CN105921186A - Optofluidic sensor based on diffraction effect and preparation method thereof - Google Patents
Optofluidic sensor based on diffraction effect and preparation method thereof Download PDFInfo
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- CN105921186A CN105921186A CN201610247263.1A CN201610247263A CN105921186A CN 105921186 A CN105921186 A CN 105921186A CN 201610247263 A CN201610247263 A CN 201610247263A CN 105921186 A CN105921186 A CN 105921186A
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- diffraction effect
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502761—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip specially adapted for handling suspended solids or molecules independently from the bulk fluid flow, e.g. for trapping or sorting beads, for physically stretching molecules
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/4788—Diffraction
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/06—Auxiliary integrated devices, integrated components
- B01L2300/0627—Sensor or part of a sensor is integrated
- B01L2300/0663—Whole sensors
Abstract
The invention relates to an optofluidic sensor based on diffraction effect and a preparation method thereof. The optofluidic sensor based on the diffraction effect provided by the invention comprises a sample channel, a light source and a photodetector, wherein the surface of the sample channel comprises an inert area and an adsorption area; the optical characteristic of the inert area is different from the optical characteristic of the adsorption area; the adsorption area can adsorb a to-be-measured matter, while the inert area can not adsorb the to-be-measured matter; since the adsorption characteristic of the adsorption zone and the adsorption characteristic of the inert area around the adsorption area on the surface of the sample channel are different, the to-be-measured matter is non-uniformly attached on the surface of the sample channel; thus, the distribution of the optical characteristic of the area nearby the surface of the sample channel is non-uniform, and detection accuracy is improved.
Description
Technical field
The present invention relates to a kind of optics microfluidic sensor based on diffraction effect and preparation method thereof, optics is micro-
Fluid sensor is used for detected gas or fluid sample, can be applicable to biochemical analysis, medical diagnosis and biological work
The fields such as journey.
Background technology
Optical detective technology and the fusion of microfluidic chip technology, expedited the emergence of optics micro-fluidic (optofluidic)
(being called for short " optofluidic ") sensor (Nature Photon., 5 (10), 591-597 (2011)).Optofluidic is utilized to pass
Sensor is analyzed detection, has the advantage such as unmarked, Real-time and Dynamic and micro-example demand.
At present, optofluidic sensor mainly has three classes: micro-ring resonant cavity sensor (Appl.Phys.Lett., 97,
011105(2010))；Surface plasma resonance (SPR) sensor (Anal.Chem., 82 (24),
10015-10020(2010))；And Fabry-P é rot resonator cavity (FP chamber) sensor (Optics Express,
22,31977-31983 (2014)).Wherein, micro-ring resonant cavity sensor and spr sensor, be based on " table
Face is sensitive " mechanism, the determinand in sensor surface absorption can cause the change of resonance wavelength, therefore be applicable to
Surface selects absorption, is enriched with and detects biochemical substances.For FP cavity sensor, its resonance wavelength is by chamber
Interior all substances together decide on, and are consequently belonging to " internal sensitivity " mechanism, the surface adsorption shadow to resonance wavelength
Ring the least (because of the most hundreds of nanometer of biomolecule thickness of surface adsorption, much smaller than micron to millimeter magnitude
Sensor cavity length).But, in biochemical analysis, it usually needs utilize surface adsorption effect, determinand is carried out
Identify and detection；Further, surface adsorption can also be enriched with determinand, thus detection sensitivity is greatly improved.
To sum up, how to carry out surface adsorption detection in the optofluidic sensor to " internal sensitivity ", and obtain height
Sensitivity, is that the wound of the present invention grinds motivation.
Summary of the invention
It is an object of the invention to overcome the deficiencies in the prior art, it is provided that a kind of technique is simple and highly sensitive
Optics microfluidic sensor based on diffraction effect and preparation method thereof.
