CN105865495A - Position-detecting device - Google Patents
Position-detecting device Download PDFInfo
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- CN105865495A CN105865495A CN201610450356.4A CN201610450356A CN105865495A CN 105865495 A CN105865495 A CN 105865495A CN 201610450356 A CN201610450356 A CN 201610450356A CN 105865495 A CN105865495 A CN 105865495A
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- magnetic head
- lever
- holding wire
- magnetic
- detecting device
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Geophysics And Detection Of Objects (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
The invention provides a position-detecting device. A longitudinal magnetic head and a horizontal magnetic head are arranged for enhancing the magnetic induction between the magnetic head and a signal wire induction end; after the magnetic head repeatedly tilts and falls off and the relative position between the magnetic head and the signal wire induction end is shifted, the signal wire induction end can normally sense the magnetic head; one end of a linkage rod is rotatably connected with one end of a lever close to one end of the magnetic head; one end of a magnetic shielding plate is rotatably connected with the other end of the linkage rod; the linkage rod and the magnetic shielding plate are arranged, so that the linkage rod is driven by the lever to cover the magnetic shielding plate on the signal wire induction end so as to shield the detection when the magnetic head is tilted, and the poor induction of the induction signal caused by oversize magnetic force of the magnetic head is prevented; a cleaning unit is arranged for cleaning the magnetic head and the signal wire induction end, so that the magnetic head and the signal wire induction end are prevented from crystallizing and generating poor induction, the probability of poor induction is reduced, the crash times of the position-detecting device can be further reduced, the yield and capacity of products are promoted and the production cost is lowered.
Description
Technical field
The present invention relates to display floater manufacturing technology field, particularly relate to a kind of position detecting device.
Background technology
Liquid crystal display (Liquid Crystal Display, LCD) has that fuselage is thin, power saving, radiationless etc.
Many merits, is widely used, such as: mobile phone, personal digital assistant (PDA), numeral
Camera, computer screen or notebook computer screen etc..
Thin Film Transistor-LCD generally comprises housing, the liquid crystal panel being located in housing and is located at shell
Internal backlight module (Backlight module).Wherein, the structure of liquid crystal panel is by a film crystal
Pipe array base palte (Thin Film Transistor Array Substrate, TFT Array Substrate), a coloured silk
Colo(u)r filter substrate (Color Filter, CF) and a liquid crystal layer being configured between two substrates
(Liquid Crystal Layer) is constituted, and its operation principle is by applying driving on two panels glass substrate
Voltage controls the rotation of the liquid crystal molecule of liquid crystal layer, and the light of backlight module is reflected generation picture
Face.
The processing procedure process of above-mentioned TFT-LCD generally comprises: leading portion array (Array) processing procedure, mainly manufactures
TFT substrate and CF substrate；Stage casing becomes box (Cell) processing procedure, mainly TFT substrate is pasted with CF substrate
Close, add liquid crystal between, form liquid crystal panel；And back segment module group assembling processing procedure, mainly will
Other parts such as liquid crystal panel and backlight module, PCB etc. assemble.
Leading portion array process includes again: the cleaning of glass substrate and dry, plated film, resist coating, exposure
Light, develop, etch, remove the processing procedures such as photoresist.Etch process is divided into dry etching and wet etching.
Wet etching is to use liquid chemical reagent, i.e. unglazed photoresist removed in the way of chemical attack by etching medicinal liquid
The thin film covered, to form required circuit pattern on the glass substrate.
