CN105911358A - Method and apparatus for testing thickness-direction resistance of composite thin film materials - Google Patents
Method and apparatus for testing thickness-direction resistance of composite thin film materials Download PDFInfo
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Abstract
The invention brings forward a method and apparatus for testing thickness-direction resistance of composite thin film materials. The test method is characterized in that after a conductive high-polymer layer is generated through in situ polymerization between two composite thin film materials to be tested with a controllable interval, resistance between two lead-out tabs reserved by the materials to be tested is tested for representing the thickness-direction resistance of the composite thin film materials to be tested. The test apparatus is structurally characterized in that a plurality of clamping devices are arranged in a heating cavity for clamping samples, an immersion disc with a drain valve is arranged below the clamping devices, one liquid storage liquid injection device can inject monomers, an oxidizing agent and a cleaning liquid into the immersion disc, the whole process of polymerizing the conductive high-polymer layer on the samples can be realized in a program control mode, and the clamping devices are provided with resistance test clamp chucks which are connected with resistors outside the cavity for testing resistance. The method and apparatus provided by the invention can accurately represent the thickness-direction resistance of the composite thin film materials at a normal state of no concentrated mechanical pressure, the test result is stable, the repeatability is high, and the test apparatus is stable, reliable and highly automatic.
Description
Technical field
The present invention relates to the method and device of a kind of test compound thin-film material thickness direction resistance.Specifically, the present invention relates to conductive composite film material resistance method of testing field.
Background technology
The method of the thickness direction resistance of existing sign composite film material is that four probe method measures square resistance (abbreviation sheet resistance), its basic test principle is to have four probes of equidistant arrangement on the plane probe that resistance instrument connects, four probes are connected on sheet resistance tester by four lead-in wires, when probe is pressed in above conductive film material, sheet resistance meter just can demonstrate the sheet resistance value of material immediately, concrete principle is that two probes of outer end produce current field, inner upper two probe test current fields visit the electromotive force formed on point in the two, because sheet resistance is the biggest, the electromotive force produced is the biggest, the most just can measure the sheet resistance value of material.And for corresponding most of composite film material, four probe method has two changing factors relatively big on test result impact, one is that the shape of probe is different, to the contact effect of thin-film material to be measured with pierce through effect also difference to record resistance different；Two is that the pressure of probe pressure is different, and under probe, to be pierced probability the most different for contact effect between tested pilot different material layer and interlayer, thus the resistance recorded is the most different.Conventional four probes are surveyed sheet resistance instrument and are tackled the problems referred to above by two methods: one is that the pin mouth of probe is designed as smooth semicircle, and thin-film material is pierced through effect by minimizing probe；Two is to control to test pressure so that test result has relative comparability by the design of band spring telescopic probe tip, its principle is: four probes stretch out probe and have spring assembly to connect, when probe plane is pressed against in plane detected materials, probe pressurized is retracted and is popped one's head in, probe stretches out detecting head surface length and spring force is fixed and meets certain unified standard, and the dynamics that therefore probe is pressed in detected materials is also fixing controlled.
Although four probe sheet resistance methods of testing are by using, effect is pierced through in disc probe reduction, elastic force apparatus controls pressure of popping one's head in, but can not eliminate the point pressure of this test.And for most composite film materials, the existence of the point pressure concentrated during test can change the bonding state under test point between different material layer, even produce interlayer and pierce through effect, thus change the interlayer contact resistance under this test point, thus the resistance value recorded is different from without room temperature resistance during point pressure, especially for micron or nano level microthin coating or thin-film material, easily pierce through coating or whole thin-film material makes to record resistance and is matrix resistance or pierces through resistance；Additionally, what four probe sheet resistance methods characterized is the resistance of certain area thin film material, and test philosophy is for point-like contacts method of testing, and test result is affected by difference and the point defect that may be present of different measuring point itself.