A kind of based on diffraction effect the optics microfluidic sensor that the present invention provides, its technical scheme is:
A kind of optics microfluidic sensor based on diffraction effect, including sample channel, photodetector or
Being the spectrogrph with light splitting function, the surface of described sample channel includes inertia district and adsorption zone, described lazy
The property optical characteristics in district differs with the optical characteristics of described adsorption zone；Determinand can be adsorbed in described adsorption zone.
Determinand can not be adsorbed in described inertia district；Described sample channel surface, owing to adsorption zone is with the most lazy
Property district characterization of adsorption different so that determinand is uneven in the attachment of channel surface, thus causes channel table
The optical characteristics skewness of face near zone, improves accuracy of detection.
Wherein, described optical characteristics refers to refractive index and/or specific absorbance.
Wherein, the surface configuration of adsorption zone has thin film or through modification.
Wherein, the modification on surface, described adsorption zone is contacted by magnetic and/or electrostatic particle thing, light beam shines
Penetrate or chemical treatment so that the characterization of adsorption of determinand is changed by surface, adsorption zone.
Wherein, described adsorption zone or described inertia district be well-regulated periodic distribution or random at random
Distribution；The area of described adsorption zone or the area in described inertia district between a square nanometers to ten square millimeter,
Between preferably 100 square nanometers to 100 square microns；Spacing between adjacent adsorbent district or adjacent inert
The detection light beam wavelength being smaller than 100 times between district.
Wherein, described sample channel is the Fabry-P é rot optical resonator being made up of two reflecting mirrors, two
Interplanar distance between reflecting mirror is the height of sample channel, and the height of sample channel is close or equal to detection light
The integral multiple of bundle half-wavelength.The reflectance coating of described reflecting mirror is metal film or deielectric-coating；Described metal film is
One in Al film, Ag film, Au film or Pt film；Described deielectric-coating is by the dielectric film of different refractivity
Constituting, described deielectric-coating is Si/SiO2Film, TiO2/SiO2Film or the Bragg reflection of GaAs/AlGaAs film
Mirror.
The preparation method of a kind of based on diffraction effect the optics microfluidic sensor of the present invention, by micro-fluidic biography
The regional area of the sample channel of sensor is modified processing, and forms the adsorption zone that can adsorb determinand；Not yet
Having the region being modified processing is the inertia district that can not adsorb determinand.Determinand is on sample channel surface
Inertia district and the uneven attachment of adsorption zone so that channel surface near zone optical characteristics distribution occur
Change, thus change the transmission characteristic of detection light beam.
Wherein, the method being modified the regional area of sample channel processing is: enter sample channel surface
Row semiconductor lithography processes or places porous plate on sample channel surface so that the local on sample channel surface
Outside region is exposed to, remaining region is then covered by mask or porous plate；Table is carried out subsequently for regional area
Face processes so that the characterization of adsorption on regional area surface changes and forms adsorption zone, by mask or porous
The region that plate covers is inertia district.The method carrying out surface process for regional area is that ultraviolet irradiates, changes
Learning solution to process or plated film, chemical solution can be the solution containing silane coupler.
Wherein, the method being modified the regional area of sample channel processing is: utilize coating technique,
Thin film is uniformly adhered on sample channel surface；Carry out heating anneal process subsequently so that film shrunk and
It is changed into the island distribution of separation so that the surface adsorption characteristic of thin film overlay area changes and forms absorption
District, the region not covered by thin film is inertia district.Described thin film can be such as metallic film, sull
Or organic thin film.
Wherein, the method being modified the regional area of sample channel processing is: by the stream containing particulate matter
Body flows through sample channel, when particulate matter touches the surface of sample channel so that the sample contacted with particulate matter
The characterization of adsorption of determinand is changed by product channel surface, owing to particulate matter disperses in a fluid, and particulate matter
Dispersed and distributed is presented so that the table on the sample channel surface contacted with particulate matter with the contact area of channel surface
Face characterization of adsorption changes and forms adsorption zone, and the sample channel surface not contacted with particulate matter is inertia district.
Described particulate matter is with magnetic particulate matter, with the particulate matter of electrostatic or through chemically treated granule
Thing.
