TWI618901B - Method for maintenance of an industrial printing system - Google Patents

Abstract

The present teachings are directed to various embodiments of hermetically sealed gas inclusion assemblies and systems that are easily transportable and assembled and that are provided for maintaining and encapsulating a minimum inert gas volume therein. The maximum access to various devices and equipment. Various embodiments of the hermetically sealed gas inclusion assembly and system of the present teachings can have a gas inclusion assembly that is constructed in a manner to minimize the internal volume of the gas inclusion assembly while simultaneously Workspace optimization to accommodate multiple footprints of various OLED printing systems. Various embodiments of the gas inclusion assembly thus constructed additionally provide for easy access to the interior of the gas enclosure assembly from the outside during processing, as well as easy internal access for maintenance while minimizing downtime .

Description

Method for maintaining an industrial printing system [Reciprocal Reference of Related Applications]

This application is a continuation-in-part application of U.S. Application Serial No. 13/720,830, filed on December 19, 2012. The present application claims the benefit of U.S. Provisional Application No. 61/732,173, filed on Nov. 30, 2012, and the benefit of U.S. Provisional Application No. 61/764,973, filed on Feb. 14, 2013. The full text of all cross-referenced applications is incorporated herein.

The present teachings are directed to various embodiments of hermetically sealed gas inclusion assemblies and systems that are easily transportable and assembled and that are provided for maintaining and encapsulating a minimum inert gas volume therein. The maximum access to various devices and equipment.

Interest in the potential of OLED display technology is driven by the attributes of OLED display technologies, including the validation of display panels with highly saturated colors, high contrast, ultra-thin, fast response, and energy efficient display panels. Additionally, a variety of substrate materials including flexible polymeric materials can be used to fabricate OLED display technologies. While the validation of displays for small screen applications (primarily for cell phones) has been used to underscore the potential of this technology, there are still challenges in extending manufacturing to larger scales. For example, it is made on a substrate larger than the 5.5th generation substrate having a size of about 130 cm X 150 cm. OLED displays have not been confirmed.

An organic light emitting diode (OLED) device can be fabricated by printing various organic thin films and other materials on a substrate using an OLED printing system. These organic materials can be easily damaged by oxidation and other chemical treatments. Having the OLED printing system in some way so that it can be scaled for various substrate sizes and can be done in an inert, substantially particle-free printing environment can present a variety of challenges. Because equipment for printing large panel substrates requires a lot of space, large facilities are maintained under an inert atmosphere (which continuously requires gas purification to remove reactive atmospheric species such as water vapor and oxygen, and organic solvent vapors). Put forward a lot of engineering challenges. For example, large facilities that provide a hermetic seal can present engineering challenges. In addition, the various cables, wiring and lines used to operate the printing system for feeding and feeding out of the OLED printing system are effective in meeting the specifications of the gas inclusions in terms of atmospheric composition such as oxygen and water vapor. Challenges arise because such cables, wiring, and lines can create large ineffective volumes, and such reactive species can be occluded in the void volume. In addition, it is desirable to maintain this facility in an inert environment for easy access to maintenance with minimal downtime. In addition to substantially non-reactive species, printing environments for OLED devices also require a substantially low particle environment. In this regard, providing and maintaining a substantially particle-free environment throughout the encapsulated system presents additional challenges, while particle reduction for treatments that can be performed under atmospheric conditions such as open-air, high flow laminar flow filters is not Ask these additional challenges.

Accordingly, there is a need for various embodiments of gas inclusions that can package an OLED printing system in an inert, substantially particle-free environment and can be easily scaled for use in a variety of substrate sizes and substrates. The OLED panel is fabricated on the material, while also providing easy access to the OLED printing system from the outside during processing and easy access to the interior. Perform maintenance with minimal downtime.

The present teachings disclose various embodiments of a gas inclusion assembly that is sealably constructed and integrated with a gas circulation assembly, a filtration assembly, and a purification assembly to form a gas inclusion assembly and system, the total gas inclusion The system can maintain an inert, substantially particle-free environment for processing that requires this environment. Such embodiments of the gas inclusion body assembly and system can maintain the content of each of the various reactive species at 100 ppm or less, such as 10 ppm or less, 1.0 ppm or less, or 0.1 ppm or less, Such reactive species include various reactive atmospheric gases such as water vapor and oxygen, as well as organic solvent vapors. In addition, various embodiments of the gas inclusion assembly provide a low particle environment that meets ISO 14644 Class 3 and Class 4 clean room standards.

One of ordinary skill in the art will appreciate the utility of embodiments of gas inclusion assemblies in a variety of technical fields. While many different techniques, such as chemistry, biotechnology, high technology, and pharmaceutical technology, may benefit from the teachings, OLED printing is used to illustrate the utility of various embodiments of gas inclusion assemblies and systems in accordance with the present teachings. Various embodiments of a gas inclusion assembly system that can package an OLED printing system can provide a number of features such as, but not limited to, a seal, an enclosure that provides a hermetic sealed envelope during construction and deconstruction cycles. Minimize volume and easy access to the interior from the outside during processing and maintenance. As will be discussed later, these features of various embodiments of the gas inclusion body assembly can have an effect on functionality such as, but not limited to, structural integrity, which provides for maintaining a low level of reactive species during processing. Convenient; and fast body volume rollover, which minimizes downtime during the maintenance cycle. Thus, the various features and specifications that provide utility for OLED panel printing can also provide benefits in a variety of technical fields.

As mentioned earlier, the 5.5th generation base is about 130cm X 150cm in specific dimensions. The manufacture of OLED displays on large substrates has not been confirmed. Since the early 1990s, the size of each generation of mother glass substrates has evolved for flat panel displays manufactured by technologies other than OLED printing. The first generation of mother glass substrates, referred to as Gen 1 (Gen 1), is approximately 30 cm x 40 cm, and thus can produce 15" panels. In the mid-1990s, the prior art for the production of flat panel displays has evolved to 3.5. The size of the mother glass substrate is about 60 cm x 72 cm.

With the advancement of generations, the size of the 7.5th and 8.5th generation mother glass has been put into production for processing other than OLED printing manufacturing. The 7.5th generation mother glass is approximately 195cm x 225cm in size and each substrate can be cut into eight 42" plates or six 47" plates. The mother glass used in the 8.5th generation is approximately 220 x 250 cm, and each substrate can be cut into six 55" plates or eight 46" plates. Quality assurance of OLED flat panel displays has been achieved, such as more realistic colors, higher contrast, thinness, flexibility, transparency and energy efficiency, while OLED manufacturing is actually limited to G 3.5 and smaller. Currently, OLED printing is believed to break this limitation and not only for the 3.5th and smaller mother glass sizes, but also for the largest mother glass sizes (such as the 5.5th, 7.5th, and 8.5th generations) to implement OLED panels. The best manufacturing technology for manufacturing. One of ordinary skill in the art will appreciate that one of the features of OLED panel printing includes the use of a variety of substrate materials such as, but not limited to, a variety of glass substrate materials and a variety of polymeric substrate materials. In this regard, the terminology recited by the terms used in the use of glass-based substrates is applicable to substrates suitable for any material used in OLED printing.

With regard to OLED printing, it has been found in accordance with the present teachings that maintaining a substantially low level of reactive species is associated with providing an OLED flat panel display that meets the necessary life specifications such as, but not limited to, atmospheric components such as oxygen and water vapor. And OLED inks Various organic solvent vapors used in the process. Lifetime specifications are particularly important for OLED panel technology because it is directly related to the durability of the display product; durability is the product specification for all panel technologies and is currently a challenge for OLED panel technology. In order to provide panels that meet the necessary life specifications, various embodiments of the gas inclusion system of the present teachings can be utilized to maintain the content of each of the reactive species, such as water vapor, oxygen, and organic solvent vapor, at 100 ppm or more. Low, for example 10 ppm or less, 1.0 ppm or less or 0.1 ppm or less. In addition, OLED printing requires an environment that is substantially free of particles. Maintaining a substantially particle-free environment for OLED printing is particularly important because even very small particles can cause visible defects on the OLED panel. At present, it is a challenge for OLED displays to meet the low defect levels required for commercialization. The additional challenge of maintaining a substantially particle-free environment throughout the encapsulated system does not present such additional challenges for particle reduction for treatments that can be performed under atmospheric conditions such as open-air, high flow laminar flow filters. Therefore, maintaining the necessary specifications for an inert, particle-free environment in large facilities presents multiple challenges.

The information summarized in Table 1 can be consulted to illustrate the need to print an OLED panel in a facility in which the content of each of the reactive species such as water vapor, oxygen, and organic solvent vapor can be maintained. At 100 ppm or less, for example, 10 ppm or less, 1.0 ppm or less, or 0.1 ppm or less. The data summarized in Table 1 was generated by testing each of the test coupons, which were made in red, green, and blue in a large pixel, spin coating format. An organic film composition for each of them. These samples are generally easier to manufacture and test in order to quickly evaluate various formulations and treatments. Although the sample test should not be confused with the life test of the print panel, the sample test can indicate the effect of various formulations and treatments on the life. The results shown in the table below represent variations in the processing steps of the manufacture of the sample, wherein the spin coating of the sample produced only in a nitrogen environment having a reactive species of less than 1 ppm The environment changes, which is compared to samples made in a similar manner but made in an air rather than a nitrogen environment.

By examining the data in Table 1 for samples made in different treatment environments, especially in the red and blue conditions, it is apparent that in effectively reducing the exposure of the organic film composition to reactive species. The printing can have a substantial impact on the stability of the various ELs and thus have a substantial impact on life.

Therefore, there is a challenge in printing OLEDs from the 3.5th generation to the 8.5th generation and larger while providing a robust inclusion environment that accommodates the OLED printing system in an inert, substantially particle-free gas package. In the body environment. It is contemplated that, in accordance with the present teachings, the gas inclusions will have a variety of attributes including, for example, but not limited to, a gas inclusion that can be easily scaled to provide an optimized workspace for the OLED printing system while A minimum inert gas volume is provided, and an easy access to the OLED printing system from the outside during processing is provided, while providing internal access for maintenance with minimal downtime.

In accordance with various embodiments of the present teachings, a gas inclusion assembly for various air-sensitive processes requiring an inert environment is provided, the gas inclusion assembly can include a plurality of wall frame members and ceiling frame members that can be sealed together. In some embodiments, a plurality of wall frame members and ceiling frame members can be fastened together using reusable fasteners such as bolts and threaded holes. For various embodiments of the gas inclusion assembly in accordance with the present teachings, a plurality of frame members can be constructed to define a gas enclosure frame assembly, each frame member including a plurality of panel frame segments.

The gas inclusion assembly of the present teachings can be designed to accommodate systems such as OLED printing systems in a manner such that the volume of the enclosure surrounding the system can be minimized. Various embodiments of the gas inclusion body assembly can be constructed in a manner to minimize the internal volume of the gas inclusion body assembly and at the same time optimize the workspace for accommodating various footprints of various OLED printing systems. Various embodiments of the gas inclusion assembly thus constructed additionally provide for easy access to the interior of the gas enclosure assembly from the outside during processing, as well as easy internal access for maintenance while minimizing downtime . In this regard, various embodiments of gas inclusion assemblies in accordance with the present teachings can be contoured for various footprints of various OLED printing systems. According to various embodiments, once the contoured frame member is constructed to form a gas enclosure frame assembly, various types of panels may be sealingly mounted in a plurality of panel sections including the frame members to complete the gas inclusions Installation of the assembly. In various embodiments of the gas inclusion assembly, a plurality of frame members (including, but not limited to, a plurality of wall frame members and at least one ceiling frame member) and a plurality of panels for mounting in the panel frame section are One location or multiple locations are manufactured and then constructed in another location. In addition, considering the transportable nature of the components of the gas inclusion assembly used to construct the present teachings, it may be reversed during the construction and deconstruction cycles. Various embodiments of the re-installation and removal of the gas inclusion assembly.

To ensure that the gas enclosure is hermetically sealed, various embodiments of the gas inclusion assembly of the present teachings are provided for joining each frame member to provide a frame seal. The interior may be sufficiently sealed, such as by a tight fit of the various frame members, which include gaskets or other seals. Once fully constructed, the sealed gas inclusion assembly can include an inner and a plurality of inner corner edges, at least one of which is provided at the intersection of each frame member and an adjacent frame member. One or more of the frame members (eg, at least half of the frame members) can include one or more compressible gaskets secured along one or more corresponding edges thereof. Once the plurality of frame members are joined together and an airtight panel is installed, the or the compressible gaskets can be assembled to create a hermetic sealed gas inclusion assembly. The sealed gas inclusion assembly can be formed with a corner edge of a frame member that is sealed by a plurality of compressible gaskets. One or more compressible gaskets may be provided for each frame member, such as, but not limited to, an interior wall frame surface, a top wall frame surface, a vertical sidewall frame surface, a bottom wall frame surface, and combinations thereof.

For various embodiments of the gas inclusion assembly, each frame member can include a plurality of sections that are framed and fabricated to receive any of a variety of panel types that are sealably mounted in each section In order to provide a hermetic panel seal for each panel. In various embodiments of the gas inclusion assembly of the present teachings, each segment frame can have a segment frame washer that, along with the selected fastener, ensures that each of the segment frames is mounted The panels provide a hermetic seal for each panel and thus provide a hermetic seal for the fully constructed gas enclosure. In various embodiments, the gas inclusion assembly can have one or more of a window panel or service window located in each of the wall panels; wherein each window panel or service window can have at least one glove pocket ( Gloveport). During the assembly of the gas inclusion assembly, each glove can be The glove is attached such that the glove can extend into the interior. According to various embodiments, each glove can have a hardware for mounting the glove, wherein the hardware is sealed with a gasket around each glove, which provides a hermetic seal for leakage or molecular diffusion through the glove minimize. For various embodiments of the gas inclusion assembly of the present teachings, the hardware is further designed to facilitate capping and uncapping of the glove for the end user.

Various embodiments of gas inclusion assemblies and systems in accordance with the present teachings can include a gas inclusion assembly formed from a plurality of frame members and panel sections, as well as a gas circulation assembly, a filtration assembly, and a purification assembly. For various embodiments of the gas inclusion assembly and system, a ductwork can be installed during the assembly process. In accordance with various embodiments of the present teachings, the conduit can be mounted in a gas enclosure frame assembly that has been constructed from a plurality of frame members. In various embodiments, a conduit can be mounted to the plurality of frame members prior to the plurality of frame members being joined to form the gas enclosure frame assembly. The conduits for various embodiments of the gas inclusion assembly and system can be assembled such that substantially all of the gas drawn into the conduit from one or more conduit inlets is moved through the gas inclusion assembly and system interior Various embodiments of gas circulation and filtration circuits for removing particulate matter. Additionally, the gas inclusion assembly and the conduits of various embodiments of the system can be configured to combine the inlet and outlet of the gas purification circuit external to the gas inclusion assembly with the gas circulation and filtration circuit within the gas inclusion assembly. separate.

For example, the gas inclusion assembly and system can have a gas circulation and filtration system inside the gas inclusion assembly. The internal filtration system can have a plurality of fan filtration units in the interior and can be configured to provide a laminar flow of gas in the interior. The laminar flow may be in the direction from the top of the interior to the bottom of the interior, or in any other direction. Although the airflow generated by the circulatory system does not need to be layered, the laminar flow of the gas can be used to ensure the gas in the interior. Bottom and complete flip. The laminar flow of gas can also be used to minimize turbulence, which is undesirable because it can cause particles in the environment to accumulate in such turbulent areas, thereby preventing the filtration system from removing them from the environment. particle. Furthermore, in order to maintain the desired temperature in the interior, a thermal conditioning system utilizing a plurality of heat exchangers, for example, operating, adjacent or in combination with a fan or another gas circulation device may be provided. The gas purification circuit can be assembled to circulate gas from the interior of the gas inclusion assembly through at least one gas purification component external to the enclosure. In this regard, the circulation and filtration system within the gas inclusion assembly, in combination with the gas purification circuit external to the gas inclusion assembly, provides continuous flow of substantially low particulate inert gas throughout the gas inclusion assembly. Circulating, the inert gas has a substantially low content of reactive species. Gas purification systems can be formulated to maintain very low levels of undesirable components such as organic solvents and their vapors, as well as water, water vapor, oxygen, and the like.

In addition to providing a gas circulation assembly, a filtration assembly, and a purification assembly, the conduit can also be sized and shaped to accommodate at least one of a wire, a wire harness, and various fluid-containing lines therein. With a relatively large void volume, atmospheric constituents such as water, water vapor, oxygen, and the like can be trapped in the void volume and difficult to remove by the purification system. In some embodiments, a combination of any of a cable, a wire and a wire harness, and a fluid containing line may be disposed substantially in the conduit and operatively associated with an electrical system, a mechanical system, a fluid system disposed within the interior At least one of the cooling systems is associated with each other. Since the gas circulation assembly, the filtration assembly, and the purification assembly can be assembled such that substantially all of the circulating inert gas passes through the conduit, the various bundle materials can be equivalent thereto by including various bundle materials in the conduit. The large ineffective volume effectively flushes away atmospheric constituents trapped in the ineffective volume of such bundled materials.

Various embodiments of gas inclusion assemblies and systems in accordance with the present teachings can include a gas inclusion assembly formed from a plurality of frame members and panel sections, as well as a gas circulation assembly, a filtration assembly, and a purification assembly, and additionally including pressurization Various embodiments of an inert gas recirculation system. As will be discussed in more detail later, this pressurized inert gas recirculation system can be utilized in a variety of pneumatically driven devices and equipment operations in the operation of OLED printing systems.

In accordance with the present teachings, several engineering challenges have been addressed to provide various embodiments of pressurized inert gas recirculation systems in gas inclusion assemblies and systems. First, under typical operation of a gas inclusion assembly and system of a non-pressurized system inert gas recirculation system, the gas inclusion assembly can be maintained at a small positive internal pressure relative to external pressure for gas inclusion assembly Prevent any outside air or air from entering the interior when any leaks occur in the system. For example, under typical operation, for various embodiments of the gas inclusion assembly and system of the present teachings, the interior of the gas enclosure assembly can be maintained at a pressure of, for example, at least 2 mbarg relative to the ambient atmosphere outside the enclosure system. For example, it is maintained at a pressure of at least 4 mbarg, maintained at a pressure of at least 6 mbarg, maintained at a pressure of at least 8 mbarg, or maintained at a higher pressure. Maintaining a pressurized inert gas recirculation system in a gas inclusion assembly system can be challenging because it maintains a small positive internal pressure of the gas inclusion assembly and system while continuously introducing pressurized gas to the gas inclusion total Dynamic and continuous balancing is proposed in the system. In addition, the variable requirements of various devices and devices can result in irregular pressure distributions for various gas inclusion assemblies and systems of the present teachings. Under these conditions, maintaining a dynamic pressure balance of the gas inclusion assembly maintained at a small positive pressure relative to the external environment provides the integrity of the ongoing OLED printing process.

For various embodiments of gas inclusion assemblies and systems, pressurized inert gas recirculation systems in accordance with the present teachings can include available compressors, accumulators, and blowers Various embodiments of pressurized inert gas circuits of at least one of the combinations and combinations thereof. Various embodiments of pressurized inert gas recirculation systems including various embodiments of pressurized inert gas circuits may have specially designed pressure controlled bypass circuits that may be used in the gas inclusion assemblies and systems of the present teachings. The internal pressure of the inert gas at a stable defined value is provided. In various embodiments of the gas inclusion assembly and system, the pressurized inert gas recirculation system can be configured to pass through when the pressure of the inert gas in the accumulator of the pressurized inert gas loop exceeds a predetermined threshold pressure A pressure controlled bypass circuit recirculates the pressurized inert gas. The critical pressure can, for example, range between about 25 psig to about 200 psig, or more specifically between about 75 psig to about 125 psig, or more specifically about 90 psig to Within the range of about 95 psig. In this regard, the gas inclusion assembly and system of the present teachings having a pressurized inert gas recirculation system having a specially designed pressure controlled bypass circuit can maintain a pressurized inertness in a hermetically sealed gas enclosure. The balance of the gas recirculation system.

In accordance with the present teachings, various devices and apparatus can be disposed in the interior and in fluid communication with various embodiments of a pressurized inert gas recirculation system having various pressurized inert gas circuits that can utilize a plurality of pressurized gases A source, such as at least one of a compressor, a blower, and combinations thereof. For various embodiments of the gas enclosures and systems of the present teachings, the use of various pneumatically operated devices and devices provides low particle generation performance and low maintenance. Exemplary devices and apparatus that may be disposed in the interior of the gas containment assembly and system and in fluid communication with various pressurized inert gas circuits may include, for example, but are not limited to, pneumatic robots, substrate floating tables, air bearings, air casings, One or more of a compressed gas tool, a pneumatic actuator, and combinations thereof. The substrate floating table and air bearing can be used to operate aspects of the OLED printing system of various embodiments of the gas inclusion assembly in accordance with the present teachings. For example, a substrate floating platform using air bearing technology can Used to transfer the substrate into a position in the printhead chamber and to support the substrate during the OLED printing process.

