laboratory sample, metallic diaphragm material reflection light variable signal can be arranged on the photodetector (8) of integrating sphere detection mouth simultaneously and measure, and synchronizes by the collection of data acquiring and recording memory, record；
(4) when experiment is measured, open heated light sources output heating laser bundle (1), while heating laser bundle (1) adds Thermal test metal material, opto-electronic conversion trigger (10) heated laser beam (1) effect, quickly form electricity and trigger signal, make to be arranged on photodetector (8) the synchro measure metallic diaphragm material reflective light intensity variable signal of integrating sphere detection mouth, and data acquiring and recording memory (9) synchronous acquisition with record metallic diaphragm material (4) reflective light intensity delta data, the coefficient of correlation formed with corresponding reflective light intensity voltage data by metallic diaphragm material (4) known initial reflectance, during calculating metal sample LASER HEATING, the reflectance delta data of metal-plated membrane layer material.
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| CN110686810A (en) * | 2018-07-05 | 2020-01-14 | 南开大学 | Online monitoring method for laser cleaning |
| CN113640340A (en) * | 2021-07-21 | 2021-11-12 | 中国科学院上海光学精密机械研究所 | Method for measuring thermal diffusivity and specific heat of solid and verifying result |
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| CN105928625B (en) | 2023-04-07 |
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