Wherein, described sample channel is made up of two quartz glass plates, is coated with on the surface of quartz glass plate
Photoresist, exposed and developed so that the regional area on piezoid surface exposes, and other region is still by light
Photoresist is covered with；Then piezoid is immersed in the solution containing silane coupler and process so that regional area
Surface becomes hydrophobicity；Then piezoid is immersed acetone soln, photoresist is removed, such piezoid table
Face is formed with hydrophobic adsorption zone and hydrophilic inertia district.
The enforcement of the present invention includes techniques below effect:
The optics microfluidic sensor of the present invention, with traditional micro-ring resonant cavity sensor, spr sensor,
And FP cavity sensor compares, there is following feature: existing micro-ring sensor and spr sensor,
Determinand is on its surface uniform adsorption (the whole surface of determinand uniform fold), and therefore the optical characteristics on surface is divided
Cloth is uniform；For FP cavity sensor, the determinand distribution of its intracavity is uniform, the therefore optics of intracavity
Characteristic distribution is also uniform, does not therefore have diffraction effect at FP intracavity.Further, for micro-ring sensor
And spr sensor, it is that abutment surface evanescent waves detects, therefore can only detect the neighbouring district of sensor surface
Territory (scope of the most hundreds of nanometer), relatively low to the accuracy of detection of biomacromolecule.The present invention is to utilize sensor
The optical diffraction effect that the non-homogeneous absorption on surface causes, has the advantage of surface adsorption detection (as selected to inhale
Echo enrichment determinand), overcome the defect of surface evanescent waves detection simultaneously, macromole is also had highly sensitive
Degree.
Accompanying drawing explanation
Fig. 1 is the cross section structure schematic diagram of the optics microfluidic sensor based on diffraction effect of the embodiment of the present invention.
Fig. 2 is its of the sample channel surface of the optics microfluidic sensor based on diffraction effect of the embodiment of the present invention
Middle a kind of structure schematic top plan view.
Fig. 3 is the another of the sample channel surface of the optics microfluidic sensor based on diffraction effect of the embodiment of the present invention
A kind of schematic top plan view of structure.
Fig. 4 be the sample channel surface of the optics microfluidic sensor based on diffraction effect of the embodiment of the present invention
Grain thing schematic diagram.
1, sample channel, 2, inertia district, 3, adsorption zone, 4, detection light beam, 5, particulate matter, 6, contact area,
7, inner surface, 8, light source, 9, photodetector.
Detailed description of the invention
Below in conjunction with embodiment and accompanying drawing, the present invention is described in detail, it should be pointed out that retouched
The embodiment stated is intended merely to facilitate the understanding of the present invention, and it does not play any restriction effect.
See shown in Fig. 1 to Fig. 4, a kind of based on diffraction effect the optics microfluidic sensor of the present embodiment,
Including sample channel 1, photodetector 9 and can the light source 8 of emission detection light beam 4, sample channel 1
Surface include inertia district 2 and adsorption zone 3, the optical characteristics of the optical characteristics in inertia district 2 and adsorption zone 3
Differing, optical characteristics refers to refractive index and/or specific absorbance；Determinand can be adsorbed in adsorption zone 3.For
The sample channel inner surface 7 that smooth, smooth and optical characteristics is evenly distributed, when collimated light beam passes through, light
The angle of divergence and the intensity distributions of bundle are unaffected, can affect certainty of measurement.The micro-fluidic biography of optics of the present embodiment
After the adsorption zone 3 on sample channel 1 surface of sensor is attached to determinand, the optical characteristics in its region, surface
(such as refractive index or absorbance) can change.Therefore, sample channel 1 surface inertia district 2 and absorption
The optical characteristics in district 3 produces difference, causes the optical characteristics skewness on whole sample channel 1 surface.
When detecting light beam 4 and inciding sample channel 1 surface, due to adsorption zone 3 and the optical characteristics in inertia district 2
Different so that detection light beam generation diffraction effect, thus change the angle of divergence or the intensity of light beam, promote detection
Precision.
