CN105839061B - The NiCoCrAlY/ZrO on gamma-TiAl alloy surface2Composite coating and preparation method - Google Patents

The NiCoCrAlY/ZrO on gamma-TiAl alloy surface2Composite coating and preparation method Download PDF

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CN105839061B
CN105839061B CN201610183256.XA CN201610183256A CN105839061B CN 105839061 B CN105839061 B CN 105839061B CN 201610183256 A CN201610183256 A CN 201610183256A CN 105839061 B CN105839061 B CN 105839061B
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nicocraly
zro
layer
gamma
composite coating
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CN105839061A (en
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缪强
陆海峰
梁文萍
王昉
丁铮
胡荣耀
陈博文
李柏强
黄彪子
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Nanjing University of Aeronautics and Astronautics
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Nanjing University of Aeronautics and Astronautics
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/3464Sputtering using more than one target
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021Reactive sputtering or evaporation
    • C23C14/0036Reactive sputtering
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • C23C14/083Oxides of refractory metals or yttrium
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/16Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates

Abstract

The invention belongs to titanium alloy surface process field, the NiCoCrAlY/ZrO2Composite coating is followed successively by ZrO by surface layer to internal layer2Infiltration layer, NiCoCrAlY sedimentaries, NiCoCrAlY diffusion layers, the present invention prepares NiCoCrAlY infiltration layers using double glow plasma surface alloying technology on gamma-TiAl alloy surface, oxygen is then passed to, Zr-O permeations are carried out, one layer of ZrO is formed in NiCoCrAlY coating surfaces2Infiltration layer finally forms one layer of NiCoCrAlY/ZrO with high temperature oxidation resistance in γ-TiAl titanium alloy surfaces2Composite coating, ZrO2Infiltration layer assigns the sufficient high temperature protection ability of gamma-TiAl alloy, and the NiCoCrAlY infiltration layers on secondary surface layer can overcome ZrO under the high temperature conditions2Coating decomposes serious problem, NiCoCrAlY/ZrO2Multilayered structure make between alloy-layer and matrix have abundant and reliable bond strength, to improve the resistance to high temperature oxidation and wearability of gamma-TiAl alloy.

