CN105835244A - Wire saw and method for preventing wire saw disengagement - Google Patents
Wire saw and method for preventing wire saw disengagement Download PDFInfo
- Publication number
- CN105835244A CN105835244A CN201510883693.8A CN201510883693A CN105835244A CN 105835244 A CN105835244 A CN 105835244A CN 201510883693 A CN201510883693 A CN 201510883693A CN 105835244 A CN105835244 A CN 105835244A
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- China
- Prior art keywords
- sawline
- home roll
- pressing roller
- actuator
- machined object
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/042—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with blades or wires mounted in a reciprocating frame
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0064—Devices for the automatic drive or the program control of the machines
Abstract
The present invention provides a wire saw for the purpose of preventing the disengagement phenomenon in which a saw wire is disengaged from a V groove of a main roll. In the wire saw, a first pressing roller (11b2) for pressing a saw wire (2) against a main roller (1b) is provided, and after the saw wire (2) is separated from a workpiece (3), a first saw-wire height adjusting roller (21b) is arranged at a front position where the first pressing roller (11b2) contacts. A control unit (13) estimates the movement of the contact point between the saw wire (2) and the main roller (1b) based on the driving amount of a first actuator (7b) for moving the first saw-wire height adjusting roller (21b), and drives a second actuator (6b) to operate to control the position of the first pressing roller (11b2) in the circumferential direction of the main roll (1b) based on the moving amount, thereby preventing the saw wire from being disengaged.
Description
Technical field
The present invention relates to multi-wire saw (Multi-wire saw).
Background technology
Cutting by the component that the silicon ingot processing of column becomes eight prisms to obtain by the thickness (general 180 microns) of regulation
When sheet processes silicon wafer, generally use the device being referred to as scroll saw.For scroll saw, by a sawline (approximate diameter
Be 120 microns) wind repeatedly in the shape of a spiral on multiple (2～4) home roll after, make sawline run at high speed in one direction into
Row section (slice) processing.
In scroll saw, there is the following two kinds mode: utilize sawline to be blended with abrasive particle and the material of working fluid of processing
(slurry) is embrocated and is carried out, in machined object, the mode cut；And utilize the abrasive particle (such as diamond etc.) being fixed with processing
The mode directly machined object cut of sawline.
This scroll saw work in-process, sawline can fly out from the V groove of home roll (de-groove, off-line) sometimes, and moves to adjacent V groove
Dynamic.As the problem caused by this phenomenon, exist the most processed wafer has the problem of a piece of generation unqualified thickness lattice,
Two sawlines mutually abrade and cause the problem etc. of broken string.If work in-process sawline breaks, then the ingot in processing can be made complete
Portion scraps, and the recovery time to be expended of processing unit (plant), therefore brings the problem suffering greater loss.
In recent years, compared with using existing slurry, the mode of the sawline of the abrasive particle being fixed with processing is used to make
The processing capacity of time per unit increases, and overall process time shortens such that it is able to improve productivity ratio, and the most more employing uses
It is fixed with the mode of the sawline of the abrasive particle of processing.
In the case of using the sawline being fixed with abrasive particle, the probability that sawline produces broken string is high, it addition, in scroll saw, saw
The de-groove of line becomes very important problem.
Then, in using the processing of sawline of the abrasive particle being fixed with processing, it is known to some for reducing sawline
The structure of de-groove.
In patent documentation 1, it is provided with anticreep grooved roller as shown in Figure 12.This existing scroll saw is configured to: will saw
The winding tension of line 32 is set as T1 and is wound on two home rolls 31a, 31b, to connect on the circumference of home roll 31a, 31b
Mode is respectively configured two total of four pressing roller 41,41,41,41, and by pressing roller 41 to sawline 32 and home roll 31a, 31b
The point (contact point) connected presses.
By utilizing pressing roller 41 to press sawline 32, thus the sawline tension force between home roll 31a-31b becomes T2, sawline
Tension force becomes the relation of T1 ＜ T2.Machined object 34 is processed by being pressed on this sawline 32.Even if here, making in midway
Acceleration and deceleration sharp in the alternating movement of the travel direction reversion of sawline 32, the tension force T2 of sawline 32 remains solid with also restraining oneself
Fixed, the most under any circumstance can keep the relation of T1 ＜ T2.It addition, can contact with home roll 31a, 31b at sawline 32
Point (contact point) sawline 32 is pressed into the suitable V groove of home roll 31a, 31b.As a result of which it is, without compromising on home roll 31a,
31b and the life-span can be increased, and be prevented from sawline 32 and depart from from the V groove of home roll 31a, 31b.
Patent documentation 1: Japanese Unexamined Patent Publication 2013-018082 publication
But, in existing structure, just start processing after, even if can utilize pressing roller 41 sawline 32 is pressed into
In the suitable V groove of home roll 31a, 31b, it may have following technical problem: work in-process bends when sawline 32 and makes home roll
When the contact point of 31a, 31b and sawline 32 changes, it is impossible to by pressing roller 41, sawline 32 is pressed into home roll 31a, 31b
In suitable V groove, thus de-groove can occur.
Summary of the invention
It is an object of the invention to, it is provided that even if the flexure of a kind of work in-process sawline changes also will not produce de-groove
Scroll saw.
