CN105864801A - Waste gas combustion type purifying device - Google Patents
Waste gas combustion type purifying device Download PDFInfo
- Publication number
- CN105864801A CN105864801A CN201610076398.6A CN201610076398A CN105864801A CN 105864801 A CN105864801 A CN 105864801A CN 201610076398 A CN201610076398 A CN 201610076398A CN 105864801 A CN105864801 A CN 105864801A
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- China
- Prior art keywords
- combustion
- waste gas
- combustor
- cooling
- flange
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G2209/00—Specific waste
- F23G2209/14—Gaseous waste or fumes
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- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Incineration Of Waste (AREA)
- Treating Waste Gases (AREA)
- Chimneys And Flues (AREA)
Abstract
The invention provides a waste gas combustion type purifying device comprising a combustion room and a cooling room; the combustion room allows harmful ingredients in the waste gas discharged from semiconductor manufacture to be burned; the cooling room is in downstream of the combustion room and provided with a mist nozzle; no heat resistant and corrosion resistant expensive special material is needed; the flange in the bonding portion between the combustion room and the cooling room, and the side wall of the cooling room close to the combustion room boundary can be preventing from being heated; the flange combining the combustion room with the cooling room is a water cooling flange, or the periphery of the cooling room is provided with a cooling water flow path.
Description
Technical field
The present invention relates to a kind of combustion-type purifier, it is used for making by semiconductor manufacturing work
Harmful components contained in the waste gas that sequence is discharged are burnt and are removed.It is more particularly to one
Planting combustion-type purifier, it makes the harmful components discharged by semiconductor fabrication sequence at fire
At high temperature carry out in the presence of flame and oxygen contacting, burning, thus change into harmless
Material or can be the most innoxious material.
Background technology
Along with the development of semi-conductor industry in recent years, become in semiconductor fabrication sequence
In the gas using very multiple types.But, in these gases human body and environment are had
The material of evil is many, it is necessary to purified before being discharged to outside factory.By making these gases (have
Evil composition) carry out burning and the combustion-type purification method of resolution process is the group of no matter waste gas
Become or physical property is facilitated method the most applicatory, particularly at high concentration, big flow
In the case of, with dry cleaning method or wet purification method Comparatively speaking, it is efficient.
Following process is carried out: the useless of harmful components will be comprised in combustion-type purification method
Gas and the fuel gas such as propane, LPG, LNG, air or oxygen, as required
Non-active gas mixes in a combustion chamber, burns, and harmful components are converted into harmless oxygen
Compound or material that can be the most innoxious.The general combustion-type always used purifies dress
Put and be made up of such as lower member: for making harmful components carry out the combustor burnt；For inciting somebody to action
Comprise the oxygen-containing gas such as the process waste gas of harmful components of object, fuel gas, air to lead
Enter each pipe arrangement to combustor, nozzle；For the gas after burning is arranged from combustor
The pipe arrangement etc. gone out.
There is following combustion-type purifier further: for ejection cooling water-cooled
But the purpose of high-temperature gas, and the gas after burn processing comprises the feelings of efflorescence thing
Under condition, rinse for the efflorescence thing utilizing cooling water to will attach to side walls together
Purpose, possess the cooling chamber with spray nozzle in the downstream of combustor.As this
The combustion-type purifier of sample, it is known to as described in such as patent documentation 1～3
The device constituted.
Patent documentation 1: Japanese Unexamined Patent Publication 10-54534 publication
Patent documentation 2: Japanese Unexamined Patent Publication 2006-194544 publication
Patent documentation 3: Japanese Unexamined Patent Publication 2007-232308 publication
Summary of the invention
The problem solved is wanted in invention
In foregoing combustion-type purifier, the waste gas burning that causes because of flame and
Locate to be high temperature in causing combustor, thus as described in patent documentation 1,2, combustion
The side walls burning room employs the heat-resisting material such as metal, pottery.It addition, such as patent literary composition
Offer as described in 3, preferably make in there is the side walls of cooling chamber of spray nozzle
With at the fluorine generated by making the composition in gas carry out reacting with the water cooling down water
Change the material of the excellent corrosion resistance of the acidic materials such as hydrogen or alkaline matter.But, in system
Become the immediately part in the downstream of combustor to possess to have there is the cooling chamber of spray nozzle
Structure in the case of, the side wall portion of particularly adjacent with combustor cooling chamber becomes
For high temperature, thus people also require that this part has corrosion resistance and thermostability.
It addition, as patent documentation 1 (Fig. 2, Fig. 3) publishes, by cylindrical shape
The combustor that side walls is formed is tied by being arranged on the flange of their end with cooling chamber
In the case of conjunction, between this flange, generally insert pad for the purpose preventing gas from leaking
Sheet, but the flange of joint portion also becomes high temperature because being derived from the heat conduction of combustion section, thus
For this pad, outside the sealing requiring excellence, also require thermostability.Therefore,
In terms of the combustion-type purifier so constituted, by setting with the longest
Determine the side walls of combustor, thus prevent the flange of combustor and the joint portion of cooling chamber with
And become high temperature with the cooling chamber side walls near the border of combustor, or need at pad
Sheet, cooling chamber side walls use the expensive special material of thermostability, excellent corrosion resistance
Material.
