CN105928470B - Free form surface surface topography On-machine Test method and device based on holographic method - Google Patents
Free form surface surface topography On-machine Test method and device based on holographic method Download PDFInfo
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- CN105928470B CN105928470B CN201610551577.0A CN201610551577A CN105928470B CN 105928470 B CN105928470 B CN 105928470B CN 201610551577 A CN201610551577 A CN 201610551577A CN 105928470 B CN105928470 B CN 105928470B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
- B23Q17/20—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring workpiece characteristics, e.g. contour, dimension, hardness
Abstract
The free form surface surface topography On-machine Test method and device based on holographic method that the present invention relates to a kind of.The prior art has larger difficulty to the accurately and fast measurement of free form surface.Present invention composition includes: detection device (15), the detection device includes pedestal A(2), the pedestal A upper aperture is provided with gauge head handle (1), the pedestal A is connect by slideway (10) with pedestal B(7), it is connect by screw thread with laser socket (3) below the gauge head handle, the laser socket lower end is equipped with laser (4), there are partition (6) in the pedestal B, the partition is connect with space optical filter (5), lower section passes through deck and spectroscope (8) respectively in the pedestal B, reflective mirror (14) connection, detection method passes through acquisition camber reflection light beam wavefront distortion information, obtain surveyed spatial coordinated information.The present invention is based on the free form surface surface topography On-machine Test devices of holographic method.
Description
Technical field:
The present invention relates to optical fields and numerical control processing on-machine measurement technical field, and in particular to one kind is based on holographic method
Free form surface surface topography On-machine Test method and device.
Background technique:
The prior art, to the non-rotating unknown free curved face with non-symmetrical features precise measurement and evaluation have compared with
Big difficulty, it is most of to use blue light Digital grating spatial digitizer or three coordinates for the surface type measurement of free form surface after processing
Measuring machine and other contact type measurement instrument measure it, although first two measurement method is accurate, due to needing handle
Machined part removes in measuring instrument from machining tool, and the mobile process being loaded again of this workpiece can not only generate positioning
Error can also extend measurement period, so that measurement process becomes cumbersome, the measurement method of contact is not only to workpiece material and work
Part steep requires, but also needs to carry out measured value corresponding error compensation and gauge head compensation.
With the rapid development of aerospace, shipbuilding, automobile and Die Industry, the application of free form surface becomes increasingly wider
It is general, meanwhile, the requirement to high efficiency, high-precision measurement and evaluation is also higher and higher, therefore, smooth (coarse) degree of curved surface
Measurement just has great significance with evaluation.
Summary of the invention:
The object of the present invention is to provide a kind of free form surface surface topography On-machine Test method and dress based on holographic method
It sets.
Above-mentioned purpose is realized by following technical scheme:
A kind of free form surface surface topography On-machine Test device based on holographic method, composition includes: detection device, institute
The detection device stated includes pedestal A, and gauge head handle is equipped in the pedestal A upper aperture, and the pedestal A passes through slideway and base
Seat B connection, the gauge head handle lower section are connect by screw thread with laser socket, and the laser socket lower end is equipped with laser
Device, the pedestal B is interior to have partition, and the partition is connect with space optical filter, and lower section leads to respectively in the pedestal B
Deck is crossed to connect with spectroscope, reflective mirror.
The free form surface surface topography On-machine Test device based on holographic method, the interior top the pedestal A are logical
Fastening bolt connection sensor plate washer is crossed, holographic Wavefront sensor is installed on the sensor plate washer, on the pedestal A
Positioning knob and corresponding with the position in hole on the pedestal B is installed, is placed with freedom to be measured below the spectroscope
Curve surface work pieces.
