CN105890545A - Optical detection system - Google Patents
Optical detection system Download PDFInfo
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- CN105890545A CN105890545A CN201510037307.3A CN201510037307A CN105890545A CN 105890545 A CN105890545 A CN 105890545A CN 201510037307 A CN201510037307 A CN 201510037307A CN 105890545 A CN105890545 A CN 105890545A
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Abstract
The present invention discloses an optical detection system which comprises a first optical module and a second optical module. The first optical module comprises a first light source and a first image capture unit. The first light source comprises a first optical axis. The first image capture unit has a first image capture axis. The first optical axis and the first image capture axis are symmetrically relative to the normal of a detection plane. A first angle is formed between the first optical axis and the first image capture axis. The second optical module comprises a second light source and a second image capture unit. The second light source comprises a second optical axis. The second image capture unit has a second image capture axis. The second optical axis and the second image capture axis are symmetrically relative to the normal. A second angle is formed by the second optical axis and the second image capture axis and is different from the first angle. Thus, according to the optical detection system of the invention, even an object to be detected has a mirror surface in the detection plane, most light emitted by each light source still can be reflected to the corresponding image capture unit.
Description
Technical field
The present invention relates to a kind of Systems for optical inspection, particularly to a kind of measurement in space system.
Background technology
In general, the method for the 3D shape for measuring determinand (Device Under Test, DUT) can
It is categorized as contact with contactless.Non-contact method be usually directed on the test object projection laser luminous point,
Laser beam or structure (such as, striped) light, then with point by point scanning, by-line scanning or scanning striped deformation feelings
Shape.Based on light source, object and the triangle geometrical relationship of image space, the three-dimensional shaped of determinand can be calculated
The height value of shape.
Fig. 7 is the schematic diagram of known optical detecting system 7.As it is shown in fig. 7, Systems for optical inspection 7 has
There are two light sources 70 and camera 72.Two light sources 70 lay respectively at the both sides of determinand 2, and court
Luminous to determinand 2.Camera 72 is positioned at the surface of determinand 2, anti-by determinand 2 for receiving
The light penetrated, so as to producing the corresponding image of determinand 2.
It is well known, however, that Systems for optical inspection 7 cannot be applied to some determinand, such as, there is the thing of minute surface
Body.For the object with minute surface, have substantial amounts of light and cannot be reflected onto camera 72, because
The light reflected by object follows reflection law.Therefore, the intensity by reflection light that camera 72 is received is too
Weak, cause image contrast bad, and then affect follow-up algorithm interpretation.Even if Systems for optical inspection 7 quilt
Revising to meet reflection law and so as to obtaining preferable image contrast, the image being subtracted but can occur the moon
The problems such as shadow (shadow) and deformation of image (image distortion).Deformation of image problem can pass through algorithm
Compensate, but shadow problem then cannot overcome.
So, how to propose a kind of Systems for optical inspection solving the problems referred to above, be that current industry is badly in need of
Put into development resources and carry out one of project of studying.
Summary of the invention
The present invention provides a kind of Systems for optical inspection, thus overcomes the drawbacks described above of prior art.
The present invention provides a kind of Systems for optical inspection, be used for detecting determinand (Device Under Test,
DUT).Systems for optical inspection comprises the first optical module and the second optical module.First optical module bag
Containing the first light source and the first image acquisition unit.First light source has primary optic axis.First image capture
Unit has the first image capture axle.Primary optic axis and the first image capture axle are relative to the inspection on determinand
Survey the normal of plane symmetrically.The first angle is formed between primary optic axis and the first image capture axle.Second
Optical module comprises secondary light source and the second image acquisition unit.Secondary light source has the second optical axis.The
Two image acquisition units have the second image capture axle.Second optical axis and the second image capture axle are relative to method
Line is symmetrically.Form the second angle between second optical axis and the second image capture axle, and the second angle is not
It is same as the first angle.
In an embodiment of the invention, the first above-mentioned light source and the second image acquisition unit are positioned at
The side of normal, and secondary light source and the first image acquisition unit be positioned at the opposite side of normal.
In an embodiment of the invention, the first above-mentioned angle and the second angle be 10 degree to 95
Degree.
In an embodiment of the invention, the first above-mentioned light source launches non-polarized light with secondary light source
Or polarized light.
In an embodiment of the invention, the light that the first above-mentioned light source is launched produces on the test object
Raw first candy strip.First candy strip has the first fringe spacing.The light that secondary light source is launched exists
The second candy strip is produced on determinand.Second candy strip has the second fringe spacing.Between the second striped
Away from identical with the first fringe spacing.
In an embodiment of the invention, the light that the first above-mentioned light source is launched produces on the test object
Raw first candy strip.First candy strip has the first fringe spacing.The light that secondary light source is launched exists
The second candy strip is produced on determinand.Second candy strip has the second fringe spacing.Between the second striped
Away from different from the first fringe spacing.
The present invention separately provides a kind of Systems for optical inspection, is used for detecting determinand.Systems for optical inspection comprises
First optical module and the second optical module.First optical module comprises the first light source, the first image is picked
Take unit and the first light filter.First light source has primary optic axis.First image acquisition unit has
One image capture axle.Primary optic axis and the first image capture axle are relative to the method for the detection plane on determinand
Line is symmetrically.The first angle is formed between primary optic axis and the first image capture axle.First light filter is positioned at
On first image capture axle, and there is the first transmitted spectrum.Second optical module comprise secondary light source,
Two image acquisition units and the second light filter.Secondary light source has the second optical axis.Second image capture list
Unit has the second image capture axle.Second optical axis and the second image capture axle are relative to normal symmetrically.The
The second angle is formed between two optical axises and the second image capture axle.Second angle is different from the first angle.The
Two light filters are positioned on the second image capture axle, and have the second transmitted spectrum and deviate the first transmitted spectrum.
