CN105823776A - Liquefied petroleum gas steam gasification device with high-sensitivity detection function - Google Patents
Liquefied petroleum gas steam gasification device with high-sensitivity detection function Download PDFInfo
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Abstract
The application relates to a liquefied petroleum gas steam gasification device with a high-sensitivity detection function. A gaschromic gas sensor is mounted on the outer surface of the steam gasification device and comprises a sensing unit, a heating unit and a data reading unit; the heating unit and the data reading unit are connected with a tungsten oxide air-sensitive film of the sensing unit; the heating unit serves as a heating source when the tungsten oxide air-sensitive film works; the sensing unit is of a double layer structure with the middle part having a hollow structure. The steam gasification device can realize the visual detection on hydrogen on the basis of the air-sensitive property and gaschromic property of WO3 nanometer material, has short reaction response time, is high in sensitivity, convenient to use and easy to operate, and achieves the aim of accurately and timely detecting hydrogen leakage.
Description
Technical field
The application relates to liquefied petroleum gas field, is specifically related to the liquefied petroleum gas steam vaporization unit of a kind of highly sensitive detection function.
Background technology
Liquefied petroleum gas, as a kind of industrial chemicals and New-type fuel, along with the development of petrochemical industry, seems all the more important.Liquefied petroleum gas is oil plant side-product of gained when carrying out crude oil catalytic pyrolysis with thermal cracking, and it can be used to as dyestuff, has the advantages such as calorific value height, smoke dust.
Liquefied petroleum gas steam gasification installation is the main device producing liquefied petroleum gas, and it does not the most possess the Visual retrieval function of gas.
Summary of the invention
For overcoming problem present in correlation technique, the application provides the liquefied petroleum gas steam vaporization unit of a kind of highly sensitive detection function.
First aspect according to the embodiment of the present application, it is provided that the liquefied petroleum gas steam vaporization unit of a kind of highly sensitive detection function, described steam vaporization unit outer surface is provided with gas-discoloration gas sensor, and described gas-discoloration gas sensor is based on WO3Gas sensitive and WO3Gas-discoloration material；Described gas-discoloration gas sensor includes sensing unit, heating unit and data-reading unit；Described heating unit and data-reading unit are connected with the tungsten oxide air-sensitive film of sensing unit；Heating source when described heating unit works as tungsten oxide air-sensitive film；Data-reading unit processes the conductivity variations signal of tungsten oxide air-sensitive film to show the concentration value of object gas；Described sensing unit is the double-decker of hollow structure, forms double-deck A face structure and B face structure is staggered relatively, distance 500 μm, and the periphery of A face structure and the handing-over of B face structure uses colloid to seal；Described A face includes quartz glass substrate, interdigital electrode layer and WO3Air-sensitive film layer, WO3Air-sensitive film layer is doping SnO2WO3Thin film, it is possible to achieve to NO2The detection of gas, described B face includes quartz glass substrate and WO3Gas-discoloration layer, WO3Gas-discoloration layer is WO3Nano wire film doping ZnTPP-2-NO2, utilize gas-discoloration principle can realize the Visual retrieval to hydrogen；2 it are additionally provided with for air-vent that object gas penetrates in the structure of described B face.In A face, described SnO2Granularity less than 100nm, described WO3Air-sensitive film layer thickness is 400nm；In B face, described WO3Nanowire length about 1 μm, diameter about 60nm.
Second aspect according to the embodiment of the present application, it is provided that the preparation method of the liquefied petroleum gas steam vaporization unit of a kind of highly sensitive detection function, it is preferable that the making of the sensing unit of described gas-discoloration gas sensor comprises the following steps:
S1, preparation A face structure, including following enforcement step: (1) takes the quartz glass substrate of certain size (4cm × 4cm), sequentially pass through acetone, ethanol, deionized water ultrasonic cleaning 20min；(2) spin coating one layer photoetching glue in quartz glass substrate, thickness 1 μm, exposes 6s under interdigital electrode mask covers, and cleans with deionized water after being then passed through development 50s, use Cr film thick for magnetically controlled sputter method one layer of 300nm of plating as interdigital electrode layer, then remove photoresist；(3) quartz glass substrate is put in magnetic control sputtering device, be evacuated to 5 × 10-4Below Pa, is passed through Ar and O2Mixed gas, regulate Ar:O2Ratio is 5:1, and operating pressure is 2.4Pa, and at the metal W target magnetic control sputtering 28min that target is purity 99.96%, target is the metal tin target magnetron sputtering 2min of purity 98%, obtains the SnO that adulterates2WO3Thin film, i.e. WO3Air-sensitive film layer；
S2, preparation B face structure, including following enforcement step: (1) takes the quartz glass substrate of same size (4cm × 4cm), sequentially passing through acetone, ethanol, deionized water, NaOH aqueous solution, deionized water ultrasonic cleaning, the time is 20min；(2) take 20g sodium tungstate to be dissolved in 200ml water, the concentrated hydrochloric acid adding excess obtains active tungstic acid precipitation, filtered, clean until can't detect chloride ion with deionized water again, then active tungstic acid precipitation is dissolved in hydrogen peroxide, prepares colloidal sol, be spun in quartz glass substrate, 350 DEG C process 1h and obtain Seed Layer, and thickness is 20nm；(3) take sodium tungstate powder 4.12g and be dissolved in 60ml deionized water, regulating its pH with 3MHCl solution is 2.0, it is subsequently adding 2.1g (0.3M) ammonium sulfate as controlling agent, quartz glass substrate is lain in deionized water, after stirring 1 hour, pour in rustless steel hydrothermal reaction kettle, be heated to 150 DEG C in an oven and keep 10h, then take out quartz glass substrate and spend ionized water cleaning；(4) selecting chloroform is solvent, takes 3.8gZnTPP-2-NO2It is configured to the solution of 5.0mg/ml, supersound process 20min, make solution uniform, by dripping glue mode by made solution drop coating at quartz glass substrate surface, set spin speed as 3400rpm, spin-coating time is 70s, quartz glass substrate is finally dried at 60 DEG C in vacuum drying oven 12h, obtains the ZnTPP-2-NO that adulterates2WO3Nano wire film, i.e. WO3Gas-discoloration layer；
S3, assembling: by staggered relatively to the A face completed, B face structure, distance 500 μm, the periphery of A face structure and the handing-over of B face structure uses colloid to seal, obtains the sensing unit of described gas-discoloration gas sensor.