The scroll saw of the present invention be possess be wound between the multiple home rolls rotatably arranged sawline, by by described
Sawline relatively presses on the scroll saw that machined object carries out cutting into slices.And, described scroll saw is characterised by, possesses the first pressing
Roller, described first pressing roller is arranged on described sawline and leaves from described machined object and start to contact with described home roll
Entrance, there is the circumferencial direction along described home roll and move mechanism freely, and described sawline is pressed on described home roll.This
Outward, described scroll saw possesses: the first sawline height adjustable rollers, and it is arranged on described sawline will be with institute after described machined object leaves
State the position, front of pressing roller contact, and can be relative relative to described machined object while described sawline is pressed
The mode of ground movement regulates the height of sawline；First actuator, it regulates the height position of described first sawline height adjustable rollers
Put；And second actuator, it regulates described first pressing roller position on the circumferencial direction of described home roll.And, described
Scroll saw possesses control portion, described in described control portion is based on the position according to described first sawline height adjustable rollers and determines
Sawline and the amount of movement of the contact point of described home roll, make described second actuator operating control the position of described first pressing roller
Putting, the position of described first sawline height adjustable rollers determines according to the drive volume of the first actuator.
Invention effect
According to the present invention, described in control portion is based on the position according to described first sawline height adjustable rollers and determines
Sawline and the amount of movement of the contact point of described home roll, make described second actuator operating control the position of described first pressing roller
Putting, the position of wherein said first sawline height adjustable rollers determines according to the drive volume of the first actuator, so even adding
In the case of the deflection of the sawline in work there occurs change, it is also possible to prevent sawline from flying out from the V groove of home roll.
Accompanying drawing explanation
Fig. 1 is the front view of the scroll saw in embodiments of the present invention.
Fig. 2 is cuing open of the front view ideally that is introduced in the V groove of the home roll of this embodiment of mud and home roll
View.
(a)～(d) of Fig. 3 is the pressing at each position ideally representing that mud is introduced in the V groove of home roll
The sectional view of the relation between roller, home roll and sawline.
Fig. 4 is in this embodiment, the point that the home roll under state in the V groove of mud entrance home roll connects with sawline
Enlarged drawing.
(a)～(d) of Fig. 5 is to represent that mud enters into the pressing roller at each position under the state in the V groove of home roll, master
The sectional view of the relation between roller and sawline.
(a), (b) of Fig. 6 is to represent in this embodiment, utilizes sawline height adjustment roller in the case of pressing sawline
Processing in home roll and each sawline between the axonometric chart of relation and explanatory diagram during major part viewed from above.
Fig. 7 is to represent in this embodiment, home roll, sawline, machined object, pressing roller and sawline height adjustable rollers it
Between the sectional view of relation.
Fig. 8 is the front view of the scroll saw of comparative example.
Fig. 9 is to represent in a comparative example, and mud enters between pressing roller and sawline under the state in the V groove of home roll
The front view of relation.
(a)～(c) of Figure 10 is to represent in a comparative example, and mud enters into each position under the state in the V groove of home roll
The sectional view of the relation between pressing roller and the sawline at place.
(a), (b) of Figure 11 is to represent in a comparative example, the pass between machined object, home roll and sawline in processing
The explanatory diagram when axonometric chart of system and major part viewed from above.
Figure 12 is the front view of existing scroll saw.
Drawing reference numeral illustrates:
1a, 1b home roll
2 sawlines
3 machined objects
4 machined object holding appliances
5a, 5b link accessory
6a, 6b actuator
7a, 7b actuator
8 sawlines and the contact point of home roll
11a1,11a2,11b1,11b2 pressing roller
12 scroll saw main bodys
13 control portions
The V groove of 14 home rolls
The protuberance of 15 pressing roller 11
The front end of 16 protuberances 15
17 mud
21a, 21b sawline height adjustable rollers
The direct of travel of a sawline 2
The direction of rotation of each roller of b
The point that the bottom surface of P1 sawline connects with the top of the V groove of home roll
The point that the upper surface of P2 sawline connects with the top of the V groove of home roll
The point that P3 sawline connects with the V groove being arranged at home roll
Detailed description of the invention
Hereinafter, the embodiment of the scroll saw of the present invention is illustrated.
It should be noted that in the following description, the symbol identical to identical structure mark, and suitably omit the description.
Fig. 1 is the figure of the basic structure representing the scroll saw in embodiments of the present invention, is the master observing scroll saw from front
Figure during roller 1a, 1b.
In this scroll saw, it is provided with two home roll 1a, 1b, rolls up in the shape of a spiral on major axes orientation relative to home roll 1a, 1b
Around sawline 2, make the holding appliance i.e. machined object holding appliance 4 that machined object 3 moves to the direction pressing on sawline 2.Profit
With machined object holding appliance 4, machined object 3 is configured at the top of sawline 2.
A illustrates the direct of travel of sawline 2, and b illustrates the direction of rotation of each roller.Here, as an example of sawline 2, Ke Yiju
Go out diamond saw wires.One example of machined object 3 is silicon ingot.The multiple V grooves engaged with sawline 2 are with the spacing corresponding with slice thickness
It is formed on the surface of home roll 1a, 1b.
In FIG, sawline 2 turns clockwise, and sawline 2 leaves home roll 1a, via the rotatable sawline of pressing sawline 2
Height adjustable rollers 21a and enter machined object 3, after leaving machined object 3, via pressing sawline 2 rotatable sawline
Height adjustable rollers 21b and enter home roll 1b.Then, after leaving home roll 1b, sawline 2 is again introduced into home roll 1a.