A‧‧‧pipeline/reactive species

B‧‧‧Wire/Inert Gas Species

C‧‧‧Coaxial cable

D‧‧‧Invalid space

FH ₁ ‧‧‧First levitation height

FH ₂ ‧‧‧Second levitation height

I‧‧‧First washer/first washer length/bundle

I’‧‧‧Washer segmentation

II‧‧‧Gasket/Second Washer Length/Pipeline

II’‧‧·washer segmentation

III‧‧‧Gas/Inert Gas

III’‧‧·washer segmentation

W ₁ ‧‧‧contact length

W ₂ ‧‧‧contact length

W ₃ ‧‧‧Contact length

V ₁ ‧‧‧ valve

V ₂ ‧‧‧ valve

V ₃ ‧‧‧ valve

V ₄ ‧‧‧ valve

10‧‧‧Embedded panel section

12‧‧‧Frame

14‧‧‧Blind threaded holes

15‧‧‧ screws

16‧‧‧Compressed washers

20‧‧‧window panel section

22‧‧‧Frame

30‧‧‧Service window panel section

32‧‧‧Frame

34‧‧‧Window guiding spacer

35‧‧‧Window folder

36‧‧‧Clamping seat

38‧‧‧Compressible washers

40‧‧‧Ceiling frame section

41‧‧‧ first side

42‧‧‧ ceiling frame beams

43‧‧‧ second side

44‧‧‧ ceiling frame beams

45‧‧‧First lighting element

46‧‧‧Lighting elements

47‧‧‧second lighting element

50‧‧‧OLED printing system

54‧‧‧Substrate floating table

56‧‧ ‧Bridge

58‧‧‧Air bearing

70‧‧‧ Granite table

87‧‧‧ spacer/spacer block

89‧‧‧ spacer/spacer block

90‧‧‧ interval block

91‧‧‧ spacer/spacer block

92‧‧‧ lateral side

93‧‧‧ spacer/spacer block

94‧‧‧ top surface

95‧‧‧ spacer/spacer block

96‧‧‧ bottom surface

97‧‧‧ spacer/spacer block

100‧‧‧ gas inclusion assembly

103‧‧‧Fan filter unit cover

105‧‧‧First ceiling frame duct

107‧‧‧Second ceiling frame duct

109‧‧‧Sheet metal panel section

110‧‧‧Embedded panel

120‧‧‧window panel

122‧‧‧ Panel frame

124‧‧‧ window

130‧‧‧Easy to remove service window

131‧‧‧Internal surface

132‧‧‧Service window frame

134‧‧‧ window

136‧‧‧Reaction toggle clamp

138‧‧‧Window handle

140‧‧‧Gloves

142‧‧‧ gloves

150‧‧‧ cover

151‧‧‧Internal surface

152‧‧‧ side

153‧‧‧External surface

154‧‧ rim

155‧‧‧ Screw rod

156‧‧‧ shoulder screws

157‧‧‧ head/shoulder head

160‧‧‧Gloves hardware assembly

161‧‧‧ rear panel

162‧‧‧Threaded screw head

163‧‧‧front board

164‧‧‧Flange

165‧‧‧ notch/opening

166‧‧‧ bayonet latch

167‧‧‧Lock recess

168‧‧‧ notch

169‧‧‧O-ring seals

200‧‧‧Frame component assembly

201‧‧‧ front peripheral edge

202‧‧‧Base

204‧‧‧Chassis

205‧‧‧ right peripheral edge

207‧‧‧ rear peripheral edge

210‧‧‧Front wall frame/first wall frame

210'‧‧‧Front wall panel / first wall panel

220‧‧‧ wall frame

220’‧‧‧Left wall panel/wall panel

226‧‧‧ top

227‧‧‧Top wall frame spacer

228‧‧‧ bottom

229‧‧‧Bottom wall frame spacer

230‧‧‧Right or third wall frame/wall frame

230'‧‧‧right wall panel / third wall panel / wall panel

240‧‧‧ wall frame

240'‧‧‧Rear wall panel/wall panel

250‧‧‧ ceiling frame

250'‧‧‧ Ceiling panel

251‧‧‧ internal part

300‧‧‧ Sealing assembly

302‧‧‧Gap/washer clearance

304‧‧‧Gap/washer clearance

306‧‧‧Washer clearance

310‧‧‧ wall frame / first wall frame

311‧‧‧Internal side/internal frame members

312‧‧‧ spacer

314‧‧‧Vertical side

315‧‧‧ top surface

316‧‧‧ Spacer

317‧‧‧Internal edge

320‧‧‧First washer/washer

321‧‧‧Vertical gasket length

323‧‧‧ Curved washer length

325‧‧‧Washer length/length

340‧‧‧Second washer/washer

345‧‧‧ length

350‧‧‧ wall frame/second wall frame

353‧‧‧External frame side

354‧‧‧Vertical side

355‧‧‧ top surface

356‧‧‧ Spacer

360‧‧‧First washer/washer

361‧‧‧ horizontal length

363‧‧‧ Curve length

365‧‧‧ length

370‧‧‧ ceiling frame

400‧‧‧ gas inclusion frame assembly

402‧‧‧lifter assembly

404‧‧‧lifter assembly

406‧‧‧lifter assembly

408‧‧‧ wear pad

410‧‧‧Installation board

412‧‧‧First clamp seat

413‧‧‧Second clamp seat

414‧‧‧First clamp

415‧‧‧second clamp

416‧‧‧ jack crank

418‧‧‧ jack shaft

422‧‧‧ jack base

424‧‧‧ feet

426‧‧‧ leveling feet

433‧‧‧Top panel ceiling

500‧‧‧ Pipeline assembly

502‧‧‧Inlet pipe assembly

505‧‧‧ ceiling duct

507‧‧‧ ceiling duct

510‧‧‧Front wall panel pipe assembly

511‧‧‧ openings

512‧‧‧Front wall panel inlet duct

514‧‧‧First front wall panel standpipe

515‧‧‧Export

516‧‧‧Second front wall panel standpipe

517‧‧‧Export

520‧‧‧Left wall panel pipe assembly

521‧‧‧ openings

522‧‧‧Left wall panel inlet duct

524‧‧‧First left side panel riser

525‧‧‧First pipe inlet end

526‧‧‧Second wall tube for left side wall panel

527‧‧‧Second pipe outlet

528‧‧‧ upper wall panel upper duct

530‧‧‧right wall panel assembly

531‧‧‧ openings

532‧‧‧ right wall panel inlet pipe

533‧‧‧pipe opening

534‧‧‧First wall tube for the right side wall panel

535‧‧‧First pipe inlet end

536‧‧‧Right wall panel second riser/rear wall panel upper duct

537‧‧‧Second pipe outlet

538‧‧‧ upper wall panel upper duct

540‧‧‧ rear wall duct assembly

541‧‧‧The first entrance to the rear wall panel

542‧‧‧Rear wall panel inlet duct

543‧‧‧Second entrance to the rear wall panel

544‧‧‧The bottom wall panel of the rear wall panel

545‧‧‧ vents

547‧‧‧Box

549‧‧‧Second frame/frame

600‧‧‧ gas inclusion assembly

605‧‧‧Return pipe

610‧‧‧Embedded panel

630‧‧‧right wall panel

631‧‧‧ openings

632‧‧‧ Pipes

633‧‧‧Sliding cover

634‧‧‧First bundle of pipe entrances

635‧‧‧ top

636‧‧‧Second bundle entrance

637‧‧‧上上

640‧‧‧ rear wall panel

700‧‧‧Floating table

710‧‧‧Pressure-vacuum zone

720‧‧‧First transition zone

722‧‧‧Second transition zone

740‧‧‧pressure zone only

742‧‧‧Heat exchanger / pressure zone only

744‧‧‧ heat exchanger

752‧‧‧Fan filter unit

754‧‧‧Fan filter unit

760‧‧‧Part of the substrate

800‧‧‧Floating station

810‧‧‧Pressure-vacuum zone

820‧‧‧First transition zone

822‧‧‧Second transition zone

840‧‧‧ only pressure zone

842‧‧‧ only pressure zone

860‧‧‧Substrate

1000‧‧‧ gas inclusion assembly

1010‧‧‧ gas inclusion assembly

1050‧‧‧Printing system

1051‧‧‧First isolation body

1052‧‧‧Floating table support

1053‧‧‧Second isolation

1054‧‧‧Substrate floating table

1058‧‧‧Substrate

1070‧‧‧Base

1070-1A‧‧‧Shaded line

1070-1B‧‧‧Shaded line

1070-2A‧‧‧Shaded structure

1070-2B‧‧‧Shaded structure

1071‧‧‧First upper surface/top surface

1072‧‧‧ first end

1073‧‧‧Second upper surface

1074‧‧‧second end

1075‧‧‧First standpipe

1076‧‧‧ first side

1077‧‧‧Second riser

1078‧‧‧ second side

1079‧‧ ‧Bridge

1080‧‧‧first print head assembly

1081‧‧‧Second print head assembly

1082‧‧‧Print head device

1083‧‧‧Printing head device

1084‧‧‧First print head assembly body

1085‧‧‧Second print head assembly body

1086‧‧‧First print head assembly opening

1088‧‧‧First print head assembly body rim

1089‧‧‧Second print head assembly body rim

1090‧‧‧First print head assembly positioning system

1091‧‧‧Second print head assembly positioning system

1092‧‧‧First X-axis bracket

1094‧‧‧First Z-axis movable board

1100‧‧‧Front frame assembly

1100’‧‧‧Front panel assembly

1120‧‧‧Front base frame / front body assembly base

1120'‧‧‧Front base panel assembly

1121‧‧‧First front body isolation body seat

1122‧‧‧Chassis

1123‧‧‧First front body insulation wall frame

1127‧‧‧Second front body insulation wall frame

1140‧‧‧Front wall frame

1140'‧‧‧Front wall panel assembly

1142‧‧‧ openings

1144‧‧ ‧Bridge frame

1146‧‧‧Inline frame

1147‧‧‧Washers

1148‧‧‧ openings

1150‧‧‧gate valve assembly

1151‧‧‧First track

1152‧‧‧second track

1153‧‧‧First bracket

1154‧‧‧second bracket

1158‧‧‧

1160‧‧‧Front ceiling frame

1160'‧‧‧ Ceiling panel assembly

1200‧‧‧Intermediate frame assembly

1200’‧‧‧Intermediate panel assembly

1220‧‧‧Intermediate body base

1220'‧‧‧Intermediate base panel assembly

1221‧‧‧First intermediate inclusion body seat

1222‧‧‧Chassis

1223‧‧‧First intermediate inclusion body wall frame

1224‧‧‧First frame member

1225‧‧‧ channel

1225'‧‧‧First isolation wall panel

1226‧‧‧Second frame member

1227‧‧‧Second intermediate inclusion body wall frame

1227'‧‧‧Second isolation wall panel

1228‧‧‧ panel

1230'‧‧‧First Intermediate Maintenance System Panel Assembly

1235‧‧‧First seal support panel

1237‧‧‧First outer surface

1238'‧‧‧First rear wall panel assembly

1240‧‧‧First intermediate body frame assembly

1240'‧‧‧First intermediate body panel assembly

1241‧‧‧First floor assembly

1241'‧‧‧ First floor assembly

1242‧‧‧The first print head assembly opening

1245‧‧‧First print head assembly butt washer

1247‧‧‧First print head assembly gate valve

1250‧‧‧First Maintenance System Assembly

1251‧‧‧First Maintenance System Positioning System

1252‧‧‧Drop Calibration Module

1253‧‧‧First Maintenance System Assembly Platform

1254‧‧‧ Washing basin module

1256‧‧‧ ink absorbing module

1260‧‧‧ ceiling frame assembly

1260'‧‧‧Intermediate wall and ceiling panel assembly

1261‧‧‧First Passage

1263‧‧‧First seal

1265‧‧‧second channel

1267‧‧‧Second seal

1270'‧‧‧Second intermediate maintenance system panel assembly

1275‧‧‧Second seal support panel

1277‧‧‧Second outer surface

1278‧‧‧Second rear wall frame assembly

1278'‧‧‧Second rear wall panel assembly

1280‧‧‧Second intermediate body frame assembly

1280'‧‧‧Second intermediate body panel assembly

1281'‧‧‧Second floor assembly

1282‧‧‧Second print head assembly opening

1285‧‧‧Second print head assembly butt washer

1287‧‧‧Second print head assembly gate valve

1290‧‧‧Second maintenance system assembly

1291‧‧‧Second maintenance system positioning system

1293‧‧‧Second Maintenance Assembly System Platform

1300‧‧‧ rear frame assembly

1300'‧‧‧ rear panel assembly

1320‧‧‧Back base frame

1320'‧‧‧ rear base panel assembly

1321‧‧‧First rear body isolation seat

1322‧‧‧Chassis

1323‧‧‧Rear intermediate inclusion body wall frame

1327‧‧‧Second rear body insulation wall frame

1340‧‧‧ rear wall frame

1340'‧‧‧ rear wall panel assembly

1360‧‧‧ Rear ceiling frame

1360'‧‧‧ rear ceiling panel assembly

1500‧‧‧Gas Inclusion Assembly/Gas Inclusion Assembly Chamber

1500-S1‧‧‧First frame member assembly section

1500-S2‧‧‧Second frame member assembly section

1510‧‧‧ entrance chamber

1512‧‧‧First entrance gate/gate

1514‧‧‧ brake

1520‧‧‧Outlet chamber

1522‧‧‧ brake

1524‧‧‧ brake

1550‧‧‧Substrate

1600‧‧‧System Controller

1700‧‧‧Pneumatic control system

1710‧‧‧Inert gas source

1712‧‧‧Valve

1720‧‧‧Vacuum source

1722‧‧‧ valve

2000‧‧‧Gas inclusion body assembly and system

2100‧‧‧Gas inclusion assembly and system

2130‧‧‧Gas purification system

2131‧‧‧ gas purification exit line

2132‧‧‧Solvent removal system

2133‧‧‧Entry line

2134‧‧‧Gas purification system

2140‧‧‧ Thermal Regulation System

2141‧‧‧Quencher

2142‧‧‧First heat exchanger

2143‧‧‧ Fluid outlet line

2144‧‧‧second heat exchanger

2145‧‧‧ fluid inlet line

2146‧‧‧ third heat exchanger

2150‧‧‧Filter system

2151‧‧‧Fan filter unit

2152‧‧‧Fan filter unit

2153‧‧‧Fan filter unit

2154‧‧‧Fan filter unit

2155‧‧‧Fan filter unit

2156‧‧‧Fan filter unit

2160‧‧‧Compressor circuit

2161‧‧‧First bypass inlet valve

2162‧‧‧Compressor

2163‧‧‧Second valve

2164‧‧‧ accumulator

2165‧‧‧Pressure controlled bypass circuit

2168‧‧‧Second accumulator

2169‧‧‧ Pressurized inert gas recirculation system

2170‧‧‧Pipe system

2171‧‧‧First pipe entrance

2172‧‧‧Second pipe entrance

2173‧‧‧First conduit

2174‧‧‧Second conduit

2175‧‧‧First pipe exit

2176‧‧‧Second pipe exit

2190‧‧‧Blower circuit

2192‧‧‧shell

2193‧‧‧First isolation valve

2194‧‧‧First blower

2195‧‧‧ check valve

2196‧‧‧Adjustable valve

2197‧‧‧Second isolation valve

2198‧‧‧ heat exchanger

2200‧‧‧Gas inclusion assembly and system

2300‧‧‧Gas inclusion assembly and system

2400‧‧‧Gas inclusion assembly and system

2500‧‧‧External loop

2501‧‧‧ gas inclusion assembly outlet

2502‧‧‧First mechanical valve

2503‧‧‧ lines

2504‧‧‧Second mechanical valve

2505‧‧‧ valve

2506‧‧‧ third mechanical valve

2507‧‧‧ check valve

2508‧‧‧fourth mechanical valve

2509‧‧‧Encapsulated inert gas source

2510‧‧‧Encapsulated inert gas lines

2512‧‧‧Clean dry air source/CDA source

2513‧‧‧Low consumption manifold

2514‧‧‧ Cross section first section

2516‧‧‧First flow contact

2518‧‧‧second flow contact

2520‧‧‧Compressor inert gas line

2522‧‧‧CDA line

2524‧‧‧High consumption manifold line

2525‧‧‧High consumption manifold

2526‧‧‧ third flow contact

2528‧‧‧ Cross section second section

2530‧‧‧Valve

2550‧‧‧vacuum system

2552‧‧‧ lines

2554‧‧‧Valves

3000‧‧‧Gas inclusion equipment

3100‧‧‧Gas inclusion assembly and system

A better understanding of the features and advantages of the present disclosure will be obtained by the accompanying drawings.

1 is a schematic illustration of a gas inclusion assembly and system in accordance with various embodiments of the present teachings.

2 is a left front perspective view of a gas enclosure assembly and system in accordance with various embodiments of the present teachings.

3 is a right front perspective view of a gas enclosure assembly in accordance with various embodiments of the present teachings.

4 depicts an exploded view of a gas enclosure assembly in accordance with various embodiments of the present teachings.

5 is an exploded front perspective view of a frame member assembly depicting various panel frame sections and section panels in accordance with various embodiments of the present teachings.

6A is a rear perspective view of the glove cartridge cover, and FIG. 6B is an expanded view of the shoulder screw of the glove cartridge cover in accordance with various embodiments of the gas enclosure assembly of the present teachings.

Figure 7A is an expanded perspective view of the bayonet latch of the glove gland cap assembly, and Figure 7B is a cross-sectional view of the glove gland cap assembly showing the head of the shoulder screw and the bayonet latch Engagement of the recess.

8A-8C are various embodiments of a gasket seal for forming a seam The top schematic.

9A and 9B are various perspective views depicting the sealing of frame members of various embodiments of gas inclusion assemblies in accordance with the present teachings.

10A-10B are various views related to sealing of segment panels in accordance with various embodiments of the gas enclosure assembly of the present teachings for receiving a service window that is easily removable.

11A-11B are enlarged perspective cross-sectional views associated with sealing of a segment panel in accordance with various embodiments of the present teachings for receiving an embedded panel or window panel.

12A is a base including a chassis and a plurality of spacer blocks resting on the chassis, in accordance with various embodiments of the present teachings. Figure 12B is an expanded perspective view of the spacer block indicated in Figure 12A.

13 is an exploded view of a wall frame member and a ceiling member associated with a chassis in accordance with various embodiments of the present teachings.

14A is a perspective view of one stage of construction of a gas enclosure assembly in accordance with various embodiments of the present teachings, with the elevator assembly in an elevated position. Figure 14B is an exploded view of the elevator assembly indicated in Figure 14A.

15 is a phantom front perspective view of a gas enclosure assembly depicting a conduit mounted within a gas enclosure assembly in accordance with various embodiments of the present teachings.

16 is an imaginary top perspective view of a gas enclosure assembly depicting a conduit mounted within a gas enclosure assembly in accordance with various embodiments of the present teachings.

Figure 17 is an imaginary bottom perspective view of the gas inclusion assembly, depicted in the root A conduit inside the gas enclosure assembly in accordance with various embodiments of the present teachings.

Figure 18A is a schematic representation showing a plurality of bundles of cables, wires and lines, and the like. Figure 18B depicts such a bundle of gas purges fed through various embodiments via a conduit in accordance with the present teachings.

Figure 19 is a diagram showing how reactive species that are immersed in the dead spaces of a plurality of bundles of cables, wires, pipelines, and the like are actively flushed by purging the tubes through which the selected passages are passed by inert gas (B). Schematic representation of (A).

20A is an phantom perspective view of cables and tubing for routing through a conduit in accordance with various embodiments of the present gas enclosure assembly and system. 20B is an enlarged view of the opening shown in FIG. 20A showing details of a cover for closing the opening in accordance with various embodiments of the gas enclosure assembly of the present teachings.

21 is a view of a ceiling for a gas enclosure assembly and system including a lighting system in accordance with various embodiments of the present teachings.

22 is a graph depicting LED spectra for an illumination system for a gas inclusion assembly and system components in accordance with various embodiments of the present teachings.

23 is a front perspective view of a view of a gas enclosure assembly in accordance with various embodiments of the present teachings.

24 depicts an exploded view of various embodiments of the gas enclosure assembly as depicted in FIG. 23, in accordance with various embodiments of the present teachings.

25 depicts a partially exploded front perspective view of various embodiments of a gas enclosure assembly in accordance with various embodiments of the present teachings.

Figure 26 depicts the gas as depicted in Figure 25 in accordance with various embodiments of the present teachings. A partially exploded side perspective view of various embodiments of the body pack assembly.

27A and 27B depict an expanded view of the gas enclosure assembly as depicted in FIG. 26, in accordance with various embodiments of the present teachings.

28 is a cross-sectional view through a frame member assembly in accordance with various embodiments of the present teachings, the frame member assembly including a base and a standpipe.

29 is a front perspective view of a view of a gas enclosure assembly in accordance with various embodiments of the present teachings.

FIG. 30 depicts an exploded view of various embodiments of the gas enclosure assembly as depicted in FIG. 29, in accordance with various embodiments of the present teachings.

31A is a cross-sectional view of a gas inclusion assembly in accordance with various embodiments of the gas enclosure depicted in FIG.

31B and 31C are cross-sectional views of the gas enclosure assembly depicted in FIG. 29 depicting the continuous movement of the printhead assembly moved into the maintenance position in accordance with various embodiments of the present teachings.

31D-31F are cross-sectional views of a gas inclusion assembly in accordance with various embodiments of the gas enclosure depicted in FIG.

32 depicts a perspective view of a maintenance station mounted in a frame assembly section of the gas enclosure assembly as depicted in FIG. 29, in accordance with various embodiments of the present teachings.

33 is a perspective view of a frame assembly section of the gas enclosure assembly as depicted in FIG. 29, in accordance with various embodiments of the present teachings.

34A and 34B are schematic illustrations of various embodiments of the gas inclusion assembly and associated system components of the teachings.

35 is a schematic illustration of a gas inclusion assembly and system depicting an embodiment of a gas cycle through a gas inclusion assembly in accordance with various embodiments of the present teachings.

36 is a schematic illustration of a gas inclusion assembly and system depicting an embodiment of a gas cycle through a gas inclusion assembly in accordance with various embodiments of the present teachings.

37 is a schematic cross-sectional view of a gas enclosure assembly in accordance with various embodiments of the present teachings.

38 is a schematic illustration of a gas inclusion assembly and system in accordance with various embodiments of the present teachings.

39 is a schematic illustration of a gas inclusion assembly and system in accordance with various embodiments of the present teachings.

40 is a table showing valve positions for various modes of operation of a gas inclusion assembly and system in accordance with various embodiments of the present teachings, the gas inclusion assembly and system utilizing an external gas circuit.

41 is a front perspective view depicting a floating table in accordance with various embodiments of the present teachings.

42 is an expanded view of the area indicated in FIG. 40 for a floating table in accordance with various embodiments of the present teachings.

43A and 43B are schematic cross-sectional views showing the curvature produced by the substrate during travel over the floating table as depicted in FIG.

44 is a front perspective view of a floating table depicting various embodiments of a floating table in accordance with the present teachings.

45A and 45B show the substrate on a floating table as depicted in FIG. A schematic cross-sectional view of a substantially flat arrangement during square travel.

As discussed above, various embodiments of the substrate floating table and air bearing can be used to operate the various embodiments of the OLED printing system packaged in the gas inclusion assembly in accordance with the present teachings. As schematically illustrated in FIG. 1 with respect to gas inclusion assembly and system 2000, a substrate floating table utilizing air bearing technology can be used to transfer the substrate into a position in the printhead chamber and for printing on the OLED. Support the substrate during the period. In FIG. 1 , the gas inclusion assembly 1500 can be a load lock system that can have an inlet chamber 1510 for receiving a substrate via a first inlet gate 1512 and a gate 1514 to route the substrate from the inlet chamber 1510 Move to the gas inclusion assembly 1500 for printing. Various gates in accordance with the present teachings can be used to isolate chambers from each other and from the surrounding environment. According to the present teachings, the various gates can be selected from physical gates and gas curtains.

During the substrate receiving process, the gate 1512 can be opened and the gate 1514 can be in a closed position to prevent atmospheric gases from entering the gas inclusion assembly 1500. Once the substrate is received in the inlet chamber 1510, both gates 1512 and 1514 can be closed, and the inlet chamber 1510 can be flushed using an inert gas such as nitrogen, a noble gas, or any combination thereof. Until the reactive atmospheric gas system is at a low level of 100 ppm or less, such as 10 ppm or less, 1.0 ppm or less, or 0.1 ppm or less. After the atmospheric gas reaches a sufficiently low level, the gate 1514 can be opened and the gate 1512 remains closed to allow the substrate 1550 to be transferred from the inlet chamber 1510 to the gas inclusion assembly chamber 1500, as depicted in FIG. Substrate transfer from the inlet chamber 1510 to the gas inclusion assembly chamber 1500 can be via, for example, but not limited to, a floating table provided in the chambers 1500 and 1510. Substrate transfer from the inlet chamber 1510 to the gas inclusion assembly chamber 1500 can also be via a substrate transfer robot, such as, but not limited to, a substrate transfer robot that can place the substrate 1550 into the chamber Floating platform provided in 1500. The substrate 1550 can remain supported on the substrate floating table during the printing process.

Various embodiments of the gas inclusion assembly and system 2000 can have an outlet chamber 1520 in fluid communication with the gas inclusion assembly 1500 via a gate 1524. According to various embodiments of the gas inclusion assembly and system 2000, after the printing process is complete, the substrate 1550 can be transferred from the gas inclusion assembly 1500 to the outlet chamber 1520 via the gate 1524. Substrate transfer from the gas inclusion assembly chamber 1500 to the exit chamber 1520 can be via, for example, but not limited to, floating stations provided in chambers 1500 and 1520. The substrate transfer from the gas inclusion assembly chamber 1500 to the outlet chamber 1520 can also be via a substrate transfer robot such as, but not limited to, a substrate transfer robot that can pick up the substrate 1550 from the floating table provided in the chamber 1500 and transfer it Into the chamber 1520. For various embodiments of the gas inclusion assembly and system 2000, when the gate 1524 is in the closed position to prevent reactive atmospheric gases from entering the gas inclusion assembly 1500, the substrate 1550 can be retrieved from the outlet chamber 1520 via the gate 1522.

In addition to the load lock system including the inlet chamber 1510 and the outlet chamber 1520 in fluid communication with the gas inclusion assembly 1500 via the gate 1514 and the gate 1524, the gas inclusion assembly and system 2000 can also include a system controller 1600. . System controller 1600 can include one or more processor circuits (not shown) in communication with one or more memory circuits (not shown). System controller 1600 can also be in communication with a load lock system including inlet chamber 1510 and outlet chamber 1520, and ultimately in communication with the print nozzles of the OLED printing system. In this manner, system controller 1600 can coordinate the opening and closing of gates 1512, 1514, 1522, and 1524. System controller 1600 can also control the ink distribution to the print nozzles of the OLED printing system. The substrate 1550 can be transported through various embodiments of the load lock system of the present teachings via, for example, but not limited to, a substrate floating platform utilizing air bearing technology or a combination of a substrate floating platform and a substrate transfer robot utilizing air bearing technology. The load lock system includes an inlet chamber 1510 and an outlet chamber 1520 in fluid communication with the gas inclusion assembly 1500 via a gate 1514 and a gate 1524, respectively.

Various embodiments of the load lock system of FIG. 1 can also include a pneumatic control system 1700 that can include a vacuum source and an inert gas source, which can include any of nitrogen, a rare gas, and any combination. The substrate floating system packaged in the gas inclusion assembly and system 2000 can include a plurality of vacuum ports and gas bearing ports, which are typically disposed on a flat surface. The substrate 1550 can be lifted from the hard surface by a pressure of an inert gas such as nitrogen, a noble gas, or any combination thereof, and held away from the hard surface. The outflow of the bearing volume is achieved by a plurality of vacuum ports. The levitation height of the substrate 1550 above the substrate floating table is typically a function of gas pressure and gas flow. The vacuum and pressure of the pneumatic control system 1700 can be used to support the substrate 1550 during disposal within the gas enclosure assembly 1500 in the load lock system of FIG. 1, such as during printing. Control system 1700 can also be used to support substrate 1550 during transport through the load lock system of FIG. 1, the load lock system including inlet chamber 1510 and outlet chamber in fluid communication with gas enclosure assembly 1500 via gate 1514 and gate 1524, respectively. 1520. In order to control the transfer substrate 1550 through the gas inclusion assembly and system 2000, system controller 1600 is in communication with inert gas source 1710 and vacuum source 1720 via valves 1712 and 1722, respectively. Additional vacuum and inert gas supply lines and valves (not shown) may be provided to the gas enclosure assembly and system 2000 illustrated in the load lock system of Figure 1 to further provide the various controls required to control the enclosed environment. Gas and vacuum facilities.

To provide a more holistic view of various embodiments of the gas inclusion assembly and system in accordance with the present teachings, FIG. 2 is a left front perspective view of various embodiments of the gas inclusion assembly and system 2000. 2 depicts a gas inclusion assembly 1500, an inlet chamber 1510, and a first gate 1512 The load lock system. The gas inclusion body assembly and system 2000 of FIG. 2 can include a gas purification system 2130 for providing the gas inclusion assembly 1500 with a substantially low level of reactive atmospheric species (such as water vapor and oxygen and printing by OLED). A constant supply of inert gas to treat the resulting organic solvent vapor). The gas inclusion assembly and system 2000 of Figure 2 also has a system controller 1600 for system control functions as discussed above.

3 is a right front perspective view of a fully constructed gas enclosure assembly 100 in accordance with various embodiments of the present teachings. The gas inclusion body assembly 100 can contain one or more gases for maintaining an inert environment within the interior of the gas inclusion body assembly. The gas inclusion assembly and system of the present teachings can be used to maintain an inert gas atmosphere in the interior. The inert gas can be any gas that does not undergo a chemical reaction under a defined set of conditions. Some common examples of inert gases may include any of nitrogen, a noble gas, and any combination thereof. The gas inclusion assembly 100 is assembled to surround and protect against air sensitive processing, such as organic light emitting diode (OLED) ink printing using an industrial printing system. Examples of atmospheric gases that react with OLED inks include water vapor and oxygen. As previously discussed, the gas inclusion assembly 100 can be assembled to maintain a sealed atmosphere and allow the assembly or printing system to operate efficiently while avoiding contamination, oxidation, and damage to other reactive materials and substrates.

As depicted in Figure 3, various embodiments of the gas enclosure assembly can include component parts including a front or first wall panel 210', a left or second wall panel (not shown), a right side or A third wall panel 230', a rear or fourth wall panel (not shown), and a ceiling panel 250', wherein the gas enclosure assembly can be attached to the chassis 204 resting on a base (not shown). As will be discussed in greater detail later, various embodiments of the gas enclosure assembly 100 of FIG. 1 may be from a front or first wall frame 210, a left or second wall frame (not shown), a right or third wall frame. 230, a rear or fourth wall panel (not shown) and a ceiling frame 250 are constructed. Ceiling frame Various embodiments of 250 may include a fan filter unit cover 103 and a first ceiling frame duct 105 and a second ceiling frame duct 107. In accordance with embodiments of the present teachings, various types of segment panels can be mounted in any of a plurality of panel segments including frame members. In various embodiments of the gas enclosure assembly 100 of Figure 1, the sheet metal panel section 109 can be welded into the frame member during construction of the frame. For various embodiments of the gas inclusion assembly 100, the types of segment panels that can be repeatedly installed and removed during the construction and deconstruction cycle of the gas inclusion assembly can include: embedded panels as indicated with respect to the wall panel 210' 110, and a window panel 120 as indicated by wall panel 230' and a service window 130 that is easily removable.

While the easy-to-remove service window 130 provides for easy access to the interior of the enclosure 100, any removable panel can be used to provide access to the gas enclosure assembly and the interior of the system for repair and periodic maintenance. service. This access for service or repair differs from that provided by a panel such as window panel 120 and service window 130 that is easily removable, such panels may provide for gas inclusions from outside the gas inclusion assembly during use. The end user's gloves inside the assembly are picked up. For example, as shown with respect to panel 230 in FIG. 3, any of the gloves, such as glove 142 attached to glove cassette 140, can provide access to internal end users during use of the gas enclosure assembly system. .