The another kind of conventional method characterizing thin-film material certain area upper section direction resistance is that solution medium surveys impedance method, two comparative electrodes are made by thin-film material to be measured being cut into definite shape, form conductive path using electrolyte as conducting medium and measure resistance or impedance, including DC impedance method and AC impedence method, DC impedance method i.e. conventional DC the resis tance method of surveying, directly obtain resistance value, be AC impedance rule be to impose small magnitude sine wave potential or the current disturbing signal of different frequency, the response signal of test electrode system, thus obtain the ac impedance spectroscopy of electrode, therefrom can go out active component by analytical separation.It it is no matter isolated active component in the resistance that obtains of D.C. resistance method of testing or ac impedance spectroscopy, all-in resistance part is all made up of solution resistance, interface resistance and detected materials resistance three part, owing to electrolyte is ionic conduction mode, there is barrier potential, and the relatively low (＜ 10 of ion conductor conductivity in ion conductive material and electronic conductive material interface-2And temperature influence is obvious S/cm), therefore the resistance of electrolyte solution is compared with big and obvious with environmental temperature fluctuation, the judgement of resistance to detected materials own can be disturbed greatly, especially for the composite film material that the electrolyte of resistance ratio ionic conduction is much lower, the error span of measurement result greatly can judge meeting serious distortion to the resistance of this material.
In order to solve the problems referred to above and the defect of the method for existing sign composite film material thickness direction resistance, the present invention provide a kind of by between relative two panels composite film material between hard carbon via in-situ polymerization layer re-test two panels composite film material the method for resistance characterize composite film material cross-wise direction resistance, and provide the device of application the method.The method of testing of the present invention and device do not have point pressure, test object to be face in test process, have evaded four probes and have surveyed the inherent shortcoming of sheet resistance method；Tested media is structural conductive macromolecular, can reach the rank close to metal by conductivity after doping, and the conductivity of the commodity of the most ripe application is 10-103S/cm, than electrolyte (＜ 10-2 S/cm) high 3-5 the order of magnitude, increasing substantially of the electric conductivity of medium own less with conducting polymer layer thickness in the inventive method makes its resistance accounting in recording resistance become the least, and the interference to certainty of measurement the most significantly diminishes；The electric conductivity temperature influence change of the conducting polymer that the present invention uses is little, make measurement ambient temperature that the interference of measurement result is also become inconspicuous, and make conductive high polymer monomer first be thoroughly impregnated with the method into composite film material surface pore to be measured in-situ polymerization again of oozing and make the electroconductive polymer layer of formation and the interface cohesion of composite film material extremely fit closely, interface resistance is relatively low, to sum up, method of testing and the device of the present invention can be evaded or reduce solution medium and survey impedance method drawbacks described above and will not produce new unfavorable factor.
Summary of the invention
The method of testing that the present invention proposes is by growing electroconductive polymer layer between the composite film material relative with certain area overlap in two panels, the resistance drawn between lug that re-test two panels composite film material reserves, its test philosophy is: electric current is drawn lug by one layer of composite film material and flowed into, composite film material coincidence face on scatter, this composite film material cross section electroconductive polymer layer-composite film material cross section is sequentially passed through in this overlapping area, again from converging by another layer of composite film material extraction lug outflow, the resistance recorded includes: composite film material cross-wise direction resistance, electroconductive polymer layer resistance, electroconductive polymer layer and the interface resistance of composite film material.The conducting polymer that the present invention selects is electronic conductor, and its conductivity is 10-103S/cm, electric conductivity is close to metal rank, and the thickness of electroconductive polymer layer is minimum in the design of the present invention, therefore the resistance of electroconductive polymer layer is relatively low, and the present invention makes conductive high polymer monomer be first thoroughly impregnated with the method into composite film material surface pore to be measured in-situ polymerization again of oozing and make the electroconductive polymer layer of formation and the interface cohesion of composite film material extremely fit closely, interface resistance is relatively low；And each influence factor of evaluating method process (such as the thickness of macromolecule layer) of the present invention is the most controlled, repeatable strong, therefore not only itself is less to record the interface resistance of the macromolecule layer resistance inside resistance and macromolecule layer/thin-film material to be measured, and by repeatedly testing, its numerical value or impact can be deducted by methods such as the composite film material demarcation of known resistance, thus obtain accurate and comparable composite film material cross-wise direction resistance information.
Test material is determined two prints that shape area is consistent by the method for testing of the present invention, respectively staggering the extraction lug respectively reserving one section of material as test after overlap to the left and right, the shape of print can be square, circular, square or round combined shaped, other irregular character；Need between faying surface after two print overlaps to reserve certain distance gap to synthesize electroconductive polymer layer, this gap is obtaining and is controlling its distance by adding certain thickness fibrous paper between two samples by the way of clamping device clamping print, and the fibrous paper of addition need to be completely covered or be more than the lap of two panels thin-film material to be measured.For soft, insufficient rigidity or the composite film material of top layer easy damaged; can add that the smooth insulating trip of two panels covers all or be more than the intersection of detected materials at its outer surface, then not damage with dispersion clamp pressure, protection material surface on smooth insulating trip with gripping apparatus grips.The grip force of clamping device used is controllable.