At sawline 2 near home roll 1a exit, it is provided with the rotatable roller that sawline 2 is pressed on home roll 1a
I.e. pressing roller 11a1.For this pressing roller 11a1, by linking the master of the accessory 5a main shaft by home roll 1a and pressing roller 11a1
Axle connects, and is provided with, in this link accessory 5a, the mechanism positioned by telescopic actuator 6a, so that this pressing roller
11a1 lightheartedly can move along the circumferencial direction of home roll 1a.Actuator 6a is not connected this side's with link accessory 5a
End links with scroll saw main body 12 in the way of can rotatably moving.The entrance contacted with home roll 1a is started at sawline 2
Near, it is provided with rotatable roller i.e. pressing roller 11a2 that sawline 2 is pressed on home roll 1a.
The actuator of e.g. based on servo motor the ball screw drive systems of actuator 6a, driving by servo motor
Move and make ball-screw rotate and determine length, and pressing roller 11a1 can be calculated according to the value of the encoder of servo motor
Position.
Start the entrance contacted with home roll 1b at sawline 2, be provided with and sawline 2 is pressed on the rotatable of home roll 1b
Roller i.e. pressing roller 11b2.For this pressing roller 11b2, by linking accessory 5b by the main shaft of home roll 1b and pressing roller 11b2
Main shaft connect, and this link accessory 5b positions by telescopic actuator 6b, so that this pressing roller 11b2 can edge
The circumferencial direction of home roll 1b lightheartedly moves.This actuator 6b is not connected the end of this side with energy with link accessory 5b
Enough modes rotatably moved link with scroll saw main body 12.At sawline 2 near home roll 1b exit, be provided with by
Sawline 2 presses on rotatable roller i.e. pressing roller 11b1 of home roll 1b.
The actuator of e.g. based on servo motor the ball screw drive systems of actuator 6b, driving by servo motor
Move and make ball-screw rotate and determine length, and pressing roller 11b2 can be calculated according to the value of the encoder of servo motor
Position.
Sawline height adjustable rollers 21a is arranged at machined object holding appliance 4 via actuator 7a, is driven by work in-process
Dynamic ball-screw such that it is able to the height and position of up-down adjustment sawline height adjustable rollers 21a.The height of sawline height adjustable rollers 21a
Degree position can calculate according to the value of the encoder of the servo motor driving actuator 7a.Actuator 7a is e.g. based on servo
The actuator of the ball screw drive systems of motor.
Sawline height adjustable rollers 21b is arranged at machined object holding appliance 4 via actuator 7b, has by processing
Middle driving ball-screw and can the mechanism of height and position of up-down adjustment sawline height adjustable rollers 21b.Sawline height adjustable rollers
The height and position of 21b can calculate according to the value of the encoder of the servo motor driving actuator 7b.Actuator 7b is e.g.
The actuator 7b of ball screw drive systems based on servo motor.
It should be noted that pressing roller 11a1,11a2,11b1,11b2, sawline height adjustable rollers 21a, 21b are the most relatively
In home roll 1a, 1b main axis parallel install.
The drive volume that pressing roller 11a1 drives the actuator 6a to optimum position is high based on driving sawline by controlling portion 13
The drive volume of the actuator 7b of degree regulation roller 21a controls.
The drive volume that pressing roller 11b2 drives the actuator 6b to optimum position is high based on driving sawline by controlling portion 13
The drive volume of the actuator 7b of degree regulation roller 21b controls.
Rotation along with home roll 1a, 1b drives, and the sawline 2 of scroll saw revolves with the speed close to probably every point of 1000m
Turn.And, while supplying working fluid to the sawline 2 carrying out rotating with this speed, make to be added according to the instruction of processor
Work thing 3 the most relatively moves with the speed of every point of about 1mm, thus carries out the cutting of the i.e. silicon ingot of an example of machined object 3
Sheet.
For should cutting into slices, it is processed while the alternating movement carrying out making sawline 2 repeatedly rotate forward and reverse.Entering
The reason being processed while row alternating movement is, is efficiently used the abrasive particle being fixed on sawline 2.At sawline 2 only to one
In the case of advancing in direction, machined object is processed by the one side merely with abrasive particle, but by making sawline 2 the most round about
Advance such that it is able to utilizing the both sides of abrasive particle to be processed machined object, the processing capacity of sawline unit length becomes twice.
Now, pressing roller 11a1 in Fig. 1,11a2,11b1,11b2, sawline height adjustable rollers 21a, 21b and sawline 2 phase
Connect, and rotate along the travel direction of sawline 2.Therefore, at sawline 2 along in the case of a of direction, sawline 2 starts with main
The entrance of roller 1a, 1b contact is positioned at the position of pressing roller 11a2,11b2.In the case of sawline 2 oppositely moves with direction a,
The entrance that sawline 2 starts to contact with home roll 1a, 1b is positioned at before for pressing roller 11a1 exported, the position of 11b1.
In the present invention, anticreep groove mechanism is configured to start, at sawline 2, the entrance that contact with home roll 1a, 1b and export setting
Identical mechanism, this be in order to no matter sawline 2 to which direction move can anti-dislocation preventing slot.
