CN105818540A - Gas enclosure assembly and system - Google Patents

Abstract

The present teachings relate to various embodiments of an hermetically-sealed gas enclosure assembly and system that can be readily transportable and assemblable and provide for maintaining a minimum inert gas volume and maximal access to various devices and apparatuses enclosed therein. Various embodiments of an hermetically-sealed gas enclosure assembly and system of the present teachings can have a gas enclosure assembly constructed in a fashion that minimizes the internal volume of a gas enclosure assembly, and at the same time optimizes the working space to accommodate a variety of footprints of various OLED printing systems. Various embodiments of a gas enclosure assembly so constructed additionally provide ready access to the interior of a gas enclosure assembly from the exterior during processing and readily access to the interior for maintenance, while minimizing downtime.

Description

Gas confinement assembly and system

The application is the divisional application of the patent application " gas confinement assembly and system " (application number: 201310704315.X, applicant: Ke Dihua company) of December in 2013 submission on the 19th.

Cross-Reference to Related Applications

The application is the part continuation application of the U.S. Patent application No.13/720,830 of December in 2012 submission on the 19th.The application also requires the rights and interests of the U.S. Provisional Application No.61/764,973 submitted on February 14th, 2013.The application of all cross references is all incorporated by herein.

Technical field

This teaching relates to each embodiment of gas-tight seal gas confinement assembly and system, described gas confinement assembly and system can easily carry and assemble, and are arranged to keep minimum noble gas volume and farthest close to the various devices wherein encapsulated and equipment.

Background technology

To the interest of the potential of OLED Display Technique by OLED Display Technique attribute drive, these attributes include having representing of the display floater of highly saturated color, and be high-contrast, ultra-thin, quickly response and energy-conservation.Additionally, various baseplate materials, including flexible polymeric material, can be used for the manufacture of OLED Display Technique.Although being used for representing for emphasizing the potential of this technology of the display of the small screen application (mainly cell phone), but remain challenge when this manufacture is amplified to larger amplitude face.Such as, the substrate bigger than Gen5.5 substrate (there is the size of about 130cm × 150cm) manufactures OLED display still to need to be proved.

Organic Light Emitting Diode (OLED) device can print various organic film on substrate by using OLED print system and other material manufactures.Such organic material can be easy to be damaged by oxidation and other chemical process.By can scale for various substrate sizes and can inertia, substantially without the printing environment of granule in carry out in the way of accommodate OLED print system and can there is multiple challenge.Equipment owing to printing for printing large format display panel substrate needs substantial amounts of space, is maintained at by big facility and needs gas purification to have significant engineering challenge under the inert atmosphere of the reactive environments material and organic solvent steam of removing such as steam and oxygen continuously.Such as, it is provided that the main facilities being hermetically sealed can have engineering challenge.In addition, feeding turnover OLED print system is so that various cables, line and the pipeline of operation print system can have challenge, so that gas lock effectively achieves the specification of the level of the Atmospheric components about such as oxygen and steam, because they can produce the notable dead volume that can retain such reactive materials.Additionally, it is desirable to this facility being maintained in the inert environments for processing is set to easily accessible, in order to safeguard with minimum downtime.In addition to substantially without reactive materials, the printing environment for OLED device needs the environment of notable low granule.In this respect, provide in completely enclosed system and keep providing substantially without the environment of granule the granule that can carry out (the most in the open, under high flow capacity laminar flow filter mantle) in atmospheric condition to reduce the unexistent additional challenges of process.

Therefore; need each embodiment of gas lock; described gas lock can inertia, substantially without the environment of granule in accommodate OLED print system; and can be readily scalable to provide for manufacturing oled panel on various substrate sizes and baseplate material; during processing, it is also easy to OLED print system accessible from the outside and easily accessible inside, in order to safeguard with minimum downtime simultaneously.

Accompanying drawing explanation

By with reference to accompanying drawing, obtaining being best understood from of the feature and advantage of the disclosure, accompanying drawing is intended to illustrate and not limit this teaching.

Fig. 1 is the gas confinement assembly according to this each embodiment instructed and the schematic diagram of system.

Fig. 2 is the gas confinement assembly according to this each embodiment instructed and the front, left perspective view of system.

Fig. 3 is the front, right perspective view of the gas confinement assembly according to this each embodiment instructed.

Fig. 4 shows the exploded view of the gas confinement assembly according to this each embodiment instructed.

Fig. 5 is the exploded front perspective view of the framing component assembly according to this each embodiment instructed, it is shown that each panel frame section and section panel.

Fig. 6 A is the back perspective view of glove ported shroud, and Fig. 6 B is the enlarged drawing of shoulder screw of glove ported shroud of each embodiment according to this gas confinement assembly instructed.

Fig. 7 A is the enlarged perspective of the snap lock latch (bayonetlatch) of glove ported shroud assembly, and Fig. 7 B is the sectional view of glove ported shroud assembly, it is shown that the joint of the recess in the head of shoulder screw and snap lock latch.

Fig. 8 A-8C is the schematic top plan view of each embodiment of the gasket seal for forming joint.

Fig. 9 A and Fig. 9 B is the various perspective views of the sealing of the framing component illustrating each embodiment according to this gas confinement assembly instructed.

Figure 10 A-10B be with each embodiment of the gas confinement assembly instructed according to this for receive can the relevant various views of the sealing of section panel of easily disassembled maintenance window.

Figure 11 A-11B be with each embodiment instructed according to this for receiving the magnification fluoroscopy sectional view that the sealing of the section panel inserting panel or window panel is relevant.

Figure 12 A is the base portion according to this each embodiment instructed, and described base portion includes dish and rests upon multiple cushion blocks (spacerblock) thereon.Figure 12 B is the enlarged perspective of the cushion block shown in Figure 12 A.

Figure 13 is the wall framing component relevant with dish according to this each embodiment instructed and the exploded view of top plate member.

Figure 14 A is the perspective view building the stage of the gas confinement assembly according to this each embodiment instructed, and wherein, lifter assembly is in raised position.Figure 14 B is the exploded view of the lifter assembly shown in Figure 14 A.

Figure 15 is the imaginary front perspective view of the gas confinement assembly according to this each embodiment instructed, it is shown that be arranged on the tubing in gas confinement component internal.

Figure 16 is the imaginary top perspective of the gas confinement assembly according to this each embodiment instructed, it is shown that be arranged on the tubing in gas confinement component internal.

Figure 17 is the imaginary bottom perspective view of the gas confinement assembly according to this each embodiment instructed, it is shown that be arranged on the tubing in gas confinement component internal.

Figure 18 A shows the schematic diagram of multi beam cable, line and pipeline etc..Figure 18 B shows this bundle of inswept each embodiment being fed past according to this tubing instructed of gas.

Figure 19 is schematic diagram, showing how the reactive materials (A) in the dead band being trapped in multi beam cable, circuit and pipeline etc. actively purges from the noble gas (B) of inswept pipeline, described wiring in bundles (route) passes through described pipeline.

Figure 20 A is the cable being routed through pipeline and the imaginary perspective view of pipeline of each embodiment of gas confinement assembly and the system instructed according to this.Figure 20 B is the enlarged drawing of the opening shown in Figure 20 A of each embodiment according to this gas confinement assembly instructed, it is shown that the details of the cover cap for being enclosed on opening.

Figure 21 is the view of the top board of the illuminator including gas confinement assembly and system according to this each embodiment instructed.

Figure 22 is curve chart, it illustrates the LED light spectrum of the illuminator of the gas confinement assembly according to this each embodiment instructed and system unit.

Figure 23 is the front perspective view of the view of the gas confinement assembly according to this each embodiment instructed.

Figure 24 shows the exploded view of each embodiment of the gas confinement assembly shown in the Figure 23 according to this each embodiment instructed.

Figure 25 shows the front perspective view of the decomposed of each embodiment of the gas confinement assembly according to this each embodiment instructed.

Figure 26 shows the decomposed side perspective view of each embodiment of the gas confinement assembly shown in the Figure 25 according to this each embodiment instructed.

Figure 27 A and Figure 27 B shows the enlarged drawing of the gas confinement assembly shown in the Figure 26 according to this each embodiment instructed.

Figure 28 is the sectional view of the framing component assembly including base portion and vertical corbel (riser) through each embodiment instructed according to this.

Figure 29 is the front perspective view of the view of the gas confinement assembly according to this each embodiment instructed.

Figure 30 shows the exploded view of each embodiment of the gas confinement assembly shown in the Figure 29 according to this each embodiment instructed.

Figure 31 A is the cross sectional view of the gas confinement assembly of each embodiment according to the gas lock shown in Figure 29.

Figure 31 B and Figure 31 C is the cross sectional view of the gas confinement assembly shown in the Figure 29 according to this each embodiment instructed, it is shown that move into the continuous moving of the print head assembly of maintenance position.

Figure 31 D-Figure 31 F is the cross sectional view of the gas confinement assembly of each embodiment according to the gas lock shown in Figure 29.

Figure 32 shows the perspective view of the all-in-service station in the frame assembly section of the gas confinement assembly shown in the Figure 29 being arranged on according to this each embodiment instructed.

Figure 33 is the perspective view of the frame assembly section of the gas confinement assembly shown in the Figure 29 according to this each embodiment instructed.

Figure 34 A and Figure 34 B is the schematic diagram of each embodiment of the gas confinement assembly of this teaching and relevant system unit.

Figure 35 is the gas confinement assembly according to this each embodiment instructed and the schematic diagram of system, it is shown that the embodiment circulated by the gas of gas confinement assembly.

Figure 36 is the gas confinement assembly according to this each embodiment instructed and the schematic diagram of system, it is shown that the embodiment circulated by the gas of gas confinement assembly.

Figure 37 is the diagrammatic cross-sectional view of the gas confinement assembly according to this each embodiment instructed.

Figure 38 is the gas confinement assembly according to this each embodiment instructed and the schematic diagram of system.

Figure 39 is the gas confinement assembly according to this each embodiment instructed and the schematic diagram of system.

Figure 40 is the form according to this each embodiment instructed, it is shown that can use the gas confinement assembly in extraneous gas loop and the valve position of each operator scheme of system.

Figure 41 is the front perspective view illustrating the suspending bench according to this each embodiment instructed.

Figure 42 is the enlarged drawing in the region indicated in Figure 40 of the suspending bench according to this each embodiment instructed.

Figure 43 A and Figure 43 B is the schematic sectional view being shown in the suspending bench shown in Figure 40 the deflection (flection) produced in substrate during advancing.

Figure 44 shows the front perspective view of the suspending bench of each embodiment according to this suspending bench instructed.

Figure 45 A and Figure 45 B be shown in suspending bench as shown in Figure 43 advance during substrate general planar arrange schematic sectional view.

Detailed description of the invention

This teaching discloses each embodiment of gas confinement assembly, described gas confinement assembly can sealably build and be formed integrally with gas circulation, filter and purifying part can keep inertia, substantially without the gas confinement assembly of environment of granule and system, for the process needing this environment to be formed.Various reactive materials (can be included various reactive ambient gas by this embodiment of gas confinement assembly and system, such as steam and oxygen, and organic solvent steam) every kind of levels of substance be maintained at such as 100ppm or lower, 10ppm or lower, 1.0ppm or lower or 0.1ppm or lower.Additionally, each embodiment of gas confinement assembly can provide the low particle environments of 3 grades and the 4 grades clean room standards meeting ISO14644.

The those of ordinary skill of every field is it is contemplated that the embodiment of the gas confinement assembly practicality in each technical field.Although this teaching can be benefited from the most different fields (such as, chemistry, biotechnology, new and high technology and pharmaceutical field), but OLED is printed for illustrating the practicality of each embodiment of gas confinement assembly and the system instructed according to this.Each embodiment of the gas confinement component system that can accommodate OLED print system can provide such as but not limited to following feature: seals the locking device providing gas-tight seal through multiple structures and destructing circulation, minimize enclosed volume, and during processing and during safeguarding, be prone to inside accessible from the outside.As discussed subsequently; this feature of each embodiment of gas confinement assembly can have the impact on function; such as but not limited to; structural integrity makes the low-level being prone to keep reactive materials during processing, and fast packing volume turnover (turnover) minimizes the downtime during maintenance cycle.Thus, it is provided that each feature of the practicality that oled panel prints and specification can be also that various technical field provides benefit.

Still need to be proved as it was noted above, manufacture OLED display on the substrate bigger than Gen5.5 substrate (there is the size of about 130cm × 150cm).For the flat faced display manufactured outside being printed by OLED, each godmother's glass substrate size has gone through differentiation from generation about nineteen ninety since in early days.First godmother's glass substrate (being expressed as Gen1) is about 30cm × 40cm, and therefore can produce 15 " panels.About nineteen ninety has developed into female glass substrate size of Gen3.5 for mid-term, the prior art producing flat faced display, and it has the size of about 60cm × 72cm.

Along with the propelling in each generation, the female glass size for Gen7.5 and Gen8.5 produces the printing manufacture process outside OLED.Mother's Gen7.5 glass has the size of about 195cm × 225cm, and each substrate can cut into eight 42 " or six 47 " flat boards.The female glass used in Gen8.5 is about 220 × 250cm, and each substrate can cut into six 55 " or eight 46 " flat boards.The promise of quality (such as, purer color, higher contrast, thin, flexible, transparency and energy efficiency) is had been carried out by OLED flat faced display, and meanwhile, OLED manufactures and is limited to Gen3.5 and less in practice.Currently, OLED prints the optimal manufacturing technology being considered as to break through this restriction, and allows oled panel manufacture to be applied not only to Gen3.5 and less female glass size, and for maximum female glass size, such as, Gen5.5, Gen7.5 and Gen8.5.It will be appreciated by the skilled addressee that the feature that oled panel prints includes using various baseplate material, such as but not limited to, various glass substrate materials and various polymer substrate material.In this respect, come from the size using the term of substrate based on glass to record and can be applicable to be applicable to the substrate of any material that OLED prints.

Print about OLED, according to this teaching, have been found that holding notable low-level reactive materials (such as but not limited to, the Atmospheric components of such as oxygen and steam, and the various organic solvent steams used in OLED ink) relevant with providing the OLED flat faced display meeting necessary lifetime specification.Lifetime specification is for oled panel technology particular importance, because this is directly related with the display product life-span；Product specification for all panel technology is difficult to meet currently for oled panel technology.Each embodiment by means of this gas confinement component system instructed, in order to provide the panel meeting necessary lifetime specification, the level of every kind of reactive materials (such as, steam, oxygen and organic solvent steam) is positively retained at such as 100ppm or lower, 10ppm or lower, 1.0ppm or lower or 0.1ppm or lower.Additionally, OLED prints needs the environment substantially without granule.For OLED prints, keep the environment particular importance substantially without granule, even if because the least granule may also lead to the visible defects on oled panel.Currently, needed for meeting commercialization, low defect level has challenge for OLED display.Completely enclosed system keeps provide substantially without the environment of granule can in atmospheric condition (the most in the open, under high flow capacity laminar flow filter mantle) in the granule that carries out reduce the unexistent additional challenges of process.Thus, keep inertia, necessary specification without particle environments can have various challenge in big facility.

The level of every kind of reactive materials (such as, steam, oxygen and organic solvent steam) is positively retained at explanation when printing information that the needs of oled panel can summarize in checking table 1 in the facility of such as 100ppm or lower, 10ppm or lower, 1.0ppm or lower or 0.1ppm or lower wherein.On table 1, the data of general introduction come from and test with each test sample of big pixel, the organic film composition of spin coating device breadth manufacture including for every kind in red, green and blueness.This test sample is significantly more susceptible to manufacture and test, for the rapid evaluation purpose of various preparations and process.Although test sample test should not obscured with the life test printing panel, but it can represent the impact on the life-span of various preparation and process.Result shown in following table represents the change of the process steps that test sample manufactures, wherein, compared with the test sample that (but in atmosphere rather than in nitrogen environment) similarly manufactures, only spin coating environment is for the test sample change manufactured in nitrogen environment (wherein, reactive materials is less than 1ppm).

Can be clear by the data checking the test sample for manufacturing under various process environment in table 1, especially in the case of red and blueness, efficiently reduce organic film composition be exposed in the environment of reactive materials printing can be on the stability of various EL with thus the life-span is had appreciable impact.

Table 1: the inert gas treatment impact on the oled panel life-span

Thus, zoom to Gen8.5 and above generation being printed by OLED from Gen3.5, and provide simultaneously can inertia, substantially without the gas confinement environment of granule in accommodate stalwartness (robust) closed system of OLED print system in terms of there is challenge.It is envisaged that; according to this teaching; this gas lock includes, but not limited to, e.g. following attribute by having: gas lock is easily scalable to provide the Optimization Work space for OLED print system; minimum noble gas volume is provided simultaneously; and be also set to be prone to OLED print system accessible from the outside during processing, provide internal close to safeguard with minimum downtime simultaneously.

Each embodiment instructed according to this, it is provided that a kind of for needing the gas confinement assembly of the various air-sensitive processes of inert environments, it can include multiple wall frameworks and the top board framing component that may be sealed together.In certain embodiments, multiple wall frameworks and top board framing component can use reusable securing member to tighten together, such as bolt and screwed hole.Each embodiment of gas confinement assembly for instructing according to this, multiple framing components can be built into restriction gas confinement frame assembly, and each framing component includes multiple panel frame section.

The gas confinement assembly of this teaching may be designed to accommodate system in the way of can minimizing the enclosed volume around system, such as OLED print system.Each embodiment of gas confinement assembly can by minimize gas confinement assembly internal capacity and simultaneously Optimization Work space to build in the way of accommodating the various occupied areas of various OLED print systems.Each embodiment of the gas confinement assembly so built also is set to be prone to the inside of gas confinement assembly accessible from the outside and easily accessible inside to safeguard during processing, and minimizes downtime simultaneously.In this respect, each embodiment according to this gas confinement assembly instructed can be wide about the various occupied area fixed wheels of various OLED print systems.According to each embodiment, once fixed wheel exterior feature framing component is constructed to form gas confinement frame assembly, and various types of panels just can be sealably mounted in the multiple panel sections constituting framing component, to complete the installation of gas confinement assembly.In each embodiment of gas confinement assembly, multiple framing components can be manufactured in a position or multiple position (to include, but not limited to, e.g., multiple wall framing components and at least one top board framing component) and for the multiple panels being arranged in panel frame section, and then build in another position.Additionally, give the parts of the gas confinement assembly for building this teaching can transport properties, each embodiment of gas confinement assembly may be constructed and deconstruct circulation repeatedly mount and dismount.

Being hermetically sealed in order to ensure gas lock, each embodiment of the gas confinement assembly of this teaching provides and is used for combining each framing component to provide frame seal.By the close fit cross part (including pad or other sealing member) between each framing component, inside can be sufficiently sealed, such as gas-tight seal.Building the most completely, the gas confinement assembly of sealing can include internal and multiple inner corners edge, and at least one inner corners edge is arranged at the cross part of each framing component and adjoining frame members.One or more in framing component, such as at least half in framing component, it may include along one or more sealant compressible shims that one or more respective edges is fixing.The one or more sealant compressible shim can be configured to combine once multiple framing components and install the panel of airtight body and just produces gas-tight seal gas confinement assembly.The gas confinement assembly sealed may be formed such that the corner edge of framing component is sealed by multiple sealant compressible shims.For each framing component, such as but not limited to interior wall framework surface, roof framework surface, upright side walls framework surface, diapire framework surface and combinations thereof, one or more sealant compressible shim can be provided with.

Each embodiment for gas confinement assembly, each framing component can include multiple section, the plurality of section is designed and manufactured as receiving any one in the various panel type can being sealably mounted in each section, to provide the panel sealing of the airtight body for each panel.In each embodiment of this gas confinement assembly instructed, each section framework can have section framework pad, by means of selected securing member, described section framework pad guarantees that each panel being arranged in each section framework can provide for each panel and thus for building the sealing of the airtight body of gas lock completely.In various embodiments, gas confinement assembly can have one or more in window panel or maintenance control panel in each Wall board；Wherein, each window panel or maintenance control panel can have at least one glove port.During gas confinement assembling components, each glove port can have attached glove, thus glove extend in inside.According to each embodiment, each glove port can have the hardware for installing glove, and wherein, this hardware uses gasket seal around each glove port, and it provides the sealing of airtight body to minimize the leakage by glove port or molecule diffusion.For each embodiment of this gas confinement assembly instructed, described hardware is also designed to be prone to cover cap and open the glove port of terminal use.

The gas confinement assembly instructed according to this and each embodiment of system can include the gas confinement assembly formed by multiple framing components and panel section and gas circulation, filter and purifying part.For each embodiment of gas confinement assembly and system, tubing can be installed during assembling processes.Each embodiment instructed according to this, tubing may be installed in the gas confinement frame assembly built by multiple framing components.In various embodiments, tubing can combine at multiple framing components and be arranged on multiple framing component before forming gas confinement frame assembly.Tubing for gas confinement assembly and each embodiment of system may be arranged so that the substantially all gas being drawn into tubing from one or more tubing entrances is moved through gas circulation and each embodiment of filtration circuit, for removing the particulate matter of gas confinement assembly and internal system.Separate additionally, the tubing of each embodiment of gas confinement assembly and system can be configured to the entrance and exit of the gas purification loop by gas confinement component external with the gas circulation of gas confinement component internal and filtration circuit.

Such as, the gas that gas confinement assembly and system can have in gas confinement component internal circulates and filtration system.This self-filtering system can have the multiple fan filter units in inside, and can be configured to provide gas laminar flow in inside.Laminar flow can be along from internal top to the direction of internal bottom or along other direction any.Although the gas stream produced by blood circulation is not necessarily laminar flow, but gas laminar flow can be used for guaranteeing thoroughly and completely having enough to meet the need of gas in inside.Gas laminar flow can be additionally used in and minimizes turbulent flow, and this turbulent flow is undesirable, because it can make the powder collection in environment in this regions of turbulent flow, thus stops filtration system to remove those granules from environment.In addition, in order to keep preferred temperature in inside, it is possible to provide use the heat regulating system of multiple heat exchanger, such as operate by means of fan or another gas-recycling plant, near fan or another gas-recycling plant, or it is used in combination with fan or another gas-recycling plant.Gas purification loop can be configured by least one gas cleaning components outside locking device from gas confinement component internal recyclegas.In this respect, circulation and the filtration system of gas confinement component internal is combined the continuous circulation that can provide the notable low particulate inert gas with notable low-level reactive materials run through in gas confinement assembly with the gas purification loop of gas confinement component external.Gas purge system can be configured to keep the most low-level and is not intended to component, such as organic solvent and steam thereof and water, steam, oxygen etc..

Except being provided for gas circulation, filtering and in addition to purifying part, tubing can sizing and be shaped to accommodate at least one in electric wire, wire harness and various fluid containment pipe wherein, it can have a large amount of dead volume when tying in, wherein, Atmospheric components (such as, water, steam, oxygen etc.) may be trapped and be difficult to be removed by cleaning system.In certain embodiments, the combination of any one and fluid containment pipe in cable, electric wire and wire harness can be generally disposed in tubing, and can be operably associated with at least one in the electrical system being arranged in inside, mechanical system, fluid system and cooling system respectively.Owing to gas circulation, filtration and purifying part may be arranged so that the most all circulated inert gas are all aspirated through tubing, therefore it is trapped in and effectively purges from a large amount of dead volumes of this material that ties in the Atmospheric components in the dead volume of the various material that ties in can be contained in tubing by making this material that ties in.

The gas confinement assembly instructed according to this and each embodiment of system can include the gas confinement assembly formed by multiple framing components and panel section and gas circulation, filter and purifying part, and additionally includes each embodiment of pressurized inert gas recirculating system.This pressurized inert gas recirculating system can use in the operation of OLED print system, for various pneumatic actuating devices and equipment, as the most described in more detail.