A kind of method that the detection device carries out the free form surface surface topography On-machine Test based on holographic method.It should
Method include the following steps: first measurement when, the gauge head handle clamping of the device is connect on main shaft with lathe, by lathe Lai
The movement of detection device is controlled, detection device is with main axis, due to the installation site of laser and the axle center of machine tool chief axis
It is coaxial, so detection device can accurately control the coordinate of measured point by lathe during the work time；
Optical measurement is combined with on-machine measurement, is fast and accurately measured the part of unknown free curved face, by swashing
Laser in light device seat provides light source, and by the space optical filter in pedestal B, space optical filter provides laser
Light source collimation becomes standard flat wave, after the light beam of collimation is via spectroscope, projects work to be measured by separated through Beam
The surface of part is reflected back spectroscope again again after the reflection of workpiece for measurement, then projects by spectroscopical reflection anti-
Light microscopic, to be incident in holographic Wavefront sensor, by Wavefront sensor to curved surface reflected light beam wavefront distortion
Information collection obtains the data information of wave front aberration and institute's measuring point；
There is locator slide to be connected between pedestal A and pedestal B, in measurement process, can be determined on pedestal A by adjusting
Position knob accurately to adjust laser at a distance from the optical filter of space to reach the standard flat wave of high quality, Jin Erti
High measurement accuracy.
The utility model has the advantages that
1. the present invention is a kind of free form surface surface topography On-machine Test method and device based on holographic method,
It is that optical element and On-machine Test be combined with each other, and institute based on the detection device of holographic Wavefront sensor
There is detecting element all to design in two base shells, protects optical element, prevent external environment to optical element
The influence for measuring environment, improves measurement accuracy.
The present invention is based on the methods that the detection device of holographic Wavefront sensor uses non-contact measurement, avoid
Since there are contact forces for measurement, and cannot the objects such as soft, frangible be carried out with contact measurement, avoid making work when measurement
Part, which is deformed, even forms scratch on surface, also avoids the complex process of secondary card engaging workpiece, improves measurement efficiency, together
When have very high measurement accuracy, good reliability and stability, measurement data obtained do not need carry out contact radius
Compensation.
The detection device of holographic Wavefront sensor of the invention, shell are made of two pedestals, not only can be square
Just assembly and disassembly are carried out to all part, and the knob adjusted on pedestal A can be passed through and stretched pedestal
B easily and accurately adjusts laser at a distance from the optical filter of space, so that space optical filter can be adjusted in varied situations
It saves with the optimum distance of laser, obtains the directional light of high quality, and then improve measurement accuracy, so that space optical filter
The parallel light quality of outgoing.
The present invention is avoided using holographic Wavefront sensor and calculates resolving wavefront by numerical value, ultrahigh speed wave may be implemented
Preceding detection, detection speed is fast, using simple, flexibly, and reliably, detection accuracy with higher.
Shell of the present invention using the strong material of light weight rigidity, that is, reduce the load of main shaft at the same also avoid pedestal A,
The deformation of pedestal B ensure that the measurement accuracy requirement of device.
Holographic wavefront sensing methods have been applied to the detection of free form surface surface topography by the present invention, using it is a series of just
It hands overZernikePolynomial linear combination indicates wave front aberration detected by Wavefront sensor, so indicate it is entire freely
The surface topography of curve surface work pieces.
The present invention use three axis numerically controlled machine processing hardened steel free form surface, by by laser, space optical filter,
Spectroscope and the noncontacting measurement device of Wavefront sensor combination measure the surface topography of free form surface, and then smooth from surface
The angle of (coarse) degree measures and assesses the machining accuracy of free curve surface work pieces.
Detection device of the invention is optical gauge based on computer vision, is surveyed using optical non-contact
Principle is measured, directly it can not only be measured on machining tool after the completion of work pieces process, but also can be to avoid upper
State due to the secondary brought position error that is loaded, simply, conveniently, it is time saving.
Non-contact measurement of the invention is to measure in the case where not contact workpiece with optical element, is used
The method that optical principle is combined with on-machine measurement, particularly with measuring, frangible easily-deformable workpiece, soft material workpiece, shape are multiple
General labourer's part, coated surface and high geometric accuracy require workpiece etc., have higher resolution ratio, precision compared with other measurement methods
And efficiency, and the deficiency of contact type measurement can be made up.
The present invention is using holographic Wavefront sensor as the primary optics of surface profile measurement device, a branch of directional light
It is irradiated to workpiece surface back reflection to go out to have the light beam of wavefront distortion information, via the reception of holographic Wavefront sensor, to light field
Amplitude and phase information analyzed, and then the Curvature varying of workpiece surface different location is reacted, in a computer to having added
The surface topography of work workpiece emulated, and with detection, the method for processing one, is had many advantages, such as and Digitized manufacturing
Forward position direction.
Detailed description of the invention:
Attached drawing 1 is structure of the detecting device schematic diagram of the invention.