Most of light that first light filter is launched for transmission the first light source, and reflect what secondary light source was launched
Major part light.Most of light that second light filter is launched for reflection the first light source, and transmit the second light
Most of light that source is launched.
In an embodiment of the invention, it is triple that the light that the first above-mentioned light source is launched has first
State (triplet).First triplet is substantially mated with the first transmitted spectrum.The light tool that secondary light source is launched
There is the second triplet.Second triplet is substantially mated with the second transmitted spectrum.
In an embodiment of the invention, the first light source, the second light filter and the second image capture list
Unit is positioned at the side of normal.Secondary light source, the first light filter and the first image acquisition unit are positioned at normal
Opposite side.
The present invention also provides for a kind of Systems for optical inspection, is used for detecting determinand.Systems for optical inspection comprises
First optical module and the second optical module.First optical module comprise the first image acquisition unit,
One light filter and the first light source.First image acquisition unit has the first image capture axle.First filters
Device is positioned on the first image capture axle, and has the first transmitted spectrum.First light source is for towards the first filter
Light launched by light device.Most of light that first light filter is launched for reflection the first light source.First light source quilt
The light of reflection has primary optic axis.Primary optic axis substantially overlaps with the first image capture axle.Second optics
Module comprises the second image acquisition unit, the second light filter and secondary light source.Second image acquisition unit
There is the second image capture axle.Second image capture axle and the first image capture axle system are relative on determinand
Detection plane normal symmetrically.Second light filter is positioned on the second image capture axle, and has second
Transmitted spectrum deviates the first transmitted spectrum.Secondary light source is for launching light towards the second light filter.Second filter
Light device is for reflecting most of light that secondary light source is launched.Secondary light source reflected light has the second light
Axle.Second optical axis substantially overlaps with the second image capture axle.First light filter is additionally operable to transmit the second light
Most of light that source is launched.Second light filter is additionally operable to transmit most of light that the first light source is launched.
In an embodiment of the invention, it is triple that the light that the first above-mentioned light source is launched has first
State.First triplet is substantially mated with the second transmitted spectrum.The light that secondary light source is launched has second
Triplet.Second triplet is substantially mated with the first transmitted spectrum.
In an embodiment of the invention, the first above-mentioned optical module is positioned at the side of normal, and
And second optical module be positioned at the opposite side of normal.
In an embodiment of the invention, the first above-mentioned image capture axle and the second image capture axle
Between form the first angle.Systems for optical inspection also comprises the 3rd optical module and the 4th optical module.
3rd optical module comprises the 3rd image acquisition unit, the 3rd light filter and the 3rd light source.3rd image
Acquisition unit has the 3rd image capture axle.3rd light filter is positioned on the 3rd image capture axle, and has
First transmitted spectrum.3rd light source is for launching light towards the 3rd light filter.3rd light filter is used for reflecting
Most of light that 3rd light source is launched.3rd light source reflected light has the 3rd optical axis.3rd optical axis
Substantially overlap with the 3rd image capture axle.4th optical module comprise the 4th image acquisition unit, the 4th
Light filter and the 4th light source.4th image acquisition unit has the 4th image capture axle.4th image is picked
Take axle and the 3rd image capture axle relative to normal symmetrically.3rd image capture axle and the 4th image capture
Form the second angle between axle, and the second angle is different from the first angle.4th light filter is positioned at the 4th
On image capture axle, and there is the second transmitted spectrum.4th light source is for launching light towards the 4th light filter.
Most of light that 4th light filter is launched for reflection the 4th light source.4th light source reflected light has
4th optical axis.4th optical axis substantially overlaps with the 4th image capture axle.3rd light filter is additionally operable to transmission
Most of light that 4th light source is launched.4th light filter is additionally operable to transmit the big portion that the 3rd light source is launched
Light splitting.
In an embodiment of the invention, it is triple that the light that the 3rd above-mentioned light source is launched has first
State.First triplet is substantially mated with the second transmitted spectrum.The light that 4th light source is launched has second
Triplet.Second triplet is substantially mated with the first transmitted spectrum.
In an embodiment of the invention, the 3rd above-mentioned optical module is positioned at the side of normal, and
And the 4th optical module be positioned at the opposite side of normal.
In an embodiment of the invention, the 3rd above-mentioned light source and the 4th light source launch non-polarized light
Or polarized light.
In sum, the Systems for optical inspection arrangement of the present invention makes the optical axis of each light source and corresponding image
The image capture axle of acquisition unit is relative to detecting the normal of plane symmetrically, even if therefore determinand is in inspection
Surveying and have minute surface in plane, most of light that each light source is launched still can be reflected onto the image of correspondence and pick
Take unit.Light source is placed in determinand relative to method by the Systems for optical inspection of the present invention the most respectively
The opposite sides of line, even if the image that therefore image acquisition unit is captured has shade at diverse location,
Image can the most analyzed obtain with synthesizing does not has hypographous resultant image, and therefore shadow problem is i.e.
Can be solved.Furthermore, it is understood that the Systems for optical inspection configuration of the present invention make optical axis in optical module with
The corresponding angle between image capture axle is different from the angle of another optical module, so as to promote granule with
The power of test of the problems such as short circuit.Furthermore, by adjusting above-mentioned angle, Systems for optical inspection can be amplified
Measurement scope.Additionally, by the optical filtering using the most of light only allowing the light source transmitting correspondence to be launched
Device, all of image capture unit can simultaneously pick-up image, and then can the inspection of improving optical detecting system
Survey efficiency.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the Systems for optical inspection of one embodiment of the present invention.
Fig. 2 is the schematic diagram of the measuring principle of the first candy strip and the second candy strip.
Fig. 3 is the schematic diagram of the Systems for optical inspection of another embodiment of the present invention.