According to this teaching, solve multiple engineering challenge, in order in gas confinement assembly and system, provide each embodiment of pressurized inert gas recirculating system.First, in the typical operation of the gas confinement assembly and system that do not have pressurized inert gas recirculating system, gas confinement assembly can be maintained at slight positive internal pressure relative to external pressure, in order to prevents extraneous gas or air from entering when producing any leakage in gas confinement assembly and system internal.Such as, the gas confinement assembly that this is instructed and each embodiment of system, under typical operation, the inside of gas confinement assembly can be maintained at the pressure of for example, at least 2mbarg relative to the surrounding outside closed system, the pressure of for example, at least 4mbarg, the pressure of the pressure of at least 6mbarg, at least 8mbarg, or higher pressure.Pressurized inert gas recirculating system is kept to be probably challenge in gas confinement component system, because it has and keep a relevant balance play dynamically and persistently carried out of the slight positive internal pressure of gas confinement assembly and system, and simultaneously continuously introduce gas-pressurized in gas confinement assembly and system.Additionally, the variable demand of each device and equipment can form the various gas confinement assemblies and the irregular pressure distribution of system instructed for this.Under these conditions, dynamic pressure balance is kept to can provide for the globality of the OLED print procedure persistently carried out the gas confinement assembly being maintained at slight positive pressure relative to external environment condition.

For each embodiment of gas confinement assembly and system, can include each embodiment in pressurized inert gas loop according to this pressurized inert gas recirculating system instructed, this loop can use at least one in compressor, reservoir and aerator and combinations thereof.Each embodiment including the pressurized inert gas recirculating system of each embodiment in pressurized inert gas loop can have custom-designed Stress control bypass circulation, and it can provide the noble gas internal pressure being in stability line definite value in the gas confinement assembly that this is instructed and system.In each embodiment of gas confinement assembly and system, pressurized inert gas recirculating system can be configured to when the inert gas pressure in the reservoir in pressurized inert gas loop exceedes predetermined threshold value pressure via Stress control bypass circulation recirculation pressurized inert gas.Threshold pressure can be such as in the range of between about 25psig to about 200psig, or specifically in the range of between about 75psig to about 125psig, or specifically in the range of between about 90psig to about 95psig.In this respect, gas confinement assembly and the system with this teaching of the pressurized inert gas recirculating system of each embodiment with custom-designed Stress control bypass circulation are positively retained at the balance in gas-tight seal gas lock with pressurized inert gas recirculating system.

According to this teaching, various devices and equipment may be provided in inside, and with have various pressurized inert gas loop pressurized inert gas recirculating system each embodiment fluid communication, described pressurized inert gas loop can use at least one in various pressurized-gas source, such as compressor, aerator and combinations thereof.The gas lock instructed for this and each embodiment of system, use various pneumatically-operated device and equipment can provide low particles generation performance and low-maintenance.May be provided at exemplary means and equipment that gas confinement assembly connects with in internal system and with various pressurized inert gas loop fluid can include, such as but not limited to, in pneumatic robot, substrate suspending bench, air bearing, air lining (bushing), compressed gas instrument, pneumatic actuator one or more, and combinations thereof.Substrate suspending bench and air bearing can be used for operating the various aspects of the OLED print system of each embodiment according to this gas confinement assembly instructed.Such as, the substrate suspending bench of air bearing technology is used to can be used for the correct position that is transported to by substrate in printhead chamber and support substrate during OLED print processing.

As it was noted above, the operation of each embodiment that each embodiment of substrate suspending bench and air bearing is to being contained according to the OLED print system in this gas confinement assembly instructed is probably useful.As Fig. 1 for gas confinement assembly and system 2000 schematically shown in, use correct position that the substrate suspending bench of air bearing technology can be used for being transported to by substrate in printhead chamber and during OLED print processing, support substrate.In FIG, gas confinement assembly 1500 can be load lock system, it can have the inlet chamber 1510 for being received substrate by the first access hatch 1512 and gate 1514, for substrate is moved to gas confinement assembly 1500 from inlet chamber 1510, in order to prints.Can be used for being isolated from each other by chamber and isolating with external environment condition according to this each gate instructed.According to this teaching, each gate can select from physics gate and gas curtain.

During substrate reception processes, gate 1512 can be opened, and gate 1514 can be at closed position, in order to prevents environmental gas from entering gas confinement assembly 1500.Once substrate receives in inlet chamber 1510, gate 1512 and 1514 both can be closed and inlet chamber 1510 can use such as nitrogen, any rare gas and any combination of inert gas purge thereof, until the level of reactive ambient gas is in such as 100ppm or lower, 10ppm or lower, 1.0ppm or lower or 0.1ppm or lower.After environmental gas has reached of a sufficiently low level, gate 1514 can be opened, and 1512 still close, to allow substrate 1550 to be transported to gas confinement component chambers 1500 from inlet chamber 1510, as shown in FIG. 1.Substrate is transported to gas confinement component chambers 1500 from inlet chamber 1510 can be via such as but not limited to the suspending bench being arranged on chamber 1500 and 1510.Substrate is transported to gas confinement component chambers 1500 from inlet chamber 1510 also can be via such as but not limited to substrate conveyer robot, and substrate 1550 can be placed in the suspending bench in chamber 1500 by it.Substrate 1550 can keep being supported in substrate suspending bench during print processing.

Each embodiment of gas confinement assembly and system 2000 can have the outlet chamber 1520 by gate 1524 with gas confinement assembly 1500 fluid communication.According to each embodiment of gas confinement assembly and system 2000, after print procedure completes, substrate 1550 can be transported to outlet chamber 1520 from gas confinement assembly 1500 by gate 1524.Substrate is transported to outlet chamber 1520 from gas confinement component chambers 1500 can be via such as but not limited to the suspending bench being arranged on chamber 1500 and 1520.Substrate is transported to outlet chamber 1520 from gas confinement component chambers 1500 also can be via such as but not limited to substrate conveyer robot, and substrate 1550 can be picked up in the suspending bench being arranged at chamber 1500 and be transported to chamber 1520 by it.For each embodiment of gas confinement assembly and system 2000, when gate 1524 in the closed position to prevent reactive ambient gas from entering gas confinement assembly 1500 time, substrate 1550 can be fetched via gate 1522 from outlet chamber 1520.

In addition to the load lock system including the inlet chamber 1510 and outlet chamber 1520 being in fluid communication with gas confinement assembly 1500 respectively via gate 1514 and 1524, gas confinement assembly and system 2000 can include system controller 1600.System controller 1600 can include the one or more processor circuit (not shown) connected with one or more memory circuitry (not shown).System controller 1600 also can with include the load lock system connectivity of inlet chamber 1510 and outlet chamber 1520, and finally connect with the printing nozzle of OLED print system.So, the opening and closing of system controller 1600 tunable gate 1512,1514,1522 and 1524.System controller 1600 also can control the ink distribution of the printing nozzle to OLED print system.Substrate 1550 can be carried by each embodiment of the load lock system of this teaching, via such as but not limited to using the substrate suspending bench of air bearing technology or using substrate suspending bench and the combination of substrate conveyer robot of air bearing technology, load lock system to include inlet chamber 1510 and the outlet chamber 1520 being in fluid communication with gas confinement assembly 1500 via gate 1514 and 1524 respectively.

Each embodiment of the load lock system of Fig. 1 may also include atmospheric control 1700, and it can include vacuum source and can include nitrogen, any rare gas and any combination of inert gas source thereof.The substrate suspension system being contained in gas confinement assembly and system 2000 can include multiple vacuum ports and the gas bearing ports being usually placed on flat surfaces.Substrate 1550 can pass through such as nitrogen, any rare gas and the boost in pressure of any combination of noble gas thereof and be held away from crust.The flowing flowing out bearing volume completes by means of multiple vacuum ports.The substrate 1550 hoverheight in substrate suspending bench generally becomes with gas pressure and gas flow.The vacuum of atmospheric control 1700 and pressure can be used for supporting during manipulation in gas confinement assembly 1500 substrate 1550 in the load lock system of Fig. 1, such as during printing.Control system 1700 be can be additionally used in and supports substrate 1550 during being carried by the load lock system of Fig. 1, and load lock system includes inlet chamber 1510 and the outlet chamber 1520 being in fluid communication with gas confinement assembly 1500 respectively via gate 1514 and 1524.Carrying by gas confinement assembly and system 2000 to control substrate 1550, system controller 1600 is connected with inert gas source 1710 and vacuum 1720 with 1722 by valve 1712 respectively.Unshowned addition of vacuum and noble gas supply connection and valve are provided to gas confinement assembly and system 2000, by the load lock system diagram in Fig. 1, to further provide for for controlling the various gases needed for enclosed environment and vacuum facility.

In order to provide the perspective view of more multidimensional to each embodiment of gas confinement assembly and the system instructed according to this, Fig. 2 is the front, left perspective view of each embodiment of gas confinement assembly and system 2000.Fig. 2 shows and includes gas confinement assembly 1500, inlet chamber 1510 and the load lock system of the first gate 1512.Gas confinement assembly and the system 2000 of Fig. 2 can include gas purge system 2130, for providing the constant supply of noble gas of organic solvent steam having notable low-level reactive environments material (such as steam and oxygen) and obtaining from OLED print procedure to gas confinement system 1500.The gas confinement assembly of Fig. 2 and system 2000 also have the controller system 1600 for system control function, as mentioned before.

Fig. 3 is the front, right perspective view building gas confinement assembly 100 completely according to this each embodiment instructed.Gas confinement assembly 100 can accommodate one or more gases, for keeping the inert environments in gas confinement component internal.The gas confinement assembly of this teaching and system can be useful in terms of the inert gas environment in keeping inside.Noble gas can be any gas under qualifications in groups without undergoing chemical reaction.Some of noble gas generally use example can include nitrogen, any rare gas and any combination thereof.Gas confinement assembly 100 is configured to surround and protection air-sensitive process, such as, use Industrial printing systems to print Organic Light Emitting Diode (OLED) ink.It is that the example of reactive environmental gas includes steam and oxygen to OLED ink.As it was noted above, gas confinement assembly 100 can be configured to keep the atmospheric environment of sealing and allow parts or print system effectively to operate, avoid polluting, aoxidizing and damage original reactive material and substrate simultaneously.

As shown in FIG. 3, each embodiment of gas confinement assembly can include following element portion, including front portion or the first Wall board 210', left side or the second Wall board (not shown), right side or the 3rd Wall board 230', rear portion or the 4th Wall board (not shown) and ceiling panel 250', this gas confinement assembly is attachable to dish 204, and dish 204 rests upon on base portion (not shown).As the most described in more detail, each embodiment of the gas confinement assembly 100 of Fig. 1 can be built by anterior or the first wall framework 210, left side or the second wall framework (not shown), right side or the 3rd wall framework 230, rear portion or the 4th Wall board (not shown) and top board framework 250.Each embodiment of top board framework 250 can include fan filter unit cover cap 103 and the first top board framework pipeline 105 and the first top board framework pipeline 107.The embodiment instructed according to this, various types of section panels may be installed constitute framing component multiple panel sections in any one in.In each embodiment of the gas confinement assembly 100 of Fig. 1, metal panels section 109 can be welded in framing component during framework establishment.For each embodiment of gas confinement assembly 100, can be able to include for insertion (inset) panel 110 shown in Wall board 210' and for the window panel 120 shown in Wall board 230' and can easy-off maintenance window 130 through the section panel type that the structure of gas confinement assembly and destructing circulation repeatedly mount and dismount.

Although the inside of easily accessible locking device 100 can be set to easy-off maintenance window 130, but can use dismountable any panel to provide the close of the inside to gas confinement assembly and system, for repairing and routine maintenance purpose.For maintenance or repair this close to be different from by such as window panel 120 and can the panel of easy-off maintenance window 130 provide close, its can make terminal use's glove during use from gas confinement component external close to gas confinement component internal.Such as, be attached to any glove of glove port 140, such as glove 142, as in Fig. 3 for shown in panel 230, terminal use can be made between gas confinement component system validity period close to internal.

Fig. 4 shows the exploded view of each embodiment of the gas confinement assembly shown in Fig. 3.Each embodiment of gas confinement assembly can have multiple Wall board, external perspective view including front walls panel 210', the external perspective view of left side wall panel 220', the perspective internal view of right side wall panel 230', the perspective internal view of rear wall panel 240', and the top perspective of ceiling panel 250', as shown in Figure 3, gas confinement assembly is attachable to dish 204, and dish 204 rests upon on base portion 202.OLED print system may be installed on the top of dish 204, and this print procedure is known is sensitive to Atmospheric Condition.According to this teaching, gas confinement assembly can be built by framing component, the wall framework 210 of such as Wall board 210', the wall framework 220 of Wall board 220', the wall framework 230 of Wall board 230', the wall framework 240 of Wall board 240' and the top board framework 250 of ceiling panel 250', the most then can install multiple section panel.In this respect, it may be desirable to the design of the section panel that streaming repeatedly can mount and dismount through the structure of each embodiment of the gas confinement assembly of this teaching and destructing circulation.In addition, the occupied area of wide each embodiment to accommodate OLED print system of fixed wheel of gas confinement assembly 100 can be carried out, so as noble gas volume required in minimizing gas confinement assembly, and make terminal use easily accessible, it is not always the case during gas confinement assembly uses and during safeguarding.

Using front walls panel 210' and left side wall panel 220' as example, each embodiment of framing component can have the metal panels section 109 being welded in framing component during framing component builds.Insert panel 110, window panel 120 and can may be installed in each wall framing component by easy-off maintenance window 130, and repeatedly can mount and dismount through the structure of the gas confinement assembly 100 of Fig. 4 and destructing circulation.It can be seen that in the example of Wall board 210' and Wall board 220', Wall board can have near can the window panel 120 of easy-off maintenance window 130.Similarly, as shown in exemplary rear Wall board 240', Wall board can have the window panel of such as window panel 125, and it has two adjacent glove ports 140.Each embodiment of wall framing component for instructing according to this, and for the gas confinement assembly 100 of Fig. 3 it can be seen that this layout of glove can be easy to from the outside of gas lock close to the element portion in closed system.Therefore, each embodiment of gas lock can provide two or more glove ports, thus left hand set and right hand set can be stretched in inside and manipulate the one or more objects in inside by terminal use, and does not disturb the composition of the gaseous environment in inside.Such as, any one in window panel 120 and maintenance window 130 may be positioned such that beneficially outside from gas confinement assembly provides easy access to the adjusting part gas confinement component internal.Each embodiment of window panel according to such as window panel 120 and maintenance window 130, when do not point out terminal use pass through the glove of glove port close to time, this window may not include glove port and glove port assembly.

As shown in Figure 4, each embodiment of wall and ceiling panel can have multiple insertion panel 110.In figure 4, it can be seen that insert panel can have variously-shaped and aspect ratio.Except inserting in addition to panel, ceiling panel 250' can have installations, bolt connection, threaded, fixing or be otherwise fastened to fan filter unit cover cap 103 and first top board framework pipeline 105 and the second top board framework pipeline 107 of top board framework 250.As the most described in more detail, the tubing being in fluid communication with the pipeline 107 of ceiling panel 250' may be installed in the inside of gas confinement assembly.According to this teaching, this tubing can be a part for the gas-circulating system of gas confinement component internal, and provides for separating the flowing stream leaving gas confinement assembly, for cycling through at least one gas cleaning components of gas confinement component external.

Fig. 5 is the exploded front perspective view of framing component assembly 200, and wherein, wall framework 220 can be built into and include the most supplementary of panel.Although being not limited to shown design, but the framing component assembly 200 of wall framework 220 is used to can be used for illustrating each embodiment according to this framing component assembly instructed.According to this teaching, each embodiment of framing component assembly can be made up of each framing component and the section panel being arranged in each frame panel section of each framing component.

According to each embodiment of this each framing component assembly instructed, framing component assembly 200 can be made up of the framing component of such as wall framework 220.Each embodiment for gas confinement assembly, the gas confinement assembly 100 of such as Fig. 3, the process that can use the equipment being contained in this gas confinement assembly can not need only provide for the gas-tight seal locking device of inert environments, and needs the environment substantially without particulate matter.In this respect, the metal tube material of the various sizes of each embodiment for building framework can be used according to this framing component instructed.This metal tube material solves expectation material properties, include but not limited to, will not degrade to produce the high globality material of particulate matter, and produce and there is high intensity and there is the framing component of optimum weight, thus it is set to be easy to carry out carrying, build and deconstruct the gas confinement assembly including each framing component and panel section from the three unities to another place.Those of ordinary skill in the art are it can easily be understood that any material meeting these requirements can be used for forming each framing component instructed according to this.

Such as, according to each embodiment of this framing component instructed, such as framing component assembly 200, can be built by the metal tube extruded.According to each embodiment of framing component, aluminum, steel and various metallic composite can be used to build framing component.In various embodiments, can use and have such as but not limited to following size and the metal tube with 1/8 " to 1/4 " wall thickness: 2 " wide × 2 " are high, 4 " wide × 2 " are high and 4 " wide × 4 " are high, to build each embodiment according to this framing component instructed.In addition, the various fiber reinforced polymer composites with various pipe or other form are available, it has and includes but not limited to following material properties: will not degrade to produce the high globality material of particulate matter, and generation has high intensity and has the framing component of optimum weight, it is set to be easy to carry out carrying, build and deconstructing from the three unities to another place.

About by each framing component of metal tube material construction of various sizes, it is contemplated that, can carry out welding to be formed each embodiment in frame welding portion.Additionally, suitable industry adhesive can be used to carry out by each framing component of structure material construction of various sizes.Should be will not carry out in the way of inherently creating by the leakage paths of framing component it is contemplated that build each framing component.In this respect, for each embodiment of gas confinement assembly, build each framing component and any method of the leakage paths that will not inherently create by framing component can be used to carry out.Additionally, according to each embodiment of this framing component instructed, such as the wall framework 220 of Fig. 4, can be painted or be coated with.For by being such as prone to oxidation (wherein, the material formed in surface can form particulate matter) each embodiment of framing component of making of metal tube material, can carry out brushing or being coated with or the process of other surface, such as anodization, to prevent from forming particulate matter.

The framing component assembly of the framing component assembly 200 of such as Fig. 5 can have the framing component of such as wall framework 220.Wall framework 220 can have top 226 (top wall framework backing plate 227 can be fastened thereon) and bottom 228 (base wall framework backing plate 229 can be fastened thereon).As described in greater detail below, the backing plate being arranged on framing component surface is a part for gasket seal system, it is combined with the gasket seal of the panel being arranged in framing component section, it is provided that for the gas-tight seal of each embodiment according to this gas confinement assembly instructed.Framing component, the wall framework 220 of the framing component assembly 200 of such as Fig. 5, can have some panel frame sections, wherein, each section may be produced that the various types of panels of reception, such as but not limited to inserting panel 110, window panel 120 and can easy-off maintenance window 130.Various types of panel sections can be formed when building framing component.The type of panel section can include, but not limited to, e.g. for receive insert panel 110 insert panel section 10, for receive window panel 120 window panel section 20 and can the maintenance window panel section 30 of easy-off maintenance window 130 for receiving.

Each type of panel section can have a panel part segment frames of receiving panel, and can be set to each panel and can sealably be fastened to according in this each panel section instructed, for building the gas confinement assembly of gas-tight seal.Such as, in the Fig. 5 showing the frame assembly instructed according to this, inserting panel section 10 and be shown as having framework 12, window panel section 20 is shown as having framework 22, and maintenance window panel section 30 is shown as having framework 32.For each embodiment of this wall frame assembly instructed, each panel part segment frames can be to receive the sheet material in panel section, to provide gas-tight seal with sequential welding bead weld.For each embodiment of wall frame assembly, each panel part segment frames can be made up of various sheet material, and including the structure material selected from fiber reinforced polymer composites, it can use suitable industry adhesive to be arranged in panel section.Such as relating to the follow-up teaching sealed is by described in more detail, each panel part segment frames can have the sealant compressible shim being disposed thereon, to guarantee can be formed the sealing of airtight body for each panel installed and be fastened in each panel section.In addition to panel part segment frames, each framing component section can have and positioning panel and be firmly fastened to the hardware that panel is relevant in panel section.

Insert panel 110 and each embodiment for the panel frame 122 of window panel 120 can be built by sheet material, such as but not limited to aluminum, the various alloys of aluminum and rustless steel.The attribute of panel material can be identical with the attribute of the structural material of each embodiment for constituting framing component.In this respect, there is the material for the attribute of various panel members include but not limited to: will not degrade to produce the high globality material of particulate matter, and generation has high intensity and has the panel of optimum weight, in order to be set to be prone to carry out carrying, build and deconstructing from the three unities to another place.Such as, each embodiment of honeycomb core plate material can have to be used as to build and inserts panel 110 and the required attribute of panel material of the panel frame 122 for window panel 120.Honeycomb core plate material can be made up of various materials；Metal and metal composite and polymer, and polymer composite honeycomb core material.When being made up of metal material, each embodiment of detachable panel can have the grounding connection included in the panel, to guarantee the total ground connection when gas confinement assembly is fabricated.

Give gas confinement assembly for building this teaching gas confinement component parts can transport properties, any one in each embodiment of the section panel of this teaching can repeat installation and removal, to be set to the inside close to gas confinement assembly during gas confinement assembly and system use.

Such as, the panel section 30 of easy-off maintenance window panel 130 can have four pads in groups for receiving, one of them is shown as window guiding pad 34.In addition, building for receiving and the panel section 30 of easy-off maintenance window panel 130 can have four clamping plate (clampingcheat) 36 in groups, it may be used in be arranged on and each four back actions hinged (toggle) in groups on the maintenance window framework 132 of easy-off maintenance window 130 can press from both sides 136 and be clamped in maintenance window panel section 30 by maintenance window 130.Additionally, each in two window handles 138 may be installed can be on easy-off maintenance window framework 132, so that terminal use's maintenance window easy to removal and installation 130.Quantity, the type of dismountable maintenance window handle and alterable is set.Additionally, the maintenance window panel section 30 of easy-off maintenance window panel 130 at least two in window folder 35 can be made to be selectively installed in each maintenance window panel section 30 for receiving.Although being shown in top and the bottom of each maintenance window panel section 30, but at least two window folder can be to install in order to any mode of fastening maintenance window 130 in panel part segment frames 32.Instrument can be used for dismantling and install window folder 35, in order to allows maintenance window 130 dismounting and again installs.

The back action toggle clamp 136 of maintenance window 130 and the hardware (including that clamping plate 36, window guide pad 34 and window folder 35) being arranged in panel section 30 can be built by any suitable material and combination of materials.Such as, one or more this elements can include at least one metal, at least one pottery, at least one plastics and combinations thereof.Dismountable maintenance window handle 138 can be built by any suitable material and combination of materials.Such as, one or more this elements can include at least one metal, at least one pottery, at least one plastics, at least one rubber and combinations thereof.The window 124 of closed window, such as window panel 120 or the window 134 of maintenance window 130, it may include any suitable material and combination of materials.According to each embodiment of this gas confinement assembly instructed, closed window can include transparent and trnaslucent materials.In each embodiment of gas confinement assembly, closed window can include material based on Silicon stone (such as but not limited to, such as glass and quartz) and various types of material based on polymer (such as but not limited to, the Merlon of the most various ranks, acrylic acid and vinyl material).Various complex that it will appreciated by the skilled person that example window gate material and combinations thereof also act as the transparent and trnaslucent materials instructed according to this.

Can be seen that can have the glove port of band cover cap 150 by easy-off maintenance window panel 130 in Figure 5 for framing component assembly 200.Although Fig. 3 showing, all glove ports have outward extending glove, but as it is shown in figure 5, according to terminal use the need of remotely close to the inside of gas confinement assembly, glove port also can be by cover cap.Each embodiment of the cover assembly as shown in Fig. 6 A-7B is set to when terminal use does not uses glove be latched on glove cover cap securely, and it is set to when terminal use is desirable for glove be conveniently accessible to simultaneously.

In fig. 6, it is shown that cover cap 150, it can have inner surface 151, outer surface 153 and can the wide side 152 for grasping of fixed wheel.Three shoulder screw 156 extend from the edge 154 of cover cap 150.As shown in Figure 6B, during each shoulder screw is arranged on edge 154 so that shank 155 extends setpoint distance from edge 154, thus head 157 not joining edge 154.In Fig. 7 A-7B, glove port hardware assembly 160 can be modified to provide cover assembly, and it includes for being pressurized to relative to the locking mechanism of cover cap glove port when having normal pressure outside locking device at locking device.