The technical scheme that embodiments herein provides includes following beneficial effect:
1. configuration aspects, creative employing double membrane structure, combine gas-sensitive property and the gas-discoloration characteristic of tungsten oxide material, increase the range of application of device；
2. tungsten oxide air-sensitive film is made by magnetically controlled sputter method based on Film-mode resistor sensor, thin film, by controlling partial pressure of oxygen and doped stannum oxide in manufacturing process so that thin film is to NO2Selectivity be all greatly improved with sensitivity；
3. tungsten oxide gas chromism film is tungsten oxide nano doping tetraphenylporphyrin zinc derivative (ZnTPP-2-NO2) material, and this dopant material, as catalyst, substantially increases tungsten oxide nano to H2Reactivity, improve sensitivity, and achieve " smell-seeing " to hydrogen and measure.
Aspect and advantage that the application adds will part be given in the following description, and part will become apparent from the description below, or is recognized by the practice of the application.It should be appreciated that it is only exemplary and explanatory that above general description and details hereinafter describe, the application can not be limited.
Accompanying drawing explanation
Accompanying drawing herein is merged in description and constitutes the part of this specification, it is shown that meet embodiments of the invention, and for explaining the principle of the present invention together with description.
Fig. 1 is the schematic diagram of sensing unit in the gas-discoloration gas sensor that the present invention uses.
Fig. 2 is the flow chart preparing the sensing unit in Fig. 1.
Wherein: 1-quartz glass substrate, 2-interdigital electrode layer, 3-WO3Air-sensitive film layer, 4-hollow structure, 5-WO3Gas-discoloration layer.
Detailed description of the invention
Here will illustrate exemplary embodiment in detail, its example represents in the accompanying drawings.When explained below relates to accompanying drawing, unless otherwise indicated, the same numbers in different accompanying drawings represents same or analogous key element.Embodiment described in following exemplary embodiment does not represent all embodiments consistent with the present invention.On the contrary, they only with describe in detail in appended claims, the present invention some in terms of the example of consistent apparatus and method.
Following disclosure provides many different embodiments or example for realizing the different structure of the application.In order to simplify disclosure herein, hereinafter parts and setting to specific examples are described.Certainly, they are the most merely illustrative, and are not intended to limit the application.Additionally, the application can in different examples repeat reference numerals and/or letter.This repetition is for purposes of simplicity and clarity, itself is more than the relation between various embodiment being discussed and/or arranging.Additionally, the various specific technique that this application provides and the example of material, but those of ordinary skill in the art are it can be appreciated that the applicability of other techniques and/or the use of other materials.Additionally, fisrt feature described below Second Eigenvalue " on " structure can include that the first and second features are formed as the embodiment directly contacted, can also include that the embodiment that other feature is formed between the first and second features, such first and second features are not likely to be directly contact.
In the description of the present application, it should be noted that, unless otherwise prescribed and limit, term " is installed ", " being connected ", " connection " should be interpreted broadly, such as, can be to be mechanically connected or electrical connection, can also be the connection of two element internals, can be to be joined directly together, it is also possible to be indirectly connected to by intermediary, for the ordinary skill in the art, the concrete meaning of above-mentioned term can be understood as the case may be.
Modern society, along with economic and industry development, the consumption of various natural resourcess is continuously increased by the mankind, and owing to pursuing the shortcoming of economic goal and environmental consciousness, the pollution problem of environment is the most serious.Meanwhile, showing gas aspect, the leakage of gas in various inflammable, explosive, the toxic gas discharged in productive life and environment, pollution are also that people's property safety threatens greatly with the one of personal safety.Therefore, gas sensor technology is one of important topic of current research.Gas sensor is a kind of can to change and the device effectively monitored or device by perception surrounding target gas levels, its be based on physical principle or chemical reaction etc., the type of gas sensor mainly has semiconductor gas sensor, electrochemical gas sensor, catalytic combustion type gas sensor, optical profile type gas sensor etc..WO3It is a kind of preferably controllable color change material, can realize visible ray and near-infrared radiation transmitance are continuously adjusted.Amorphous WO from Deb reported first in 19693Since the electrochromic effect of thin film, having found the performance such as its gas-discoloration, photochromic, thermochromism successively, meanwhile, as transition metal oxide, Tungstic anhydride. is to some gas, such as NO2、NO、NH3、H2、H2S etc. all show sensitivity characteristic；Compared with electrochromic device, WO3The advantages such as it is simple that gas-discoloration device has system structure, relative inexpensiveness, therefore combine its gas-discoloration characteristic with gas-sensitive property, the great significance to gas sensing optics type senser element.
The operation principle of the gas sensor used in the application is: gas sensor is an important branch of sensing technology.Can be divided into by gas sensor dissimilar according to structure and material etc., wherein, the sensitive prime material that Metal Oxide Gas Sensors is used is broad stopband n-type metal oxide semiconductor, and it all shows good sensitivity characteristic to multiple gases.
The sensitive mechanism of metal oxide semiconductor gas sensor is: sensitive material is made into the structure being beneficial to contact air into thin film etc., under heating state, when it is exposed in air, the total surface of sensitive material is to adsorb a certain amount of oxonium ion, form surface potential barrier and space charge layer, the sheet electron concentration that can make sensitive material declines, and then electrical conductivity declines；When object gas is reducibility gas (such as CO, H2), this reducibility gas can adsorb on sensitive material surface, and reacts with the oxygen on surface, makes sheet electron concentration increase, and electrical conductivity rises therewith；When object gas is oxidizing gas (such as NO2), the absorption on sensitive material surface of this oxidizing gas further add the adsorbance of oxygen so that the electrical conductivity of sensitive material declines further；The i.e. concentration of object gas and the electrical conductivity of sensitive material has dependency, thus, measures the concentration of object gas by measuring the change of sensitive material electrical conductivity.
After gas-discoloration refers to that material arrives some gas, because the reversible chemical reaction occurred makes material produce the colour developing effect that the light to wavelengths characteristic absorbs, the absorption spectrum of material can change, and macro manifestations is the change of material color.Specific to WO3After contact hydrogen, itself and hydrogen generation reversible reaction, tungsten bronze structure (H can be formedxWO4), owing to this structure is blue, show as WO3The color of thin film can be blue by original transparent color, and again because the change of thin film color can make its light intensity passed through change, i.e. the light transmittance of thin film changes, therefore can be by measuring the concentration of the determination of light transmittance hydrogen of thin film.
