CN105807085A - Bearing rotation measuring device based on piezoelectric properties and electrostatic induction - Google Patents
Bearing rotation measuring device based on piezoelectric properties and electrostatic induction Download PDFInfo
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- CN105807085A CN105807085A CN201610146726.5A CN201610146726A CN105807085A CN 105807085 A CN105807085 A CN 105807085A CN 201610146726 A CN201610146726 A CN 201610146726A CN 105807085 A CN105807085 A CN 105807085A
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- piezoelectric membrane
- rotating shaft
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- 230000006698 induction Effects 0.000 title claims abstract description 19
- 238000001514 detection method Methods 0.000 claims abstract description 21
- 238000012545 processing Methods 0.000 claims abstract description 13
- 238000004458 analytical method Methods 0.000 claims abstract description 10
- 230000003750 conditioning effect Effects 0.000 claims abstract description 3
- 239000012528 membrane Substances 0.000 claims description 41
- 238000000034 method Methods 0.000 claims description 24
- 230000001133 acceleration Effects 0.000 claims description 17
- 230000008569 process Effects 0.000 claims description 11
- 239000003822 epoxy resin Substances 0.000 claims description 5
- 229920000647 polyepoxide Polymers 0.000 claims description 5
- 238000009434 installation Methods 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 230000003068 static effect Effects 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract description 14
- 230000000694 effects Effects 0.000 abstract description 8
- 230000008901 benefit Effects 0.000 abstract description 4
- 230000003321 amplification Effects 0.000 abstract 1
- 238000009499 grossing Methods 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 238000003199 nucleic acid amplification method Methods 0.000 abstract 1
- 230000035945 sensitivity Effects 0.000 abstract 1
- 230000008859 change Effects 0.000 description 10
- 230000001939 inductive effect Effects 0.000 description 5
- 238000012360 testing method Methods 0.000 description 3
- 230000003044 adaptive effect Effects 0.000 description 2
- 230000001195 anabolic effect Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000011326 mechanical measurement Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
- G01P3/42—Devices characterised by the use of electric or magnetic means
- G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed
- G01P3/443—Devices characterised by the use of electric or magnetic means for measuring angular speed mounted in bearings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
Abstract
The invention discloses a bearing rotation measuring device based on piezoelectric properties and electrostatic induction. The device comprises a piezoelectric film ring fixed to a rotating object, multiple piezoelectric film strips, electrostatic sensors, electrostatic detection circuits, a data acquisition module and an analysis and processing module; the piezoelectric film ring and the multiple piezoelectric film strips are uniformly attached to a shaft; the two electrostatic sensors directly face two piezoelectric films respectively; the two electrostatic detection circuits are connected with the two electrostatic sensors respectively and conduct electric charge amplification and smoothing on electric charges detected by the electrostatic sensors; an electrostatic signal processed through conditioning circuits is input into the analysis and processing module through the data acquisition module. The bearing rotation measuring device integrates the advantages of the piezoelectric effect and electrostatic induction, a measurement result is more accurate, and the device has the advantages of being high in sensitivity, simple in structure and convenient in operation; meanwhile, the device is great in environment adaptability and can be widely applied to the production process.
Description
Technical field
The invention belongs to mechanical measurement technique field, particularly to a kind of bearing rotational parameters detecting device based on piezoelectric property and electrostatic induction.
Background technology
In machinery rotary course, rotating speed and angular acceleration are very important parameters, it is possible to reflect the operation conditions of machinery intuitively, and especially the accuracy of measurement result and real-time are all extremely important indexs in measurement process.The existing method measuring machinery rotation is generally directed at the rotating speed measurement of machinery, measure after rotating speed derivation again thus drawing the change of acceleration, comparatively speaking accuracy is relatively low, and the method for existing measurement rotating speed, test the speed including Hall element, photoelectric coded disk tests the speed etc., these method measurement results are affected by environment relatively big, and reliability is relatively low, thus the adaptive capacity of adverse circumstances being proposed requirement to measuring instrument.In the last few years, having simple in construction and highly sensitive advantage due to electrostatic transducer, the application in measuring speed gets more and more, and wherein most popular is method of correlation.And in the last few years, in Angular Acceleration measurement, the measuring method not yet having had, it is usually employing magnetoelectric transducer measurement and obtains adjacent angular velocity, and try to achieve average Angular Acceleration by solving the rate of change of former and later two angular velocity, and up to the present do not have the method to instantaneous acceleration measurement.Piezoelectric has the electric charge of generation and is proportional to the characteristic of pressure and is widely used, and the characteristic of the characteristic and electrostatic transducer charge inducing that piezoelectric stress effect produces electric charge carries out effectively combining the accuracy of the measurement result that can be greatly improved electrostatic transducer, how the two is effectively combined the difficult point being to study.