For each embodiment of the glove port hardware assembly 160 of Fig. 6 A, snap clamp so that cover cap 150 is enclosed on glove port hardware assembly 160, and simultaneously provide the easily accessible glove of terminal use quickly couple design.In the top perspective view of the glove port hardware assembly 160 shown in fig. 7, glove port assembly 160 can include back plate 161 and header board 163, and header board 163 has the threaded screws head 162 for installing glove and flange 164.Showing snap lock latch 166 on flange 164, it has groove 165, for receiving the shoulder screw head 157 (Fig. 6 B) of shoulder screw 156.Each shoulder screw 156 can align with each in the snap lock latch 166 of glove port hardware assembly 160 and engage.The groove 168 of snap lock latch 166 has the opening 165 being positioned at end and is positioned at the locking recess 167 at the other end of groove 168.The most each shoulder screw head 157 inserts in each opening 165, and cover cap 150 is the most rotatable, until the end near locking recess 167 of shoulder screw head adjacent groove 168.Sectional view shown in Fig. 7 B shows for the lock-in feature of cover cap glove when gas confinement component system uses.During use, the internal gas pressure of the noble gas in locking device set amount bigger than the pressure of gas confinement component external.Normal pressure can fill glove (Fig. 3), thus when glove compress for 150 times at cover cap during the use of the gas confinement assembly that this is instructed, shoulder screw head 157 moves to lock in recess 167, so that it is guaranteed that glove port window will be by reliably cover cap.But, terminal use can grasp cover cap 150 by fixed wheel exterior feature for the side 152 grasped, and is easily disengaged from the cover cap being fastened in snap lock latch when not in use.Fig. 7 B also show the back plate 161 on the inner surface 131 of window 134 and the header board on the outer surface of window 134 163, and two plates all have O-ring packing 169.

As incited somebody to action in the following teaching of Fig. 8 A-9B with discussing, the section panel frame sealing member of wall and top board framing component sealing member and airtight body combines provides each embodiment of the gas-tight seal gas confinement assembly for the air-sensitive process needing inert environments.Contributing to providing the parts of the reactive materials of notable low concentration and the gas confinement assembly of notable low particle environments and system may include but be not limited to, gas-tight seal gas confinement assembly and efficient gas circulation and particle filter system, including tubing.The effective gas-tight seal for gas confinement assembly is provided to be probably challenge；Especially when three framing components form three plane ties together.Thus, three plane ties are sealed in provides the gas-tight seal aspect easily installed of the gas confinement assembly for may be constructed and deconstruct circulation assembly and disassembly to have especially difficult challenge.

In this respect, by effective gasket seal of joint and the gas confinement assembly and the gas-tight seal of system providing effective gasket seal and providing to build completely around parts is built according to each embodiment of this gas confinement assembly instructed at load bearing.Different from conventional joint sealing, the joint sealing instructed according to this: 1) it is included in top and bottom terminal frame joint joint portion (in this place, three framing components are combined) the consistent parallel alignment of the adjacent pad section in place and vertical orientated pad length, thus avoid angularly stitching alignment and sealing, 2) the whole width being used for along joint is provided to form adjacent length, thus increase and be in sealing contact area at three plane tie joint portions, 3) it is designed with backing plate, described backing plate along all vertically and horizontally and top and bottom three plane tie gasket seal provide consistent compression stress.Additionally, the selection of gasket material can affect the effectiveness providing gas-tight seal, this will be discussed later.

Fig. 8 A-8C is to illustrate the schematic top plan view that conventional three plane ties seal the contrast sealed with three plane ties instructed according to this.Each embodiment according to this gas confinement assembly instructed, can have such as but not limited to, at least four wall framing component, top board framing component and dish, it can be bonded to form gas confinement assembly, thus produce multiple vertical, level and three plane ties needing gas-tight seal.In fig. 8 a, the schematic top plan view of conventional three gasket seals is formed by the first pad I, and the first pad I is vertical orientated with pad II in X-Y plane.As shown in Figure 8 A, in X-Y plane by vertical orientated formed be sewn between two sections and have by the contact length W of gasket width dimension limitation₁.Additionally, the terminal part of pad III (at the pad that vertical direction is vertical orientated with pad I and pad II) can adjoin pad I and pad II, as by shown in shade.In the fig. 8b, the schematic top plan view of conventional three plane tie gasket seals is formed by the first pad length I, and the first pad length I is vertical with the second pad length II, and has 45 ° of seam faying faces of two length, wherein, it is sewn between two sections and there is the contact length W more than gasket material width₂.Being similar to the configuration of Fig. 8 A, the end portion at the vertical direction pad III vertical with pad I and pad II can adjoin pad I and pad II, as by shown in shade.Assuming that gasket width is identical in Fig. 8 A and Fig. 8 B, the contact length W of Fig. 8 B₂Contact length W more than Fig. 8 A₁。

Fig. 8 C is the schematic top plan view according to these three plane tie gasket seals instructed.First pad length I can have the pad section I' of the direction formation being perpendicular to pad length I, wherein, the length that pad section I' has can be about the size of the width of combined structure member, such as forming the metal tube that 4 " width × 2 " are high or 4 " width × 4 " are high of each wall framing component of the gas confinement assembly of this teaching.Pad II is vertical with pad I in X-Y plane, and has pad section II', and the stacked length of pad section II' and pad section I' is about the width of combined structure member.The width of pad section I' and II' is the width of selected compressible pad sheet material.Pad III is vertically vertical orientated with pad I and pad II.Pad section III' is the end portion of pad III.Pad section III' is vertical orientated and formed by the vertical length of pad section III' and pad III.Pad section III' may be formed such that it has the length about the same with pad section I' and II', and to have be the width of selected sealant compressible shim material thickness.In this respect, the contact length W of three shown in Fig. 8 C alignment section₃More than being respectively provided with W₁And W₂Fig. 8 A or Fig. 8 B shown in conventional delta connection seal.

In this respect, at terminal fitting joint portion, the consistent parallel alignment (will being otherwise the pad from its vertical alignment, as shown in the situation of Fig. 8 A and Fig. 8 B) of pad section is formed according to these three plane tie gasket seals instructed.This consistent parallel alignment of three plane tie gasket seal sections strides across described section and applies consistent transverse sealing power, and airtight three plane ties at top and bottom corners to promote the joint formed by wall framing component seal.Additionally, the consistent each section aliging pad section that each three plane ties seal is selected to the width of the most combined structure member, thus provide the maximum contact length of the consistent section that aligns.Additionally, be designed with backing plate according to this joint sealing instructed, described backing plate is along building all vertical, the level of joint and the compression stress that three gasket seal offers are consistent.Evincible, select the width for the gasket material width of routine three face seal that the example of Fig. 8 A and Fig. 8 B provides being at least combined structure member.

The exploded perspective of Fig. 9 A illustrates the black box 300 instructed before all framing components are combined according to this, thus pad shows and is in uncompressed state.In figure 9 a, in the first step building gas lock from all parts of gas confinement assembly, multiple wall framing components, such as wall framework 310, wall framework 350 and top board framework 370, can sealably be combined.Seal according to this framing component instructed and be to provide gas confinement assembly once build the pith being just hermetically sealed and providing the sealing can implemented through the structure of gas confinement assembly and destructing circulation completely.Although the example provided in the following teaching of Fig. 9 A-9B is the part for sealing gas closed component, but it will be appreciated by the skilled addressee that the whole of any one be applicable to the gas confinement assembly of this teaching of this teaching.

The first wall framework 310 shown in Fig. 9 A can have be provided with the medial surface 311 of backing plate 312, vertical side 314 and install backing plate 316 top surface 315.First wall framework 310 can have the first pad 320, and the first pad 320 is arranged in the space formed by backing plate 312 and adheres to the space formed by backing plate 312.The vertical length of extensible first pad 320 in gap 302 stayed after the first pad 320 is arranged in the space formed by backing plate 312 and adheres to the space formed by backing plate 312, as shown in Figure 9 A.As shown in Figure 9 A, submissive pad 320 may be provided in the space formed by backing plate 312 and adhere to the space formed by backing plate 312, and can have vertical pad length 321, curve pad length 323 and in 90 ° with vertical pad length 321 planar shape and terminate at the pad length 325 of vertical side 314 of wall framework 310 on internal frame member 311.In figure 9 a, the first wall framework 310 can have the top surface 315 installing backing plate 316, thus forms space on surface 315, and the second pad 340 is arranged in described space and the inward flange 317 of close wall framework 310 adheres to described space.The horizontal length of extensible second pad 340 in gap 304 stayed after the second pad 340 is arranged in the space formed by backing plate 316 and adheres to the space formed by backing plate 316, as shown in Figure 9 A.Additionally, as shown in phantom lines, the length 345 of pad 340 is the most parallel with the length 325 of pad 320 and aligns adjacently.

The second wall framework 350 shown in Fig. 9 A can have external frame side 353, vertical side 354 and install the top surface 355 of backing plate 356.Second wall framework 350 can have the first pad 360, and the first pad 360 is arranged in the space formed by backing plate 356 and adheres to the space formed by backing plate 356.The horizontal length of extensible first pad 360 in gap 306 stayed after the first pad 360 is arranged in the space formed by backing plate 356 and adheres to the space formed by backing plate 356, as shown in figure 9 a.As shown in Figure 9 A, submissive pad 360 can have vertical length 361, length of curve 363 and in 90 ° with top surface 355 planar shape and terminate at the length 365 of outer frame members 353.

As shown in the decomposition diagram of Fig. 9 A, the internal frame member 311 of wall framework 310 can be coupled to the vertical side 354 of wall framework 350 to form a structure joint of gas confinement frame assembly.About the sealing building joint so formed, in each embodiment of gasket seal at the terminal fitting joint portion of the wall framing component instructed according to this, as shown in Figure 9 A, the length 345 of the length 325 of pad 320, the length 365 of pad 360 and pad 340 is alignd the most adjacently and as one man.Additionally, as the most described in more detail, each embodiment of the backing plate of this teaching can provide for the consistent compression between about 20% to about 40% deflection of the compressible pad sheet material of each embodiment of the gas confinement assembly of this teaching of gas-tight seal.

Fig. 9 B shows the black box 300 instructed after all framing components combine according to this, thus pad is shown at compressive state.Fig. 9 B shows the perspective view of the details of the corner sealing of three plane ties formed at the top terminals joint joint portion between first wall framework the 310, second wall framework 350 and top board framework 370 (illustrating with imaginary drawing).As shown in fig. 9b, backing plate the pad space limited can be identified as one fixed width, thus after combining wall framework 310, wall framework 350 and top board framework 370；As shown in imaginary drawing, the consistent compression between about 20% to about 40% deflection forming the compressible pad sheet material of vertical, level and three gasket seals guarantees that the gasket seal at all surface sealed in the joint of wall framing component can provide gas-tight seal.In addition, after pad gap 302,304 and 306 (not shown) is dimensioned so that the optimal compression between about 20% to about 40% deflection of compressible pad sheet material, each pad can joint sheet gap, as in figures 9 b and 9 for shown in pad 340 and pad 360.Thus, in addition to being arranged by each pad of restriction and providing consistent compression with the space adhered to, it is designed to provide each embodiment of backing plate in gap to also assure that each compression gasket can be complied with in the space limited by backing plate, without wrinkling in compressive state in the way of by is formationed leakage paths or swell or shape the most brokenly.

According to each embodiment of this gas confinement assembly instructed, various types of section panels all can use the sealant compressible shim material seal being arranged on each panel part segment frames.Integration Framework component gasket seal, the position and material for forming the sealant compressible shim of sealing between each section panel and panel section framework can provide the gas-tight seal gas confinement assembly with the leakage of little or no gas.In addition, for all types of panels (such as, the insertion panel 110 of Fig. 5, window panel 120 and can easy-off maintenance window 130) Seal Design durable panel can be provided to seal in this panel repeated removal with after installing (in order to need, such as in order to safeguard) close to gas confinement component internal.

Such as, Figure 10 A shows maintenance window panel section 30 and can the exploded view of easy-off maintenance window 130.As it was noted above, maintenance window panel section 30 can manufacture can easy-off maintenance window 130 for reception.For each embodiment of gas confinement assembly, such as the panel section of detachable maintenance control panel section 30 can have panel part segment frames 32 and the sealant compressible shim 38 being arranged on panel part segment frames 32.In various embodiments, terminal use can be made to be easily installed and again install by the relevant hardware of easy-off maintenance window 130 with fastening in detachable maintenance window panel section 30, and guarantee can install and when being again arranged in panel section 30 as desired by the terminal use needing to be immediately adjacent to gas confinement component internal by easy-off maintenance window 130 simultaneously, it is ensured that the sealing of airtight body.Can include rigidity window frame 132 by easy-off maintenance window 130, it can be by such as but not limited to the metal tube material construction described in any framing component for this teaching of structure.Maintenance window 130 can use snap action securing hardware, such as but not limited to back action toggle clamp 136, in order to makes terminal use readily accessible and installation and maintenance window 130 again.Figure 10 A shows the glove port hardware assembly 160 of earlier figures 7A-7B, it is shown that 3 snap lock latch 166 in groups.

As shown in the front view of the detachable maintenance window panel section 30 of Figure 10 A, can have four toggle clamps 136 in groups being fastened on window frame 132 by easy-off maintenance window 130.Maintenance window 130 can be positioned on restriction distance in panel part segment frames 30, for guaranteeing the Suitable compression power against pad 38.Using four windows in groups to guide pad 34, as shown in Figure 10 B, it may be installed in each corner of panel section 30, for positioning maintenance window 130 in panel section 30.In groups each in clamping plate 36 can be set to receive can the back action toggle clamp 136 of easy-off maintenance window 136.According to each embodiment for the gas-tight seal maintenance window 130 through installation and removal circulation, relative to defined position (by becoming group window the to guide pad 34 offer) combination of sealant compressible shim 38, the mechanical strength of maintenance window framework 132 can ensure that once maintenance window 130 fastening puts in place with maintenance window 130, being fastened on the back action toggle clamp 136 in corresponding clamping plate 36 such as but not limited to using, maintenance window framework 132 just can provide uniform power with restriction compression (being guided pad 34 to set by becoming group window) on panel part segment frames 32.This group window guides pad 34 to be located so that the window 130 compression stress on pad 38 deflects sealant compressible shim 38 between about 20% to about 40%.In this respect, structure and the manufacturing of panel section 30 of maintenance window 130 provides the sealing for the maintenance window 130 airtight body in panel section 30.As it was noted above, window folder 35 can be arranged in panel section 30 after maintenance window 130 is fastened in panel section 30, and the dismounting when maintenance window 130 needs dismounting.

Back action toggle clamp 136 can use any appropriate means and means combination to be fastened to can easy-off maintenance window framework 132.The example of spendable suitable fastener means include at least one binding agent (such as but not limited to, epoxy resin or cement), at least one bolt, at least one screw, at least one other securing member, at least one groove, at least one track, at least one weld part and combinations thereof.Back action toggle clamp 136 be may be coupled directly to dismountable maintenance window framework 132 or indirectly connected by adaptor plate.Back action toggle clamp 136, clamping plate 36, window guide pad 34 and window folder 35 can be built by any suitable material and combination of materials.Such as, one or more this elements can include at least one metal, at least one pottery, at least one plastics and combinations thereof.

Can be in addition to easy-off maintenance window except sealing, the sealing of airtight body may also provide for inserting panel and window panel.The other type of section panel that repeatedly can mount and dismount in panel section includes, but not limited to, e.g. the insertion panel 110 shown in Fig. 5 and window panel 120.In fig. 5 it can be seen that the panel frame 122 of window panel 120 is similarly constructed with inserting panel 110.Thus, according to each embodiment of gas confinement assembly, can be identical for receiving the manufacture inserting panel and the panel section of window panel.In this respect, the sealing inserting panel and window panel can use same principle to implement.

With reference to Figure 11 A and Figure 11 B, and each embodiment instructed according to this, any panel of gas lock (such as, the gas confinement assembly 100 of Fig. 1) can include one or more insertion panel section 10, and it can have the framework 12 being configured to receive corresponding insertion panel 110.Figure 11 A refers to publish picture the perspective view of the amplifier section shown in 11B.In Figure 11 A, insert panel 110 and be shown as positioning relative to insertion framework 12.Can be seen that in Figure 11 B, inserting panel 110 and be bonded to framework 12, wherein, framework 12 can such as be built by metal.In certain embodiments, metal can include aluminum, steel, copper, rustless steel, chromium, alloy and combinations thereof etc..Multiple blind screwed holes 14 can be formed in inserting panel section framework 12.Panel part segment frames 12 is built into be included in the pad 16 inserted between panel 110 and framework 12, and sealant compressible shim 18 may be provided at wherein.Blind hole 14 can be M5 type.Screw 15 can be received by blind hole 14, thus is inserting compression gasket 16 between panel 110 and framework 12.Once put in place against pad 16 fastening, insert panel 110 in inserting panel section 10, just form the sealing of airtight body.As it was noted above, various section panels can be implemented by this panel sealing, include but not limited to, the insertion panel 110 shown in Fig. 5 and window panel 120.

Each embodiment according to the sealant compressible shim instructed according to this, seal for framing component and the compressible pad sheet material of panel sealing is selected from various compressible polymeric material, such as but not limited to any one in closed cell (cell) polymeric material classification, this area is also referred to as expanded rubber material or expanded polymeric material.In brief, closed cell polymer is prepared in the way of gas confinement is in separate unit；The most each separate unit is closed by polymeric material.The attribute of the compressible closed cell polymeric pad sheet material being expected to be useful in the airtight body sealing of framework and panel component includes but not limited to, they are healthy and strong to the chemical attack of the chemical substance of wide scope, there is extraordinary moisture barrier attribute, it is resilient in wide temperature range, and resists permanent compressive deformation (set).Generally speaking, compared with open cell configuration polymeric material, closed cell polymeric material has high dimension stability, relatively low moisture absorption coefficient and higher-strength.The various types of polymeric materials that can be made into closed cell polymeric material include, but not limited to, e.g.: silicone (silicone), neoprene, ethylene-propylene-diene terpolymer (EPT) (using ternary ethylene rubber (EPDM) polymer made and complex), ethylene nitrile, butadiene-styrene rubber (SBR) and various copolymer thereof and blend.

The expectation material properties of closed cell polymer only keeps when the unit constituting block materials remains intact during use.In this respect, set the mode of specified material specification (such as, exceed in assigned temperature or compression zone use specification) for closed cell polymer and use this material can cause the degraded of gasket seal can exceed.In each embodiment of the closed cell polymer pad of the section panel in seal frame component and frame panel section, between the compression of this material should be less than deflecting about 50% to about 70%, and in order to optimum performance can be between about 20% to about 40% deflection.

In addition to closed cell compressible pad sheet material, another example of the compressible pad sheet material classification with the expectation attribute for building the embodiment according to this gas confinement assembly instructed includes hollow extrusion removing from mould compressible pad sheet material classification.Hollow extrusion removing from mould gasket material has expectation attribute as material classification, including but not limited to, they are healthy and strong to the chemical attack of wide scope chemical substance, have extraordinary moisture barrier attribute, it is resilient in wide temperature range, and it resists permanent compressive deformation.This hollow extrusion removing from mould compressible pad sheet material can occur with the variously-shaped factor of wide scope, such as but not limited to, any one in U-shaped unit, D-shaped unit, rectangular cells, rectangular element and various conventional shape factor hollow extrusion removing from mould gasket material.Various hollow extrusion removing from mould gasket materials can be made up of the polymeric material for closed cell sealant compressible shim manufacture.Can be made up of silicone, neoprene, ethylene-propylene-diene terpolymer (EPT) (using polymer and complex that ethylene propylene diene rubber (EPDM) makes), ethylene nitrile, butadiene-styrene rubber (SBR) and various copolymer thereof and blend such as but not limited to, each embodiment of hollow extrusion removing from mould pad.The compression of this hollow unit gasket material should be less than about 50% deflection, in order to keeps expectation attribute.

Those of ordinary skill in the art is readily understood by, although closed cell compressible pad sheet material classification and hollow extrusion removing from mould compressible pad sheet material classification are given as examples, but any compressible pad sheet material with expectation attribute can be used in sealing each panel in the structure member (the most various walls and top board framing component) of this teaching offer and sealing panel section framework.

Gas confinement assembly can be built from multiple framing components, the gas confinement assembly 100 of such as Fig. 3 and Fig. 4 or the gas confinement assembly 1000 of Figure 23 and Figure 24 as discussed subsequently, so that minimize damage system unit (such as but not limited to, gasket seal, framing component, pipeline and section panel) risk.Such as, gasket seal is to build the parts that can be easily damaged during gas lock from multiple framing components.Each embodiment instructed according to this, material and method are arranged to minimize or eliminate the risk of all parts damaging gas confinement assembly during building the gas lock instructed according to this.

Figure 12 A is the perspective view building the starting stage of the gas confinement assembly of the gas confinement assembly 100 of such as Fig. 3.Although the gas confinement assembly of such as gas confinement assembly 100 is for illustrating the structure of gas confinement assembly of this teaching, but those of ordinary skill it can be appreciated that, this teaching is applicable to each embodiment of gas confinement assembly.As shown in fig. 12, during the starting stage of the structure of gas confinement assembly, multiple cushion blocks are first placed on the dish 204 that supported by base portion 202.Cushion block can be thicker than the compressible pad sheet material being arranged on each wall framing component being installed on dish 204.A series of cushion blocks can be placed in the position on the periphery edge of dish 204, and in described position, each wall framing component of gas confinement assembly can be placed on a series of cushion block and near the position of dish 204 during assembly, and does not contacts with dish 204.Expect by can protect to the compressible pad sheet material (purpose in order to seal with dish 204) being arranged on each wall framing component not by any infringement in the way of on dish 204, assemble each wall framing component.Thus, in order to form gas-tight seal purpose with dish 204, use cushion block (each Wall board parts can be placed on the initial position on dish 204 on cushion block) to prevent from making to be arranged on the compressible pad sheet material on each wall framing component by any infringement.Such as but not limited to, as illustrated in fig. 12, front circumference edge 201 can have pad 93,95 and 97, and front walls framing component can rest upon on pad 93,95 and 97；Right periphery edge 205 can have pad 89 and 91, and right side wall framing component can rest upon on pad 89 and 91；And rear perimeter edge 207 can have two pads, rear wall framework pad can rest upon thereon, illustrated therein is pad 87.Any quantity, type and the combination of cushion block can be used.It will be appreciated by the skilled addressee that, according to this teaching, cushion block can be positioned on dish 204, although the cushion block of the most not shown uniqueness in Figure 12 A-Figure 14 B.

For the exemplary cushion block according to this each embodiment instructed from component framework component assembling gas lock shown in Figure 12 B, it is the perspective view irising out the 3rd cushion block 91 shown in part at Fig. 9 A.Exemplary cushion block 91 can include the cushion block band 90 being attached to the transverse side 92 of cushion block.Cushion block can be made up of any suitable material and combination of materials.Such as, each cushion block can include the polyethylene of super high molecular weight.Cushion block band 90 can be made up of any suitable material and combination of materials.In certain embodiments, cushion block band 90 includes nylon material, poly-alkylene material etc..Cushion block 91 has top surface 94 and basal surface 96.Cushion block 87,89,93,95,97 and other cushion block any used can configure with same or like physical attribute, and can include same or like material.Cushion block can be to allow stably to be placed into the periphery top edge of dish 204 and easy-to-dismount mode rests upon, clamps or is otherwise easy to set up.

In the decomposition diagram that Figure 13 provides, front walls framework 210, left side wall framework 220, right side wall framework 230, rear wall framework 240 and top board on dish 204 that framing component can include being attachable to rest upon on base portion 202 or top frame 250.OLED print system 50 may be installed on dish 204 top.