Description

The NiCoCrAlY/ZrO on gamma-TiAl alloy surface2Composite coating and preparation method
Technical field
The invention belongs to titanium alloy surface process field, especially a kind of NiCoCrAlY/ on gamma-TiAl alloy surface ZrO2Composite coating and preparation method.
Background technology
In order to improve the thrust-weight ratio of aerospace flight vehicle engine, save fuel, improves the operating temperature of material and subtract Its light construction weight is a kind of more important method.Ti-Al series intermetallic compounds specific strength is high, elevated temperature strength and rigidity All it is higher than Ni bases and Ti based alloys, is sent out for Aeronautics and Astronautics aircraft engine, industry gas turbine and automobile by internationally recognized Most potential one of high-temperature structural material, receives the concern of domestic and international scientist and relevant department in motivation material.Ti-Al With Ti in series intermetallic compound3Al, TiAl and TiAl3Research it is the most extensive.Wherein gamma-TiAl alloy is current domestic and international The hot spot studied extensively, quickly grows, and has stepped into the application stage.
γ-TiAl are typical Berthollide types compounds, have very wide composition range, from 48% (atom) Al To 69.5% (atom) Al, stablize always in fusing point (~1465 DEG C) following temperature, has ermal physics outstanding and heat chemistry steady Qualitative energy, this, which depends primarily on the compound, has at any temperature in the direction of orderly architectural characteristic and compound Key.γ-TiAl-base alloy not only has the characteristics that high temperature resistant, anti-oxidant and low density, but also elasticity modulus and creep-resistant property It is more excellent than Ti based alloy, even better than α2-Ti3Al based alloys and it is suitable with Ni based alloys, but its density be less than Ni bases conjunction The half of gold, temperature in use can reach 900 DEG C or more, and room temperture elastic modulus may be up to 176GPa, and with the increase of temperature and Slowly decline.These performance advantages have filled up high temperature Ti based alloys and the use blank of Ni based high-temperature alloys, it is considered to be great One of novel light high-temperature structural material of application prospect, especially to the following aerospace, engine and gas turbine etc. Very attractive.
However, at a high temperature of more than 800 DEG C, the antioxygenic property of gamma-TiAl alloy drastically declines, because of TiO2With Al2O3Formation free energy it is closer, and TiO2Formation speed be faster than Al2O3Formation speed, TiO2Oxidation film is in loose stratiform Structure, therefore TiAl alloy surface cannot form complete and fine and close protective oxide film.Since N under high temperature, O atom ooze Enter, alloy is also easy to produce time surface layer embrittlement phenomena, so as to cause the thermal stability of gamma-TiAl alloy, creep rupture strength, creep resistance and The mechanical properties such as fatigue strength substantially reduce.Meanwhile gamma-TiAl alloy tribological property is poor, there are serious adhesive wears It is inclined to fretting wear.
Thermal barrier coating refers to by metal buffer layer or the coat composed coat system of metal bonding coating and ceramic surface, mesh Before be widely used in high-temperature component surfacecti proteon field.Submit that big what is rich et al. to be prepared in titanium alloy surface using EB-PVD NiCoCrAlY+8YSZ thermal barrier coatings (aeronautical material journal, 2007,27 (4):25-30.), coating dense uniform, hardness is high, every Hot property is good, but complicated for operation, and deposition efficiency is low, and technical difficulty is big;The Pan Zhaoyi of Xi'an airspace engine factory et al. profit With air plasma spraying NiCrAlCoY+8YSZ coatings (rocket propulsion, 2013,39 (6) are prepared in stainless steel surface:48- 54.), anchoring strength of coating is high, and good heat-insulation effect, wearability is good, and thermal shock resistance is excellent at high temperature, but coating layer thickness is not Controllably, easy to fall off in use with base material in the poor mechanical bond of binding force.Therefore, how titanium alloy surface is improved Resistance to high temperature oxidation and wear-resisting performance are always this field technical barrier to be solved.
Invention content
The present invention is for high temperature oxidation resistance existing in the prior art, tribological property and binding force is poor asks Topic, provides a kind of NiCoCrAlY/ZrO on gamma-TiAl alloy surface2Composite coating and preparation method improve γ-TiAl The resistance to high temperature oxidation and wearability of alloy surface.
The present invention adopts the following technical scheme that:A kind of NiCoCrAlY/ZrO on gamma-TiAl alloy surface2Composite coating, It is characterized in that, the composite coating is followed successively by ZrO from outside to inside from surface layer2Infiltration layer, NiCoCrAlY sedimentaries, NiCoCrAlY diffusion layers.
Further, the ZrO2Alloying layer thickness is 3~5 μm, the content ZrO of Zr, O2Infiltration layer is in ladder from outside to inside from surface layer Degree declines.