Fig. 2 illustrates home roll 1a, 1b when mud is introduced into being located at the perfect condition in the V groove of home roll 1a, 1b and sawline 2 phase
The front view being exaggerated of the point connect and the sectional view of home roll 1 correspondingly.
It should be noted that for the purpose of simplifying the description, Fig. 2 and (a)～(d), Fig. 4 of aftermentioned Fig. 3 to be illustrated,
Fig. 5, Fig. 9, Tu10Zhong, carry out labelling to mutually isostructural part mark monadic symbols as follows.
Home roll 1a, 1b are designated generally as home roll 1.14 is the V groove of the periphery of this home roll 1.Pressing roller 11a1,11a2,11b1,
11b2 is designated generally as pressing roller 11, and sawline height adjustable rollers 21a, 21b are designated generally as sawline height adjustable rollers 21.
As shown in (a) of Fig. 3, on pressing roller 11a1,11a2,11b1,11b2, with the V groove 14 being located at home roll 1a, 1b
The identical spacing of spacing be provided with protuberance 15.Pressing roller 11a1, the protuberance 15 of 11a2,11b1,11b2 and the V of home roll 1a, 1b
The position consistency of groove.It addition, pressing roller 11a1,11a2,11b1,11b2 protuberance 15 at least front end 16 use with roller main body not
The raw material of same color.
Position P1, the position P2 described in Fig. 2, Fig. 4, Fig. 9 is positioned at position P3 apart by size and the sawline 2 of home roll 1
The position of the well-determined distance of diameter, wherein position P3 refer to sawline 2 be arranged at home roll 1 the position that connects of V groove 14
Put.When the distance of position P3 to position P1 is set to x1, the distance of position P3 to position P2 is set to x2Time,
Here, R1Represent the peripheral radius of home roll 1, r1The base of the expression sawline 2 to connect with the V groove 14 being located at home roll 1
As the radius of circumference, d represents the diameter of sawline 2.
In fig. 2, solid line is the peripheral radius of home roll 1, and dotted line is the sawline 2 under the state that the V groove with home roll 1 connects
Base.The periphery of pressing roller 11 illustrates with single dotted broken line.Here, the periphery of pressing roller 11 refers to, comprise until pressing roller 11a1,
Peripheral radius till the front end of the protuberance 15 of 11a2,11b1,11b2.
Sawline 2 is advanced to the right from the left side of Fig. 2.The position P1 of Fig. 2 is that the bottom surface of sawline 2 starts and by the V groove of home roll 1
Top and the position that connects of the built on stilts line that links up of top, position P2 is the upper surface V groove with home roll 1 of sawline 2
The position that top is consistent, position P3 is the position that sawline 2 connects with the V groove being arranged at home roll 1.
Pressing roller 11, between this position P1 and position P2, is maintained at such position that connects with sawline 2.Wherein, pressing
Roller 11a1,11b2 are also actuated device 6a, 6b and drive to optimum position, and remaining pressing roller 11a2,11b1 are fixed on scroll saw
Main body 12.
Then, the effect to pressing roller 11a1,11b2 is described in detail.
(a)～(d) of Fig. 3 illustrates the relation between the pressing roller 11 at each position, home roll 1 and sawline 2.Fig. 3's
A () is the sectional view of the home roll 1 at the position P1 of Fig. 2, (b) of Fig. 3 is between position P1 in fig. 2 and position P2, pressing
The sectional view of the home roll 1 when roller 11 connects with sawline 2, (c) of Fig. 3 is the sectional view of the home roll 1 at the position P2 of Fig. 2, Fig. 3's
D () is the sectional view of the home roll 1 at the position P3 of Fig. 2.
As shown in (b) of Fig. 3, owing to sawline 2 invades the V groove 14 of home roll 1, therefore pressing roller at position P1～position P2
11 by between this position P1～position P2 connect with sawline 2 and meanwhile in the way of the V groove 14 of home roll 1 is pressed into sawline 2 dynamic
Make.
Now, even if the protuberance of pressing roller 11a1,11b2 weares and teares due to the friction with sawline 2, it is contemplated that this mill
Damage amount, make based on the instruction from control portion 13 pressing roller 11a1,11b2 position to the main shaft of home roll 1a, 1b close to by
The amount that the wear extent of pressure roller is corresponding, thus also be able to make pressing roller 11a1,11b2 continue the side of point cantact with protuberance 15 and sawline 2
Formula action.
Scroll saw with the comparative example shown in Fig. 8 illustrates the effect of pressing roller 11a1,11b2 contrastively.
Two home rolls 31a, 31b of the scroll saw of comparative example are corresponding to home roll 1a, 1b of Fig. 1, and sawline 32 is corresponding to the saw of Fig. 1
Line 2, machined object 34 is corresponding to the machined object 3 of Fig. 1.Pressing roller 41a2,41b1 correspond to pressing roller 11a2 of Fig. 1,11b1.
Pressing roller 11a2 of the embodiment shown in Fig. 1,11b1 are controlled respective position by actuator 6a, 6b, but should
Pressing roller 41a1 of the outlet side being arranged at home roll 31a of comparative example and be arranged at pressing roller 41b2 of entrance side of home roll 31b
Position fixed, its position will not be moved.