Therefore, the present invention wants the problem solved to be to provide a kind of combustion-type purifier,
It is foregoing combustion-type purifier, and combustor can be prevented efficiently with cold
But the joint portion of room flange and with the border of combustor near cooling chamber side walls become
For high temperature, and need not use the expensive special material of thermostability, excellent corrosion resistance.
For solving the scheme of problem
The present inventor conducts in-depth research to solve these problems, found that
By making flow of cooling water cold in the flange being combined with the side walls of cooling chamber by combustor
But this flange, thus can solve aforesaid problem, thus reach the 1st reality of the present invention
Execute the combustion-type purifier of the waste gas of mode.It has further been found that by cooling chamber
Periphery arrange cooling water stream, make flow of cooling water in this stream, before thus can solving
The problem stated, thus the combustion-type having reached the waste gas of the 2nd embodiment of the present invention is clean
Gasifying device.
That is, the present invention is the combustion-type purifier of a kind of waste gas, and it possesses: make by half
Harmful components contained in the waste gas that conductor manufacturing process discharges carry out the combustor burnt；
The cooling chamber with spray nozzle in the downstream of this combustor, it is characterised in that combustion
The side walls of the side walls and cooling chamber of burning room possesses in respective end and has flange, at this
Among a little flanges, either one or both in the flange be combined combustor with cooling chamber is
Water-cooling flange.
It addition, the present invention is the combustion-type purifier of a kind of waste gas, it possesses: make by
Harmful components contained in the waste gas that semiconductor fabrication sequence is discharged carry out the burning burnt
Room；The cooling chamber with spray nozzle in the downstream of this combustor, it is characterised in that
The side walls of combustor and the side walls of cooling chamber possess in respective end and have flange,
The periphery of cooling chamber arranges the stream of cooling water.
The effect of invention
The combustion-type purifier of the waste gas of the 1st embodiment of the present invention has in burning
Water-cooling flange is set between room and cooling chamber, and makes flow of cooling water in this water-cooling flange
Structure, the combustion-type purifier of the waste gas of the 2nd embodiment of the present invention has cold
But the periphery of room arrange cooling water stream, and make flow of cooling water in the structure of this stream,
Thus two kinds of combustion-type purifiers all can cool down efficiently and be inserted in combustor and cooling chamber
Joint portion flange in pad.It addition, two kinds of combustion-type purifiers the most all can press down
Make from the sidewall of combustor towards the heat conduction of the side wall surface of cooling chamber.Its result, according to this
Invention, it is not necessary to set the side walls of combustor, additionally need not use costliness longlyer
Special material as the material of pad and the material of the side walls of cooling chamber.
Accompanying drawing explanation
Fig. 1 show the combustion-type purifier of the waste gas of the 1st embodiment of the present invention
The structure chart in vertical section of an example；
Fig. 2 is the structure chart of the water-cooling flange representing a part in Fig. 1 in detail；
The structure of the horizontal plane of one example of the water-cooling flange that Fig. 3 show in the present invention
Figure；
Fig. 4 show the combustion-type purifier of the waste gas of the 2nd embodiment of the present invention
The structure chart in vertical section of an example；
Fig. 5 is the sectional view of the c-c ' in Fig. 4；
Fig. 6 is the sectional view of the b-b ' in Fig. 1, Fig. 4；
Fig. 7 show and combines tank in the combustion-type purifier of the waste gas of the present invention
And the equipment of scrubber and the structure chart in the vertical section of the example of purifier that obtains.
Detailed description of the invention
The present invention is suitable for as a kind of combustion-type purifier, and it possesses: make by quasiconductor system
Make the combustor that harmful components contained in the waste gas that operation is discharged carry out burning；In this combustion
Burn the cooling chamber with spray nozzle in the downstream of room.
As the combustion-type purifier of the waste gas of the available present invention carry out processing harmful
Composition, can exemplify: arsine, hydrogen phosphide, silane, disilane, dichlorosilane,
The hydride gas such as diborane, Selenium hydride., germanium tetrahydride, boron trifluoride, boron chloride,
Silicon fluoride., Silicon chloride., titanium tetrachloride, aluminum chloride, tetrafluoride germanium, tungsten hexafluoride
Deng alkaline gas such as sour gas, ammonia, MMA, dimethylamine, trimethylamine, hydrazines, entirely
The halocarbon etc. such as fluorine carbon, HFC.It addition, as fuel gas, propane flammable gas can be used
Body, natural gas etc..These gases can make as required together with the non-active gas such as nitrogen
With.
Hereinafter, the combustion-type of the waste gas describing the present invention based on Fig. 1～Fig. 7 in detail purifies
Device, but the present invention is not only restricted to them.