Fig. 4 A is the relative light transmission about the first light filter in Fig. 3-wavelength line chart.
Fig. 4 B is the relative light transmission about the second light filter in Fig. 3-wavelength line chart.
Fig. 5 A is the relative radiated power about the first light source in Fig. 3-wavelength line chart.
Fig. 5 B is the relative radiated power about the secondary light source in Fig. 3-wavelength line chart.
Fig. 6 is the schematic diagram of the Systems for optical inspection of yet another embodiment of the present invention.
Fig. 7 is the schematic diagram of known optical detecting system.
Detailed description of the invention
Below by the multiple embodiments with the open present invention of accompanying drawing, as clearly stated, many concrete
Details will be explained in the following description.It should be appreciated, however, that these concrete details are not applied
In limiting the present invention.It is to say, in some embodiments of the present invention, these concrete details right and wrong
Necessary.Additionally, for simplifying for the sake of accompanying drawing, structure usual known in some and element in the accompanying drawings will be with
The mode of simple signal describes.
Fig. 1 is the schematic diagram of the Systems for optical inspection 1 of one embodiment of the present invention.As it is shown in figure 1,
Systems for optical inspection 1 is used for detecting determinand 2 (Device Under Test, DUT).Systems for optical inspection 1
Comprise the first optical module 10 and the second optical module 12.First optical module 10 comprises the first light source
100 and first image acquisition unit 102.First light source 100 has primary optic axis A1 alignment determinand
2.It is to say, the exiting surface of the first light source 100 is substantially facing determinand 2.First image capture list
Unit 102 has the first image capture axle B1 alignment determinand 2.It is to say, the first image acquisition unit
The receipts bright finish of 102 is substantially facing determinand 2.Primary optic axis A1 and the first image capture axle B1 relative to
The normal N of detection plane P on determinand 2 is symmetrically.Primary optic axis A1 and the first image capture axle
The first angle, φ is formed between B1.
Second optical module 12 comprises secondary light source 120 and the second image acquisition unit 122.Second light
Source 120 has the second optical axis A2 alignment determinand 2.It is to say, the exiting surface of secondary light source 120 is real
Towards determinand 2 in matter.It is to be measured that second image acquisition unit 122 has the second image capture axle B2 alignment
Thing 2.It is to say, the receipts bright finish of the second image acquisition unit 122 is substantially facing determinand 2.Second
Optical axis A2 and the second image capture axle B2 is relative to normal N symmetrically.Second optical axis A2 and the second shadow
Form the second angle Θ as capturing between axle B2, and the second angle Θ is different from the first angle, φ.
In the present embodiment, even if determinand 2 has minute surface, due to the first light in detection plane P
Reflection law is followed in the arrangement of axle A1 and the first image capture axle B1, and therefore the first light source 100 is launched
Most of light can be reflected onto the first image acquisition unit 102.Similarly, due to the second optical axis A2 with
The arrangement of the second image capture axle B2 is also in compliance with reflection law, the big portion that therefore secondary light source 120 is launched
Light splitting can be reflected onto the second image acquisition unit 122.
Furthermore, it is understood that Systems for optical inspection 1 configuration of present embodiment makes in the first optical module 10
The first angle, φ between primary optic axis A1 and the first image capture axle B1 is different from the second optical module 12
In the second optical axis A2 and the second image capture axle B2 between the second angle Θ, so as to promote determinand
The power of test of the problems such as the granule on 2 and short circuit.
In the present embodiment, the first angle, φ and the second angle Θ are 10 degree to 95 degree, but the present invention
It is not limited thereto.
In one embodiment, the first light source 100 and the second image acquisition unit 122 are positioned at normal N
Side (that is, right side of normal N), and secondary light source 120 and the first image acquisition unit 102
It is positioned at the opposite side (that is, left side of normal N) of normal N.It is to say, the first light source 100 and
Two light sources 120 are placed in the both sides of determinand 2 respectively relative to normal N.In other embodiments,
First image acquisition unit 102 and the second image acquisition unit 122 sequentially pick-up image.For example,
First light source 100 emits light into determinand 2 and the first image acquisition unit 102 captures determinand 2 simultaneously
Image, then secondary light source 120 emit light into determinand 2 and the second image acquisition unit 122 simultaneously
Capture another image of determinand 2.Operated by this, even if the first image acquisition unit 102 is captured
The left side of image and the right-hand part of image that captured of the second image acquisition unit 122 there is shade,
These images the most analyzed can obtain do not have hypographous resultant image with synthesizing.Determinand 2
3D shape can then pass through algorithm and be calculated by resultant image.Therefore, shadow problem can be by this
The Systems for optical inspection 1 of embodiment is solved.
In one embodiment, the first light source 100 launches non-polarized light with secondary light source 120.Although
First light source 100 launches non-polarized light with different incidence angles towards determinand 2 with secondary light source 120, but
Preferable uniformity can be obtained.
In one embodiment, the first light source 100 and secondary light source 120 polarized light-emitting.In order to
Obtain preferable image contrast when analyzing some defect or inclined-plane, polarized light can be used.
In one embodiment, the light that the first light source 100 is launched produces Article 1 on determinand 2
Stricture of vagina pattern, wherein the first candy strip is made up of many stripeds.The light that secondary light source 120 is launched exists
Producing the second candy strip on determinand 2, wherein the second candy strip is made up of many stripeds.First
Candy strip and the second candy strip are all equidistant multi-thread pattern.By from the point of view of different viewpoints (that is, by
One image acquisition unit 102 and the second image acquisition unit 122), the first candy strip and the second bar graph
Case presents geometry deformation because of the surface configuration of determinand 2.Observed candy strip contains many degree of depth
Clue.The displacement of striped allows to accurately acquire the three-dimensional coordinate of any details on the surface of determinand 2.