Attached drawing 2 is the detection device outside drawing in attached drawing 1.
Attached drawing 3 is the detection device working light path schematic diagram in attached drawing 1.
Attached drawing 4 is the schematic diagram of present invention detection single-mode aberration.
Attached drawing 5 is holographic Wavefront sensor detection wave front aberration principle figure of the invention.
Attached drawing 6 is hardened steel free form surface UG illustraton of model of the invention.
Attached drawing 7 is hardened steel free curve surface work pieces processing site figure of the invention.
Attached drawing 8 is workpiece surface analogous diagram of the invention.
Attached drawing 9 is hardened steel free form surface detection path planning figure of the invention.
Attached drawing 10 is the workpiece topography figure of the detection device mapping in attached drawing 1.
Attached drawing 11 is the roughness profile figure of the detection device mapping in attached drawing 1.
Attached drawing 12 is the roughness profile figure of super depth-of-field microscope observation of the invention.
Attached drawing 13 is detection device parts explosion in attached drawing 1.
Specific embodiment:
Embodiment 1:
A kind of free form surface surface topography On-machine Test device based on holographic method, composition includes: detection device 15,
The detection device includes pedestal A2, and gauge head handle 1 is equipped in the pedestal A upper aperture, and the pedestal A passes through slideway
10 connect with pedestal B7, are connect by screw thread with laser socket 3 below the gauge head handle, the laser socket lower end installation
There is laser 4, there is partition 6 in the pedestal B, the partition is connect with space optical filter 5, in the pedestal B
Lower section passes through deck respectively and connect with spectroscope 8, reflective mirror 14.
Embodiment 2:
According to the free form surface surface topography On-machine Test device described in embodiment 1 based on holographic method, the base
Top is connect by fastening bolt 11 with sensor plate washer 12 in seat A, and holographic wavefront is equipped on the sensor plate washer and is passed
Sensor 9 is equipped with positioning knob 13 and the light splitting corresponding, described with the position in hole on the pedestal B on the pedestal A
Free curve surface work pieces 16 to be measured are placed with below mirror.
Embodiment 3:
It is a kind of to carry out the free form surface surface topography based on holographic method in machine using detection device described in embodiment 1-2
The method of detection, this method are: first in measurement, it connect by the gauge head handle clamping of the device on main shaft and with lathe, by
Lathe controls the movement of detection device, and detection device is with main axis, due to the installation site and machine tool chief axis of laser
Axle center be coaxial, so detection device can accurately control the seat of measured point by lathe during the work time
Mark；
Optical measurement is combined with on-machine measurement, is fast and accurately measured the part of unknown free curved face, by swashing
Laser in light device seat provides light source, and by the space optical filter in pedestal B, space optical filter provides laser
Light source collimation becomes standard flat wave, after the light beam of collimation is via spectroscope, projects work to be measured by separated through Beam
The surface of part is reflected back spectroscope again again after the reflection of workpiece for measurement, then projects by spectroscopical reflection anti-
Light microscopic, to be incident in holographic Wavefront sensor, by Wavefront sensor to curved surface reflected light beam wavefront distortion
Information collection obtains the data information of wave front aberration and institute's measuring point；
There is locator slide to be connected between pedestal A and pedestal B, in measurement process, can be determined on pedestal A by adjusting
Position knob accurately to adjust laser at a distance from the optical filter of space to reach the standard flat wave of high quality, Jin Erti
High measurement accuracy.
