CN105895806A - CuZnSnS-perovskite-based planar heterojunction solar cell and manufacturing method thereof - Google Patents

CuZnSnS-perovskite-based planar heterojunction solar cell and manufacturing method thereof Download PDF

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CN105895806A
CN105895806A CN201610380050.6A CN201610380050A CN105895806A CN 105895806 A CN105895806 A CN 105895806A CN 201610380050 A CN201610380050 A CN 201610380050A CN 105895806 A CN105895806 A CN 105895806A
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layer
tin
zinc
copper
sulfur
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刘江
廖成
梅军
何绪林
叶勤燕
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Chengdu Science and Technology Development Center of CAEP
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K30/00Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K30/00Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
    • H10K30/80Constructional details
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/549Organic PV cells

Abstract

The invention discloses a CuZnSnS-perovskite-based planar heterojunction solar cell and a manufacturing method thereof. The solar cell comprises a substrate, a transparent conducting layer, a CuZnSnS layer, a perovskite layer, an electron transport layer and a metal electrode layer from bottom to top respectively. In a cell structure disclosed by the invention, the CuZnSnS layer is taken as a hole transport layer in the cell instead of a common organic material, and a charge layer is low in material price, environmentally friendly, high in material stability, high in charge mobility, well matched with a perovskite absorbing layer in energy level and process and easy to prepare over a large area, and has a wide industrial application prospect.

Description

Based on copper-zinc-tin-sulfur perovskite planar heterojunction solaode and preparation method thereof
Technical field
The invention belongs to green energy resource technical field, relate to film photovoltaic material and devices field, particularly relate to one and adopt With copper-zinc-tin-sulfur film as the battery device of perovskite cell interface layer and preparation method.
Background technology
Ca-Ti ore type solaode was a kind of novel organic inorganic hybridization solaode, from such material in 2009 First Application in photovoltaic cell field, a few years, quickly grow.Conversion efficiency breaks through rapidly percent from 3 percent 20, the most reach the peer-level of commercialization silion cell, there is vast potential for future development.
2009, Akihiro Kojima was first by CH3NH3PbI3And CH3NH3PbBr3It is prepared as quantum dot to be applied to too In sun energy battery, it is thus achieved that the CH of 3.8%3NH3PbI3Battery conversion efficiency and the CH of 3.1%3NH3PbBr3Battery conversion efficiency. This field subsequent experimental shows that perovskite material has wide absorption spectrum and high absorption coefficient, and this characteristic is for Ca-Ti ore type too The development of sun energy battery is particularly important.The results show of Lee research group perovskite structure both can serve as light and absorb Layer can serve as again electron transfer layer.Etgar have also been made similar experiment, demonstrates calcium titanium ore bed and can function as hole transport Layer.Due to the bipolar transmission characteristic of perovskite, this just lays a good foundation for planar heterojunction perovskite solar battery structure. The use of planar heterojunction structure, greatly simplify the preparation technology of battery, reduce in preparation process for high temperature work The restriction of skill.
Current perovskite-based solar cell device structure mainly has two kinds, and one is n-i-p structure, typically has FTO/ TiO2/ perovskite/organic hole transport material/metal electrode, the battery of this structure typically requires high temperature sintering, and battery There is obvious hysteresis in power output;Another kind is p-i-n structure, typically has ITO/ organic cavity transmission layer/calcium titanium Ore deposit/organic electron transport layer/metal electrode, the battery of this structure generally uses organic transport materials, and organic transport materials Generally expensive and poor durability.Copper-zinc-tin-sulfur is a kind of direct band gap p-type semiconductor material, has the forbidden band width of 1.5eV Degree and good charge transport properties, be applied to area of solar cell.Copper-zinc-tin-sulfur film solar cell have with CIGS (CuInGaSe, the CIGS) theoretical conversion efficiencies that thin-film solar cells is identical, and do not use poisonous and rare Element.Currently used most commonly used organic hole transport material Spiro-OMeTAD is with high costs, does not utilize solar-electricity The popularization and application in pond.The application of copper-zinc-tin-sulfur inorganic hole-transporting layer has emphatically for the follow-up developments of perovskite solaode Want meaning.