The conducting polymer of the electroconductive polymer layer of the present invention is the one of polyaniline, polypyrrole, polyacetylene, polythiophene, polyphenylacetylene.
The method of the fabricated in situ electroconductive polymer layer of the present invention be the method with capillary wick between two panels composite film material to be measured, suck conductive high polymer monomer or monomer solution successively, containing oxidant liquid, repolymerization generates electroconductive polymer layer.The conducting polymer of Partial Species such as polyaniline polymerization process also needs to the specific dopant necessary condition as initiation reaction, therefore use these conductive polymer period of the day from 11 p.m. to 1 a.m, conductive high polymer monomer solution or containing a kind of liquid in oxidant liquid containing the adulterant needed for this kind of conductive high polymer monomer polymerization or initiator.
Wherein add the mode preferred monomers solution of conductive high polymer monomer, the solvent coordinating low surface tension is easier to the surface pore into thin-film material to be measured of oozing, the concentration range of conductive high polymer monomer solution is 5-80wt%, needing heat drying to remove solvent after adding conductive high polymer monomer solution, heating temperature range is 40-150 DEG C.In-situ polymerization process can be to be polymerized under room temperature, it is also possible to being to be polymerized under heating condition, temperature range is 5-250 DEG C, and the time is 0.5-30h；Can be one section of direct polymerization, it is also possible to be divided into two sections of polymerizations: first paragraph low temperature polymerization, temperature range is 5-80 DEG C, and the time is 0.5-10h, second segment high temperature polymerization, and temperature range is 80-250 DEG C, and the time is 0.5-20h.Preferably two sections polymerizations.
The invention provides a kind of device using above-mentioned method of testing to carry out test compound thin-film material thickness direction resistance, its architectural feature is: some clamping devices are positioned at a cavity, chamber Ligation in vitro one resistance test instrument, its resistance test chuck is installed in cavity above clamping device two ends, cavity is arranged above a liquid injection system, contact with immersion dish after having the sample to be measured of an immersion disk clamp device clamping in cavity below clamping device, immersion dish has a controlled tapping valve；Described clamping device contains an adjustable controlled fixture of chucking power, described cavity can heat and can pass through procedure auto-control heating temperature profile, described liquid injection system is containing three set liquid storage priming devices, can inject in immersion dish in cavity the most at regular time and quantity and can individually control or coordinated signals containing monomer fluid, stored program controlled containing oxidant liquid and cleaning solvent, priming device and heater.The using method example of this device: by thin-film material cut-parts to be measured, it is clipped in the middle of the smooth insulating trip of two panels after one or both sept laminations in fibrous paper or little insulating trip in addition and becomes a testing sample, testing sample is clipped on the clamping device in cavity, on two the extraction pole ear clips in left and right, resistance test cartridge fixes, set fluid injection program and heating schedule and run, device implements " note monomer (or monomer solution) heat drying note heats polymerization macromolecule layer containing oxidant liquid by arranging temperature curve " process automatically, process opens resistance test instrument after completing, resistance value to be surveyed can be recorded.
The method of testing using the present invention can be with accurate characterization composite film material thickness direction resistance, especially for thinner thickness, easily scratch and pierce through the coating relatively low with resistance, thin-film material, focus pressure can be evaded and machinery pierces through, compare the electric conductivity under its normality good and bad.The present invention can be used to characterize ultracapacitor, the positive and negative electrode pole piece of lithium ion battery and be used as ultracapacitor, the collector of lithium ion battery and the carbon-coated aluminum foils of aluminium electrolytic capacitor cathode foil, can be with its electric conductivity of accurate characterization, it was predicted that the resistance of its device made.
Accompanying drawing explanation
Fig. 1 be the present invention method of testing in the lamination process schematic diagram of print to be measured and other appurtenances, it is illustrated that illustrate: 1. detected materials print；2. fibrous paper (electrolytic paper)；The most smooth insulating trip；4. fixture；5. resistance test fixture.