Being explained, Fig. 1 show the burning of the waste gas of the 1st embodiment of the present invention
The structure chart in the vertical section of one example of formula purifier.Fig. 2 is to be shown in detail in Fig. 1
In the structure chart of water-cooling flange of a part.Fig. 3 show the water cooling in the present invention
The structure chart of the horizontal plane of a blue example.Fig. 4 show the 2nd enforcement of the present invention
The structure chart in the vertical section of one example of the combustion-type purifier of the waste gas of mode.Fig. 5
It it is the sectional view of c-c ' in Fig. 4.Fig. 6 is the sectional view of the b-b ' in Fig. 1, Fig. 4.
Fig. 7 show, combine in the combustion-type purifier of the waste gas of the present invention tank with
And the equipment of scrubber and the structure chart in the vertical section of the example of purifier that obtains.
The combustion-type purifier of the waste gas of the 1st embodiment of the present invention is a kind of burning
Formula purifier, as shown in Figure 1, it possesses: make to be arranged by semiconductor fabrication sequence
Harmful components contained in the waste gas gone out carry out the combustor 1 burnt；Under this combustor
The cooling chamber 2 with spray nozzle 3 of trip side, wherein, the side walls 4 of combustor is with cold
But the side walls 5 of room possesses in respective end and has flange 6, among these flanges, and will
Either one or both in the flange that cooling chamber 2 is combined of combustor 1 is water-cooling flange 6 '.
It addition, the combustion-type purifier of the waste gas of the 2nd embodiment of the present invention is one
Planting combustion-type purifier, as shown in Figure 4, it possesses: make by semiconductor manufacturing
Harmful components contained in the waste gas that operation is discharged carry out the combustor 1 burnt；In this burning
The cooling chamber 2 with spray nozzle 3 in the downstream of room, wherein, the side walls of combustor
4 possess in respective end with the side walls 5 of cooling chamber and to have flange 6, in cooling chamber 2
Periphery is provided with the stream 11 ' of cooling water.
It is explained, at the combustor 1 of combustion-type purifier of the waste gas of the present invention
Around, except arrange flame is imported to combustor nozzle 7, waste gas is imported to burning
Outside nozzle 8 grade of room, also can be appropriately arranged with importing to oxygen-containing gas the machine of combustor
Structure, such as, can use the material composition material as the side walls 4 of combustor of aeration
Material, can be appropriately arranged with in the periphery of the side walls 4 of combustor oxygen-containing gas stream 9 and
Oxygen-containing gas is directed in the oxygen-containing gas introducing port 10 of this stream.But, the present invention is not
It is limited to such structure.
Device shown in Fig. 1, Fig. 4 is individually the combustion-type purifier of the waste gas of the present invention
An example.In the combustion-type purifier of Fig. 1, Fig. 4, combustor 1 definable
For upper end to the lower end from the side walls 4 of aeration, cooling chamber 2 may be defined as from side
The upper end of wall 5 is to lower end, but the present invention is not only restricted to such structure.Such as, it is possible to
The medial compartment with side walls, this medial compartment are set between combustor 1 and cooling chamber 2
Side walls possess at both ends have each with the flange of the side walls 4 of combustor 1, cold
But the flange that the flange of the side walls 5 of room 2 combines.In this case, can by
Between room be set in combustor 1 or cooling chamber 2 contained medial compartment, and real the 1st
In the combustion-type purifier of the waste gas executing mode, can be by the flange of either one or two sides
Flange be set as water-cooling flange.
In the combustion-type purifier of the waste gas of the 1st embodiment of the present invention, about
The stream of the cooling water of water-cooling flange 6 ', if having available cooling water by water cooling
Blue 6 ' from either internally or externally carrying out the stream of structure that cools down, are then not particularly limited,
But the most as shown in Figure 2, setting makes flow of cooling water in the inside of water-cooling flange 6 '
Stream 11.In the present invention, the stream 11 of cooling water may be disposed at the method for combustion chamber side
Either one in the flange 6 (2) of orchid 6 (1) and cooling chamber side or the flange of combustion chamber side
6 (1) and this two side of flange 6 (2) of cooling chamber side, but from suppressing efficiently by being derived from combustion
From the viewpoint of the intensification of the pad 12 that the heat conduction of burning room is caused, as shown in Figure 2,
It is preferably disposed on the flange 6 (1) (being expressed as 6 ' (1)) of combustion chamber side.
The form of aforementioned stream is not particularly limited, but the most as shown in Figure 3, presses
According to have cooling water supply mouth 13 and cooling water outlet 14, make cooling water throughout
The mode all in flange sets.It is explained, about the stream 11 of cooling water, such as figure
As shown in the of 2, may utilize at the surface configuration recess of flange and utilize lid 15 by table
Face blocking and the method, the method such as method of pipe arrangement that arranges cooling water at recess that arrange are come
Make.It addition, cooling water is not limited to water, if the liquid of water can be replaced then to can use
In the present invention.It addition, about the cooling water circulated in after water-cooling flange 6 ', such as scheme
As shown in the of 7, it is possible to spray from spray nozzle 24 and recycle, it is possible to from spray nozzle
3 spray and recycle.The flow (being derived from the spray volume of spray nozzle) of cooling water is usually
10～100L/min, available effusion meter 18 and pump 19 and control.