Fig. 9 illustrates the master during state in the V groove that mud 17 in the comparative example shown in Fig. 8 enters into home roll 31a, 31b
The point that roller 31a, 31b connect with sawline 32 amplifies the front view of gained.
It should be noted that at Fig. 9, Figure 10, Tu11Zhong, for the purpose of simplifying the description, mutually isostructural home roll 31a, 31b are unified
Being labeled as 31, pressing roller 41a1,41a2,41b1,41b2 are designated generally as 41.Solid line represents the periphery of home roll 31, and dotted line table
The periphery on the base that the V groove showing sawline 32 and be arranged at home roll 31 connects, single dotted broken line is the periphery of pressing roller 41.Here, Fig. 9
Position P1, position P2, position P3 identical with position illustrated in fig. 2.
(a)～(c) of Figure 10 illustrates the home roll 31 of Fig. 9, relation between the pressing roller 41 at each position and sawline 32.
(a) of Figure 10 is the sectional view of the home roll 31 at the position P1 of Fig. 9, and (b) of Figure 10 is cuing open of the home roll 31 at the position P2 of Fig. 9
View, (c) of Figure 10 is the sectional view of the home roll 31 at the position P3 of Fig. 9.
In the case of mud 17 enters into the V groove of home roll 31, sometimes when (b) of Figure 10, sawline 32 is easily sent out
Life slides laterally, and causes sawline 32 to enter in the V groove of adjacent mistake.After sawline 32 takes off groove, even if at (c) of Figure 10
Position utilize pressing roller 41 to be pressed into V groove by sawline 32, owing to not the situation of the de-groove occurred not being modified
Effect, the most also cannot anti-dislocation preventing slot.I.e., in a comparative example, in the case of mud 17 enters into the V groove 14 of home roll 31,
Pressing roller 41 cannot be utilized to prevent the de-groove of sawline 32.
Relative to this comparative example, in the structure of fig. 1, even if in the case of mud 17 enters into the V groove 14 of home roll, also
It is prevented from de-groove.Fig. 4 illustrates that the mud 17 shown in (a)～(d) of Fig. 3 enters into the situation in the V groove 14 being arranged at home roll 1
Under the enlarged drawing of point that connects with sawline 2 of home roll 1.Solid line represents the periphery of home roll 1, and dotted line represents sawline 2 and home roll 1
The periphery on the base that V groove 14 connects, single dotted broken line is the periphery of pressing roller 11.
Fig. 5 illustrates the relation between the pressing roller 11 at each position of Fig. 4, home roll 1 and sawline 2.(a) of Fig. 5 is figure
The sectional view of the home roll 1 at the position P1 of 4, (b) of Fig. 5 is pressing roller 11 and saw between position P1 in the diagram and position P2
The sectional view of the home roll 1 when line 2 connects, (c) of Fig. 5 is the sectional view of the home roll at the position P2 of Fig. 4, and (d) of Fig. 5 is Fig. 4
Position P3 at the sectional view of home roll.
At the position P1 than Fig. 4 by front, owing to not being the top of the sawline 2 as shown in Fig. 5 (a) and home roll 1
The position connected, if pressing roller to be utilized 11 presses sawline 2, then can make from sawline 2 to pressing roller 11 resistance
Sawline 2 laterally moves, and therefore sawline 2 likely enters by mistake through the recess of pressing roller 11.In this case, sawline 2 enters into
Probability in the adjacent V groove of home roll 1 increases.On the other hand, if pressing roller 11 presses at the position P1～position P2 of Fig. 4
Sawline 2, then as shown in (b) of Fig. 5, when sawline 2 invades to the V groove 14 that mud 17 is entered, it is possible to will go into V groove 14
Mud 17 is outwards extruded and is pressed into correct V groove 14 by sawline 2 simultaneously.
On the contrary, as shown in (c) of Fig. 5, at the P2 rearward position, position than Fig. 4, sawline 2 upper from home roll 1 completely
While invade in V groove 14.Therefore, adjacent V groove has been invaded in the case of mud 17 enters into V groove 14 and at sawline 2
In the case of, even if making pressing roller 11 action that sawline 2 also cannot be made to return in correct V groove.
Therefore, between the position P1～position P2 of Fig. 4, sawline 2 is pressed by pressing roller 11, even if thus entering at mud
Enter in the case of the V groove of home roll 1, it is also possible to prevent sawline 2 from entering into the V groove of mistake.That is, invade to home roll 1 at sawline 2
Entrance, sawline 2 is pressed into home roll 1 between the position P1～position P2 of the Fig. 2 as optimum position by pressing roller 11, by
This is prevented from the de-groove of sawline 2.
Here, in the case of sawline 2 is advanced round about, sawline 2 is exchanged relative to entrance, the outlet of home roll 1.Cause
This, in the present invention, as it is shown in figure 1, by arranging pressing roller 11a1,11b2 the two pressing roller, even if thus sawline 2 to
In the case of rightabout is advanced, it is also possible to work in-process prevents the de-groove of sawline 2 all the time.
It addition, in the case of being directly attached with mud on sawline 2, entering below the home roll observed from device front
The de-groove of sawline also can occur at Kou.Therefore, as it is shown in figure 1, in the entrance of sawline 2 being present in below each home roll, outlet
Near, connect between the position P1 shown in Fig. 2 and position P2 such position with sawline 2, by pressing roller 11a2,11b1 peace
It is loaded on equipment.So, even if in the case of mud arrives below home roll, it is also possible to prevent the de-groove of sawline 2.