Fig. 2 is the construction module schematic diagram of assembly of the invention, it is illustrated that illustrate: 1. heating cavity；2. immersion dish；③
Tapping valve；4. clamping device；5. resistance test fixture；6. liquid injection pipe；7. liquid storage priming device；8. resistance test instrument；9. program control module.
Detailed description of the invention
Below by embodiment, the present invention is described in detail, the examples below simply meets several examples of the technology of the present invention content, explanation not present invention is limited only to the content described in following example, and the technical staff in the industry all belongs to present invention according to the product of the claims in the present invention item manufacture.
Embodiment 1Composite film material to be measured is anode slice of lithium ion battery (aluminium foil two sides composite caking agent and positive electrode, the mixed coating of the materials such as conductive agent), the strip print that pole piece to be measured is cut into 10 × 100mm is some, take two print laminations: print overlapping area is 10 × 90mm, left and right Ge Liu 10mm draws lug, the fibrous paper of a length of a film 5mm × wide 1mm × thickness 0.2mm is sandwiched between two print coincidence faces, the smooth glass sheet of a length of a film 90 × wide by 15 × thick 2mm is respectively added by print to being clipped in the middle outside two prints, on outer layer sheet glass, testing sample is made to 1 again with clip.Lamination complete after by the monomer solution as shown in table 1 and containing the immersion-polymerization procedure shown in oxidant class of liquids, table 2 to form electroconductive polymer layer.With resistance instrument test two extraction lug resistance after having synthesized.
Embodiment 2Composite film material to be measured is super-capacitor pole piece (aluminium foil two sides composite caking agent and the mixed coating of the material such as electrode material, conductive agent), the print that pole piece to be measured is cut into Φ 20mm disk band 10 × 5mm rectangle extraction lug is some, take two print laminations: print lap is Φ 20mm disk part, the disc-shaped fibrous paper of a piece of Φ 25mm is sandwiched between two print coincidence faces, respectively add the smooth ceramics of a length of a film 22 × wide by 22 × thick 1mm outside two prints by print to being clipped in the middle, then on outer layer sheet glass, make testing sample to 2 with clip.Lamination complete after by the monomer solution as shown in table 1 and containing the immersion-polymerization procedure shown in oxidant class of liquids, table 2 to form electroconductive polymer layer.With resistance instrument test two extraction lug resistance after having synthesized.
Embodiment 3Composite film material to be measured is solid aluminum electrolytic capacitor negative pole aluminum carbon composite insulating foil (aluminium foil two sides is combined carbon-coating), the strip print that detected materials is cut into 10 × 100mm is some, take two print laminations: print overlapping area is 10 × 90mm, left and right Ge Liu 10mm draws lug, outside two prints, respectively add the smooth ceramics of a length of a film 90 × wide by 15 × thick 2mm after sandwiching the fibrous paper of one layer of 12 × 95mm between two print coincidence faces again by print to being clipped in the middle, then on outer layer ceramics, make testing sample to 3 with clip.Lamination complete after by the monomer solution as shown in table 1 and containing the immersion-polymerization procedure shown in oxidant class of liquids, table 2 to form electroconductive polymer layer.With resistance instrument test two extraction lug resistance after having synthesized.
Embodiment 4Composite film material to be measured is coated steel belt (1mm thickness steel band two sides is combined Ni-Cu-P coating), the strip print that coated steel belt to be measured is cut into 20 × 100mm is some, take two print laminations: print overlapping area is 20 × 90mm, left and right Ge Liu 10mm draws lug, after sandwiching the fibrous paper of one layer of 12 × 95mm between two print coincidence faces, then it is directly sandwiched on steel band with dielectric holder and makes testing sample to 4.Lamination complete after by the monomer solution as shown in table 1 and containing the immersion-polymerization procedure shown in oxidant class of liquids, table 2 to form electroconductive polymer layer.With resistance instrument test two extraction lug resistance after having synthesized.
Embodiment 5Composite film material to be measured is lithium ion battery negative electrode (aluminium foil two sides composite caking agent and the mixed coating of the material such as positive electrode, conductive agent), the strip print that pole piece to be measured is cut into 10 × 100mm is some, take two print laminations: print overlapping area is 10 × 90mm, left and right Ge Liu 10mm draws lug, after sandwiching the fibrous paper of one layer of 15 × 100mm between two print coincidence faces, respectively add the smooth plastics sheet of a length of a film 100 × wide by 15 × thick 5mm outside two prints by print to being clipped in the middle, then on outer layer plastic sheet, make testing sample to 5 with clip.Lamination complete after by the monomer solution as shown in table 1 and containing the immersion-polymerization procedure shown in oxidant class of liquids, table 2 to form electroconductive polymer layer.With resistance instrument test two extraction lug resistance after having synthesized.