The gas confinement assembly instructed according to this and the OLED print system 50 of each embodiment of system can include such as: granite base portion；The movable bridge of sustainable OLED printing equipment；The one or more devices extended from each embodiment of pressurized inert gas recirculating system and equipment, such as, substrate suspending bench, air bearing, track, guide rail；For the inkjet printer system that OLED film formation material is deposited on substrate, including OLED ink supply subsystem and ink jet-print head；One or more robots etc..Providing all parts that can include OLED print system 50, each embodiment of OLED print system 50 can have various occupied area and form factor.

If OLED ink-jet print system can include allowing the equipment for drying of ink droplet reliable arrangement ad-hoc location on substrate and equipment.These devices and equipment may include but be not limited to, and the substrate of print head assembly, ink induction system, motor system, such as suspending bench or chuck (chuck) supports equipment, substrate loading and uninstalling system and head maintenance system.Print head assembly includes at least one ink gun, with at least one aperture that can be sprayed with controllable rate, speed and size by ink droplet.Ink gun is supplied by ink supply system, and ink is supplied to ink gun by ink supply system.Print the relative motion needed between print head assembly and substrate.This completes by means of motor system, it is common that portal frame or separation axle XYZ system.Print head assembly can move (portal frame type) on fixing substrate, or in the case of point off-axis configuration, printhead and substrate both can move.In another embodiment, printing station can be fixed, and substrate can move along X and Y-axis relative to printhead, and Z axis motion provides at substrate or printhead.When printhead moves relative to substrate, ink droplet sprays in orthochronous with the desired locations being deposited on substrate.Substrate uses substrate to load and uninstalling system inserts printer and removes from printer.Configuring according to printer, this can be by machinery carrier, substrate suspending bench or have the robot of end effector and complete.Head maintenance system can include some subsystems, and it allows such as drop volume demarcation, the scraping on inkjet nozzle surface, perfusion with the maintenance task that ink is ejected into useless pond.

Each embodiment according to this teaching for assembling gas lock, front portion or the first wall framework 210, left side or the second wall framework 220, right side or the 3rd wall framework 230, rear portion or the 4th wall framework 250 and top board framework 250 with the sequential build of system together, and can be then attached to the dish 204 being arranged on base portion 202 as shown in fig. 13 that.Each embodiment of framing component can use gantry to be positioned on cushion block to prevent from damaging compressible pad sheet material, as mentioned before.Such as, using gantry, front walls framework 210 can rest upon at least three cushion block, such as the pad 93,95 and 97 on the periphery top edge 201 of the dish 204 shown in Figure 12 A.After front walls framework 210 is placed on cushion block, wall framework 220 and wall framework 230 can be placed sequentially on the cushion block being arranged on the periphery edge 203 of dish 204 and periphery edge 205 in succession or in any order.Each embodiment according to this teaching assembling gas lock from component framework component, front walls framework 210 can be placed on cushion block, subsequently left side wall framework 220 and right side wall framework 230 are placed on cushion block so that they put in place be bolted connection or be otherwise fastened to front walls framework 210.In various embodiments, rear wall framework 240 can be placed on cushion block so that it puts in place to be bolted and is connected or fastened to left side wall framework 220 and right side wall framework 230.For each embodiment, once wall framing component tightens together to form adjacent wall framework closed component, and top top board framework 250 just can be bonded to this wall framework closed component to form complete gas confinement frame assembly.In each embodiment for this teaching building gas confinement assembly, in this assembling stage, complete gas confinement frame assembly rests upon on multiple cushion blocks, in order to protect the globality of each framing component pad.

As shown in fig. 14 a, for each embodiment of this teaching for building gas confinement assembly, then gas confinement frame assembly 400 can be positioned such that pad can be removed to prepare gas confinement frame assembly 400 is attached to dish 204.Figure 14 A shows the gas confinement frame assembly 400 using lifter assembly 402, lifter assembly 404 and lifter assembly 406 to be increased to from cushion block lifting and the position leaving cushion block.In this each embodiment instructed, lifter assembly 402,404 and 406 can attach around the periphery of gas confinement frame assembly 400.After lifter assembly is attached, the gas confinement frame assembly built completely with rising or can stretch out each lifter assembly and lift-off cushion block by activating each lifter assembly, thus raises gas confinement frame assembly 400.As shown in Figure 14 A, gas confinement frame assembly 400 is shown as being thus lifted to previously rest upon above multiple cushion blocks thereon.Then the plurality of cushion block its from dish 204 can rest upon position and removes, thus then framework can be reduced on dish 204 and be then attached to dish 204.

Figure 14 B is each embodiment according to this lifter assembly instructed and the exploded view of identical lifter assembly 402 as illustrated in figure 11A.As it can be seen, lifter assembly 402 includes wear prevention pad 408, installing plate 410, first clamp bearing 412 and second clamp bearing 413.First clamp 414 and second clamp 415 are shown as being in line with corresponding clip bearing 412 and 413.Jack crank 416 is attached to the top of very heavy apical axis 418.Trailer (trailerjack) jack 520 is shown as perpendicular to very heavy apical axis 418 and is attached to very heavy apical axis 418.Jack base portion 422 is shown as a part for the bottom of very heavy apical axis 418.Being foot abutment 424 below jack base portion 422, it is configured to receive the bottom of very heavy apical axis 418 and may be connected on it.Smoothing foot 426 is also shown as and is configured to be received by foot abutment 424.Those of ordinary skill in the art can will readily recognize that, any means being suitable for lifting operation can be used in raising gas confinement frame assembly from cushion block, thus cushion block can be removed and intact gas confinement assembly can be reduced on dish.Such as, replace one or more lifter assemblies of such as 402,404 and 406, hydraulic pressure, pneumatically or electrically lifter can be used.

According to each embodiment of this teaching for building gas confinement assembly, multiple securing members can provide and be configured to be tightened together by the plurality of framing component, and then gas confinement frame assembly are fastened to dish.The plurality of securing member can include that being arranged on corresponding frame component along each edge of each framing component is configured to one or more fastener portion of the position intersected with the adjoining frame members in multiple framing components.The plurality of securing member and sealant compressible shim may be arranged so that, when framing component combines, sealant compressible shim is arranged close to inside and hardware near outside, thus hardware will not provide multiple leakage paths of airtight body closed component of this teaching.

The plurality of securing member can include multiple screwed holes at the edge of multiple bolts at the edge along one or more framing components and the one or more different frames components along multiple framing components.The plurality of securing member can include that multiple nut fixes bolt.Described bolt can include the bolt head being extended the outer surface of the corresponding panel.Bolt can sink in the recess in framing component.Clip, screw, rivet, binding agent and other securing member can be used for tightening together framing component.Bolt or other securing member can extend through the outer wall of one or more framing component and enter in the screwed hole in the sidewall of one or more adjoining frame members or roof or other complementary fasteners feature.

As shown in Figure 15-17, for building each embodiment of the method for gas lock, tubing may be installed in the interior section being combined by wall framework and top board framing component and being formed.For each embodiment of gas confinement assembly, tubing can be installed during structure processes.Each embodiment instructed according to this, tubing may be installed in the gas confinement frame assembly built by multiple framing components.In various embodiments, tubing can combine at multiple framing components and be arranged on multiple framing component before forming gas confinement frame assembly.Tubing for gas confinement assembly and each embodiment of system may be arranged so that the substantially all gas being drawn into tubing from one or more tubing entrances is moved through gas circulation and each embodiment of filtration circuit, for removing the particulate matter of gas confinement component internal.In addition, the tubing of each embodiment of gas confinement assembly and system can be configured to the entrance and exit of the gas purification loop by gas confinement component external and separates from gas circulation and filtration circuit, and gas circulation and filtration circuit are for removing the particulate matter in gas confinement assembly.Each embodiment according to this tubing instructed can be made up of sheet metal, such as but not limited to the aluminium flake with about 80mil thickness.

Figure 15 shows the right front imagination perspective view of the piping components 500 of gas confinement assembly 100.Closed pipe system assembly 500 can have front walls panel piping components 510.As it can be seen, front walls panel piping components 510 can have front walls panel entry pipeline the 512, first front walls panel indulges corbel 514 and corbel 516 indulged by the second front walls panel, both it is in fluid communication with front walls panel entry pipeline 512.First front walls panel is indulged corbel 514 and is shown as having outlet 515, and outlet 515 sealably engages with the top board pipeline 505 of fan filter unit cover cap 103.In a similar manner, the second front walls panel is indulged corbel 516 and is shown as having outlet 517, and outlet 517 sealably engages with the top board pipeline 507 of fan filter unit cover cap 103.In this respect, front walls panel piping components 510 provides for using front walls panel entry pipeline 512 that by each front walls panel, the noble gas in gas confinement assembly is indulged corbel 514 and 516 from bottom cycle, and carry air by outlet 505 and 507 respectively, thus air can be filtered by such as fan filter unit 752.As described in greater detail below, the quantity of fan filter unit, size and dimension can select according to the physical location of the substrate in print system during processing.Heat exchanger 742 as a part for heat regulating system is maintained at preferred temperature near fan filter unit 752, the noble gas that can would circulate through gas confinement assembly 100.

Right side wall panel piping components 530 can have right side wall panel inlet duct 532, and it indulges corbel 534 by right side wall panel first and right side wall panel second is indulged corbel 536 and is in fluid communication with right side wall panel upper pipe 538.Right side wall panel upper pipe 538 can have the first entrance end 535 and second pipe outlet end 537, and second pipe outlet end 537 is in fluid communication with the rear wall upper panel pipeline 536 of rear wall piping components 540.Left side wall panel piping components 520 can have and for parts identical described in right side wall panel assembly 530, wherein, can be clearly visible in fig .15 and indulge corbel 524 by the first left side wall panel and the left side wall panel entry pipeline 522 of corbel 524 and left side wall upper panel pipeline (not shown) fluid communication indulged by the first left side wall panel.Rear wall panel piping components 540 can have rear wall panel entry pipeline 542, and rear wall panel entry pipeline 542 is in fluid communication with left side wall panel assembly 520 and right side wall panel assembly 530.Additionally, rear wall panel piping components 540 can have rear wall panel bottom pipe 544, rear wall panel bottom pipe 544 can have rear wall panel the first entrance 541 and rear wall panel the second entrance 543.Rear wall panel bottom pipe 544 can be in fluid communication with rear wall upper panel pipeline 536 via the first next door (bulkhead) 547 and the second next door 549, and described bulkhead structures may be used for be fed to inside such as but not limited to the various bundles of cable, line and pipeline etc. from the outside of gas confinement assembly 100.Pipeline tapping 533 is provided for the bundle of cable, line and pipeline etc. is removed rear wall upper panel pipeline 536, and it can be via next door 549 through upper pipe 536.Next door 547 and next door 549 can use removably insertable panel gas-tight seal on outside, as mentioned before.Rear wall upper panel pipeline is in fluid communication with such as but not limited to fan filter unit 754 by vent 545 (showing one corner in Figure 15).In this respect, left side wall panel piping components 520, right side wall panel piping components 530 and rear wall panel piping components 540 provide and are used for the noble gas in gas confinement assembly from bottom cycle, use Wall board inlet duct 522,532 and 542 and front panel lower pipeline 544 respectively, it is in fluid communication with vent 545 by aforesaid each vertical corbel, pipeline, septal canal etc., thus air can be filtered by such as fan filter unit 754.Heat exchanger 744 as a part for heat regulating system is maintained at preferred temperature near fan filter unit 754, the noble gas that can would circulate through gas confinement assembly 100.

In fig. 15 it is shown that fed by the cable of opening 533.As the most described in more detail, each embodiment of the gas confinement assembly of this teaching provides for making the bundle of cable, line and pipeline etc. pass through tubing.In order to eliminate the leakage paths formed around this bundle, each method for using different size cable, line and pipeline in compliant materials sealed beam can be used.Also show pipe I and pipe II for closed pipe system assembly 500 in Figure 15, it is shown as a part for fan filter unit cover cap 103.Pipe I provides the inert gas outlet to extraneous gas cleaning system, and pipe II provides to the gas within gas confinement assembly 100 and circulates and the purification noble gas return in particle filtering loop.

In fig. 16 it is shown that the top imagination perspective view of closed pipe system assembly 500.Can be seen that left side wall panel piping components 520 and the symmetric property of right side wall panel piping components 530.For right side wall panel piping components 530, right side wall panel inlet duct 532 indulges corbel 534 by right side wall panel first and right side wall panel second is indulged corbel 536 and is in fluid communication with right side wall panel upper pipe 538.Right side wall panel upper pipe 538 can have the first entrance end 535 and second pipe outlet end 537, and this second pipe outlet end 537 is in fluid communication with the rear wall upper panel pipeline 536 of rear wall piping components 540.Similarly, left side wall panel piping components 520 can have left side wall panel entry pipeline 522, and left side wall panel entry pipeline 522 indulges corbel 524 by left side wall panel first and left side wall panel second is indulged corbel 526 and is in fluid communication with left side wall upper panel pipeline 528.Left side wall upper panel pipeline 528 can have the first entrance end 525 and second pipe outlet end 527, and this second pipe outlet end 527 is in fluid communication with the rear wall upper panel pipeline 536 of rear wall piping components 540.Additionally, rear wall panel piping components can have rear wall panel entry pipeline 542, rear wall panel entry pipeline 542 is in fluid communication with left side wall panel assembly 520 and right side wall panel assembly 530.Additionally, rear wall panel piping components 540 can have rear wall panel bottom pipe 544, rear wall panel bottom pipe 544 can have rear wall panel the first entrance 541 and rear wall panel the second entrance 543.Rear wall panel bottom pipe 544 can be in fluid communication with rear wall upper panel pipeline 536 via the first next door 547 and the second next door 549.Piping components 500 shown in Figure 15 and Figure 16 can provide noble gas from the Efficient Cycle of anterior Wall board piping components 510 (noble gas is recycled to ceiling panel pipeline 505 and 507 via front walls Face plate outlet 515 and 517 from anterior Wall board inlet duct 512 by respectively) and from left side wall panel assembly 520, right side wall panel assembly 530 and rear wall panel piping components 540 (its by air respectively from inlet duct 522, 532 and 542 are recycled to vent 545) Efficient Cycle.Once noble gas via ceiling panel pipeline 505 and 507 and vent 545 be discharged to the closed area under the fan filter unit cover cap 103 of locking device 100, the noble gas so discharged just can be by fan filter unit 752 and 754 filtration.Additionally, the noble gas of circulation can be maintained at preferred temperature by the heat exchanger 742 and 744 of the part as heat regulating system.

Figure 17 is the imaginary upward view of closed pipe system assembly 500.Inlet ductwork assembly 502 includes the front walls panel entry pipeline 512 of fluid communication with each other, left side wall panel entry pipeline 522, right side wall panel inlet duct 532 and rear wall panel entry pipeline 542.Each inlet duct that Inlet ductwork assembly 502 is included, exist along the equally distributed obvious opening of each duct bottom, opening is emphasized especially in groups, the purpose instructed for this, such as opening 511, the opening 521 of left side wall panel entry pipeline 522, the opening 531 of right side wall panel inlet duct 532 and the opening 541 of right side wall panel inlet duct 542 of front walls panel entry pipeline 512.Across the bottom of each inlet duct it can be seen that, this opening provides for the noble gas effective absorption in locking device 100, for circulation continuously with filter.The circulation continuously of the noble gas of each embodiment of gas confinement assembly and filtration provide the environment substantially without granule in each embodiment for keeping gas confinement component system.Each embodiment of gas confinement component system may remain in 4 grades of ISO14644 for particulate matter.Each embodiment of gas confinement component system is positively retained at 3 grades of specifications of ISO14644 for the process that particle contamination is especially sensitive.As it was noted above, pipe I provides the inert gas outlet to extraneous gas cleaning system, and the purification noble gas that pipe II provides to the filtration within gas confinement assembly 100 and closed circuit returns.

In each embodiment of the gas confinement assembly instructed according to this and system, the Shu Keyu of cable, line and pipeline etc. is arranged on the electrical system in gas confinement assembly and internal system, mechanical system, fluid system and cooling system and is operably associated, such as the operation of OLED print system.This bundle can be fed through pipeline, in order to the reactive ambient gas in the dead band of the bundle that purging is trapped in cable, line and pipeline etc., such as steam and oxygen.According to this teaching, it has been found that the dead band formed in the bundle of cable, line and pipeline forms the reservoir of retained reactive materials, it can extend significantly so that gas confinement assembly meets the time needed for performing the specification of air-sensitive process.Gas confinement assembly and each embodiment of system for this teaching for printing OLED device, various reactive materials (include various reactive ambient gas, such as steam and oxygen, and organic solvent steam) in every kind of material be all positively retained at such as 100ppm or lower, 10ppm or lower, 1.0ppm or lower or 0.1ppm or lower.

The time that how can cause minimizing needed for the reactive ambient gas that the dead volume purging of the cable that ties in, line and pipeline etc. retains to be understood by the cable of pipeline to feed, with reference to Figure 18 A-19.Figure 18 A shows the enlarged drawing of bundle I, and bundle I can be the bundle that can include pipeline, such as, for various ink, solvent etc. flow to the pipeline A of the print system of the print system 50 of such as Figure 13.The bundle I of Figure 18 A may also include electric wire or the cable of such as coaxial cable C of such as electric wire B.Route to internal to be connected to include various devices and the equipment of OLED print system together with this pipeline, line can tie in cable and from outside.In the shadow region of Figure 18 A it can be seen that this bundle can form substantial amounts of dead band D.In the perspective schematic view of Figure 18 B, when cable, line and bale of pipeline I are fed through pipeline II, noble gas III can continuously sweep bundle.The amplification sectional view of Figure 19 shows that continuously sweeping the noble gas of the pipeline that ties in, line and cable can the most effectively increase the dead volume formed from this bundle and remove the speed of the reactive materials retained.The reactive species concentrations of diffusion rate and dead volume outer (overall area by being occupied by inert gas species B represents in Figure 19) that reactive materials A leaves dead volume (overall area by being occupied represents in Figure 19) by substance A is inversely proportional to.That is, if in the just volume outside dead volume, the concentration of reactive materials is high, then diffusion rate reduces.If the reactive species concentrations in this region reduces (by the flowing stream of noble gas, then pass through mass action) continuously from the just volume dead volume space, then the speed that reactive materials spreads from dead volume increases.Additionally, by same principle, noble gas is diffusible in dead volume, because the reactive materials retained is removed from these spaces effectively.

Figure 20 A is the perspective view of the back angle of each embodiment of gas confinement assembly 600, and wherein imaginary drawing enters the inside of gas confinement assembly 600 through return duct 605.For each embodiment of gas confinement assembly 600, rear wall panel 640 can have insertion panel 610, inserts panel 610 and is configured to provide at the path in such as electrically next door.The bundle of cable, line and pipeline etc. can be fed through next door and enter cable wiring conduit, the such as pipeline 632 shown in right side wall panel 630, to this end, the bundle routing in the first cable, line and bale of pipeline conduit entrance 636 with exposure dismantled by removably insertable panel.From here, described bundle can be fed to the inside of gas confinement assembly 600, and is illustrated by the return duct 605 in the inside of gas confinement assembly 600 in imaginary drawing.Each embodiment for the gas confinement assembly of cable, line and bale of pipeline wiring can have more than one cable, line and bale of pipeline import, as shown in Figure 20 A, it illustrates the first bundle conduit entrance 634 and the second bundle conduit entrance 636 restrainted for another.Figure 20 B shows the enlarged drawing of the bundle conduit entrance 634 for cable, line and bale of pipeline.Bundle conduit entrance 634 can have features designed to and slide cover cap 633 formed seal opening 631.In various embodiments, opening 631 can accommodate the flexible sealing module sealed for cable entries such as provided by RoxtecCompany, and it can accommodate the cable of various diameters, line and pipeline etc. in bundle.Alternatively, the top 635 of slip cover cap 633 and the upper part 637 of opening 631 can have the compliant materials arranged on each surface, thus compliant materials can form sealing around the cable of various sizes diameter, line and the pipeline etc. in the bundle being fed through the such as import of bundle conduit entrance 634.

Figure 21 is the upward view of each embodiment of the ceiling panel of this teaching, the gas confinement assembly of the most such as Fig. 3 and the ceiling panel 250' of system 100.According to each embodiment of this teaching for assembling gas lock, illuminator may be installed in the inside top surface of ceiling panel (the gas confinement assembly of such as Fig. 3 and the ceiling panel 250' of system 100).As shown in figure 21, illuminator can be arranged on the interior section of each framing component by the top board framework 250 with interior section 251.Such as, top board framework 250 can have two top board framework sections 40, and top board framework section 40 has two top board Vierendeel girders 42 and 44 jointly.Each top board framework section 40 can have the first side 41 towards top board framework 250 positioned internal and the second side 43 towards the outside location of top board framework 250.For providing each embodiment instructed according to this of illumination for gas lock, illumination component 46 can be installed right.Every pair of illumination component 46 can include the second illumination component 47 of the first illumination component 45 near the first side 41 and the second side 43 near top board framework section 40.The quantity of the illumination component shown in Figure 21, to position and be grouped be exemplary.The quantity of illumination component and packet can be with any desired or suitable method changes.In various embodiments, illumination component can flatly be installed, and in other embodiments, may be assembled so that they are movable to each position and angle.The setting of illumination component is not limited to top panel top board 433, but in addition or in an alternative embodiment can be located in the gas confinement assembly shown in Fig. 3 and other inner surface any of system 100, outer surface and surface combination.

Various illumination components can include the lamp of any quantity, type or combination, such as halogen light modulation, white lamp, electric filament lamp, arc light or light emitting diode or device (LED).Such as, each illumination component can include 1 LED to about 100 LED, about 10 LED to about 50 LED, or more than 100 LED.LED or other illuminator can send in chromatograph, chromatograph is outer or any color of a combination thereof or color combination.Each embodiment according to the gas confinement assembly for inkjet printing OLED material, because the photaesthesia that some materials are to some wavelength, thus the optical wavelength being arranged on the illuminator in gas confinement assembly can be specifically chosen, to avoid material degradation during processing.Such as, 4X cool white LED can be used, it is possible to use 4X yellow led or its any combination.The example of 4X cool white LED is the LF1B-D4S-2THWW4 that can obtain from IDECCorporation (Sunnyvale, California).The example of spendable 4X yellow led is the LF1B-D4S-2SHY6 that also can obtain from IDECCorporation.LED or other illumination component can any location positioning from the interior section 251 of top board framework 250 or on another surface of gas confinement assembly or suspensions.Illumination component is not limited to LED.Any suitable illumination component or the combination of illumination component can be used.Figure 22 is the curve chart of IDECLED spectrum, and shows the x-axis corresponding with intensity when peak strength is 100% and the y-axis corresponding with wavelength (unit: nanometer).Show LF1B yellow type, yellow fluorescence lamp, LF1B white type LED, LF1B cool white type LED and the frequency spectrum of LF1B redness type LED.Each embodiment instructed according to this, can use other spectrum and spectral combination.

Recall, each embodiment of gas confinement assembly by minimize gas confinement assembly internal capacity and simultaneously Optimization Work space to build in the way of accommodating the various occupied areas of various OLED print systems.Each embodiment of the gas confinement assembly so built also is prone to the inside of gas confinement assembly accessible from the outside and easily accessible inside to safeguard during processing, and minimizes downtime simultaneously.In this respect, each embodiment according to this gas confinement assembly instructed can be wide about the various occupied area fixed wheels of various OLED print systems.

Those of ordinary skill is appreciated that, the gas confinement assembly that present teaching can be readily applied to there is various sizes and design for the structure of framing component structure, panel structure, framework and panel sealing and gas confinement assembly (such as, the gas confinement assembly 100 of Fig. 3).Such as but not limited to, each embodiment of the fixed wheel exterior feature gas confinement assembly containing this teaching from substrate size Gen3.5 to Gen10 can have at about 6m³To about 95m³Between internal capacity, and can for uncertain profile and have suitable nominal dimension locking device save volume between about 30% to about 70%.Each embodiment of gas confinement assembly can make each framing component be built into and provide the profile for gas confinement assembly, so that accommodate OLED print system for its function and simultaneously Optimization Work space to minimize noble gas volume, and also allow for during processing, be easy to OLED print system accessible from the outside.In this respect, each gas confinement assembly of this teaching can change in terms of profile pattern and volume.