4 depicts an exploded view of various embodiments of the gas inclusion assembly depicted in FIG. Various embodiments of the gas enclosure assembly can have a plurality of wall panels including an outer side perspective view of the front wall panel 210', an outer side perspective view of the left side wall panel 220', an interior perspective view of the right side wall panel 230', and a rear wall An interior perspective view of the panel 240' and a top perspective view of the sky panel panel 250', as shown in FIG. 3, can be attached to the chassis 204 resting on the base 202. An OLED printing system can be mounted on top of the chassis 204, where printing processing is known to atmospheric conditions sensitive. According to the present teachings, the gas inclusion body assembly may be constructed from a frame member, such as the wall frame 210 of the wall panel 210', the wall frame 220 of the wall panel 220', the wall frame 230 of the wall panel 230', and the wall of the wall panel 240'. The frame 240 and the ceiling frame 250 of the ceiling panel 250' are then mounted in the plurality of segment panels in the frame members. In this regard, it may be desirable to simplify the design of the segment panels that can be repeatedly installed and removed during the construction and deconstruction cycles of various embodiments of the gas enclosure assembly of the present teachings. In addition, contouring of the gas inclusion assembly 100 can be performed to accommodate the footprint of various embodiments of the OLED printing system to minimize the volume of inert gas required in the gas inclusion assembly and in the gas inclusions The end user is provided with easy access during use and during maintenance.

Using the front wall panel 210' and the left side wall panel 220' as an example, various embodiments of the frame member can have a sheet metal panel section 109 that is welded into the frame member during construction of the frame member. The embedded panel 110, the window panel 120, and the easily removable service window 130 can be mounted in each of the wall frame members and can be repeatedly installed during the construction and deconstruction cycle of the gas enclosure assembly 100 of FIG. Remove. As can be seen, in the example of wall panel 210' and wall panel 220', the wall panel can have a window panel 120 adjacent the service window 130 that is easily removable. Similarly, as depicted in the exemplary rear wall panel 240', the wall panel can have a window panel such as a window panel 125 having two adjacent glove pockets 140. For various embodiments of the wall frame members in accordance with the present teachings, and as seen with respect to the gas enclosure assembly 100 of FIG. 3, this glove arrangement is provided from the exterior of the gas enclosure to the component portions of the encapsulated system. Easy to pick up. Thus, various embodiments of the gas enclosure can provide two or more glove pockets such that the end user can extend the left and right gloves into the interior and manipulate one or more items in the interior without disturbing the interior The composition of the gaseous atmosphere in the middle. For example, any of the window panel 120 and the service window 130 The positioning can be positioned to facilitate easy access to the adjustable components in the interior of the gas enclosure assembly from outside the gas inclusion assembly. According to various embodiments of window panels, such as window panel 120 and service window 130, such windows may not include glove and glove assembly when not received by an end user via glove/glove gloves.

Various embodiments of the wall panel and ceiling panel as depicted in FIG. 4 can have a plurality of embedded panels 110. As can be seen in Figure 4, the embedded panel can have a variety of shapes and aspect ratios. In addition to the inset panel, the ceiling panel 250' can also have a fan filter unit cover 103 that is mounted, bolted, screwed, secured, or otherwise secured to the ceiling frame 250, as well as the first ceiling frame duct 105 and the second ceiling frame Pipe 107. As will be discussed in greater detail later, a conduit in fluid communication with the conduit 107 of the ceiling panel 250' can be mounted in the interior of the gas enclosure assembly. According to the present teachings, the conduit may be part of a gas circulation system inside the gas inclusion assembly and provide a flow for separating the exit gas inclusion assembly for circulation through at least one gas purge external to the gas inclusion assembly Component.

5 is an exploded front perspective view of the frame member assembly 200, wherein the wall frame 220 can be constructed to include a complete complement of multiple panels. Although not limited to the illustrated design, the frame member assembly 200 using the wall frame 220 can be used as an example of various embodiments of the frame member assembly in accordance with the present teachings. Various embodiments of the frame member assembly can be comprised of various frame members and segment panels that are mounted in various frame panel sections of various frame members in accordance with the present teachings.

According to various embodiments of the various frame member assemblies of the present teachings, the frame member assembly 200 can be comprised of a frame member such as a wall frame 220. For various embodiments of the gas inclusion assembly, such as the gas inclusion assembly 100 of Figure 3, the processing of the equipment packaged in the gas inclusion assembly may require not only an airtight sealed package that provides an inert environment. Body, and need to be roughly No particulate matter environment. In this regard, frame members in accordance with the present teachings can utilize various sizes of metal tube materials for the construction of various embodiments of the frame. These metal tube materials address the desired material properties, including but not limited to: high integrity materials that will not degenerate to produce particulate matter, and frame members that produce high strength yet have the best weight to provide The gas inclusion assembly comprising various frame members and panel sections is conveniently conveyed, constructed and deconstructed from one location to another. One of ordinary skill in the art will readily appreciate that any material that meets such requirements can be used to produce the various frame members in accordance with the present teachings.

For example, various embodiments of frame members in accordance with the present teachings, such as frame member assembly 200, may be constructed from extruded metal lines. According to various embodiments of the frame members, aluminum, steel, and various metal composite materials can be used to construct the frame members. In various embodiments, metal tubes having dimensions such as, but not limited to, 2"wX2"h, 4"wX2"h, and 4"wX4"h and having a wall thickness of 1/8" to 1/4" can be used to construct Various embodiments of the frame members are taught. In addition, a variety of tubes or other forms of reinforcing fiber polymer composites may be utilized, the material properties of which include, but are not limited to, high integrity materials that will not degenerate to produce particulate matter, and produce high strength but It also has the best weight of frame members to provide convenient transfer, construction and deconstruction from one location to another.

With regard to the construction of various frame members from various sizes of metal tube materials, it is contemplated that welding can be performed to create various embodiments of the frame weldments. In addition, the construction of various frame members from various sizes of building materials can be accomplished using suitable industrial adhesives. It is contemplated that the construction of the various frame members should be performed in a manner that will not inherently create a leak path through the frame members. In this regard, for various embodiments of the gas inclusion assembly, the construction of the various frame members can be performed using any method that does not inherently create a leak path through the frame members. In addition, Various embodiments of frame members in accordance with the present teachings, such as wall frame 220 of Figure 4, may be painted or coated. For various embodiments of frame members made of metal line materials susceptible to, for example, oxidation, wherein the material formed at the surface can produce particulate matter, painting or coating or other surface treatment such as anodizing can be performed to prevent formation of particulate matter. .

The frame member assembly 200, such as the frame member assembly of FIG. 5, can have a frame member such as a wall frame 220. The wall frame 220 can have a top 226 to which the top wall frame spacer 227 can be fastened; and a bottom 228 to which the bottom wall frame spacer 229 can be fastened. As will be discussed in more detail later, the spacer plate mounted on the surface of the frame member is part of a gasket sealing system that is combined with a gasket seal of a panel mounted in the frame member section to provide A hermetic seal of various embodiments of the gas inclusion assembly is taught. A frame member, such as wall frame 220 of frame member assembly 200 of Figure 5, can have a number of panel frame segments, wherein each segment can be fabricated to receive various types of panels, such as, but not limited to, inlaid panel 110, window panel 120 and service window 130 that is easy to remove. Various types of panel sections can be formed in the construction process of the frame members. Types of panel sections may include, for example but without limitation, an inlaid panel section 10 for receiving the inset panel 110, a window panel section 20 for receiving the window panel 120, and a service window for receiving easy removal Service window panel section 30 of 130.

Each type of panel section can have a panel section frame for receiving a panel, and each panel can be sealingly fastened to each panel section in accordance with the present teachings to construct a hermetic sealed gas Inclusion body assembly. For example, in Figure 5 depicting a frame assembly in accordance with the present teachings, the inlaid panel section 10 is shown with a frame 12, the window panel section 20 is shown with a frame 22, and the service window panel section 30 is shown To have a frame 32. For this In various embodiments of the teaching wall frame assembly, the various panel section frames can be sheet metal materials that are welded into the panel sections using continuous bead to provide a hermetic seal. For various embodiments of the wall frame assembly, the various panel segment frames can be made from a variety of sheet materials, including building materials selected from the group of reinforced fiber polymer composites that can be mounted to the panel region using suitable industrial adhesives. In the paragraph. As will be discussed in more detail in the subsequent teachings of sealing, each panel section frame can have a compressible gasket disposed thereon to ensure that each panel can be mounted and fastened in each panel section. A hermetic seal is formed. In addition to the panel section frame, each panel member section may also have hardware associated with the positioning panel and securely fastening the panel to the panel section.

Various embodiments of the embedded panel 110 and the panel frame 122 for the window panel 120 may be constructed from metal materials such as, but not limited to, aluminum, various aluminum alloys, and stainless steel sheets. The properties of the panel material may be the same as those of the structural materials that make up the various embodiments of the frame member. In this regard, the material has properties for various panel members, including but not limited to: high integrity materials that will not degenerate to produce particulate matter, and panels that produce high strength yet have the best weight to provide from a single Convenient transfer, construction and deconstruction from location to location. Various embodiments, such as honeycomb core sheet materials, may have the necessary attributes for use as panel materials to construct the embedded panel 110 and the panel frame 122 for the window panel 120. The honeycomb core sheet material can be made from a variety of materials, namely metal and metal composites and polymeric materials, as well as polymeric composite honeycomb core sheets. When made of a metallic material, various embodiments of the removable panel can have a ground connection included in the panel to ensure that when the gas enclosure assembly is constructed, the entire structure is grounded.

Considering the gas inclusion assembly of the gas inclusion assembly used to construct the present teachings The transferable nature of the piece can be repeatedly installed and removed during use of the gas inclusion assembly and system to provide for the interior of the gas inclusion assembly. Pick up.

For example, panel section 30 for receiving service window panel 130 that is easily removable may have a set of four spacers, one of which is indicated as window guiding spacer 34. Additionally, the panel section 30 constructed to receive the service window panel 130 that is easily removable can have a set of four clamping cleats 36 that can be used to use a set of four reaction toggles. A clip 136 is used to clamp the service window 130 into the service window panel section 30, which are mounted on the service window frame 132 for each of the service windows 130 that are easily removable. Additionally, two of each of the window handles 138 can be mounted to the service window frame 132 that is easily removable for facilitating removal and installation of the service window 130 for the end user. The number, type and placement of removable service window handles can be changed. Additionally, the service window panel section 30 for receiving the service window panel 130 that is easily removable may have at least two window clips 35 selectively mounted in each of the service window panel sections 30. Although depicted as being located at the top and bottom of each of the service window panel sections 30, at least two window clips can be mounted in any manner for use in securing the service window 130 in the panel section frame 32. A window clip 35 can be removed and installed using a tool to allow removal and reinstallation of the service window 130.

The reaction toggle clamp 136 of the service window 130 and the hardware (including the clamp seat 36, the window guide spacer 34 and the window clamp 35) mounted on the panel section 30 can be constructed from any suitable combination of materials and materials. . For example, one or more of such elements can comprise at least one metal, at least one ceramic, at least one plastic, and combinations thereof. The removable service window handle 138 can be constructed from any suitable combination of materials and materials. For example, in these components One or more may comprise at least one metal, at least one ceramic, at least one plastic, at least one rubber, and combinations thereof. The inclusion window (such as window 124 of window panel 120 or window 134 of service window 130) may comprise any suitable material and combination of materials. According to various embodiments of the gas inclusion assembly of the present teachings, the inclusion window may comprise a transparent material and a translucent material. In various embodiments of the gas inclusion assembly, the inclusion window may comprise: a cerium oxide based material such as, but not limited to, such as glass and quartz; and various types of polymer based materials such as, but not limited to, various types of poly Carbonate, acrylic and vinyl. It will be understood by those of ordinary skill in the art that various composite materials of the exemplary window materials and combinations thereof can also be used as the transparent material and translucent material in accordance with the present teachings.

As can be seen from the frame member assembly 200 of FIG. 5, the service window panel 130 that is easily removable can have a glove pocket with a cover 150. Although Figure 3 shows all of the gloves having an outwardly extending glove, as shown in Figure 5, the glove can also be capped, depending on whether the end user needs to remotely internal the gas enclosure assembly. Pick up. As depicted in Figures 6A-7B, various embodiments of the closure assembly are provided for securely locking the lid to the glove when the end user is not using the glove, while at the same time providing ease when the end user wishes to use the glove Pick up.

A cover 150 is shown in FIG. 6A, which may have an interior surface 151, an exterior surface 153, and a side 152 that may be contoured for gripping. Three shoulder screws 156 extend from the rim 154 of the cover 150. As shown in FIG. 6B, each shoulder screw is disposed in the rim 154 such that the screw shaft 155 extends a predetermined distance from the rim 154 such that the head 157 does not abut the rim 154. In Figures 7A-7B, the glove raft hardware assembly 160 can be modified to provide a closure assembly including a locking mechanism for sealing when the bag is pressurized to have a positive pressure relative to the exterior of the package. Cover the gloves.

For the various embodiments of the glove 埠 hardware assembly 160 of FIG. 6A, the bayonet clamp can provide closure of the cover 150 on the glove raft hardware assembly 160 while providing a quick coupling design for the end user to pair the glove Easy to pick up. In the top expanded view of the glove box hardware assembly 160 shown in FIG. 7A, the glove box assembly 160 can include a rear panel 161 and a front panel 163 having a threaded screw head for mounting gloves 162 and flange 164. A bayonet latch 166 is shown on the flange 164 having a notch 165 for receiving a shouldered screw head 157 with a shoulder screw 156 (Fig. 6B). Each of the shoulder screws 156 can be aligned and engaged with each of the bayonet latches 166 of the glove box hardware assembly 160. The notch 168 of the bayonet latch 166 has an opening 165 at one end of the slot 168 and a locking recess 167 at the other end. Once each shoulder screw head 157 is inserted into each opening 165, the cover 150 can be rotated until the shoulder screw head abuts the end of the notch 168 near the locking recess 167. The cross-sectional view shown in Figure 7B depicts the locking features used to cap the glove when the gas enclosure assembly system is in use. During use, the internal gas pressure of the inert gas in the enclosure is higher than the pressure outside the gas enclosure assembly by a set amount. The positive pressure can fill the glove (Fig. 3) such that when the glove is compressed under the cover 150 during use of the gas enclosure assembly of the present teaching, the shoulder screw head 157 is moved into the locking recess 167, thereby Make sure the glove 埠 window will be securely capped. However, the end user can grasp the cover 150 by contouring the side 152 for gripping and easily disengage the cover secured in the bayonet latch when not in use. Figure 7B additionally shows the rear panel 161 on the interior surface 131 of the window 134, and the front panel 163 on the exterior surface of the window 134, each having an O-ring seal 169.

As will be discussed in more detail below with respect to the teachings of Figures 8A-9B, the wall The frame member and ceiling frame member seal together with the hermetic segment panel frame seal provide various embodiments of a hermetic sealed gas enclosure assembly for use in air sensitive processing requiring an inert environment. Components of the gas inclusion assembly and system that contribute to providing substantially low concentrations of reactive species and substantially low particulate environments may include, but are not limited to, hermetic sealed gas inclusion assemblies, and efficient piping including Gas circulation and particle filtration systems. Providing an effective hermetic seal for the gas inclusion body assembly can be challenging, especially where the three frame members are brought together to form a three-sided seam. Thus, the three-sided seam seal presents a particularly difficult challenge to provide an airtight seal that can be easily assembled for assembly and disassembly of the gas inclusion assembly during construction and deconstruction cycles.

In this regard, various embodiments of the gas inclusion assembly in accordance with the present teachings provide a fully constructed gas inclusion assembly and system gas via an effective gasket seal of the seam and an effective gasket seal around the load-bearing building component. Closed seal. Unlike conventional seam seals, seam seals in accordance with the present teachings: 1) include tightness from orthogonally oriented washer lengths at the top and bottom terminal frame joints (where the three frame members are joined) Uniform parallel alignment of the gasket segments to avoid angular seam alignment and sealing, 2) providing abutting length for forming the entire width across the seam, thereby increasing the sealing contact area at the three-sided joint 3) Designed to have spacers that provide uniform compression across all vertical and horizontal and top and bottom three-sided seam gasket seals. In addition, the choice of gasket material can affect the effectiveness of providing a hermetic seal, which will be discussed later.

8A-8C are top schematic views depicting a comparison of a conventional three-sided seam seal with a three-sided seam seal in accordance with the present teachings. In accordance with various embodiments of the gas inclusion assembly of the present teachings, there may be, for example, but not limited to, at least four wall frame members, ceiling frame members, and a chassis, each of which may be coupled to form a gas enclosure assembly, thereby creating a need A plurality of vertical, horizontal and three-sided seams of a hermetic seal. Figure 8A is a top plan view of a conventional three-sided gasket seal formed by a first gasket I oriented orthogonally to the gasket II in the XY plane. Shown in Figure 8A, slot oriented perpendicular to the XY plane formed by the contact having a length W ₁ between the two segments, the contact length is defined by the width dimension of the gasket. Additionally, as indicated by the hatching, the terminal portion of the washer III can abut the washer I and the washer II, which is a washer oriented orthogonally to both the washer I and the washer II in the vertical direction. Figure 8B is a top plan view of a conventional three-sided seam gasket seal formed by a first gasket length I, the first gasket length I being orthogonal to the second gasket length II and having a connection of two lengths of 45° A seam of a face, wherein the seam has a contact length W ₂ between the two segments, the contact length being greater than the width of the gasket material. Similar to the assembly of Fig. 8A, as indicated by the hatching, the end portion of the washer III can abut the washer I and the washer II, which is orthogonal to both the washer 1 and the washer II in the vertical direction. Assuming that the washers in FIGS. 8A and 8B have the same width, the contact length W _{2 of} FIG. 8B is greater than the contact length W _{1 of} FIG. 8A.

Figure 8C is a top schematic view of a three-sided seam gasket seal in accordance with the present teachings. The first washer length I may have a washer segment I' formed to be orthogonal to the direction of the length I of the washer, wherein the length of the washer segment I' is approximately the size of the width of the connected structural component, such as for forming The 4"w X 2"h or 4"w X 4"h metal tube of the various wall frame members of the gas inclusion assembly of the present teachings. The washer II is orthogonal to the washer I in the XY plane and has a washer segment II' having a length that overlaps the washer segment I', which is approximately the width of the connected structural component. The width of the gasket segments I' and II' is the width of the compressible gasket material selected. The washer III is oriented orthogonally to both the washer I and the washer II in the vertical direction. The washer segment III' is the end portion of the washer III. The washer segment III' is formed by the orthogonal orientation of the vertical length of the washer segment III' and the washer III. The gasket segment III' can be formed such that its length is about the same as the gasket segment I' and the gasket segment II', and the width is the thickness of the compressible gasket material selected. In this regard, the contact length W ₃ of the three alignment segments shown in FIG. 8C is greater than the length of the conventional triangular seam seal shown in any of FIG. 8A or FIG. 8B (with contact length, respectively) W ₁ and W ₂ ).

In this regard, the three-sided seam gasket seal in accordance with the present teachings produces a uniform horizontal alignment of the gasket segments at the terminal joints by washers that would otherwise be orthogonally aligned (as shown in Figures 8A and 8B). This uniform horizontal alignment of the three-sided seam gasket seal segments provides for a uniform transverse sealing force across the segments to promote airtight three sides at the top and bottom corners formed by the wall frame members Seam seal. In addition, each of the uniformly aligned washer segments of each three-sided seam seal is selected to be approximately the width of the joined structural component to provide a maximum contact length for the uniformly aligned segments. In addition, seam seals in accordance with the present teachings are designed to have spacer panels that provide uniform compressive forces across all of the vertical, horizontal, and three-sided gasket seals of the building seam. The width of the gasket material selected for the conventional three-sided seal given for the examples of Figures 8A and 8B can be considered to be at least the width of the joined structural component.

The exploded perspective view of Figure 9A depicts the seal assembly 300 according to the present teachings before all of the frame members are joined together to depict the gasket in an uncompressed state. In FIG. 9A, a plurality of wall frame members, such as wall frame 310, wall frame 350, and ceiling frame 370, may be sealingly joined in a first step of constructing a gas enclosure from various components of the gas enclosure assembly. The frame member seal according to the present teachings ensures that a substantial portion of the gas enclosure assembly is hermetically sealed once fully constructed and provides a seal that can be implemented during the construction and deconstruction cycle of the gas inclusion assembly. Although the examples given below with respect to the teachings of Figures 9A-9B are for sealing a portion of a gas enclosure assembly, one of ordinary skill in the art will appreciate that this The teachings are applicable to the entirety of any of the gas inclusion assemblies of the present teachings.

The first wall frame 310 depicted in Figure 9A can have an inner side 311 on which the spacer 312 is mounted, a vertical side 314, and a top surface 315 upon which the spacer 316 is mounted. The first wall frame 310 may have a first gasket 320 disposed in a space formed by the partition plate 312 and adhered to the space. The gap 302 remaining after the first gasket 320 is disposed in the space formed by the spacer 312 and adhered to the space can pass through the vertical length of the first gasket 320, as shown in FIG. 9A. As shown in FIG. 9A, the compliant gasket 320 can be disposed in the space formed by the spacer 312 and adhered to the space, and can have a vertical gasket length 321, a curved gasket length 323, and a gasket length 325, the gasket length 325 being formed. The length of the vertical washer 321 on the inner frame member 311 is 90° in the plane and terminates at the vertical side 314 of the wall frame 310. In FIG. 9A, the first wall frame 310 can have a top surface 315 to which the spacer 316 is mounted such that a space is formed on the surface 315 adjacent the inner edge 317 of the wall frame 310, and the second gasket 340 is arranged In this space and adhere to the space. The gap 304 remaining after the first gasket 340 is disposed in the space formed by the spacer 316 and adhered to the space can pass through the horizontal length of the second gasket 340, as shown in FIG. 9A. Moreover, as indicated by the hatching, the length 345 of the washer 340 is uniformly parallel and connected in alignment with the length 325 of the washer 320.

The second wall frame 350 depicted in Figure 9A can have an outer frame side 353, a vertical side 354, and a top surface 355 upon which the spacer 356 is mounted. The second wall frame 350 may have a first gasket 360 disposed in a space formed by the partition plate 356 and adhered to the space. The gap 306 remaining after the first gasket 360 is disposed in the space formed by the partition plate 356 and adhered to the space can accommodate the horizontal length of the first gasket 360, as shown in FIG. 9A. Shown in the middle. As depicted in FIG. 9A, the compliant washer 360 can have a horizontal length 361, a curved length 363, and a length 365 that is formed at 90° in the plane of the top surface 355 and terminates at the outer frame member 353.

As indicated in the exploded perspective view of Figure 9A, the inner frame member 311 of the wall frame 310 can be coupled to the vertical side 354 of the wall frame 350 to form a building seam of the gas enclosure assembly. With respect to the seal of the building seam thus formed, in various embodiments of the gasket seal at the terminal joint of the wall frame member according to the present teachings as depicted in FIG. 9A, the length 325 of the washer 320, the length of the washer 360 365 And the lengths 345 of the washers 340 are all aligned and evenly aligned. In addition, as will be discussed in greater detail later, various embodiments of the present spacer between the present teachings can provide uniform compression that is compressible between various embodiments of a gas inclusion assembly for hermetically sealing the present teachings. Between about 20% and about 40% deflection of the gasket material.

Figure 9B depicts the seal assembly 300 in accordance with the present teachings after all of the frame members have been joined together to depict the gasket in a compressed state. Figure 9B is a perspective view showing details of the angular seal of the three-sided seam formed at the top end joint between the first wall frame 310, the second wall frame 350, and the ceiling frame 370 shown in an imaginary view. As shown in FIG. 9B, the gasket space defined by the spacers can be determined to be a width such that after the wall frame 310, the wall frame 350, and the ceiling frame 370 shown in an imaginary view are joined together, Uniform compression between about 20% and about 40% of the compressible gasket material forming the vertical, horizontal and three-sided gasket seals ensures that the gasket seal at all surfaces sealed at the seam of the wall frame member provides airtightness Sealed. Additionally, the gasket gaps 302, 304, and 306 (not shown) are sized such that after optimal compression between about 20% to about 40% deflection of the compressible gasket material, each gasket can be filled The gasket gap is shown in Figure 9B with respect to washer 340 and washer 360. Thus, in addition to providing uniform compression by defining a space in which each gasket is disposed in the space and adhered to the space, various embodiments designed to provide a spacer between the gaps also ensure that each compressed gasket is The space defined by the spacers is accommodated without wrinkling or bulging in a compressed state or otherwise irregularly formed, thereby possibly forming a leak path.

In accordance with various embodiments of the gas enclosure assembly of the present teachings, various types of segment panels can be sealed using a compressible gasket material disposed on each of the panel segment frames. In combination with the frame member gasket seal, the position and material of the compressible gasket used to form the seal between the various segment panels and the panel segment frame provides a hermetic seal with little or no gas leakage. Gas inclusion assembly. In addition, the sealed design of all types of panels, such as the inlaid panel 110 of FIG. 5, the window panel 120, and the easily removable service window 130, provides a durable panel seal after repeated removal and installation of such panels. Repeated removal and installation of such panels is required to access the interior of the gas enclosure assembly for, for example, maintenance.

For example, FIG. 10A depicts an exploded view of service window panel section 30 and service window 130 that is easily removed. As previously discussed, the service window panel section 30 can be manufactured for receiving a service window 130 that is easily removable. For various embodiments of the gas enclosure assembly, a panel section such as the removable service panel section 30 can have a panel section frame 32 and a compressible gasket 38 disposed on the panel section frame 32. In various embodiments, the hardware associated with securing the service window 130 that is easily removable to the removable service window panel section 30 facilitates installation and reinstallation for the end user while ensuring The service window 130, which requires direct access to the interior of the gas enclosure assembly, needs to be easily removed, and the airtight seal is maintained when the service window 130 that is easily removed is installed and reinstalled in the panel 30. The service window 130 that is easily removable may include a rigid window frame 132 that may be, for example, but not limited to, the frame described for constructing the present teachings. The metal tube material of any of the structural members is constructed. The service window 130 can be fastened with a fast acting hardware such as, but not limited to, a reaction toggle clamp 136 to provide easy removal and reinstallation of the service window 130 by the end user. The glove cartridge hardware assembly 160 of FIGS. 7A-7B, previously shown in FIG. 10A, shows a set of three bayonet latches 166.

As shown in the front view of the removable service window panel section 30 of FIG. 10A, the service window 130 that is easily removable may have a set of four toggle clamps 136 that are secured to the window frame 132. The service window 130 can be positioned into the panel section frame 30 at a defined distance to ensure proper compression against the washer 38. A set of four window guiding spacers 34, as shown in FIG. 10B, can be used, which can be mounted in each corner of the panel section 30 to position the service window 130 in the panel section 30. A set of clamping seats 36 can be provided to receive the reaction toggle clamp 136 of the service window 130 that is easily removable. According to various embodiments of the hermetic seal of the service window 130 during the installation and removal cycle, the mechanical strength of the service window frame 132 is comparable to the service window 130 provided by the set of window guide spacers 34. The combination of the defined positions of the washers 38 ensures that the service window frame 132 can be in the panel once, for example, but not limited to, the use of the reaction toggle clamp 136 secured in the corresponding clamp seat 36 to secure the service window 130 in place. A uniform force is provided on the segment frame 32 with the defined compression set by a set of window guiding spacers 34. The set of window guiding spacers 34 are positioned such that the compressive force of the window 130 against the washer 38 deflects the compressible gasket 38 by between about 20% and about 40%. In this regard, the construction of the service window 130 and the manufacture of the panel section 30 provide a hermetic seal of the service window 130 in the panel section 30. As previously discussed, the window clamp 35 can be installed into the panel section 30 after the service window 130 is secured in the panel section 30, and the window clamp 35 is removed when the service window 130 needs to be removed.