In the combustion-type purifier of the waste gas of the 1st embodiment of the present invention, preferably
Further by the outer region 16 of the side walls of cooling chamber according in a same manner as in the second embodiment
Mode make the structure that available cooling water is filled, be preferably made this cooling water is used as from
The structure of the cooling water of spray nozzle 3 ejection.By making such structure, thus can
It is added with the effect using water-cooling flange, it is easier to the side walls 5 of cooling chamber is maintained at
Low temperature.The flow (being derived from the spray volume of spray nozzle) of this cooling water is usually
10～100L/min, available effusion meter 18 ' and pump 19 ' and control.
In the combustion-type purifier of the waste gas of the 2nd embodiment of the present invention, cooling
Room 2 generally has the side of dual structure as shown in Figure 5 and (comprises flange 6, inner side
Side walls 5, the side walls 5 ' in outside), cooling water stream 11 ' be arranged at cooling chamber
Between side walls 5 and the side walls 5 ' in outside of inner side.About the stream 11 ' of cooling water,
This stream can be circulated in thus by the side walls of cooling chamber by making cooling water if having
The stream of structures of 5 coolings, then be not particularly limited, such as Fig. 4, as shown in Figure 5,
It is preferably made following structure: there is supply mouth 13 and the discharge of cooling water of cooling water
Mouth 14, from the cooling water of supply mouth 13 supply of cooling water via the outlet cooling down water
14, spray from spray nozzle 3, be also applied to the gas making circulation at the high temperature of cooling chamber 2
Body cools down, and washing is attached to the efflorescence thing of side walls 5.The stream 11 ' of cooling water
Usually cylindrical shape.
In the combustion-type purifier of the waste gas of second embodiment of the present invention, cool down water
Flow (being derived from the spray volume of spray nozzle) usually 10～100L/min, as shown in Figure 7
Like that, available effusion meter 18 ' controls with pump 19 '.Operate at combustion-type purifier
Time, the top of the stream 11 ' (with reference to Fig. 4) being preferably filled to cooling water with cooling water is such
Flow supply cooling water, utilize appropriateness hydraulic pressure from spray nozzle 3 ejection cooling water.
By making the top cooling down water to the stream 11 ' up to cooling down water, combustion can be prevented efficiently
Burn the joint portion of room and cooling chamber flange and with the border of combustor near cooling chamber
Side walls becomes high temperature.
Owing to the combustion-type purifier of the waste gas of the present invention is foregoing structure, because of
And can be used as to be inserted in the flange (water-cooled being combined by combustor with cooling chamber by following pad
Flange) in pad 12, described pad is by nitrile rubber, neoprene, silicone rubber, fluorine
The pad that the rubber sheets such as rubber, EP rubbers, butyl rubber are formed, though these rubber
So thermostability is low, is also close contact in object even under low fastening face pressure (low pair of face)
Face, and obtain high sealing.In the present invention, among these rubber sheets,
From the viewpoint of excellent corrosion resistance, EP rubbers is preferably used, the most preferably
Use EPDM (ethylene and propylene will be made an addition to as ternary diene-based monomer and make
The terpolymer become).
It addition, in the present invention, following material can be used as the side walls 5 of cooling chamber
Constituent material (the 1st embodiment), can be used as comprising the side of flange 6, inner side further
Wall 5, the dual structure side of cooling chamber of side walls 5 ' (the 2nd embodiment) in outside
Constituent material, although to comprise thermostability low for above-mentioned material, but with respect to making in gas
Composition react with water and the corrosion resistance of the acidic materials that generate or alkaline matter is excellent
Different, cheap and that component is light resin.As comprising the material of such resin, generally
Use thermosetting resin etc., fiber-reinforced resin (FRP) is preferably used.As fiber reinforcement
Resin, such as, can use the substrate such as thermosetting resin to strengthen with glass fibre, carbon fiber etc.
Fiber.
As the present invention an example Fig. 1, Fig. 4 combustion-type purifier in,
The side of combustor 1 arranges the side walls 4 with aeration and thermal insulation of cylindrical shape,
In combustor 1, by make exhaust gas contact in the flame of high-temperature, and with from side
The oxygen-containing gas contacts such as the air of wall 4 supply, so that harmful components contained in waste gas
Carry out burn (thermal decomposition).Now, although produce efflorescence thing according to the kind of harmful components,
But in the flowing by utilizing in Fig. 1 the oxygen-containing gas (air etc.) as shown in arrow, from
And efflorescence thing can be prevented to the accumulation on side walls 4 surface.