Figure 23 provides the example according to this gas confinement assembly instructed.Gas confinement assembly 1000 can include forward frame assembly 1100, central frame assembly 1200 and rear frame assembly 1300.Forward frame assembly 1100 can include front base framework 1120, front walls framework 1140 and anterior top board framework 1160, and front walls framework 1140 can have the opening 1142 for receiving substrate.Central frame assembly 1200 can include the first middle closed frame assembly 1240, midfeather and top board frame assembly 1260 and the second middle closed frame assembly 1280.Rear frame assembly 1300 can include rear base framework 1320, rear wall framework 1340 and rear portion top board framework 1360.Region shown in shade shows the available work volume of gas component 1000, and it is the volume that can be used for accommodating OLED print system.Each embodiment fixed wheel exterior feature of gas confinement assembly 1000 is for minimizing operation air-sensitive process (such as, OLED print procedure) needed for the volume of recirculation noble gas, and allow easily accessible OLED print system (the most remotely or directly by can easily disassembled panel have easy access to) simultaneously.For containing each embodiment of the gas confinement assembly of this teaching of substrate size Gen3.5 to Gen10, can have at about 6m according to each embodiment of this fixed wheel exterior feature gas confinement assembly instructed³To about 95m³Between gas confinement volume, and such as but not limited at about 15m³To about 30m³Between, for the OLED of such as Gen5.5 to Gen8.5 substrate size prints, this is probably useful.

Gas confinement assembly 1000 can have in this teaching for all features described in example gases closed component 100.Such as but not limited to, gas confinement assembly 1000 can use the sealing instructed according to this, to provide through building and the gas-tight seal locking device of destructing circulation.Each embodiment of gas confinement system based on gas confinement assembly 1000 can have gas purge system, various reactive materials (can be included various reactive ambient gas by it, such as steam and oxygen, and organic solvent steam) every kind of levels of substance be maintained at such as 100ppm or lower, 10ppm or lower, 1.0ppm or lower or 0.1ppm or lower.

Additionally, each embodiment of gas confinement assembly based on gas confinement assembly 1000 and system can have circulation and filtration system, its can provide meet ISO14644 3 grades and 4 grades clean room standards without particle environments.In addition, as the most described in more detail, based on this gas confinement assembly instructed (such as, gas confinement assembly 100 and gas closed component 1000) gas confinement component system can have each embodiment of pressurized inert gas recirculating system, it can be used for operating such as but not limited to one or more in following: pneumatic robot, substrate suspending bench, air bearing, air lining, compressed gas instrument, pneumatic actuator, and combinations thereof.The gas lock instructed for this and each embodiment of system, use various pneumatically-operated device and equipment can provide low particles generation performance and low-maintenance.

Figure 24 is the exploded view according to this gas confinement assembly 1000 instructed, it is shown that can build to provide each framing component of gas-tight seal gas lock.Hereinbefore for as described in each embodiment of the gas lock 100 of Fig. 3 and Figure 13, OLED ink-jet print system 1050 can include allowing ink droplet reliable arrangement is being shown the substrate (such as substrate 1058) supported by substrate suspending bench 1054 if going up equipment for drying and the equipment of ad-hoc location.Substrate suspending bench 1054 can be used for supporting substrate 1058, and provides the nothing friction conveying for substrate 1058.The substrate suspending bench 1054 of OLED print system can limit substrate 1058 and may move through the stroke of system 1000 during the OLED of substrate prints.Providing all parts that may make up OLED print system 1050, each embodiment of OLED print system 1050 can have various occupied area and form factor.According to each embodiment of OLED ink-jet print system, various baseplate materials can be used for substrate 1058, such as but not limited to various glass substrate materials and various polymer substrate material.

Each embodiment according to this gas confinement assembly instructed, as described previously for described in gas lock 100, the structure of gas confinement assembly can be carried out around whole OLED print system, to minimize the volume of gas confinement assembly and to be set to easily accessible inside.In fig. 24, the example that fixed wheel is wide is it is contemplated that OLED print system 1050 is given.

As shown in figure 24, OLED print system 1050 can exist six isolators: the first isolator group 1051 (the second isolator in this group on the opposite sides is not shown) and the second isolator 1053 groups (the second isolator in this group on the opposite sides is not shown), it supports the substrate suspending bench 1054 of OLED print system 1050.Suspending bench 1054 is supported on suspending bench base portion 1052.Except invisible in Figure 24 and with two isolators of the first isolator 1051 and the second isolator 1053 relative localization in addition to, exist support OLED print system base portion 1070 two isolators in groups.Closed front base portion 1120 can have the first closed front isolator bearing 1121 supporting the first closed front isolator wall framework 1123.Second closed front isolator wall framework 1127 is supported by the second closed front isolator bearing (not shown).Similarly, centre sealed end region 1220 can have the first middle closing isolator bearing 1221 supporting the first middle closing isolator wall framework 1223.Close isolator wall framework 1227 in the middle of second and close the support of isolator bearing (not shown) in the middle of second.Finally, rear closure base portion 1320 can have the first rear closure isolator bearing 1321 supporting the middle closing in rear portion isolator wall framework 1323.Second rear closure isolator wall framework 1327 is supported by the second rear closure isolator bearing (not shown).Each embodiment of isolator wall framing component fixed wheel exterior feature around each isolator, thus minimize the volume around each isolator supporting member.Additionally, be demountable detachable panel for the shade panel section shown in each isolator wall framework of base portion 1120,1220 and 1320, such as to keep in repair isolator.Closed front assembly base portion 1120 can have dish 1122, and middle closed component base portion 1220 can have dish 1222, and rear closure assembly base portion 1320 can have dish 1322.When base portion builds completely to form adjacent base portion, in the way of being similar to be arranged on the dish 204 of Figure 13 OLED print system 50, OLED print system can be arranged on the adjacent dish being consequently formed.As it was noted above, then the most following wall and top board framing component can be combined around OLED print system 1050: the wall framework 1140 of forward frame assembly 1100, top board framework 1160；First middle closed frame assembly 1240 of central frame assembly 1200, midfeather and top board frame assembly 1260 and the second middle closed frame assembly 1280'；And the wall framework 1340 of rear frame assembly 1300 and top board framework 1360.Thus, each embodiment of the gas-tight seal fixed wheel exterior feature framing component assembly of this teaching effectively reduces the noble gas volume in gas confinement assembly 1000, and is set to each device and the equipment of easily accessible OLED print system simultaneously.

Additionally, each embodiment of the gas confinement assembly of this teaching can build in the way of providing the framing component assembly section worked individually.Recalling, with reference to Fig. 5, the gas confinement assembly instructed according to this and the framing component assembly of each embodiment of system can include the framing component with each panel being sealably mounted on framing component.Such as but not limited to, wall framing component assembly or Wall board assembly can be the wall framing components of each panel including being sealably mounted on wall framing component.Therefore, the various panel assemblies built completely, such as but not limited to Wall board assembly, ceiling panel assembly, wall and ceiling panel assembly, base portion supports panel assembly etc., are various types of framing component assemblies.The modular nature of each embodiment of the gas confinement assembly of this teaching can provide for the embodiment with the gas confinement assembly of various framing component assembly section, and the most each framing component assembly section is a part for the total measurement (volume) of gas confinement assembly.The various framing component assembly sections of each embodiment constituting gas confinement assembly can have at least one common framing component.For each embodiment of gas confinement assembly, the various framing component assembly sections constituting gas confinement assembly can have at least one common framing component assembly.The various framing component assembly sections of each embodiment constituting gas confinement assembly can have at least one common framing component and the combination of a framing component assembly.

According to this teaching, various framing component assembly sections can be by being separated into section such as but not limited to the closing of the opening common for each framing component assembly section or passage or a combination thereof.Such as, in various embodiments, framing component assembly section can be effectively sealing off opening or passage or a combination thereof by covering the opening in the framing component common for each framing component assembly section or framing component panel or passage or a combination thereof and separate.In various embodiments, framing component assembly section can be effectively sealing off opening or passage or a combination thereof by sealing the opening common for each framing component assembly section or passage or a combination thereof and separate.Sealably closing opening or passage or a combination thereof may result in the separation of the fluid communication between each volume interrupting each framing component assembly section, and the most each volume is included in a part for the total measurement (volume) in gas confinement assembly.Sealably close opening or therefore passage can isolate each volume being included in each framing component assembly section.

Therefore, with reference to Figure 24, base portion 1070 can have and limits the first end 1072 of width and the second end 1074 and limit the first side 1076 and the second side 1078 of length.First indulges corbel 1075 and second indulges corbel 1077 and can be perpendicular to base portion 1070 and be arranged on base portion 1070, and bridge 1079 is arranged on first and indulges corbel 1075 and second and indulge on corbel 1077.Each embodiment for OLED print system 1050, bridge 1079 can support the first print head assembly alignment system 1090 and the second print head assembly alignment system 1091, and its X-Z axle being respectively used to control the first print head assembly 1080 and the second print head assembly 1081 above substrate suspending bench 1054 moves.Although Figure 24 shows two alignment systems and two print head assemblies, but for each embodiment of OLED print system 1050, can there is single alignment system and single print head assembly.In addition, each embodiment for OLED print system 1050, single print head assembly can be there is, such as, any one in the first print head assembly 1080 being arranged in alignment system and the second print head assembly 1081, and for checking that the camera system of the feature of substrate 1058 may be installed the second alignment system.According to each embodiment of gas confinement assembly 1000, head maintenance system can be installed near print head assembly, such as but not limited to, on first upper surface 1071 and the second upper surface 1073 of base portion 1070.

Additionally, with reference to Figure 24, panel may be installed on the first framing component 1224 and second framing component 1226 of base portion 1220, and can consolidate pad on each panel.Pad can be used for each passage being enclosed between panel and base portion 1070.Additionally, bridge framework 1144 can support central frame assembly 1200, and provide the framework for supporting each embodiment inserting framework.Insert each embodiment inserting framework in bridge framework 1144 and can have the opening allowing print head assembly to advance, and also can support the gate and valve assembly for closing the opening allowing print head assembly to advance.By the passage around sealably sealed end region, and sealably close the opening allowing print head assembly to advance, central frame assembly 1200 volume substantially limited around the bridge 1079 being arranged on base portion 1070 can be isolated with the remainder volume of gas confinement assembly 1000.

The example of use of the individual section separating gas lock can be that print head assembly (such as, the first print head assembly 1080 and the second print head assembly 1081 of print system 1050) is performed various maintenance program.This maintenance program can include, but not limited to, e.g. the printhead changed in print head assembly, leads to atmospheric environment without making gas confinement assembly.In addition, due to can be completely isolated with the residual volume of gas confinement assembly 1000 around the partial volume that the bridge 1079 being arranged on base portion 1070 substantially limits by central frame assembly 1200, this partial volume can lead to surrounding material, such as but not limited to steam and oxygen, and the not bigger volume of the residue of dusty gas closed component.By limiting the volume that can be exposed to surrounding material, system recovery can complete within the most shorter time.Those of ordinary skill in the art it will be appreciated that, although the example that print head assembly is safeguarded provides by way of example, however it is necessary that the various processes of gas confinement assembly can readily use its middle part and can be separated discretely to provide the gas confinement assembly of the framing component assembly section worked individually, at least one of which section can have the notable less partial volume of total locking device volume.

Figure 25 shows the partial exploded perspective view of each embodiment of the gas confinement assembly 1000 according to Figure 23 and Figure 24.In fig. 25, show each intact panel assembly, this panel assembly can separate to limit the first framing component assembly section and the second framing component assembly section in every way, first framing component assembly section limits the first volume, and the second framing component assembly section limits the second volume.

Such as but not limited to, in fig. 25, gas confinement assembly 1000 can include front panel assembly 1100', centre panel assembly 1200' and front panel assembly 1300'.Front panel assembly 1100' can include anterior ceiling panel assembly 1160', front walls panel assembly 1140' and front base panel assembly 1120', and rear portion panel assembly 1300' can include rear portion ceiling panel assembly 1360', rear wall panel assembly 1340' and rear base panel assembly 1320'.Can be seen that in the exploded view of Figure 24, for forward frame assembly 1100 and centre panel framework 1200, the front panel assembly 1100' and centre panel assembly 1200' of Figure 25 have common bridge framework 1144.Centre panel assembly 1200' can have the first middle closure panel assembly 1240', midfeather and ceiling panel assembly 1260' and the second middle closure panel assembly 1280', it can cover base portion 1070 when being sealably mounted on central base portion panel assembly 1220', indulges corbel 1075 and second including the first of mounting bridge 1079 thereon and indulges corbel 1077.As it was noted above, bridge 1079 can support the first print head assembly alignment system 1090, it can control the print head assembly 1080 movement (seeing Figure 24) above substrate suspending bench 1054.Can include the first X-axis balladeur train (carriage) 1092 and the first Z axis movable plate 1094 for print head assembly 1080 is positioned at the first print head assembly alignment system 1090 (seeing Figure 24) above substrate suspending bench 1054, the first print head assembly 1080 may be installed on the first Z axis movable plate 1094.Second print head assembly alignment system 1091 can move by the similarly configured X-Z axle (seeing Figure 24) above substrate suspending bench 1054 to control the second print head assembly 1081.

Figure 26 shows the decomposed side perspective view of gas confinement assembly 1000, and it includes front panel assembly 1100' and centre panel assembly 1200' and each section of front panel assembly 1300'.Front panel assembly 1100' can include inserting framework 1146 wherein, it can be seen that inserting framework 1146 and be arranged in bridge framework 1144, bridge framework 1144 is the framing component that front panel assembly 1100' and centre panel assembly 1200' is common.Insert framework 1146 and can include opening 1148, pad 1147 can be consolidated around opening 1148.Inserting above framework 1146, it is shown that gate and valve assembly 1150.Gate and valve assembly 1150 may be installed above insertion framework 1146.Figure 27 A and Figure 27 B can be seen that, gate and valve assembly 1150 can have door 1158, it is installed to Y-Z alignment system via the first balladeur train 1153 and the second balladeur train 1154, for door 1158 mobile above the opening 1148 inserting framework 1146, and engage door 1158 sealably to cover opening 1148.In Figure 27 A, the alignment system including the first track 1151 and the second track 1152 can be respectively provided with the first balladeur train 1153 and the second balladeur train 1154 that can engage with guide rail guidance system.It will be recognized by one of ordinary skill in the art that guide rail guidance system can include such as, such as but not limited to the parts of guide rail, bearing and actuator, move and the movement of therefore door 1158 for controlling alignment system.In Figure 27 A, pad 1147 is shown around opening 1148.Pad 1147 can be described previously for any gasket material described in seal frame component assembly.In Figure 27 A, door 1158 retraction, thus print head assembly 1080 and 1081 can be passed through in opening 1148 expert and then movement (seeing Figure 24 and Figure 25) by the first print head assembly alignment system 1090 above suspending bench 1054 and the second print head assembly alignment system 1091 respectively.In Figure 27 B, door 1158 is shown as covering opening 1148.The first balladeur train 1153 of being installed to including door 1158 and the second balladeur train 1154 alignment system can door 1158 be positioned at above opening 1148, in order to sealably joint sheet 1147, thus sealably close opening 1148.

Figure 28 shows the sectional view through the central base portion panel assembly 1220' relevant with front panel assembly 1100' and front panel assembly 1300'.As shown in figure 28, passage 1225 can be located at around base portion 1070；Wherein base portion 1070 extends through the first framing component 1224.In framing component 1224, the panel providing framing component of such as panel 1228 can be sealably mounted in framing component 1224.It is envisaged that, it is provided that the various pads of mechanical seal can be used for sealing passage 1225.In various embodiments, the inflatable pad for sealing passage 1225 can be used.Each embodiment of inflatable pad can be made for hollow molded structure by strengthening elastomeric material, and this structure can be at spill, accordion or planar configuration when not inflating.In various embodiments, pad may be installed on panel 1228 for the passage 1225 around sealably sealed end region 1070.Therefore, when any one inflation in using such as but not limited to the multiple suitable fluid media (medium) of noble gas, each embodiment of the inflatable pad of the passage 1225 around sealably sealed end region 1070 can form tight barrier installing of the inner surface of such as panel 1228 between surface and shock (striking) surface on the such as surface of base portion 1070.In various embodiments, inflatable pad may be installed on base portion 1070, for the passage 1225 around sealably sealed end region 1070 so that base portion 1070 can be to install surface, and the inner surface of panel 1228 can be impact surface.In this respect, complying with sealing member can sealably closed channel 1225.

In addition to each embodiment of inflatable pad, it is possible to use the flexible seals of such as bellows seal or lip seal member seals passage 1225, this sealing member permanently attaches, and such as, is attached to panel 1228 and base portion 1070.The sealing member of this permanent attachment can provide the pliability needed for the various translations of base portion 1070 and vibration movement, and provide gas-tight seal for passage 1225 simultaneously.

One skilled in the art will appreciate that complying with sealing member in the perimeter formation clearly limited is probably problematic.Illustrating wherein in each embodiment of the gas lock of the such as sealing of the structure of base portion 1070, this structure may be produced that the edge clearly limited eliminated at expectation sealing.In each embodiment of the print system 1050 of Figure 24, base portion 1070 can initially be manufactured into the lateral edges of the rounding with base portion 1070 to promote to seal, as by shown in the hacures 1070-1A of the first side 1076 and the hacures 1070-1B of the second side 1078.In each embodiment of the print system 1050 of Figure 24, base portion 1070 can be modified to have subsequently installs the structure that the lateral edges of the rounding for providing base portion 1070 seals with promotion, as by shown in the hatched structure 1070-2A of the first side 1076 and the hatched structure 1070-2B of the second side 1078.Base portion 1070 can be made up of the material of the stability that can provide for needed for supporting print system, such as but not limited to, granite and steel.This material can be easily modified to as shown in Figure 28.Although being given in central base portion panel assembly 1220' using the example of the passage 1225 around pad sealed end region 1070, but it will be appreciated by the skilled addressee that (seeing Figure 24) around the base portion 1070 of the frame assembly 1226 crossing over base component 1220' is closed can use same principle to carry out.

As it was noted above, the maintenance of print head assembly can include various demarcation and maintenance program.Such as, for the printing of OLED display panel substrate, the first print head assembly 1080 of each print head assembly, such as Figure 24 and the second print head assembly 1081 can have the multiple printheads being arranged at least one head device.In various embodiments, head device can include, but not limited to, e.g. the fluid with at least one printhead and electronics is connected；Each printhead has can be with controllable rate, speed and multiple nozzles of size ink-jet or aperture.First print head assembly 1080 and each embodiment of the second print head assembly 1081 for Figure 24, each print head assembly may be included in the head device between about 1 to about 60, and the most each head device can have the printhead between about 1 to about 30 in each head device.Printhead, such as industrial inkjet head, can have the nozzle between about 16 to about 2048, and it can discharge the droplet volume between about 0.1pL to about 200pL.Demarcate printhead can include, but not limited to, e.g.: check that nozzle starts (firing)；Measure droplet volume, speed and direction；And adjustment printhead, thus each nozzle sprays the ink droplet of uniform volume.Safeguarding that printhead can include, but not limited to, e.g. such as printhead perfusion, remove unnecessary ink and the program of printhead replacing after perfusion program, printhead perfusion needs the ink collected and accommodate from printhead discharge.In print procedure, such as, for the printing of OLED display panel substrate, nozzle reliable starts for guaranteeing that print procedure can manufacture the oled panel display of high-quality most important.Therefore, the various programs being associated with head maintenance are necessary to easily and reliably to implement；Especially need not the inside of gas confinement assembly is exposed to various reactive ingredients, such as but not limited to from the oxygen of atmospheric environment and steam and such as but not limited to the organic solvent steam from print procedure.

In this respect, for each embodiment of the gas confinement assembly of Figure 24, maintenance system may be mounted to such as but not limited to the first print head assembly 1080 on the top surface 1071 of base portion 1070 and the second print head assembly 1081 on the top surface 1073 of base portion 1070.The purging station of the ink that this maintenance system can include, but not limited to, e.g. the ink droplet calibration station for performing various printhead calibrating procedure, discharge from printhead during collecting and being contained in purging or perfusion program and for having removed unnecessary black blotting station afterwards at purging station at purging or perfusion program.During regular maintenance, this program can be carried out with fully automated pattern.May indicate that a certain degree of manual intervention during maintenance program in some cases, terminal use is close to carrying out in outside by such as using glove port.As it was noted above, each embodiment of the gas confinement assembly 1000 of Figure 23-28 reduces the volume of noble gas required during OLED print processing effectively, and it is set to the inside of easily accessible gas lock simultaneously.

In addition, if head maintenance needs any one being immediately adjacent in print head assembly or various all-in-service station, sealably close the door 1158 (for as described in Figure 27 A and Figure 27 B) on opening 1148 and sealably passage (for as described in Figure 28) around sealed end region 1070 residual volume of volume and the gas confinement assembly 1000 limited by the isolated part of the framing component assembly section and central base portion panel assembly 1220' that include centre panel assembly 1200' can be isolated.In addition, it will be appreciated by the skilled addressee that sealably close the door 1158 (for as described in Figure 27 A, Figure 27 B and Figure 28) on opening 1148 and sealably passage (for as described in Figure 28) around sealed end region 1070 can remotely and automatically carry out.For each embodiment of gas confinement assembly 1000, the partial volume for this this insulation volume safeguarding framing component assembly section may be less than or equal to about the 20% of the total measurement (volume) of each embodiment of the wide gas confinement assembly of fixed wheel.For each embodiment of gas confinement assembly 1000, the partial volume for this this insulation volume safeguarding framing component assembly section may be less than or equal to about the 50% of the total measurement (volume) of each embodiment of fixed wheel exterior feature gas confinement assembly.By being substantially reduced the part needing gas confinement assembly that terminal use is immediately adjacent to carry out head maintenance, system recovery time can be substantially reduced.

Figure 29 shows the perspective view of the gas confinement assembly 1010 of each embodiment according to this gas confinement assembly instructed.Gas confinement assembly 1010 can include front panel assembly 1100', centre panel assembly 1200' and front panel assembly 1300'.Front panel assembly 1100' can include that anterior ceiling panel assembly 1160', front walls panel assembly 1140' and front base panel assembly 1120', front walls panel assembly 1140' can have the opening 1142 for receiving substrate.Front panel assembly 1300' can include rear portion ceiling panel assembly 1360', rear wall panel assembly 1340' and rear base panel assembly 1320'.Centre panel assembly 1200' can include the first middle closure panel assembly 1240', midfeather and ceiling panel assembly 1260' and the second middle closure panel assembly 1280' and central base portion panel assembly 1220'.Additionally, centre panel assembly 1200' can include safeguarding in the middle of first safeguards system panel assembly (not shown) in the middle of system panel assembly 1230' and second.

Figure 30 shows the decomposition diagram of the gas lock 1010 of each embodiment according to this gas confinement assembly instructed.Gas confinement assembly 1010 can accommodate OLED print system 1050, and it can include the substrate suspending bench 1054 supported by substrate suspending bench base portion 1052.Substrate suspending bench base portion 1052 may be installed on base portion 1070.The substrate suspending bench 1054 of OLED print system can support substrate 1058, and restriction substrate 1058 may move through the stroke of system 1010 during the OLED of substrate prints.Substrate suspending bench 1054 can provide carrying without friction of substrate 1058.Gas confinement assembly 1010 for Figure 30, OLED print system 1050 can exist four isolators: the first isolator group 1051 (on the opposite sides second not shown) and the second isolator group 1053 (on the opposite sides second not shown), it supports the substrate suspending bench 1054 of OLED print system 1050.Base portion 1070 can include that first indulges corbel 1075 and second and indulge corbel 1077, and bridge 1079 is arranged on first and indulges corbel 1075 and second and indulge on corbel 1077.For each embodiment of OLED print system 1050, bridge 1079 can support the first print head assembly alignment system 1090 and the second alignment system 1091, and it can control the first print head assembly 1080 and movement of the second print head assembly 1081 respectively.For each embodiment of OLED print system 1050, single alignment system and single print head assembly can be there is.Each embodiment for OLED print system 1050, single print head assembly can be there is, such as, any one in the first print head assembly 1080 and the second print head assembly 1081, and for checking that the camera system of the feature of substrate 1058 may be installed the second alignment system.