The application is based on WO3The gas-discoloration character of material and air-sensitive character, be incorporated into by double membrane structure；On the one hand, WO3Air-sensitive film can measure NO in the case of external power supply and heating2Concentration, on the other hand, can not heat with not powered etc. have particular/special requirement in the environment of, WO3Air-sensitive thin film material shows limitation, now can pass through WO3Gas chromism film is to H2Detect.
Embodiment 1:
Thering is provided the liquefied petroleum gas steam vaporization unit of a kind of highly sensitive detection function, described steam vaporization unit outer surface is provided with gas-discoloration gas sensor, and described gas-discoloration gas sensor is based on WO3Gas sensitive and WO3Gas-discoloration material；Described gas-discoloration gas sensor includes sensing unit, heating unit and data-reading unit；Described heating unit and data-reading unit are connected with the tungsten oxide air-sensitive film of sensing unit；Heating source when described heating unit works as tungsten oxide air-sensitive film；Data-reading unit processes the conductivity variations signal of tungsten oxide air-sensitive film to show the concentration value of object gas.
Fig. 1 is the schematic diagram of sensing unit in the gas-discoloration gas sensor that the present invention uses.With reference to Fig. 1, this sensing unit is the double-decker of hollow structure, forms double-deck A face structure and B face structure is staggered relatively, distance 500 μm, and the periphery of A face structure and the handing-over of B face structure uses colloid to seal；Described A face includes quartz glass substrate, interdigital electrode layer and WO3Air-sensitive film layer, WO3Air-sensitive film layer is doping SnO2WO3Thin film, it is possible to achieve to NO2The detection of gas, described B face includes quartz glass substrate and WO3Gas-discoloration layer, WO3Gas-discoloration layer is WO3Nano wire film doping ZnTPP-2-NO2, utilize gas-discoloration principle can realize the Visual retrieval to hydrogen；2 it are additionally provided with for air-vent that object gas penetrates in the structure of described B face.In A face, described SnO2Granularity less than 100nm, described WO3Air-sensitive film layer thickness is 400nm；In B face, described WO3Nanowire length about 1 μm, diameter about 60nm；
Fig. 2 is according to the flow chart preparing sensing unit shown in an exemplary embodiment, as in figure 2 it is shown, comprise the following steps:
S1, preparation A face structure, including following enforcement step: (1) takes the quartz glass substrate of certain size (4cm × 4cm), sequentially pass through acetone, ethanol, deionized water ultrasonic cleaning 20min；(2) spin coating one layer photoetching glue in quartz glass substrate, thickness 1 μm, exposes 6s under interdigital electrode mask covers, and cleans with deionized water after being then passed through development 50s, use Cr film thick for magnetically controlled sputter method one layer of 300nm of plating as interdigital electrode layer, then remove photoresist；(3) quartz glass substrate is put in magnetic control sputtering device, be evacuated to 5 × 10-4Below Pa, is passed through Ar and O2Mixed gas, regulate Ar:O2Ratio is 5:1, and operating pressure is 2.4Pa, and at the metal W target magnetic control sputtering 28min that target is purity 99.96%, target is the metal tin target magnetron sputtering 2min of purity 98%, obtains the SnO that adulterates2WO3Thin film, i.e. WO3Air-sensitive film layer；
S2, preparation B face structure, including following enforcement step: (1) takes the quartz glass substrate of same size (4cm × 4cm), sequentially passing through acetone, ethanol, deionized water, NaOH aqueous solution, deionized water ultrasonic cleaning, the time is 20min；(2) take 20g sodium tungstate to be dissolved in 200ml water, the concentrated hydrochloric acid adding excess obtains active tungstic acid precipitation, filtered, clean until can't detect chloride ion with deionized water again, then active tungstic acid precipitation is dissolved in hydrogen peroxide, prepares colloidal sol, be spun in quartz glass substrate, 350 DEG C process 1h and obtain Seed Layer, and thickness is 20nm；(3) take sodium tungstate powder 4.12g and be dissolved in 60ml deionized water, regulating its pH with 3MHCl solution is 2.0, it is subsequently adding 2.1g (0.3M) ammonium sulfate as controlling agent, quartz glass substrate is lain in deionized water, after stirring 1 hour, pour in rustless steel hydrothermal reaction kettle, be heated to 150 DEG C in an oven and keep 10h, then take out quartz glass substrate and spend ionized water cleaning；(4) selecting chloroform is solvent, takes 3.8gZnTPP-2-NO2It is configured to the solution of 5.0mg/ml, supersound process 20min, make solution uniform, by dripping glue mode by made solution drop coating at quartz glass substrate surface, set spin speed as 3400rpm, spin-coating time is 70s, quartz glass substrate is finally dried at 60 DEG C in vacuum drying oven 12h, obtains the ZnTPP-2-NO that adulterates2WO3Nano wire film, i.e. WO3Gas-discoloration layer；
S3, assembling: by staggered relatively to the A face completed, B face structure, distance 500 μm, the periphery of A face structure and the handing-over of B face structure uses colloid to seal, obtains the sensing unit of described gas-discoloration gas sensor.
About the device in above-described embodiment, the concrete mode that wherein modules performs to operate has been described in detail in about the embodiment of the method, and explanation will be not set forth in detail herein.
Data test:
In A face, air-sensitive test completes on Testing system of gas-sensor built, puts in quartz ampoule by the device made, and heating unit heats makes the operating temperature of sensing unit be 120 DEG C, after stable, is passed through by air and finite concentration NO2The mixed gas of configuration, keeps 30min, is again passed through pure air, records WO3The resistance value of air-sensitive film layer, respectively R (NO2) and R (air), definition Gas-sensing measurment is: S=R (NO2)/R (air), response time be defined as being passed through resistance variations after test gas to maximum changes in resistance 80% required for time.Test finds, this tungsten oxide air-sensitive film is at the NO of 8ppm concentration2Gas medium sensitivity is 30；Best-case Response Time is 22s；Through 100 testing fatigues, electrical response value drops to original 76%.WO3Air-sensitive film shows good sensitivity, response time and repeatability.