Be explained, about the side walls 4 of aforesaid combustor, by by aluminium oxide, two
The pottery such as silicon oxide, titanium oxide, or carbon steel, chromium steel, molybdenum steel, manganese steel, nickel steel,
The metals such as rustless steel are constituted, and arrange the gap of pin hole etc., or pass through in this side walls 4
Formed fibrous pottery or metal stacking are obtained duplexer, by many granules
Pottery or the metal stacking of shape and obtain duplexer, have punctulate porous ceramic
Or Porous metal etc., thus give aeration.At aforesaid combustion-type purifier
In, as shown in Figure 6, oxygen-containing gas stream is set on the whole in the periphery of side walls 4
Road 9.When harmful components are processed, although the temperature of combustor 1 is
The high temperature of 500～1200 DEG C, but by making such structure, thus burning can be prevented
The thermal diffusion of room 1 is to outside.
In the combustion-type purifier of the waste gas of the present invention, according to the neighbour at combustor 1
The mode that fuel carries out mixing, burning with oxygen-containing gas is set by the place of connecing.At burning
Gas after reason, as shown in Figure 1, utilizes the cooling water from spray nozzle 3 ejection
Cooled down, be then released in air or send into next treatment process.At this
In invention, the waste gas after burn processing is being sent into situation as next treatment process
Under, it is possible to equipment is for implementing the equipment of such treatment process in the lump.
About tank 21 and the equipment of scrubber of Fig. 7, for utilizing giving up of the present invention
The waste gas that the combustion-type purifier of gas is processed, contained in the gas after processing
Efflorescence thing be removed, and (can be the most innoxious by newly-generated harmful components
Composition) it is removed, although the most optional equipment, but it is preferably provided with this
A little equipment.That is, in the present invention, it is preferred to the combustion-type making waste gas as following is clean
Gasifying device, its be provided with in the downstream (discharge side) of cooling chamber efflorescence thing removal portion and/
Or the removal portion of sour gas.
Such as, utilize the present invention waste gas combustion-type purifier and to arsine,
In the case of the hydrides such as hydrogen phosphide, silane, diborane have carried out processing, by burning
And the solid granular oxide of each self-generating arsenic, phosphorus, silicon, boron etc..At Fig. 1, Fig. 4
Purifier aspect, about such efflorescence thing, main available be derived from spray nozzle 3
Water spray and porous plate 23 in seizure and remove.It addition, about the waste gas of the present invention
The pipe arrangement 20 of combustion-type purifier and scrubber's equipment room, preferably according to easily by powder
Compound is flushed to the mode of tank 21 and tilts to scrubber's equipment side.
It addition, in the present invention, to boron trifluoride, boron chloride, Silicon fluoride., four
Silicon chloride, C2F6In the case of having carried out processing in halogenide, the newly-generated hydrogen chloride of meeting,
The sour gas such as fluohydric acid gas (composition that can be the most innoxious).Hydrogen chloride, fluohydric acid gas etc. can be made
Sour gas is mainly removed in packing material 25.It addition, be possible with demister 26
Moisture is removed in the lump.It is explained, in the figure 7,17 expression cooling water pipes, 22
Representing drain pipe, 27 represent the outlet that the gas after processing is discharged to outside.
Embodiment
Secondly, it is more particularly described the present invention by embodiment, but the present invention is not only restricted to it
?.
[embodiment 1]
(making of the combustion-type purifier of the 1st embodiment)
Producing the combustion-type purifier of structure as shown in Figure 1, it possesses cylinder
The combustor 1 (highly 450mm, diameter 200mm) of shape, flame is imported to this burning
The nozzle 7 of room 1, waste gas is imported to the nozzle 8 of combustor 1, the side walls of combustor
4 (there is the ceramic wall of the aeration of micro-porous), oxygen-containing gas stream 9 (width 20mm),
Oxygen-containing gas introducing port 10 and having by fiber reinforcement tree in the downstream of combustor 1
The side walls 5 of fat composition and cooling chamber 2 (highly 450mm, the diameter of spray nozzle 3
200mm)。
It addition, each arrange flange in the end of combustor 1 with the side walls of cooling chamber 2.
About combustor and cooling chamber, the water-cooling flange 6 ' (1) of utilization structure as shown in Figure 3
Be not the flange 6 (2) of water cooling, combined as shown in Figure 2.It addition,
Between these flanges, for the purpose preventing gas from leaking, insertion is formed by EPDM
Pad 12, inserts the thermocouple of temperature measuring between these flanges.Further, make
For the constituent material of the side walls 5 of cooling chamber, employ by thermosetting resin and glass fibers
The fiber-reinforced resin that dimension is formed, at an upper portion thereof (distance topmost is the position of 10mm)
It is mounted with the thermocouple of temperature measuring.
