CN105928606B - A kind of surface acoustic wave interference of light scanning probe system - Google Patents
A kind of surface acoustic wave interference of light scanning probe system Download PDFInfo
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- CN105928606B CN105928606B CN201610548397.7A CN201610548397A CN105928606B CN 105928606 B CN105928606 B CN 105928606B CN 201610548397 A CN201610548397 A CN 201610548397A CN 105928606 B CN105928606 B CN 105928606B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
- G01H9/002—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means for representing acoustic field distribution
Abstract
The present invention provides a kind of surface acoustic wave interference of light scanning probe systems, including signal generator, power amplifier, displacement platform, heterodyne detection laser interferometer, low-noise amplifier, oscillograph and computer.The pumping signal that wherein signal generator generates acts on after power amplifier amplifies and generates surface acoustic wave on sample；The measurement arm laser irradiation that heterodyne detection laser interferometer issues returns to be superimposed with reference arm laser coherence in sample surfaces generates interference signal, and the interference signal detected real-time display on oscillograph after low-noise amplifier amplifies goes out corresponding waveform；Oscillograph and displacement platform and computer interconnection, computer control scan path and extract the amplitude and phase information of interference signal waveform.Present invention incorporates heterodyne laser detection and two-dimensional surface scanning, may be implemented to carry out accurate scan to the tiny area on miniature SAW device surface, resolving accuracy reaches 1 micron, realizes the overall area of scanning up to 10 millimeters * 10 millimeters.
Description
Technical field
The present invention relates to a kind of heterodyne lasers to detect interferometer, in particular to a kind of surface acoustic wave interference of light scanning probe system
System.
Background technique
In surface acoustic wave research field, detects and be very important the characteristics of determining small amplitude surface vibration.For MHz
The application of frequencies above, typical maximum amplitude is probably in several nanometer scales.In this case, the disturbance of environment is to equipment
The influence highly significant of measurement accuracy, non-contacting measurement method are particularly important.Laser interferometer provides non-contacting
Measuring method can be used to detect this surface vibration, and one of easy method is exactly to use homodyne Michelson dry
Interferometer, it includes measurement arm and reference arm, and the sample of surface vibration is placed on measurement arm path.Surface vibration causes to measure
Optical path difference on arm changes, and variation is correspondingly generated with the phase difference of reference arm, and such laser interferometer turns phase difference
Become the superimposed Strength Changes of light beam in two-arm, final light intensity signal is received by optical detector.In this way in the light received
It establishes by force and contacts between surface amplitudes.The interference term of light intensity is by formula (1) expression, I1And I2Respectively reference arm and measurement arm
Light intensity, A be surface vibration amplitude, fSAWFor the frequency of surface vibration, λ is the wavelength of laser,It is environmental factor in two beams
Slow phase change caused by before light.
Another method is exactly to use heterodyne detection laser interferometer, and the light that laser source issues is divided into two through spectroscope
Beam makes reference arm and the frequency of certain light beam in measurement arm original frequency f occur small frequency displacement f laterm(fm<<f)
Become f+fm.Measurement arm finally interferes effect with the light of reference arm by sample surfaces reflection, obtains the interference term of light intensity
Are as follows:
In heterodyne detection, slow phase change caused by environmental factorAs just one in total phase change
Point, therefore this measurement method is i.e. detectable on common working face (being not necessarily to high-precision optical platform), and almost
It is not risen and fallen by the coarse of sample surfaces, step, reflectivity fluctuating is influenced.
Business equipment can be to the upper frequency limit that sample surfaces vibration information measures mostly at several megahertzs hereinafter, difficult at present
It is effectively measured, therefore is restricted with the Vibration Condition to higher frequency.
Summary of the invention
It is analyzed for above state of the art, it is contemplated that unavoidably there is noise jamming in laboratory environment,
The present invention proposes a kind of surface acoustic wave interference of light scanning probe system that heterodyne laser detection is combined with surface sweeping platform, to obtain
The field distribution information of tiny sampler two-dimensional surface.