The reaction toggle clamp 136 can be secured to the service window frame 132 that is easily removable using any suitable device and combination of devices. Examples of suitable fastening means that can be used include: at least one adhesive such as, but not limited to, epoxy or cement; at least one bolt; at least one screw; at least one other fastener; at least one notch; at least one track; A solder joint and its combination. The reaction toggle clamp 136 can be directly coupled to the removable service window frame 132 or indirectly via a connector plate. The reaction toggle clamp 136, the clamp seat 36, the window guide spacer 34, and the window clamp 35 can be constructed from any suitable combination of materials and materials. For example, one or more of such elements can comprise at least one metal, at least one ceramic, at least one plastic, and combinations thereof.

In addition to sealing the service window that is easy to remove, a hermetic seal can also be provided for the embedded panel and the window panel. Other types of segment panels that may be repeatedly installed and removed in the panel section include, for example, but are not limited to, the embedded panel 110 and the window panel 120, as shown in FIG. As can be seen in Figure 5, the panel frame 122 of the window panel 120 is constructed similarly to the embedded panel 110. Thus, depending on various embodiments of the gas enclosure assembly, the manufacture of the panel sections for receiving the embedded panels and window panels can be the same. In this regard, the same principle can be used to implement the sealing of the embedded panel and the window panel.

11A and 11B, and in accordance with various embodiments of the present teachings, any of the panels of a gas enclosure (such as the gas enclosure assembly 100 of FIG. 1) can include one or more embedded panel sections 10 The or the embedded panel sections can have a frame 12 that is assembled to receive a corresponding embedded panel 110. Fig. 11A is a perspective view showing an enlarged portion shown in Fig. 11B. In FIG. 11A, the embedded panel 110 is depicted as being positioned relative to the inlaid frame 12. As can be seen in Figure 11B, the embedded panel 110 is attached to the frame 12, wherein the frame 12 can be constructed, for example, from metal. In some embodiments, the metal may comprise aluminum, steel, copper, stainless steel, chromium, Alloys and combinations thereof and the like. A plurality of blind screw holes 14 can be made in the embedded panel section frame 12. The panel section frame 12 is constructed to include a gasket 16 between the embedded panel 110 and the frame 12 in which the compressible gasket 18 can be disposed. The blind screw hole 14 can be of the M5 variety. The screw 15 can be received by the blind screw hole 14 to compress the gasket 16 between the embedded panel 110 and the frame 12. Once secured against the gasket 16 in place, the inset panel 110 forms a hermetic seal in the embedded panel section 10. As discussed above, this panel seal can be implemented for a variety of segment panels, including but not limited to the embedded panel 110 and window panel 120 shown in FIG.

According to various embodiments of the compressible gasket of the present teachings, the compressible gasket material for the frame member seal and the panel seal can be selected from a variety of compressible polymer materials such as, but not limited to, closed-cell polymer materials. Any material in the class is also referred to in the art as an expanded rubber material or an expanded polymeric material. Briefly, a closed cell polymer is prepared in such a manner that a gas is encapsulated in discrete cell bodies; wherein each discrete cell system is encapsulated by a polymeric material. The properties of the compressible, closed cell polymer gasket material that are required for use in the hermetic seal of the frame assembly and the panel assembly include, but are not limited to, those materials that perform robustly under chemical corrosion by a wide range of chemical species; have excellent moisture resistance Characteristics; elastic in a wide range of temperatures; and its resistance to permanent compression deformation. In general, closed cell polymeric materials have higher dimensional stability, lower moisture absorption coefficient, and higher strength than open cell structured polymeric materials. The various types of polymeric materials used to make the closed cell polymeric material include, for example, but are not limited to, polyoxynium, neoprene, ethylene-propylene-diene terpolymer (EPT); - Polymers and composites made from propylene-diene monomer (EPDM), vinyl nitrile, styrene-butadiene rubber (SBR) and various copolymers and blends thereof Things.

The desired material properties of the closed cell polymer are maintained only when the cell body comprising the bulk material remains intact during use. In this regard, the use of this material in a manner that may exceed the material specifications set for the closed cell body polymer (e.g., beyond the specifications used in the specified temperature or compression range) may cause degradation of the gasket seal. In various embodiments of the closed cell polymer gasket for sealing the frame members and segment panels in the frame panel section, the compression of such materials should not exceed about 50% to about 70% deflection. And for optimum performance, the compression can be between about 20% and about 40% deflection.

In addition to the closed cell body compressible gasket material, another example of a class of compressible gasket materials having desirable properties for constructing an embodiment of a gas inclusion body in accordance with the present teachings includes a hollow extruded compressible gasket material category. As a material class, hollow extruded gasket materials have desirable properties including, but not limited to, those gasket materials that perform well under chemical corrosion of a wide range of chemical species; have excellent moisture barrier properties; and have a wide temperature range Elastic; and it is resistant to permanent compression deformation. These hollow extruded compressible gasket materials can be expressed in a wide variety of appearance sizes such as, but not limited to, U-shaped cell bodies, D-type cell bodies, square cell bodies, rectangular cell bodies, and a variety of custom-made exterior sizes. Any of the types of gasket materials. Various hollow extruded gasket materials can be made from polymeric materials used to seal cell body compressible gaskets. Various embodiments such as, but not limited to, hollow extruded gaskets can be made from polyoxyn, chloroprene, ethylene-propylene-diene terpolymer (EPT), using methyl-propylene-diene monomers ( Polymers and composites made from EPDM), vinyl styrene, styrene-butadiene rubber (SBR) and various copolymers and blends thereof. In order to maintain the desired properties, the compression of such hollow cell gasket materials should not exceed about 50% deflection.

One of ordinary skill in the art will readily appreciate that although a closed cell compressible gasket material class and a hollow extruded compressible gasket material class have been given as examples, any compressible gasket material having the desired properties can be used to seal. Structural components such as various wall frame members and ceiling frame members, as well as various panels in the sealed panel section frame, as provided by the present teachings.

A gas inclusion assembly (such as the gas inclusion assembly 100 of Figures 3 and 4, or the gas inclusion assembly 1000 of Figures 23 and 24 as will be discussed later) can be constructed from a plurality of frame members to enable The risk of damaging system components such as, for example but not limited to, gasket seals, frame members, pipes, and section panels. For example, a gasket seal is a component that can be easily damaged during construction of a gas enclosure by a plurality of frame members. In accordance with various embodiments of the present teachings, materials and methods are provided to minimize or eliminate the risk of damaging various components of the gas enclosure assembly during construction of the gas enclosure in accordance with the present teachings.

Figure 12A is a perspective view of the initial construction phase of a gas inclusion assembly such as the gas inclusion body assembly 100 of Figure 3. Although a gas inclusion assembly such as gas inclusion assembly 100 is used to exemplify the construction of the gas inclusion assembly of the present teachings, one of ordinary skill in the art will recognize that such teachings are applicable to various embodiments of gas inclusion assemblies. . As depicted in FIG. 12A, during the initial construction phase of the gas inclusion assembly, a plurality of spacer blocks are first placed on the chassis 204 supported by the base 202. The spacer blocks may be thicker than the compressible gasket material disposed on the various wall frame members mounted on the chassis 204. A series of spacer blocks can be placed at a plurality of locations on the peripheral edge of the chassis 204 at which various wall frame members of the gas enclosure assembly can be placed over a series of spacer blocks during assembly. And placed in a position close to the chassis 204 without contacting the chassis 204. It is desirable to assemble various wall frame members on the chassis 204 in some manner to enable protection against Any damage to the compressible gasket material disposed on the various wall frame members to seal against the chassis 204. Thus, the use of spacers prevents such damage to the compressible gasket material disposed on the various wall frame members to form a hermetic seal with the chassis 204 on which various wall panel assemblies can be placed onto the chassis 204. In the initial position. For example, without limitation, as shown in FIG. 12A, the front peripheral edge 201 can have spacers 93, 95, and 97 on which the front wall frame members can rest; the right peripheral edge 205 can have spacers 89 And 91, the right side wall frame member can rest on the spacers; and the rear peripheral edge 207 can have two spacers on which the rear wall frame members can rest, showing one of the spacers 87. Any number, type of spacer blocks, and combinations thereof can be used. One of ordinary skill in the art will appreciate that the spacer blocks can be positioned on the chassis 204 in accordance with the present teachings, although distinct spacer blocks are not illustrated in each of Figures 12A-14B.

An exemplary spacer block for various embodiments of assembling a gas enclosure from a component frame member in accordance with the present teachings is shown in FIG. 12B, which is a perspective view of a third spacer block 91 shown in the circled portion of FIG. 12A. The exemplary spacer block 91 can include a spacer block strap 90 attached to the lateral side 92 of the spacer block. The spacer block can be made of any suitable material and combination of materials. For example, each spacer block can comprise ultra high molecular weight polyethylene. The spacer strip 90 can be made of any suitable material and combination of materials. In some embodiments, the spacer strip 90 comprises a nylon material, a polyalkylene material, or the like. Spacer block 91 has a top surface 94 and a bottom surface 96. The spacer blocks 87, 89, 93, 95, 97 and any other spacer blocks used may be grouped together with the same or similar physical attributes and may comprise the same or similar materials. The spacer blocks may be placed, clamped, or otherwise easily disposed on the peripheral upper edge of the chassis 204 in a manner that allows for stable placement while being easily removed.

In the exploded perspective view presented in Figure 13, the frame member can include a front wall frame 210, a left side wall frame 220, a right side wall frame 230, a rear wall frame 240, and a ceiling or top frame 250 that can be attached to The chassis 204 rests on the base 202. The OLED printing system 50 can be mounted on top of the chassis 204.

The OLED printing system 50 of various embodiments of the gas inclusion assembly and system in accordance with the present teachings can include, for example, a granite base; a mobile bridge that can support an OLED printing device; and a self-pressurizing inert gas recirculation system One or more devices and devices, such as substrate floating tables, air bearings, rails, rails; inkjet printer systems for depositing OLED film-forming materials onto substrates, including OLED ink supply subsystems and inkjets Print head; one or more robots and the like. Various embodiments of OLED printing system 50 can have a variety of footprints and appearance sizes in view of the variety of components that can include OLED printing system 50.

An OLED inkjet printing system can be comprised of a number of devices and devices that allow for the secure placement of ink droplets to specific locations on a substrate. Such devices and devices may include, but are not limited to, a printhead assembly; an ink delivery system; a motion system; a substrate support device such as a float station or chuck; a substrate loading and unloading system; and a printhead maintenance system. The printhead assembly is comprised of at least one inkjet head having at least one orifice capable of ejecting ink droplets at a controlled rate, speed and size. The ink jet head is supplied by an ink supply system that supplies ink to the ink jet head. Printing requires relative movement between the print head assembly and the substrate. This movement is achieved by a motion system, typically a gantry or split shaft XYZ system. The print head assembly can be moved over the fixed substrate (gantry type), or the print head and the substrate can be moved in the case of the split shaft assembly. In another embodiment, the printing station can be fixed, and the substrate can be moved on the X-axis and the Y-axis relative to the printing head, wherein the substrate Z-axis motion is provided at or at the print head. As the print head moves relative to the substrate, ink droplets are ejected at the correct time to deposit them in the desired locations on the substrate. A substrate loading and unloading system is used to insert the substrate and remove the substrate from the printer. Depending on the printer unit, this can be done by a mechanical conveyor, a substrate floating table or a robot with an end effector. The printhead maintenance system can be comprised of a number of subsystems (i.e., modules) that allow for maintenance tasks such as droplet volume calibration, wiping of the inkjet nozzle surface, and activation to eject ink into the waste basin.

According to various embodiments of the present teachings relating to the assembly of gas enclosures, such as the front or first wall frame 210, the left or second wall frame 220, the right or third wall frame 230, the rear or the fourth as shown in FIG. The wall frame 240 and the ceiling frame 250 can be constructed together in a system order and then attached to the chassis 204 mounted on the base 202. As discussed above, various embodiments of the frame members can be positioned on the spacer block using a gantry crane to prevent damage to the compressible gasket material. For example, using a gantry crane, the front wall frame 210 can rest on at least three spacer blocks, such as spacer blocks 93, 95 and 97 on the peripheral upper edge 201 of the chassis 204 shown in Figure 12A. After the front wall frame 210 is placed on the spacer block, the wall frame 220 and the wall frame 230 may be successively or sequentially placed on the spacer block in any order, and the spacer blocks are respectively disposed on the chassis 204. The peripheral edge 203 and the peripheral edge 205. According to various embodiments of the present teachings for assembling a gas enclosure from a component frame member, the front wall frame 210 can be placed on the spacer block, and then the left side wall frame 220 and the right side wall frame 230 are placed on the spacer block. The left side wall frame and the right side wall frame are in position to be bolted or otherwise fastened to the front wall frame 210. In various embodiments, the rear wall frame 240 can be placed on the spacer block such that the rear wall frame is in place for bolting or fastening to the left side wall frame The frame 220 and the right side wall frame 230. For various embodiments, once the wall frames have been secured together to form an associated wall frame inclusion assembly, the top ceiling frame 250 can be attached to the wall frame inclusion assembly to form a complete gas inclusion frame. to make. In various embodiments of the present teachings relating to the construction of gas inclusion assemblies, the complete gas inclusion frame assembly is placed over a plurality of spacer blocks during this assembly phase to protect the integrity of the various frame member gaskets.

As shown in FIG. 14A, for various embodiments of the present teachings relating to the construction of a gas inclusion body assembly, the gas inclusion frame assembly 400 can then be positioned such that the spacers can be removed to facilitate the gas inclusion frame. Assembly 400 is attached to chassis 204 in preparation. FIG. 14A depicts a gas enclosure frame assembly 400 that is raised using lifter assembly 402, lifter assembly 404, and lifter assembly 406 to a position that is lifted from the spacer block and exits the spacer block. In various embodiments of the present teachings, lifter assemblies 402, 404, and 406 can be attached around the periphery of the gas enclosure frame assembly 400. After the lifter assemblies are attached, the fully constructed gas enclosure frame can be lifted from the spacer block by actuating each of the lifter assemblies to lift or extend each of the lifter assemblies The assembly, thereby enhancing the gas enclosure frame assembly 400. As shown in Figure 14A, the gas enclosure frame assembly 400 is shown as being lifted over a plurality of spacer blocks that were previously placed on the spacer blocks. The plurality of spacer blocks can then be removed from their resting position on the chassis 204 such that the frame can then be subsequently lowered onto the chassis 204 and subsequently attached to the chassis 204.

14B is an exploded view of the same elevator assembly 402 as depicted in FIG. 14A in accordance with various embodiments of the elevator assembly of the present teachings. As shown, the lifter assembly 402 includes a wear pad 408, a mounting plate 410, a first clamp mount 412, and a second clamp seat 413. The first clamp 414 and the second clamp 415 are shown as conforming to the corresponding clamp seat 412 and 413. A jack crank 416 is attached to the top of the jack shaft 418. The jack base 422 is shown as part of the lower end of the jack shaft 418. Below the jack base 422 is a footrest 424 that is assembled to receive the lower end of the jack shaft 418 and is connectable to the lower end of the jack shaft 418. Flattening feet 426 are also shown and are assembled to be received by foot 424. One of ordinary skill in the art will readily recognize that any device suitable for use in lifting operations may be used to raise the gas enclosure frame assembly from the spacer block such that the spacer block is removable and the complete gas inclusion assembly is lowered onto the chassis. For example, instead of one or more of the lifter assemblies such as 402, 404, and 406 described above, a hydraulic lifter, a pneumatic lifter, or an electric lifter can be used.

In accordance with various embodiments of the present teachings relating to the construction of a gas enclosure assembly, a plurality of fasteners can be provided and the plurality of fasteners assembled to secure a plurality of frame members together, and then the gas inclusion frame The assembly is fastened to the chassis. The plurality of fasteners can include one or more fastener portions disposed at each of the edges of each frame member at a location at which the corresponding frame members are assembled into a plurality of frame members An adjacent frame member intersects. A plurality of fasteners and compressible gaskets can be assembled such that when the frame members are joined together, the compressible gaskets are arranged close to the interior and the hardware is close to the exterior so that the hardware does not impart airtightness to the present teachings. The body assembly provides a plurality of leak paths.

The plurality of fasteners can include a plurality of bolts along an edge of one or more of the frame members, and a plurality of threaded holes along an edge of one or more of the plurality of frame members. A plurality of fasteners can include a plurality of fixed bolts. The bolts may include bolt heads that extend from the outer surface of the corresponding panel. The bolts can be recessed into the recesses in the frame member. Clamps, screws, rivets, adhesives, and other fasteners can be used to secure the frame members together. The bolts or other fasteners may extend through one of the frame members or The outer walls of the plurality are also inserted into threaded holes in the side walls or top walls of one or more adjacent frame members or other complementary fastener features.

As depicted in Figures 15-17, for various embodiments of the method for constructing a gas enclosure, the conduit can be mounted in an interior portion formed by joining the wall frame member and the ceiling frame member together. For various embodiments of the gas inclusion assembly, the conduit can be installed during the construction process. In accordance with various embodiments of the present teachings, the conduit can be mounted in a gas enclosure frame assembly that has been constructed from a plurality of frame members. In various embodiments, a conduit can be mounted to the plurality of frame members prior to the plurality of frame members being joined to form the gas enclosure frame assembly. The conduits for various embodiments of the gas inclusion assembly and system can be assembled such that substantially all of the gas from the one or more conduit inlet suction conduits is moved through the interior of the gas enclosure assembly for removal Various embodiments of gas circulation and filtration circuits for particulate matter. Additionally, the gas inclusion assembly and the conduits of various embodiments of the system can be assembled to remove the particulate matter from the inlet and outlet of the gas purge circuit external to the gas inclusion assembly and within the gas inclusion assembly. The gas circulation and filtration circuit are separated. Various embodiments of the conduits in accordance with the present teachings can be made from sheet metal such as, but not limited to, aluminum flakes having a thickness of about 80 mils.

15 depicts an anterior perspective view of the right front of the duct assembly 500 of the gas enclosure assembly 100. The body duct assembly 500 can have a front wall panel duct assembly 510. As shown, the front wall panel duct assembly 510 can have a front wall panel inlet duct 512, a first front wall panel riser 514, and a second front wall panel riser 516, both of which are front and front Wall panel inlet conduit 512 is in fluid communication. The first front wall panel riser 514 is shown with an outlet 515 that sealingly engages the ceiling duct 505 of the fan filter unit cover 103. In a similar manner, the second front wall panel riser 516 is shown with an outlet 517 that is coupled to the fan filter unit cover 103. The ceiling duct 507 is sealingly engaged. In this regard, the front wall panel duct assembly 510 is provided for utilizing the front wall panel inlet duct 512 to circulate inert gas from the bottom in the gas enclosure assembly via each of the front wall panel risers 514 and 516. And air is delivered via outlets 505 and 507, respectively, such that the air can be filtered by, for example, fan filter unit 752. As will be discussed in more detail later, the number, size, and shape of the fan filter units can be selected based on the physical location of the substrate in the printing system during processing. The system heat exchanger 742 is adjacent to the fan filter unit 752, which maintains the inert gas circulating through the gas inclusion assembly 100 at a desired temperature as part of the thermal conditioning system.

The right side wall panel duct assembly 530 can have a right side wall panel inlet duct 532 that is in fluid communication with the right side wall panel upper duct 538 via the right side wall panel first riser 534 and the right side wall panel second riser 536. The right side wall panel upper duct 538 can have a first duct inlet end 535 and a second duct outlet end 537 that is in fluid communication with the rear wall duct assembly 540 rear wall panel upper duct 536. The left side wall panel duct assembly 520 can have the same components as described with respect to the right side wall panel assembly 530, with the left side wall panel inlet duct 522 being clearly visible in Figure 15, the left side wall panel inlet duct passing through the first left side wall The panel riser 524 and the first left side wall panel riser 524 are in fluid communication with the left side wall panel upper duct (not shown). The rear wall panel duct assembly 540 can have a rear wall panel inlet duct 542 that is in fluid communication with the left side wall panel assembly 520 and the right side wall panel assembly 530. Additionally, the rear wall panel duct assembly 540 can have a rear wall panel bottom duct 544 that can have a rear wall panel first inlet 541 and a rear wall panel second inlet 543. The rear wall panel bottom duct 544 can be in fluid communication with the rear wall panel upper duct 536 via a first bulkhead 547 and a second bulkhead 549, which can be used to, for example, but not limited to, cables, wires, and pipelines, and Various bundles of analogs from gas inclusion assemblies The outside of 100 is fed into the interior. A conduit opening 533 is provided for removing a plurality of bundles of cables, wires and lines, and the like, from the rear wall panel upper conduit 536, which may pass through the upper conduit 536 via the bulkhead 549. The removable airtight sealed frame 547 and bulkhead 549 can be externally sealed using a removable embedded panel as previously described. The rear wall panel upper duct is in fluid communication with, for example, but not limited to, a fan filter unit 754 via a vent 545, one of which is shown in FIG. In this regard, the left side wall panel duct assembly 520, the right side wall panel duct assembly 530, and the rear wall panel duct assembly 540 are provided for inert gas using the wall panel inlet ducts 522, 532, and 542 and the rear panel lower duct 544, respectively. Circulating from the bottom in the gas inclusion assembly, the conduits being in fluid communication with the vents 545 via various risers, conduits, bulkhead passages and the like as previously described such that air may be passed through, for example, a fan filter unit 754 To filter. The system heat exchanger 744 is adjacent to the fan filter unit 754, which maintains the inert gas circulating through the gas inclusion assembly 100 at a desired temperature as part of the thermal conditioning system.

Cable feeding via opening 533 is shown in FIG. As will be discussed in greater detail later, various embodiments of the gas inclusion assembly of the present teachings are provided for passing a plurality of bundles of cables, wires and lines, and the like, through a conduit. In order to eliminate the leakage path formed around such bundles, various methods can be used for sealing different sizes of cables, wires and lines in a bundle using a conformal material. Also shown in Fig. 15 is conduit I and conduit II of the body conduit assembly 500, which are shown as part of the fan filter unit cover 103. The conduit I provides an inert gas to the outlet of the external air purification system, while the conduit II provides a purge of the inert gas to the gas circulation inside the gas inclusion assembly 100 and the reflux of the particle filtration circuit.

An imaginary perspective view of the top of the package duct assembly 500 is shown in FIG. The symmetrical nature of the left side wall panel duct assembly 520 and the right side wall panel duct assembly 530 can be seen. For the right side The wall panel duct assembly 530, the right side wall panel inlet duct 532 is in fluid communication with the right side wall panel upper duct 538 via the right side wall panel first riser 534 and the right side wall panel second riser 536. The right side wall panel upper duct 538 can have a first duct inlet end 535 and a second duct outlet end 537 that is in fluid communication with the rear wall duct assembly 540 rear wall panel upper duct 536. Similarly, the left side wall panel duct assembly 520 can have a left side wall panel inlet duct 522 that is in fluid communication with the left side wall panel upper duct 528 via the left side wall panel first riser 524 and the left side wall panel second riser 526. The left side wall panel upper duct 528 can have a first duct inlet end 525 and a second duct outlet end 527, wherein the second duct outlet end 527 is in fluid communication with the rear wall duct assembly 540 rear wall panel upper duct 536. Additionally, the rear wall panel duct assembly can have a rear wall panel inlet duct 542 that is in fluid communication with the left side wall panel assembly 520 and the right side wall panel assembly 530. Additionally, the rear wall panel duct assembly 540 can have a rear wall panel bottom duct 544 that can have a rear wall panel first inlet 541 and a rear wall panel second inlet 543. The rear wall panel bottom duct 544 can be in fluid communication with the rear wall panel upper duct 536 via the first bulkhead 547 and the second bulkhead 549. The duct assembly 500 shown in Figures 15 and 16 provides for efficient circulation of inert gas from the front wall panel duct assembly 510 which causes inert gas from the front wall panel inlet duct 512, respectively. Circulation to ceiling panel ducts 505 and 507 via front wall panel outlets 515 and 517; and effective circulation of inert gas from left side wall panel assembly 520, right side wall panel assembly 530 and rear wall panel duct assembly 540, The assembly circulates air from inlet conduits 522, 532, and 542 to vent 545, respectively. Once the inert gas is discharged into the body region below the fan filter unit cover 103 of the package 100 via the ceiling panel ducts 505 and 507 and the vent 545, the exhaust gas thus discharged can be filtered through the fan filter units 752 and 754. . In addition, the circulating inert gas can be maintained at a desired temperature by heat exchangers 742 and 744. Temperature, these heat exchangers are part of a thermal conditioning system.

Figure 17 is an imaginary view of the bottom of the body pipe assembly 500. The inlet duct assembly 502 includes a front wall panel inlet duct 512, a left side wall panel inlet duct 522, a right side wall panel inlet duct 532, and a rear wall panel inlet duct 542 that are in fluid communication with each other. For each inlet conduit included in the inlet conduit assembly 502, there are clearly visible openings that are evenly distributed across the bottom of each conduit, and for the purposes of this teaching, the collection of such openings is particularly prominent The opening 511 of the wall panel inlet duct 512, the opening 521 of the left side wall panel inlet duct 522, the opening 531 of the right side wall panel inlet duct 532, and the opening 541 of the rear wall panel inlet duct 542. These openings, which are clearly visible across the bottom of each inlet conduit, provide effective suction of the inert gas in the enclosure 100 for continuous circulation and filtration. Continuous circulation and filtration of the inert gases of various embodiments of the gas inclusion assembly provides for maintaining a substantially particle free environment in various embodiments of the gas inclusion assembly system. Various embodiments of the gas inclusion assembly system can be maintained at ISO 14644 level 4 for particulate matter. Various embodiments of the gas inclusion assembly system can maintain ISO 14644 Class 3 specifications for treatments that are particularly sensitive to particle contamination. As previously discussed, the conduit I provides an inert gas to the outlet of the external air purification system, while the conduit II provides a purge of the inert gas to the filtration and recycle loops within the gas inclusion assembly 100.

In various embodiments of gas inclusion assemblies and systems in accordance with the present teachings, a plurality of bundles of cables, wires and lines, and the like, are operatively associated with electrical systems disposed within the interior of the gas enclosure assembly and system , mechanical systems, fluid systems, and cooling systems (eg, for operation of OLED printing systems) are associated. These bundles can be fed via a conduit to flush reactive atmospheric gases, such as water vapor and oxygen, occluded in the dead spaces of the plurality of bundles of cables, wires and lines and the like. According to the teachings, it has been found that it is formed in a plurality of bundles of cables, wires and pipelines. The ineffective space creates a reservoir of occluded reactive species that can significantly extend the time it takes for the gas inclusion assembly to meet specifications for performing air sensitive processing. For various embodiments of the gas inclusion assemblies and systems that can be used to print OLED devices, each of the various reactive species includes various reactive atmospheric gases such as water vapor and oxygen, and organic solvent vapors, It can be maintained at 100 ppm or less, for example, 10 ppm or less, 1.0 ppm or less, or 0.1 ppm or less.