Right lower quadrant at the combustion-type purifier made as described above arranges length
300mm, the tank 21 of width 300mm, highly 300mm, further at tank 21
Top arrange and there is porous plate 23, with packing material 25 that acrylic resin is main material
And the scrubber of demister 26.It addition, it is with the pipe arrangement 20 tilted, combustion-type is clean
The bottom of gasifying device is connected with tank, arranges spray nozzle on the top of packing material 25
24, according to the cooling water cooling water as the periphery being supplied in cooling chamber using tank 21
Mode, effusion meter, pump etc. are connected, thus complete purification as shown in Figure 7
Device.
(burn processing test)
In tank, inject water until the degree of depth becomes 150mm, then make the operating such as pump and from
Spray nozzle 3 sprays water.It addition, via effusion meter 18, make flow of cooling water in water-cooled
Flange 6 ', sprays water from spray nozzle 24.Then, by propane (flow 15L/min) with
Air (flow 440L/min) carries out mixed combining combustion, is directed in combustor 1 from nozzle, and
And by air from four oxygen-containing gas introducing ports 10 with respective 37.5L/min, total
The flow of 150L/min is directed in combustor 1 via side walls 4.Then, will be as useless
The nitrogen (flow 490L/min) comprising silane (flow 10L/min) of gas, will be useless from four
Gas imports to the nozzle 8 of combustor and is directed in respective 125L/min, total 500L/min
Combustor 1 has carried out burn processing.
The burn processing of silane has been carried out 20 hours, but during this period, by being inserted in water
The temperature that thermocouple between cold process orchid 6 ' (1) and flange 6 (2) determines is 40～60 DEG C.
It addition, the temperature determined by the thermocouple of the side walls 5 being installed on cooling chamber is
30～40 DEG C.After burn processing off-test, the pad being inserted between flange is taken out and enters
Gone investigation, but cannot confirm to go bad, deterioration etc. abnormal.It addition, for cooling
The surface of the side walls 5 of room has been also carried out investigation, but cannot confirm equally to go bad,
Deteriorations etc. are abnormal.
[embodiment 2]
In the making of the combustion-type purifier of embodiment 1, water-cooling flange 6 ' (1) is set
For not being the flange 6 (1) of water cooling, the flange 6 (2) not being water cooling is set to water cooling
Blue 6 ' (2) (with reference to Fig. 2), in addition, operate similarly to Example 1 and produce combustion
Burning formula purifier.By using this combustion-type purifier, similarly to Example 1
Operate and carried out burn processing test.Its result, by the thermocouple being inserted between flange
The temperature determined is 50～70 DEG C, the thermocouple of the side walls 5 being installed on cooling chamber survey
The temperature made is 30～40 DEG C.It addition, the table of the side walls 5 in pad and cooling chamber
Face, it is impossible to confirm the exceptions such as rotten, deterioration.
[embodiment 3]
(making of the combustion-type purifier of the 2nd embodiment)
Produce combustion-type purifier as shown in Figure 4, wherein, combustor 1
Side walls possesses flange in respective end, in cooling chamber with the side walls of cooling chamber 2
Periphery arranges the stream 11 ' of cooling water.
Columnar combustor 1 (highly 450mm, diameter 200mm) is arranged fire
Flame import to this combustor 1 nozzle 7, waste gas is imported to combustor 1 nozzle 8,
The side walls 4 (there is the ceramic wall of the aeration of micro-porous) of combustor, oxygen-containing gas stream
9 (width 20mm), oxygen-containing gas introducing port 10 etc..It addition, in columnar cooling chamber
2 (highly 450mm, diameter 200mm) arrange the side walls of spray nozzle 3, cooling chamber
5 (fiber-reinforced resins formed by thermosetting resin and glass fibre), the stream of cooling water
11 ' (width 20mm) etc., according to being filled with the cooling water of the stream 11 ' cooling down water from spraying
The mode of nozzle 3 ejection is set.
It is explained, between the flange of combustor 1 and cooling chamber 2, for preventing gas
The purpose of leakage, inserts the pad formed by EPDM, inserts between these flanges
The thermocouple of temperature measuring.Further, in the top (distance of side walls 5 of cooling chamber
Topmost is the position of 10mm) it is mounted with the thermocouple of temperature measuring.
Right lower quadrant at the combustion-type purifier made as described above arranges length
300mm, the tank 21 of width 300mm, highly 300mm, further at tank 21
Top arrange and there is porous plate 23, with packing material 25 that acrylic resin is main material
And the scrubber of demister 26.It addition, combustion-type is purified with the pipe arrangement 20 tilted
The bottom of device is connected with tank, arranges spray nozzle 24 on the top of packing material 25,
According to the cooling water circulation mode making tank 21, effusion meter, pump etc. are connected, thus
Complete purifier as shown in Figure 7.