In order to realize the purpose of above-mentioned acquisition sample surfaces field distribution information, the technical solution adopted by the present invention are as follows:
A kind of surface acoustic wave interference of light scanning probe system, including it is signal generator, power amplifier, displacement platform, outer
Poor exploring laser light interferometer, low-noise amplifier, oscillograph and computer, the pumping signal that signal generator generates are put through power
After big device amplification, the surface for acting on the sample on displacement platform generates surface acoustic wave, heterodyne detection laser interferometer
It measures arm laser irradiation to return in the sample surfaces through reflection, is superimposed with reference arm laser coherence and generates interference signal, detection
To interference signal corresponding waveform is shown on oscillograph after low-noise amplifier amplifies；The oscillograph and displacement are flat
Platform is connect with computer respectively, and scan path is controlled by computer and extracts the amplitude and phase letter of interference signal waveform
Breath；The computer carries out the surface acoustic wave field distribution information that processing obtains sample to information data.
Surface acoustic wave interference of light scanning probe system of the invention combines heterodyne laser detection and two-dimensional surface scanning,
In, heterodyne laser detects the complete surface acoustic wave vibration information of available sample surfaces a single point, while not needing high-precision
The optical platform of degree and to ambient noise have very strong immunocompetence, can satisfy the use in laboratory in most cases；It is logical
It crosses and interferometer detection spot diameter is focused on 10 μm, while cooperating the photodetector using highly sensitive and fast-response speed
The look-in frequency upper limit to sample surfaces vibration information can be increased to 100MHz.In conjunction with precision displacement platform (minimum step
0.1 μm) two-dimensional surface scanning, may be implemented to carry out accurate scan to the tiny area on miniature SAW device surface,
Resolving accuracy reaches 1 micron, realizes the overall area of scanning up to 10 millimeters * 10 millimeters.Meanwhile oscillograph real-time display can be passed through
The interference signal of each point, and carry out data to extract including coordinate, phase using vibration information of the labview program to each point
And amplitude, final that the field distribution information that Data Post obtains scanning area is carried out using matlab, this method is easy to be reliable.
Detailed description of the invention
Fig. 1 is surface acoustic wave interference of light scanning probe system schematic of the invention；
Fig. 2 is the inside optical path signal of heterodyne laser interferometer in surface acoustic wave interference of light scanning probe system of the invention
Figure；
Fig. 3 is that process schematic is realized in two-dimensional surface scanning of the invention；
Fig. 4 is (a) phase and (b) amplitude distribution figure for the scanning area that system of the invention measures；
Fig. 5 is the field pattern for the scanning area that system of the invention measures.
Specific embodiment
Scanning platform and oscillograph and computer interconnection, and scanning area and scanning essence are set using labview program
It spends (step-length).The interference signal waveform of each point in oscillograph real-time display scanning area, each point of labview Program extraction
Coordinate, phase and amplitude information.In the information deposit file of acquisition, Data Post finally is carried out using matlab and obtains field point
Butut.
As shown in Figure 1, surface acoustic wave interference of light scanning probe system of the invention, including signal generator, power amplification
Device, displacement platform, heterodyne detection laser interferometer, low-noise amplifier, oscillograph and computer.Wherein signal generator generates
Pumping signal after power amplifier amplifies, act on and generate surface acoustic wave on sample.Heterodyne detection laser interferometer issues
The laser irradiation for measuring arm returns to be superimposed with reference arm laser coherence in sample surfaces generates interference signal, the interference letter detected
Number corresponding waveform is shown on oscillograph after low-noise amplifier amplifies.Oscillograph and displacement platform and computer join
Machine, and control scan path using labview program and extract the amplitude and phase information of interference signal waveform.