In B face, use spectrophotometer to variable concentrations H2WO in atmosphere3Gas-discoloration layer carries out light transmittance test, defines T0For not leading to H2Time sample light transmittance, T is for being passed through finite concentration H2Time sample light transmittance, relative light transmission:, be passed through H2When concentration is 5000ppm, relative light transmission is with wavelength change, minimum 10%, it is 59.7% to the maximum, and through about 10min, relative light transmission tends towards stability, visible being passed through with tested gas, tungsten oxide gas-discoloration layer light transmittance declines, and shows as thin film color and transparent is become blue from original, response time is short, shows good gasochromic property.
Test finds, this steam vaporization unit is provided with gas-discoloration gas sensor, utilizes gas-discoloration principle can realize the Visual retrieval to hydrogen, and response time is short, highly sensitive, color change interval is bigger, achieve beyond thought effect, there is certain actual application value.
Embodiment 2:
Thering is provided the liquefied petroleum gas steam vaporization unit of a kind of highly sensitive detection function, described steam vaporization unit outer surface is provided with gas-discoloration gas sensor, and described gas-discoloration gas sensor is based on WO3Gas sensitive and WO3Gas-discoloration material；Described gas-discoloration gas sensor includes sensing unit, heating unit and data-reading unit；Described heating unit and data-reading unit are connected with the tungsten oxide air-sensitive film of sensing unit；Heating source when described heating unit works as tungsten oxide air-sensitive film；Data-reading unit processes the conductivity variations signal of tungsten oxide air-sensitive film to show the concentration value of object gas.
Fig. 1 is the schematic diagram of sensing unit in the gas-discoloration gas sensor that the present invention uses.With reference to Fig. 1, this sensing unit is the double-decker of hollow structure, forms double-deck A face structure and B face structure is staggered relatively, distance 500 μm, and the periphery of A face structure and the handing-over of B face structure uses colloid to seal；Described A face includes quartz glass substrate, interdigital electrode layer and WO3Air-sensitive film layer, WO3Air-sensitive film layer is doping SnO2WO3Thin film, it is possible to achieve to NO2The detection of gas, described B face includes quartz glass substrate and WO3Gas-discoloration layer, WO3Gas-discoloration layer is WO3Nano wire film doping ZnTPP-2-NO2, utilize gas-discoloration principle can realize the Visual retrieval to hydrogen；2 it are additionally provided with for air-vent that object gas penetrates in the structure of described B face.In A face, described SnO2Granularity less than 110nm, described WO3Air-sensitive film layer thickness is 700nm；In B face, described WO3Nanowire length about 1 μm, diameter about 60nm；
Fig. 2 is according to the flow chart preparing sensing unit shown in an exemplary embodiment, as in figure 2 it is shown, comprise the following steps:
S1, preparation A face structure, including following enforcement step: (1) takes the quartz glass substrate of certain size (4cm × 4cm), sequentially pass through acetone, ethanol, deionized water ultrasonic cleaning 20min；(2) spin coating one layer photoetching glue in quartz glass substrate, thickness 1 μm, exposes 6s under interdigital electrode mask covers, and cleans with deionized water after being then passed through development 50s, use Cr film thick for magnetically controlled sputter method one layer of 300nm of plating as interdigital electrode layer, then remove photoresist；(3) quartz glass substrate is put in magnetic control sputtering device, be evacuated to 5 × 10-4Below Pa, is passed through Ar and O2Mixed gas, regulate Ar:O2Ratio is 5:1, and operating pressure is 2.4Pa, and at the metal W target magnetic control sputtering 28min that target is purity 99.96%, target is the metal tin target magnetron sputtering 2min of purity 98%, obtains the SnO that adulterates2WO3Thin film, i.e. WO3Air-sensitive film layer；
S2, preparation B face structure, including following enforcement step: (1) takes the quartz glass substrate of same size (4cm × 4cm), sequentially passing through acetone, ethanol, deionized water, NaOH aqueous solution, deionized water ultrasonic cleaning, the time is 20min；(2) take 20g sodium tungstate to be dissolved in 200ml water, the concentrated hydrochloric acid adding excess obtains active tungstic acid precipitation, filtered, clean until can't detect chloride ion with deionized water again, then active tungstic acid precipitation is dissolved in hydrogen peroxide, prepares colloidal sol, be spun in quartz glass substrate, 300 DEG C process 1h and obtain Seed Layer, and thickness is 20nm；(3) take sodium tungstate powder 4.6g and be dissolved in 60ml deionized water, regulating its pH with 3MHCl solution is 2.0, it is subsequently adding 2.1g (0.3M) ammonium sulfate as controlling agent, quartz glass substrate is lain in deionized water, after stirring 1 hour, pour in rustless steel hydrothermal reaction kettle, be heated to 150 DEG C in an oven and keep 10h, then take out quartz glass substrate and spend ionized water cleaning；(4) selecting chloroform is solvent, takes 3.8gZnTPP-2-NO2It is configured to the solution of 5.4mg/ml, supersound process 20min, make solution uniform, by dripping glue mode by made solution drop coating at quartz glass substrate surface, set spin speed as 3400rpm, spin-coating time is 70s, quartz glass substrate is finally dried at 60 DEG C in vacuum drying oven 12h, obtains the ZnTPP-2-NO that adulterates2WO3Nano wire film, i.e. WO3Gas-discoloration layer；
S3, assembling: by staggered relatively to the A face completed, B face structure, distance 500 μm, the periphery of A face structure and the handing-over of B face structure uses colloid to seal, obtains the sensing unit of described gas-discoloration gas sensor.
About the device in above-described embodiment, the concrete mode that wherein modules performs to operate has been described in detail in about the embodiment of the method, and explanation will be not set forth in detail herein.
Data test:
In A face, air-sensitive test completes on Testing system of gas-sensor built, puts in quartz ampoule by the device made, and heating unit heats makes the operating temperature of sensing unit be 120 DEG C, after stable, is passed through by air and finite concentration NO2The mixed gas of configuration, keeps 30min, is again passed through pure air, records WO3The resistance value of air-sensitive film layer, respectively R (NO2) and R (air), definition Gas-sensing measurment is: S=R (NO2)/R (air), response time be defined as being passed through resistance variations after test gas to maximum changes in resistance 80% required for time.Test finds, this tungsten oxide air-sensitive film is at the NO of 8ppm concentration2Gas medium sensitivity is 30；Best-case Response Time is 15s；Through 100 testing fatigues, electrical response value drops to original 86%.WO3Air-sensitive film shows good sensitivity, response time and repeatability.