Further, the NiCoCrAlY deposit thickness is 4~6 μm, and Ni, Co, Cr, Y content are heavy in NiCoCrAlY Content keeps stablizing in lamination section, and Ti, Al constituent content are in NiCoCrAlY/ZrO2Composite coating from surface layer from outside to inside not It is disconnected to increase.
Further, the NiCoCrAlY thickness of diffusion layer is 2~4 μm, and Ni, Co, Cr, Y content expand in NiCoCrAlY It dissipates layer from surface layer from outside to inside constantly to decline, Ti, Al content increase in NiCoCrAlY diffusion layers from surface layer in gradient from outside to inside To stabilization.
The present invention also adopts the following technical scheme that:A kind of NiCoCrAlY/ on gamma-TiAl alloy surface of the present invention ZrO2The preparation method of composite coating, which is characterized in that using double glow plasma surface alloying technology in gamma-TiAl alloy surface system Standby NiCoCrAlY infiltration layers, then pass to oxygen, carry out Zr-O permeations, and one layer of ZrO is formed in NiCoCrAlY coating surfaces2It oozes Layer finally forms one layer of NiCoCrAlY/ZrO with high temperature oxidation resistance on gamma-TiAl alloy surface2Composite coating, step It is as follows:
(1) gamma-TiAl alloy, NiCoCrAlY alloy target materials are encased in double glow plasma surface alloying device In, using NiCoCrAlY alloy target materials as source electrode;
(2) it vacuumizes, is filled with argon gas, start aura, the technological parameter of debugging is:
Target is with workpiece interpolar away from 15-20mm
Operating air pressure:30-35Pa
Source voltage:900-1000V
Workpiece voltage:400-450V
Temperature:900-1000℃
Soaking time:3.5-4.5h;
(3) it is zero to reduce voltage, extinguishes aura, closes power supply, is extracted into final vacuum, is cooled to room temperature, to obtain NiCoCrAlY sedimentaries;
(4) it is source electrode to change pure Zr targets, is vacuumized, and argon gas, oxygen are led to, and it is (5- to adjust argon gas and oxygen flow ratio 10):1, Zr-O permeations are carried out on NiCoCrAlY alloyed layers surface, complete ZrO2The preparation of infiltration layer, testing and measuring technology parameter are:
Target and workpiece interpolar away from:10-15mm
Operating air pressure:35-45Pa
Source voltage:850-950V
Workpiece voltage:400-450V
Temperature:800-900℃
Soaking time:2-3h;
(6) it is zero to reduce voltage, extinguishes aura, adjusts argon gas, oxygen flow zero, and deenergization is completed NiCoCrAlY/ZrO2The preparation of composite coating.
The present invention has the advantages that:
(1) ZrO prepared by double brightness Zr-O permeations2Coating, dense uniform are in metallurgy without hole, and with NiCoCrAlY infiltration layers In conjunction with bond strength is high, assigns the sufficient high temperature protection ability of gamma-TiAl alloy.
(2) the NiCoCrAlY infiltration layers on secondary surface layer can effectively delay coating Elements Atom to base in long-time high-temperature service Diffusion in vivo, overcomes ZrO under the high temperature conditions2Coating decomposes serious problem, moreover, in prolonged high-temperature oxidation environment Under, to external diffusion on the surface layer of coating selective oxidation will occur for Al in NiCoCrAlY adhesive layers, formed one layer it is fine and close Al2O3Protective film, prevents the further oxidation of bottom, and then achievees the purpose that protect matrix, the high ZrO of case hardness2It mutually can be with Improve the wearability of alloy.
(3)NiCoCrAlY/ZrO2Multilayered structure can assign its better adhesive force and fatigue resistance, and in it Ingredient, structure and the performance of alloy-layer all change in gradient, it is abundant and reliable to make to have between alloy-layer and matrix Bond strength.
Description of the drawings:
Fig. 1 is NiCoCrAlY/ZrO produced by the present invention2Composite coating surface topography map.
Fig. 2 is NiCoCrAlY/ZrO produced by the present invention2Composite coating Cross Section Morphology figure.
Specific implementation mode
Technical scheme of the present invention is further elaborated with specific embodiment below in conjunction with the accompanying drawings.
Embodiment 1
(1) it after gamma-TiAl alloy being cut into the sample of 15 × 15 × 5mm, is first polished specimen surface, then is used with sand paper Cr2O3Polishing powder is polished to minute surface, is finally placed in alcohol and is cleaned by ultrasonic;
(2) NiCoCrAlY (ingredient Ni- (20~23) Co- (20 are placed at the source electrode of double glow discharge alloying process stove respectively ~24) Cr- (11~13) Al- (0.25~0.45) Y) and pure Zr (purity 99.99%) target, size be Before shove charge, target need to be polished with sand paper totally exposes fresh surface, is cleaned by ultrasonic through absolute ethyl alcohol, dries up;
(3) gamma-TiAl alloy sample is placed on objective table, parallel face target, by NiCoCrAlY alloy target materials and γ- The distance between TiAl alloy samples are controlled in 15-20mm, then fall bell jar;