In prior art, typically can position detecting device be set in cleaning machine and etching machines, with sensing
Whether the position at this position detecting device place has glass substrate to enter.Refer to Fig. 1, existing for one
The structural representation of position detecting device, including: pedestal 1 ', the installation portion 3 ' being positioned on pedestal 1 ',
Can rotate be installed on installation portion 3 ' lever 2 ', the magnetic head 4 ' being installed on lever 2 ' one end, be located at lever
The roller 5 ' of the 2 ' other ends and the holding wire induction end 6 ' being installed on pedestal 1 '.Due to described magnetic head 4 '
Weight more than roller 5 ', when the position at this position detecting device place without glass substrate through out-of-date, magnetic head
4 ' keep contact condition with holding wire induction end 6 ', and holding wire induction end 6 ' is by induced signal transmission extremely display
Board, is shown as off state, represents glass substrate not in this position；When glass substrate in-position is examined
When knowing device position, roller 5 ' is pressed down, and magnetic head 4 ' tilts and separates with holding wire induction end 6 ', sense
Induction signal disappears, and display board is shown as on state, represents position of glass substrate at this.
There is several defect in this position detecting device: first, holding wire induction end 6 ' because of can not with acid,
And the contact such as Organic substance, need to be at outer surface parcel protection plastics so that magnetic head 4 ' and holding wire induction end 6 '
Can not directly contact, easily cause sensing bad；Second, it is impossible to use the magnetic head of strong magnetic force, because by force
When the magnetic head of magnetic force can cause glass substrate down-pressure roller 5 ', magnetic head 4 ' separates but with holding wire induction end 6 '
Still keep sense state, cause sensing bad；3rd, repeatedly tilt because of magnetic head 4 ' and fall, magnetic head 4 ' with
The relative position of holding wire induction end 6 ' easily changes, although causing magnetic head 4 ' to fall, holding wire senses
End 6 ' but senses the situation less than signal, causes sensing bad；4th, when this position detecting device is used for
During tin indium oxide (ITO) etching machine, owing to this board easily crystallizes, when board is in idle state
Time, magnetic head 4 ' and the holding wire induction end 6 ' of position detecting device can separate out crystal, cause sensing bad.
The bad situation of above-mentioned several sensing all can cause works as machine, causes product rejection, meanwhile, every time equal when machine
Need the relative position of the magnetic head 4 ' readjusting position detecting device and holding wire induction end 6 ', expend big
The amount time, thus affect production capacity.
Summary of the invention
It is an object of the invention to provide a kind of position detecting device, it is possible to reduce the sense of position detecting device
Should bad probability, and then reduce position detecting device when machine number of times, improving product yield and production capacity, fall
Low production cost.
For achieving the above object, the present invention provides a kind of position detecting device, including: pedestal, is positioned at base
Installation portion on seat, can rotate be installed on installation portion lever, be installed on the magnetic head of lever one end, one
End can be rotationally connected with the lever gangbar near magnetic head one end, can be rotationally connected with the gangbar other end
Magnetic shield panel and the holding wire induction end being installed on pedestal；When not having external force to put on lever, thick stick
Because of gravity down, magnetic head produces magnetic induction with holding wire induction end in bar one end；When the lever other end is by external force
Effect, lever one end rotates, and magnetic head moves towards away from holding wire induction end direction, and described gangbar drives
Magnetic shield panel is placed in holding wire induction end, and described magnetic head and holding wire induction end do not produce sensing, pass through
Whether magnetic head realizes two diverse location state instructions with the sensing of holding wire induction end.
Described pedestal is provided with accepting groove, and described holding wire induction end is contained in accepting groove, when lever another
Holding by External Force Acting, lever one end rotates, and described gangbar drives magnetic shield panel to be placed on pedestal to induction signal
On the accepting groove of line induction end.
The described lever other end is provided with roller, puts on rolling with the external force when the lever other end is by External Force Acting
On wheel.
The quantity of described magnetic head is two, is respectively defined as longitudinal magnetic head and transverse head.
Described longitudinal magnetic head is located on the one side of described lever one end；Described transverse head is adjacent to longitudinal flux
Head is arranged, not have external force to put on lever, lever one end because of gravity down time, strengthen magnetic head and letter
Number line induction end produces magnetic induction.
Described magnetic shield panel includes a barricade portion, is connected to the connecting portion in barricade portion and is located at connection
Rotating shaft in portion, the described gangbar other end is provided with an axis hole, and it can rotate this rotating shaft of receiving；Described thick stick
Bar one end is provided with pivot, and described gangbar one end is provided with a pivot hole, and it can rotate this pivot of receiving.