Embodiment 6nullThe use example of assembly of the invention: the strip print that thin-film material to be measured is cut into 10 × 100mm is some，Each two print is folded a pair: print overlapping area is 10 × 90mm，Left and right Ge Liu 10mm draws lug，Print is made testing sample pair to being clipped in the middle by the smooth glass sheet respectively adding length of a film 90 × wide by a 15 × thick 2mm after sandwiching the fibrous paper of one layer of 12 × 95mm between two print coincidence faces again outside two prints，4. the clamping device being clipped in cavity 1. interior is gone up by testing sample，On two the extraction pole ear clips in left and right, 5. resistance test fixture fixes，Liquid-storage system 7. in as shown in table 1, be stored in monomer and oxidizing agent solution，Set fluid injection program and heating schedule by table 2 process and run，Device automatically implement " note containing monomer fluid to immersion dish 2. clamp sample suck monomer immersion dish tapping valve 3. open injection cleaning solvent cleaning immersion dish immersion dish tapping valve 3. close heat drying note containing oxidant liquid to immersion dish 2. immersion dish tapping valve 3. open injection cleaning solvent cleaning immersion dish 2. immersion dish tapping valve 3. close by arrange temperature curve heating polymerization macromolecule layer " process，8. process opens resistance test instrument after completing，Resistance value to be surveyed can be recorded.
Table 1 conductive high polymer monomer and the class of liquids list Han oxidant
| Embodiment | Monomer | Containing oxidant liquid |
| Embodiment 1 | Aniline monomer 5wt%, the distilled water solution of sulphuric acid 5wt% | The distilled water solution of Ammonium persulfate. |
| Embodiment 2 | The acetonitrile solution of 30wt% thiophene monomer | The ethanol solution of p-methyl benzenesulfonic acid ferrum |
| Embodiment 3 | The methanol solution of 50wt% pyrrole monomer | The methanol solution of ferric chloride |
| Embodiment 4 | Purified petroleum benzin ethane monomer | The methanol solution of aluminum chloride |
| Embodiment 5 | The methanol solution of 80wt% thiophene monomer | The methanol solution of ferric chloride |
| Embodiment 6 | The methanol solution of 20wt% pyrrole monomer | The methanol solution of ferric chloride |
Table 2 conductive high polymer monomer solution and the class of liquids list Han oxidant
Claims (12)
1. the method for a test compound thin-film material thickness direction resistance, it is characterized in that: between the two panels controlled in gap composite film material to be measured, in-situ polymerization generates electroconductive polymer layer, form the sandwich of detected materials/electroconductive polymer layer/detected materials, two panels composite film material to be measured respectively stay one end as drawing lug, by measuring the thickness direction resistance of resistance characterization composite film material to be measured between two extraction lugs.
The method of a kind of test compound thin-film material thickness direction resistance the most as claimed in claim 1, it is characterised in that: described electroconductive polymer layer generates in the way of being sequentially added into conductive high polymer monomer and oxidant in-situ polymerization again.
The method of a kind of test compound thin-film material thickness direction resistance the most as claimed in claim 1, it is characterised in that: described composite film material to be measured is two-layer or the above different materials of two-layer is composited.
The method of a kind of test compound thin-film material thickness direction resistance the most as claimed in claim 1, it is characterized in that: described two panels composite film material to be measured is cut into and identical descends relative makeup in shape, and two panels composite film material left or right respectively stays one end as drawing lug；Adding certain thickness absorbency fibrous paper between described two panels composite film material to be measured, described fibrous paper is completely covered or is more than the intersection of thin-film material to be measured.
The method of a kind of test compound thin-film material thickness direction resistance the most as claimed in claim 1, it is characterised in that: described two panels composite film material to be measured outer surface pads the intersection adding a piece of smooth insulating trip to be completely covered or to be more than detected materials respectively；Clamping device is clipped on insulating trip and makes chucking power dispersed, and the chucking power of described clamping device is adjustable controlled.