Can include the first X-axis balladeur train 1092 and the first Z axis movable plate 1094 for the first print head assembly 1080 is positioned at the first print head assembly alignment system 1090 above substrate suspending bench 1054, the first print head assembly locking device 1084 may be installed on the first Z axis movable plate 1094.Second print head assembly alignment system 1091 can be similarly configured to control to include that the X-Z axle of the second print head assembly 1081 of the second print head assembly locking device 1085 moves.As in Figure 30 for shown in the first print head assembly 1080, wherein the first print head assembly locking device 1084 illustrates with partial view, and each embodiment of print head assembly can have multiple head devices 1082 installed therein.For each embodiment of print system 1050, print head assembly may be included in the head device between about 1 to about 60, and the most each head device can have the printhead between about 1 to about 30 in each head device.As described in greater detail below, the given head device needing to safeguard continuously and the accurate quantity of printhead, it can be seen that first safeguards that system component 1250 is positioned to provide easy access to the first print head assembly 1080.

As shown in Figure 30, gas confinement assembly 1010 can include front base panel assembly 1120', central base portion panel assembly 1220' and rear base panel assembly 1320', it forms adjacent base portion when building completely, to be similar in the way of OLED print system 50 is arranged on the dish 204 of Figure 13, on this adjacent base portion, OLED print system 1050 may be installed on the adjacent dish being consequently formed.First isolator group 1051 and the second isolator group may be installed in each corresponding isolator wall (well) panel, such as, and the first isolator wall panel 1225' and the second isolator wall panel 1227' of central base portion panel assembly 1220'.In the way of similar with the structure description of the gas confinement assembly 100 for Fig. 3, constitute front panel assembly 1100', centre panel assembly 1200' and each framing component of front panel assembly 1300' and then panel can combine to be formed each embodiment of gas confinement assembly 1050 around OLED print system 1050.

For the gas confinement assembly 1010 of Figure 30, central base portion assembly 1220' can include that safeguarding in the middle of first that system panel assembly 1230' and second is middle safeguards system panel assembly 1270'.Safeguard in the middle of first and safeguard, in the middle of system panel assembly 1230' and second, the first print head assembly opening 1242 and second print head assembly opening 1282 of the second floor board assembly 1281' that system panel assembly 1270' can include the first floor board assembly 1241' respectively.First floor board assembly 1241' figure 30 illustrates the part of the first middle closure panel assembly 1240' into centre panel assembly 1200'.First floor board assembly 1241' is to safeguard the common panel assembly of system panel assembly 1230' in the middle of the first middle closure panel assembly 1240' and first.Second floor board assembly 1281' figure 30 illustrates the part of the second middle closure panel assembly 1280' into centre panel assembly 1200'.Second floor board assembly 1281' is to safeguard the common panel assembly of system panel assembly 1270' in the middle of the second middle closure panel assembly 1280' and second.

As it was noted above, the first print head assembly 1080 may be housed in the first print head assembly locking device 1084, and the second print head assembly 1081 may be housed in the second print head assembly locking device 1085.As described in greater detail below, first print head assembly locking device 1084 and the second print head assembly locking device 1085 can have the opening in bottom, this opening can have edge (not shown), thus various print head assembly can be positioned for printing during print processing.Additionally, the part that the first print head assembly locking device 1084 and the second print head assembly locking device 1085 form housing can build as described previously for described in various panel assemblies, thus frame assembly component and panel can provide hermetic closed device.Sealant compressible shim can be fixedly arranged at around each in the first print head assembly opening 1242 and the second print head assembly opening 1282, or at the first print head assembly locking device 1084 and perimeter of the second print head assembly locking device 1085.As shown in Figure 30, the first print head assembly docking pad 1245 and the second print head assembly docking pad 1285 can consolidate around the first print head assembly opening 1242 and the second print head assembly opening 1282 respectively.First print head assembly locking device 1084 and the second print head assembly locking device 1085 can be safeguarded that system panel assembly 1270' docks with safeguarding in the middle of first in the middle of system panel assembly 1230' and second by the first print head assembly alignment system 1090 and the second print head assembly alignment system 1091 respectively.For various head maintenance programs, docking may be included in print head assembly locking device and safeguard in system panel assembly each between form gasket seal.When with the first centre, the first print head assembly locking device 1084 and the second print head assembly locking device 1085 safeguard that system panel assembly 1230' and second centre safeguards that system panel assembly 1270' docks sealably to close the first print head assembly opening 1242 and the second print head assembly opening 1282, the combinative structure being thusly-formed is gas-tight seal.

During various head maintenance programs, the first print head assembly 1080 and the second print head assembly 1081 can be respectively positioned at above the second print head assembly opening 1282 of the first print head assembly opening 1242 and the second floor board assembly 1281' of the first floor board assembly 1241' by the first print head assembly alignment system 1090 and the second print head assembly alignment system 1091 respectively.In this respect, for various head maintenance programs, first print head assembly 1080 and the second print head assembly 1081 can be respectively positioned at above the second print head assembly opening 1282 of the first print head assembly opening 1242 and the second floor board assembly 1281' of the first floor board assembly 1241', and do not cover or seal the first print head assembly opening 1242 and the second print head assembly opening 1282.In addition, closing for various head maintenance programs, the first print head assembly opening 1242 and the second print head assembly opening 1282 can will safeguard with in the middle of the second of section, system panel assembly 1230' safeguards that system panel assembly 1270' separates with the residual volume of gas confinement assembly 1010 in the middle of the first of section.For various head maintenance programs, first print head assembly 1080 and the second print head assembly 1081 can be docked on the pad above the first print head assembly opening 1242 and the second print head assembly opening 1282 respectively along Z-direction, thus close the first print head assembly opening 1242 and the second print head assembly opening 1282.According to this teaching, depending on being applied to the first print head assembly locking device 1084 and power of the second print head assembly locking device 1085 in the Z-axis direction, the first print head assembly opening 1242 and the second print head assembly opening 1282 can be capped or seal.In this respect, the residue framing component assembly section isolation that the power of the salable first print head assembly opening 1242 being applied to the first print head assembly locking device 1084 in the Z-axis direction can will safeguard system panel assembly 1230' with constitute gas confinement assembly 1010 in the middle of the first of section.Similarly, the residue framing component assembly section isolation that the power of the salable second print head assembly opening 1282 being applied to the second print head assembly locking device 1085 in the Z-axis direction can will safeguard system panel assembly 1270' with constitute gas confinement assembly 1010 in the middle of the second of section.

It is envisaged that, in each embodiment of gas confinement assembly 1010, such as, may be installed the first middle maintenance such as but not limited to the covering described previously for the gate valve assembly described in Figure 26 and Figure 27 A and 27B to safeguard in system panel assembly 1270' in the middle of system panel assembly 1230' and second.This covering can be respectively used to cover safeguards the second print head assembly opening 1282 safeguarding system panel assembly 1270' in the middle of the first print head assembly opening 1242 and second of system panel assembly 1230' in the middle of first.As described in greater detail below, use such as covering such as but not limited to gate valve assembly to close the first print head assembly opening 1242 and the second print head assembly opening 1282 can allow the first framing component assembly section and the second framing component assembly section isolation, and do not dock print head assembly.In this respect, various maintenance program can be performed, and do not interrupt print procedure.

Figure 30 of gas confinement assembly 1010 shows and safeguards system panel assembly 1230' in the middle of first, and it can include the first rear wall panel assembly 1238'.Similarly, further it is shown that safeguarding system panel assembly 1270' in the middle of second, it can include the second rear wall panel assembly 1278'.Safeguard in the middle of first that the first rear wall panel assembly 1238' of system panel assembly 1230' can be as built for the similar fashion shown in the second rear wall panel assembly 1278'.Safeguarding that the second rear wall panel assembly 1278' of system panel assembly 1270' can be built by the second rear wall frame assembly 1278 in the middle of second, the second rear wall frame assembly 1278 has the second sealing member support panel 1275 being sealably installed to the second rear wall frame assembly 1278.Second sealing member support panel 1275 can have second channel 1265, and it is near the second end (not shown) of base portion 1070.Second sealing member 1267 can be installed to the second sealing member support panel 1275 around second channel 1265.

Figure 31 A-31F is the diagrammatic cross-sectional view of gas confinement assembly 1010, and it also can illustrate safeguards the various aspects safeguarding system panel assembly 1270' in the middle of system panel assembly 1230' and second in the middle of first.It should be appreciated by those skilled in the art that, the symmetry of given print system 1050, it can have the first print head assembly alignment system 1090 and the second print head assembly alignment system 1091 (seeing Figure 30) being respectively used to position the first print head assembly 1080 and the second print head assembly 1081, and the first centre for Figure 31 A-31D safeguards that the teachings below of system panel assembly 1230' can be applicable to the second centre and safeguards system panel assembly 1270'.

Figure 31 A shows the diagrammatic cross-sectional view of gas confinement assembly 1010, it illustrates the first middle maintenance and safeguards system panel assembly 1270' in the middle of system panel assembly 1230' and second.Safeguard that system panel assembly 1230' can accommodate first and safeguard system component 1250 in the middle of the first of Figure 31 A, by first, it can safeguard that system positioning system 1251 positions relative to the first print head assembly opening 1242.First print head assembly opening 1242 is the opening in the first floor board assembly 1241', and the first floor board assembly 1241' is to safeguard system panel assembly 1230' and the first middle panel common for closure panel assembly 1240' in the middle of first.First safeguards that system positioning system 1251 may be installed first and safeguards on system component platform 1253, and first safeguards that system component platform 1253 can be stably installed on base portion 1070 on first end 1072.First safeguards that system component platform 1253 can extend through first passage 1261 from the first end 1072 of base portion 1070 and enter and safeguard system panel assembly 1230' in the middle of first.Similarly, as shown in Figure 31 A, safeguard that system panel assembly 1270' can accommodate second and safeguard system component 1290 in the middle of the second of Figure 31 A, by second, it can safeguard that system positioning system 1291 positions relative to the second print head assembly opening 1282.Second print head assembly opening 1282 is the opening in the first floor board assembly 1281', and the first floor board assembly 1281' is to safeguard system panel assembly 1270' and the second middle panel common for closure panel assembly 1280' in the middle of second.Second safeguards that system positioning system 1291 may be installed second and safeguards on component system platform 1293, and second safeguards that component system platform 1293 can extend through second channel 1265 from the second end 1074 of base portion 1070 and enter and safeguard system panel assembly 1270' in the middle of second.First sealing member 1263 can be arranged on the first outer surface 1237 of the first sealing member support panel 1235 around first passage 1261.Similarly, the second sealing member 1267 can be arranged on the second outer surface 1277 of the second sealing member support panel 1275 around second channel 1265.First sealing member 1263 and the second sealing member 1267 can be inflatable pads, as described previously for described in Figure 28.Each embodiment of first sealing member 1263 and the second sealing member 1267 can be flexible seals, and it is the most attached such as to the first outer surface 1237 and the second outer surface 1277 and be attached to the base portion first end 1072 of base portion 1070 and the second end 1074 of base portion 1070.As it was noted above, flexible seals can be the sealing member of such as bellows seal or lip seal member.The sealing member of this permanent attachment can provide the pliability needed for the various translations of base portion 1070 and vibration movement, and provide gas-tight seal for first passage 1261 and second channel 1265 simultaneously.

Figure 31 B and Figure 31 C illustrates the various openings of the gas confinement assembly 1010 of this teaching and the covering of passage and sealing, and it illustrates that the first print head assembly 1080 is relative to the location safeguarding system panel assembly 1230' in the middle of the first of various maintenance programs.As it was noted above, safeguard the following teaching of system panel assembly 1230' to also apply be applicable in the middle of second for the first centre safeguard system panel assembly 1270'.

In Figure 31 B, the first print head assembly 1080 can include the head device 1082 with at least one printhead, and this printhead includes multiple nozzle or aperture.Head device 1082 may be housed in the first print head assembly locking device 1084, first print head assembly locking device 1084 can have the first print head assembly locking device opening 1086, head device 1082 can position from the first print head assembly locking device opening 1086, thus ink is ejected on the substrate being arranged in the suspending bench 1054 supported by suspending bench support member 1052 by nozzle with controllable rate, speed and size during printing.As it was noted above, the first print head assembly alignment system 1090 can be controlled to the first print head assembly 1080 is positioned at surface to print during print processing.Additionally, as shown in figure 31b, for each embodiment of gas confinement assembly 1010, having the first print head assembly alignment system 1090 that controllable X-Z axle moves can be positioned at the first print head assembly 1080 above the first print head assembly opening 1242.As shown in figure 31b, the first print head assembly opening 1242 of the first floor board assembly 1241' be the first middle closure panel assembly 1240' and first in the middle of safeguard system panel assembly 1230' common.

The first print head assembly locking device 1084 of Figure 31 B can include the first print head assembly locking device edge 1088, its can be with the first print head assembly opening 1242 around the butting surface of the first floor board assembly 1241'.The engageable first print head assembly docking pad 1245 in first print head assembly locking device edge 1088, the first print head assembly docking pad 1245 is shown as consolidating around the first print head assembly opening 1242 in Figure 31 B.Although it will be appreciated by the skilled addressee that the first print head assembly locking device edge 1088 is shown as inwardly stretching out structure, but any one in various edges can be built on the first print head assembly locking device 1084.Although additionally, the first print head assembly docking pad 1245 is shown as being fixedly arranged at around the first print head assembly opening 1242 in Figure 31 B, but ordinarily skilled artisan will understand that, pad 1245 can be bonded to the first print head assembly locking device edge 1088.First print head assembly docking pad 1245 can be as described previously for any gasket material described in seal frame component assembly.In each embodiment of the gas confinement assembly 1010 of Figure 31 B, the first print head assembly docking pad 1245 can be inflatable pad, such as pad 1263.In this respect, the first print head assembly docking pad 1245 can be inflatable pad, as described previously for described in Figure 28.Going out as mentioned above, the first sealing member 1263 can be arranged on the first outer surface 1237 of the first sealing member support panel 1235 around first passage 1261.

As shown in Figure 31 B and Figure 31 C, for the various maintenance programs that can carry out with fully automated pattern, the first print head assembly 1080 can remain positioned in above the first print head assembly opening 1242.In this respect, first print head assembly 1080 can be adjusted by the first print head assembly alignment system 1090 in the Z-axis direction, by head device 1082, the first print head assembly alignment system 1090 is for safeguarding that relative to first system component 1250 is positioned at above the first print head assembly opening 1242.Additionally, first safeguards that system component 1250 can safeguard adjustment on system positioning system 1251 first, for safeguarding that system component 1250 positions relative to head device 1082 by first on Y-X direction.During various maintenance programs, first print head assembly 1080 can be arranged to contact with the first print head assembly docking pad 1245, so that the first print head assembly locking device 1084 to arrange the position covering the first print head assembly opening 1242 (not shown) by being adjusted further in the Z-axis direction by the first print head assembly alignment system 1090.As shown in Figure 31 C, for various maintenance programs, such as but not limited to, need to be immediately adjacent in the middle of first safeguard the maintenance program within system panel assembly 1230', first print head assembly 1080 can dock pad 1245 with the first print head assembly and dock by being adjusted further in the Z-axis direction by the first print head assembly alignment system 1090, to seal the first print head assembly opening 1242.As it was noted above, the first print head assembly docking pad 1245 can be the compressible pad sheet material described in the gas-tight seal as described previously for various framing components or as described previously for the inflatable pad described in Figure 28.Additionally, as shown in Figure 31 C, inflatable pad 1263 can be inflated, thus sealably close first passage 1261.Additionally, the part that the first print head assembly locking device 1084 forms housing can build as described previously for described in various panel assemblies, thus frame assembly component and panel can provide hermetic closed device.Therefore, for Figure 31 C, when sealably being closed at the first print head assembly opening 1242 and first passage 1261, in the middle of first, safeguard that system panel assembly 1230' can isolate with the residual volume of gas confinement assembly 1010.

In Figure 31 D and Figure 31 E, show each embodiment of gas lock 1010, wherein first safeguard that system component 1250 and second safeguards that system component 1290 can be separately mounted to first and safeguard that system component platform 1253 and second is safeguarded on system component platform 1293.In Figure 31 D and Figure 31 E, first safeguards that system component platform 1253 and second safeguards that system component platform 1293 closes off in the first centre is safeguarded and safeguarded system panel assembly 1270' in the middle of system panel assembly 1230' and second.As it was noted above, safeguard the following teaching of system panel assembly 1230' to also apply be applicable in the middle of second for the first centre safeguard system panel assembly 1270'.In this respect, as fig. 3 id, first print head assembly 1080 can dock pad 1245 by means of the sufficient force applied in the Z-axis direction by the first print head assembly alignment system 1090 and the first print head assembly and dock so that the first print head assembly opening 1242 can be sealed.Therefore, for Figure 31 D, when the first print head assembly opening 1242 is sealably closed, in the middle of first, safeguard that system panel assembly 1230' can isolate with the residual volume of gas confinement assembly 1010.

Instructed as described previously for each embodiment of the gas confinement assembly 1010 of Figure 31 A-31C, printhead can remain positioned in above the first print head assembly opening 1242, not cover or seal the first print head assembly opening 1242 during various maintenance programs, thus close the first print head assembly opening 1242.In each embodiment of gas confinement assembly 1010, for various maintenance programs, print head assembly locking device can be arranged to contact with pad to cover print head assembly opening by adjusting Z axis.In this respect, Figure 31 E can explain in two ways.In the first is explained, the first print head assembly docking pad 1245 and the second print head assembly docking pad 1285 can be made up of compressible pad sheet material, such as described previously for described in the gas-tight seal of various framing components.In Figure 31 E, the first print head assembly 1080 is positioned at first the most in the Z-axis direction and safeguards above system component 1250 so that pad 1245 is compressed, thus sealably closes the first print head assembly opening 1242.By contrast, the second print head assembly 1081 is positioned at second the most in the Z-axis direction and safeguards above system component 1290, to contact the second print head assembly docking pad 1285, thus covers the second print head assembly opening 1282.In the second is explained, the first print head assembly docking pad 1245 and the second print head assembly docking pad 1285 can be inflatable pads, as described previously for described in Figure 28.In Figure 31 E, first print head assembly 1080 can be positioned at first in the Z-axis direction and safeguard that contacting the first print head assembly before docking pad 1245 inflation at the first print head assembly above system component 1250 docks pad 1245, thus covers the first print head assembly opening 1242.By contrast, the second print head assembly 1081 is positioned at second the most in the Z-axis direction and safeguards above system component 1290 so that when the second print head assembly dock pad 1285 inflate time, the second print head assembly opening 1282 is sealably closed.

Figure 31 F shows such as to use and safeguards in the middle of first and safeguard in the middle of system panel assembly 1230' and second and safeguard that volume can use such as covering such as but not limited to gate valve assembly to seal shown in system panel assembly 1270'.Safeguard that the following teaching of system panel assembly 1270' can be applicable to safeguard each embodiment of system panel assembly and gas closed component for the first middle maintenance in the middle of system panel assembly 1230' and second.As shown in Figure 31 F, use respectively and close the first print head assembly opening 1242 such as but not limited to the first print head assembly gate valve 1247 and the second print head assembly gate valve 1287 and the second print head assembly opening 1282 can provide the first print head assembly 1080 and continuous operation of the second print head assembly 1081 respectively.If Figure 31 F is for safeguarding shown in system panel assembly 1230' in the middle of first, the first print head assembly gate valve 1247 is used sealably to close the first print head assembly opening 1242 (for as described in Figure 27 A and Figure 27 B) and sealably close the first passage 1261 (for as described in Figure 28) around base portion 1070 and can remotely and automatically carry out.Similarly, safeguarding shown in system panel assembly 1270' in the middle of for the second of Figure 31 F, using the second print head assembly gate valve 1287 sealably to close the second print head assembly opening 1282 (for as described in Figure 27 A and Figure 27 B) can remotely and automatically be carried out.It is envisaged that, various head maintenance programs such as can safeguard in the middle of system panel assembly 1230' and second that maintenance volume that system panel assembly 1270' limits provides convenient by safeguarding in the middle of first by isolation, the most still provides the seriality of the print procedure of use the first print head assembly 1080 and the second print head assembly 1081.

As it was noted above, the first print head assembly docking pad 1245 and the second print head assembly docking pad 1285 can consolidate around the first print head assembly opening 1242 and the second print head assembly opening 1282 respectively.Additionally, as shown in Figure 31 F, the first print head assembly docking pad 1245 and the second print head assembly docking pad 1285 can consolidate around the first print head assembly locking device edge 1088 and the second print head assembly locking device edge 1089 respectively.When instruction carries out the maintenance of the first print head assembly 1080 and the second print head assembly 1081, first print head assembly gate valve 1247 and the second print head assembly gate valve 1287 can be opened, and first print head assembly 1080 and the second print head assembly 1081 can safeguard that system panel assembly 1270' docks, as mentioned before with safeguard in the middle of first in the middle of system panel assembly 1230' and second.

Such as but not limited to, can safeguard to first that system component 1250 and second safeguards that system component 1290 provides any maintenance program safeguarded can safeguard that system panel assembly 1270' is carried out by being individually insulated the first middle maintenance in the middle of system panel assembly 1230' and second, and not interrupt print procedure.It is also contemplated that, new printhead or print head assembly are loaded in system or dismantle from system printhead or print head assembly can safeguard that system panel assembly 1270' is carried out by being individually insulated the first middle maintenance in the middle of system panel assembly 1230' and second, and do not interrupt print procedure.Sort of activity can be automatically provided facility such as but not limited to using robot.Such as but not limited to, can carry out fetching by robot being stored in the middle of the first of such as Figure 31 F and safeguard the printhead safeguarding in volume safeguarding system panel assembly 1270' in the middle of system panel assembly 1230' and second, be then act through robot and the fault printhead on the head device 1082 of the first print head assembly 1080 or on the head device 1083 of the second print head assembly 1081 is replaced with normally functioning printhead.After this, robot fault printhead is left in first safeguard that system component 1250 or the second safeguards the module in system component 1290 in.This maintenance program can be carried out in an automatic fashion, and does not interrupt ongoing print procedure.

Robot fault printhead left in first safeguard that system component 1250 or the second is safeguarded in system component 1290 after, safeguard in the middle of such as first that the maintenance volume safeguarding system panel assembly 1270' in the middle of system panel assembly 1230' and second can be closed the first print head assembly opening 1242 and the second print head assembly opening 1282 such as but not limited to the first print head assembly gate valve 1247 and the second print head assembly gate valve 1287 and sealably closes and isolate by using respectively respectively.Additionally, safeguard that then volume such as can lead to atmospheric environment according to aforementioned teaching, such that it is able to take out and change fault printhead.As the most described in more detail, owing to each embodiment of gas purge system designs relative to the volume of whole gas confinement assembly, gas purification resource can be exclusively used in the volume safeguarding volume space that purging is substantially reduced, thus substantially reduces for the system recovery time safeguarding volume.In this respect, need to make maintenance volume lead to atmospheric environment maintenance program can or do not interrupt or carry out in the case of the ongoing print procedure of less interruption.

Figure 32 shows that the first of each embodiment of gas confinement assembly and the system instructed according to this safeguards the enlarged drawing of system component 1250.As it was noted above, maintenance system can include, but not limited to, e.g. the ink droplet calibration station for performing various printhead calibrating procedure, the purging station of ink discharged from printhead during collecting and being contained in purging or perfusion program and for having removed unnecessary black blotting station afterwards at purging station at purging or perfusion program.In addition, maintenance system can include one or more station, for receiving the one or more printheads or head device dismantled from the first print head assembly 1080 and the second print head assembly 1081, or the printhead in the first print head assembly 1080 and the second print head assembly 1081 or head device can be loaded into during being stored in maintenance program.