In order to understand how the cable fed via the conduit can result in reduced time spent rinsing the occluded reactive atmospheric gas from the ineffective volume of the bundled cables, wires and lines, and the like, reference is made to Figures 18A-19. . Figure 18A depicts an expanded view of beam I, which may be a bundle that may include a pipeline such as pipeline A, which is used to convey various inks, solvents, and the like to a printing system, such as printing system 50 of Figure 13. The bundle I of Figure 18A may additionally include an electrical wiring such as wire B, or a cable such as coaxial cable C. These lines, wires and cables can be bundled together and routed from the outside to the inside for connection to various devices and equipment including OLED printing systems. As seen in the shaded area of Figure 18A, these bundles can create a large dead space D. In the schematic perspective view of Fig. 18B, when the cable, wire and bundle I are fed via conduit II, the inert gas III can be continuously purged through the bundle. Figure 19 is an expanded cross-sectional view depicting how the inert gas is continuously purged through the bundled lines, wires, and cables to effectively increase the rate at which the occluded reactive species are removed from the ineffective volume in the bundles. The rate of diffusion of reactive species A (indicated by the collective region occupied by species A in Figure 19) from the ineffective volume and the reactive species outside the void volume (indicated by the collective region occupied by inert gas species B in Figure 19) The concentration is inversely proportional. In other words, if the concentration of the reactive species in the volume immediately outside the void volume is higher, the rate of diffusion decreases. If the concentration of reactive species in this region is self-tightening by inert gas flow As the volume outside the void volume decreases continuously, the rate at which the reactive species diffuse from the ineffective volume increases by mass action. In addition, by the same principle, as the occluded reactive species are effectively removed from their spaces, the inert gas can diffuse into the void volume.

20A is a perspective view of a rear corner of various embodiments of a gas inclusion assembly 600, and an imaginary view through the return conduit 605 into the interior of the gas inclusion assembly 600. For various embodiments of the gas enclosure assembly 600, the rear wall panel 640 can have an embedded panel 610 that is assembled to provide access to, for example, an electrical bulkhead. A bundle of cables, wires and lines, and the like, can be fed into the cable routing conduit via a bulkhead, such as the conduit 632 shown in the right side wall panel 630, wherein the removable embedded panel has been removed to reveal The route is routed into the bundle of the first cable, line, and bundle conduit entry 636. The bundle can be fed from the inlet into the interior of the gas enclosure assembly 600 and displayed in an imaginary view through the return conduit 605 in the interior of the gas enclosure assembly 600. Various embodiments of gas inclusion assemblies for cable, wire and line bundle routing may have more than one cable, wire and bundle inlet, such as shown in Figure 20A, and Figure 20A depicts the first for another bundle. A bundle conduit inlet 634 and a second bundle conduit inlet 636. Figure 20B depicts an expanded view of a bundle conduit inlet 634 for cables, wires, and bundles. The bundle conduit inlet 634 can have an opening 631 that is designed to form a seal with the sliding cover 633. In various embodiments, the opening 631 can accommodate a flexible sealing module, such as a module for cable entry sealing provided by Roxtec, which can accommodate a bundle of cables, wires and lines, and the like. Various diameters. Alternatively, the top portion 635 of the sliding cover 633 and the upper portion 637 of the opening 631 can have a conformal material disposed on each surface such that the conformal material can be fed through an inlet such as a beam conduit inlet 634. A bundle of cables, wires and lines of various sizes and sizes, and the like, are formed in a bundle.

21 is a bottom view of various embodiments of the ceiling panel of the present teachings, such as the gas enclosure assembly of FIG. 3 and the ceiling panel 250' of system 100. In accordance with various embodiments of the present teachings regarding the assembly of gas enclosures, the illumination can be mounted to an interior top surface of a ceiling panel, such as the gas enclosure assembly of Figure 3 and the ceiling panel 250' of system 100. As depicted in Figure 21, a ceiling frame 250 having an interior portion 251 can have illumination mounted on an interior portion of various frame members. For example, the ceiling frame 250 can have two ceiling frame sections 40 that collectively have two ceiling frame beams 42 and 44. Each ceiling frame section 40 can have a first side 41 that is positioned toward the interior of the ceiling frame 250 and a second side 43 that is positioned toward the exterior of the ceiling frame 250. For various embodiments that provide illumination for the gas enclosure in accordance with the present teachings, pairs of illumination elements 46 can be installed. Each pair of lighting elements 46 can include a first lighting element 45 proximate the first side 41 of the ceiling frame section 40 and a second lighting element 47 proximate the second side 43 of the ceiling frame section 40. The number, positioning, and grouping of lighting elements shown in Figure 21 are exemplary. The number and grouping of lighting elements can be varied in any desired manner or in a suitable manner. In various embodiments, the lighting elements can be mounted flat, while in other embodiments the lighting elements can be mounted such that they can be moved to a variety of positions and angles. The placement of the lighting elements is not limited to the top panel ceiling 433, but may alternatively or alternatively be mounted to the gas enclosure assembly shown in FIG. 3 and any other interior surface of the system 100, A combination of external surfaces and surfaces.

The various lighting elements can include any number, type of lamps, or combinations thereof, such as halogen lamps, white lamps, incandescent lamps, arc lamps, or light emitting diodes or devices (LEDs). For example, each lighting element can include from 1 LED to about 100 LEDs, from about 10 LEDs to about 50 LEDs, or more than 100 LEDs. LEDs or other illumination devices can be emitted in the chromatogram, outside the chromatogram or a combination thereof Any color or combination of colors. According to various embodiments of gas inclusion assemblies for ink jet printing OLED materials, the wavelength of light of the illumination device mounted in the gas enclosure assembly can be specifically selected because some materials are sensitive to light of some wavelengths. To avoid material degradation during processing. For example, a 4X cool white LED can be used, or a 4X yellow LED or any combination thereof can be used. An example of a 4X cold white LED is LF1B-D4S-2THWW4 available from IDEC Corporation (Sunnyvale, California). An example of a 4X yellow LED that can be used is LF1B-D4S-2SHY6, also available from IDEC Corporation. The LED or other lighting element can be positioned or suspended from the inner portion 251 of the ceiling frame 250 or anywhere on the other surface of the gas enclosure assembly. Lighting elements are not limited to LEDs. Any suitable lighting element or combination of lighting elements can be used. Figure 22 is a graph of the IDEC LED spectrum and shows the x-axis corresponding to the intensity when the peak intensity is 100% and the y-axis corresponding to the wavelength (in nanometer). Shows the spectrum of LF1B yellow, yellow fluorescent, LF1B white LED, LF1B cool white LED and LF1B red LED. Other spectra or combinations of spectra may be used in accordance with various embodiments of the present teachings.

Recalling the foregoing, various embodiments of gas inclusion assemblies are constructed in a manner that minimizes the internal volume of the gas inclusion assembly and simultaneously accommodates various footprints of various OLED printing systems. optimization. Various embodiments of the gas inclusion assembly thus constructed additionally provide for easy access to the interior of the gas enclosure assembly from the outside during processing, as well as easy internal access for maintenance while minimizing downtime . In this regard, various embodiments of gas inclusion assemblies in accordance with the present teachings can be contoured for various footprints of various OLED printing systems.

One of ordinary skill in the art will appreciate that the teachings of frame member construction, panel construction, frame and panel sealing, and gas inclusion assembly (such as gas inclusion assembly 100 of Figure 3) can be applied to a variety of sizes and designs. The gas inclusion body assembly. Shaping the inclusion of various gases such as, but not limited to, the present teachings encompass 3.5th generation through substrate 10 instead of the size of the contoured assembly embodiments may have an internal volume of between about 6m ³ to about 95m ^3, which may be A volume of between about 30% and about 70% is saved for an enclosure that is not contoured and has a relatively large size. Various embodiments of the gas inclusion assembly can have various frame members that are configured to provide a contour of the gas enclosure assembly to accommodate the OLED printing system to perform its function while optimizing the workspace. The inert gas volume is minimized and also allows easy access to the OLED printing system from the outside during processing. In this regard, the various gas inclusion assemblies of the present teachings can vary in topology and volume through contour shaping.

Figure 23 provides an example of a gas inclusion assembly in accordance with the present teachings. The gas inclusion assembly 1000 can include a front frame assembly 1100, an intermediate frame assembly 1200, and a rear frame assembly 1300. The front frame assembly 1100 can include a front base frame 1120; a front wall frame 1140 that can have an opening 1142 for receiving a substrate; and a front ceiling frame 1160. The intermediate frame assembly 1200 can include a first intermediate package frame assembly 1240, an intermediate wall and ceiling frame assembly 1260, and a second intermediate package frame assembly 1280. The rear frame assembly 1300 can include a rear base frame 1320, a rear wall frame 1340, and a rear ceiling frame 1360. The hatched area depicts the available working volume of the gas assembly 1000, which can be used to accommodate the volume of the OLED printing system. Various embodiments of the gas inclusion assembly 1000 are contoured to minimize the volume of recycled inert gas required to operate an air sensitive process such as an OLED print process, while at the same time allowing for easy OLED printing systems Pick up (remote access during operation, or direct access via easy access via easy-to-remove panels). For various embodiments of gas inclusion assemblies of substrate sizes from 3.5th to 10th generations in accordance with the present teachings, various embodiments of contoured gas inclusion assemblies in accordance with the present teachings can have from about 6 m ³ to A gas inclusion volume between about 95 ^m3 , such as, but not limited to, between about 15 ^m3 and about 30 ^m3 , which can be used for OLED printing of, for example, 5.5th to 8.5th generation substrate sizes. In accordance with certain embodiments of the present invention, a substrate support apparatus can support a substrate having a size between about 5th generation and about 10th generation. In accordance with certain embodiments of the present invention, a substrate support apparatus can support a substrate having a size between about 3.5th generation and about 8.5th generation.

The gas inclusion assembly 1000 can have all of the features recited in the present teachings with respect to the exemplary gas inclusion assembly 100. For example, without limitation, the gas inclusion assembly 1000 can utilize a seal according to the present teachings that provide a hermetic seal type enclosure during construction and deconstruction cycles. Various embodiments of the gas inclusion system based on the gas inclusion body assembly 1000 can have a gas purification system that maintains the content of each of the various reactive species at 100 ppm or less, for example, 10 ppm or Lower, 1.0 ppm or lower, or 0.1 ppm or lower, such reactive species include various reactive atmospheric gases such as water vapor and oxygen, as well as organic solvent vapors.

In addition, various embodiments of gas inclusion assemblies and systems based on gas inclusion assembly 1000 can have a circulation and filtration system that provides ISO 14644 Class 3 and Class 4 clean room standards. No particle environment. Additionally, as will be discussed in greater detail later, various embodiments of gas inclusion assembly systems based on the present teachings of gas inclusion assemblies (such as gas inclusion assembly 100 and gas inclusion assembly 1000) may have Various embodiments of a pressurized inert gas recirculation system operable to operate, for example, but not limited to, a pneumatic robot, a substrate floating table, an air bearing, an air casing, a compressed gas tool, a pneumatic actuator, and One or more of the combinations. For various embodiments of the gas enclosures and systems of the present teachings, the use of various pneumatically operated devices and devices provides low particle generation performance and low maintenance.

24 is an exploded view of a gas inclusion assembly 1000 depicting various frame members that can be constructed to provide a hermetic sealed gas enclosure in accordance with the present teachings. As discussed above with respect to various embodiments of the gas enclosure 100 of FIGS. 3 and 13, the OLED inkjet printing system 1050 can be comprised of a number of devices and devices that allow ink droplets to be deposited onto a substrate such as substrate 1058. The substrate is shown as being supported by the substrate floating table 1054 with a reliable placement at a particular location. The substrate floating station 1054 can be used to support the substrate 1058 and provide frictionless delivery of the substrate 1058. The substrate floating platform 1054 of the OLED printing system can define the path that the substrate 1058 can be moved through the system 1000 during OLED printing of the substrate. Various embodiments of OLED printing system 1050 can have a variety of footprints and appearance sizes in view of the various components that can include OLED printing system 1050. According to various embodiments of OLED inkjet printing systems, a variety of substrate materials can be used for substrate 1058, such as, but not limited to, a variety of glass substrate materials and a variety of polymeric substrate materials.

According to various embodiments of the gas inclusion assembly of the present teachings, as described above with respect to the gas inclusion assembly 100, the construction of the gas inclusion assembly can be performed around the entire OLED printing system to provide a gas inclusion assembly The volume is minimized and provides easy access to the interior. In Figure 24, an example of contour shaping can be given in view of OLED printing system 1050.

As shown in FIG. 24, there may be six spacers on the OLED printing system 1050: a first spacer set 1051 (the second spacer on the opposite side of the set is not shown) and a second spacer set 1053 (not shown) A second spacer on the opposite side of the set is shown, the set of spacers supporting the substrate floating platform 1054 of the OLED printing system 1050. The floating platform 1054 is supported on the floating platform base 1052. In addition to the two spacers that are not visible in FIG. 24 and are positioned opposite the first spacer 1051 and the second spacer 1053, there is also one of the OLED printing system mounts 1070. Group two spacers. The front enclosure base 1120 can have a first front enclosure spacer seat 1121 that supports the first front enclosure spacer wall frame 1123. The second front body spacer wall frame 1127 is supported by a second front body spacer seat (not shown). Similarly, the intermediate package base 1220 can have a first intermediate inclusion body seat 1221 that supports the first intermediate inclusion body wall frame 1223. The second intermediate body spacer wall frame 1227 is supported by a second intermediate body spacer seat (not shown). Finally, the rear enclosure base 1320 can have a first rear enclosure spacer 1321 that supports the rear enclosure spacer wall frame 1323. The second rear enclosure spacer wall frame 1327 is supported by a second rear enclosure spacer (not shown). Various embodiments of the spacer body wall frame members have been contoured around each of the spacers, thereby minimizing the volume surrounding each of the spacer support members. Additionally, the shaded panel sections shown with respect to each of the spacer wall frames of the bases 1120, 1220, and 1320 are removable panels that can be removed, for example, to service the spacers. The front body assembly base 1120 can have a chassis 1122, and the intermediate body assembly base 1220 can have a chassis 1222, and the rear body assembly base 1320 can have a chassis 1322. When the bases are fully constructed to form a connected base, the OLED printing system can be mounted to the associated chassis formed thereby, similar to mounting the OLED printing system 50 to the chassis 204 of FIG. As previously described, the wall frame member and the ceiling frame member can then be joined around the OLED printing system 1050, such as the wall frame 1140 of the front frame assembly 1100, the ceiling frame 1160; First intermediate body frame assembly 1240 of intermediate frame assembly 1200, intermediate wall and ceiling frame assembly 1260 and second intermediate body frame assembly 1280'; and rear frame assembly 1300 wall frame 1340 and ceiling frame 1360 . Accordingly, various embodiments of the hermetically sealed, contoured frame member assembly of the present teachings effectively reduce the volume of inert gas in the gas enclosure assembly 1000 while providing various means for the OLED printing system. and Easy access to the device.

Moreover, various embodiments of the gas inclusion assembly of the present teachings can be constructed in a manner to provide a separately functioning frame member assembly section. Referring back to Figure 5, the frame member assembly of various embodiments of the gas inclusion assembly and system in accordance with the present teachings can include a frame member having various panels that are sealingly mounted to the frame member. For example, without limitation, the wall frame member assembly or wall panel assembly can be a wall frame member that includes various panels that are sealingly mounted to the wall frame member. Accordingly, various fully constructed panel assemblies, such as, but not limited to, wall panel assemblies, ceiling panel assemblies, wall and ceiling panel assemblies, base support panel assemblies, and the like, are various types of frame member assemblies. The modular nature of the various embodiments of the gas inclusion assembly of the present teachings can provide embodiments of gas inclusion assemblies having various frame member assembly sections, wherein each frame member assembly section is a gas inclusion body Part of the total volume of the assembly. The various frame member assembly sections comprising various embodiments of the gas inclusion body assembly can have at least one frame member in common. For various embodiments of the gas inclusion assembly, the various frame member assembly sections comprising the gas inclusion assembly can collectively have at least one frame member assembly. The various frame member assembly sections comprising the various embodiments of the gas inclusion assembly can collectively have a combination of at least one frame member and at least one frame member assembly.

In accordance with the present teachings, various frame member assembly sections can be divided into a plurality of sections via openings or passages or combinations thereof, such as but not limited to, each of the closed frame member assembly sections. For example, in various embodiments, the opening or channel or combination thereof in the frame member or frame member panel common to each frame member assembly section can be covered (by thereby effectively closing the opening or passage or The combination thereof) separates the frame member assembly sections. In various embodiments, the openings or channels or combinations thereof that are common to each frame member assembly section can be sealed (by having The opening or channel or combination thereof is effectively closed to separate the frame member assembly section. Sealing the closed opening or passage or combination thereof may result in separation that interrupts fluid communication between each volume of each frame member assembly section, wherein each volume is contained in the total gas inclusion assembly Part of the volume. Sealingly closing the opening or passageway can thereby isolate each volume contained in each frame member assembly section.

Thus, referring to FIG. 24, the base 1070 can have a first end 1072 and a second end 1074 defining a width, and a first side 1076 and a second side 1078 defining a length. The first vertical tube 1075 and the second vertical tube 1077 are orthogonal to the base 1070 and mounted on the base. The bridge 1079 is mounted on the first vertical tube and the second vertical tube. For various embodiments of the OLED printing system 1050, the bridge 1079 can support a first print head assembly positioning system 1090 and a second print head assembly positioning system 1091 for controlling the first print head, respectively The assembly 1080 and the second row of print head assemblies 1081 move on the XZ axis above the substrate floating table 1054. Although FIG. 24 depicts two positioning systems and two printhead assemblies, for various embodiments of the OLED printing system 1050, there may be a single positioning system and a single printhead assembly. Moreover, for various embodiments of the OLED printing system 1050, there may be a single printhead assembly mounted on the positioning system, such as any of the first printhead assembly 1080 and the second printhead assembly 1081. The camera system for inspecting the features of the substrate 1058 can be mounted to the second positioning system. According to various embodiments of the gas enclosure assembly 1000, the printhead maintenance system can be mounted, for example, but not limited to, on the first upper surface 1071 and the second upper surface 1073 of the base 1070 proximate to the printhead assembly.

Further, referring to FIG. 24, the panel can be mounted to the first frame member 1224 and the second frame member 1226 of the base 1220, and a gasket can be attached to each panel. The washers can be used to enclose each of the passages between the panels and the base 1070. In addition, the bridge frame 1144 The intermediate frame assembly 1200 can be supported and an architecture for supporting various embodiments of the embedded frame can be provided. Various embodiments of the inlaid frame inserted into the bridge frame 1144 can have openings that allow the printhead assembly to travel, and can also support a gate valve assembly that is used to close the printhead assembly. Opening. By sealingly closing the passage around the base and sealingly closing the opening that allows the printhead assembly to travel, the intermediate frame assembly 1200 is roughly defined by the bridge 1079 mounted on the base 1070 to be comparable to the gas enclosure assembly 1000. The remaining part of the volume is isolated.

An exemplary use for separating discrete sections of gas enclosures may be to perform various maintenance procedures on the printhead assembly, such as the first printhead assembly 1080 and the second printhead assembly 1081 of the printing system 1050. . Such maintenance procedures may include, for example, but not limited to, replacing the printhead in the printhead assembly without opening the gas enclosure assembly to the atmosphere. Moreover, because the portion of the intermediate frame assembly 1200 that is roughly defined by the bridge 1079 mounted on the base 1070 can be completely isolated from the remaining volume of the gas enclosure assembly 1000, the volume can be such as, but not limited to, water vapor and The atmospheric species of oxygen are open without contaminating the remaining larger volume of the gas inclusion assembly. System recovery can be accomplished in a much shorter period of time by limiting the volume that can be exposed to atmospheric species. One of ordinary skill in the art will appreciate that although an example of maintenance of a printhead assembly is presented as an example, various processes requiring a gas inclusion assembly may readily utilize a gas inclusion assembly in which the gas inclusion assembly is The plurality of segments can be discretely separated to provide a separately functioning frame member assembly section, wherein at least one of the segments can have a substantially smaller partial volume of the total inclusion volume.

Figure 25 depicts a partially exploded perspective view of various embodiments of the gas enclosure assembly 1000 in accordance with Figures 23 and 24. Various complete panel assemblies are indicated in Figure 25, which panel assemblies can be separated in a variety of ways to define: a first frame member assembly section defining a first volume; and a second frame member assembly section defining Second volume.

In FIG. 25, for example, without limitation, the gas enclosure assembly 1000 can include a front panel assembly 1100', a middle panel assembly 1200', and a rear panel assembly 1300'. The front panel assembly 1100' can include a front ceiling panel assembly 1160', a front wall panel assembly 1140', and a front base panel assembly 1120', while the rear panel assembly 1300' can include a rear ceiling panel assembly 1360', rear wall panel assembly 1340' and rear base panel assembly 1320'. As can be seen from the exploded view of front frame assembly 1100 and intermediate panel frame 1200 of FIG. 24, front panel assembly 1100' and intermediate panel assembly 1200' of FIG. 25 collectively have a bridge frame 1144. The intermediate panel assembly 1200' can include a first intermediate body panel assembly 1240', an intermediate wall and ceiling panel assembly 1260', and a second intermediate body panel assembly 1280' that are sealingly mounted in the middle The base panel assembly 1220' can cover the base 1070. The base includes a first riser 1075 and a second riser 1077. The bridge 1079 is mounted on the first riser and the second riser. As previously discussed, the bridge 1079 can support a first printhead assembly positioning system 1090 that can control the movement of the printhead assembly 1080 over the substrate float table 1054 (see Figure 24). A first printhead assembly positioning system 1090 for positioning the printhead assembly 1080 above the substrate float table 1054 (see FIG. 24) can include a first X-axis bracket 1092 and a first Z-axis movable plate 1094, The first print head assembly 1080 can be mounted to the movable plate. The second row of print head assembly positioning systems 1091 can be similarly configured to control the movement of the second print head assembly 1081 over the X-Z axis above the substrate float table 1054 (see Figure 24).

26 depicts a side perspective view of a partial exploded view of a gas enclosure assembly 1000 including various sections of a front panel assembly 1100', and an intermediate panel assembly 1200' and a rear panel assembly 1300' . The front panel assembly 1100' can include an inlaid frame 1146 that can be seen to be mounted in a bridge frame 1144 that is both a front panel assembly 1100' and a middle panel assembly 1200'. Shared frame components. The inlaid frame 1146 can include an opening 1148, a gasket 1147 can be attached around the opening. A gate valve assembly 1150 is indicated above the inlaid frame 1146. The gate valve assembly 1150 can be mounted over the inlaid frame 1146. As can be seen in Figures 27A and 27B, the gate valve assembly 1150 can have a door 1158 that is mounted to the YZ positioning system via a first bracket 1153 and a second bracket 1154 for use in a door 1158 moves over opening 1148 of inlaid frame 1146 and is used to engage door 1158 to sealingly cover opening 1148. In FIG. 27A, the positioning system including the first track 1151 and the second track 1152 can have a first bracket 1153 and a second bracket 1154, respectively, which can be engaged with the rail rail system. As will be appreciated by those of ordinary skill in the art, the rail rail system can include a plurality of components such as, for example, but not limited to, rails, bearings, and actuators for controlling movement of the positioning system and thus controlling the door 1158 mobile. In FIG. 27A, a gasket 1147 is shown around the opening 1148. The gasket 1147 can be any of the gasket materials described above with respect to the seal frame member assembly. In FIG. 27A, the door 1158 is retracted such that the print head assemblies 1080 and 1081 can be made by the first print head assembly positioning system 1090 and the second print head assembly positioning system 1091, respectively. The opening 1148 (see Figures 24 and 25) travels over the floating table 1054. In FIG. 27B, display door 1158 covers opening 1148. The positioning system to which the door 1158 is mounted (including the first bracket 1153 and the second bracket 1154) can position the door 1158 over the opening 1148 to sealingly engage the washer 1147, thereby sealingly closing the opening 1148.

28 depicts a cross-sectional view through the intermediate base panel assembly 1220' associated with the front panel assembly 1100' and the rear panel assembly 1300'. As indicated in FIG. 28, the channel 1225 can be positioned around the base 1070; wherein the base 1070 extends through the first frame member 1224. In the frame member 1224, a panel providing a frame structure, such as the panel 1228, is sealably mounted in the frame member 1224. It is contemplated that a variety of gaskets that provide a mechanical seal can be used to seal the passage 1225. In various embodiments, an inflatable gasket for sealing the passage 1225 can be used. Various embodiments of the inflatable gasket may be fabricated from a reinforced elastomeric material into a hollow molded structure that may be in a concave configuration, a convoluted configuration, or a flat configuration when not inflated. In various embodiments, a gasket can be mounted to the panel 1228 to sealingly close the channel 1225 around the base 1070. Thus, various embodiments of the inflatable gasket for closing the passage 1225 around the base 1070 can be on a mounting surface (such as a panel) when inflated using any of a variety of suitable fluid media, such as, but not limited to, an inert gas. A tight barrier is formed between the inner surface of 1228) and the impact surface, such as the surface of the base 1070. In various embodiments, an inflatable gasket can be mounted to the base 1070 to sealingly close the passage 1225 around the base 1070 such that the base 1070 can be a mounting surface and the inner surface of the panel 1228 can be an impact surface. In this regard, the conformal seal sealably closes the channel 1225.

In addition to the various embodiments of the inflatable gasket, a flexible seal, such as a bellows seal or a lip seal, that is permanently attached (eg, attached to the panel 1228 and attached to the base 1070) can also be used The channel 1225 is sealed. This permanently attached seal provides the flexibility needed to achieve the various translational and vibratory movements of the base 1070 while providing a hermetic seal to the channel 1225.

As one of ordinary skill will appreciate, forming a conformal seal around a well-defined edge can be problematic. In various embodiments indicating a sealed gas enclosure surrounding a structure such as base 1070, the structure can be fabricated to eliminate edges having significant boundaries at which seals are required. In various embodiments of the printing system 1050 of FIG. 24, the base 1070 can be initially fabricated to have a rounded lateral side edge of the base 1070 to facilitate sealing, as indicated by the hatched lines 1070-1A with respect to the first side 1076 and shadows. 1070-1B is indicated with respect to the second side 1078. In various embodiments of the printing system 1050 of Figure 24, the bottom can be modified later The seat 1070 is configured to have a plurality of structures that are mounted to provide a rounded lateral side edge of the base 1070 to facilitate sealing, as indicated by the hatched structure 1070-2A with respect to the first side 1076 and the hatched structure 1070- 2B is indicated with respect to the second side 1078. The base 1070 can be made of a material that provides the stability needed to support the printing system, such as, but not limited to, granite and steel. As indicated in Figure 28, such materials can be readily modified. Although an example is given for the use of a gasket to enclose the channel 1225 around the base 1070 in the intermediate base panel assembly 1220', one of ordinary skill in the art will appreciate that the frame member 1226 spanning the base assembly 1220' is adjacent to the base 1070. Closure (see Figure 24) can be performed using the same principles.