(4) it opens mechanical pump and is evacuated to 5pa hereinafter, being passed through argon gas, air pressure is 35pa in regulating stove, opens source voltage And workpiece voltage, it slowly adjusts, build-up of luminance, finally controls source voltage and workpiece voltage in 950V and 450V respectively, and wait stoves Interior temperature reaches 1000 DEG C, after keeping the temperature 4h, stops aura, deenergization, to obtain NiCoCrAlY sedimentaries;
(5) device for opening takes out NiCoCrAlY alloy target materials, and it is source electrode to change pure Zr targets, closes device, vacuumizes After be passed through argon gas, oxygen, adjust interpolar away from 10mm, argon gas and oxygen flow ratio are 5:1, source voltage is adjusted to 900V, workpiece electricity Pressure is adjusted to 400V, and in-furnace temperature is controlled at 900 DEG C, adjusts operating air pressure to 40Pa, soaking time 3h, in NiCoCrAlY alloys Layer surface carries out Zr-O permeations, completes ZrO2The preparation of infiltration layer
(6) it is zero to reduce voltage, extinguishes aura, adjusts argon gas, oxygen flow zero, and deenergization is completed NiCoCrAlY/ZrO2It is prepared by composite coating.
The test of hardness is carried out to the coating prepared, the specific test method is as follows:
Test equipment:Japan's manufacture SHIMAZU M84207 type microhardness testers;
Concrete operation method is as follows:Sample is put into alcohol first and is cleaned by ultrasonic totally, then puts to objective table, adopts Specimen surface is observed with 400 power microscopes, determines and measures hardness position, then load 100g is kept for 15 seconds automatically, demarcates impression Catercorner length prints hardness number, takes three testing means, NiCoCrAlY/ZrO2Compound layer surface average hardness is 1279HV0.1, the average hardness of γ-TiAl matrixes is 357HV0.1, the two compares, and coating hardness is far longer than matrix.Test The results are shown in Table 1:
Table 1NiCoCrAlY/ZrO2The hardness of composite coating
Using ball disk frictional wear experiment to NiCoCrAlY/ZrO2The wear-resisting property of composite coating is evaluated, specifically Test method is as follows:
Test equipment:HT-500 high temperature friction and wear testing machines;
Concrete operation method is as follows:Sample is put into alcohol first and is cleaned by ultrasonic totally, then sample is fixed on and is rubbed It wipes in disk, selects the Si of a diameter of 4.763mm (75-80HR)3N4Ceramic Balls are used as to grinding material, and to grinding radius 2mm, test carries Lotus 330g, rotating speed 560r/min, wearing- in period 30min, 20 ± 5 DEG C of test temperature use precision for the electricity of 0.1mg before and after experiment Sub- balance weighs the front and back sample mass loss of abrasion.In frictional wear experiment, coating friction coefficient is compared with matrix, Si3N4 To the hardness of abrading-ball also much larger than matrix hardness, in friction process, the depth that bead is pressed into matrix surface is deep, the resistance being subject to Power is bigger, increases so as to cause friction coefficient;And coating be not much different to abrading-ball hardness, compression distance is shallower, is subject to Resistance is small, therefore friction coefficient is low.Test result is as shown in table 2:
Table 2NiCoCrAlY/ZrO2Composite coating wearability test result
To NiCoCrAlY/ZrO2The high temperature oxidation resistance of composite coating is evaluated, and the specific test method is as follows:
Test equipment:High temperature Muffle furnace;
Concrete operation method is as follows:Sample is put into alcohol first and is cleaned by ultrasonic totally, sample is then put into Muffle In stove, it is 750 DEG C to adjust temperature, 850 DEG C, 950 DEG C, keeps the temperature 100h, is taken out every 20h, with precision is 0.1mg after natural cooling Electronic balance weighing sample mass, obtain oxidation weight gain, at 750 DEG C test in, matrix surface starts to shell after 60h It falls, at 850 DEG C, matrix oxidation aggravation is peeled off seriously after 40h, and at 950 DEG C, unstability oxidation occurs in matrix, and surface is all de- It falls, and coating, at 750 DEG C, 850 DEG C and 950 DEG C, 100h rear surfaces are complete, do not peel off.Test result is as shown in table 3:
Table 3NiCoCrAlY/ZrO2Composite coating high temperature oxidation resistance test result
NiCoCrAlY/ZrO obtained by the present invention2Composite coating surface topography map is shown in specification Fig. 1;
NiCoCrAlY/ZrO obtained by the present invention2Composite coating Cross Section Morphology figure, is shown in specification Fig. 2.
Embodiment 2
Except the parameter of Zr-O permeations is changed to operating air pressure 45Pa, source voltage 950V, cathode voltage 450V, interpolar away from for 15mm, argon gas and oxygen flow ratio 10:1, keep the temperature 2 hours outside, other steps are same as Example 1.
The present embodiment is detected in room temperature frictional wear experiment, the friction coefficient of the coating is 0.28, and wear extent is 0.57mg reduces by 77.01% compared with matrix, and 750 DEG C, 850 DEG C, 950 DEG C of high-temperature oxydation experiment shows coating after 100h It is well combined with matrix, surface is not peeled off, oxidation weight gain 25mg/cm2, anti-oxidant than being further decreased in example 1 It is functional.