Summary of the invention
In order to solve the Cost Problems of Ca-Ti ore type solaode charge transport layer, the purpose of the present invention in background technology It is to provide a kind of low cost, technique simply based on copper-zinc-tin-sulfur perovskite planar heterojunction solaode and preparation side thereof Method.
Specifically, the invention provides techniques below scheme:
The present invention provides a kind of based on copper-zinc-tin-sulfur perovskite planar heterojunction solaode, and its structure includes basal layer , and be successively set on basal layer (1) (1): transparency conducting layer (2), copper-zinc-tin-sulfur layer (3), calcium titanium ore bed (4), without dynamo-electric Sub-transport layer (5) and metal electrode layer (6).
Further, the material of described inorganic electronic transport layer (5) is zinc oxide, and its thickness is 30-500nm.
Further, the material of described basal layer (1) is glass or polyimides.Advantageous applications glass or polyamides in the present invention Imines, as base layer material, certainly can also use other similar material as basal layer, such as polyesters film, preferentially select Glass or polyimides can make battery have good dimensional stability as basal layer, reduce battery defect density, for The quality promoting solaode has great importance.
Further, during the material of described transparency conducting layer (2) is tin indium oxide (ITO) and fluorine doped tin oxide (FTO) Plant or two kinds.Tin indium oxide or fluorine doped tin oxide is used to have light transmittance high, the characteristic that resistance is low, more illumination can be made to arrive and to inhale Receipts layer, and reduce the series resistance of battery, improve solaode power delivery constant.
Further, the thickness of described copper-zinc-tin-sulfur layer (3) is 30-200nm.Copper-zinc-tin-sulfur layer is to have custerite structure Inorganic semiconductor material, there is good photo and thermal stability and high charge mobility.Copper-zinc-tin-sulfur layer and calcium titanium ore bed are joined Close, it is achieved that synergism, it is possible to significantly promote its absorption efficiency for solaode, it is ensured that the light of solaode Electricity conversion ratio.
Further, the thickness of described calcium titanium ore bed (4) is 300-500nm.The present invention use calcium titanium ore bed belong to halogenation Thing perovskite material, has ABX3One-tenth be grouped into, wherein A is methylamino (CH3NH3 +), first miaow base (HC (NH2)2+), Cs+Sun from Son or they three kinds of ions mix with certain proportion;B is bivalence Pb2+Or Sn2+Ion, X is monovalence Cl-, Br-, I-Cloudy from One or more in son, the structure of calcium titanium ore bed is to have the perovskite structure of metal halide octahedron feature.This kind of material The absorption coefficient of light of material is high, and charge transport properties is outstanding, it is possible to fully photoelectric conversion effect in solar cells, it is achieved the sun The Efficient Conversion of energy battery utilizes.
Further, the material of described inorganic electronic transport layer (5) is zinc oxide, and its thickness is 30-200nm.Use oxidation Zinc is as inorganic electronic transport layer, because zinc oxide film can protect perovskite absorbed layer by dampness as dense oxide layer Deng the erosion of environment, be conducive to improving battery context stability.
Further, the material of described metal electrode layer (6) is one or more in gold, silver, copper and aluminum.Electrode layer is even Connect output circuit, it is achieved the key of the utilization of power of photoelectric conversion, select above-mentioned metal electrode material, there is resistance low, conduction Effective feature, it is possible to promote to realize the high usage of solaode, it is to avoid electric energy loss on the line, simultaneously for The temperature of solaode controls the most helpful effect.
The present invention provide based on copper-zinc-tin-sulfur perovskite planar heterojunction solaode preparation technology, including following step Rapid:
1) take and be coated with the substrate (being the composite construction of substrate and transparency conducting layer) of transparency conducting layer, clean up.