As discussed above, the maintenance of the printhead assembly can include various calibration procedures and maintenance procedures. For example, to print an OLED display panel substrate, each of the print head assemblies (such as the first print head assembly 1080 and the second print print head assembly 1081 of FIG. 24) can be mounted in at least one print head device Multiple print heads. In various embodiments, the printhead device can include, for example but without limitation, fluid and electrical connections to at least one of the printheads; each printhead has a plurality of inks that are capable of ejecting ink at a controlled rate, speed, and size. Nozzles or orifices. For various embodiments of the first print head assembly 1080 and the second print head assembly 1081 of FIG. 24, each print head assembly can include between about 1 and about 60 print head assemblies, wherein Each of the print head devices can have between about 1 and about 30 print heads in each of the print head devices. For example, a printhead of an industrial inkjet head can have from about 16 to about 2048 nozzles that can eject a droplet volume of between about 0.1 pL and about 200 pL. Calibrating the print head can include, for example, but not limited to, inspecting nozzle emissions, measuring drop volume, speed and direction, and tuning the print head such that each nozzle ejects a uniform volume of droplets. Maintaining the print head can include, for example, but is not limited to, a program such as: print head activation, which requires collection and containment of ink ejected from the print head; removal of excess ink after the start-up procedure; And print head replacement. In the printing process, for example for printing an OLED display panel substrate, reliable emission of the nozzle is critical to ensure that the printing process can produce a high quality OLED panel display. Accordingly, there is a need to readily and reliably perform the various procedures associated with printhead maintenance; in particular, it is not necessary to expose the interior of the gas inclusion assembly to various reactive components such as, but not limited to, oxygen from the atmosphere and Water vapor, and for example, but not limited to, organic solvent vapor from a printing process.

In this regard, for various embodiments of the gas enclosure assembly of FIG. 24, the maintenance system can be mounted, for example, but not limited to, on the top surface 1071 of the base 1070 proximate to the first printhead assembly 1080, and at the base 1070 The top surface 1073 is mounted adjacent to the second row of print head assemblies 1081. The maintenance system can include, for example but without limitation, a droplet calibration station for performing various printhead calibration procedures; a rinse station for collecting and enclosing ink ejected from the printhead during a flush or start procedure; An ink absorbing station that removes excess ink after a rinsing or starting procedure has been performed at the rinsing station. These programs can be executed in fully automated mode during routine maintenance. In some cases, when a certain degree of human intervention may be indicated during the maintenance procedure, the end user access may be completed externally via, for example, the use of a glove. As previously discussed, the various embodiments of the gas inclusion assembly 1000 of Figures 23 through 28 effectively reduce the volume of inert gas required during the OLED printing process while providing easy access to the interior of the gas enclosure. take.

In addition, if the printhead maintenance requires direct access to either the printhead assembly or any of the various maintenance stations, the door 1158 is hermetically sealed to the opening 1148 (as described with respect to Figures 27A and 27B) and sealed. The passage around the ground enclosure 1070 (as described with respect to FIG. 28) may isolate the volume defined by a frame member assembly section from the remaining volume of the gas enclosure assembly 1000, the frame member assembly section including the middle The panel assembly 1200' and the isolated portion of the intermediate base panel assembly 1220'. Moreover, it will be understood by those of ordinary skill in the art that the door 1158 is hermetically sealed. Closing the opening 1148 (as described with respect to Figures 27A, 27B, and 28) and sealingly enclosing the passage around the base 1070 (as described with respect to Figure 28) can be accomplished remotely and automatically. For various embodiments of the gas inclusion assembly 1000, the portion of the volume of the isolated volume of the maintenance frame member assembly section can be less than or equal to about the total volume of the various embodiments of the contoured gas inclusion assembly. 20%. For various embodiments of the gas inclusion assembly 1000, the portion of the volume of the isolated volume of the maintenance frame member assembly section can be less than or equal to about the total volume of the various embodiments of the contoured gas inclusion assembly. 50%. System recovery time can be greatly reduced by greatly reducing the portion of the gas package assembly that requires direct access by the end user for printhead maintenance.

29 depicts a perspective view of a gas enclosure assembly 1010 in accordance with various embodiments of the gas inclusion assembly of the present teachings. The gas enclosure assembly 1010 can include a front panel assembly 1100', a middle panel assembly 1200', and a rear panel assembly 1300'. The front panel assembly 1100' can include a front ceiling panel assembly 1160'; a front wall panel assembly 1140' having an opening 1142 for receiving a substrate; and a front base panel assembly 1120'. The rear panel assembly 1300' can include a rear ceiling panel assembly 1360', a rear wall panel assembly 1340', and a rear base panel assembly 1320'. The intermediate panel assembly 1200' can include a first intermediate body panel assembly 1240', an intermediate wall and ceiling panel assembly 1260', and a second intermediate body panel assembly 1280', and an intermediate base panel assembly 1220'. Additionally, the intermediate panel assembly 1200' can include a first intermediate maintenance system panel assembly 1230' and a second intermediate maintenance system panel assembly (not shown).

FIG. 30 depicts an exploded perspective view of a gas enclosure 1010 in accordance with various embodiments of the gas inclusion assembly of the present teachings. The gas inclusion assembly 1010 can enclose an OLED printing system 1050 that can include a substrate floating platform 1054 supported by a substrate floating platform base 1052. The substrate floating platform base 1052 can be mounted on the base 1070. Substrate floating platform of OLED printing system 1054 can support substrate 1058 and define the path through which substrate 1058 can be moved through system 1010 during OLED printing of the substrate. The substrate floating station 1054 can provide frictionless transport of the substrate 1058. For the gas inclusion assembly 1010 of Figure 30, there may be four spacers on the OLED printing system 1050: a first spacer set 1051 (the second spacer on the opposite side is not shown) and a second spacer set 1053 (not A second spacer on the opposite side is shown that supports the substrate floating platform 1054 of the OLED printing system 1050. The base 1070 can include a first riser 1075 and a second riser 1077, and the bridge 1079 is mounted on the first riser and the second riser. For various embodiments of the OLED printing system 1050, the bridge 1079 can support the first print head assembly positioning system 1090 and the second positioning system 1091, and the positioning systems can respectively control the first print head assembly 1080 and the second The movement of the print head assembly 1081. For various embodiments of OLED printing system 1050, there may be a single positioning system and a single printhead assembly. For various embodiments of the OLED printing system 1050, there may be a single printhead assembly, such as any of the first printhead assembly 1080 and the second printhead assembly 1081, for inspection of the substrate 1058 The camera system of the features can be mounted to a second positioning system.

The first print head assembly positioning system 1090 for positioning the first print head assembly 1080 above the substrate floating table 1054 can include a first X-axis bracket 1092 and a first Z-axis movable plate 1094, the first column The printhead assembly body 1084 can be mounted to the movable panel. The second row of print head assembly positioning systems 1091 can be similarly configured to control the X-Z axis movement of the second print head assembly 1081 that can include the second print head assembly body 1085. As depicted in FIG. 30 with respect to the first print head assembly 1080, wherein the first print head assembly body 1084 is depicted in a partial view, various embodiments of the print head assembly can have the first embodiment mounted thereon. A plurality of printhead devices 1082 in the head assembly are printed. For various embodiments of the printing system 1050, the printhead assembly can include from about 1 to about 60 A printhead device between each of the printhead devices, wherein each of the printhead devices can have between about 1 and about 30 printheads in each of the printhead devices. As will be discussed in more detail later, considering the large number of printhead devices and printheads that require ongoing maintenance, it can be seen that the first maintenance system assembly 1250 is positioned to achieve the first printhead assembly. Easy access to 1080.

As depicted in FIG. 30, the gas enclosure assembly 1010 can include a front base panel assembly 1120', an intermediate base panel assembly 1220', and a rear base panel assembly 1320' that are formed when fully constructed A contiguous pedestal mounts the OLED printing system 1050 to the associated chassis formed thereby, similar to mounting the OLED printing system 50 to the chassis 204 of FIG. The first spacer set 1051 and the second spacer set can be mounted in a corresponding spacer wall panel (such as the second spacer wall panel 1225' and the second spacer wall panel 1227' of the intermediate base panel assembly 1220'). In each of them. Various panel members and panels including the front panel assembly 1100', the intermediate panel assembly 1200', and the rear panel assembly 1300' can then be joined around the OLED printing system 1050 to form various implementations of the gas enclosure assembly 1010. For example, the manner is similar to that described with respect to the construction of the gas inclusion assembly 100 of FIG.

For the gas enclosure assembly 1010 of Figure 30, the intermediate base assembly 1220' can include a first intermediate maintenance system panel assembly 1230' and a second intermediate maintenance system panel assembly 1270'. The first intermediate maintenance system panel assembly 1230' and the second intermediate maintenance system panel assembly 1270' can respectively include a first print head assembly opening 1242 of the first floor panel assembly 1241' and a second bottom plate total The second column of the 1281' print head assembly opening 1282. The first backplane assembly 1241' is depicted in FIG. 30 as part of the first intermediate package panel assembly 1240' of the intermediate panel assembly 1200'. The first floor assembly 1241' is a panel assembly common to both the first intermediate body panel assembly 1240' and the first intermediate maintenance system panel assembly 1230'. The second bottom plate assembly 1281' is depicted in FIG. 30 as an intermediate panel assembly A portion of the second intermediate body panel assembly 1280' of 1200'. The second floor assembly 1281' is a panel assembly common to both the second intermediate body panel assembly 1280' and the second intermediate maintenance system panel assembly 1270'.

As mentioned previously, the first print head assembly 1080 can be packaged in the first print head assembly body 1084, and the second print head assembly 1081 can be packaged in the second print head assembly package. 1085. As will be discussed in greater detail later, the first printhead assembly body 1084 and the second printhead assembly body 1085 can have openings at the bottom that can have a rim (not shown) to enable various The printhead assembly can be positioned for printing during the printing process. Additionally, portions of the first print head assembly body 1084 and the second print head assembly body 1085 that form the housing can be constructed as previously described with respect to various panel assemblies such that the frame assembly members and panels Can provide a gas-tight package. A compressible gasket may be attached around each of the first printhead assembly opening 1242 and the second printhead assembly opening 1282, or alternatively, to surround the first printhead assembly enclosure 1084, respectively. And the rim of the second row of print head assembly body 1085 is attached with a compressible gasket. As depicted in FIG. 30, the first print head assembly butt washer 1245 and the second print head assembly can be attached to the first print head assembly opening 1242 and the second print head assembly opening 1282, respectively. Washer 1285. The first print head assembly positioning system 1090 and the second print head assembly positioning system 1091 can respectively perform the first print head assembly body 1084 and the second print head assembly package 1085 with the first intermediate maintenance The system panel assembly 1230' and the second intermediate maintenance system panel assembly 1270' are docked. For various printhead maintenance procedures, the docking can include forming a gasket seal between each of the printhead assembly enclosures and each of the maintenance system panel assemblies. When the first print head assembly body 1084 and the second print head assembly body 1085 are docked with the first intermediate maintenance system panel assembly 1230' and the second intermediate maintenance system panel assembly 1270' to sealingly close the first A print head assembly opening 1242 and a second print head total When the opening 1282 is formed, the thus formed combined structure is hermetically sealed.

The first print head assembly 1080 and the second print head assembly 1081 can be used by the first print head assembly positioning system 1090 and the second print head assembly positioning system, respectively, during various print head maintenance procedures. 1091 is positioned over the first printhead assembly opening 1242 of the first backplane assembly 1241' and the second printhead assembly opening 1282 of the second backplane assembly 1281', respectively. In this regard, for various printhead maintenance procedures, the first printhead assembly 1080 and the second printhead assembly 1081 can be positioned in the first printhead assembly opening 1242 of the first backplane assembly 1241', respectively. And the second printhead assembly opening 1282 of the second backplane assembly 1281' does not cover or seal the first printhead assembly opening 1242 and the second printhead assembly opening 1282. In addition, for various printhead maintenance procedures, the closure of the first printhead assembly opening 1242 and the second printhead assembly opening 1282 can take the first intermediate maintenance system panel assembly 1230' as a section and will The two intermediate maintenance system panel assembly 1270' is separated as a section from the remaining volume of the gas enclosure assembly 1010. For various printhead maintenance procedures, the first printhead assembly 1080 and the second printhead assembly 1081 can be over the first printhead assembly opening 1242 and the second printhead assembly opening 1282, respectively. The shaft is butted against the washer, thereby closing the first print head assembly opening 1242 and the second print head assembly opening 1282. According to the present teachings, the first print head assembly opening 1242 and the second column are dependent on the force applied to the first print head assembly body 1084 and the second print head assembly body 1085 in the Z-axis direction. The printhead assembly opening 1282 can be covered or sealed. In this regard, the force applied to the sealable first printhead assembly opening 1242 of the first printhead assembly body 1084 in the Z-axis direction can treat the first intermediate service system panel assembly 1230' as a zone. The segments are isolated from the remaining frame member assembly sections that include the gas inclusion assembly 1010. Similarly, the force applied to the sealable second printhead assembly opening 1282 of the second printhead assembly body 1085 in the Z-axis direction can treat the second intermediate service system panel assembly 1270' as a section Separate from the remaining frame member assembly sections that include the gas inclusion assembly 1010.

It is contemplated that in various embodiments of the gas inclusion assembly 1010, a cover such as, for example, but not limited to, the gate valve assembly previously described with respect to Figures 26 and 27A and 27B can be mounted to the first intermediate maintenance System panel assembly 1230' and second intermediate maintenance system panel assembly 1270'. The cover can be used to cover the first printhead assembly opening 1242 of the first intermediate maintenance system panel assembly 1230' and the second printhead assembly opening 1282 of the second intermediate maintenance system panel assembly 1270', respectively. As will be discussed in greater detail later, the use of a cover such as, for example, but not limited to, a gate valve assembly to close the first printhead assembly opening 1242 and the second printhead assembly opening 1282 may allow for misalignment of the columns. In the case of the printhead assembly, the first frame member assembly section is isolated from the second frame member assembly section. In this regard, various maintenance procedures can be performed without interrupting the printing process.

FIG. 30 of gas inclusion assembly 1010 depicts a first intermediate maintenance system panel assembly 1230' that may include a first rear wall panel assembly 1238'. Similarly, a second intermediate maintenance system panel assembly 1270' that can include a second rear wall panel assembly 1278' is also depicted. The first rear wall panel assembly 1238' of the first intermediate maintenance system panel assembly 1230' can be constructed in a manner similar to that shown with respect to the second rear wall panel assembly 1278'. The second rear wall panel assembly 1278' of the second intermediate maintenance system panel assembly 1270' can be constructed from a second rear wall frame assembly 1278 having a second seal support panel 1275 that supports the panel seal Mounted to the second rear wall frame assembly 1278. The second seal support panel 1275 can have a second passage 1265 that is adjacent the second end of the base 1070 (not shown). The second seal 1267 can be mounted to the second seal support panel 1275 around the second passage 1265.

31A through 31F are schematic cross-sectional views of a gas inclusion body assembly 1010, It may further illustrate aspects of the first intermediate maintenance system panel assembly 1230' and the second intermediate maintenance system panel assembly 1270'. As will be appreciated by those of ordinary skill in the art, it is contemplated that there may be a first print head assembly positioning system 1090 and a second print head total for positioning the first print head assembly 1080 and the second print head assembly 1081, respectively. The symmetry of the printing system 1050 of the positioning system 1091 (see FIG. 30), the following teachings regarding the first intermediate maintenance system panel assembly 1230' illustrated with respect to FIGS. 31A-31D are applicable to the second intermediate maintenance system panel. Assembly 1270'.

31A depicts a schematic cross-sectional view of a gas enclosure assembly 1010 showing a first intermediate maintenance system panel assembly 1230' and a second intermediate maintenance system panel assembly 1270'. The first intermediate maintenance system panel assembly 1230' of FIG. 31A can package the first maintenance system assembly 1250, which can be positioned relative to the first printhead assembly opening 1242 by the first maintenance system positioning system 1251. System assembly. The first print head assembly opening 1242 is an opening in the first bottom plate assembly 1241'. The first bottom plate assembly is a first intermediate maintenance system panel assembly 1230' and a first intermediate package panel assembly 1240'. Shared panel. The first maintenance system positioning system 1251 can be mounted to the first maintenance system assembly platform 1253 that can be securely mounted to the first end 1072 of the base 1070. The first maintenance system assembly platform 1253 can extend from the first end 1072 of the base 1070 through the first passage 1261 into the first intermediate maintenance system panel assembly 1230'. Similarly, as depicted in FIG. 31A, the second intermediate maintenance system panel assembly 1270' of FIG. 31A can package the second maintenance system assembly 1290 with respect to the second print head by the second maintenance system positioning system 1291. Assembly opening 1282 to position the second maintenance system assembly. The second print head assembly opening 1282 is an opening in the first bottom plate assembly 1281'. The first bottom plate assembly is a second intermediate maintenance system panel assembly 1270' and a second intermediate cover panel assembly 1280'. Shared panel. The second maintenance system positioning system 1291 can be installed on the second maintenance assembly system platform 1293, and the second maintenance assembly system The platform can extend from the second end 1074 of the base 1070 through the channel 1265 into the second intermediate maintenance system panel assembly 1270'. The first seal 1263 can be mounted around the first passage 1261 on the first outer surface 1237 of the first seal support panel 1235. Similarly, a second seal 1267 can be mounted about the second channel 1265 on the second outer surface 1277 of the second seal support panel 1275. The first seal 1263 and the second seal 1267 can be inflatable gaskets as previously described with respect to FIG. Various embodiments of the first seal 1263 and the second seal 1267 can be permanently attached (eg, attached to the first outer surface 1237 and the second outer surface 1277, respectively, and attached to the base of the base 1070 first A flexible seal for the end portion 1072 and the second end portion 1074 of the base 1070. As previously discussed, the flexible seal can be a seal such as a bellows seal or a lip seal. This permanently attached seal provides the flexibility needed to achieve the various translational and vibratory movements of the base 1070 while providing a hermetic seal for the first passage 1261 and the second passage 1265.

31B and 31C illustrate various openings and channels covering and sealing of the gas enclosure assembly 1010 of the present teachings, illustrating the positioning of the first print head assembly relative to the first intermediate maintenance system panel assembly 1230'. 1080 for various maintenance procedures. As mentioned previously, the following teachings regarding the first intermediate maintenance system panel assembly 1230' may also be applied to the second intermediate maintenance system panel assembly 1270'.

In FIG. 31B, the first printhead assembly 1080 can include a printhead device 1082 having at least one printhead that includes a plurality of nozzles or orifices. The printhead device 1082 can be packaged in a first printhead assembly body 1084, the first printhead assembly package can have a first printhead assembly package opening 1086, and the printhead assembly 1082 can The package openings from the first printhead assembly are positioned such that during printing, the nozzles eject ink at a controlled rate, speed and size onto a substrate mounted on the floating table 1054; Taiwan is floating The table support 1052 is supported. As discussed above, the first printhead assembly positioning system 1090 can be controlled during the printing process to position the first printhead assembly 1080 over the substrate for printing. Additionally, as depicted in FIG. 31B, for various embodiments of the gas inclusion assembly 1010, a first printhead assembly positioning system 1090 having controllable XZ-axis movement can position the first printhead assembly 1080 Above the first row of printhead assembly openings 1242. As depicted in Figure 31B, the first printhead assembly opening 1242 of the first backplane assembly 1241' is common to the first intermediate package panel assembly 1240' and the first intermediate maintenance system panel assembly 1230'.

The first print head assembly body 1084 of FIG. 31B can include a first print head assembly body rim 1088 that can surround the first print head assembly opening 1242 and the first bottom plate assembly 1241 'Docking surface. The first row of print head assembly body rims 1088 can engage the first row of print head assembly docking washers 1245, which are depicted in FIG. 31B as surrounding the first print head assembly The opening 1242 is attached. One of ordinary skill in the art will appreciate that although the first print head assembly body rim 1088 is depicted as being inwardly projecting, a plurality of rims can be constructed in the first print head assembly body 1084. Either. Additionally, although the first printhead assembly docking washer 1245 is depicted in FIG. 31B as being attached around the first printhead assembly opening 1242, one of ordinary skill in the art will appreciate that the washer 1245 can be attached to the first The print head assembly body rim 1088. The first row of print head docking washers 1245 can be any of the gasket materials previously described with respect to the seal frame member assembly. In various embodiments of the gas enclosure assembly 1010 of FIG. 31B, the first printhead assembly docking washer 1245 can be an inflatable gasket, such as a washer 1263. In this regard, the first row of print head docking washers 1245 can be an inflatable gasket as previously described with respect to FIG. As previously presented, the first seal 1263 can be mounted about the first channel 1261 on the first outer surface 1237 of the first seal support panel 1235.

As depicted in Figures 31B and 31C, the first printhead assembly 1080 can remain positioned above the first printhead assembly opening 1242 for various maintenance procedures that can be performed in a fully automated mode. In this regard, the first print head assembly 1080 can be adjusted in the Z-axis direction by the first print head assembly positioning system 1090 to be positioned above the first print head assembly opening 1242 relative to the first maintenance system. Assembly 1250 locates printhead device 1082. Additionally, the first maintenance system assembly 1250 can be adjusted in the Y-X axis direction on the first maintenance system positioning system 1251 to position the first maintenance system assembly 1250 relative to the printhead device 1082. During the various maintenance procedures, the first print head assembly 1080 can be placed into docking with the first print head assembly by further adjustments made in the Z-axis direction by the first print head assembly positioning system 1090. The washer 1245 is in contact such that the first print head assembly body 1084 is placed in a position that covers the first print head assembly opening 1242 (not shown). As depicted in FIG. 31C, for various maintenance procedures, such as, but not limited to, maintenance procedures that require direct access to the interior of the first intermediate maintenance system panel assembly 1230', the first printhead assembly positioning system 1090 can be utilized. Further adjustments made in the Z-axis direction interface the first print head assembly 1080 with the first print head assembly mating washer 1245 to seal the first print head assembly opening 1242. As mentioned previously, the first printhead assembly docking washer 1245 can be a compressible gasket material as described above with respect to the hermetic seal of various frame members, or an inflatable gasket as previously described with respect to FIG. . Additionally, as depicted in FIG. 31C, the inflatable gasket 1263 can be inflated thereby sealingly closing the first passage 1261. In addition, the portions of the first printhead assembly body 1084 that form the housing can be constructed as previously described with respect to various panel assemblies to enable the frame assembly members and panels to provide a gas-tight enclosure. Thus, for FIG. 31C, the first intermediate maintenance system panel assembly 1230' can be isolated from the remaining volume of the gas enclosure assembly 1010 when the first printhead assembly opening 1242 and the first passage 1261 are hermetically sealed. open.

Various embodiments of the gas enclosure 1010 are depicted in Figures 31D and 31E, wherein the first maintenance system assembly 1250 and the second maintenance system assembly 1290 can be mounted to the first maintenance system assembly platform 1253 and the second maintenance system, respectively. On the platform 1293. In FIG. 31D and FIG. 31E, the first maintenance system assembly platform 1253 and the second maintenance system assembly platform 1293 are respectively enclosed in the first intermediate maintenance system panel assembly 1230' and the second intermediate maintenance system panel assembly 1270'. in. As mentioned previously, the following teachings regarding the first intermediate maintenance system panel assembly 1230' may also be applied to the second intermediate maintenance system panel assembly 1270'. In this regard, as depicted in FIG. 31D, the first print head assembly 1080 and the first print head can be utilized with sufficient force applied by the first print head assembly positioning system 1090 in the Z-axis direction. The assembly docking washer 1245 is docked such that the first printhead assembly opening 1242 can be sealed. Thus, for FIG. 31D, the first intermediate maintenance system panel assembly 1230' can be isolated from the remaining volume of the gas enclosure assembly 1010 when the first printhead assembly opening 1242 is hermetically sealed.

As previously taught with respect to various embodiments of the gas enclosure assembly 1010 of Figures 31A-31C, the printhead can remain positioned over the first printhead assembly opening 1242 during various maintenance procedures without covering or sealing. The first printhead assembly opening 1242 is such that the first printhead assembly opening 1242 is closed. In various embodiments of the gas enclosure assembly 1010, the printhead assembly package can be placed in contact with the gasket to adjust the Z-axis to cover the printhead assembly opening for various maintenance procedures. In this regard, Figure 31E can be explained in two ways. In a first explanation, the first row of printhead docking washers 1245 and the second row of printhead assembly butt washers 1285 can be made of a compressible gasket material such as that described above with respect to hermetic seals of various frame members. In FIG. 31E, the first print head assembly 1080 has been positioned over the first maintenance system assembly 1250 in the Z-axis direction such that the washer 1245 has been compressed, thereby sealingly closing the first print head assembly. Opening 1242. In contrast, the second print head assembly 1081 has been positioned over the second maintenance system assembly 1290 in the Z-axis direction to contact the second print head assembly docking washer 1285, thereby sealingly covering the first The two-row printhead assembly has an opening 1282. In the second interpretation, the first printhead assembly butt washer 1245 and the second printhead assembly docking washer 1285 can be inflatable gaskets as previously described with respect to FIG. In FIG. 31E, the first print head assembly 1080 can be positioned over the first maintenance system assembly 1250 in the Z-axis direction to contact the first print head assembly mating washer 1245, thereby covering the first column The print head assembly has an opening 1242. In contrast, the second print head assembly 1081 has been positioned over the second maintenance system assembly 1290 in the Z-axis direction such that when the second print head assembly docking washer 1285 is inflated, the second column The printhead assembly opening 1282 is hermetically sealed.

Figure 31F depicts that a cover (such as, for example, but not limited to, a gate valve assembly) can be used to seal maintenance, for example, using the first intermediate maintenance system panel assembly 1230' and the second intermediate maintenance system panel assembly 1270'. volume. The following teachings regarding the first intermediate maintenance system panel assembly 1230' and the second intermediate maintenance system panel assembly 1270' are applicable to various embodiments of the maintenance system panel assembly and gas enclosure assembly. As depicted in FIG. 31F, the first printhead assembly opening 1242 and the second printhead total are closed using, for example, but not limited to, a first printhead assembly gate valve 1247 and a second printhead assembly gate valve 1287, respectively. The opening 1282 can provide continuous operation of the first print head assembly 1080 and the second print head assembly 1081, respectively. As depicted with respect to the first intermediate maintenance system panel assembly 1230' of Figure 31F, the first printhead assembly gate valve 1247 is used to sealingly close the first printhead assembly opening 1242 (as with respect to Figures 27A and 27B) The first channel 1261 (as described with respect to FIG. 28) that sealingly encloses the base 1070 can be completed remotely and automatically. Similarly, as depicted with respect to the second intermediate maintenance system panel assembly 1270' of FIG. 31F, the second printhead assembly gate valve 1287 is used to sealingly close the second printhead assembly opening 1282 (as with respect to FIG. 27A and Figure The description of 27B) can be done remotely and automatically. It is contemplated that various printhead maintenance volume programs can be facilitated by isolating maintenance volumes, such as defined by the first intermediate maintenance system panel assembly 1230' and the second intermediate maintenance system panel assembly 1270', while still providing utilization The printing process of the first print head assembly 1080 and the second print head assembly 1081 continues.