Each embodiment safeguarding system component instructed according to this, the first of such as Figure 32 safeguards system component 1250, it may include ink droplet demarcating module 1252, purging pond module 1254 and blotter module 1256.First safeguards that system component 1250 may be installed first and safeguards on system positioning system 1251.First safeguards that system positioning system 1251 can provide Y-axis to move, with optionally make in various module each and there is the print head assembly of the head device (such as, the head device 1082 of Figure 31 B) with at least one printhead align with the first print head assembly opening 1242.Various modules can be carried out with the location of the print head assembly with the head device with at least one printhead in the combination of working service system positioning system 1251 and the first print head assembly alignment system 1090.Safeguard that system positioning system 1251 can provide the first various modules Y-X location relative to the first print head assembly opening 1242 safeguarding system component 1250, and the first print head assembly alignment system 1090 can provide first print head assembly 1080 X-Z location above the first print head assembly opening 1242.In this respect, the head device with at least one printhead can be positioned on the first print head assembly opening 1242 over or within to receive maintenance.

Figure 33 illustrates the enlarged perspective safeguarding system panel assembly 1230' in the middle of first, illustrated therein is by cover cap and the glove port with glove.As noted, it is contemplated that, safeguard in the middle of such as first that the various volumes safeguarding system panel assembly of system panel assembly 1230' can be about 2m³.It is contemplated that safeguard that each embodiment of system panel assembly may have about 1m³Volume, and in each embodiment safeguarding system panel assembly, volume can be about 10m³.For each embodiment of gas confinement assembly, such as the gas confinement assembly 1010 of Figure 29, framing component assembly section may be less than or equal to about the 1% of the total measurement (volume) of gas confinement assembly.In each embodiment of gas confinement assembly, framing component assembly section may be less than or equal to about the 2% of the total measurement (volume) of gas confinement assembly.In each embodiment of gas confinement assembly, framing component assembly section may be less than or equal to about the 10% of the total measurement (volume) of gas confinement assembly.For each embodiment of gas confinement assembly, framing component assembly section may be less than or equal to about the 50% of the total measurement (volume) of gas confinement assembly.

The gas that the gas confinement assembly instructed according to this and system can have in gas confinement component internal circulates and filtration system.This self-filtering system can have the multiple fan filter units in inside, and can be configured to provide gas laminar flow in inside.Laminar flow can be to the direction of internal bottom or other direction any from internal top.Although the gas stream produced by blood circulation is not necessarily laminar flow, but gas laminar flow can be used for guaranteeing thoroughly and completely having enough to meet the need of gas in inside.Gas laminar flow can be additionally used in and minimizes turbulent flow, and this turbulent flow is undesirable, because it can make the powder collection in environment in this regions of turbulent flow, thus stops filtration system to remove those granules from environment.In addition, in order to keep preferred temperature in inside, it is possible to provide use the heat regulating system of multiple heat exchanger, such as operate by means of fan or another gas-recycling plant, near fan or another gas-recycling plant, or it is used in combination with fan or another gas-recycling plant.Gas purification loop can be configured by least one gas cleaning components outside locking device from gas confinement component internal recyclegas.In this respect, circulation and the filtration system of gas confinement component internal is combined the continuous circulation that can provide the notable low particulate inert gas with notable low-level reactive materials run through in gas confinement assembly with the gas purification loop of gas confinement component external.Gas purge system can be configured to keep the most low-level and is not intended to component, such as organic solvent and steam thereof and water, steam, oxygen etc..

Figure 34 A is to illustrate gas confinement assembly and the schematic diagram of system 2100.Each embodiment of gas confinement assembly and system 2100 can include the gas confinement assembly 1500 instructed according to this and the gas purification loop 2130 of gas confinement assembly 1500 fluid communication and at least one heat regulating system 2140.Additionally, each embodiment of gas confinement assembly and system can have pressurized inert gas recirculating system 2169, its can supplying inert gas for operating various devices, such as the substrate suspending bench of OLED print system.Each embodiment of pressurized inert gas recirculating system 2169 can use compressor, aerator and combination of the two as the source of each embodiment of noble gas recirculating system 2169, as described in greater detail below.Additionally, gas confinement assembly and system 2100 can have the filtration within gas confinement assembly and system 2100 and blood circulation (not shown).

Each embodiment of gas confinement assembly for instructing according to this, the noble gas that inside of noble gas and each enforcement at gas confinement assembly that the design of pipeline can would circulate through the gas purification loop 2130 of Figure 34 A is filtered continuously and circulated separates.Gas purification loop 2130 includes egress line 2131, and it is from gas confinement assembly 1500 to solvent removing component 2132 and then to gas purge system 2134.Then the noble gas of other reactant gas material purging solvent and such as oxygen and steam returns to gas confinement assembly 1500 by inlet line 2133.Gas purification loop 2130 may also comprise suitably pipe and connection, and sensor, such as, oxygen sensor, water vapor sensor and solvent vapour sensor.Such as the gas circulation unit of fan, aerator or motor etc. can be separately provided or integration is in such as gas purge system 2134, so that gas to cycle through gas purification loop 2130.Each embodiment according to gas confinement assembly, although solvent remove system 2132 and gas purge system 2134 in fig. 33 shown in schematic diagram is shown as single unit, but solvent is removed together with system 2132 and gas purge system 2134 can be contained in as single clean unit.Heat regulating system 2140 can include at least one cooler 2141, and it can have the fluid issuing circuit 2143 for being recycled to by coolant in gas confinement assembly and be used for the fluid intake circuit 2145 making coolant return to cooler.

The gas purification loop 2130 of Figure 34 A can have the solvent removal system 2132 being arranged on gas purge system 2134 upstream, so that the noble gas from gas confinement assembly 1500 circulation removes system 2132 via egress line 2131 through solvent.According to each embodiment, system 2132 removed by solvent can be solvent capture systems based on the noble gas adsorption solvent steam removing system 2132 from the solvent through Figure 34 A.One or more beds such as but not limited to the adsorbent of such as activated carbon, molecular sieve etc. can remove the organic solvent steam of wide scope effectively.For each embodiment of gas confinement assembly, cold capture technique can be used to remove the solvent vapour in system 2132 to remove solvent.As mentioned before, each embodiment of gas confinement assembly for instructing according to this, the such as sensor of oxygen sensor, water vapor sensor and solvent vapour sensor can be used for the effective removal monitoring such material from the noble gas of the gas confinement component system of the gas confinement component system 2100 being continuously circulated through such as Figure 34.Solvent is removed each embodiment of system and be may indicate that when the adsorbent of such as activated carbon, molecular sieve etc. reaches capacity, thus renewable or change one or more beds of adsorbent.The regeneration of molecular sieve may relate to heat molecular sieve, make molecular sieve with form gas and contact, combinations thereof etc..The molecular sieve being configured to capture the various materials including oxygen, steam and solvent can regenerate by heating and be exposed to the composition gas comprising hydrogen, such as, comprising the composition gas of the nitrogen of about 96% and the hydrogen of 4%, wherein said percentage ratio is percent by volume or percentage by weight.The physics regeneration of activated carbon is usable under inert environments the similar program of heating and carries out.

Any suitable gas purge system can be used in the gas purge system 2134 of the gas purification loop 2130 of Figure 34 A.Can be from such as MBRAUNInc. (Statham, or the gas purge system that obtains of InnovativeTechnology (Amesbury, Massachusetts) can be used for being integrated in each embodiment according to this gas confinement assembly instructed NewHampshire).Gas purge system 2134 can be used for purifying one or more noble gases in gas confinement assembly and system 2100, such as, to purify all gas environment in gas confinement assembly.As it was noted above, in order to make gas cycle through gas purification loop 2130, gas purge system 2134 can have gas circulation unit, such as fan, aerator or motor etc..In this respect, gas purge system can select according to the volume of locking device, and it can limit for making noble gas be moved through the volume flow rate of gas purge system.For including having the most about 4m³The gas confinement assembly of gas confinement assembly of volume and each embodiment of system, can use and can move about 84m³The gas purge system of/h.For including having the most about 10m³The gas confinement assembly of gas confinement assembly of volume and each embodiment of system, can use and can move about 155m³The gas purge system of/h.For having at about 52-114m³Between each embodiment of gas confinement assembly of volume, more than one gas purge system can be used.

Any suitable pneumatic filter or purifier may be included in the gas purge system 2134 of this teaching.In certain embodiments, gas purge system can include two purifiers in parallel so that device may exit off production line for maintenance, and another device can be used for the operation of continuation system, and does not interrupt.In certain embodiments, such as, gas purge system can include one or more molecular sieve.In certain embodiments, gas purge system can at least include the first molecular sieve and the second molecular sieve, make a molecular sieve become impurity saturated or perhaps think can not sufficiently effective operate time, system switches to another molecular sieve, regenerates the saturated or molecular sieve of poor efficiency simultaneously.Control unit can provide for determining the operating efficiency of each molecular sieve, switches between the operation at different molecular sieve, is used for regenerating one or more molecular sieve, or for a combination thereof.As it was noted above, molecular sieve can be reproduced and reuse.

About the heat regulating system 2140 of Figure 34 A, at least one fluid cooler 2141 can be set, for cooling down the gaseous environment in gas confinement assembly and system 2100.For each embodiment of this gas confinement assembly instructed, cooling fluid is flowed to the heat exchanger in locking device by fluid cooler 2141, and wherein, noble gas is through the filtration system within locking device.At least one fluid cooler can also be provided in gas confinement assembly and system 2100, the heat of the equipment encapsulated in coming from gas lock 2100 with cooling.Such as but not limited to, at least one fluid cooler also can be provided for gas confinement assembly and system 2100, comes from the heat of OLED print system with cooling.Heat regulating system 2140 can include heat exchange or Peltier device, and can have various cooling capacity.Such as, for each embodiment of gas confinement assembly and system, cooler may be provided in the cooling capacity between about 2kW to about 20kW.Fluid cooler 1136 and 1138 can cool down one or more fluids.In certain embodiments, fluid cooler can use multiple fluid as coolant, such as but not limited to, water, antifreezing agent, cold-producing medium and combinations thereof, as heat-exchange fluid.Suitably No leakage locking connection can be used for connecting about pipe and system unit.

As each embodiment for the gas confinement assembly 1000 of Figure 23 and Figure 24 or for the gas confinement assembly shown in the gas confinement assembly 1010 of Figure 29 and Figure 30 can have the first framing component assembly section limiting the first volume and the second framing component assembly section limiting the second volume, and the most each volume can separate with another volume.Gas confinement assembly 1000 for Figure 23 and Figure 24 or each embodiment of the gas confinement assembly 1010 for Figure 29 and Figure 30, the all system features described for the gas confinement assembly of Figure 34 A can be included as the system features of such embodiment of the second framing component assembly section for having the first framing component assembly section limiting the first volume and restriction the second volume, and the most each volume can separate with another volume.In addition, as illustrated in figure 34b, for gas component and system 2150, for having each embodiment of the gas confinement assembly of the second framing component assembly section of the first framing component assembly section limiting the first volume and restriction the second volume, each volume can be set to individually be in fluid communication with gas purification loop 2130.

As illustrated in figure 34b, the gas confinement assembly 1500 of gas confinement assembly and system 2150 can have the first framing component assembly section 1500-S1 limiting the first volume and the second framing component assembly section 1500-S2 limiting the second volume.If all valve V₁、V₂、V₃And V₄All open, then gas purification loop 2130 substantially operates like that as described previously for described in the gas confinement assembly of Figure 34 A and system 1500.At V₃And V₄In the case of closedown, the only first framing component assembly section 1500-S1 is in fluid communication with gas purification loop 2130.Such as but not limited to, during needing the second framing component assembly section 1500-S2 to lead to the maintenance program of atmospheric environment, when the second framing component assembly section 1500-S2 is sealably closed and therefore isolates with framing component assembly section 1500-S1, this valve state can be used.At V₁And V₂In the case of closedown, the only second framing component assembly section 1500-S2 is in fluid communication with gas purification loop 2130.Such as but not limited to, during this section is recovered after the second framing component assembly section 1500-S2 leads to atmospheric environment, this valve state can be used.As it was noted above, the requirement to gas purification loop 2130 is specified relative to the total measurement (volume) of gas confinement assembly 1500.Therefore, by the resource of gas purge system is exclusively used in framing component assembly section (such as, second framing component assembly section 1500-S2, it is shown as the volume total measurement (volume) significantly less than gas lock 1500 in Figure 34 B) recovery, can substantially reduce recovery time.

As shown in Figure 35 and Figure 36, one or more fan filter units can be configured to provide the substantially laminar flow by internal gas.Each embodiment according to the gas confinement assembly instructed according to this, one or more fan units are arranged close to the first inner surface of gaseous environment locking device, and one or more tubing entrance is arranged close to relative second inner surface of gaseous environment locking device.Such as, gaseous environment locking device can include inner top and bottom inner rim, the one or more fan unit can be arranged close to inner top, and one or more tubing entrance can include multiple entrance openings of being arranged close to bottom inner rim, it is a part for tubing, as seen in figs. 15-17.

Figure 35 is the cross sectional view of the length intercepting along the gas confinement assembly according to this each embodiment instructed and system 2200.Gas lock 1500 and gas purge system 2130 (referring also to Figure 34), heat regulating system 2140 that the gas confinement assembly of Figure 35 and system 2200 can include accommodating OLED print system 50, filter and blood circulation 2150 and tubing 2170.Heat regulating system 2140 can include the fluid cooler 2141 being in fluid communication with cooler outlet circuit 2143 and cooler inlet line 2145.Cooling fluid can leave fluid cooler 2141, and flowing is by cooler outlet circuit 2143, and flows to heat exchanger, for the gas confinement assembly shown in Figure 35 and each embodiment of system, its can be located in multiple fan filter unit each near.Fluid can return cooler 2141, to be maintained at constant preferred temperature by cooler inlet line 2145 by the heat exchanger near fan filter unit.As it was noted above, cooler outlet circuit 2141 connects with multiple heat exchanger fluid with cooler inlet line 2143, including the first heat exchanger the 2142, second heat exchanger 2144 and the 3rd heat exchanger 2146.According to the gas confinement assembly shown in Figure 34 and each embodiment of system, first heat exchanger the 2142, second heat exchanger 2144 and the 3rd heat exchanger 2146 respectively with the first fan filter unit the 2152, second fan filter unit 2154 and three fan filter unit 2156 thermal communication of filtration system 2150.

In Figure 35, many arrows show to or from the flowing of each fan filter unit, and also show the flowing within including the tubing 2170 of the first tubing pipe 2173 and second pipe system pipes 2174, as shown in the rough schematic view of Figure 34.First tubing pipe 2173 can be received gas by the first entrance 2171 and can be discharged by the first pipe outlet 2175.Similarly, second pipe system pipes 2174 can receive gas and by second pipe outlet 2176 discharge by second pipe entrance 2172.Additionally, as shown in figure 34, tubing 2170 will be separated by the noble gas of filtration system 2150 in interior recirculation by effectively limiting space 2180, and space 2180 is in fluid communication with gas purge system 2130 via gas purification egress line 2131.The blood circulation of this each embodiment included for the tubing described in Figure 15-17 provides substantially laminar flow, minimize turbulent flow, promote the circulation of the particulate matter of the gaseous environment in locking device inside, have enough to meet the need and filter, and offer is by the circulation of the gas purge system of gas confinement component external.

Figure 36 is the cross sectional view of the length intercepting along the gas confinement assembly according to each embodiment according to this gas confinement assembly instructed and system 2300.Similar with the gas confinement assembly 2200 of Figure 35, the gas confinement component system 2300 of Figure 36 can include gas lock 1500, and it can accommodate OLED print system 50 and gas purge system 2130 (referring also to Figure 34), heat regulating system 2140, filtration and blood circulation 2150 and tubing 2170.Each embodiment for gas confinement assembly 2300, heat regulating system 2140 can include the fluid cooler 2141 being in fluid communication with cooler outlet circuit 2143 and cooler inlet line 2145, can connect with multiple heat exchanger fluid, such as first heat exchanger 2142 and the second heat exchanger 2144, as shown in figure 36.According to the gas confinement assembly shown in Figure 36 and each embodiment of system, by being located close to the first pipe outlet 2175 and the pipe outlet of second pipe outlet 2176 of such as tubing 2170, such as each heat exchanger of the first heat exchanger 2142 and the second heat exchanger 2144 can be with the noble gas thermal communication of circulation.In this respect, return from entrance (the first entrance 2171 of such as tubing 2170 and second pipe entrance 2172) so that the noble gas filtered can be thermally regulated before cycling through first fan filter unit 2152, second fan filter unit 2154 of filtration system 2150 of such as Figure 36 and three fan filter unit 2156 respectively.

As from the arrow in the direction of the noble gas showing the locking device cycling through Figure 35 and 36 with can be seen that, fan filter unit is configured to provide from locking device top down towards the substantially laminar flow of bottom.Such as, can be from FlandersCorporation (Washington, or the fan filter unit that obtains of EnvircoCorporation (Sanford, NorthCarolina) can be used for being integrated in each embodiment according to this gas confinement assembly instructed NorthCarolina).About 350 cubic feet/minute (CFM) of the commutative noble gas by each unit of each embodiment of fan filter unit are between about 700CFM.As shown in Figure 35 and Figure 36, owing to fan filter unit is in parallel connection rather than arranged in series, thus the amount of the noble gas that can exchange in the system including multiple fan filter unit is proportional to the element number used.At the near-bottom of locking device, gas stream guides towards multiple tubing entrances, is schematically illustrated as the first entrance 2171 and second pipe entrance 2172 in Figure 35 and 36.As described previously for described in Figure 15-17, entrance it is positioned at the approximate bottom of locking device and makes the good turnover of gas gaseous environment in upper fan filter unit flows downward beneficially locking device, and promoting the thoroughly turnover of all gas environment by the gas purge system being used in combination with locking device and mobile.By using the laminar flow of gaseous environment and thoroughly turnover filtered in making gaseous environment cycle through tubing and promote locking device with blood circulation 2150, this tubing would circulate through the inert gas flow of gas purification loop 2130 separately, level each of in reactive materials (such as water and oxygen, and every kind of solvent) is positively retained at such as 100ppm or lower, such as 1.0ppm or lower, 0.1ppm or lower in each embodiment of gas confinement assembly.

According to each embodiment of the gas confinement component system for OLED print system, the quantity of fan filter unit can select according to the physical location of the substrate in print system during processing.Therefore, although in Figure 35 and 36, show 3 fan filter units, but the variable amounts of fan filter unit.Such as, Figure 37 is the cross sectional view of the length intercepting along gas confinement assembly and system 2400, and it is similar with the gas confinement assembly shown in Figure 23 and Figure 24 and Figure 29 and Figure 30 and system.Gas confinement assembly and system 2400 can include gas confinement assembly 1500, and it accommodates the OLED print system 1050 being supported on base portion 1220.The substrate suspending bench 1054 of OLED print system is limited to substrate during the OLED of substrate prints and may move through the stroke of system 2400.Therefore, the filtration system 2150 of gas confinement assembly and system 2400 has appropriate number of fan filter unit, and it illustrates with 2151-2155, and corresponding by the physics stroke of OLED print system 1050 with substrate during processing.In addition, the schematic cross sectional representation of Figure 37 has gone out the fixed wheel exterior feature of each embodiment of gas lock can efficiently reduce noble gas volume required during OLED print processing, and the inside that is set to easily accessible gas lock 1500 is (the most close during processing simultaneously, such as use and be arranged on the glove in each glove port, or be immediately adjacent to by various detachable panels in the case of attended operation).

Each embodiment of gas lock and system can use pressurized inert gas recirculating system, is used for operating various pneumatic operation device and equipment.Additionally, as it was noted above, the embodiment of the gas confinement assembly of this teaching can be maintained at slight positive pressure relative to external environment condition, such as but not limited between about 2mbarg to about 8mbarg.Pressurized inert gas recirculating system is kept to be probably challenge in gas confinement component system, because it has and keep a relevant balance play dynamically and persistently carried out of the slight positive internal pressure of gas confinement assembly and system, and simultaneously continuously introduce gas-pressurized in gas confinement assembly and system.Additionally, the variable demand of each device and equipment can form various gas confinement assemblies and the irregular pressure distribution of system of this teaching.Under these conditions, dynamic pressure balance is kept to can provide for the globality of the OLED print procedure persistently carried out the gas confinement assembly being maintained at slight positive pressure relative to external environment condition.

As shown in figure 38, each embodiment of gas confinement assembly and system 3000 can have extraneous gas loop 2500, for integrating and control to be used for inert gas source 2509 and clean dry air (CDA) source 2512 of the various aspects of the operation of gas confinement assembly and system 3000.It will be appreciated by the skilled addressee that gas confinement assembly and system 3000 may also include internal particle and filter each embodiment with gas-circulating system and each embodiment of extraneous gas cleaning system, as mentioned before.Except in addition to integrating and controlling the external circuit 2500 in inert gas source 2509 and CDA source 2512, gas confinement assembly and system 3000 can have compressor loop 2160, its can supplying inert gas, for operation may be provided at each device in gas confinement assembly and system 3000 inside and equipment.

The compressor loop 2160 of Figure 38 can include compressor the 2162, first reservoir 2164 and the second reservoir 2168 being configured to fluid communication.Compressor 2162 can be configured to the noble gas aspirated from gas confinement assembly 1500 is compressed to desired pressure.The entrance side of compressor loop 2160 can be in fluid communication with gas confinement assembly 1500 by having the circuit 2503 of valve 2505 and check-valves 2507 via gas confinement module outlet 2501.Compressor loop 2160 can be in fluid communication with gas confinement assembly 1500 via extraneous gas loop 2500 on the outlet side of compressor loop 2160.Reservoir 2164 may be provided between the joint portion in compressor 2162 and compressor loop 2160 and extraneous gas loop 2500, and can be configured to produce 5psig or higher pressure.Second reservoir 2168 can be in compressor loop 2160, circulates, due to compressor piston, the fluctuation caused for damping with about 60Hz.For each embodiment of compressor loop 2160, the first reservoir 2164 can have the capacity between about 80 gallons to about 160 gallons, and the second reservoir can have the capacity between about 30 gallons to about 60 gallons.According to each embodiment of gas confinement assembly and system 3000, compressor 2162 can be zero entrance compressor (zeroingresscompressor).Various types of zero enter compressors can in each embodiment of the gas confinement assembly not having environmental gas to leak into this teaching and system in the case of operation.Zero each embodiment entering compressor can be run continuously, such as during utilizing the OLED print processing of purposes of each device and the equipment needing compressed inert.

Reservoir 2164 can be configured to receive from compressor 2162 and gather compressed inert.Compressed inert can be supplied to gas confinement assembly 1500 by reservoir 2164 when needed.Such as, reservoir 2164 can provide gas to keep the pressure of all parts of gas confinement assembly 1500, such as but not limited to one or more in following: pneumatic robot, substrate suspending bench, air bearing, air lining, compressed gas instrument, pneumatic actuator, and combinations thereof.If Figure 38 is for shown in gas confinement assembly and system 3000, gas confinement assembly 1500 can have and is encapsulated in OLED print system 50 therein.As shown in Figure 24 and Figure 30, OLED print system 50 can be supported by granite level 70, and can include substrate suspending bench 54, for substrate being transported in printhead chamber correct position and supporting substrate during OLED print processing.Use additionally, the air bearing 58 being supported on bridge 56 may replace such as linear mechanical bearing.The gas lock instructed for this and each embodiment of system, use various pneumatically-operated device and equipment can provide low particles generation performance and low-maintenance.Compressor loop 2160 can be configured to be continuously fed to pressurized inert gas each device and the equipment of gas confinement equipment 3000.In addition to supply pressurized inert gas, the substrate suspending bench 54 (it uses air bearing technology) of OLED print system 50 also uses vacuum system 2550, and vacuum system 2550 is connected with gas confinement assembly 1500 by circuit 2552 when valve 2554 is in an open position.