2) preparing copper-zinc-tin-sulfur layer over transparent conductive layer, preparation method is magnetron sputtering deposition or the sulfuration of metal preformed layer Any one in method.
3) preparing calcium titanium ore bed on copper-zinc-tin-sulfur layer, preparation method is in solution spin coating, solution spraying or evaporation Any one.
4) preparing inorganic electronic transport layer on calcium titanium ore bed, preparation method is solution spin-coating method.
5) evaporation is used to prepare metal electrode layer on the electron transport layer.
Further, in above-mentioned preparation technology protocol step 2, magnetron sputtering obtains the concrete operations of copper-zinc-tin-sulfur layer and is: adopt Use copper-zinc-tin-sulfur ceramic target, with high-purity argon gas as sputter gas, use magnetron sputtering deposition copper-zinc-tin-sulfur layer, sputtering pressure 0.1~2.5Pa, preferably air pressure is 0.5~1.0Pa, and sputter temperature is 200~550 DEG C, and sputtering time is 2~20min.Magnetic control Sputtering is physical vapour deposition (PVD) (PVD) method, the advantage such as have that equipment is simple, easily controllable, plated film area is big and adhesive force is strong, Easily achieving high speed, low temperature, the processing step of low damage, the solaode for preparation high-quality has good help Meaning.Preferably, sputter temperature is 240~500 DEG C, and the temperature controlling sputtering can preferably ensure that CZTS sinks in this range Long-pending atomic ratio and deposited crystal pattern, it is achieved higher photovoltaic property.
Compared with prior art, beneficial effects of the present invention:
1. the solar battery structure of the present invention uses copper-zinc-tin-sulfur layer as inorganic charge transport layers, compared with have Machine charge transport layer is compared, and its stability of material is high, and conducts electricity very well, and advantageously reduces the internal resistance of battery device.
2. the raw material elemental of the copper-zinc-tin-sulfur Rotating fields of the solar cell application of present invention abundance in the earth's crust is big, Application cost can be reduced.
3. the solar battery structure of present invention upgrading, can be straight in original inorganic compound semiconductor thin-film technique Connect upgrading to expand, apply existing perovskite device, quickly realize large area and prepare, improve the repeatability of battery device.Environmental protection Cost-effective.
4., in the solaode of the present invention, copper-zinc-tin-sulfur layer is good with calcium titanium ore bed level-density parameter performance.Thus it is corresponding It is high that battery device has charge extraction efficiency, and the good characteristic that battery open circuit voltage is high, for the popularization and application of solaode It is significant.
Accompanying drawing illustrates:
Fig. 1 is the structural representation of the solaode of the present invention.
Fig. 2 is the surface topography photo of the copper-zinc-tin-sulfur film sample of embodiment 4 preparation.
Fig. 3 is the i-v curve that the sample prepared by embodiment 4 records.
Fig. 4 is the i-v curve that the sample prepared by embodiment 5 records.
Detailed description of the invention
Below in conjunction with test example and detailed description of the invention, the present invention is described in further detail.But this should not understood Scope for the above-mentioned theme of the present invention is only limitted to below example, and all technology realized based on present invention belong to this The scope of invention.Torr, torr, pressure unit, refer to rise the hydrargyrum in thin for children straight tube the pressure of one millimeter, i.e. represent 1/760 Atmospheric pressure again.