Summary of the invention
It is an object of the invention to overcome the defect of above-mentioned prior art, it is proposed to a kind of bearing rotation measuring device based on piezoelectric property and electrostatic induction, measure rotating speed accuracy, reliability height, adaptive capacity to environment is strong.
It is an object of the invention to be realized by techniques below scheme:
The parameter detection device that a kind of bearing rotates, comprise a piezoelectric membrane ring being fixed in rotating shaft, several piezoelectric membrane strips being fixed in rotating shaft, two electrostatic transducers and follow-up signal and process circuit, one piezoelectric membrane ring is parallel with several piezoelectric membrane strips and uniformly fits on axle, two electrostatic transducers are strip, are parallel to rotating shaft and relative respectively with two piezoelectric membranes during installation；Two-way electrostatic detection circuit is connected with two electrostatic transducers respectively, electrostatic charge for being detected by electrostatic transducer obtains electrostatic detection signal after electric charge amplifies and filters, and two-way electrostatic detection signal is input to analysis and processing module by data acquisition module and it is carried out data process.
Piezoelectric membrane ring was tightly around axle one week, wide for 10-30mm, by J-2012 type epoxy resin stick and the bonding of rotating shaft metal surface, was arranged on rotating shaft surface and parallel with rotating shaft axial location；Piezoelectric membrane strip length 3-10mm, wide identical with piezoelectric membrane ring width, and fixed by epoxy resin stick, and parallel with piezoelectric membrane ring, number takes 1-10, and both centre-to-centre spacing are 50-80mm.
Electrostatic transducer is made up of electrode and radome, and electrode is embedded in inside radome；Electrostatic transducer electrode is slice shape, and length is 10-30mm, wide for 1-5mm；Radome is cylindrical interior outer radius difference 5-10mm, width 40-50mm, radome radius adjusts according to rotating shaft size to be measured, it is generally 1.2-1.5 times of shaft radius, and be connected to ground and realize electrostatic screen, electrode makes by copper sheet with radome, is connected by insulant between electrode with radome.
Static conditioning circuit is current-to-voltage converting circuit, and it is filtered and processing and amplifying.
Described analysis and processing module input signal is the treated electrostatic signal of two-way, by exporting speed and the angular acceleration of bearing rotary after analysis and processing module.
The present invention provides the benefit that based on the bearing rotation measuring device of piezoelectric property and electrostatic induction:
1) electric charge that piezoelectric effect is produced by the present invention is as the induction source of electrostatic induction, and rotation information is converted into charge information, it is achieved that the accurate measurement of mechanical separator speed, overcomes the shortcoming that traditional method accuracy is low；
2) present invention analyzes the change of the quantity of electric charge in piezoelectric effect process, by corresponding with angular acceleration for the change in electrical charge of electrostatic transducer, it is achieved that the real-time measurement of angular acceleration, the shortcoming overcoming traditional method poor real.
The bearing rotation measuring device based on piezoelectric property and electrostatic induction that the present invention proposes, fast response time, real-time is good, and measurement result is accurate, and the process of measurement is simple, simple installation, and environment is well adapted to ability.
Accompanying drawing explanation
The schematic diagram of Fig. 1 piezoelectric membrane and mechanical rotating shaft coupling apparatus；
Fig. 2 electrostatic transducer disposes schematic diagram with piezoelectric membrane relative position；
Fig. 3 piezoelectric property measures system construction drawing with electrostatic induction；
Detailed description of the invention
Below in conjunction with drawings and Examples, the present invention will be further described.
As shown in Figure 1, being first fixed in rotating shaft 1 by piezoelectric film material 3 by J-2012 type epoxy resin stick 2, its length direction is parallel with rotating axle；Wherein, piezoelectric film material includes piezoelectric membrane ring 4 and several piezoelectric membrane strips 5.
As shown in accompanying drawing 2 and accompanying drawing 3, electrostatic transducer 8 and 9 is constituted by electrostatic attraction electrode 6 and radome 7, the positive countershaft of electrostatic attraction electrode 6 is axially mounted and is connected with electrostatic transducer modulate circuit 10, and it is internal that electrostatic attraction electrode 6 is fixed on radome 7 by insulant, radome 7 ground connection, thus forming shielding, reduces the impact of external disturbance.