The method of a kind of test compound thin-film material thickness direction resistance the most as claimed in claim 1, it is characterised in that: the conducting polymer of described electroconductive polymer layer is the one of polyaniline, polypyrrole, polyacetylene, polythiophene, polyphenylacetylene.
The method of a kind of test compound thin-film material thickness direction resistance the most as claimed in claim 1, it is characterized in that: the method for described fabricated in situ electroconductive polymer layer for sucking conductive high polymer monomer or monomer solution successively, containing oxidant liquid between two panels composite film material to be measured in capillary wick mode, and repolymerization generates electroconductive polymer layer.
8. conductive high polymer monomer solution as claimed in claim 7 or a kind of containing the adulterant needed for this kind of conductive high polymer monomer polymerization or initiator containing in oxidant liquid.
9. conductive high polymer monomer solution as claimed in claim 7, it is characterised in that: the concentration range of described conductive high polymer monomer solution is 5-80wt%.
The method of a kind of test compound thin-film material thickness direction resistance the most as claimed in claim 1, it is characterised in that: the temperature range of described in-situ polymerization is 5-250 DEG C, and the time is 0.5-30h.
The method of 11. a kind of test compound thin-film material thickness direction resistance as claimed in claim 1, it is characterised in that: described in-situ polymerization is two sections and adds heat polymerization process, and first paragraph is low temperature polymerization, and temperature range is 5-80 DEG C, and the time is 0.5-10h；Second segment is high temperature polymerization, and temperature range is 80-250 DEG C, and the time is 0.5-20h.
The device of 12. 1 kinds of test compound thin-film material thickness direction resistance, its architectural feature is: some clamping devices are positioned at a cavity, chamber Ligation in vitro one resistance test instrument, its resistance test chuck is installed in cavity above clamping device two ends, cavity is arranged above a liquid storage liquid injection system, having the immersion dish of a band tapping valve in cavity below clamping device, the sample bottom of gripping apparatus grips can contact immersion dish；Described clamping device contains an adjustable controlled fixture of chucking power, described cavity can heat and can pass through procedure auto-control heating temperature profile, described liquid storage liquid injection system is containing three set liquid storage priming devices, can inject in immersion dish containing monomer fluid in cavity the most at regular time and quantity, containing oxidant liquid and cleaning solvent, the stored program controlled of priming device and heater can individually control or coordinated signals, described tapping valve can automatically control, and link with the programme-control of liquid storage priming device and heating cavity, make fluid injection, discharge opeing, injection process is continuous, controlled.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108051645A (en) * | 2017-12-26 | 2018-05-18 | 宁夏钜晶源晶体科技有限公司 | A kind of lithium tantalate, lithium niobate crystal chip resistivity measurement device and test method |
| CN108061743A (en) * | 2017-12-13 | 2018-05-22 | 厦门大学 | A kind of polar plate of lead acid storage battery detector |
| CN109959823A (en) * | 2019-04-08 | 2019-07-02 | 天津锦美碳材科技发展有限公司 | A kind of measured material and method of the embedding lithium impedance magnitude of high-precision lithium ion battery negative electrode |
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| JPH10123190A (en) * | 1996-10-22 | 1998-05-15 | Sony Corp | Method for measuring sheet resistance of semiconductor substrate |
| CN102539927A (en) * | 2011-12-14 | 2012-07-04 | 东华大学 | Method for measuring temperature-controllable four-probe square resistance and resistivity |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108061743A (en) * | 2017-12-13 | 2018-05-22 | 厦门大学 | A kind of polar plate of lead acid storage battery detector |
| CN108051645A (en) * | 2017-12-26 | 2018-05-18 | 宁夏钜晶源晶体科技有限公司 | A kind of lithium tantalate, lithium niobate crystal chip resistivity measurement device and test method |
| CN108051645B (en) * | 2017-12-26 | 2023-10-27 | 宁夏钜晶源晶体科技有限公司 | Lithium tantalate and lithium niobate wafer resistivity testing device and testing method |
| CN109959823A (en) * | 2019-04-08 | 2019-07-02 | 天津锦美碳材科技发展有限公司 | A kind of measured material and method of the embedding lithium impedance magnitude of high-precision lithium ion battery negative electrode |
| CN109959823B (en) * | 2019-04-08 | 2021-09-24 | 天津锦美碳材科技发展有限公司 | High-precision lithium ion battery negative pole piece lithium embedding impedance measurement clamp and method |
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