Embodiment 1
The substrate of glass that will be covered with tin indium oxide is washed 30 minutes with detergent, acetone, EtOH Sonicate successively, uses nitrogen Rifle dries up, and carries out UV-ozone process 5min.Substrate is put in vacuum chamber, be evacuated to 5 × 10-6Torr (torr) with Under, heating substrate, to 400 DEG C, then passes to argon and keeps vacuum to be in 0.5Pa, use medium frequency magnetron sputtering to deposit about 50nm Copper-zinc-tin-sulfur film.By the CH of 1mmol3NH3I and 1mmol PbI2It is molten to dimethylformamide (DMF) that powder is dissolved into 1mL In liquid, in solution, add 100 μ L dimethyl sulfoxide (DMSO) solution the most again, take 50 these solution of μ L and drop in copper-zinc-tin-sulfur film Surface so that it is sufficiently drawout, then rotary sample, anneal at 100 DEG C 10min subsequently by sample, it is thus achieved that thin film thickness Spend about 300nm, be perovskite thin film layer.On perovskite thin film surface, the method for employing solution spin-coating method is prepared thickness and is The ZnO electron transfer layer of 50nm, spin coating liquid used is ZnO suspension.Finally, the method for thermal evaporation is used to prepare 100nm thickness Silver electrode.The solar battery structure layer prepared is as it is shown in figure 1, be followed successively by basal layer (1), transparency conducting layer from top to bottom (2), copper-zinc-tin-sulfur layer (3), calcium titanium ore bed (4), inorganic electronic transport layer (5) and metal electrode layer (6).In intensity of illumination it is 100mW/cm2AM1.5 simulated solar irradiation irradiate under, test battery device current-voltage curve, the open circuit therefrom obtained electricity Pressure is 0.46V, and short circuit current is 8.3mA/cm2, fill factor, curve factor is 0.40, and photovoltaic energy conversion efficiency is 1.52%.
Embodiment 2
The substrate of glass that will be covered with tin indium oxide is washed 30 minutes with detergent, acetone, EtOH Sonicate successively, uses nitrogen Rifle dries up, and carries out UV-ozone process 5min.Substrate is put in vacuum chamber, be evacuated to 5 × 10-6Below torr, adds Hot substrate, to 400 DEG C, then passes to argon and keeps vacuum to be in 0.5Pa, use medium frequency magnetron sputtering to deposit the copper of about 50nm Zinc-tin-sulfur film.By the CH of 1.35mmol3NH3I and 1.35mmol PbI2Powder is dissolved into 1mL to dimethylformamide (DMF) In solution, adding 100 μ L dimethyl sulfoxide (DMSO) solution the most again in solution, taking 50 these solution of μ L, to drop in copper-zinc-tin-sulfur thin Film surface so that it is sufficiently drawout, then rotary sample, anneal at 100 DEG C 10min subsequently by sample, it is thus achieved that thin film Thickness about 400nm.On perovskite thin film surface, the method for solution spin-coating method is used to prepare the ZnO electric transmission that thickness is 50nm Layer, spin coating liquid used is ZnO suspension.Finally, the method for thermal evaporation is used to prepare the thick silver electrode of 100nm.In intensity of illumination For 100mW/cm2AM1.5 simulated solar irradiation irradiate under, test battery device current-voltage curve, the open circuit therefrom obtained Voltage is 0.48V, and short circuit current is 9.7mA/cm2, fill factor, curve factor is 0.46, and photovoltaic energy conversion efficiency is 2.14%.
Embodiment 3
The substrate of glass that will be covered with fluorine doped tin oxide is washed 30 minutes with detergent, acetone, EtOH Sonicate successively, uses nitrogen Air gun dries up, and carries out UV-ozone process 5min.Substrate is put in vacuum chamber, be evacuated to 5 × 10-6Below torr, Heating substrate, to 500 DEG C, then passes to argon and keeps vacuum to be in 0.5Pa, use medium frequency magnetron sputtering to deposit about 50nm's Copper-zinc-tin-sulfur film.By the CH of 1mmol3NH3I and 1mmol PbI2Powder is dissolved into 1mL to dimethylformamide (DMF) solution In, in solution, add 100 μ L dimethyl sulfoxide (DMSO) solution the most again, take 50 these solution of μ L and drop in copper-zinc-tin-sulfur film table Face so that it is sufficiently drawout, then rotary sample, anneal at 100 DEG C 10min subsequently by sample, it is thus achieved that film thickness About 300nm.On perovskite thin film surface, the method for solution spin-coating method is used to prepare the ZnO electron transfer layer that thickness is 50nm, institute It is ZnO suspension with spin coating liquid.Finally, the method for thermal evaporation is used to prepare the thick silver electrode of 100nm.In intensity of illumination it is 100mW/cm2AM1.5 simulated solar irradiation irradiate under, test battery device current-voltage curve, the open circuit therefrom obtained electricity Pressure is 0.89V, and short circuit current is 8.5mA/cm2, fill factor, curve factor is 0.42, and photovoltaic energy conversion efficiency is 3.18%.