Claims (5)

1. a kind of NiCoCrAlY/ZrO on gamma-TiAl alloy surface2Composite coating, which is characterized in that the composite coating from Surface layer is followed successively by ZrO from outside to inside2Infiltration layer, NiCoCrAlY sedimentaries, NiCoCrAlY diffusion layers.
2. the NiCoCrAlY/ZrO on gamma-TiAl alloy surface according to claim 12Composite coating, which is characterized in that institute The ZrO stated2Alloying layer thickness is 3 ~ 5 μm, and the content of Zr, O are in ZrO2Infiltration layer declines in gradient from outside to inside from surface layer.
3. the NiCoCrAlY/ZrO on gamma-TiAl alloy surface according to claim 12Composite coating, which is characterized in that institute The NiCoCrAlY deposit thickness stated is 4 ~ 6 μm, and Ni, Co, Cr, Y content content in NiCoCrAlY sedimentaries section are kept Stablize, Ti, Al constituent content are in NiCoCrAlY/ZrO2Composite coating is continuously increased from outside to inside from surface layer.
4. the NiCoCrAlY/ZrO on gamma-TiAl alloy surface according to claim 12Composite coating, which is characterized in that institute The NiCoCrAlY thickness of diffusion layer stated be 2 ~ 4 μm, Ni, Co, Cr, Y content NiCoCrAlY diffusion layers from surface layer from outside to inside Constantly decline, Ti, Al content increase to stabilization in gradient from outside to inside in NiCoCrAlY diffusion layers from surface layer.
5. the NiCoCrAlY/ZrO on gamma-TiAl alloy surface as described in claim 1-4 is any2The preparation method of composite coating, It is characterized in that, preparing NiCoCrAlY infiltration layers on gamma-TiAl alloy surface first with double glow plasma surface alloying technology, then It is passed through oxygen, carries out Zr-O permeations, one layer of ZrO is formed in NiCoCrAlY coating surfaces2Infiltration layer, finally in gamma-TiAl alloy table Face forms one layer of NiCoCrAlY/ZrO with high temperature oxidation resistance2Composite coating, steps are as follows:
(1)Gamma-TiAl alloy, NiCoCrAlY alloy target materials are encased in double glow plasma surface alloying device, with NiCoCrAlY alloy target materials are source electrode;
(2)It vacuumizes, is filled with argon gas, start aura, the technological parameter of debugging is:
Target is with workpiece interpolar away from 15-20mm
Operating air pressure:30-35Pa
Source voltage:900-1000V
Workpiece voltage:400-450V
Temperature:900-1000℃
Soaking time:3.5-4.5h;
(3)It is zero to reduce voltage, extinguishes aura, closes power supply, is extracted into final vacuum, is cooled to room temperature, to obtain NiCoCrAlY sedimentaries;
(4)It is source electrode to change pure Zr targets, is vacuumized, and argon gas, oxygen are led to, and it is (5-10) to adjust argon gas and oxygen flow ratio:1, Zr-O permeations are carried out on NiCoCrAlY alloyed layers surface, complete ZrO2The preparation of infiltration layer, testing and measuring technology parameter are:
Target and workpiece interpolar away from:10-15mm
Operating air pressure:35-45Pa
Source voltage:850-950V
Workpiece voltage:400-450V
Temperature:800-900℃
Soaking time:2-3h;
(5)It is zero to reduce voltage, extinguishes aura, adjusts argon gas, oxygen flow zero, and deenergization completes NiCoCrAlY/ZrO2 The preparation of composite coating.
CN201610183256.XA 2016-03-28 2016-03-28 The NiCoCrAlY/ZrO on gamma-TiAl alloy surface2Composite coating and preparation method Expired - Fee Related CN105839061B (en)

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