In the present embodiment, adsorption zone 3 or inertia district 2 can be in well-regulated periodic distribution or random
Random distribution；The area of adsorption zone 3 or the area in inertia district 2 a square nanometers to ten square millimeter it
Between, between preferably 100 square nanometers to 100 square microns；Spacing between adjacent adsorbent district 3 close to or
Person is less than the wavelength of detection light beam, and the spacing between adjacent inert district 2 is close or is less than the ripple detecting light beam
Long, thus strengthen diffraction.
Preferably, sample channel 1 is the Fabry-P é rot optical resonator being made up of two reflecting mirrors, two
Interplanar distance between reflecting mirror is the height of sample channel 1, and the height of sample channel 1 is close or equal to visiting
The integral multiple of light-metering bundle half-wavelength.The reflectance coating of reflecting mirror is metal film or deielectric-coating；Metal film is Al
One in film, Ag film, Au film or Pt film；Deielectric-coating is made up of the dielectric film of different refractivity,
Deielectric-coating is Si/SiO2Film, TiO2/SiO2Film or the Bragg mirror of GaAs/AlGaAs film.
The sample channel 1 of the present embodiment, when the specific region of channel surface is after modification so that this
The characterization of adsorption of determinand is changed by subregion: as in figure 2 it is shown, the region after Chu Liing becomes permissible
The region (" adsorption zone 3 " is called for short in this subregion) of absorption determinand, untreated surface keeps adsorbing
The characteristic (" inertia district 2 " is called for short in this subregion) of determinand；Or, as it is shown on figure 3, the district after Chu Liing
Territory becomes can not adsorb determinand (" inertia district 2 " is called for short in this subregion), and untreated surface keeps permissible
The characteristic (" adsorption zone 3 " is called for short in this subregion) of absorption determinand.
The modification of the present embodiment, it is possible to use semiconductor photolithography (or place many at channel surface
Orifice plate), the specific region of channel surface is exposed to outer (this exposed region is referred to as " window " district), remaining district
Territory is then covered by the mask protection (or covering)；Surface process is carried out (as ultraviolet shines subsequently for window area
Penetrate, chemical solution processes or plated film) so that the characterization of adsorption on surface, window region changes, and (window region becomes
Adsorption zone 3 or inertia district 2), and the surface adsorption characteristic being covered by the mask region keeps constant.Wherein, plating
Film makes channel surface window region attachment layer of substance (such as the metallic film of nanometer scale thickness), so that
Characterization of adsorption changes.
The modification of the present embodiment, it is possible to use coating technique, uniformly adheres to one layer on sample channel surface
Thin film (such as metal, oxide or organic thin film)；Subsequently by technology such as heating anneals so that thin film
Shrink and be changed into island distribution (i.e. thin film dispersed and distributed, a covering part region) of separation.Thin film covers
Lid makes surface adsorption characteristic change.
The modification of the present embodiment, as shown in Figure 4, it is also possible to be will to pass through containing the fluid of particulate matter 5
Sample channel 1, when particulate matter 5 touches sample channel 1 surface so that touched channel surface pair
The characterization of adsorption of determinand changes (changing over inertia district 2 or adsorption zone 3).Owing to particulate matter 5 is point
Dissipating in a fluid, particulate matter 5 presents dispersed and distributed (i.e. inertia district 2 with the contact area on sample channel surface
Dispersed and distributed is presented) with adsorption zone 3.Particulate matter 5 can be that band is magnetic (or electrostatic), in external magnetic field
Under the effect of (or electric field), particulate matter 5 is adsorbed in vias inner walls, particulate matter 5 surface and channel table
Face contacts so that the characterization of adsorption of touched channel surface changes (being called for short surface " modified ").Granule
The surface of thing, through chemical treatment, can make the surface contacted by it that modification occurs.