Embodiment 4
The substrate of glass that will be covered with fluorine doped tin oxide is washed 30 minutes with detergent, acetone, EtOH Sonicate successively, uses nitrogen Air gun dries up, and carries out UV-ozone process 5min.Substrate is put in vacuum chamber, be evacuated to 5 × 10-6Below torr, Heating substrate, to 500 DEG C, then passes to argon and keeps vacuum to be in 0.5Pa, use medium frequency magnetron sputtering to deposit about 50nm's Copper-zinc-tin-sulfur film.By the CH of 1.35mmol3NH3I and 1.35mmol PbI2Powder is dissolved into 1mL to dimethylformamide (DMF), in solution, in solution, add 100 μ L dimethyl sulfoxide (DMSO) solution the most again, take 50 these solution of μ L and drop in copper zinc Stannum sulfur film surface so that it is sufficiently drawout, then rotary sample, anneal at 100 DEG C 10min subsequently by sample, it is thus achieved that Film thickness about 400nm.On perovskite thin film surface, the method for employing solution spin-coating method prepares the ZnO electricity that thickness is 50nm Sub-transport layer, spin coating liquid used is ZnO suspension.Finally, the method for thermal evaporation is used to prepare the thick silver electrode of 100nm.At light It is 100mW/cm according to intensity2AM1.5 simulated solar irradiation irradiate under, test battery device current-voltage curve, therefrom obtain Open-circuit voltage be 0.87V, short circuit current is 13.2mA/cm2, fill factor, curve factor is 0.48, and photovoltaic energy conversion efficiency is 5.51%.I-v curve, its result is as shown in Figure 2.
Embodiment 5
The substrate of glass that will be covered with fluorine doped tin oxide is washed 30 minutes with detergent, acetone, EtOH Sonicate successively, uses nitrogen Air gun dries up, and carries out UV-ozone process 5min.Substrate is put in vacuum chamber, be evacuated to 5 × 10-6Below torr, Heating substrate, to 500 DEG C, then passes to argon and keeps vacuum to be in 0.5Pa, use medium frequency magnetron sputtering to deposit about 100nm's Copper-zinc-tin-sulfur film, it is thus achieved that the stereoscan photograph of copper-zinc-tin-sulfur film see Fig. 3.By the CH of 1.35mmol3NH3I and 1.35mmol PbI2Powder is dissolved into 1mL in dimethylformamide (DMF) solution, adds 100 μ L bis-the most again in solution Methyl sulfoxide (DMSO) solution, takes 50 these solution of μ L and drops in copper-zinc-tin-sulfur film surface so that it is sufficiently drawout, then rotates Sample, anneal at 100 DEG C 10min subsequently by sample, it is thus achieved that film thickness about 400nm.On perovskite thin film surface, use The method of solution spin-coating method prepares the ZnO electron transfer layer that thickness is 50nm, and spin coating liquid used is ZnO suspension.Finally, use The method of thermal evaporation prepares the silver electrode that 100nm is thick.It is 100mW/cm in intensity of illumination2AM1.5 simulated solar irradiation irradiate under, The current-voltage curve of test battery device, the open-circuit voltage therefrom obtained is 0.71V, and short circuit current is 10.8mA/cm2, fill out Filling the factor is 0.42, and photovoltaic energy conversion efficiency is 3.22%.I-v curve, its result is as shown in Figure 4.