In B face, use spectrophotometer to variable concentrations H2WO in atmosphere3Gas-discoloration layer carries out light transmittance test, defines T0For not leading to H2Time sample light transmittance, T is for being passed through finite concentration H2Time sample light transmittance, relative light transmission:, be passed through H2When concentration is 5000ppm, relative light transmission is with wavelength change, minimum 7%, it is 63% to the maximum, and through about 10min, relative light transmission tends towards stability, visible being passed through with tested gas, tungsten oxide gas-discoloration layer light transmittance declines, and shows as thin film color and transparent is become blue from original, response time is short, shows good gasochromic property.
Test finds, this steam vaporization unit is provided with gas-discoloration gas sensor, utilizes gas-discoloration principle can realize the Visual retrieval to hydrogen, and response time is short, highly sensitive, color change interval is bigger, achieve beyond thought effect, there is certain actual application value.
Embodiment 3:
Thering is provided the liquefied petroleum gas steam vaporization unit of a kind of highly sensitive detection function, described steam vaporization unit outer surface is provided with gas-discoloration gas sensor, and described gas-discoloration gas sensor is based on WO3Gas sensitive and WO3Gas-discoloration material；Described gas-discoloration gas sensor includes sensing unit, heating unit and data-reading unit；Described heating unit and data-reading unit are connected with the tungsten oxide air-sensitive film of sensing unit；Heating source when described heating unit works as tungsten oxide air-sensitive film；Data-reading unit processes the conductivity variations signal of tungsten oxide air-sensitive film to show the concentration value of object gas.
Fig. 1 is the schematic diagram of sensing unit in the gas-discoloration gas sensor that the present invention uses.With reference to Fig. 1, this sensing unit is the double-decker of hollow structure, forms double-deck A face structure and B face structure is staggered relatively, distance 500 μm, and the periphery of A face structure and the handing-over of B face structure uses colloid to seal；Described A face includes quartz glass substrate, interdigital electrode layer and WO3Air-sensitive film layer, WO3Air-sensitive film layer is doping SnO2WO3Thin film, it is possible to achieve to NO2The detection of gas, described B face includes quartz glass substrate and WO3Gas-discoloration layer, WO3Gas-discoloration layer is WO3Nano wire film doping ZnTPP-2-NO2, utilize gas-discoloration principle can realize the Visual retrieval to hydrogen；2 it are additionally provided with for air-vent that object gas penetrates in the structure of described B face.In A face, described SnO2Granularity less than 50nm, described WO3Air-sensitive film layer thickness is 500nm；In B face, described WO3Nanowire length about 3.5 μm, diameter about 60nm；
Fig. 2 is according to the flow chart preparing sensing unit shown in an exemplary embodiment, as in figure 2 it is shown, comprise the following steps:
S1, preparation A face structure, including following enforcement step: (1) takes the quartz glass substrate of certain size (4cm × 4cm), sequentially pass through acetone, ethanol, deionized water ultrasonic cleaning 20min；(2) spin coating one layer photoetching glue in quartz glass substrate, thickness 1.5 μm, exposes 6s under interdigital electrode mask covers, and cleans with deionized water after being then passed through development 50s, use Cr film thick for magnetically controlled sputter method one layer of 300nm of plating as interdigital electrode layer, then remove photoresist；(3) quartz glass substrate is put in magnetic control sputtering device, be evacuated to 5 × 10-4Below Pa, is passed through Ar and O2Mixed gas, regulate Ar:O2Ratio is 5:1, and operating pressure is 2.4Pa, and at the metal W target magnetic control sputtering 28min that target is purity 99.96%, target is the metal tin target magnetron sputtering 2min of purity 98%, obtains the SnO that adulterates2WO3Thin film, i.e. WO3Air-sensitive film layer；
S2, preparation B face structure, including following enforcement step: (1) takes the quartz glass substrate of same size (4cm × 4cm), sequentially passing through acetone, ethanol, deionized water, NaOH aqueous solution, deionized water ultrasonic cleaning, the time is 20min；(2) take 22g sodium tungstate to be dissolved in 200ml water, the concentrated hydrochloric acid adding excess obtains active tungstic acid precipitation, filtered, clean until can't detect chloride ion with deionized water again, then active tungstic acid precipitation is dissolved in hydrogen peroxide, prepares colloidal sol, be spun in quartz glass substrate, 350 DEG C process 1h and obtain Seed Layer, and thickness is 20nm；(3) take sodium tungstate powder 4.12g and be dissolved in 60ml deionized water, regulating its pH with 3MHCl solution is 2.0, it is subsequently adding 2.1g (0.3M) ammonium sulfate as controlling agent, quartz glass substrate is lain in deionized water, after stirring 1 hour, pour in rustless steel hydrothermal reaction kettle, be heated to 150 DEG C in an oven and keep 10h, then take out quartz glass substrate and spend ionized water cleaning；(4) selecting chloroform is solvent, takes 3.8gZnTPP-2-NO2It is configured to the solution of 5.0mg/ml, supersound process 20min, make solution uniform, by dripping glue mode by made solution drop coating at quartz glass substrate surface, set spin speed as 3400rpm, spin-coating time is 70s, quartz glass substrate is finally dried at 60 DEG C in vacuum drying oven 12h, obtains the ZnTPP-2-NO that adulterates2WO3Nano wire film, i.e. WO3Gas-discoloration layer；
S3, assembling: by staggered relatively to the A face completed, B face structure, distance 500 μm, the periphery of A face structure and the handing-over of B face structure uses colloid to seal, obtains the sensing unit of described gas-discoloration gas sensor.
About the device in above-described embodiment, the concrete mode that wherein modules performs to operate has been described in detail in about the embodiment of the method, and explanation will be not set forth in detail herein.
Data test:
In A face, air-sensitive test completes on Testing system of gas-sensor built, puts in quartz ampoule by the device made, and heating unit heats makes the operating temperature of sensing unit be 120 DEG C, after stable, is passed through by air and finite concentration NO2The mixed gas of configuration, keeps 30min, is again passed through pure air, records WO3The resistance value of air-sensitive film layer, respectively R (NO2) and R (air), definition Gas-sensing measurment is: S=R (NO2)/R (air), response time be defined as being passed through resistance variations after test gas to maximum changes in resistance 80% required for time.Test finds, this tungsten oxide air-sensitive film is at the NO of 8ppm concentration2Gas medium sensitivity is 47；Best-case Response Time is 15s；Through 100 testing fatigues, electrical response value drops to original 86%.WO3Air-sensitive film shows good sensitivity, response time and repeatability.