For this purpose, indivedual stripeds must identified, this can by such as follow the trail of or counting fringe and complete (scheme
Case recognition methods).
Fig. 2 is the schematic diagram of the measuring principle of the first candy strip and the second candy strip.As in figure 2 it is shown,
There is the projection of the first candy strip of the first fringe spacing P1 and there is the second of the second fringe spacing P2
The projection of candy strip all individually as minimum units of measurement, and can use this minimum units of measurement and phase
Shifting method (phase-shift method) can solve spatial altitude (i.e. the 3D shape of determinand 2) effectively.
At present, the 3D shape of determinand 2 can be reflected by image based on phase shifting method and rebuild.In phase shift side
In method, take three (typically ten) reflected image along with the striped of slight displacement to I haven't seen you for ages.The method
The first theory reduce and be dependent on the striped with sine-shaped intensity modulated, but the method is for " rectangle "
For modulation stripe, such as by liquid crystal display or optical digital computing (Digital Light Processing,
DLP) sent, be also feasible.By phase shift, the surface of 1/10 times of fringe spacing can be parsed
Details.The form of the structure light launched in view of the first light source 100 and secondary light source 120 and detection
The height of plane P, these reflected images get final product analyzed and rebuild the 3D shape of determinand 2.
In the present embodiment, the second fringe spacing P2 and the first fringe spacing P1 are different.At another
In embodiment, the second fringe spacing P2 and the first fringe spacing P1 are identical.By with different incidence angles (also
That is, angle, φ/2 in Fig. 2, Θ/2) launch light, the measurement scope of Systems for optical inspection 1 can be exaggerated.
Fig. 3 is the schematic diagram of the Systems for optical inspection 3 of another embodiment of the present invention.As it is shown on figure 3,
Systems for optical inspection 3 is also used for detecting determinand 2.Systems for optical inspection 3 comprises the first optical module 30
And second optical module 32.First optical module 30 comprises first light source the 300, first image capture list
Unit 302 and the first light filter 304.First light source 300 has primary optic axis A1 alignment determinand 2.
First image acquisition unit 302 has the first image capture axle B1 alignment determinand 2.Primary optic axis A1
With the first image capture axle B1 relative to detection plane P on determinand 2 normal N symmetrically.The
The first angle, φ is formed between one optical axis A1 and the first image capture axle B1.First light filter 304 is positioned at
On first image capture axle B1, and there is the first transmitted spectrum.
Second optical module 32 comprises secondary light source the 320, second image acquisition unit 322 and the second filter
Light device 324.Secondary light source 320 has the second optical axis A2 alignment determinand 2.Second image acquisition unit
322 have the second image capture axle B2 alignment determinand 2.Second optical axis A2 and the second image capture axle
B2 relative to detection plane P on determinand 2 normal N symmetrically.Second optical axis A2 and the second shadow
The second angle Θ is formed between axle B2 as capturing.Second light filter 324 is positioned at the second image capture axle B2
On, and there is the second transmitted spectrum deviate the first transmitted spectrum.
Most of light that first light filter 304 is launched for transmission the first light source 300, and reflect second
Most of light that light source 320 is launched.Second light filter 324 is launched for reflection the first light source 300
Most of light, and transmit most of light that secondary light source 320 is launched.In other words, the first light source
The light that 300 light launched are launched through the light transmittance of the first light filter 304 more than secondary light source 320 is worn
Cross the light transmittance of the first light filter 304, and the light that the first light source 300 is launched is through the second light filter 324
The light launched less than secondary light source 320 of light transmittance through the light transmittance of the second light filter 324.
Fig. 4 A is the relative light transmission-wavelength line chart about the first light filter 304 in Fig. 3.Fig. 4 B is
Relative light transmission-wavelength line chart about the second light filter 324 in Fig. 3.As shown in Figure 4 A and 4 B shown in FIG.,
Can clearly learn that the second transmitted spectrum deviates the first transmitted spectrum.For example, the first light filter 304
With the second light filter 324, all there are 39 tunics (not shown).Each tunic is because of its certain material and thickness
Reason, and there is specific light transmission spectrum.Therefore, the first transmitted spectrum can be by adjusting the first light filter 304
The material of film control with thickness, and the second transmitted spectrum can be by adjusting the film of the second light filter 324
Material control with thickness.
Fig. 5 A is the relative radiated power-wavelength line chart about the first light source 300 in Fig. 3.Fig. 5 B is
Relative radiated power-wavelength line chart about the secondary light source 320 in Fig. 3.As shown in Fig. 5 A and Fig. 5 B,
The light that first light source 300 is launched has the first triplet (triplet) R1, G1, B1.First triplet
R1, G1, B1 substantially the first transmitted spectrum with the first light filter 304 mates.Secondary light source 320 is sent out
The light penetrated has the second triplet R2, G2, B2.Second triplet R2, G2, B2 substantially with the second light filter
The second transmitted spectrum coupling of 324.Therefore, make the first light filter 304 transmit the first light source 300 to be launched
Most of light, and reflect most of light that secondary light source 320 is launched, and make the second light filter 324
Reflect most of light that the first light source 300 is launched, and transmit the major part that secondary light source 320 is launched
The purpose of light can be reached.
According to above-mentioned configuration, the first light source 300 can be launched simultaneously towards determinand 2 with secondary light source 320
Light, and the first image acquisition unit 302 and the second image acquisition unit 322 can capture determinand 2 simultaneously
Image, and then can the detection efficiency of improving optical detecting system 3.
In the present embodiment, even if determinand 2 has minute surface in detection plane P, the first light source 300
The most of light launched still can be reflected onto the first image acquisition unit 302 because primary optic axis A1 with
Reflection law is followed in the arrangement of the first image capture axle B1, and similarly, it is big that secondary light source 320 is launched
Part light still can be reflected onto the second image acquisition unit 322, because the second optical axis A2 and the second image are picked
Take the arrangement of axle B2 also in compliance with reflection law.