Claims (9)

1. one kind based on copper-zinc-tin-sulfur perovskite planar heterojunction solaode, it is characterised in that: include basal layer (1), and It is successively set on basal layer (1): transparency conducting layer (2), copper-zinc-tin-sulfur layer (3), calcium titanium ore bed (4), inorganic electronic are transmitted Layer (5) and metal electrode layer (6).
One the most according to claim 1 is based on copper-zinc-tin-sulfur perovskite planar heterojunction solaode, and its feature exists In: the material of described basal layer (1) is glass or polyimides.
One the most according to claim 1 is based on copper-zinc-tin-sulfur perovskite planar heterojunction solaode, and its feature exists In: the material of described transparency conducting layer (2) is one or both in tin indium oxide and fluorine doped tin oxide.
One the most according to claim 1 is based on copper-zinc-tin-sulfur perovskite planar heterojunction solaode, and its feature exists In: the thickness of described copper-zinc-tin-sulfur layer (3) is 30-200nm.
One the most according to claim 1 is based on copper-zinc-tin-sulfur perovskite planar heterojunction solaode, and its feature exists In: the thickness of described calcium titanium ore bed (4) is 300-500nm.
One the most according to claim 1 is based on copper-zinc-tin-sulfur perovskite planar heterojunction solaode, and its feature exists In: the material of described inorganic electronic transport layer (5) is zinc oxide, and its thickness is 30-200nm.
One the most according to claim 1 is based on copper-zinc-tin-sulfur perovskite planar heterojunction solaode, and its feature exists In: the material of described metal electrode layer (6) is mainly one or more in gold, silver, copper and aluminum.
8. prepare the method based on copper-zinc-tin-sulfur perovskite planar heterojunction solaode described in claim 1, its It is characterised by, comprises the steps:
1) cleaning is coated with the substrate of transparency conducting layer;
2) preparing copper-zinc-tin-sulfur layer over transparent conductive layer, preparation method is in magnetron sputtering deposition or metal preformed layer sulfuration method Any one;
3) preparing calcium titanium ore bed on copper-zinc-tin-sulfur layer, preparation method is arbitrary in solution spin coating, solution spraying, evaporation Kind;
4) preparing inorganic electronic transport layer on calcium titanium ore bed, preparation method is solution spin-coating method;
5) evaporation is used to prepare metal electrode layer on the electron transport layer.
Preparation the most according to claim 8 method based on copper-zinc-tin-sulfur perovskite planar heterojunction solaode, its It is characterised by: step 2 prepares copper-zinc-tin-sulfur layer (5), is obtained by magnetron sputtering deposition, magnetron sputtering deposition process, specifically Behaviour is taken as copper-zinc-tin-sulfur ceramic target, and with high-purity argon gas as sputter gas, sputtering pressure 0.5 ~ 1.0 Pa, sputter temperature is 200 ~ 500 DEG C, sputtering time is 2 ~ 20 min.
CN201610380050.6A 2016-05-31 2016-05-31 CuZnSnS-perovskite-based planar heterojunction solar cell and manufacturing method thereof Pending CN105895806A (en)

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CN113013340A (en) * 2021-03-03 2021-06-22 北京交通大学 Heterojunction solar cell and manufacturing method thereof
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109411553A (en) * 2018-01-26 2019-03-01 宁波工程学院 A kind of method and application of low temperature preparation copper zinc sulphur nano thin-film
CN110808333A (en) * 2019-11-05 2020-02-18 信阳师范学院 Perovskite solar cell based on copper-zinc-tin-sulfur-selenium hole transport layer and preparation method thereof
CN113823747A (en) * 2020-06-18 2021-12-21 Tcl科技集团股份有限公司 Nano material, preparation method thereof and light-emitting diode
CN113013340A (en) * 2021-03-03 2021-06-22 北京交通大学 Heterojunction solar cell and manufacturing method thereof
CN113517370A (en) * 2021-06-11 2021-10-19 上海应用技术大学 Heterogeneous structure type solar cell structure and preparation method and application thereof

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