(burn processing test)
In tank, inject water until the degree of depth becomes 150mm, then make the operating such as pump 19 ' and
Make flow of cooling water in the stream 11 ' of cooling water, spray water from spray nozzle 3.It addition,
Also water is sprayed from spray nozzle 24.Then, by propane (flow 15L/min) and air (stream
Amount 440L/min) mix and burn, it is directed in combustor 1 from nozzle, and will
Air from four oxygen-containing gas introducing ports 10 with respective 37.5L/min, add up to 150L/min
Flow via side walls thus be directed in combustor 1.Then, using comprising as waste gas
The nitrogen (flow 490L/min) of silane (flow 10L/min), imports to waste gas from four
The nozzle 8 of combustor is directed in combustor 1 with respective 125L/min, total 500L/min,
Thus carried out burn processing.
The burn processing of silane has been carried out 20 hours, but by the heat being inserted between flange
The temperature that galvanic couple determines is 60～80 DEG C.It addition, by the side walls 5 being installed on cooling chamber
The temperature that determines of thermocouple be 30～40 DEG C.After burn processing off-test, will insert
Pad between flange takes out and is investigated, but cannot confirm to go bad, deteriorate
Deng abnormal.It addition, the surface for the side walls 5 of cooling chamber has been also carried out investigation, but
Be cannot confirm equally to go bad, deterioration etc. abnormal.
[comparative example 1]
In the making of the combustion-type purifier of embodiment, the cooling water of pump 19 will be derived from
It is connected to spray nozzle 24 (not using water-cooling flange) not via flange, will not be derived from pump
The cooling water of 19 ' is connected to the stream 11 ' of the cooling water of the periphery of cooling chamber 2, directly connects
It is connected to spray nozzle 3, operates in the same manner as embodiment in addition and produce combustion-type and purify dress
Put.By using this combustion-type purifier, operate in the same manner as embodiment and carry out
Burn processing is tested.Its result is, it is predicted that test after just starting by being inserted between flange
The temperature that determines of thermocouple the most immediately more than 100 DEG C, by the side being installed on cooling chamber
The temperature that the thermocouple of wall 5 determines is also above 100 DEG C, thus have ceased experiment.
As described above, as shown in the Examples, the combustion-type of the waste gas of the present invention is clean
Gasifying device arranges water-cooling flange owing to having between combustor and cooling chamber, and makes cooling
Water flows in the structure of this water-cooling flange, arranges the stream of cooling water in the periphery of cooling chamber,
And make flow of cooling water in the structure of this stream, thus can cool down combustor and cooling chamber
The flange that combines of side walls in the pad that inserts, and the side from combustor can be suppressed
Wall is to the heat conduction of the side walls of cooling chamber.
Description of reference numerals
1 combustor
2 cooling chambers
3 spray nozzles
The side walls (inner side) of 4 combustor
The side walls (outside) of 4 ' combustor
The side walls (inner side) of 5 cooling chambers
The side walls (outside) of 5 ' cooling chambers
6 flanges
6 ' water-cooling flanges
7 nozzles that flame imported to combustor
8 nozzles that waste gas imported to combustor
9 oxygen-containing gas streams
10 oxygen-containing gas introducing ports
The stream of the cooling water in 11 water-cooling flanges
The stream of the cooling water in the periphery of 11 ' cooling chambers
12 pads
The supply mouth of 13 cooling water
The outlet of 14 cooling water
15 lids
The outer region of the side walls of 16 cooling chambers
17 cooling water pipes
18 effusion meters
18 ' effusion meters
19 pumps
19 ' pumps
The combustion-type purifier of 20 waste gas and the pipe arrangement of scrubber's equipment room
21 tanks
22 drain pipies
23 porous plates
24 spray nozzles
25 packing materials
26 demisters
27 will process after the outlet discharged to outside of gas.
Claims (12)
1. a combustion-type purifier for waste gas, it possesses: make by semiconductor manufacturing work
Harmful components contained in the waste gas that sequence is discharged carry out the combustor burnt；At this combustor
The cooling chamber with spray nozzle in downstream, it is characterised in that
The side walls of combustor and the side walls of cooling chamber possess in respective end and have method
Orchid, either one among these flanges, in the flange that combustor is combined with cooling chamber
Or both sides are water-cooling flanges.
2. a combustion-type purifier for waste gas, it possesses: make by semiconductor manufacturing work
Harmful components contained in the waste gas that sequence is discharged carry out the combustor burnt；At this combustor
The cooling chamber with spray nozzle in downstream, it is characterised in that
The side walls of combustor and the side walls of cooling chamber possess in respective end and have method
Orchid, arranges the stream of cooling water in the periphery of cooling chamber.
The combustion-type purifier of waste gas the most according to claim 1, wherein, combustion
The flange of the side walls burning room is water-cooling flange.
The combustion-type purifier of waste gas the most according to claim 1, wherein, cold
But the side walls of room is constituted by wrapping resiniferous material.
The combustion-type purifier of waste gas the most according to claim 4, wherein, bag
Resiniferous material is fiber-reinforced resin.
The combustion-type purifier of waste gas the most according to claim 2, wherein, cold
But room is made up of dual structure side, within it arranges the stream of cooling water between week and periphery
Road.