Embodiment 4:
The method of free form surface surface topography On-machine Test according to embodiment 1-3 based on holographic method,
1, the detection method based on holographic Wavefront sensor
Wavefront sensing technique uses pure optical instrument to realize the detection for wave front aberration, and uses avalanche optoelectronic
Diode array not only simplifies optical path and also avoids the heavy matrix of traditional Wavefront sensor as peak light intensity detecting element
Calculating process greatly improves detection efficiency and detection accuracy, we first carry out the detection method of single-mode difference
It introduces, further relates to the holographic Wavefront sensor applied to herein to the wavefront distortion information with multiple aberration modes
Detection method, detect single-mode aberration principle it is as shown in Fig. 4,
Hologram in figure has been multiplexed two sub-holograms, if (x, y) be hologram plane coordinates, (xA, yA, zA),
(xB, yB, zB) is respectively A, the coordinate of B two o'clock.K1 (x, y), K2 (x, y) are respectively to converge at A, the reference light of B two o'clock.Biasing
Light wave P1 (x, y), P2 (x, y) are respectively provided with positive and negative amplitude aberration eSi (x, y) ,-eSi (x, y).Sub-hologram is by biasing
Light and reference light are interfered with each other and are formed, shown in its transmittance function such as formula (1):
(1)
Conjugate relation is indicated in formula,j=√-1.As a branch of light wave G with fSi (x, y) mode aberration that workpiece reflects
When (x, y) is incident on Wavefront sensor and irradiates hologram, it will reappear and converge at outA,BThe light beam of two o'clock, such as formula (2) institute
Show:
(2)
It converges atA,BThere is certain relationships for the aberration amplitude of the peak light intensity of the light beam of two o'clock and incident light wave.By
Theory analysis can obtain, and the relationship between the aberration of incident light wave can be approximated to be linear.Therefore it can pass through detectionA,BTwo o'clock
Peak light intensity accurately calculate wave front aberration.
During actual measurement due to free form surface has Curvature varying fast and different location there are the spies of different curvature
Property, so just need simultaneously to detect multiple aberration modes, it can be by being multiplexed multipair son according to the characteristic of holographic element
Hologram solves the problems, such as this.So that from the spherical wave of workpiece reflection echo front sensor in avalanche photodiode array
It is separated on peak light intensity detecting element.By detecting each pair of hot spot relative peak light intensity, it will be able to realize that overall wavefront aberration is visited
It surveys.Its basic principle is as shown in Fig. 5.
, free curve surface work pieces surface topography measurement
When being detected with pattern of the proposed detection device to the workpiece free form surface of machined completion,
Since the distorted wavefront that workpiece reflexes to Wavefront sensor is continuous, and it can completely react very much institute's detection workpieces
Surface topography.It is thereby possible to select indicating wave front aberration detected by holographic Wavefront sensor, Jin Erbiao with continuous function
Show the face type of workpiece surface.The wave front aberration detected by Wavefront sensor, can be orthogonal with itemZernikePolynomial table is shown as
(3)
In formulaG(x,y) it is the wave front aberration that Wavefront sensor detects, a certain test point can be reflectedzCoordinate value,Z j (x,y) beZernikeMultinomial,a j It isjItem multinomial coefficient.ZernikeMultinomial be in region it is orthogonal, therefore
Expression can use polar coordinate representation are as follows:
(4)
In formulaR l n (ρ) it is expressed as the related item with radial direction,Θ l n (θ) it is expressed as item related with argument, (ρ,θ) it is region
Interior polar coordinates, wherein0<ρ<1,0<θ<2π,nFor polynomial order, value is positive integer,lFor withnRelated serial number, and
WithnIt is like parity, |l|≤n.Ifl=n-2m (m=0,1,2,…),R l n (ρ) can indicate are as follows:
(5)
Θ l n (θ) can indicate are as follows:
(6)
By in formula (5) and (6) Rln (ρ) and Θ ln (θ) be brought into formula (4), when n takes different value, can write out every
One polynomial expression of Zernike to indicate various wave aberrations, and then indicates workpiece surface appearance.This expression
Mode is not only able to satisfy the description to complex free curved surface, but also can reach required required precision.
Simulation analysis and experimental verification are devised according to detection device set forth above, drafting to be processed first in UG
Hardened steel FREEFORM SURFACE MODEL (model drawn in UG is as shown in Figure 6) is secondly selected with the processing program that software automatically generates
It is processed with three axis lathes, simulation analysis then is carried out to workpiece and then designs detection path, finally use inspection of the invention
It surveys device and the pattern of workpiece survey and draw and be compared with the workpiece surface appearance observed with super depth-of-field microscope.
What this experiment was selected is that Dalian Machine Tool Group Co., Ltd producesVDL1000EType vertical machining centre,
Its digital control system is the carrier of data record as the basis for measuring movement in on-machine measurement system, useFANUC Oi-MD
Digital control system,X、Y、ZThe stroke in three directions1200mm,560mm,600mm, maximum speed of spindle is8000r/min, tool magazine is most
Large capacity is20, positioning accuracy ±0.012mm/Whole process, repetitive positioning accuracy ±0.008mm/ whole, and it is providedRS232External control interface.The program automatically generated when processing using UG, selecting finishing parameter is the speed of mainshaftn:4000r/ min, the amount of feedingV f :800mm/min, cutting-ina p :0.2mm, processing site and processing after workpiece it is as shown in Figure 7.