In B face, use spectrophotometer to variable concentrations H2WO in atmosphere3Gas-discoloration layer carries out light transmittance test, defines T0For not leading to H2Time sample light transmittance, T is for being passed through finite concentration H2Time sample light transmittance, relative light transmission:, be passed through H2When concentration is 5000ppm, relative light transmission is with wavelength change, minimum 6%, it is 56.7% to the maximum, and through about 10min, relative light transmission tends towards stability, visible being passed through with tested gas, tungsten oxide gas-discoloration layer light transmittance declines, and shows as thin film color and transparent is become blue from original, response time is short, shows good gasochromic property.
Test finds, this steam vaporization unit is provided with gas-discoloration gas sensor, utilizes gas-discoloration principle can realize the Visual retrieval to hydrogen, and response time is short, highly sensitive, color change interval is bigger, achieve beyond thought effect, there is certain actual application value.
Embodiment 4:
Thering is provided the liquefied petroleum gas steam vaporization unit of a kind of highly sensitive detection function, described steam vaporization unit outer surface is provided with gas-discoloration gas sensor, and described gas-discoloration gas sensor is based on WO3Gas sensitive and WO3Gas-discoloration material；Described gas-discoloration gas sensor includes sensing unit, heating unit and data-reading unit；Described heating unit and data-reading unit are connected with the tungsten oxide air-sensitive film of sensing unit；Heating source when described heating unit works as tungsten oxide air-sensitive film；Data-reading unit processes the conductivity variations signal of tungsten oxide air-sensitive film to show the concentration value of object gas.
Fig. 1 is the schematic diagram of sensing unit in the gas-discoloration gas sensor that the present invention uses.With reference to Fig. 1, this sensing unit is the double-decker of hollow structure, forms double-deck A face structure and B face structure is staggered relatively, distance 500 μm, and the periphery of A face structure and the handing-over of B face structure uses colloid to seal；Described A face includes quartz glass substrate, interdigital electrode layer and WO3Air-sensitive film layer, WO3Air-sensitive film layer is doping SnO2WO3Thin film, it is possible to achieve to NO2The detection of gas, described B face includes quartz glass substrate and WO3Gas-discoloration layer, WO3Gas-discoloration layer is WO3Nano wire film doping ZnTPP-2-NO2, utilize gas-discoloration principle can realize the Visual retrieval to hydrogen；2 it are additionally provided with for air-vent that object gas penetrates in the structure of described B face.In A face, described SnO2Granularity less than 50nm, described WO3Air-sensitive film layer thickness is 700nm；In B face, described WO3Nanowire length about 1 μm, diameter about 60nm；
Fig. 2 is according to the flow chart preparing sensing unit shown in an exemplary embodiment, as in figure 2 it is shown, comprise the following steps:
S1, preparation A face structure, including following enforcement step: (1) takes the quartz glass substrate of certain size (4cm × 4cm), sequentially pass through acetone, ethanol, deionized water ultrasonic cleaning 20min；(2) spin coating one layer photoetching glue in quartz glass substrate, thickness 1 μm, exposes 6s under interdigital electrode mask covers, and cleans with deionized water after being then passed through development 50s, use Cr film thick for magnetically controlled sputter method one layer of 300nm of plating as interdigital electrode layer, then remove photoresist；(3) quartz glass substrate is put in magnetic control sputtering device, be evacuated to 5 × 10-4Below Pa, is passed through Ar and O2Mixed gas, regulate Ar:O2Ratio is 5:1, and operating pressure is 2.4Pa, and at the metal W target magnetic control sputtering 28min that target is purity 99.96%, target is the metal tin target magnetron sputtering 2min of purity 98%, obtains the SnO that adulterates2WO3Thin film, i.e. WO3Air-sensitive film layer；
S2, preparation B face structure, including following enforcement step: (1) takes the quartz glass substrate of same size (4cm × 4cm), sequentially passing through acetone, ethanol, deionized water, NaOH aqueous solution, deionized water ultrasonic cleaning, the time is 20min；(2) take 20g sodium tungstate to be dissolved in 200ml water, the concentrated hydrochloric acid adding excess obtains active tungstic acid precipitation, filtered, clean until can't detect chloride ion with deionized water again, then active tungstic acid precipitation is dissolved in hydrogen peroxide, prepares colloidal sol, be spun in quartz glass substrate, 350 DEG C process 1h and obtain Seed Layer, and thickness is 20nm；(3) take sodium tungstate powder 4.12g and be dissolved in 60ml deionized water, regulating its pH with 3MHCl solution is 2.0, it is subsequently adding 2.1g (0.3M) ammonium sulfate as controlling agent, quartz glass substrate is lain in deionized water, after stirring 1 hour, pour in rustless steel hydrothermal reaction kettle, be heated to 150 DEG C in an oven and keep 10h, then take out quartz glass substrate and spend ionized water cleaning；(4) selecting chloroform is solvent, takes 3.8gZnTPP-2-NO2It is configured to the solution of 5.0mg/ml, supersound process 20min, make solution uniform, by dripping glue mode by made solution drop coating at quartz glass substrate surface, set spin speed as 3400rpm, spin-coating time is 70s, quartz glass substrate is finally dried at 60 DEG C in vacuum drying oven 12h, obtains the ZnTPP-2-NO that adulterates2WO3Nano wire film, i.e. WO3Gas-discoloration layer；
S3, assembling: by staggered relatively to the A face completed, B face structure, distance 500 μm, the periphery of A face structure and the handing-over of B face structure uses colloid to seal, obtains the sensing unit of described gas-discoloration gas sensor.
About the device in above-described embodiment, the concrete mode that wherein modules performs to operate has been described in detail in about the embodiment of the method, and explanation will be not set forth in detail herein.
Data test:
In A face, air-sensitive test completes on Testing system of gas-sensor built, puts in quartz ampoule by the device made, and heating unit heats makes the operating temperature of sensing unit be 120 DEG C, after stable, is passed through by air and finite concentration NO2The mixed gas of configuration, keeps 30min, is again passed through pure air, records WO3The resistance value of air-sensitive film layer, respectively R (NO2) and R (air), definition Gas-sensing measurment is: S=R (NO2)/R (air), response time be defined as being passed through resistance variations after test gas to maximum changes in resistance 80% required for time.Test finds, this tungsten oxide air-sensitive film is at the NO of 8ppm concentration2Gas medium sensitivity is 25；Best-case Response Time is 15s；Through 100 testing fatigues, electrical response value drops to original 86%.WO3Air-sensitive film shows good sensitivity, response time and repeatability.