When not having external force to put on lever, lever one end because of gravity down, magnetic head and holding wire induction end
Contact produces magnetic induction.
Described position detecting device also includes being located on described pedestal corresponding with holding wire induction end and magnetic head
Cleaning unit, is cleaned for holding wire induction end and magnetic head.
Described cleaning unit is that CDA purges trachea.
Described position detecting device is used for wet etching equipment.
Beneficial effects of the present invention: a kind of position detecting device that the present invention provides, by arranging longitudinal flux
Head and transverse head, strengthen the magnetic induction between magnetic head and holding wire induction end, make magnetic head repeatedly tilt
And after falling with holding wire induction end when position generation offsets, holding wire induction end can be the most right
Magnetic head senses；By arrange one end can be rotationally connected with lever near the gangbar of magnetic head one end and
Can be rotationally connected with the magnetic shield panel of the gangbar other end, when magnetic head tilts, lever drives gangbar makes magnetic
Barricade is placed on holding wire induction end and shields sensing, the lever drives linkage when magnetic head falls
Bar makes magnetic shield panel remove from holding wire induction end, it is possible to prevent from causing all the time because magnetic head magnetic force is excessive
The sensing that there is induced signal is bad；By arranging cleaning unit, magnetic head and holding wire induction end are carried out clearly
Clean, prevent magnetic head and holding wire induction end from producing crystallization and to produce sensing bad, thus it is bad to reduce sensing
Probability, so reduce position detecting device when machine number of times, improving product yield and production capacity, reduce and produce
Cost.
Accompanying drawing explanation
In order to be able to be further understood that inventive feature and technology contents, refer to below in connection with this
Bright detailed description and accompanying drawing, but accompanying drawing only provides reference and explanation use, is not used for adding the present invention
To limit.
In accompanying drawing,
Fig. 1 is the structural representation of a kind of existing position detecting device；
Fig. 2 is that the position detecting device of the present invention is without structural representation during External Force Acting；
Fig. 3 is the position detecting device of present invention structural representation when having an External Force Acting.
Detailed description of the invention
By further illustrating the technological means and effect thereof that the present invention taked, below in conjunction with the present invention's
Preferred embodiment and accompanying drawing thereof are described in detail.
Referring to Fig. 2 and Fig. 3, the present invention provides a kind of position detecting device, can be used for wet etching and sets
Substrate position detection in Bei, including: pedestal 1, the installation portion 3 being positioned on pedestal 1, installation can be rotated
Lever 2 on installation portion 3, be installed on the magnetic head 4 of lever 2 one end, one end can be rotationally connected with lever
2 gangbar 5 near magnetic head 4 one end, can be rotationally connected with gangbar 5 other end magnetic shield panel 7,
And the holding wire induction end 6 being installed on pedestal 1.
Specifically, referring to Fig. 2, when not having external force to put on lever 2, lever 2 one end is because of gravity
Down, magnetic head 4 and holding wire induction end 6 produce magnetic induction, and induced signal is passed by holding wire induction end 6
Transport to the display board outside position detecting device, be shown as off state, represent substrate not in this position
Put；Refer to Fig. 3, when lever 2 other end is rotated by External Force Acting, lever 2 one end, magnetic head 4 court
Moving away from holding wire induction end 6 direction, described gangbar 5 drives magnetic shield panel 7 to be placed on holding wire sense
Should hold on 6, described magnetic head 4 and holding wire induction end 6 do not produce sensing, and outside display board shows
For on state, represent substrate in this position, so by the sensing of magnetic head 4 and holding wire induction end 6 with
No realize the instruction of two diverse location states.
Specifically, in the present embodiment, when not having external force to put on lever 2, lever 2 one end is because of weight
Down, magnetic head 4 contacts generation magnetic induction to power with holding wire induction end 6.