It addition, as shown in (a)～(d) of Fig. 3, due to sawline 2 and pressing roller 11 point cantact, therefore, it is possible to make pressing roller
11a1,11a2,11b1,11b2 maintain the shape of pressing sawline 2, by increasing capacitance it is possible to increase the roller life-span of pressing roller 11.In pressing roller 11 it is
In the case of plain-barreled roll, can wear and tear in surface, thus quickly cannot guarantee to press the function of sawline 2.Additionally, due to utilize and press
The raw material of the color that the main part of pressure roller 11 is different makes at least fore-end of the protuberance of pressing roller 11, therefore convex
When portion there occurs abrasion, operator also is able to by visually easily verifying that wear condition, therefore, it is possible to easily differentiate roller
Replacing period.
Then, sawline height adjustable rollers 21a, 21b are illustrated.
In the case of the sawline using the abrasive particle being fixed with processing, when the surplus of the abrasive particle being fixed on sawline 2 reduces
Time, the processing capacity of time per unit reduces, thus produces the phenomenon that process velocity declines.Generally, scroll saw is by with fixing speed
Machined object 3 is pressed on sawline 2 and is processed by degree, but owing to the process velocity of each sawline 2 is according to being fixed on sawline 2
The surplus of abrasive particle and some deviations occur, therefore produce the sawline that the distance of bottom surface away from machined object 3 is shorter than other sawline 2
2.Therefore, along with processing is carried out, produce the machined surface no longer level of the sawline remaining level relative to the bottom surface of machined object
Such problem.
(a), (b) of Figure 11 illustrates in the processing in the comparative example of the Fig. 8 being not provided with sawline height adjustable rollers 21a, 21b
Machined object 34, home roll 31, the relation of sawline 32.
In this case, when the machined surface of sawline 32 is relative to the bottom surface no longer level of machined object 34, sawline 32
Also become different from the position (contact point) that home roll 31 connects.In (b) of Figure 11, the machined surface of sawline 32 is shown with dotted line 22
It is the contacting points position between sawline 32 and the home roll 31 in the case of level relative to the bottom surface of machined object 34, when sawline 32
Machined surface relative to the bottom surface no longer level of machined object 34 time, the contacting points position between sawline 32 and home roll 31 becomes empty
As shown in line 23.In the figure, in order to illustrate the contacting points position between sawline 32 and home roll 31, and not shown sawline 32 with
Part before home roll 31 contact.
When producing this phenomenon, each sawline 32 not parallel relative to the main shaft of home roll 31 with the contact point of home roll 31.Cause
This, if relative to home roll 31 main axis parallel if the pressing roller 41 installed, inherently produce and be not pressed against home roll 31
Sawline 32, thus cannot anti-dislocation preventing slot.
On the other hand, in the case of being provided with the scroll saw of Fig. 1 of sawline height adjustment roller 21a, 21b, owing to utilizing saw
Line height adjustment roller 21a, 21b press sawline 2, therefore, it is possible to anti-dislocation preventing slot.(a), (b) of Fig. 6 illustrates adding in the case of this
The relation between home roll 1 and each sawline 2 in work.It should be noted that sawline height adjustable rollers 21a, 21b are designated generally as saw
Line height adjustable rollers 21.The dotted line 22 of (b) of Fig. 6 illustrates the contacting points position between sawline 2 and home roll 1.In order to illustrate sawline 2
And the contacting points position between home roll 1, the most not shown with the situation of (b) of Figure 11 contact with home roll 1 before sawline 2.
So, by making sawline height adjustable rollers 21 action, so that the contact point of home roll 1 and each sawline 2 is relative to home roll 1
The mode of main axis parallel press sawline 2 such that it is able to make the machined surface of sawline 2 become water relative to the bottom surface of machined object 3
Flat.
Specifically, by utilizing sawline height adjustable rollers 21 to press sawline 2, thus with each sawline 2 near quilt
The matched ground of the sawline of the bottom surface of machining object controls height and position, so that the bottom surface that each sawline 2 is away from machined object 3
Relative altitude is consistent.So, it is possible to make the machined surface of sawline 2 remain level relative to the bottom surface of machined object 3.By
This, the contact point of home roll 1 and sawline 2 is relative to the main axis parallel of home roll 1.
Therefore, it is possible to utilize relative to the main axis parallel of home roll 1 the pressing roller 11 installed all of sawline 2 is pressed on
Home roll 1, it is possible to anti-dislocation preventing slot.
It should be noted that using the situation of polyurethane elastomeric material as sawline height adjustable rollers 21a, 21b
Under, sawline height adjustable rollers 21a, 21b arrange V groove etc. the most especially but it also may be set as desired and pass through
The recesses such as the V groove of sawline 2 engaging.
Sawline height adjustable rollers 21a, 21b are entered with pressing roller 11a1, the Cooperation controlling mechanism of 11b2 and control portion 13
Row explanation.
First, the structure of Cooperation controlling mechanism is illustrated.
As it is shown in figure 1, be provided with roller 21a, 21b of the height of regulation sawline 2 before and after immediately following machined object 3.Fig. 7 shows
Go out home roll 1, sawline 2, machined object 3, pressing roller 11, the graph of a relation of sawline height adjustable rollers 21.Dotted line is the state before processing.