In the present embodiment, signal generator is the AFG3252C dual-channel type of Tektronix company production, bandwidth
240MHz, for exciting radiofrequency signal.Power amplifier uses the MWPA-000500M04 of microwave electron net, maximum input radio frequency
Signal power is 10dBm, and gain 36dB, peak power output 4W are placed in signal generator rear end, is driven for amplifying surface acoustic wave
Dynamic power.Displacement platform is made of the M405-CG piezoelectric scanning platform of Liang Kuai PI Corp., and two pieces of platforms are overlapping up and down to be placed.It is logical
Crossing PI Corp.'s C-843 board may be implemented driving to two block scan platforms, i.e. realization two-dimensional scanning.Wherein M405-CG piezoelectricity
Scanning platform maximum moving range 50mm, 0.1 μm of minimum step, maximum movement speed 0.7mm/s.Oscillograph is LeCroy company
Wavepro 725Zi, be used to real-time display interference signal waveform.Low-noise amplifier is produced by Mini Circuits company,
Model ZFL-1000+, gain 17dB, for amplifying the interference signal of interferometer output.
Heterodyne detection laser interferometer, which is used to realize, during the scanning process measures each point, obtains each point
Vibration information.Fig. 2 show the inside optical path of the present embodiment heterodyne laser interferometer, including 532nm laser (300mW), three
A half-wave plate, three polarization spectroscopes, two reflecting mirrors, two quarter wave plates, condenser lens, photorefractive crystal and detector.Swash
The light that light device issues is divided into transmitted light and reflected light after half-wave plate and polarization spectroscope, and wherein transmitted light (measurement arm) is successively
It is returned after reflection by reflecting mirror, polarization spectroscope, quarter wave plate and lens entrance to sample surfaces.Reflected light (reference arm)
By after half-wave plate and reflecting mirror with photorefractive crystal that phase grating is incident on through the reflected transmitted light of sample surfaces
On, coherent superposition occurs later, by the light intensity after photodetector detection interference.Spot diameter is focused on 10 μm simultaneously, and
The measurement upper limit can be made to reach with the use of highly sensitive and fast-response speed HCA-S-200M-SI type photodetector
100MHz。
Fig. 3 show two-dimensional surface scanning of the invention and realizes process schematic.Surface acoustic wave is excited on the left side, is incident on
The plane domain on right side, heterodyne laser interferometer detect the vibration information of each point, and displacement platform carries out two with certain precision
Dimensional plane is mobile, thus the Vibration Condition in available surface region.Right figure represents in scanning process to sample surfaces spy
The vibration information that one-point measurement is arrived can use the vibration information of these points measured to draw sample surfaces field pattern.
Fig. 4 show the Vibration Condition data using the labview measured zone extracted, and obtains after matlab is handled
73MHz pumping signal under surface acoustic wave phase (a figure) and amplitude (b figure) distribution map.
Fig. 5 show the field pattern that the amplitude of each point corresponding with Fig. 4 is obtained multiplied by the cosine of phase, can observe
To apparent plane wave form.
Claims (4)
1. a kind of surface acoustic wave interference of light scanning probe system, including signal generator, power amplifier, displacement platform, heterodyne
Exploring laser light interferometer, low-noise amplifier, oscillograph and computer, which is characterized in that the excitation letter that signal generator generates
Number after power amplifier amplifies, the surface for acting on the sample on displacement platform generates surface acoustic wave, and heterodyne detection swashs
The measurement arm laser irradiation of optical interferometer is returned in the sample surfaces through reflection, and generation interference is superimposed with reference arm laser coherence
Signal, the interference signal detected show corresponding waveform after low-noise amplifier amplifies on oscillograph；The oscillography
Device and displacement platform are connect with computer respectively, and scan path is controlled by computer and extracts the amplitude of interference signal waveform
With phase information；The computer carries out the surface acoustic wave field distribution information that processing obtains sample to information data；The displacement
Platform is made of about the two pieces overlapping scanning platforms placed, and the computer drives two block scan platforms by board
It is dynamic, realize two-dimensional scanning；The heterodyne detection laser interferometer includes laser, three half-wave plates, three polarization spectroscopes, two
A reflecting mirror, two quarter wave plates, condenser lens, photorefractive crystal and detector；The light that laser issues passes through the first half-wave plate
Be divided into transmitted light and reflected light after the first polarization spectroscope, wherein transmitted light successively pass through the first reflecting mirror, second polarization point
Light microscopic, the first quarter wave plate and condenser lens are incident on sample surfaces and return after reflection, and the light beam of return passes through the second half-wave plate
It is incident on photorefractive crystal, occurs relevant folded together with light beam after passing through third half-wave plate and the second reflecting mirror with reflected light afterwards
Add generation interference signal, interference signal is after the second quarter wave plate and third polarization spectroscope are by photodetector detection interference
Light intensity.