Furthermore, it is understood that Systems for optical inspection 3 configuration of present embodiment makes the of the first optical module 30
The first angle, φ between one optical axis A1 and the first image capture axle B1 is different from the second optical module 32
The second optical axis A2 and the second image capture axle B2 between the second angle Θ, and then determinand can be promoted
The power of test of the problems such as the granule on 2 and short circuit.
In one embodiment, the first angle, φ and the second angle Θ are 10 degree to 95 degree, but this
Bright it is not limited thereto.
In the present embodiment, the first light source the 300, second light filter 324 and the second image acquisition unit
322 sides (that is, right side of normal N) being positioned at normal N, and secondary light source the 320, first light filter
304 and first image acquisition unit 302 be positioned at the opposite side (that is, left side of normal N) of normal N.Also
That is, the first light source 300 is placed in determinand 2 respectively with secondary light source 320 relative to normal N
Both sides.As mentioned before, the first image acquisition unit 302 and the second image acquisition unit 322 can
Pick-up image simultaneously.Configured by this, though the left side of image that the first image acquisition unit 302 is captured
The right-hand part of the image that half portion and the second image acquisition unit 322 are captured has shade (because first filters
Light device 304 and the second light filter 324 the most only allow the first light source 300 to be launched with secondary light source 320
Light transmission), these images can the most analyzed with synthesis and obtain do not have hypographous resultant image.
The 3D shape of determinand 2 can then pass through algorithm and be calculated by resultant image.Therefore, shade is asked
Topic also can be solved by the Systems for optical inspection 3 of present embodiment.
In one embodiment, the first light source 300 launches non-polarized light with secondary light source 320.Although
First light source 300 launches non-polarized light with different incidence angles towards determinand 2 with secondary light source 320, but
Preferable uniformity can be obtained.
In one embodiment, the first light source 300 and secondary light source 320 polarized light-emitting.In order to
Obtain preferable image contrast when analyzing some defect or inclined-plane, polarized light can be used.
In one embodiment, the light that the first light source 300 is launched produces Article 1 on determinand 2
Stricture of vagina pattern, wherein the first candy strip is made up of many stripeds.The light that secondary light source 320 is launched exists
Producing the second candy strip on determinand 2, wherein the second candy strip is made up of many stripeds.To be measured
The 3D shape of thing 2 can be reflected by image based on aforesaid pattern recognition method and phase shifting method and be rebuild,
No longer describe at this.
Fig. 6 is the schematic diagram of the Systems for optical inspection 5 of yet another embodiment of the present invention.As shown in Figure 6,
Systems for optical inspection 5 is also used for detecting determinand 2.Systems for optical inspection 5 comprises the first optical module 50
And second optical module 52.First optical module 50 comprises the first image acquisition unit 500, first and filters
Light device 502 and the first light source 504.First image acquisition unit 500 has the first image capture axle B1
Alignment determinand 2.First light filter 502 is positioned on the first image capture axle B1, and has the first transmission
Spectrum.First light source 504 is for launching light towards the first light filter 502.First light filter 502 is used for
Reflect most of light that the first light source 504 is launched.First light source 504 reflected light has the first light
Axle A1, and primary optic axis A1 substantially overlaps with the first image capture axle B1.
Second optical module 52 comprises second image acquisition unit the 520, second light filter 522 and second
Light source 524.Second image acquisition unit 520 has the second image capture axle B2 alignment determinand 2.The
Two image capture axle B2 and the first image capture axle B1 are relative to the method for detection plane P on determinand 2
Line N is symmetrically.Second light filter 522 is positioned on the second image capture axle B2, and has the second transmission light
Spectrum deviation the first transmitted spectrum.Secondary light source 524 is for launching light towards the second light filter 522.Second
Light filter 522 is for reflecting most of light that secondary light source 524 is launched.Secondary light source 524 is reflected
Light there is the second optical axis A2, and the second optical axis A2 substantially overlaps with the second image capture axle B2.
First light filter 502 is additionally operable to transmit most of light that secondary light source 524 is launched, and second filters
Light device 522 is additionally operable to transmit most of light that the first light source 504 is launched.In other words, the first light source
The light that 504 light launched are launched through the light transmittance of the second light filter 522 more than secondary light source 524 is worn
Cross the light transmittance of the second light filter 522, and the light that the first light source 504 is launched is through the first light filter 502
The light launched less than secondary light source 524 of light transmittance through the light transmittance of the first light filter 502.
As shown in Figure 4 A and 4 B shown in FIG., can clearly learn that the second transmitted spectrum deviates the first transmitted spectrum.
As shown in Fig. 5 A and Fig. 5 B, the light that the first light source 504 is launched has the first triplet R1, G1, B1.
First triplet R1, G1, B1 substantially mate with the second transmitted spectrum.The light that secondary light source 524 is launched
There is the second triplet R2, G2, B2.Second triplet R2, G2, B2 substantially with the first transmitted spectrum
Join.Therefore, make the first light filter 502 transmit most of light that secondary light source 524 is launched, and reflect
Most of light that first light source 504 is launched, and make the second light filter 522 reflect secondary light source 524
The most of light launched, and the purpose transmitting most of light that the first light source 504 is launched can reach.
According to above-mentioned configuration, the first light source 504 can be launched simultaneously towards determinand 2 with secondary light source 524
Light, and the first image acquisition unit 500 and the second image acquisition unit 520 can capture determinand 2 simultaneously
Image, and then can the detection efficiency of improving optical detecting system 5.