As mentioned previously, the first print head assembly butt washer 1245 and the second print head assembly butt washer can be attached around the first print head assembly opening 1242 and the second print head assembly opening 1282, respectively. 1285. In addition, as depicted in FIG. 31F, the first print head assembly docking washer 1245 can be attached to the first print head assembly body rim 1088 and the second print head assembly body rim 1089, respectively. The second row of print head assemblies abuts the washer 1285. When the maintenance of the first print head assembly 1080 and the second print head assembly 1081 is indicated, the first print head assembly gate valve 1247 and the second print head assembly gate valve 1287 can be opened and the first print is printed. The head assembly 1080 and the second row of print head assemblies 1081 can interface with the first intermediate maintenance system panel assembly 1230' and the second intermediate maintenance system panel assembly 1270' as previously described.

For example, but not limited to, the first maintenance system assembly can be completed by isolating the first intermediate maintenance system panel assembly 1230' and the second intermediate maintenance system panel assembly 1270', respectively, without interrupting the printing process. Any maintenance procedures for maintenance are provided on the 1250 and the second maintenance system assembly 1290. It is further contemplated that the following operations can be accomplished by isolating the first intermediate maintenance system panel assembly 1230' and the second intermediate maintenance system panel assembly 1270', respectively, without interrupting the printing process: a new print head Or the printhead assembly is loaded into the system or the printhead or printhead assembly is removed from the system. Such activities may be facilitated automatically, for example, but not limited to, by the use of a robot. For example, without limitation, automatic removal of printheads stored in a maintenance volume (such as the first intermediate maintenance system panel assembly 1230' and the second intermediate maintenance system panel assembly 1270' of Figure 31F) may be completed. Thereafter, the defective print head on the print head unit 1082 of the first print head assembly 1080 or the print head unit 1083 of the second print head assembly 1081 is automatically replaced with the active print head. Thereafter, the failed print head can be automatically deposited into a module located in the first maintenance system assembly 1250 or the second maintenance system assembly 1290. These maintenance procedures can be performed in automated mode without interrupting the ongoing printing process.

After the faulty print head is automatically deposited in the first maintenance system assembly 1250 or the second maintenance system assembly 1290, for example, but not limited to, the first print head assembly gate valve 1247 and the second print, respectively The head assembly gate valve 1287 closes the first row of print head assembly openings 1242 and the second row of print head assembly openings 1282 to sealingly seal and isolate the maintenance volume, respectively (such as the first intermediate maintenance system panel assembly 1230' and the second intermediate portion Maintenance system panel assembly 1270'). In addition, the maintenance volume (such as the first intermediate maintenance system panel assembly 1230' and the second intermediate maintenance system panel assembly 1270') can then be opened to the atmosphere according to previous teaching examples, such as through individual intermediate maintenance system panel assembly openings, So that the faulty print head can be retrieved and replaced. As will be discussed in more detail later, because various embodiments of the gas purification system are designed for the volume of the entire gas inclusion body assembly, the gas purification resources can be specifically utilized to flush the significantly reduced volume of the maintenance volume. This significantly reduces the system recovery time for maintenance volumes. In this regard, maintenance procedures that require the maintenance volume to be open to the atmosphere can be performed without interrupting the ongoing printing process or causing minimal disruption to the ongoing printing process.

32 depicts an expanded view of a first maintenance system assembly 1250 of various embodiments of gas inclusion assemblies and systems in accordance with the present teachings. As previously discussed, the maintenance system can include, for example, but not limited to, a droplet calibration station for performing various printhead calibration procedures; for flushing and enclosing the ink ejected from the printhead during the flushing or starting procedure Taiwan; An ink absorbing station that removes excess ink after performing a rinsing or starting procedure at the rinsing station. Additionally, the maintenance system can include one or more of the following operations for receiving one or more printheads that have been removed from the first printhead assembly 1080 and the second printhead assembly 1081 or The print head device, or for storing print heads or print head devices that can be loaded into the first print head assembly 1080 and the second print head assembly 1081 during the maintenance process.

Various embodiments of the maintenance system assembly in accordance with the present teachings (such as the first maintenance system assembly 1250 of FIG. 32) can include a droplet calibration module 1252, a wash basin module 1254, and an ink absorbing module 1256. The first maintenance system assembly 1250 can be mounted to the first maintenance system positioning system 1251. The first maintenance system positioning system 1251 can provide Y-axis movement to selectively align each of the various modules and the printhead assembly with the first printhead assembly opening 1242, wherein the printhead is total A printhead device having at least one printhead, such as the printhead device 1082 of Figure 31B. The positioning of the various modules and printhead assemblies can be accomplished using a combination of a maintenance system positioning system 1251 and a first printhead assembly positioning system 1090, wherein the printhead assembly has at least one printhead Print head device. The maintenance system positioning system 1252 can provide YX positioning of the various modules of the first maintenance system assembly 1250 relative to the first print head assembly opening 1242, while the first print head assembly positioning system 1090 can provide the first print The head assembly 1080 is positioned at XZ above the first printhead assembly opening 1242. In this regard, a printhead device equipped with at least one printhead can be positioned over or in the first printhead assembly opening 1242 for maintenance.

Figure 33 illustrates an expanded perspective view of a first intermediate maintenance system panel assembly 1230' depicting a gloved glove that is capped and has a glove. As shown, it is contemplated that the volume of various maintenance system panel assemblies, such as the first intermediate maintenance system panel assembly 1230', can be about 2 ^m3 . It is contemplated that various embodiments of the maintenance system panel assembly can have a volume of about 1 m ³ , while in various embodiments of the maintenance system panel assembly, the volume can be about 10 m ³ . For various embodiments of the gas inclusion body assembly, such as the gas inclusion body assembly 1010 of Figure 29, the frame member assembly section can be less than or equal to about 1% of the total volume of the gas inclusion body assembly. In various embodiments of the gas inclusion body assembly, the frame member assembly section can be less than or equal to about 2% of the total volume of the gas inclusion body assembly. In various embodiments of the gas inclusion body assembly, the frame member assembly section can be less than or equal to about 10% of the total volume of the gas inclusion body assembly. For various embodiments of the gas inclusion body assembly, the frame member assembly section can be less than or equal to about 50% of the total volume of the gas inclusion body assembly.

The gas inclusion assembly and system in accordance with the present teachings can have a gas circulation and filtration system within the gas inclusion assembly. This internal filtration system can have a plurality of fan filtration units in the interior and can be configured to provide a laminar flow of gas in the interior. The laminar flow may be in the direction from the top of the interior to the bottom of the interior, or in any other direction. Although the gas stream produced by the circulatory system need not be layered, the laminar flow of gas can be used to ensure complete and complete inversion of the gas in the interior. The laminar flow of gas can also be used to minimize turbulence, which is undesirable because it can cause particles in the environment to accumulate in such turbulent areas, thereby preventing the filtration system from removing them from the environment. particle. Furthermore, in order to maintain the desired temperature in the interior, a thermal conditioning system utilizing a plurality of heat exchangers, such as operating, adjacent or in combination with a fan or another gas circulation device, may be provided. The gas purification circuit can be assembled to circulate gas from the interior of the gas inclusion assembly through at least one gas purification component external to the enclosure. In this regard, the filtration and circulation system within the gas inclusion assembly, in combination with the gas purification circuit external to the gas inclusion assembly, provides continuous flow of substantially low particulate inert gas throughout the gas inclusion assembly. Circulating, the inert gas has a substantially low content of reactive species. Gas purification systems can be formulated to maintain very low levels of undesired components such as organic solvents and their vapors, And water, steam, oxygen and the like.

FIG. 34A is a schematic diagram showing a gas inclusion assembly and system 2100. Various embodiments of the gas inclusion assembly and system 2100 can include a gas inclusion assembly 1500 in accordance with the present teachings, a gas purification circuit 2130 in fluid communication with the gas inclusion assembly 1500, and at least one thermal conditioning system 2140. Additionally, various embodiments of the gas inclusion assembly can have a pressurized inert gas recirculation system 2169 that can supply an inert gas to operate various devices, such as for OLED printing systems. The substrate floats. As will be discussed in greater detail later, the pressurized inert gas recirculation system 2169 can utilize a compressor, a blower, and a combination of both as a source for various embodiments of the inert gas recirculation system 2169. Additionally, the gas inclusion assembly and system 2100 can have a filtration and circulation system (not shown) within the gas inclusion assembly and system 2100.

For various embodiments of the gas inclusion assembly in accordance with the present teachings, the conduit is designed to continuously filter the inert gas circulating through the gas purge circuit 2130 of FIG. 34A and the various embodiments of the gas inclusion assembly. The circulating inert gas is separated. The gas purification circuit 2130 includes an outlet line 2131 that is from the gas inclusion assembly 1500 to the solvent removal assembly 2132 and then to the gas purification system 2134. The inert gas that has been purified without solvent and other reactive gas species such as oxygen and water vapor is then passed back to the gas inclusion assembly 1500 via inlet line 2133. The gas purification circuit 2130 can also include suitable conduits and connections as well as sensors such as oxygen, water vapor, and solvent vapor sensors. A gas circulation unit such as a fan, a blower or a motor and the like may be separately provided or integrated in, for example, the gas purification system 2134 to circulate the gas through the gas purification circuit 2130. According to various embodiments of the gas inclusion assembly, although the solvent removal system 2132 and the gas purification system are illustrated in the schematic shown in FIG. 2134 is shown as a separate unit, but solvent removal system 2132 and gas purification system 2134 can be packaged together as a single purification unit. The thermal conditioning system 2140 can include at least one chiller 2141 that can have a fluid outlet line 2143 for circulating coolant into the gas inclusion assembly and for transferring coolant back to the chiller Fluid inlet line 2145.

The gas purification circuit 2130 of FIG. 34A can have a solvent removal system 2132 disposed upstream of the gas purification system 2134 such that inert gas circulated from the gas inclusion assembly 1500 passes through the solvent removal assembly 2132 via the outlet line 2131. According to various embodiments, the solvent removal system 2132 can be a solvent retention system based on the inert gas adsorption solvent vapor from the solvent removal system 2132 of Figure 34A. One or more beds, such as, but not limited to, adsorbents such as activated carbon, molecular sieves, and the like, are effective to remove a variety of organic solvent vapors. For various embodiments of the gas inclusion assembly, a cold trap technique can be employed in the solvent removal system 2132 to remove solvent vapor. As mentioned previously, for various embodiments of gas inclusion assemblies in accordance with the present teachings, sensors such as oxygen, water vapor, and solvent vapor sensors can be used to monitor the continuous circulation of such species through the gas inclusion body. Effective removal of inert gas into a system, such as gas inclusion assembly system 2100 of Figure 34. Various embodiments of the solvent removal system can indicate when the adsorbent, such as activated carbon, molecular sieves, and the like, has reached capacity such that the bed or layers of adsorbent can be regenerated or replaced. Regeneration of the molecular sieve can involve heating the molecular sieve, contacting the molecular sieve with a forming gas, combinations thereof, and the like. Molecular sieves that are formulated to retain various species including oxygen, water vapor, and solvent can be regenerated by heating and exposure to a synthesis gas comprising hydrogen, such as a synthesis gas comprising about 96% nitrogen and 4% hydrogen. Wherein the percentages are by volume or by weight. The physical regeneration of activated carbon can be accomplished using a similar procedure for heating in an inert environment.

Any suitable gas purification system can be used with the gas purification system 2134 of the gas purification circuit 2130 of Figure 34A. Gas purification systems, such as those available from MBRAUN (Statham, New Hampshire) or Innovative Technology of Amesbury (Massachusetts), can be used in various embodiments of the gas inclusion assembly of the present teachings. The gas purification system 2134 can be used to purge the gas inclusion assembly and one or more inert gases in the system 2100, such as the entire gas atmosphere in the purge gas inclusion assembly. As mentioned previously, in order to circulate gas through the gas purification circuit 2130, the gas purification system 2134 may have a gas circulation unit such as a fan, a blower or a motor, and the like. In this regard, the gas purification system can be selected depending on the volume of the enclosure, which volume can define the volumetric flow rate for moving the inert gas through the gas purification system. For various embodiments of gas inclusion assemblies and systems having a gas inclusion body having a volume of up to about 4 ^m3 ; a gas purification system that can move about 84 ^m3 /h can be used. For various embodiments of gas inclusion assemblies and systems having a gas inclusion body having a volume of up to about 10 m ³ ; a gas purification system that can move about 155 m ³ /h can be used. For various embodiments of gas inclusion assemblies having a volume between about 52-114 ^m3 , more than one gas purification system can be used.

Any suitable gas filter or purification device can be included in the gas purification system 2134 of the present teachings. In some embodiments, the gas purification system can include two parallel purification devices such that one of the devices can be removed from the line for maintenance and another device can be used to continue system operation without interruption. In some embodiments, for example, the gas purification system can include one or more molecular sieves. In some embodiments, the gas purification system can include at least a first molecular sieve and a second molecular sieve such that when one of the molecular sieves becomes saturated with impurities or otherwise deemed insufficient for efficient operation, the system can Switch to another molecular sieve while regenerating the saturated or inefficient molecular sieve. A control unit is provided, which is used to determine each The operating efficiency of molecular sieves for switching between operations of different molecular sieves, for regenerating one or more molecular sieves, or for combinations thereof. As mentioned previously, molecular sieves can be regenerated and reused.

With respect to the thermal conditioning system 2140 of Figure 34A, at least one fluid chiller 2141 can be provided for cooling the gas inclusion assembly and the gas atmosphere in the system 2100. For various embodiments of the gas inclusion assembly of the present teachings, fluid chiller 2141 delivers the cooled fluid to a heat exchanger in the enclosure, wherein the inert gas is passed through a filtration system internal to the enclosure. The gas inclusion assembly and system 2100 can also be provided with at least one fluid chiller for cooling the heat generated by the equipment enclosed in the gas enclosure 2100. For example, without limitation, the gas inclusion assembly and system 2100 can also be provided with at least one fluid cooler for cooling the heat generated by the OLED printing system. The thermal conditioning system 2140 can include a heat exchange device or a Peltier device and can have various cooling capabilities. For example, for various embodiments of gas inclusion assemblies and systems, the chiller can provide a cooling capacity of from about 2 kW to about 20 kW. Fluid chillers 1136 and 1138 can quench one or more fluids. In some embodiments, the fluid chillers can utilize a variety of fluids as a coolant, such as, but not limited to, water as a heat exchange fluid, antifreeze, refrigerant, and combinations thereof. A suitable leak-free locking connection can be used to connect the associated conduit and system components.

Various embodiments, such as the gas inclusion assembly 1000 of FIGS. 23 and 24 or the gas inclusion assembly 10 depicted with respect to the gas inclusion assembly 1010 of FIGS. 29 and 30, can have a first frame defining a first volume A component assembly section and a second frame member assembly section defining a second volume, wherein each volume is separable from the other volume. For the various embodiments of the gas inclusion assembly 1000 of Figures 23 and 24, or for the gas inclusion assembly 1010 of Figures 29 and 30, all of the system features described with respect to the gas inclusion assembly of Figure 34A can be Included as a system feature of such embodiments, the embodiments have a first frame member assembly section defining a first volume and defining a second A second frame member assembly section of volume, wherein each volume can be separated from another volume. Additionally, as depicted in relation to gas assembly and system 2100 in Figure 34B, for a gas inclusion body having a first frame member assembly section defining a first volume and a second frame member assembly section defining a second volume In various embodiments, each volume can be separately in fluid communication with the gas purification circuit 2130.

As depicted in Figure 34B, the gas inclusion assembly 1500 of the gas inclusion assembly and system 2100 can have a first frame member assembly section 1500-S1 defining a first volume and a second frame member defining a second volume. Assembly section 1500-S2. If all of the valves V _1, V _2, V ₃ and V ₄ is opened, the gas purification circuit 2130 operates substantially 1500 as previously described gas bag assembly and body of the system with respect to Figure 34A. In the case of V ₃ and V ₄ is closed, the only the first frame member and the assembly section 1500-S1 2130 gas purifying fluid circuit communication. This valve state may, for example, but not limited to, sealingly enclose the second frame member assembly section 1500-S2 during maintenance processing that requires the second frame member assembly section 1500-S2 to open to the atmosphere and thereby combine it with the frame member The assembly section 1500-S1 is used when it is isolated. At V ₁ and V ₂ closed case, only the second frame member and the assembly section 1500-S2 fluid circuit communication with gas purifier 2130. This valve state may be used, for example, but not limited to, during restoration of the section after the second frame member assembly section 1500-S2 has been opened to the atmosphere. As mentioned previously, the requirements for the gas purification circuit 2130 are specified for the total volume of the gas inclusion body assembly 1500. Thus, by utilizing the resources of the gas purification system exclusively for the restoration of the frame member assembly section, such as the second frame member assembly section 1500-S2, the recovery time can be greatly reduced, wherein the second frame is depicted in Figure 34B. The volume of the component assembly section is significantly less than the total volume of the gas enclosure 1500.

As depicted in Figures 35 and 36, the or the fan filter units can be assembled to provide a substantially laminar flow of gas through the interior. According to various embodiments of the gas inclusion assembly of the present teachings, one or more fan units are disposed adjacent to the first interior surface of the gas atmosphere enclosure, and The or each conduit inlet is disposed adjacent to a second opposing interior surface of the gas atmosphere enclosure. For example, the gas atmosphere enclosure can include an interior ceiling and a bottom interior perimeter, the or the fan unit can be disposed adjacent to the interior ceiling, and the or the conduit inlet can include an arrangement adjacent to the bottom interior perimeter A plurality of inlet openings are part of a ductwork system as shown in Figures 15-17.

35 is a cross-sectional view taken along the length of a gas enclosure assembly and system 2200 in accordance with various embodiments of the present teachings. The gas inclusion body assembly and system 2200 of FIG. 35 can include: a gas enclosure 1500 that can package the OLED printing system 50, and a gas purification system 2130 (see also FIG. 34), a thermal conditioning system 2140, a filtration and circulation system 2150, and Piping system 2170. The thermal conditioning system 2140 can include a fluid chiller 2141 that is in fluid communication with the chiller outlet line 2143 and the chiller inlet line 2145. The quenched fluid may exit the fluid chiller 2141, flow through the chiller outlet line 2143, and may be delivered to a heat exchanger, such as various embodiments of the gas inclusion assembly and system as shown in FIG. The heat exchanger can be positioned proximate to each of the plurality of fan filter units. Fluid may be passed back to the chiller 2141 via a chiller inlet line 2145 from a heat exchanger adjacent the fan filter unit to maintain the fluid at a constant desired temperature. As mentioned previously, the chiller outlet line 2141 and the chiller inlet line 2143 are in fluid communication with a plurality of heat exchangers including a first heat exchanger 2142, a second heat exchanger 2144, and a third heat. Switch 2146. According to various embodiments of the gas inclusion assembly and system as shown in FIG. 34, the first heat exchanger 2142, the second heat exchanger 2144, and the third heat exchanger 2146 are respectively filtered with the first fan of the filtration system 2150. The unit 2152, the second fan filter unit 2154, and the third fan filter unit 2156 are in thermal communication.

In Figure 35, many arrows are drawn to various fan filter units and from various The flow of the fan filtration unit, and also the flow in the piping system 2170, includes a first conduit conduit 2173 and a second conduit conduit 2174 as depicted in the simplified schematic of FIG. The first conduit conduit 2173 can receive gas via the first conduit inlet 2171 and can exit via the first conduit outlet 2175. Similarly, the second conduit conduit 2174 can receive gas via the second conduit inlet 2172 and can exit via the second conduit outlet 2176. Additionally, as shown in FIG. 34, the piping system 2170 separates the inert gas that is internally recirculated through the filtration system 2150 by effectively defining the space 2180, which is in fluid communication with the gas purification system 2130 via the gas purification outlet line 2131. The circulatory system including various embodiments of the piping system as depicted in Figures 15-17 provides a substantially laminar flow that minimizes turbulence, promotes circulation, inversion, and particulate filtration of the gaseous atmosphere within the interior of the enclosure, and provides The circulation through the gas purification system outside of the gas inclusion body assembly.

36 is a cross-sectional view taken along the length of the gas inclusion assembly and system 2300 of various embodiments of the gas inclusion assembly in accordance with the present teachings. As with the gas inclusion assembly 2200 of FIG. 35, the gas inclusion assembly system 2300 of FIG. 36 can include a gas enclosure 1500 that can encapsulate the OLED printing system 50, and a gas purification system 2130 (see also FIG. 34). ), thermal conditioning system 2140, filtration and circulation system 2150, and piping system 2170. For various embodiments of the gas inclusion assembly 2300, the thermal conditioning system 2140 (which may include a fluid chiller 2141 in fluid communication with the chiller outlet line 2143 and the chiller inlet line 2145) may be in fluid communication with a plurality of heat exchangers, The plurality of heat exchangers are, for example, a first heat exchanger 2142 and a second heat exchanger 2144 as depicted in FIG. According to various embodiments of the gas inclusion assembly and system as shown in Figure 36, various heat exchangers, such as first heat exchanger 2142 and second heat exchanger 2144, can be positioned adjacent to the pipe outlet (such as a pipe) The first conduit outlet 2175 and the second conduit outlet 2176 of system 2170 are in thermal communication with the circulating inert gas. In this regard, from the pipe entrance (such as the pipe The inlet, such as the first conduit inlet 2171 and the second conduit inlet 2172 of the conduit system 2170, may be passed back through the first fan filter unit 2152, second, for example, through the filtration system 2150 of FIG. 36, respectively. The fan filter unit 2154 and the third fan filter unit 2156 are previously thermally adjusted.

As can be seen from the arrows in the direction of the inert gas circulation of the inclusions as shown in Figures 35 and 36, the fan filter units are assembled to provide a substantially laminar flow from the top of the enclosure down toward the bottom. For example, a fan filter unit available from Flanders, Inc. (Washington, North Carolina) or Envirco (Sanford, North Carolina) can be used in various embodiments of the gas inclusion assembly in accordance with the present teachings. Various embodiments of the fan filter unit can exchange between about 350 cubic centimeters per minute (CFM) to about 700 CFM of inert gas via each unit. As shown in Figures 35 and 36, because the fan filter units are arranged side by side rather than in a tandem arrangement, the amount of inert gas that can be exchanged in a system comprising a plurality of fan filter units can be the same as the number of units used. proportion. Near the bottom of the enclosure, the airflow is directed to a plurality of conduit inlets, which are schematically indicated in Figures 35 and 36 as a first conduit inlet 2171 and a second conduit inlet 2172. As discussed above with respect to Figures 15-17, the conduit inlet is positioned substantially at the bottom of the enclosure and causes a downward flow of gas from the upper fan filtration unit to promote a good turnover of the gas atmosphere in the enclosure and promotes the overall gas atmosphere. The complete overturning and movement through the gas purification system is used in conjunction with the enclosure. The gas inclusion body assembly is circulated through a conduit (which separates the inert gas stream for circulation through the gas purification circuit 2130) and uses a filtration and circulation system 2150 to promote laminar flow and complete overturning of the gas atmosphere in the enclosure. The content of each of the reactive species (such as water and oxygen, and each of the solvents) can be maintained at 100 ppm or less, such as 1 ppm, in various embodiments. Or lower, for example 0.1 ppm or less.

According to various embodiments of the gas inclusion assembly system for an OLED printing system, the number of fan filtration units can be selected based on the physical location of the substrate in the printing system during processing. Thus, although three fan filter units are shown in Figures 35 and 36, the number of fan filter units can vary. For example, FIG. 37 is a cross-sectional view taken along the length of the gas inclusion assembly and system 2400. The gas inclusion assembly and system are generally associated with the gas inclusions depicted in FIGS. 23 and 24 and FIGS. 29 and 30. The system is similar to the system. The gas inclusion assembly and system 2400 can include a gas inclusion assembly 1500 that encapsulates the OLED printing system 1050 supported on the base 1220. The substrate floating table 1054 of the OLED printing system defines the path that the substrate can be moved through the system 2400 during OLED printing of the substrate. Thus, the gas inclusion assembly and filtration system 2150 of system 2400 has an appropriate number of fan filtration units; these fan filtration units are shown as 2151-2155, corresponding to the physical travel of the substrate through the OLED printing system 1050 during processing. In addition, the schematic cross-sectional view of FIG. 37 depicts the contouring of various embodiments of a gas enclosure that effectively reduces the volume of inert gas required during the OLED printing process, while providing a gas inclusion 1500. Easy internal access (for remote access during operation, for example, using gloves installed in various gloves, or directly with removable panels for maintenance operations).

Various embodiments of the gas inclusion assembly and system can utilize a pressurized inert gas recirculation system for operation of various pneumatically operated devices and equipment. Additionally, as discussed above, embodiments of the gas inclusion assembly of the present teachings can be maintained at a small positive pressure relative to the external environment, such as, but not limited to, between about 2 mbarg and about 8 mbarg. Maintaining a pressurized inert gas recirculation system in a gas inclusion assembly system can be challenging as it relates to maintaining a gas inclusion assembly and system A small positive internal pressure while continuously introducing pressurized gas into the gas inclusion assembly and system provides dynamic and sustained balancing. In addition, the variable requirements of various devices and devices can result in irregular pressure distributions for various gas inclusion assemblies and systems of the present teachings. Under these conditions, maintaining a dynamic pressure balance of the gas inclusion assembly maintained at a small positive pressure relative to the external environment provides the integrity of the ongoing OLED printing process.

As shown in FIG. 38, various embodiments of the gas inclusion assembly and system 3000 can have an external gas circuit 2500 for integrating and controlling the inert gas source 2509 and the clean dry air (CDA) source 2512 so that Various aspects of the operation of the gas inclusion assembly and system 3000. One of ordinary skill in the art will appreciate that the gas inclusion assembly and system 3000 can also include various embodiments of internal particle filtration and gas circulation systems as well as various embodiments of external gas purification systems as previously described. In addition to the external circuit 2500 for integrating and controlling the inert gas source 2509 and the CDA source 2512, the gas inclusion assembly and system 3000 can also have a compressor circuit 2160 that can supply an inert gas for operation to be placed Various devices and equipment in the interior of the gas inclusion assembly and system 3000.