According to the workpiece surface of the face shape of workpiece emulation as shown in figure 8, and according to the curve form planning survey of workpiece
Path, obtained measuring route simulation result are as shown in Figure 9.
Using the measuring device based on holographic Wavefront sensor, to by three axis numerically controlled machineVDL1000EThe freely song of processing
Face hardened steel piece surface carries out experimental analysis.Workpiece shape shown in Fig. 10 to be measured with detection device proposed by the present invention
Looks.The results show this measuring device measurement method is simple, and efficiency ratio is higher by 15% with other measuring instruments, and speed is promoted
12%, speed is fast, and do not need to after processing workpiece carry out it is secondary be loaded, can be after processing directly on numerically-controlled machine tool
It measures.
In order to verify the feasibility of the detection device proposed by the invention based on holographic Wavefront sensor, from detection device
Workpiece topography surface extraction one two-dimensional silhouette by abnormal area of mapping, as shown in figure 11.It is equally micro- from the super depth of field
A two-dimensional silhouette by abnormal area is extracted in the workpiece surface that microscopy is surveyed, as shown in figure 12.Compare Figure 11 and Figure 12, has
There are lesser difference, other common instrument such as relatively super depth-of-field microscope of the reliability and really degree of roughness profile shown in Figure 11
The result of device observation is essentially identical.
The above experiment example shows with the detection device set forth above based on holographic Wavefront sensor in mapping workpiece
Although occasional generates abnormal signal point during surface topography, there is no excessive information losses, with existing shape
The workpiece surface appearance roughness profile that looks observation instrument is surveyed and drawn is essentially identical.And the device of the invention can be directly installed on
It is applied on lathe, and can be with rapid survey, so more practicability.
Embodiment 5:
Free form surface surface topography On-machine Test device according to embodiment 1-4 based on holographic method, wherein respectively
The effect of main component is as follows:
1, gauge head handle: directly connecting with pedestal 1 and machine tool chief axis, is used for attachment device and main shaft；
2, it pedestal A: is directly connect with gauge head handle, laser socket, fastening bolt and pedestal 2, the master as whole device
Body is by the connection with gauge head handle, so that whole device can be loaded on main shaft, and with motion of main shaft, lower end connection
The coaxial laser socket with gauge head handle, control parameter when being convenient for measuring connect the adjusting overall base that can be convenient with pedestal B
Length, to change laser at a distance from the optical filter of space；
3, laser socket: directly connecting with pedestal A and laser, enables laser and gauge head handle coaxial.
Laser: being loaded on laser socket and coaxial with laser socket and gauge head handle, and to fill a detection device
Light source is provided；
4, space optical filter: directly connecting with pedestal B, is directly anchored to the partition inside pedestal B by fastening screw
On, guarantee filter and laser coaxial as far as possible.Being mainly used for the light source that laser is projected collimation becomes standard flat wave；
Optical mirror slip: spectroscope and reflective mirror are all loaded in the groove of pedestal B so that eyeglass remain with optical path at
The state of 45 ° of angles, to guarantee the integrality of optical path, spectroscope is mainly used on lit transmissive to workpiece, and coming from
In workpiece reflected light back to reflective mirror.The test light that reflective mirror is mainly used for for workpiece being reflected back detection device is reflected to wave
Front sensor；
5, pedestal B: directly connecting with space optical filter, optical mirror slip and pedestal 1, be equipped with inside pedestal B partition and
Groove can make space optical filter and optical mirror slip are fixed in pedestal 2 as requested, to guarantee the stability of measurement,
Pedestal B is equipped with the hole of exact position, can accurately be adjusted by the positioning knob on adjusting pedestal A and flexible pedestal B
The length of detection device, while laser is accurately controlled at a distance from the optical filter of space to which the standard for obtaining high quality is flat
Surface wave improves detection accuracy；
6, sensor bezel: directly it is connected with fastening bolt to fix Wavefront sensor；
7, fastening bolt: directly connecting with sensor bezel and pedestal A, is connected on pedestal A across baffle, so that wave
Front sensor can be stably fixed on pedestal；
8, it Wavefront sensor: is fixed on pedestal A by sensor bezel and fastening bolt.Wavefront sensor reception comes from
It, and can be with by the connection with experimental calculation machine by the analysis detection wave front aberration to test light in the test light of reflective mirror
Simulate the surface topography of surveyed workpiece.
