CN105841724A - 一种对压强和温度同时测量的干涉式光纤传感器 - Google Patents
一种对压强和温度同时测量的干涉式光纤传感器 Download PDFInfo
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 85
- 230000003287 optical effect Effects 0.000 claims abstract description 27
- 238000001228 spectrum Methods 0.000 claims abstract description 16
- 239000000835 fiber Substances 0.000 claims description 66
- 230000009471 action Effects 0.000 claims description 6
- 239000002253 acid Substances 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 5
- 230000007797 corrosion Effects 0.000 claims description 4
- 238000005260 corrosion Methods 0.000 claims description 4
- 230000008569 process Effects 0.000 claims description 4
- 238000003672 processing method Methods 0.000 claims description 4
- 238000004458 analytical method Methods 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims description 2
- 230000035945 sensitivity Effects 0.000 abstract description 6
- 230000008901 benefit Effects 0.000 abstract description 4
- 238000005259 measurement Methods 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 12
- 230000008859 change Effects 0.000 description 8
- 230000000694 effects Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000006353 environmental stress Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 201000010099 disease Diseases 0.000 description 1
- 208000037265 diseases, disorders, signs and symptoms Diseases 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000004038 photonic crystal Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000036413 temperature sense Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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- G—PHYSICS
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- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
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- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
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- G01D5/35309—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer
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Abstract
本发明涉及一种对压强和温度同时测量的干涉式光纤传感器，属于光纤传感器技术领域。本发明由压强传感器段、温度传感段和2×2单模光纤耦合器组成，其中压强传感器段和温度传感段分别连接在2×2单模光纤耦合器两干涉臂上，2×2单模光纤耦合器用于将宽带光信号持续引入压强传感器段和温度传感器段并将调制后的信号反馈；压强传感器段用于在压强作用下调制光信号，温度传感器段用于在温度作用下调制光信号。通过采集后向反射光的光谱，并分析光谱的峰或谷的波长，或对光谱进行傅立叶变换分析频谱信息实现对压强和温度的同时测量。对比已有技术，本发明具有成本低、结构稳定和无双参数交叉敏感的优点。
Description
技术领域
本发明涉及一种光纤传感器，特别涉及一种对压强和温度同时测量的干涉式光纤传感器，属于光纤传感器技术领域。
背景技术
光纤传感技术作为与通信技术和计算机技术共同构成的现代社会信息产业的三大支柱之一，因为其重要的应用价值，已成为当前传感器领域的研究热点。光纤传感技术是一种以光波为载体，光纤为媒质，通过测量光纤内部的传输光能量或者波长的变化来测量外界物理量变化的传感技术。因此，相比于传统的传感器，光纤传感器具有一系列优点，比如：体积小、灵敏度高、响应时间短、抗电磁干扰能力强等特点，弥补了传统传感器存在的缺点，被广泛应用于航天航空、石油化工、土木工程、环境监测、疾病诊断等领域。因此，光纤传感技术不但具有较高的科研价值，而且具有潜在的社会经济效益和重大的国防安全意义。
光学中的干涉法是目前已知最灵敏的探测技术之一。干涉式光纤传感器属于相位调制型传感器，相比其他类别的光纤传感器，它的灵敏度相对较高，而且具有易于制造、容易实现与光纤对接通信的特点，可以用来检测折射率、压强、应力/应变、温度、位移等物理参量。
压强和温度的检测已经广泛地应用到国民经济的各个领域，单一的干涉式光纤传感器对压强和温度两种物理参数都敏感，测量压强或温度时会出现交叉敏感的问题，很难实现压强和温度的同时测量。Denis Donlagic课题组利用特殊定制的光纤在氢氟酸腐蚀的作用下制备了可以同时测量压强和温度的传感器，但该种光纤的制备方法特殊，工艺复杂。另外，2013年，本课题组与密苏里科技大学合作采用飞秒激光微纳加工技术和熔融连接技术,在普通单模光纤上加工了封闭内腔式光纤法布里-珀罗压强传感器探头，成功地降低了温度的交叉敏感，但该传感器探头的加工困难且成本高。
发明内容
本发明的目的是为了实现对压强和温度的双参数同时测量，提供了一种对压强和温度同时测量的干涉式光纤传感器。
本发明的目的是通过如下技术方案实现的：
一种对压强和温度同时测量的干涉式光纤传感器，由压强传感器段、温度传感段和2×2单模光纤耦合器组成，其中压强传感器段和温度传感段分别连接在2×2单模光纤耦合器两干涉臂上，2×2单模光纤耦合器用于将宽带光信号持续引入压强传感器段和温度传感器段并将调制后的信号反馈；压强传感器段用于在压强作用下调制光信号，温度传感器段用于在温度作用下调制光信号。
所述压强传感器段包括依次连接在2×2单模光纤耦合器第一干涉臂上的第一实芯光纤、一段空芯的薄壁光纤和第二实芯光纤。
所述温度传感器段包括第一实芯光纤与连接在第二干涉臂上的第三实芯光纤。
所述压强传感器段空芯的薄壁光纤的长度大于第二实芯光纤的长度；温度传感器段的第三实芯光纤的长度大于压强传感器段的第一实芯光纤的长度。