It should be noted that refer to Fig. 3, when lever 2 other end is by External Force Acting, magnetic shield panel 7
It is placed in holding wire induction end 6, it is possible to effectively to the magnetic strength between holding wire induction end 6 and magnetic head 4
Should shield, though can prevent the lever 2 produced because the magnetic force of magnetic head 4 is too strong by external force, i.e.
When having substrate to be positioned at this position detecting device position, holding wire induction end 6 remains to sense sensing letter
Number situation occur, thus reduce the bad probability of sensing, improving product yield.
Specifically, described pedestal 1 is provided with accepting groove 12, and described holding wire induction end 6 is contained in accepting groove
In 12, when lever 2 other end is rotated by External Force Acting, lever 2 one end, and described gangbar 5 drives magnetic
Barricade 7 is placed on the accepting groove 12 of the corresponding holding wire induction end 6 of pedestal 1.
Specifically, described lever 2 other end is provided with roller 8, with at lever 2 other end by External Force Acting
Time external force put on roller 8.
Specifically, the quantity of described magnetic head 4 is one or more.Preferably, in the present embodiment, institute
The quantity stating magnetic head 4 is two, is respectively defined as longitudinal magnetic head 42 and transverse head 44.
Specifically, described longitudinal magnetic head 42 is located on the one side of described lever 2 one end；Described transverse magnetic
44 are arranged adjacent to longitudinal magnetic head 42, and not have external force to put on lever 2, lever 2 one end is because of weight
Power down time, strengthen magnetic head 4 and produce magnetic induction with holding wire induction end 6.
It should be noted that due to the magnetic head 4 of the position detecting device of the present invention include longitudinal magnetic head 42,
And transverse head 44, compared to conventional art only arranges the position detecting device of a longitudinal magnetic head, energy
Enough magnetic induction between enhancing signal line induction end 6 and magnetic head 4, after magnetic head 4 repeatedly tilts and falls,
Even if producing relative to position between magnetic head 4 with holding wire induction end 6 offsets, holding wire induction end 6 is also
Can sense it after magnetic head 4 falls, thus reduce the probability that sensing is bad, improving product is good
Rate, can reduce the debugging number of times to position checking device simultaneously, promotes production capacity.
Specifically, described magnetic shield panel 7 includes a barricade portion 72, is connected to the company in barricade portion 72
Connecing portion 74 and the rotating shaft 76 being located on connecting portion 74, described gangbar 5 other end is provided with an axis hole
52, it can rotate this rotating shaft 76 of receiving；Described lever 2 one end is provided with pivot 22, described gangbar 5 one
End is provided with a pivot hole 54, and it can rotate this pivot 22 of receiving.When described lever 2 other end stress, make thick stick
When one end of bar 2 tilts, lever 2 drives gangbar 5 magnetic shield panel 7 to translate covering in holding wire sense
Should hold on 6；When described lever 2 one end is fallen by gravity, lever 2 drives gangbar 5 by magnetic shield
Plate 7 is removed above holding wire induction end 6.
Specifically, described position detecting device also include being located on described pedestal 1 with holding wire induction end 6
And the cleaning unit 9 of magnetic head 4 correspondence, it is cleaned for holding wire induction end 6 and magnetic head 4.
Preferably, described cleaning unit 9 purges trachea for CDA.
It should be noted that owing to being provided with holding wire induction end 6 and magnetic head 4 can be cleaned clear
Clean unit 9, when described position detecting device can be prevented to be applied to tin indium oxide etching machine, magnetic head 4 with
The surface of holding wire induction end 6 produces crystallization, reduces and produces bad probability.Cleaning unit 9 is carried out clearly
Depending on the clean time can be arranged according to board duty.Further, when cleaning unit 9 is to holding wire
When induction end 6 and magnetic head 4 are cleaned, can be configured position checking device making it not feel
Survey, it is to avoid because cleaning causes the abnormal false alarm of sensing.