2. a kind of surface acoustic wave interference of light scanning probe system according to claim 1, which is characterized in that the Preset grating
Crystal uses phase grating.
3. a kind of surface acoustic wave interference of light scanning probe system according to claim 1 or 2, which is characterized in that the letter
Number generator is AFG3252C dual-channel type, bandwidth 240MHz.
4. a kind of surface acoustic wave interference of light scanning probe system according to claim 1 or 2, which is characterized in that the meter
Calculation machine carries out data extraction using vibration information of the labview program to point each on sample, and the data of extraction include coordinate, phase
Position and amplitude, it is final that the field distribution information that Data Post obtains scanning area is carried out using matlab software.
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| CN109341840A (en) * | 2018-10-10 | 2019-02-15 | 南开大学 | A kind of Visual retrieval device of surface acoustic wave and application |
| CN110376596B (en) * | 2019-07-18 | 2021-05-18 | 华中科技大学 | Object surface three-dimensional coordinate measuring system and measuring method |
| CN114112009A (en) * | 2021-10-25 | 2022-03-01 | 南京大学 | Acoustic wave excitation device, detection system and field distribution measurement method for non-piezoelectric material |
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| CN101710154A (en) * | 2009-12-23 | 2010-05-19 | 哈尔滨工业大学 | Liquid surface wave detecting method and device based on scattering laser Doppler effect |
| CN201622111U (en) * | 2010-03-15 | 2010-11-03 | 中国计量科学研究院 | Low-noise heterodyne laser interferometer for measuring vibration |
| CN103900681A (en) * | 2014-04-09 | 2014-07-02 | 西安电子科技大学 | Scanning laser vibration measurement system |
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| US7557929B2 (en) * | 2001-12-18 | 2009-07-07 | Massachusetts Institute Of Technology | Systems and methods for phase measurements |
| DE102011100252A1 (en) * | 2011-05-03 | 2012-11-08 | Polytec Gmbh | Method and device for optical, non-contact vibration measurement of a vibrating object |
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|---|---|---|---|---|
| CN101710154A (en) * | 2009-12-23 | 2010-05-19 | 哈尔滨工业大学 | Liquid surface wave detecting method and device based on scattering laser Doppler effect |
| CN201622111U (en) * | 2010-03-15 | 2010-11-03 | 中国计量科学研究院 | Low-noise heterodyne laser interferometer for measuring vibration |
| CN103900681A (en) * | 2014-04-09 | 2014-07-02 | 西安电子科技大学 | Scanning laser vibration measurement system |
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Effective date of registration: 20191224 Address after: 210046 Key Laboratory of Emerging Industries Incubation Base, Nanda Science Park, Weidi Road, Qixia District, Nanjing City, Jiangsu Province, 3 buildings and 7 floors Patentee after: Nanjing Academy of Photoacoustic Superstructure Materials Co., Ltd. Address before: 210093 Nanjing, Gulou District, Jiangsu, No. 22 Hankou Road Patentee before: Nanjing University |
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