一种对压强和温度同时测量的干涉式光纤传感器，加工方法如下：将2×2单模光纤耦合器的两个干涉臂分别连接第一实芯光纤和第三实芯光纤并用光纤切割刀切出平整光滑端面，两个干涉臂平整的光滑端面形成迈克尔逊干涉式温度传感器；选择第一干涉臂，与空芯的薄壁光纤进行连接，空芯的薄壁光纤与第一实芯光纤同轴；留取适宜长度的空芯的薄壁光纤，切去多余的光纤；连接第二实芯光纤，切割第二实芯光纤并研磨第二实芯光纤外表面至指定厚度，再用飞秒激光加工第二实芯光纤外表面，或氢氟酸腐蚀第二实芯光纤外表面，破坏平整性，去掉传感器外表面的反射光；这样形成的圆柱形封闭腔构成法布里-珀罗干涉式压强传感器。
所述连接可以采用熔接，活动连接或机械连接方式进行，所采用的连接需要确保稳定，且不影响压强对光纤的作用。
本发明的干涉式传感器原理上为法布里-珀罗干涉式光纤传感器与迈克尔逊干涉式传感器的复合形式：压强传感器段为法布里-珀罗干涉式光纤传感器，温度传感器段为迈克尔逊干涉式传感器。通过采集后向反射光的光谱，并分析光谱的峰或谷的波长，或对光谱进行傅立叶变换分析频谱信息实现对压强和温度的同时测量。
有益效果
所述压强传感器段和温度传感器段使用全石英的光子晶体光纤能够在1200℃的高温环境下同时检测压强和温度的变化，使用普通光纤能够在800℃以下的温度环境下同时检测压强和温度的变化。
本发明设计了一种对压强和温度同时测量的干涉式光纤传感器，直接使用2×2单模光纤耦合器将法布里-珀罗干涉式光纤传感器与迈克尔逊干涉式传感器整合到一起，通过测试复合型干涉信号的变化可同时测量压强和温度，该传感器具有成本低、结构稳定和无双参数交叉敏感的优点。
附图说明
图1为本发明的一种对压强和温度同时测量的干涉式光纤传感器压强传感器段的结构示意图；
图2为本发明的一种对压强和温度同时测量的干涉式光纤传感器的结构示意图；
图3为本发明实施例一种对压强和温度同时测量的干涉式光纤传感器原理示意图；
图4为本发明实施例一种对压强和温度同时测量的干涉式光纤传感器的等强度三光束干涉光谱图；
图5为本发明实施例一种对压强和温度同时测量的干涉式光纤传感器的空间频域干涉光谱图；
附图标记：
1-第一实芯光纤，2-空芯的薄壁光纤，3-第二实芯光纤，4-第三实芯光纤，5-光反射面a，6-光反射面b，7-光反射面c，8-2×2单模光纤耦合器，9-宽带光源，10-光谱分析仪。
具体实施方式
下面将结合附图和实施例对本发明加以详细说明。
一种对压强和温度同时测量的干涉式光纤传感器，如图1、图2所示，由分别连接在2×2单模光纤耦合器8两个干涉臂的压强传感器段和温度传感器段组成；2×2单模光纤耦合器8用于将宽带光信号持续引入压强传感器和温度传感器并将调制后的信号反馈；压强传感器段用于在压强作用下调制光信号，温度传感器段用于在温度作用下调制光信号。
加工方法如下：将2×2单模光纤耦合器8的两个干涉臂分别连接第一实芯光纤1和第三实芯光纤4并用光纤切割刀切出平整光滑端面，两个干涉臂平整的光滑端面形成迈克尔逊干涉式温度传感器；选择第一干涉臂，与空芯的薄壁光纤2进行连接，空芯的薄壁光纤2与第一实芯光纤1同轴；留取适宜长度的空芯的薄壁光纤2，切去多余的光纤；连接第二实芯光纤3，切割第二实芯光纤3并研磨第二实芯光纤3外表面至指定厚度，再用飞秒激光加工第二实芯光纤3外表面，或氢氟酸腐蚀第二实芯光纤3外表面，破坏平整性，去掉传感器外表面的反射光；这样形成的圆柱形封闭腔构成法布里-珀罗干涉式压强传感器。
实施例
下面选取单模光纤描述具体的加工方法：将2×2单模光纤耦合器8的两个干涉臂分别连接一段单模光纤并用光纤切割刀切出平整的光反射面a 5和光反射面b 6，两个干涉臂平整的光反射面a 5和光反射面b 6形成迈克尔逊干涉式温度传感器，第一干涉臂的长度大于第二干涉臂的长度，且长度差为200μm；选择第一干涉臂，与内径93μm的空芯薄壁光纤进行连接，空芯薄壁光纤与单模光纤同轴；留取长度为200μm的空芯薄壁光纤，切去多余的光纤，形成平整的光反射面c 7；连接一段单模光纤，切割单模光纤并研磨单模光纤外表面至5μm，再用飞秒激光加工单模光纤外表面，或氢氟酸腐蚀单模光纤外表面，破坏平整性，去掉传感器外表面的反射光；这样形成的圆柱形封闭腔构成法布里-珀罗干涉式压强传感器。压强传感器和温度传感器的长度根据需要的压强灵敏度和温度灵敏度确定。
工作过程
如图3所示，通过2×2单模光纤耦合器8将传感器分别与宽带光源9和光谱分析仪10连接，从宽带光源9中发出的宽带光被压强传感器段和温度传感器段构成的光反射面a 5、光反射面b 6和光反射面c 7分别反射，三束反射光经2×2单模光纤耦合器8返回光谱分析仪10。返回的三束光发生干涉，获得三光束干涉光谱，如图4所示。