In sum, the position detecting device of the present invention, by arranging longitudinal magnetic head and transverse head,
Strengthen the magnetic induction between magnetic head and holding wire induction end, make magnetic head repeatedly tilt and fall rear and holding wire
Induction end relative to position produce offset time, magnetic head can normally be sensed by holding wire induction end；Logical
Cross and one end is set can be rotationally connected with lever and near the gangbar of magnetic head one end and linkage can be rotationally connected with
The magnetic shield panel of the bar other end, when magnetic head tilts, lever drives gangbar makes magnetic shield panel be placed on holding wire
On induction end shielding sensing, when magnetic head falls, lever drives gangbar makes magnetic shield panel from letter
Remove in number line induction end, it is possible to prevent the sense that there is induced signal all the time caused because magnetic head magnetic force is excessive
Should be bad；By arranging cleaning unit, magnetic head and holding wire induction end are cleaned, prevent magnetic head and letter
Number line induction end produces crystallization and to produce sensing bad, thus reduces the bad probability of sensing, and then reduces position
Put checking device when machine number of times, improving product yield and production capacity, reduce production cost.
The above, for the person of ordinary skill of the art, can be according to the technical side of the present invention
Other various corresponding changes and deformation are made in case and technology design, and all these change and deformation are all answered
Belong to the protection domain of appended claims of the present invention.
Claims (10)
1. a position detecting device, it is characterised in that including: pedestal (1), be positioned at pedestal (1)
On installation portion (3), can rotate be installed on installation portion (3) lever (2), be installed on lever
(2) magnetic head (4) of one end, one end can be rotationally connected with the lever (2) connection near magnetic head (4) one end
Lever (5), the magnetic shield panel (7) of gangbar (5) other end can be rotationally connected with and be installed on pedestal
(1) the holding wire induction end (6) on；When not having external force to put on lever (2), lever (2)
Because of gravity down, magnetic head (4) produces magnetic induction with holding wire induction end (6) to end；When lever (2) is another
One end is rotated by External Force Acting, lever (2) one end, and magnetic head (4) is towards away from holding wire induction end (6)
Moving in direction, described gangbar (5) drives magnetic shield panel (7) to be placed in holding wire induction end (6),
Described magnetic head (4) and holding wire induction end (6) do not produce sensing, by magnetic head (4) and holding wire sense
Whether the sensing that should hold (6) realizes two diverse location state instructions.
2. position detecting device as claimed in claim 1, it is characterised in that described pedestal (1) sets
There are accepting groove (12), described holding wire induction end (6) to be contained in accepting groove (12), work as lever
(2) other end is rotated by External Force Acting, lever (2) one end, and described gangbar (5) drives magnetic shield
Plate (7) is placed on the accepting groove (12) of the corresponding holding wire induction end (6) of pedestal (1).
3. position detecting device as claimed in claim 1, it is characterised in that described lever (2) is another
One end is provided with roller (8), puts on roller with the external force when lever (2) other end is by External Force Acting
(8) on.
4. position detecting device as claimed in claim 1, it is characterised in that described magnetic head (4)
Quantity is two, is respectively defined as longitudinal magnetic head (42) and transverse head (44).
5. position detecting device as claimed in claim 4, it is characterised in that described longitudinal magnetic head
(42) it is located on the one side of described lever (2) one end；The neighbouring longitudinal flux of described transverse head (44)
Head (42) is arranged, and not have external force to put on lever (2), lever (2) one end is because of gravity down
Time, strengthen magnetic head (4) and produce magnetic induction with holding wire induction end (6).
6. position detecting device as claimed in claim 1, it is characterised in that described magnetic shield panel
(7) include a barricade portion (72), be connected to the connecting portion (74) of barricade portion (72) and be located at
Rotating shaft (76) on connecting portion (74), described gangbar (5) other end is provided with an axis hole (52), its
Can rotate and accommodate this rotating shaft (76)；Described lever (2) one end is provided with pivot (22), described gangbar
(5) one end is provided with a pivot hole (54), and it can rotate this pivot of receiving (22).