The specific embodiment of the following preparation method being two optics microfluidic sensors based on diffraction effect:
Embodiment 1
First, two quartz glass plates are utilized to constitute the sample channel 1 of sensor, the wherein smooth light of piezoid
Sliding surface is as sample channel inner surface 7 (such as Fig. 1), and the inner surface 7 of piezoid is hydrophilic.
Secondly, the inner surface at quartz glass plate carries out resist coating, exposed and developed so that piezoid table
The regional area in face exposes, and is used for preparing adsorption zone 3, and other region (inertia district 2) is still photo-etched glue
It is covered with (Fig. 2)；Then piezoid is immersed in the solution containing silane coupler and process so that adsorption zone
3 surfaces become hydrophobicity；Then piezoid is immersed acetone soln, photoresist is removed, such piezoid
The adsorption zone 3 on surface is hydrophobicity, and the inertia district 2 on piezoid surface is still hydrophilic.
Finally, will flow through the sample channel 1 of sensor containing testing sample, now determinand can select absorption
District 3, determinand is not adsorbed in inertia district 2.Therefore, adsorption zone 3 and the refraction of inertia district 2 near surface
Rate there are differences, the uneven distribution of this refractive index so that the detection light beam 4 that light source 8 sends is through logical
Diffraction is there is during surface, road, so that photodetector 9 or there is the spectrogrph of light splitting function receive
Detection of optical power change, it is achieved detection.
Embodiment 2
First, two silicon substrates grow TiO2/SiO2Thin film as Bragg mirror, wherein reflecting mirror
The surface of flat-satin is hydrophobic as the inner surface 7 (such as Fig. 1) of sample channel, sample channel inner surface 7
Property.
Secondly, the two silicon substrate is constituted face-to-face the sample channel 1 of sensor, two of which Parallel Si
The spacing of sheet is 10 times of detection optical wavelength, thus constitutes a FP cavity sensor；Then pass to containing magnetic
The solution (this magnetic bead surfaces attachment oh group) of pearl, and Magnet is placed in sensor side；When magnetic bead flows into
After sensor, by magnet adsorption to sample channel inner surface 7, thus the oh group of magnetic bead surfaces is by connecing
Touch the contact area 6 (Fig. 4) being transferred to channel surface, then remove Magnet and magnetic bead is discharged sensor.
Therefore, the contact area 6 of channel surface is become hydrophilic from hydrophobicity, and the region not contacted with magnetic bead is still
For hydrophobicity (now, the contact area 6 of Fig. 4 is equal to the inertia district 2 of Fig. 3).
Finally, testing sample flowing through the sample channel 1 of sensor, now determinand can select to adsorb and inhale
Attached district, and determinand is not adsorbed in inertia district.Therefore, the absorbance of inertia district and adsorption zone near surface is deposited
In difference, this absorbance uneven distribution so that detection light beam 4 spreads out when passing through sample channel surface
Penetrate.
Last it should be noted that, above example is only in order to illustrate technical scheme, rather than to this
The restriction of invention protection domain, although having made to explain to the present invention with reference to preferred embodiment, this area
It is to be appreciated by one skilled in the art that technical scheme can be modified or equivalent,
Spirit and scope without deviating from technical solution of the present invention.
Claims (10)
1. an optics microfluidic sensor based on diffraction effect, including sample channel, it is characterised in that:
The surface of described sample channel includes inertia district and adsorption zone, the optical characteristics in described inertia district and described absorption
The optical characteristics in district differs；Determinand can be adsorbed in described adsorption zone.
A kind of optics microfluidic sensor based on diffraction effect the most according to claim 1, its feature
It is: described optical characteristics refers to refractive index and/or specific absorbance.
A kind of optics microfluidic sensor based on diffraction effect the most according to claim 1, its feature
It is: the surface configuration of described adsorption zone has thin film or through modification.
A kind of optics microfluidic sensor based on diffraction effect the most according to claim 3, its feature
Be: the modification on surface, described adsorption zone is contacted by magnetic and/or electrostatic particle thing, light beam irradiates or
Person's chemical treatment so that the characterization of adsorption of determinand is changed by surface, adsorption zone.