Single dotted broken line illustrates the movable direction of sawline height adjustable rollers 21 and pressing roller 11.
First, control portion 13 carries out indicating the position determining sawline height adjustable rollers 21 to actuator 7a, 7b, so that
Parallel relative to the bottom surface of machined object 3 with the sawline 2 that home roll 1 and sawline height adjustable rollers 21 connect.
Then, at the position configuration machined object 3 connected with sawline 2.Then, as in figure 2 it is shown, by pressing roller 11 with
From the contact point of home roll 1 and sawline 2 respectively away between the distance of x1, x2 between the position P1 and position P2 of i.e. Fig. 2 and sawline 2
The mode connected configures, and using this as initial position
It is processed by be pressed on sawline 2 machined object 3 with the speed determined and carries out.Now, by control portion 13
The sawline height adjustable rollers 21 controlled is controlled as, and presses with optimum height according to the state of the slowest sawline 2 of process velocity
Each sawline 2, thus automatically determine the position of sawline height adjustable rollers 21.The solid line of Fig. 7 is the state in processing.Such as Fig. 7 institute
Showing, sawline 2 connects with sawline height adjustable rollers 21 and home roll 1 all the time.Sawline 2 with contact point 8a, 8b of each roller due to energy
Enough it is thought of as the tangent line mathematically connected with two circles, therefore, it is possible to uniquely obtain.
Control portion 13, according to the displacement between initial position and the current location of sawline height adjustable rollers 21, releases pressing roller
The displacement from initial position of 11, carries out the position control of pressing roller 11.As concrete steps, first, utilize shown in Fig. 1
The encoder of actuator 7a, 7b measures the displacement from initial position of sawline height adjustable rollers 21.
Then, according to the displacement of the sawline height adjustable rollers 21 determined, the sawline 2 with initial position is mathematically calculated
On the basis of the slope of sawline 2.When the radius on the base connected with the V groove being arranged at home roll 1 by sawline 2 is set to r1, by main shaft
Coordinate be set to x, y, the radius of sawline height adjustable rollers 21 is set to r2, when the coordinate of main shaft is set to x (t), y (t), it is possible to
Obtaining tangent line, tangent slope becomes the slope of sawline 2.Can be according to the radius r of this slope θ (t) He home roll1, mathematically
Determine the amount of movement r of sawline 2 and the contact point of home roll 11θ (t), it is possible to use actuator 6a, the 6b shown in Fig. 1 and by pressing roller
11a1,11b2 control in above-mentioned optimum position.
Machined object 3 is pressed on sawline 2 by scroll saw and carries out machining, but due to processing resistance, sawline meeting
Such as bending as shown in Figure 8 of comparative example, therefore the contact point of sawline 32 and home roll 31 also with sawline 32 deflect into ratio
Example ground is mobile.Accordingly, it would be desirable to make pressing roller 41a1,41b2 move in the way of following contact point all the time and be pressed on by sawline 32
Home roll 31a, 31b.
But, the flexure of sawline 32 due to processing conditions, sawline 32 or machined object 34 state etc. and work in-process begins
Persistently change eventually, be the most directly measured, but due in processing substantial amounts of cutting fluid be injected into sawline 32, therefore cannot
Utilize laser length meter to measure the height of sawline 32.Thus, it is impossible to make pressing roller 41a1,41b2 follow home roll 31a, 31b with
The contact point of sawline 32.
On the other hand, in the embodiment shown in Fig. 1, unique according to the height of sawline height adjustable rollers 21a, 21b
Ground determines the flexure of sawline 2.It is additionally, since the contact point obtaining sawline 2 uniquely with home roll 1a, 1b, also therefore is able to pass through
Control portion 13 obtains the sawline 2 that will be present at contact point fixed position uniquely and presses on the optimum bit of home roll 1a, 1b
Put.Therefore, it is possible to pressing roller 11a1,11b2 are controlled to optimum position by control portion 13, it is possible to solve asking of sawline 2 flexure
Topic.
Even if as a result of which it is, work in-process sawline 2 occurs flexure to make sawline 2 become with the contact point of home roll 1a, 1b
Change, it is also possible in optimum position, sawline 2 is pressed on home roll 1a, 1b all the time, it is possible to the most anti-dislocation preventing slot of work in-process.
In the above-described embodiment, said in case of the slice processing carrying out silicon for solar cell ingot
Bright, but in the section field of the materials such as the slice processing of quasiconductor silicon, metal, pottery, sapphire, carborundum (SiC) also
Can apply.
In the above-described embodiment, machined object 3 is pressed on sawline 2 and cuts into slices, but sawline 2 is being pressed
On machined object 3, carry out situation about cutting into slices and make sawline 2 and these both sides of machined object 3 move to carry out to cut into slices
In the case of too.I.e., it is possible to carry out the scroll saw cut into slices is implemented relatively pressing sawline 2 to machined object 3.
In the above-described embodiment, said in case of being wound with sawline 2 between two home rolls 1a, 1b
Bright but it also may between the home roll more than three, to be wound with in the scroll saw of sawline 2 enforcement.
Industrial utilizability
The present invention is favorably improved the quality using the product by the various materials of wire saw slicing.