In B face, use spectrophotometer to variable concentrations H2WO in atmosphere3Gas-discoloration layer carries out light transmittance test, defines T0For not leading to H2Time sample light transmittance, T is for being passed through finite concentration H2Time sample light transmittance, relative light transmission:, be passed through H2When concentration is 5000ppm, relative light transmission is with wavelength change, minimum 4%, it is 59.7% to the maximum, and through about 10min, relative light transmission tends towards stability, visible being passed through with tested gas, tungsten oxide gas-discoloration layer light transmittance declines, and shows as thin film color and transparent is become blue from original, response time is short, shows good gasochromic property.
Test finds, this steam vaporization unit is provided with gas-discoloration gas sensor, utilizes gas-discoloration principle can realize the Visual retrieval to hydrogen, and response time is short, highly sensitive, color change interval is bigger, achieve beyond thought effect, there is certain actual application value.
Embodiment 5:
Thering is provided the liquefied petroleum gas steam vaporization unit of a kind of highly sensitive detection function, described steam vaporization unit outer surface is provided with gas-discoloration gas sensor, and described gas-discoloration gas sensor is based on WO3Gas sensitive and WO3Gas-discoloration material；Described gas-discoloration gas sensor includes sensing unit, heating unit and data-reading unit；Described heating unit and data-reading unit are connected with the tungsten oxide air-sensitive film of sensing unit；Heating source when described heating unit works as tungsten oxide air-sensitive film；Data-reading unit processes the conductivity variations signal of tungsten oxide air-sensitive film to show the concentration value of object gas.
Fig. 1 is the schematic diagram of sensing unit in the gas-discoloration gas sensor that the present invention uses.With reference to Fig. 1, this sensing unit is the double-decker of hollow structure, forms double-deck A face structure and B face structure is staggered relatively, distance 500 μm, and the periphery of A face structure and the handing-over of B face structure uses colloid to seal；Described A face includes quartz glass substrate, interdigital electrode layer and WO3Air-sensitive film layer, WO3Air-sensitive film layer is doping SnO2WO3Thin film, it is possible to achieve to NO2The detection of gas, described B face includes quartz glass substrate and WO3Gas-discoloration layer, WO3Gas-discoloration layer is WO3Nano wire film doping ZnTPP-2-NO2, utilize gas-discoloration principle can realize the Visual retrieval to hydrogen；2 it are additionally provided with for air-vent that object gas penetrates in the structure of described B face.In A face, described SnO2Granularity less than 50nm, described WO3Air-sensitive film layer thickness is 400nm；In B face, described WO3Nanowire length about 1 μm, diameter about 30nm；
Fig. 2 is according to the flow chart preparing sensing unit shown in an exemplary embodiment, as in figure 2 it is shown, comprise the following steps:
S1, preparation A face structure, including following enforcement step: (1) takes the quartz glass substrate of certain size (4cm × 4cm), sequentially pass through acetone, ethanol, deionized water ultrasonic cleaning 20min；(2) spin coating one layer photoetching glue in quartz glass substrate, thickness 1 μm, exposes 6s under interdigital electrode mask covers, and cleans with deionized water after being then passed through development 50s, use Cr film thick for magnetically controlled sputter method one layer of 300nm of plating as interdigital electrode layer, then remove photoresist；(3) quartz glass substrate is put in magnetic control sputtering device, be evacuated to 5 × 10-4Below Pa, is passed through Ar and O2Mixed gas, regulate Ar:O2Ratio is 5:1, and operating pressure is 2.4Pa, and at the metal W target magnetic control sputtering 28min that target is purity 99.96%, target is the metal tin target magnetron sputtering 2min of purity 98%, obtains the SnO that adulterates2WO3Thin film, i.e. WO3Air-sensitive film layer；
S2, preparation B face structure, including following enforcement step: (1) takes the quartz glass substrate of same size (4cm × 4cm), sequentially passing through acetone, ethanol, deionized water, NaOH aqueous solution, deionized water ultrasonic cleaning, the time is 20min；(2) take 17g sodium tungstate to be dissolved in 200ml water, the concentrated hydrochloric acid adding excess obtains active tungstic acid precipitation, filtered, clean until can't detect chloride ion with deionized water again, then active tungstic acid precipitation is dissolved in hydrogen peroxide, prepares colloidal sol, be spun in quartz glass substrate, 350 DEG C process 3h and obtain Seed Layer, and thickness is 20nm；(3) take sodium tungstate powder 4.12g and be dissolved in 60ml deionized water, regulating its pH with 3MHCl solution is 2.0, it is subsequently adding 2.5g (0.3M) ammonium sulfate as controlling agent, quartz glass substrate is lain in deionized water, after stirring 1 hour, pour in rustless steel hydrothermal reaction kettle, be heated to 150 DEG C in an oven and keep 10h, then take out quartz glass substrate and spend ionized water cleaning；(4) selecting chloroform is solvent, takes 3.8gZnTPP-2-NO2It is configured to the solution of 5.6mg/ml, supersound process 20min, make solution uniform, by dripping glue mode by made solution drop coating at quartz glass substrate surface, set spin speed as 3400rpm, spin-coating time is 70s, quartz glass substrate is finally dried at 60 DEG C in vacuum drying oven 12h, obtains the ZnTPP-2-NO that adulterates2WO3Nano wire film, i.e. WO3Gas-discoloration layer；
S3, assembling: by staggered relatively to the A face completed, B face structure, distance 500 μm, the periphery of A face structure and the handing-over of B face structure uses colloid to seal, obtains the sensing unit of described gas-discoloration gas sensor.
About the device in above-described embodiment, the concrete mode that wherein modules performs to operate has been described in detail in about the embodiment of the method, and explanation will be not set forth in detail herein.
Data test:
In A face, air-sensitive test completes on Testing system of gas-sensor built, puts in quartz ampoule by the device made, and heating unit heats makes the operating temperature of sensing unit be 120 DEG C, after stable, is passed through by air and finite concentration NO2The mixed gas of configuration, keeps 30min, is again passed through pure air, records WO3The resistance value of air-sensitive film layer, respectively R (NO2) and R (air), definition Gas-sensing measurment is: S=R (NO2)/R (air), response time be defined as being passed through resistance variations after test gas to maximum changes in resistance 80% required for time.Test finds, this tungsten oxide air-sensitive film is at the NO of 8ppm concentration2Gas medium sensitivity is 30；Best-case Response Time is 15s；Through 100 testing fatigues, electrical response value drops to original 83%.WO3Air-sensitive film shows good sensitivity, response time and repeatability.