7. position detecting device as claimed in claim 1, it is characterised in that put on not having external force
During lever (2), lever (2) one end because of gravity down, magnetic head (4) and holding wire induction end (6)
Contact produces magnetic induction.
8. position detecting device as claimed in claim 1, it is characterised in that also include being located at described base
The upper cleaning unit (9) corresponding with holding wire induction end (6) and magnetic head (4) of seat (1), for right
Holding wire induction end (6) and magnetic head (4) are cleaned.
9. position detecting device as claimed in claim 8, it is characterised in that described cleaning unit
(9) it is that CDA purges trachea.
10. position detecting device as claimed in claim 1, it is characterised in that set for wet etching
Standby.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610450356.4A CN105865495B (en) | 2016-06-20 | 2016-06-20 | Position detecting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610450356.4A CN105865495B (en) | 2016-06-20 | 2016-06-20 | Position detecting device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105865495A true CN105865495A (en) | 2016-08-17 |
| CN105865495B CN105865495B (en) | 2017-12-01 |
Family
ID=56651007
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610450356.4A Active CN105865495B (en) | 2016-06-20 | 2016-06-20 | Position detecting device |
Country Status (1)
| Country | Link |
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| CN (1) | CN105865495B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106679708A (en) * | 2016-12-14 | 2017-05-17 | 武汉华星光电技术有限公司 | Vibrator sensor |
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| JP2001057355A (en) * | 1999-08-19 | 2001-02-27 | Dainippon Screen Mfg Co Ltd | Substrate detector and substrate processor |
| JP2013134793A (en) * | 2011-12-26 | 2013-07-08 | Furukawa Electric Co Ltd:The | Method and apparatus for manufacturing glass substrate |
| CN103633000A (en) * | 2012-08-22 | 2014-03-12 | 芝浦机械电子株式会社 | Substrate processing device |
| CN103946674A (en) * | 2011-09-23 | 2014-07-23 | 卡特彼勒公司 | System and method of determining relative position |
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| CN204416428U (en) * | 2014-12-26 | 2015-06-24 | 东旭集团有限公司 | Glass delivery position detecting device in a kind of cleaning glass substrate machine |
| CN205289077U (en) * | 2015-12-29 | 2016-06-08 | 芜湖东旭光电科技有限公司 | Glass substrate swing detection device and glass substrate cleaning system |
| CN205289117U (en) * | 2015-12-29 | 2016-06-08 | 郑州旭飞光电科技有限公司 | Glass substrate's ultrasonic cleaning device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001057355A (en) * | 1999-08-19 | 2001-02-27 | Dainippon Screen Mfg Co Ltd | Substrate detector and substrate processor |
| CN103946674A (en) * | 2011-09-23 | 2014-07-23 | 卡特彼勒公司 | System and method of determining relative position |
| JP2013134793A (en) * | 2011-12-26 | 2013-07-08 | Furukawa Electric Co Ltd:The | Method and apparatus for manufacturing glass substrate |
| CN104246440A (en) * | 2012-03-22 | 2014-12-24 | Zf腓德烈斯哈芬股份公司 | Magnetic field sensor, actuating device and method for determining a relative position |
| CN103633000A (en) * | 2012-08-22 | 2014-03-12 | 芝浦机械电子株式会社 | Substrate processing device |
| CN204416428U (en) * | 2014-12-26 | 2015-06-24 | 东旭集团有限公司 | Glass delivery position detecting device in a kind of cleaning glass substrate machine |
| CN205289077U (en) * | 2015-12-29 | 2016-06-08 | 芜湖东旭光电科技有限公司 | Glass substrate swing detection device and glass substrate cleaning system |
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| CN106679708A (en) * | 2016-12-14 | 2017-05-17 | 武汉华星光电技术有限公司 | Vibrator sensor |
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| Publication number | Publication date |
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| CN105865495B (en) | 2017-12-01 |
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