本发明的一种对压强和温度同时测量的干涉式光纤传感器压强和温度的测量及解耦原理为：
当环境温度发生变化时，本发明的一种对压强和温度同时测量的干涉式光纤传感器的温度传感器段受热发生沿光纤轴向的膨胀，使两干涉臂产生的光程差变长。
当环境压强发生变化时，本发明的一种对压强和温度同时测量的干涉式光纤传感器的压强传感器段的实芯光纤膜片因受压而沿轴向垂直于实芯光纤膜片外端面向腔内弯曲，压强传感器段的空腔长度变短；传感器的温度传感器段为一端受压的实芯的单模光纤，当环境压强发生变化时，温度传感器段在压强作用下会发生整体位移，而温度传感器段本身的光程差不会发生变化。
光谱经过傅立叶变换后得到的空间频率光谱中存在三个明显的尖峰，如图5所示，从横坐标零点向右分别记作P1，P2，P3，其空间频率值与三光束干涉的光程差线性地一一对应:P1对应压强传感器段，P2对应温度传感器段，P3对应两传感器段的干涉。当环境的压强和温度同时变化时，P1和P2均会发生左右移动，两个峰随压强和温度的变化可用以下公式表示：
通过多次单一变化压强和温度实验，可以分别得到KP,FP与KT,MI，使用傅立叶变换观测对应峰的漂移可同时测量出压强和温度的变化量，即使用一种干涉式光纤传感器实现压强和温度的同时测量。
综上所述的干涉式光纤传感器可被用于同时测量的压强和温度变化。
以上所述的具体描述，对发明的目的、技术方案和有益效果进行了进一步详细说明，所应理解的是，以上所述仅为本发明的具体实施例而已，并不用于限定本发明的保护范围，凡在本发明的精神和原则之内，所做的任何修改、等同替换、改进等，均应包含在本发明的保护范围之内。
Claims (7)
1.一种对压强和温度同时测量的干涉式光纤传感器，其特征在于，由压强传感器段、温度传感段和2×2单模光纤耦合器组成；其中压强传感器段和温度传感段分别连接在2×2单模光纤耦合器两干涉臂上，2×2单模光纤耦合器用于将宽带光信号持续引入压强传感器段和温度传感器段并将调制后的信号反馈；压强传感器段用于在压强作用下调制光信号，温度传感器段用于在温度作用下调制光信号。
2.根据权利要求1所述的一种对压强和温度同时测量的干涉式光纤传感器，其特征在于：所述压强传感器段包括连接在2×2单模光纤耦合器第一干涉臂上的第一实芯光纤、一段空芯的薄壁光纤和第二实芯光纤。
3.根据权利要求1所述的一种对压强和温度同时测量的干涉式光纤传感器，其特征在于：所述温度传感器段包括第一实芯光纤与连接在第二干涉臂上的第三实芯光纤。
4.根据权利要求1-3所述的一种对压强和温度同时测量的干涉式光纤传感器，其特征在于：所述压强传感器段空芯的薄壁光纤的长度大于第二实芯光纤的长度；温度传感器段的第三实芯光纤的长度大于压强传感器段的第一实芯光纤的长度。
5.根据权利要求1所述的一种对压强和温度同时测量的干涉式光纤传感器，其特征在于，加工方法如下：将2×2单模光纤耦合器的两个干涉臂分别连接第一实芯光纤和第三实芯光纤并用光纤切割刀切出平整光滑端面，两个干涉臂平整的光滑端面形成迈克尔逊干涉式温度传感器；选择第一干涉臂，与空芯的薄壁光纤进行连接，空芯的薄壁光纤与第一实芯光纤同轴；留取适宜长度的空芯的薄壁光纤，切去多余的光纤；连接第二实芯光纤，切割第二实芯光纤并研磨第二实芯光纤外表面至指定厚度，再用飞秒激光加工第二实芯光纤外表面，或氢氟酸腐蚀第二实芯光纤外表面，破坏平整性，去掉传感器外表面的反射光；这样形成的圆柱形封闭腔构成法布里-珀罗干涉式压强传感器。
6.根据权利要求1-3和5所述的一种对压强和温度同时测量的干涉式光纤传感器，其特征在于：所述连接可以采用熔接，活动连接或机械连接方式进行。
7.根据权利要求1所述的一种对压强和温度同时测量的干涉式光纤传感器，其特征在于：所述干涉式传感器原理上为法布里-珀罗干涉式光纤传感器与迈克尔逊干涉式传感器的复合形式：压强传感器段为法布里-珀罗干涉式光纤传感器，温度传感器段为迈克尔逊干涉式传感器；通过采集后向反射光的光谱，并分析光谱的峰或谷的波长，或对光谱进行傅立叶变换分析频谱信息实现对压强和温度的同时测量。
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