The compressor circuit 2160 of FIG. 38 can include a compressor 2162, a first accumulator 2164, and a second accumulator 2168 that are configured to be in fluid communication. Compressor 2162 can be assembled to compress the inert gas withdrawn from gas inclusion assembly 1500 to the desired pressure. The inlet side of compressor circuit 2160 can be in fluid communication with gas enclosure assembly 1500 via line 2503 via gas enclosure assembly outlet 2501 having valve 2505 and check valve 2507. The compressor circuit 2160 can be in fluid communication with the gas inclusion body assembly 1500 on the outlet side of the compressor circuit 2160 via an external gas circuit 2500. The accumulator 2164 can be disposed between the compressor 2162 and the junction of the compressor circuit 2160 and the external gas circuit 2500 and can be assembled to produce a pressure of 5 psig or higher. Since the compressor piston is about Circulating at 60 Hz, a second accumulator 2168 can be located in the compressor circuit 2160 to provide damping ripple. For various embodiments of the compressor circuit 2160, the first accumulator 2164 can have a capacity of between about 80 gallons to about 160 gallons, and the second accumulator can have a capacity of between about 30 gallons to about 60 gallons. According to various embodiments of the gas inclusion assembly and system 3000, the compressor 2162 can zero invade the compressor. Various types of zero intrusion compressors can operate without exposing atmospheric gases to the various embodiments of the gas inclusion assemblies and systems of the present teachings. Various embodiments of the zero-invasive compressor can operate continuously, for example, in OLED printing processes utilizing various devices and equipment that require compressed inert gas.

The accumulator 2164 can be assembled to receive and accumulate compressed inert gas from the compressor 2162. The accumulator 2164 can provide the compressed inert gas required in the gas inclusion assembly 1500. For example, the accumulator 2164 can provide gas to maintain the pressure of various components of the gas enclosure assembly 1500 such as, but not limited to, a pneumatic robot, a substrate float table, an air bearing, an air casing, a compressed gas tool, pneumatic actuation One or more of the devices and their combinations. As shown with respect to gas inclusion assembly and system 3000 in FIG. 38, gas inclusion assembly 1500 can have an OLED printing system 50 encased therein. As shown in Figures 24 and 30, the OLED printing system 50 can be supported by a granite table 70 and can include a substrate floating table 54 for transferring the substrate into a position in the printhead chamber and The substrate is supported during the OLED printing process. Alternatively, an air bearing 58 supported on the bridge 56 can be used instead of, for example, a linear mechanical bearing. For various embodiments of the gas enclosures and systems of the present teachings, the use of a variety of pneumatically operated devices and devices provides low particle generation performance and low maintenance. The compressor circuit 2160 can be assembled to continuously supply pressurized inert gas to various devices and equipment of the gas enclosure apparatus 3000. In addition to the supply of pressurized inert gas, the substrate floating platform 54 of the OLED printing system 50 utilizing air bearing technology Vacuum system 2550 is also utilized that is in communication with gas enclosure assembly 1500 via line 2552 when valve 2554 is in the open position.

The pressurized inert gas recirculation system in accordance with the present teachings can have a pressure controlled bypass circuit 2165 as shown in Fig. 38 with respect to compressor circuit 2160, which is used to compensate for variable pressure of pressurized gas during use. The need to provide dynamic balancing of the various embodiments of the gas inclusion assembly and system taught herein. For various embodiments of the gas inclusion assembly and system in accordance with the present teachings, the bypass circuit can maintain a constant pressure in the accumulator 2164 without interrupting or changing the pressure in the enclosure 1500. The bypass circuit 2165 can have a first bypass inlet valve 2161 located on the inlet side of the bypass circuit 2165, unless the bypass circuit 2165 is used, the first bypass inlet valve is closed. The bypass circuit 2165 can also have a back pressure regulator that can be used when the second valve 2163 is closed. The bypass circuit 2165 can have a second accumulator 2168 disposed on the outlet side of the bypass circuit 2165. For various embodiments of a compressor circuit 2160 that utilizes a zero-intrusion compressor, the bypass circuit 2165 can compensate for a small amount of pressure deviation that may occur over time during use of the gas inclusion assembly and system. When the bypass inlet valve 2161 is in the open position, the bypass circuit 2165 can be in fluid communication with the compressor circuit 2160 on the inlet side of the bypass circuit 2165. When the bypass inlet valve 2161 is open, if the inert gas from the compressor circuit 2160 is not required in the interior of the gas inclusion assembly 1500, the inert gas split through the bypass circuit 2165 can be recirculated to the compressor. The compressor circuit 2160 is configured to split the inert gas via the bypass circuit 2165 when the pressure of the inert gas in the accumulator 2164 exceeds a predetermined threshold pressure. The pre-set critical pressure of the accumulator 2164 can be between about 25 psig to about 200 psig at a flow rate of at least about 1 cubic inch per minute (cfm), or at a flow rate of at least about 1 cubic inch per minute (cfm). Lower may be between about 50 psig to about 150 psig, or may be between about at least about 1 cubic inch per minute (cfm). Between 75 psig and about 125 psig, or between about 90 psig to about 95 psig at a flow rate of at least about 1 cubic inch per minute (cfm).

Various embodiments of compressor circuit 2160 may utilize a variety of compressors other than zero intrusion compressors, such as variable speed compressors or compressors that may be controlled to be in an open or closed state. As discussed earlier, zero-intrusion compressors ensure that no atmospheric reactive species can be introduced into the gas inclusion assembly and system. Thus, any compressor assembly that prevents atmospheric reactive species from being introduced into the gas inclusion assembly and system can be used in the compressor circuit 2160. According to various embodiments, the gas inclusion assembly and compressor 2162 of system 3000 may be packaged in, for example, but not limited to, a hermetic sealed housing. The interior of the housing can be configured to be in fluid communication with an inert gas source, such as the inert gas forming the inert gas atmosphere for the gas inclusion assembly 1500. For various embodiments of the compressor circuit 2160, the compressor 2162 can be controlled at a constant speed to maintain a constant pressure. In other embodiments that do not utilize a zero intrusion compressor compressor circuit 2160, the compressor 2162 can be turned off when the maximum critical pressure is reached and the compressor 2162 is opened when the minimum critical pressure is reached.

In FIG. 39 regarding the gas inclusion assembly and system 3100, a blower circuit 2190 and a blower vacuum circuit 2550 are shown for use in a substrate floating platform of an OLED printing system 1050 packaged in a gas inclusion assembly 1500. 1054 operation. As discussed above with respect to compressor circuit 2160, blower circuit 2190 can be assembled to continuously supply pressurized inert gas to substrate floating table 54.

Various embodiments of gas inclusion assemblies and systems that may utilize a pressurized inert gas recirculation system may have various circuits utilizing a plurality of pressurized gas sources, such as at least one of a compressor, a blower, and combinations thereof. In Figure 39 on the gas inclusion assembly and system 3100, compression The machine circuit 2160 can be in fluid communication with an external gas circuit 2500 that can be used to supply an inert gas to the high consumption manifold 2525 and the low consumption manifold 2513. For various embodiments of the gas inclusion assembly and system in accordance with the present teachings, as shown in FIG. 39 with respect to the gas inclusion assembly and system 3000, the high consumption manifold 2525 can be used to supply inert gases to various devices and equipment. One or more of such as, but not limited to, a substrate floating table, a pneumatic robot, an air bearing, an air cannula, and a compressed air tool, and combinations thereof. For various embodiments of gas inclusion assemblies and systems in accordance with the present teachings, low consumption 2513 can be used to supply inert gas to one of various devices and devices, such as, but not limited to, one of a separator and a pneumatic actuator, and combinations thereof. More.

For various embodiments of the gas inclusion assembly and system 3100, the blower circuit 2190 can be used to supply various embodiments of pressurized inert gas to the substrate floatation station 1054, while the compressor circuit 2160 in fluid communication with the external gas circuit 2500 can be used to supply Pressurizing the inert gas to one or more of, for example, but not limited to, a pneumatic robot, an air bearing, an air casing, and a compressed gas tool, and combinations thereof. In addition to the supply of pressurized inert gas, the substrate floating table 54 of the OLED printing system 1050 utilizing air bearing technology also utilizes a blower vacuum 2550 that is coupled to the gas inclusion assembly via line 2552 when valve 2554 is in the open position. 1500 connected. The housing 2192 of the blower circuit 2190 can maintain: a first blower 2194 for supplying a source of pressurized inert gas to the substrate floatation stage 1054; and a second blower 2550 that acts as a substrate floating platform 1054 in an inert gas environment Vacuum source. For various embodiments of the substrate floating table, attributes that may be suitable for use as a source of pressurized inert gas or vacuum source include, for example, but not limited to, a blower having high reliability; providing a low maintenance of the blower, having variable speed control and having the broad flow volume; various embodiments can be provided between about 100m ³ / h to a volume flow rate of between about 2,500m ³ / h. Various embodiments of the blower circuit 2190 can additionally have: a first isolation valve 2193 at the inlet end of the blower circuit 2190; and a check valve 2195 and a second isolation valve 2197 at the outlet end of the blower circuit 2190. Various embodiments of the blower circuit 2190 can have: an adjustable valve 2196, which can be, for example, but not limited to, a gate valve, a butterfly valve, or a ball valve; and a heat exchanger 2198 for use from the blower assembly 2190 to The inert gas of the substrate floating table system 1054 is maintained at a defined temperature.

Figure 39 depicts an external gas circuit 2500, also shown in Figure 38, for integrating and controlling an inert gas source 2509 and a clean dry air (CDA) source 2512 for use with the gas inclusion assembly of Figure 38 and Various aspects of the operation of system 3000 and gas inclusion assembly of FIG. 39 and system 3100. The outer gas circuit 2500 of Figures 38 and 39 can include at least four mechanical valves. The valves include a first mechanical valve 2502, a second mechanical valve 2504, a third mechanical valve 2506, and a fourth mechanical valve 2508. These various valves are located in various flow lines in a position that allows control of either an inert gas, such as, for example, nitrogen, a noble gas, any combination thereof, and an air source, such as a clean dry Air (CDA). Packaged inert gas line 2510 extends from packaged inert gas source 2509. The packaged inert gas line 2510 continues to linearly extend as a low consumption manifold line 2512 that is in fluid communication with the low consumption manifold 2513. The first line segment 2514 of the cross line extends from the first flow contact 2516, which is located at the intersection of the package inert gas line 2510, the low consumption manifold line 2512, and the first line 2514 of the intersection line. The first line segment 2514 of the cross line extends to the second flow contact 2518. Compressor inert gas line 2520 extends from accumulator 2164 of compressor circuit 2160 and terminates at second flow contact 2518. The CDA line 2522 extends from the CDA source 2512 and continues to extend as a high consumption manifold line 2524 that is in fluid communication with the high consumption manifold 2525. The third flow contact 2526 is positioned at the intersection of the cross line second section 2528, the clean dry air line 2522, and the high consumption manifold line 2524. The cross line second section 2528 extends from the second flow contact 2518 to the third flow contact 2526.

With respect to the description of the external gas circuit 2500 and with reference to Figure 40, the following is a summary of some of the various modes of operation, with Figure 40 being a table of valve positions for various operating modes of the gas inclusion assembly and system.

The table of Figure 40 indicates a mode of operation in which the valve state produces only an inert gas compressor mode of operation. In the processing mode as shown in FIG. 38 and indicated in FIG. 40 with respect to the valve state, the first mechanical valve 2502 and the third mechanical valve 2506 are in a closed assembly. The second mechanical valve 2504 and the fourth mechanical valve 2508 are in an open assembly. Due to these particular valve combinations, the compressed inert gas is allowed to flow to the low consumption manifold 2513 and to the high consumption manifold 2525. Under normal operation, the inert gas from the packaged inert gas source and the clean dry air from the CDA source are prevented from flowing to either the low consumption manifold 2513 and the high consumption manifold 2525.

As indicated in Figure 40 and with reference to Figure 39, there is a series of valve states for maintenance and recovery. Various embodiments of the gas inclusion assemblies and systems of the present teachings may require maintenance from time to time and additionally require recovery from system failure. In this particular mode, the second mechanical valve 2504 and the fourth mechanical valve 2508 are in a closed assembly. The first mechanical valve 2502 and the third mechanical valve 2506 are in an open assembly. The packaged inert gas source and CDA source provide an inert gas that will be supplied by the low consumption manifold 2513 to those components that are low in consumption and additionally have an ineffective volume that would be difficult to effectively flush during recovery. Examples of such components include pneumatic actuators. In contrast, the high-volume manifold 2525, CDA can be supplied to their components for high consumption during maintenance. Isolating the compressor with valves 2504, 2508, 2530 prevents reactants such as oxygen and water vapor An inert gas in a contaminated compressor and accumulator.

After the maintenance or recovery has been completed, the gas inclusion body assembly must be flushed through several cycles until each of the various reactive atmospheric species, such as oxygen and water, has reached a sufficiently low level, such as 100 ppm or less, for example 10 ppm or less, 1.0 ppm or less, or 0.1 ppm or less. As indicated in Figure 40 and with reference to Figure 39, during the flush mode, the third mechanical valve 2506 is closed and the fifth mechanical valve 2530 is also in a closed assembly. The first mechanical valve 2502, the second mechanical valve 2504, and the fourth mechanical valve 2508 are in an open assembly. Due to this particular valve assembly, only the package inert gas flow is allowed and allowed to flow to both the low consumption manifold 2513 and the high consumption manifold 2525.

As indicated in FIG. 40 and with reference to FIG. 38, the "no flow" mode and the leak test mode are modes that are used as needed. The "no flow" mode has a valve state combination mode in which the first mechanical valve 2502, the second mechanical valve 2504, the third mechanical valve 2506, and the fourth mechanical valve 2508 are all in a closed configuration. This closed assembly produces a "no flow" mode in which no gas from any of the inert gas source, CDA source or compressor source can reach the low consumption manifold 2513 or the high consumption manifold 2525. This "no flow mode" can be useful when the system is not in use and can remain idle for long periods of time. The leak test mode can be used to detect leaks in the system. The leak test mode uses a specially compressed inert gas that isolates the system from the high consumption manifold 2525 of Figure 39 for low consumption components of low consumption manifold 2513 (such as separators and pneumatic actuators) ) Perform a leak check. In this test mode, the first mechanical valve 2502, the third mechanical valve 2506, and the fourth mechanical valve 2508 are all in a closed assembly. Only the second mechanical valve 2504 is in the open assembly. Thus, compressed nitrogen can flow from the compressor inert gas source 2519 to the low consumption manifold 2513 and there is no gas flowing to the high consumption manifold 2525.

Various embodiments of the floating station can be used to achieve stable delivery of loads such as OLED flat panel display substrates in any of the various embodiments of the gas inclusion assembly and system of the present teachings. It is contemplated that the frictionless floatation station can provide stable delivery of loads such as OLED substrates for printing in any of the various embodiments of the inert gas inclusions of the present teachings.

For example, in FIG. 1, gas inclusion assembly and system 2000 can include a gas inclusion assembly 1500 having an inlet gate 1512 and an outlet gate 1522 for moving substrates such as OLED flat panel substrates into and out. The gas inclusion system 2000 is removed. In FIG. 37, the gas inclusion assembly and system 2400 can have a gas inclusion assembly 1500 as shown mounted on a base 1200 that can encapsulate the OLED printing system 50. The substrate floating table 54 of the OLED printing system 50 defines a path through which the substrate (not shown) can be moved through the inert gas inclusion assembly and system 2400 during inkjet printing of the OLED flat panel display. As discussed above with respect to FIG. 38, various embodiments of the gas inclusion assembly and system can have an external circuit including, for example, but not limited to, pressurized inert gas and vacuum that can be used in the operation of the floating table. Compressor circuit as well as vacuum source. As discussed above with respect to Figure 39, various embodiments of the external circuit utilizing blower technology can provide pressurized inert gas and a vacuum source for operating the floating table.

As discussed above, various embodiments of the gas inclusion assembly and system of the present teachings can process a range of OLED flat panel display substrates, starting from smaller than the 3.5th generation substrate having a size of approximately 61 cm x 72 cm, and progressively. For the size of the higher generation. It is contemplated that various embodiments of the gas inclusion assembly and system can handle a 5.5th generation mother glass size of about 130 cm X 150 cm and a 7.5th generation size of about 195 cm x 225 cm, and each substrate can be cut into Eight 42" plates or six 47" plates and larger. As discussed earlier, the 8.5th generation is approximately 220cm x 250cm and each substrate can be cut into six 55" plates or eight 46" plates. However, the size of the substrate generation continues to advance so that the currently available 10th generation having a size of about 285 cm x 305 cm will not be the ultimate generation of substrate size. In addition, the sizing of terms derived from the use of glass-based substrates can be applied to substrates suitable for any material used in OLED printing. Thus, in various embodiments of the gas inclusion assembly and system of the present teachings, there are a variety of substrate sizes and materials that require stable delivery during printing.

A floating station in accordance with various embodiments of the present teachings is depicted in FIG. The prior art floating station 700 can have a zone 710 in which pressure and vacuum can be applied via a plurality of turns. This zone with pressure and vacuum control effectively provides a fluidic spring with bi-directional stiffness between zone 710 and the substrate (not shown), thereby creating substantial control of the gap between substrate and zone 710. . The gap existing between the load and the surface of the floating table is referred to as the fly height. The region of the floating table 700 of Figure 41, such as zone 710, can provide a controllable levitation height for loads such as substrates in which a plurality of pressure enthalpy and vacuum enthalpy are used to create a fluid spring having bi-directional stiffness.

The first transition zone 720 and the second transition zone 722 are adjacent to the zone 710, respectively, and then the first transition zone 720 and the second transition zone 722 are respectively only the pressure zones 740 and 742. In such transition zones, the ratio of pressure nozzles to vacuum nozzles gradually increases toward the pressure zone only to provide a gradual transition from zone 710 to zones 740 and 742. As indicated in Figure 41, Figure 42 depicts an expanded view of three zones. For various embodiments, such as the substrate floating table depicted in Figure 41, only the pressure zones 740, 742 are depicted as being comprised of a rail structure. For various embodiments of the substrate floating table, only the pressure zone (such as the pressure zone only 740, 742 of Figure 41) may be comprised of a continuous plate (such as the continuous plate depicted with respect to the pressure-vacuum zone 710 of Figure 41).

For various embodiments of the floating table as depicted in Figure 41, there may be a substantially uniform height between the pressure-vacuum zone, the transition zone and only the pressure zone such that within tolerance, the three zones are substantially one In the plane. One of ordinary skill will appreciate that the length of the various zones can vary. For example, without limitation, to provide a sense of scale and proportion, the transition zone can be about 400 mm for each substrate, and only the pressure zone can be about 2.5 m, and the pressure-vacuum zone can be about 800 mm.

In FIG. 41, only pressure zones 740 and 742 do not provide a fluid spring having bi-directional stiffness, and thus do not provide control that zone 710 can provide. Therefore, the levitation height of the load above only the pressure zone is typically greater than the levitation height of the substrate above the pressure-vacuum zone to allow sufficient height in only the pressure zone so that the load will not collide with the floating table. For example, without limitation, it may be desirable to process the OLED panel substrate to have a levitation height of between about 150[mu] and about 300[mu] above the pressure only regions, such as regions 740 and 742, and then have about 30 [mu] to above the pressure-vacuum region, such as region 710. A suspension height of between about 50μ.

For various embodiments of the floating table 700, the result is a combination of different zones that provide variable levitation height for all zones and a uniform height across the floating table, as substrate deflection may occur as the substrate travels over the floating table. 43A and 43B depict substrate deflection as substrate 760 travels over floating table 700. Portion 710 having a first upper vacuum region levitation height FH _1, and the substrate 760 resides just above the pressure zone 740 - in FIG. 43A, when the substrate 760 travels over the floating station 700, the substrate 760 residing in the pressure There is a second levitation height FH ₂ and the portion of the substrate 760 that resides above the transition zone 720 has a variable levitation height. In FIG 43B, when the substrate 760 travels in the opposite direction over the floating station 700, the substrate 760 residing on the pressure - vacuum region above the portion 710 having a first suspension height FH _1, the substrate 760 and the pressure zone 742 reside in only The upper portion has a second levitation height FH ₂ and the portion of the substrate 760 that resides above the transition region 722 can have a variable levitation height. Thus, in any direction of travel of the substrate 150 above the floating table 200, the deflection in the substrate 760 is apparent.

In various embodiments of the gas package assembly and system of the present teachings of a packageable printing system for printing, for example, but not limited to, an OLED display panel substrate, some degree of substrate deflection may be There is no adverse effect on the manufactured goods. However, for various embodiments utilizing the printing process of the gas inclusion assembly and system in accordance with the present teachings, substrate deflection can have a detrimental effect on the article of manufacture.

Thus, various embodiments of the floating table as depicted in FIG. 44 can have a variable transition zone height to maintain a substantially flat load such as an OLED flat panel display substrate as the substrate moves over the floating table. 44 depicts a first transition zone 820 and a second transition zone 822 having a slanted arrangement between the pressure-vacuum zone 810 and the first pressure-only zone 840 and the second pressure-only zone 842, respectively. The slanted arrangement of the first transition zone 820 and the second transition zone 822 provides a height difference between the pressure-vacuum zone 810 and the first pressure-only zone 840 and the second pressure-only zone 842. As depicted in FIG. 44, within the tolerance, the first pressure only zone 840 and the second pressure only zone 842 are substantially in the same plane, while the pressure-vacuum zone 810 is in a plane parallel to the pressure zone only. The substantially parallel plane defined by the pressure-vacuum zone 810 relative to the first pressure-only zone 840 and the second pressure-only zone 842 is offset by a height difference that compensates for the difference in levitation height above the various zones.

As discussed above with respect to various embodiments of the substrate floating table as depicted in FIG. 41, only pressure zones 840, 842 are depicted in FIG. 44 as being comprised of a rail structure. For various embodiments of the substrate floating table, only the pressure zone (such as the pressure zone only 840, 842 of FIG. 44) may be comprised of a continuous plate (such as the continuous plate depicted with respect to the pressure-vacuum zone 810 of FIG. 44).

Floating station 700 in accordance with the present teachings, as depicted in Figures 45A and 45B Various embodiments, with the result of providing a combination of variable levitation heights for all zones and different zones across different heights of the floating table, the substrate can maintain a substantially flat arrangement as the substrate travels over the floating table.

Portion 810 having a first upper vacuum region levitation height FH _1, and the substrate 860 resides just above the pressure zone 840 - in FIG. 45A, when the substrate 860 travels over the floating station 800, the substrate 860 residing in the pressure Has a second levitation height FH ₂ . However, the transition zone 820 has a slanted arrangement that provides a height difference between the pressure-vacuum zone 810 and only the pressure zone 840 that compensates for the difference in levitation height between the pressure-vacuum zone 810 and only the pressure zone 840 Substrate 860 maintains a generally flat arrangement as substrate 860 travels over three different zones. Portion 810 having a first upper vacuum region levitation height FH _1, and the substrate 860 resides just above the pressure zone 842 - in FIG. 45B, when the substrate 860 travels over the floating station 800, the substrate 860 residing in the pressure Has a second levitation height FH ₂ . However, the transition zone 842 has a slanted arrangement that provides a height difference between the pressure-vacuum zone 810 and only the pressure zone 842 that compensates for the difference in levitation height between the pressure-vacuum zone 810 and only the pressure zone 842 Substrate 860 maintains a generally flat arrangement as substrate 860 travels over three different zones. Thus, in any direction of travel of the substrate 860 above the floating table 800, the substrate 860 can maintain a substantially flat arrangement.

Various embodiments of the floating table 700 and the floating table 800 can be housed in a gas enclosure that includes the gas inclusion assembly of the present teachings, such as but not limited to that depicted and described with respect to Figures 3, 23, and 29 They are gas inclusion assemblies that can be integrated with the various system functions described with respect to FIG. Various embodiments of gas inclusions of various embodiments that may have external circuits such as, but not limited to, those external circuits depicted in Figures 38 and 39 that provide pressurized inert gas and vacuum, and gas inclusions and Various embodiments of the system may utilize the various floating tables Embodiments are directed to transporting loads in an inert gas environment in accordance with the teachings.

All publications, patents, and patent applications mentioned in this specification are hereby incorporated by reference as if the same .

Although the embodiments of the present disclosure have been shown and described, it will be apparent to those skilled in the art that these embodiments are provided by way of example only. Many variations, modifications, and alternatives will now occur to those skilled in the art without departing from the disclosure. It should be understood that the present disclosure may be practiced with various alternatives to the embodiments disclosed herein. It is intended that the scope of the present disclosure be defined by the scope of the claims and the scope of the claims

Claims (15)

A method for maintaining an industrial printing system, comprising: controlling a processing environment in a gas inclusion within a defined specification, the processing environment being different from an environment outside the gas inclusion The gas inclusion body includes: a first inclusion body segment defining a first volume of the gas inclusion body, wherein the first inclusion body segment is assembled to package the industrial printing system, the industrial use The printing system includes a row of print head assemblies having at least one print head; a second package section defining a second volume of the gas enclosure, wherein the second package sections are assembled for packaging At least one device for performing one of a maintenance procedure and a calibration procedure; a first opening configured to be selectively opened and closed to selectively select the first enclosure section and the first The two-package sections are placed in fluid communication with each other; and a second opening is assembled to selectively provide a connection between the second enclosure section and the environment outside the gas enclosure Positioning the first opening adjacent to the printhead assembly; and at the first opening Open and the second opening is closed while the at least one print head, and executes the maintenance program by one of the calibration procedure. The method of claim 1, further comprising: sealing the first opening with the printhead assembly after positioning the printhead assembly; wherein the sealing the second package section Isolated from the first body section. The method of claim 2, further comprising: maintaining the second enclosure section from the first enclosure section by opening the second opening, from outside the gas enclosure The environment receives the second enveloping section. The method of claim 3, further comprising: loading at least one of a replacement printhead and a replacement printhead assembly into the second package section. The method of claim 4, further comprising: removing at least one of a faulty printhead and a faulty printhead assembly from the second body section. The method of claim 5, further comprising: closing the second enclosure portion while maintaining the second enclosure section from the first enclosure section, the second enclosure section The environment is isolated from the gas enclosure; and the processing environment in the second enclosure section is controlled within the defined specification. The method of claim 1, wherein the second volume of the second inclusion section is from about 1% to about 10% of the total volume of one of the gas inclusions. The method of claim 1, wherein the second volume of the second inclusion section is from about 2% to about 5% of the total volume of one of the gas inclusions. The method of claim 1, wherein controlling the processing environment comprises: controlling the content of the reactive species to avoid contamination, oxidation, and damage of materials and substrates processed in the industrial printing system. The method of claim 9, wherein the content of the reactive species is controlled to be about 100 ppm or less. The method of claim 9, wherein the content of the reactive species is controlled to be about 1 ppm or less. The method of claim 1, wherein controlling the processing environment comprises providing an inert gas treatment environment in the gas enclosure. The method of claim 12, wherein the inert gas treatment environment is provided by using a gas selected from the group consisting of nitrogen, a rare gas, and combinations thereof. The method of claim 1, wherein controlling the processing environment comprises providing a low particle processing environment in the gas inclusion. The method of claim 1, wherein the industrial printing system is configured to perform a printing process on a substrate having a size from about 3.5th generation to about the 10th generation.