In the present embodiment, even if determinand 2 has minute surface in detection plane P, the first light source 504
The most of light launched still can be reflected onto the second image acquisition unit 520 because primary optic axis A1 with
Reflection law is followed in the arrangement of the second image capture axle B2, and similarly, it is big that secondary light source 524 is launched
Part light still can be reflected onto the first image acquisition unit 500, because the second optical axis A2 and the first image are picked
Take the arrangement of axle B1 also in compliance with reflection law.
In one embodiment, the first optical module 50 is positioned at the side of normal N (that is, normal N
Left side), and the second optical module 52 is positioned at the opposite side (that is, right side of normal N) of normal N.
It is to say, the first light source 504 is placed in determinand 2 respectively with secondary light source 524 relative to normal N
Both sides.As mentioned before, the first image acquisition unit 500 and the second image acquisition unit 520
Can simultaneously pick-up image.Configured by this, even if the image that captured of the first image acquisition unit 500
The right-hand part of the image that left side and the second image acquisition unit 520 are captured has shade (because of first
Light filter 502 and the second light filter 522 the most only allow secondary light source 524 and the first light source 504 to be sent out
The light transmission penetrated), these images the most analyzed can obtain do not have hypographous resultant image with synthesizing.
The 3D shape of determinand 2 can then pass through algorithm and be calculated by resultant image.Therefore, shade is asked
Topic also can be solved by the Systems for optical inspection 5 of present embodiment.
In one embodiment, the first light source 504 launches non-polarized light with secondary light source 524.Although
First light source 504 launches non-polarized light with different incidence angles towards determinand 2 with secondary light source 524, but
Preferable uniformity can be obtained.
In one embodiment, the first light source 504 and secondary light source 524 polarized light-emitting.In order to
Obtain preferable image contrast when analyzing some defect or inclined-plane, polarized light can be used.
As shown in Figure 6, Systems for optical inspection 5 also comprises the 3rd optical module 54 and the 4th optical module
56.3rd optical module 54 comprises the 3rd image acquisition unit the 540, the 3rd light filter 542 and the 3rd
Light source 544.3rd image acquisition unit 540 has the 3rd image capture axle B3 alignment determinand 2.The
Three light filters 542 are positioned on the 3rd image capture axle B3, and have the first transmitted spectrum.3rd light source
544 for launching light towards the 3rd light filter 542.3rd light filter 542 is for reflection the 3rd light source 544
The most of light launched.3rd light source 544 reflected light has the 3rd optical axis A3, and the 3rd optical axis
A3 substantially overlaps with the 3rd image capture axle B3.4th optical module 56 comprises the 4th image capture list
Unit's the 560, the 4th light filter 562 and the 4th light source 564.4th image acquisition unit 560 has the 4th
Image capture axle B4 aligns determinand 2.4th image capture axle B4 and the 3rd image capture axle B3 is relative
In normal N symmetrically.4th light filter 562 is positioned on the 4th image capture axle B4, and it is saturating to have second
Penetrate spectrum.4th light source 564 is for launching light towards the 4th light filter 562.4th light filter 562 is used
In most of light that reflection the 4th light source 564 is launched.4th light source 564 reflected light has the 4th
Optical axis A4, and the 4th optical axis A4 substantially overlaps with the 4th image capture axle B4.
It is noted that the 3rd light filter 542 is additionally operable to transmit the major part that the 4th light source 564 is launched
Light, and the 4th light filter 562 is additionally operable to transmit most of light that the 3rd light source 544 is launched.In other words
Saying, the light that the 3rd light source 544 is launched is more than the 4th light source 564 through the light transmittance of the 4th light filter 562
The light launched is through the light transmittance of the 4th light filter 562, and the light that the 3rd light source 544 is launched passes
The light that the light transmittance of the 3rd light filter 542 is launched less than the 4th light source 564 passes the 3rd light filter 542
Light transmittance.
As shown in Figure 4 A and 4 B shown in FIG., can clearly learn that the second transmitted spectrum deviates the first transmitted spectrum.
Coordinating with reference to Fig. 5 A and Fig. 5 B, the light that the 3rd light source 544 is launched has the first triplet R1, G1, B1.
First triplet R1, G1, B1 substantially mate with the second transmitted spectrum.The light that 4th light source 564 is launched
There is the second triplet R2, G2, B2.Second triplet R2, G2, B2 substantially with the first transmitted spectrum
Join.Therefore, make the 3rd light filter 542 transmit most of light that the 4th light source 564 is launched, and reflect
Most of light that 3rd light source 544 is launched, and make the 4th light filter 562 reflect the 4th light source 564
The most of light launched, and the purpose transmitting most of light that the 3rd light source 544 is launched can reach.
According to above-mentioned configuration, the 3rd light source 544 can be launched simultaneously towards determinand 2 with the 4th light source 564
Light, and the 3rd image acquisition unit 540 and the 4th image acquisition unit 560 can capture determinand 2 simultaneously
Image, and then can the detection efficiency of improving optical detecting system 5.
In the present embodiment, even if determinand 2 has minute surface in detection plane P, the 3rd light source 544
The most of light launched still can be reflected onto the 4th image acquisition unit 560 because the 3rd optical axis A3 with
Reflection law is followed in the arrangement of the 4th image capture axle B4, and similarly, it is big that the 4th light source 564 is launched
Part light still can be reflected onto the 3rd image acquisition unit 540, because the 4th optical axis A4 and the 3rd image are picked
Take the arrangement of axle B3 also in compliance with reflection law.
In one embodiment, the 3rd optical module 54 is positioned at the side of normal N (that is, normal N
Right side), and the 4th optical module 56 is positioned at the opposite side (that is, left side of normal N) of normal N.