The bearing rotation measuring device based on piezoelectric effect Yu electrostatic induction that the present invention proposes, its structural representation is as shown in Figure 3, piezoelectric membrane ring 4 and several piezoelectric membrane strips 5 are fixed in rotating shaft, electrostatic transducer 8 and 9 is right against piezoelectric membrane 4 and 5 respectively, electrostatic transducer is connected with electrostatic detection circuit 10, and the electrostatic detection signal of two electrostatic transducer outputs is analyzed processing the rotating speed obtaining rotating shaft and angular acceleration through data acquisition module 11 and analysis and processing module 12.
The operation principle based on piezoelectric property Yu the measuring method of electrostatic induction that bearing rotates is as follows: in the process of axis of rotation, effect due to stick, can with axis of rotation with two piezoelectric membranes of rotating shaft bonding, the anabolic effect being subject to stick viscous force and gravity keeps geo-stationary with rotating shaft, thus the active force of piezoelectric membrane vertical direction can be produced piezoelectric effect by piezoelectric membrane, produce the electric charge being directly proportional to direction active force the surface being evenly distributed in piezoelectric membrane, and as the induction source of electrostatic transducer, rotation information is converted into charge information；When rotating shaft rotates, piezoelectric membrane strip 5 rotates simultaneously, electric charge produced by it also can rotate with, thus being sensed by electrostatic transducer 9 on the other side, the change of the relative distance generating period of the two, the charge inducing amount of electrostatic transducer then can have the change of increase and decrease therewith, and the change in this cycle is relevant with velocity of rotation v, can be measured the rotating speed obtaining rotating shaft by correlation speed measurement method；And for piezoelectric membrane ring 4, owing to it is positioned at the whole surface of rotating shaft cross-sectional periphery, thus being equivalent to not change with the relative distance of electrostatic transducer 8, electrostatic transducer 8 corresponding thereto then will not produce the change of cycle aspect, only the quantity of electric charge positive correlation on its charge inducing amount and piezoelectric membrane surface.And charge inducing amount is relevant with angular acceleration a and rotating speed v；So two-way electrostatic signal is obtained electrostatic detection signal through electrostatic detection circuit 10 and data acquisition module 11, in analysis and processing module 12, carry out relevant treatment can obtain rotating speed v by aligning the electrostatic detection signal to piezoelectric membrane strip, be analyzed process and can obtain angular acceleration a by aligning the electrostatic detection signal amplitude to piezoelectric membrane ring in conjunction with rotating speed.
Measure rotating speed principle as follows:
The principle that electrostatic method auto-correlation tests the speed: from analyzing, with piezoelectric membrane strip (2) to electrostatic detection signal be periodic signal, according to the statistical property receiving signal, adopt autocorrelative method, the cycle of signal can be extracted, the time needed thus obtaining rotating a circle is the T second, then rotating speed v=60/T (r/min) (1)
Measure angular acceleration principle as follows:
With piezoelectric membrane ring 4 to the detection signal of electrostatic transducer be stationary signal, in axis of rotation process, the directed force F anabolic effect power of gravity G and viscous force (F be) being perpendicular to ring direction is only produced piezoelectric effect by piezoelectric membrane ring 4.
F=mv2/R(2)
In formula: m is the quality of piezoelectric membrane, v is the speed of mechanical rotation, and R is the radius of rotating shaft.
The pressure charge Q that piezoelectric membrane ring 4 produces is proportional to F, the electric charge q that electrostatic transducer 8 senses is proportional to Q (being namely proportional to F), indeed through electric current, potential circuit is turned for the modulate circuit 10 of electrostatic transducer and is supplied to one charge discharging resisting path of electrode slice thus producing electric current, producing to be proportional to the voltage of electric current after discharge circuit, namely the amplitude U of output voltage is directly proportional to the rate of change dq/dt of charge inducing.
U=k*dF/dt=2kmv* (dv/dt)；(3)
In formula: U is the output voltage of electrostatic detection circuit, k is a constant, and m is the quality of piezoelectric membrane, and v is the speed of mechanical rotation, and R is the radius of rotating shaft.
V is the tangential velocity of rotating shaft, i.e. the rotating speed of rotating shaft, then dv/dt is the angular acceleration of rotating shaft.By analyzing it is found that the electrostatic detection signal being right against piezoelectric membrane ring is all directly proportional to rotating speed and angular acceleration.
U=K*v*a (4)
In formula: U is the output voltage of electrostatic detection circuit, K is a constant, and v is the speed of mechanical rotation, and a is the angular acceleration of rotating shaft.
Nominal data determines K by experiment, in conjunction with the rotating speed v that cross correlation process obtains, can obtain real-time angular acceleration a.