Can have as shown in Figure 38 for the Stress control bypass circulation 2165 of compressor loop 2160 according to this pressurized inert gas recirculating system instructed, it is in order to compensate the variable demand of gas-pressurized during use, thus provides the gas confinement assembly of this teaching and the dynamic equilibrium of each embodiment of system.For the gas confinement assembly instructed according to this and each embodiment of system, bypass circulation can keep the constant pressure in reservoir 2164, and do not disturb or change the pressure in locking device 1500.Bypass circulation 2165 can have the first bypass inlet valve 2161 on the entrance side being positioned at bypass circulation 2165, and it is closed, unless used bypass circulation 2165.Bypass circulation 2165 also can have back pressure regulator, and it can use when the second valve 2163 cuts out.Bypass circulation 2165 can have the second reservoir 2168 at the outlet side being arranged on bypass circulation 2165.For using the embodiment of the compressor loop 2160 of zero entrance compressor, bypass circulation 2165 can compensate for elapsing the little skew of generable pressure in time during gas confinement assembly and system use.When bypass inlet valve 2161 is in an open position, bypass circulation 2165 can be in fluid communication with compressor loop 2160 on the entrance side of bypass circulation 2165.When bypass inlet valve 2161 is opened, if gas confinement assembly 1500 inside need not the noble gas from compressor loop 2160, then the noble gas shunted by bypass circulation 2165 can be recycled to compressor.When the inert gas pressure in reservoir 2164 exceedes predetermined threshold value pressure, compressor loop 2160 is configured to be shunted noble gas by bypass circulation 2165.The predetermined threshold value pressure of reservoir 2164 can be between about 25psig to about 200psig when the flow rate of at least about 1 cubic feet/minute (cfm), or can be between about 50psig to about 150psig when the flow rate of at least about 1 cubic feet/minute (cfm), or can be between about 75psig to about 125psig when the flow rate of at least about 1 cubic feet/minute (cfm), or can be between about 90psig to about 95psig when the flow rate of at least about 1 cubic feet/minute (cfm).

Each embodiment of compressor loop 2160 can use except zero enters the various compressors in addition to compressor, such as variable speed compressor or be controlled to open or close the compressor of state.As it was noted above, zero entrance compressor guarantees do not have environment reaction material can introduce gas confinement assembly and system.It is therefore prevented that any compressor configuration that environment reaction material introduces in gas confinement assembly and system can be used in compressor loop 2160.According to each embodiment, the compressor 2162 of gas confinement assembly and system 3000 may be housed in such as but not limited in gas-tight seal housing.Enclosure interior can be configured to and noble gas fluid communication, such as, form the identical noble gas of the inert gas environment of gas confinement assembly 1500.For each embodiment of compressor loop 2160, compressor 2162 can be controlled in constant speed to keep constant pressure.In not using the other embodiments of compressor loop 2160 of zero entrance compressor, compressor 2162 can close when reaching max-thresholds pressure and open when minimizing threshold pressure.

In the Figure 39 for gas confinement assembly and system 3100, aerator loop 2190 and blower vacuum loop 2550 display are for operating the substrate suspending bench 1054 of OLED print system 1050, and it is contained in gas confinement assembly 1500.As described previously for described in compressor loop 2160, aerator loop 2190 can be configured to be continuously fed to pressurized inert gas substrate suspending bench 54.

The gas confinement assembly of pressurized inert gas recirculating system and each embodiment of system can be used can to have the various loops using various pressurized-gas sources, such as at least one in compressor, aerator and combinations thereof.In the Figure 39 for gas confinement assembly and system 3100, compressor loop 2160 can be in fluid communication with extraneous gas loop 2500, and it can be used for for being applied to high consumption manifold 2525 and the noble gas of low consumption manifold 2513.For the gas confinement assembly instructed according to this and each embodiment of system, as shown in the Figure 39 for gas confinement assembly and system 3000, the high manifold 2525 that consumes can be used for being supplied to noble gas various device and equipment, such as but not limited to one or more in following: substrate suspending bench, pneumatic robot, air bearing, air lining and compressed gas instrument, and combinations thereof.For the gas confinement assembly instructed according to this and each embodiment of system, low consumption manifold 2513 can be used for being supplied to noble gas various device and equipment, such as but not limited to one or more in following: isolator and pneumatic actuator and combinations thereof.

Each embodiment for gas confinement assembly and system 3100, aerator loop 2190 can be used for being supplied to pressurized inert gas each embodiment of substrate suspending bench 1054, and may be used for being supplied to pressurized inert gas such as but not limited to one or more in following with the compressor loop 2160 of extraneous gas loop 2500 fluid communication: pneumatic robot, air bearing, air lining and compressed gas instrument, and combinations thereof.In addition to supply pressurized inert gas, the substrate suspending bench 54 (it uses air bearing technology) of OLED print system 1050 also uses vacuum system 2550, and vacuum system 2550 is connected with gas confinement assembly 1500 by circuit 2552 when valve 2554 is in an open position.The housing 2192 in aerator loop 2190 can be supplied to the first aerator 2194 of substrate suspending bench 1054 and the second aerator 2550 as the vacuum source of substrate suspending bench 1054 to be maintained in inert gas environment noble gas pressurized source by being used for.Aerator can be made to be suitable as the pressurized inert gas source of each embodiment of substrate suspending bench or the attribute of vacuum source includes, but not limited to, e.g.: they have high reliability so that they have low-maintenance；There is variable speed control；And the volume flow with wide scope (can provide at about 100m³/ h to about 2500m³Each embodiment of volume flow between/h).Each embodiment in aerator loop 2190 also can have the first isolating valve 2193 at the arrival end in aerator loop 2190 and the check-valves at the port of export of compressor loop 2,190 2195 and the second isolating valve 2197.Each embodiment in aerator loop 2190 can have adjustable valve 2196 (can be such as but not limited to, gate valve, butterfly valve, needle valve or globe valve) and for will be maintained at the heat exchanger 2198 of limiting temperature to the noble gas of substrate suspension system 1054 from blower assembly 2190.

Figure 39 shows the extraneous gas loop 2500 that also figure 38 illustrates, and is used for inert gas source 2509 and clean dry air (CDA) source 2512 of the various aspects of the gas confinement assembly of Figure 38 and the operation of the gas confinement assembly of system 3000 and Figure 39 and system 3100 for integration and control.The extraneous gas loop 2500 of Figure 38 and Figure 39 can include at least four mechanical valve.These valves include the first mechanical valve the 2502, second mechanical valve the 2504, the 3rd mechanical valve 2506 and the 4th mechanical valve 2508.These each valves are positioned at the position in each flow circuits, it is allowed to control both noble gas (such as, such as nitrogen, any rare gas and any combination thereof) and air source (such as, clean dry air (CDA)).Inert shell gas circuit 2510 extends from inert shell gas source 2509.Inert shell gas circuit 2510 continues to extend linearly as low consumption manifold line 2152, and low consumption manifold line 2152 is in fluid communication with low consumption manifold 2513.Cross link the first section 2514 extends from the first flowing joint portion 2516, and the first flowing joint portion 2516 is positioned at the cross part of inert shell gas circuit 2510, low consumption manifold line 2152 and cross link the first section 2514.Cross link the first section 2514 extends to the second flowing joint portion 2518.Compressor noble gas circuit 2520 extends from the reservoir 2164 of compressor loop 2160 and terminates at the second flowing joint portion 2518.CDA circuit 2522 extends from CDA source 2512 and consumes manifold line 2524 as height and continues, and the high manifold line 2524 that consumes is in fluid communication with the high manifold 2525 that consumes.3rd flow combinations portion 2526 is positioned at cross link the second section 2528, clean dry air circuit 2522 and the high cross part consuming manifold line 2524.Cross link the second section 2528 extends to the 3rd flow combinations portion 2526 from the second flowing joint portion 2518.

In conjunction with the description in extraneous gas loop 2500 and with reference to Figure 40, the following is the general introduction of some each operator schemes, Figure 40 is the form of the valve position of each operator scheme of gas confinement assembly and system.

The form of Figure 40 shows procedure schema, and wherein, valve state produces only inert gas compressor operator scheme.In procedure schema, as shown in figure 38 and as shown in the valve state of Figure 40, the first mechanical valve 2502 and the 3rd mechanical valve 2506 are in closedown configuration.Second mechanical valve 2504 and the 4th mechanical valve 2508 are in and open configuration.Owing to these concrete valves configure, compressed inert is allowed to flow to low consumption manifold 2513 and high consumption both manifolds 2525.Under normal operation, the noble gas from inert shell gas source and the clean dry air from CDA source are prevented from flowing to low consumption manifold 2513 and any one consumed in manifold 2525 high.

As shown in figure 40 and with reference to Figure 39, there is the series of valves state for safeguarding and recover.The gas confinement assembly of this teaching and each embodiment of system can need to safeguard every now and then, need from system failure recovery in addition.In this concrete pattern, the second mechanical valve 2504 and the 4th mechanical valve 2508 are in closedown configuration.First mechanical valve 2502 and the 3rd mechanical valve 2506 are in and open configuration.Inert shell gas source and CDA source provide noble gas, to be supplied to those parts being in the dead volume that low consumption and also having during restoration is difficult to effectively purge by low consumption manifold 2513.The example of this parts includes pneumatic actuator.By contrast, those parts of consumption can consume manifold 2525 by means of height during safeguarding and supply CDA.Valve 2504,2508,2530 isolation compressor is used to prevent the reactive materials of such as oxygen and steam from polluting the noble gas in compressor and reservoir.

After safeguarding or recovering to be complete, gas confinement assembly must be by some cycle purge, until the various reactive environments materials of such as oxygen and water have reached the of a sufficiently low level for every kind of material, such as 100ppm or lower, such as 10ppm or lower, 1.0ppm or lower or 0.1ppm or lower.As shown in figure 40 and with reference to Figure 39, during purge mode, the 3rd mechanical valve 2506 is closed and the 5th mechanical valve 2530 is also at closing configuration.First mechanical valve the 2502, second mechanical valve 2504 and the 4th mechanical valve 2508 are in and open configuration.Owing to this concrete valve configures, only inert shell gas is allowed to flowing and is allowed to flow to low consumption manifold 2513 and high consumption both manifolds 2525.

As shown in Figure 40 and with reference to Figure 38, " without the flowing " pattern that pattern and leak-testing pattern use the most as required." without flowing " pattern is the pattern with the configuration of following valve state: first mechanical valve the 2502, second mechanical valve the 2504, the 3rd mechanical valve 2506 and the 4th mechanical valve 2508 are in closing configuration.This closedown configuration causes " without flowing " pattern of system, wherein, all can not arrive low consumption manifold 2513 or high from any gas in inert gas source, CDA source or compressor source and consume manifold 2525.This " without flow pattern " is probably useful when system does not uses, and can keep the free time in extending the period.Leak-testing pattern can be used for the leakage in detecting system.Leak-testing pattern is used exclusively compressed inert, and system is isolated so that the low consumption parts (such as, isolator and pneumatic actuator) of low consumption manifold 2513 are carried out leak test by it from the high manifold 2525 that consumes of Figure 39.In this leak-testing pattern, the first mechanical valve the 2502, the 3rd mechanical valve 2506 and the 4th mechanical valve 2508 are in closing configuration.Only the second mechanical valve 2504 is in and opens configuration.As a result, compressed nitrogen can flow to low consumption manifold 2513 from compressor inert gas source 2519, and does not has the gas stream of paramount consumption manifold 5525.

Each embodiment of suspending bench can use, with the load of stable conveying such as OLED flat display substrate in any one in each embodiment of this gas confinement assembly instructed and system.It is contemplated that without the stable conveying of printing of load for such as oled substrate in any one in each embodiment of the friction suspending bench noble gas locking device that may be provided in this teaching.

Such as, in FIG, gas confinement assembly and system 2000 can include gas confinement assembly 1500, and it has access hatch 1512 and goes out port strobe 1522, for the substrate of such as OLED flat display substrate is movable into and out gas confinement system 2000.In Figure 37, gas confinement assembly and system 2400 can have the gas confinement assembly 1500 being supported on base portion 1200 illustrated, gas confinement assembly 1500 can accommodate OLED print system 50.During the inkjet printing that the substrate suspending bench 54 of OLED print system 50 is limited to OLED flat display substrate, substrate (not shown) may move through noble gas closed component and the stroke of system 2400.Before with reference to as described in Figure 38, each embodiment of gas confinement assembly and system can have external circuit, includes, but not limited to, e.g. compressor loop and vacuum source, and it may be provided in the pressurized inert gas and vacuum used in the operation of suspending bench.Before with reference to as described in Figure 39, used each embodiment of the external circuit of blower technology to can provide for operating pressurized inert gas and the vacuum source of suspending bench.

As it was noted above, each embodiment of the gas confinement assembly of this teaching and system can process from less than Gen3.5 substrate (it has the size of about 61cm × 72cm) and the OLED flat display substrate of a series of sizes of development of size in higher generation.It is envisaged that, each embodiment of gas confinement assembly and system can process Gen5.5 (having the size of about 130cm × 150cm) and female glass size of Gen7.5 (having the size of about 195cm × 225cm), and each substrate can cut into the flat board of eight 42 " or six 47 " and bigger.As it was noted above, Gen8.5 is about 220cm × 250cm, each of which substrate can cut into the flat board of six 55 " or eight 46 ".But, substrate constantly increases for size so that have about 285cm × 305cm size to be currently available that Gen10 seems not be last generation substrate size.Additionally, come from the size using the term of substrate based on glass to record to can be applicable to be applicable to the substrate of any material that OLED prints.Accordingly, there exist various substrate size and material needs stable conveying during printing in each embodiment of this gas confinement assembly instructed and system.

Figure 41 shows the suspending bench according to this each embodiment instructed.The suspending bench 700 of prior art can have district 710, wherein can apply pressure and vacuum by multiple ports.There is this district of pressure and vacuum control can effectively be provided by fluid (fluidic) spring with two-way stiffness between district 710 and substrate (not shown), thus form the notable control to the gap between substrate and district 710.The gap existed between load and suspending bench surface is referred to as hoverheight.The district in the district 710 of the suspending bench 700 of such as Figure 41 can be that the load of such as substrate provides controlled hoverheight, in described district, uses multiple pressure and vacuum ports to form the fluid spring with two-way stiffness.

Near district 710 is First Transition district 720 and the second transition region 722 respectively, and is then only pressure area 740 and 742 respectively near First Transition district 720 and the second transition region 722.In transition region, pressure is gradually increased towards only pressure area with the ratio of vacuum nozzle, to provide from district 710 to the gradually transition in district 740 and 7422.As shown in figure 41, Figure 42 shows the enlarged drawing in these three district.For each embodiment of substrate suspending bench the most as shown in figure 41, only pressure area 740,742 is shown as being made up of guide rail structure.For each embodiment of substrate suspending bench, the only pressure area of the only pressure area 740,742 of such as Figure 41 can be made up of continuous print plate, and such as Figure 41 is for shown by pressure-vacuum district 710.

For each embodiment of suspending bench shown in Figure 41, in pressure-vacuum district, transition region and only can there is substantially uniform height between pressure area, thus in tolerance, these three district is located substantially in a plane.Those of ordinary skill in the art is it will be appreciated that each district can change in length.Such as but not limited to, in order to provide the sensation of scale and ratio, for each substrate, transition region can be about 400mm, and only pressure area can be about 2.5m, and pressure-vacuum district can be about 800mm.

In Figure 41, only pressure area 740 and 742 does not provide the fluid spring with two-way stiffness, and does not the most provide district 710 available control.Therefore, the hoverheight of load is generally the biggest than the hoverheight at pressure-vacuum district upper substrate on only pressure area, in order to allow enough height, thus load will not be in only in pressure area with suspending bench collision.Such as but not limited to, can expect to process oled panel substrate to have the hoverheight between only pressure area about 150 μ to about 300 μ exceeding such as district 740 and 742, and then exceed the pressure-vacuum district in such as district 710 hoverheight between about 30 μ to about 50 μ.

For each embodiment of suspending bench 700, have the hoverheight providing variable not same district and for all districts result across the combination of the uniform height of suspending bench be, when substrate travels in suspending bench, substrate can be occurred to bend.Figure 43 A and Figure 43 B show when substrate 760 when suspending bench 700 travels over substrate bending.In Figure 43 A, when substrate 760 travels in suspending bench 700, substrate 760 rests on the part above pressure-vacuum district 710 and has the first hoverheight FH₁, and the part that substrate 760 rests on above only pressure area 740 has the second hoverheight FH₂, and substrate 760 rests on the part above transition region 720 and has variable hoverheight.In Figure 43 B, when substrate 760 travels in suspending bench 700 in the opposite direction, substrate 760 rests on the part above pressure-vacuum district 710 and has the first hoverheight FH₁, and the part that substrate 760 rests on above only pressure area 742 has the second hoverheight FH₂, and substrate 760 rests on the part above transition region 722 and can have variable hoverheight.As a result, arbitrary direct of travel of the substrate 150 above suspending bench 200 of the bending in substrate 760 is all obvious.

Accommodating for printing in the gas confinement assembly of print system such as but not limited to OLED display panel substrate and each embodiment of system instruct according to this, the bending of a certain degree of substrate can have no adverse effect for goods.But, for using each embodiment of the print procedure of gas confinement assembly and the system instructed according to this, substrate bending can have negative effect for goods.

Therefore, each embodiment of suspending bench shown in Figure 44 can have variable transition region height, in order to make the load of such as OLED flat display substrate keep general planar when substrate moves above suspending bench.Figure 44 shows in pressure-vacuum district 810 respectively and first only has the First Transition district 820 and the second transition region 822 being in tilted layout between only pressure area 842, pressure area 840 and second.Being in tilted layout of First Transition district 820 and the second transition region 822 provides difference in height between only pressure area 822, only pressure area 820, pressure-vacuum district 810 and first and second.As shown in figure 44, in tolerance, the first only pressure area 820 and the second only pressure area 822 is located substantially in same level, and pressure-vacuum district 810 is located substantially in the plane being parallel to only pressure area.By pressure-vacuum district 810 relative to first only pressure area 820 and the second almost parallel planar offset difference in height that only pressure area 822 limits, this difference in height compensate for the difference in the hoverheight above each district.

As described previously for described in each embodiment of substrate suspending bench shown in Figure 41, only pressure area 840,642 figure 44 illustrates as being made up of guide rail structure.For each embodiment of substrate suspending bench, the only pressure area of the only pressure area 840,842 of such as Figure 44 can be made up of continuous print plate, and such as Figure 44 is for shown by pressure-vacuum district 810.

As shown in Figure 45 A and Figure 45 B, each embodiment of suspending bench 700 for instructing according to this, have provide variable hoverheight not same district and for all districts result across the combination of the different height of suspending bench be that substrate can keep the layout of general planar at it when suspending bench travels over.

In Figure 45 A, when substrate 860 travels in suspending bench 800, substrate 860 rests on the part above pressure-vacuum district 810 and has the first hoverheight FH₁, and the part that substrate 860 rests on above only pressure area 840 has the second hoverheight FH₂.But, transition region 820 has in pressure-vacuum district 810 and only provides being in tilted layout of difference in height between pressure area 840, it is poor that this difference in height can compensate in pressure-vacuum district 810 and only hoverheight between pressure area 840, and substrate 860 keeps the layout of general planar at it when the district that these three is different travels over.In Figure 45 B, when substrate 860 travels in suspending bench 800, substrate 860 rests on the part above pressure-vacuum district 810 and has the first hoverheight FH₁, and the part that substrate 860 rests on above only pressure area 842 has the second hoverheight FH₂.But, transition region 842 has in pressure-vacuum district 810 and only provides being in tilted layout of difference in height between pressure area 842, it is poor that this difference in height can compensate in pressure-vacuum district 810 and only hoverheight between pressure area 842, and substrate 860 keeps the layout of general planar at it when the district that these three is different travels over.As a result, substrate 860 can keep the layout of general planar on arbitrary direct of travel of substrate 860 above suspending bench 800.

Each embodiment of suspending bench 700 and suspending bench 800 may be housed in gas lock, gas confinement assembly including this teaching, such as but not limited to for shown by Fig. 3, Figure 23 and Figure 29 and describe those, its can with rise for each system integration of function described in Figure 34.Each embodiment of gas lock and each embodiment (it can have each embodiment of the external circuit being provided that pressurized inert gas and vacuum, such as but not limited to for those described in Figure 38 and Figure 39) of gas lock and system can use each embodiment according to this suspending bench for carrying load in inert gas environment instructed.

All publications of mentioning in this description, patents and patent applications are all being incorporated by reference into herein in the degree that each individually disclosed thing, patents and patent applications are identical with being designated as independently being incorporated by reference into specially.

Although embodiment of the disclosure being shown and described herein, but it will be apparent to one skilled in the art that this embodiment provides the most by way of example.In the case of not departing from the present disclosure, those skilled in the art are now it is appreciated that many modification, change and substitute.Should be appreciated that the various alternatives that can use disclosure embodiment specifically described herein when putting into practice the disclosure.Claims are intended to limit the scope of the present disclosure, and thus contain the method and structure in the range of these appended claims and their equivalents.

Claims (15)

1. the method being used for the maintenance of Industrial printing systems, including:

Being controlled by process environment in gas confinement assembly in the specification limited, described process environment is different from the environment of described gas confinement component external, and described gas confinement assembly includes:

Limiting the first closed component section of the first volume of described gas confinement assembly, wherein the first closed component section is configured to accommodate described Industrial printing systems；Described Industrial printing systems includes the print head assembly with at least one printhead；

Limiting the second closed component section of the second volume of described gas confinement assembly, wherein said second closed component section is configured to accommodate at least one device of one of them performing maintenance program and calibrating procedure；

It is configured to optionally described first closed component section be placed in described second closed component section flow the first opening connected each other；And

The the second close opening optionally provided between described second closed component section and the environment of described gas confinement component external is provided；

Described print head assembly is positioned near described first opening；And

When described second opening is closed when described first opening is opened, at least one printhead performs one of them of maintenance program and calibrating procedure.

Method the most according to claim 1, it is characterised in that after being additionally included in the described print head assembly in location, sealing described first opening with described print head assembly, described second closed component section is separated by wherein said sealing with described first closed component section.

Method the most according to claim 1, it is characterized in that, also include by opening described second opening from the environment of described gas confinement component external close to described second closed component section, keep described second closed component section and described first closed component section isolation simultaneously.

Method the most according to claim 3, it is characterised in that also include being loaded in described second closed component section at least one of which of alternative print head and alternative print head assembly.

Method the most according to claim 4, it is characterised in that also include removing fault printhead and at least one of which of fault print head assembly from described second closed component section.

Method the most according to claim 4, it is characterized in that, by closing described second opening being environmentally isolated described second closed component section and described gas confinement component external, keep described second closed component section to isolate with described first closed component section simultaneously；And

Process environment in described second closed component section is controlled in the specification limited.

Method the most according to claim 1, it is characterised in that about 1% to about the 10% of the total measurement (volume) that the second volume is described gas confinement assembly of described second closed component section.

Method the most according to claim 1, it is characterised in that about 2% to about the 5% of the total measurement (volume) that the second volume is described gas confinement assembly of described second closed component section.

Method the most according to claim 1, it is characterised in that control described process environment and include that the level controlling reactive materials is to prevent the material and the pollution of substrate that process in described Industrial printing systems, to aoxidize and damage.

Method the most according to claim 9, it is characterised in that described reactive materials is controlled in the level of about 100ppm or lower.

11. methods according to claim 9, it is characterised in that described reactive materials is controlled in the level of about 1ppm or lower.

12. methods according to claim 1, it is characterised in that control to provide noble gas process environment in described process environment is included in described gas confinement assembly.

13. methods according to claim 12, it is characterised in that by using the gas selected from nitrogen, any rare gas and combinations thereof to provide described noble gas process environment.

14. methods according to claim 1, it is characterised in that control described process environment and be included in the process environment that low granule is provided in described gas confinement assembly.

15. methods according to claim 1, it is characterised in that described Industrial printing systems is configured to perform print routine to the substrate of the about the 10th generation size having for the about the 3.5th generation.