It is to say, the 3rd light source 544 and the 4th light source 564 are placed in determinand 2 respectively relative to normal N
Both sides.As mentioned before, the 3rd image acquisition unit 540 and the 4th image acquisition unit 560
Can simultaneously pick-up image.Configured by this, even if the image that captured of the 3rd image acquisition unit 540
The left side of the image that right-hand part and the 4th image acquisition unit 560 are captured has shade (because of the 3rd
Light filter 542 and the 4th light filter 562 the most only allow the 4th light source 564 and the 3rd light source 544 to be sent out
The light transmission penetrated), these images the most analyzed can obtain do not have hypographous resultant image with synthesizing.
The 3D shape of determinand 2 can then pass through algorithm and be calculated by resultant image.Therefore, shade is asked
Topic also can be solved by the Systems for optical inspection 5 of present embodiment.
In one embodiment, formed between the first image capture axle B1 and the second image capture axle B2
First angle, φ.The second angle Θ is formed between 3rd image capture axle B3 and the 4th image capture axle B4,
And the second angle Θ is different from the first angle, φ.Systems for optical inspection 5 configuration of present embodiment makes the
First image capture axle B1 of one optical module 50 and the second image capture axle of the second optical module 52
The first angle, φ between B2 is different from the 3rd image capture axle B3 and the 4th light of the 3rd optical module 54
Learn the second angle Θ between the 4th image capture axle B4 of module 56, and then can promote on determinand 2
The power of test of problem such as granule and short circuit.
In one embodiment, the first angle, φ and the second angle Θ are 10 degree to 95 degree, but this
Bright it is not limited thereto.
In one embodiment, the 3rd light source 544 and the 4th light source 564 launch non-polarized light.Although
3rd light source 544 and the 4th light source 564 launch non-polarized light with different incidence angles towards determinand 2, but
Preferable uniformity can be obtained.
In one embodiment, the 3rd light source 544 and the 4th light source 564 polarized light-emitting.In order to
Obtain preferably image contrast when analyzing some defect or inclined-plane, polarized light can be used.
It should be noted that the Systems for optical inspection 5 of present embodiment uses four groups of optical modules, therefore
The present embodiment embodiment compared to Fig. 3 can obtain more information.
By the detailed description of the above specific embodiment for the present invention, it is apparent that the light of the present invention
Learning detecting system arrangement makes the optical axis of each light source relative with the image capture axle of corresponding image acquisition unit
In detecting the normal of plane symmetrically, even if therefore determinand has minute surface, Mei Yiguang in detection plane
Most of light that source is launched still can be reflected onto the image acquisition unit of correspondence.The optical detection of the present invention
Light source is placed in the determinand opposite sides relative to normal by system the most respectively, though therefore shadow
The image captured as acquisition unit has shade at diverse location, and image can the most analyzed and synthesis
And obtain and do not have hypographous resultant image, therefore shadow problem can be solved.Furthermore, it is understood that this
The Systems for optical inspection configuration of invention makes the angle between the optical axis in optical module and corresponding image capture axle
Degree is different from the angle of another optical module, so as to promoting the power of test of the problem such as granule and short circuit.Again
Person, by adjusting above-mentioned angle, can amplify the measurement scope of Systems for optical inspection.Additionally, by using
The light filter of most of light that the light source only allowing transmission corresponding is launched, all of image capture unit is i.e.
Can simultaneously pick-up image, and then can the detection efficiency of improving optical detecting system.
Although the present invention is open as above with embodiment, so it is not intended to limit the present invention, Ren Heben
Skilled person, without departing from the spirit and scope of the present invention, can make various different selection and repair
Changing, therefore protection scope of the present invention is limited by claims and equivalents thereof.
Claims (20)
1. a Systems for optical inspection, is used for detecting determinand, it is characterised in that described optical detection system
System comprises:
First optical module, it comprises:
First light source, it has primary optic axis；And
First image acquisition unit, it has the first image capture axle, wherein said primary optic axis with
Described first image capture axle relative to the detection plane on described determinand normal symmetrically, and institute
State and form the first angle between primary optic axis and described first image capture axle；And
Second optical module, it comprises:
Secondary light source, it has the second optical axis；And
Second image acquisition unit, it has the second image capture axle, wherein said second optical axis with
Described second image capture axle relative to described normal symmetrically, described second optical axis and described second image
Capture and form the second angle between axle, and described second angle is different from described first angle.
2. Systems for optical inspection as claimed in claim 1, it is characterised in that described first light source and institute
State the second image acquisition unit and be positioned at the side of described normal, and described secondary light source and described first shadow
As acquisition unit is positioned at the opposite side of described normal.
3. Systems for optical inspection as claimed in claim 1, it is characterised in that described first angle and institute
Stating the second angle is 10 degree to 95 degree.
4. Systems for optical inspection as claimed in claim 1, it is characterised in that described first light source and institute
State secondary light source and launch non-polarized light or polarized light.
5. Systems for optical inspection as claimed in claim 1, it is characterised in that described first light source is sent out
The light penetrated produces the first candy strip on described determinand, and described first candy strip has the first striped
Spacing, the light that described secondary light source is launched produces the second candy strip on described determinand, and described
Two candy strips have the second fringe spacing, and described second fringe spacing and described first fringe spacing
Identical.
6. Systems for optical inspection as claimed in claim 1, it is characterised in that described first light source is sent out
The light penetrated produces the first candy strip on described determinand, and described first candy strip has the first striped
Spacing, the light that described secondary light source is launched produces the second candy strip on described determinand, and described
Two candy strips have the second fringe spacing, and described second fringe spacing and described first fringe spacing
Different.