5. according to arbitrary described a kind of based on diffraction effect the optics microfluidic sensor of Claims 1 to 4,
It is characterized in that: the area of described adsorption zone or the area in described inertia district are in a square nanometers to ten square
Between Hao meter；The spy being smaller than 100 times between spacing or adjacent inert district between adjacent adsorbent district
Survey light beam wavelength.
6. according to arbitrary described a kind of based on diffraction effect the optics microfluidic sensor of Claims 1 to 4,
It is characterized in that: described sample channel is the Fabry-P é rot optical resonator being made up of two reflecting mirrors, two
Interplanar distance between individual reflecting mirror is the height of sample channel, and the height of sample channel is equal to detection light beam half-wave
Long integral multiple.
7. the preparation method of an optics microfluidic sensor based on diffraction effect, it is characterised in that: by micro-
The regional area of the sample channel of fluid sensor is modified processing, and forms the absorption that can adsorb determinand
District；The region not being modified processing is the inertia district that can not adsorb determinand.
The preparation side of a kind of optics microfluidic sensor based on diffraction effect the most according to claim 7
Method, it is characterised in that: the method being modified the regional area of sample channel processing is: to sample channel
Surface carries out semiconductor lithography process or places porous plate on sample channel surface so that sample channel surface
Regional area be exposed to outside, remaining region is then covered by mask or porous plate；Subsequently for regional area
Carry out surface process so that the characterization of adsorption on regional area surface changes formation adsorption zone, by mask or
The region that person's porous plate covers is inertia district.
The preparation side of a kind of optics microfluidic sensor based on diffraction effect the most according to claim 7
Method, it is characterised in that: the method being modified the regional area of sample channel processing is: utilize plated film skill
Art, uniformly adheres to thin film on sample channel surface；Carry out heating anneal process subsequently so that thin film is received
Contract and be changed into the island distribution of separation so that the surface adsorption characteristic of thin film overlay area changes shape
Becoming adsorption zone, the region not covered by thin film is inertia district.
The preparation of a kind of optics microfluidic sensor based on diffraction effect the most according to claim 7
Method, it is characterised in that: the regional area of sample channel is modified process method be: will containing
The fluid of grain thing flows through sample channel, when particulate matter touches the surface of sample channel so that with particulate matter
The characterization of adsorption of determinand is changed and forms adsorption zone by the sample channel surface of contact, does not connects with particulate matter
The sample channel surface touched is inertia district.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111615651A (en) * | 2018-11-02 | 2020-09-01 | 伟摩有限责任公司 | Parallax compensating spatial filter |
| US11921206B2 (en) | 2016-10-13 | 2024-03-05 | Waymo Llc | Limitation of noise on light detectors using an aperture |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105300955A (en) * | 2015-10-10 | 2016-02-03 | 重庆大学 | Microfluidic SERS chip detection device integrated with liquid core optical waveguide and nanometal |
| CN105329836A (en) * | 2014-07-22 | 2016-02-17 | 中国科学院微电子研究所 | Microfluidic channel, lateral laminar flow detection device and microfluidic valve |
-
2016
- 2016-04-20 CN CN201610247263.1A patent/CN105921186A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105329836A (en) * | 2014-07-22 | 2016-02-17 | 中国科学院微电子研究所 | Microfluidic channel, lateral laminar flow detection device and microfluidic valve |
| CN105300955A (en) * | 2015-10-10 | 2016-02-03 | 重庆大学 | Microfluidic SERS chip detection device integrated with liquid core optical waveguide and nanometal |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11921206B2 (en) | 2016-10-13 | 2024-03-05 | Waymo Llc | Limitation of noise on light detectors using an aperture |
| CN111615651A (en) * | 2018-11-02 | 2020-09-01 | 伟摩有限责任公司 | Parallax compensating spatial filter |
| US11561284B2 (en) | 2018-11-02 | 2023-01-24 | Waymo Llc | Parallax compensating spatial filters |
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