The combustion-type purifier of waste gas the most according to claim 6, wherein, cold
But the dual structure side of room is constituted by wrapping resiniferous material.
The combustion-type purifier of waste gas the most according to claim 6, wherein, cold
But the dual structure side of room is made up of fiber-reinforced resin.
The combustion-type purifier of waste gas the most according to claim 1 and 2, wherein,
As the pad being inserted between the flange being combined with cooling chamber by combustor, use rubber system
Pad.
The combustion-type purifier of waste gas the most according to claim 1 and 2, its
In, as the pad being inserted between the flange being combined with cooling chamber by combustor, use second
The pad of the third rubber.
The combustion-type purifier of 11. waste gas according to claim 1 and 2, wherein,
Possess in the periphery of the side walls of combustor for oxygen-containing gas being supplied in containing of combustor
Carrier of oxygen stream.
The combustion-type purifier of 12. waste gas according to claim 1 and 2, its
In, removal portion and/or the removal of sour gas of efflorescence thing are set in the downstream of cooling chamber
Portion.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015023004A JP2016145685A (en) | 2015-02-09 | 2015-02-09 | Combustion type emission control device of exhaust gas |
| JP2015-023004 | 2015-02-09 | ||
| JP2015146607A JP2017026244A (en) | 2015-07-24 | 2015-07-24 | Combustion type exhaust purification device |
| JP2015-146607 | 2015-07-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105864801A true CN105864801A (en) | 2016-08-17 |
Family
ID=56624219
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610076398.6A Pending CN105864801A (en) | 2015-02-09 | 2016-02-03 | Waste gas combustion type purifying device |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN105864801A (en) |
| TW (1) | TWI611147B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106439864B (en) * | 2016-11-08 | 2019-04-05 | 江苏丰东热技术股份有限公司 | A kind of heat treatment burned waste gas device |
| CN110461437B (en) * | 2017-01-06 | 2022-09-13 | 阿尔泽塔公司 | Systems and methods for improved exhaust abatement |
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| CN1040148A (en) * | 1988-08-11 | 1990-03-07 | 国营莱比锡和格里马化学设备制造联合公司 | The method of annihilating toxical waste and plasma chemical reactor |
| EP1193443A2 (en) * | 2000-10-02 | 2002-04-03 | Ebara Corporation | Combustion type waste gas treatment system |
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| CN1584400A (en) * | 2003-08-20 | 2005-02-23 | 日本派欧尼株式会社 | Purifier for harmful gases |
| JP2006194544A (en) * | 2005-01-14 | 2006-07-27 | Japan Pionics Co Ltd | Noxious gas purifying apparatus |
| CN2872254Y (en) * | 2006-02-10 | 2007-02-21 | 贵阳铝镁设计研究院 | Water-cooled flange for boiled chlorination furnace |
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| DE102006027882B4 (en) * | 2005-09-02 | 2009-04-30 | Clean Systems Korea Inc., Seongnam | Scrubber for treating semiconductor waste gas |
| CN101660468A (en) * | 2008-08-31 | 2010-03-03 | 上海徕普太阳能科技有限责任公司 | Waste gas recovery system device of noise elimination and air cooling static catalytic cracker of internal-combustion engine |
| JP5659491B2 (en) * | 2009-01-30 | 2015-01-28 | セントラル硝子株式会社 | Semiconductor manufacturing equipment including fluorine gas generator |
| TWI432678B (en) * | 2011-02-18 | 2014-04-01 | Das Environmental Expert Gmbh | Apparatus for the thermal treatment of exhaust gases containing pollutants |
| KR101371074B1 (en) * | 2013-03-26 | 2014-03-10 | (주)제이티에스코리아 | Process waste gas combustor |
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- 2016-02-05 TW TW105103928A patent/TWI611147B/en not_active IP Right Cessation
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1040148A (en) * | 1988-08-11 | 1990-03-07 | 国营莱比锡和格里马化学设备制造联合公司 | The method of annihilating toxical waste and plasma chemical reactor |
| EP1193443A2 (en) * | 2000-10-02 | 2002-04-03 | Ebara Corporation | Combustion type waste gas treatment system |
| CN2487438Y (en) * | 2001-07-06 | 2002-04-24 | 东服企业有限公司 | Semiconductor waste gas treater with capacity of preventing dirt from piling up and corrosion |
| CN1584400A (en) * | 2003-08-20 | 2005-02-23 | 日本派欧尼株式会社 | Purifier for harmful gases |
| JP2006194544A (en) * | 2005-01-14 | 2006-07-27 | Japan Pionics Co Ltd | Noxious gas purifying apparatus |
| CN2872254Y (en) * | 2006-02-10 | 2007-02-21 | 贵阳铝镁设计研究院 | Water-cooled flange for boiled chlorination furnace |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI611147B (en) | 2018-01-11 |
| TW201632793A (en) | 2016-09-16 |
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