Claims (3)
1. a kind of free form surface surface topography On-machine Test device based on holographic method, composition includes: detection device, special
Sign is: the detection device includes pedestal A, and gauge head handle is equipped in the pedestal A upper aperture, and the pedestal A passes through
Slideway is connect with pedestal B, is connect by screw thread with laser socket below the gauge head handle, the laser socket lower end installation
There is laser, there is partition in the pedestal B, the partition is connect with space optical filter, lower section in the pedestal B
It is connect respectively by deck with spectroscope, reflective mirror.
2. the free form surface surface topography On-machine Test device according to claim 1 based on holographic method, it is characterized in that:
Top connects sensor plate washer by fastening bolt in the pedestal A, is equipped with holographic wavefront on the sensor plate washer
Sensor is equipped with positioning knob and the light splitting corresponding, described with the position in hole on the pedestal B on the pedestal A
Free curve surface work pieces to be measured are placed with below mirror.
3. a kind of the free form surface surface topography based on holographic method is carried out using detection device described in as claimed in claim 1 or 22 exist
The method of machine testing, it is characterized in that: this method comprises the following steps:
First in measurement, the gauge head handle clamping of the device is connect on main shaft with lathe, detection device is controlled by lathe
Movement, detection device is with main axis, since the installation site of laser and the axle center of machine tool chief axis are coaxial, so
Detection device can accurately control the coordinate of measured point by lathe during the work time；
Optical measurement is combined with on-machine measurement, is fast and accurately measured the part of unknown free curved face, by laser
Laser in seat provides light source, by the space optical filter in pedestal B, the light source that space optical filter provides laser
Collimation becomes standard flat wave, after the light beam of collimation is via spectroscope, projects workpiece for measurement by separated through Beam
Surface is reflected back spectroscope again again after the reflection of workpiece for measurement, then projects reflective mirror by spectroscopical reflection,
To be incident in holographic Wavefront sensor, adopted by information of the Wavefront sensor to curved surface reflected light beam wavefront distortion
Collection, obtains the data information of wave front aberration and institute's measuring point；
There is locator slide to be connected between pedestal A and pedestal B, in measurement process, can be revolved by the positioning adjusted on pedestal A
Button accurately to adjust laser at a distance from the optical filter of space to reach the standard flat wave of high quality, and then improve inspection
Survey precision.
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| CN110095088B (en) * | 2019-05-14 | 2020-11-20 | 哈尔滨理工大学 | Method and device for detecting surface topography characteristics of curved surface splicing area based on grating identification |
| CN114879466B (en) * | 2022-05-10 | 2023-07-28 | 四川大学 | Curved surface hologram generating method based on bidirectional compensation |
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| EP0740133A1 (en) * | 1991-11-16 | 1996-10-30 | RENISHAW plc | Sample illumination for spectroscopic apparatus and methods |
| CN101858736A (en) * | 2010-05-10 | 2010-10-13 | 北京理工大学 | Multifocal holographic differential confocal super-large curvature radius measuring method and device |
| CN102155922A (en) * | 2011-03-07 | 2011-08-17 | 中国航空工业集团公司北京长城计量测试技术研究所 | Compound sensor for measuring appearance of nanometer by using holographic laser |
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2016
- 2016-07-14 CN CN201610551577.0A patent/CN105928470B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5247343A (en) * | 1991-11-01 | 1993-09-21 | Nicolet Instrument Corporation | Raman spectrometer having interferometer with optical substraction filters |
| EP0740133A1 (en) * | 1991-11-16 | 1996-10-30 | RENISHAW plc | Sample illumination for spectroscopic apparatus and methods |
| CN101858736A (en) * | 2010-05-10 | 2010-10-13 | 北京理工大学 | Multifocal holographic differential confocal super-large curvature radius measuring method and device |
| CN102155922A (en) * | 2011-03-07 | 2011-08-17 | 中国航空工业集团公司北京长城计量测试技术研究所 | Compound sensor for measuring appearance of nanometer by using holographic laser |
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