Claims (4)
1. a scroll saw, it possesses the sawline being wound between the multiple home rolls rotatably arranged, by by described sawline
Relatively press on machined object to cut into slices,
Described scroll saw is characterised by possessing:
First pressing roller, it is arranged on described sawline and leaves from described machined object and start to contact with described home roll
Entrance, there is the circumferencial direction along described home roll and move mechanism freely, and described sawline is pressed on described home roll；
First sawline height adjustable rollers, it is arranged on described sawline and to contact with described pressing roller after described machined object leaves
Position, front, and in the way of relatively can moving relative to described machined object while described sawline is pressed
Regulate the height of sawline；
First actuator, it regulates the height and position of described first sawline height adjustable rollers；
Second actuator, it regulates described first pressing roller position on the circumferencial direction of described home roll；And
Control portion, its described sawline being based on the position according to described first sawline height adjustable rollers and determining and described master
The amount of movement of the contact point of roller, makes described second actuator operating control the position of described first pressing roller, described first saw
The position of line height adjustable rollers determines according to the drive volume of the first actuator.
Scroll saw the most according to claim 1, wherein,
Point that described first pressing roller connects in the top of the V groove of the bottom surface of described sawline and described home roll and described sawline
Between the point that the top of the V groove of upper surface and described home roll connects, remain the state connected with described sawline.
Scroll saw the most according to claim 1, wherein,
Described scroll saw possesses:
Second pressing roller, it is arranged on described sawline and leaves from described machined object and from described home roll one leaves goes out
Near Kou, there is the circumferencial direction along described home roll and move mechanism freely, and described sawline is pressed on described home roll；
Second sawline height adjustable rollers, its with the described sawline being between described pressing roller and described machined object is carried out by
The mode that relatively can move relative to described machined object while pressure, regulates the height of sawline；
3rd actuator, it regulates the height and position of described second sawline height adjustable rollers；And
4th actuator, it regulates described second pressing roller position on the circumferencial direction of described home roll,
Described control portion is configured to, and is based on the position according to described second sawline height adjustable rollers and the described sawline that determines
With the amount of movement of the contact point of described home roll, described 4th actuator operating is made to control the position of described second pressing roller, institute
The position stating the second sawline height adjustable rollers determines according to the drive volume of the 3rd actuator.
4. one kind prevents the method for operation that sawline takes off groove, it is characterised in that
The sawline being wound between the multiple home rolls rotatably arranged relatively is pressed on machined object cut into slices
Time,
By the first actuator drive the first sawline height adjustable rollers, described first sawline height adjustable rollers be arranged on described sawline from
The position, front that described machined object to contact with described pressing roller after leaving, and energy while described sawline is pressed
Enough modes relatively moved relative to described machined object to regulate the height of sawline,
First pressing roller position on the circumferencial direction of described home roll, described first pressing roller is driven to arrange by the second actuator
Leave from described machined object at described sawline and start the entrance contacted with described home roll, there is the circumference side along described home roll
To mobile mechanism freely, described sawline is pressed on described home roll by described first pressing roller,
The described sawline being based on the position according to described first sawline height adjustable rollers and determine contacts with described home roll
The amount of movement of point, makes described second actuator operating control the position of described first pressing roller, and described first sawline height is adjusted
The position of joint roller determines according to the drive volume of the first actuator.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015016183A JP6191835B2 (en) | 2015-01-30 | 2015-01-30 | Wire saw and wire groove jump prevention driving method |
| JP2015-016183 | 2015-01-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105835244A true CN105835244A (en) | 2016-08-10 |
| CN105835244B CN105835244B (en) | 2017-08-04 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510883693.8A Active CN105835244B (en) | 2015-01-30 | 2015-12-04 | Scroll saw and the method for operation for preventing the de- groove of sawline |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP6191835B2 (en) |
| CN (1) | CN105835244B (en) |
Cited By (4)
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| CN107457921A (en) * | 2017-08-24 | 2017-12-12 | 天津市环欧半导体材料技术有限公司 | A kind of silicon chip preparation technology |
| CN107599194A (en) * | 2017-08-24 | 2018-01-19 | 天津市环欧半导体材料技术有限公司 | A kind of silicon chip line blanking method |
| CN112326078A (en) * | 2020-10-26 | 2021-02-05 | 东华大学 | Measurement structure design of yarn tension sensor based on surface acoustic waves |
| CN113733378A (en) * | 2021-11-05 | 2021-12-03 | 江苏晟大光电科技有限公司 | Solar cell panel assembly crystal silicon cell piece cutting and processing equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101794257B1 (en) * | 2016-12-06 | 2017-11-07 | 주식회사 장평건설 | Rock cutting apparatus and method for tunnel excavation |
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| US6763823B1 (en) * | 1999-03-09 | 2004-07-20 | Sharp Kabushiki Kaisha | Machining method not causing any damage to major cut surfaces of cut objects |
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| CN112326078A (en) * | 2020-10-26 | 2021-02-05 | 东华大学 | Measurement structure design of yarn tension sensor based on surface acoustic waves |
| CN113733378A (en) * | 2021-11-05 | 2021-12-03 | 江苏晟大光电科技有限公司 | Solar cell panel assembly crystal silicon cell piece cutting and processing equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2016143683A (en) | 2016-08-08 |
| CN105835244B (en) | 2017-08-04 |
| JP6191835B2 (en) | 2017-09-06 |
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