In B face, use spectrophotometer to variable concentrations H2WO in atmosphere3Gas-discoloration layer carries out light transmittance test, defines T0For not leading to H2Time sample light transmittance, T is for being passed through finite concentration H2Time sample light transmittance, relative light transmission:, be passed through H2When concentration is 5000ppm, relative light transmission is with wavelength change, minimum 6%, it is 62% to the maximum, and through about 10min, relative light transmission tends towards stability, visible being passed through with tested gas, tungsten oxide gas-discoloration layer light transmittance declines, and shows as thin film color and transparent is become blue from original, response time is short, shows good gasochromic property.
Test finds, this steam vaporization unit is provided with gas-discoloration gas sensor, utilizes gas-discoloration principle can realize the Visual retrieval to hydrogen, and response time is short, highly sensitive, color change interval is bigger, achieve beyond thought effect, there is certain actual application value.
Those skilled in the art, after considering description and putting into practice invention disclosed herein, will readily occur to other embodiments of the present invention.The application is intended to any modification, purposes or the adaptations of the present invention, and these modification, purposes or adaptations are followed the general principle of the present invention and include the undocumented common knowledge in the art of the application or conventional techniques means.Description and embodiments is considered only as exemplary, and true scope and spirit of the invention are pointed out by claim below.
It should be appreciated that the invention is not limited in precision architecture described above and illustrated in the accompanying drawings, and various modifications and changes can carried out without departing from the scope.The scope of the present invention is only limited by appended claim.
Claims (2)
1. the liquefied petroleum gas steam vaporization unit of a highly sensitive detection function, it is characterised in that described steam vaporization unit outer surface is provided with gas-discoloration gas sensor, and described gas-discoloration gas sensor is based on WO3Gas sensitive and WO3Gas-discoloration material；Described gas-discoloration gas sensor includes sensing unit, heating unit and data-reading unit；Described heating unit and data-reading unit are connected with the tungsten oxide air-sensitive film of sensing unit；Heating source when described heating unit works as tungsten oxide air-sensitive film；Data-reading unit processes the conductivity variations signal of tungsten oxide air-sensitive film to show the concentration value of object gas；Described sensing unit is the double-decker of hollow structure, forms double-deck A face structure and B face structure is staggered relatively, distance 500 μm, and the periphery of A face structure and the handing-over of B face structure uses colloid to seal；Described A face includes quartz glass substrate, interdigital electrode layer and WO3Air-sensitive film layer, WO3Air-sensitive film layer is doping SnO2WO3Thin film, it is possible to achieve to NO2The detection of gas, described B face includes quartz glass substrate and WO3Gas-discoloration layer, WO3Gas-discoloration layer is WO3Nano wire film doping ZnTPP-2-NO2, utilize gas-discoloration principle can realize the Visual retrieval to hydrogen；2 it are additionally provided with for air-vent that object gas penetrates in the structure of described B face；In A face, described SnO2Granularity less than 100nm, described WO3Air-sensitive film layer thickness is 400nm；In B face, described WO3Nanowire length about 1 μm, diameter about 60nm.
2. the liquefied petroleum gas steam vaporization unit of the preparation a kind of highly sensitive detection function described in claim 1, it is characterised in that wherein, the making of the sensing unit of described gas-discoloration gas sensor comprises the following steps:
S1, preparation A face structure, including following enforcement step:
(1) take the quartz glass substrate of certain size (4cm × 4cm), sequentially pass through acetone, ethanol, deionized water ultrasonic cleaning 20min；
(2) spin coating one layer photoetching glue in quartz glass substrate, thickness 1 μm, exposes 6s under interdigital electrode mask covers, and cleans with deionized water after being then passed through development 50s, use Cr film thick for magnetically controlled sputter method one layer of 300nm of plating as interdigital electrode layer, then remove photoresist；
(3) quartz glass substrate is put in magnetic control sputtering device, be evacuated to 5 × 10-4Below Pa, is passed through Ar and O2Mixed gas, regulate Ar:O2Ratio is 5:1, and operating pressure is 2.4Pa, and at the metal W target magnetic control sputtering 28min that target is purity 99.96%, target is the metal tin target magnetron sputtering 2min of purity 98%, obtains the SnO that adulterates2WO3Thin film, i.e. WO3Air-sensitive film layer；
S2, preparation B face structure, including following enforcement step:
(1) taking the quartz glass substrate of same size (4cm × 4cm), sequentially pass through acetone, ethanol, deionized water, NaOH aqueous solution, deionized water ultrasonic cleaning, the time is 20min；
(2) take 20g sodium tungstate to be dissolved in 200ml water, the concentrated hydrochloric acid adding excess obtains active tungstic acid precipitation, filtered, clean until can't detect chloride ion with deionized water again, then active tungstic acid precipitation is dissolved in hydrogen peroxide, prepares colloidal sol, be spun in quartz glass substrate, 350 DEG C process 1h and obtain Seed Layer, and thickness is 20nm；
(3) take sodium tungstate powder 4.12g and be dissolved in 60ml deionized water, regulating its pH with 3MHCl solution is 2.0, it is subsequently adding 2.1g (0.3M) ammonium sulfate as controlling agent, quartz glass substrate is lain in deionized water, after stirring 1 hour, pour in rustless steel hydrothermal reaction kettle, be heated to 150 DEG C in an oven and keep 10h, then take out quartz glass substrate and spend ionized water cleaning；
(4) selecting chloroform is solvent, takes 3.8gZnTPP-2-NO2It is configured to the solution of 5.0mg/ml, supersound process 20min, make solution uniform, by dripping glue mode by made solution drop coating at quartz glass substrate surface, set spin speed as 3400rpm, spin-coating time is 70s, quartz glass substrate is finally dried at 60 DEG C in vacuum drying oven 12h, obtains the ZnTPP-2-NO that adulterates2WO3Nano wire film, i.e. WO3Gas-discoloration layer；
S3, assembling: by staggered relatively to the A face completed, B face structure, distance 500 μm, the periphery of A face structure and the handing-over of B face structure uses colloid to seal, obtains the sensing unit of described gas-discoloration gas sensor.
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