7. a Systems for optical inspection, is used for detecting determinand, it is characterised in that described optical detection system
System comprises:
First optical module, it comprises:
First light source, it has primary optic axis；
First image acquisition unit, it has the first image capture axle, and wherein said primary optic axis is with described
First image capture axle relative to the detection plane on described determinand normal symmetrically, and described
The first angle is formed between one optical axis and described first image capture axle；And
First light filter, it is positioned on described first image capture axle, and has the first transmitted spectrum；
And
Second optical module, it comprises:
Secondary light source, it has the second optical axis；
Second image acquisition unit, it has the second image capture axle, wherein said second optical axis with
Described second image capture axle relative to described normal symmetrically, described second optical axis and described second image
Capture and form the second angle between axle, and described second angle is different from described first angle；And
Second light filter, it is positioned on described second image capture axle, and has the second transmitted spectrum
Deviate described first transmitted spectrum,
Wherein said first light filter is for transmitting most of light that described first light source is launched, and reflects
Most of light that described secondary light source is launched, and described second light filter is used for reflecting described first light
Most of light that source is launched, and transmit most of light that described secondary light source is launched.
8. Systems for optical inspection as claimed in claim 7, it is characterised in that described first light source is sent out
The light penetrated has the first triplet, and described first triplet is mated with described first transmitted spectrum, and described
The light that two light sources are launched has the second triplet, and described second triplet and described second transmission light
Spectrum coupling.
9. Systems for optical inspection as claimed in claim 7, it is characterised in that described first light source, institute
State the second light filter and described second image acquisition unit and be positioned at the side of described normal, and described second
Light source, described first light filter and described first image acquisition unit are positioned at the opposite side of described normal.
10. Systems for optical inspection as claimed in claim 7, it is characterised in that described first angle and institute
Stating the second angle is 10 degree to 95 degree.
11. Systems for optical inspections as described in claim 7, it is characterised in that described first light source with
Described secondary light source launches non-polarized light or polarized light.
12. 1 kinds of Systems for optical inspections, are used for detecting determinand, it is characterised in that described optical detection system
System comprises:
First optical module, it comprises:
First image acquisition unit, it has the first image capture axle；
First light filter, it is positioned on described first image capture axle, and has the first transmitted spectrum；
And
First light source, it is for launching light towards described first light filter, and wherein said first filters
Device is for reflecting most of light that described first light source is launched, and described first light source reflected light has
Primary optic axis, and described primary optic axis overlaps with described first image capture axle；And
Second optical module, it comprises:
Second image acquisition unit, it has the second image capture axle, and wherein said second image is picked
Take axle and described first image capture axle relative to the detection plane on described determinand normal symmetrically；
Second light filter, it is positioned on described second image capture axle, and has the second transmitted spectrum
Deviate described first transmitted spectrum；And
Secondary light source, it is for launching light towards described second light filter, and wherein said second filters
Device is for reflecting most of light that described secondary light source is launched, and described secondary light source reflected light has
Second optical axis, and described second optical axis overlaps with described second image capture axle,
Wherein said first light filter is additionally operable to transmit most of light that described secondary light source is launched, and
Described second light filter is additionally operable to transmit most of light that described first light source is launched.
13. Systems for optical inspections as claimed in claim 12, it is characterised in that described first light source institute
The light launched has the first triplet, and described first triplet is mated with described second transmitted spectrum, described
The light that secondary light source is launched has the second triplet, and described second triplet and described first transmission
Spectral matching.
14. Systems for optical inspections as claimed in claim 12, it is characterised in that described first optical mode
Block is positioned at the side of described normal, and described second optical module is positioned at the opposite side of described normal.
15. Systems for optical inspections as claimed in claim 12, it is characterised in that described first light source with
Described secondary light source launches non-polarized light or polarized light.
16. Systems for optical inspections as claimed in claim 12, it is characterised in that described first image is picked
Take and form the first angle between axle and described second image capture axle, and described Systems for optical inspection also wraps
Contain:
3rd optical module, it comprises:
3rd image acquisition unit, it has the 3rd image capture axle；
3rd light filter, it is positioned on described 3rd image capture axle, and has described first transmission
Spectrum；And
3rd light source, it is for launching light towards described 3rd light filter, and the wherein said 3rd filters
Device is for reflecting most of light that described 3rd light source is launched, and described 3rd light source reflected light has
3rd optical axis, and described 3rd optical axis overlaps with described 3rd image capture axle；And
4th optical module, it comprises:
4th image acquisition unit, it has the 4th image capture axle, and wherein said 4th image is picked
Take axle and described 3rd image capture axle relative to described normal symmetrically, described 3rd image capture axle with
Form the second angle between described 4th image capture axle, and described second angle is different from described first
Angle；
4th light filter, it is positioned on described 4th image capture axle, and has described second transmission
Spectrum；And
4th light source, it is for launching light towards described 4th light filter, and the wherein said 4th filters
Device is for reflecting most of light that described 4th light source is launched, and described 4th light source reflected light has
4th optical axis, and described 4th optical axis overlaps with described 4th image capture axle,
Wherein said 3rd light filter is additionally operable to transmit most of light that described 4th light source is launched, and
Described 4th light filter is additionally operable to transmit most of light that described 3rd light source is launched.
17. Systems for optical inspections as claimed in claim 16, it is characterised in that described 3rd light source institute
The light launched has the first triplet, and described first triplet is mated with described second transmitted spectrum, described
The light that 4th light source is launched has the second triplet, and described second triplet and described first transmission
Spectral matching.
18. Systems for optical inspections as claimed in claim 16, it is characterised in that described 3rd optical mode
Block is positioned at the side of described normal, and described 4th optical module is positioned at the opposite side of described normal.
19. Systems for optical inspections as claimed in claim 16, it is characterised in that described first angle with
Described second angle is 10 degree to 95 degree.
20. Systems for optical inspections as claimed in claim 16, it is characterised in that described 3rd light source with
Described 4th light source launches non-polarized light or polarized light.
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| CN201510037307.3A CN105890545B (en) | 2015-01-26 | 2015-01-26 | Systems for optical inspection |
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Cited By (1)
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