Claims (5)
1. the bearing rotation measuring device based on piezoelectric property and electrostatic induction, comprise a piezoelectric membrane ring being fixed in rotating shaft, several piezoelectric membrane strips being fixed in rotating shaft, two electrostatic transducers and follow-up signal and process circuit, it is characterized in that, one piezoelectric membrane ring is parallel with several piezoelectric membrane strips and uniformly fits on axle, two electrostatic transducers are strip, are parallel to rotating shaft and relative respectively with two piezoelectric membranes during installation；Two-way electrostatic detection circuit is connected with two electrostatic transducers respectively, electrostatic charge for being detected by electrostatic transducer obtains electrostatic detection signal after electric charge amplifies and filters, and two-way electrostatic detection signal is input to analysis and processing module by data acquisition module and it is carried out data process.
2. a kind of bearing rotation measuring device based on piezoelectric property and electrostatic induction according to claim 1, it is characterized in that, piezoelectric membrane ring was tightly around axle one week, width is 10-30mm, by J-2012 type epoxy resin stick and the bonding of rotating shaft metal surface, it is arranged on rotating shaft surface and parallel with rotating shaft axial location；Piezoelectric membrane strip length 3-10mm, wide identical with piezoelectric membrane ring width, and fixed by epoxy resin stick, and parallel with piezoelectric membrane ring, number takes 1-10, and both centre-to-centre spacing are 50-80mm.
3. a kind of bearing rotation measuring device based on piezoelectric property and electrostatic induction according to claim 1, it is characterised in that electrostatic transducer is made up of electrode and radome, and electrode is embedded in inside radome；Electrostatic transducer electrode is slice shape, and length is 10-30mm, wide for 1-5mm；Radome be cylindrical in outer radius difference 5-10mm, width 40-50mm, radome radius is 1.2-1.5 times of shaft radius, and is connected to ground and realizes electrostatic screen, and electrode and radome, by copper sheet making, are connected by insulant between electrode with radome.
4. a kind of bearing rotation measuring device based on piezoelectric property and electrostatic induction according to claim 1, it is characterised in that static conditioning circuit is current-to-voltage converting circuit, and it is filtered and processing and amplifying.
5. a kind of bearing rotation measuring device based on piezoelectric property and electrostatic induction according to claim 1, it is characterized in that, described analysis and processing module input signal is the treated electrostatic detection signal of two-way, is held speed and the angular acceleration of rotation by analysis and processing module rear output shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610146726.5A CN105807085A (en) | 2016-03-15 | 2016-03-15 | Bearing rotation measuring device based on piezoelectric properties and electrostatic induction |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610146726.5A CN105807085A (en) | 2016-03-15 | 2016-03-15 | Bearing rotation measuring device based on piezoelectric properties and electrostatic induction |
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| CN105807085A true CN105807085A (en) | 2016-07-27 |
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| CN201610146726.5A Pending CN105807085A (en) | 2016-03-15 | 2016-03-15 | Bearing rotation measuring device based on piezoelectric properties and electrostatic induction |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110595686A (en) * | 2019-09-29 | 2019-12-20 | 深圳和而泰家居在线网络科技有限公司 | Method and equipment for testing sensitivity of piezoelectric film |
| CN111766400A (en) * | 2019-04-02 | 2020-10-13 | 南京大学 | Method for judging positive and negative rotation of rotor based on charge induction |
| WO2022078228A1 (en) * | 2020-10-15 | 2022-04-21 | 国能大渡河检修安装有限公司 | Radial fault simulation test system for rotary mechanical apparatus |
| CN114560257A (en) * | 2022-02-25 | 2022-05-31 | 四川数字经济产业发展研究院 | Device and method for monitoring running state of conveying belt carrier roller based on electrostatic induction |
| GB2605260A (en) * | 2020-10-15 | 2022-09-28 | Chn Energy Dadu River Repair & Installation Co Ltd | Radial fault simulation test system for rotary mechanical apparatus |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5247252A (en) * | 1988-12-22 | 1993-09-21 | Robert Bosch Gmbh | Sensor for determining angular velocity with piezoceramic component formed as thickness shear oscillator |
| CN1738725A (en) * | 2003-01-17 | 2006-02-22 | Vasa传感器股份公司 | Sensor arrangement |
| CN101505978A (en) * | 2006-09-20 | 2009-08-12 | 米其林技术公司 | In-tire multi-element piezoelectric sensor |
| CN101949951A (en) * | 2009-05-13 | 2011-01-19 | 罗伯特·博世有限公司 | The rotation sensor that has Vehicular electric generator |
| CN102175892A (en) * | 2011-01-26 | 2011-09-07 | 边义祥 | Multidimensional acceleration sensor with cored piezoelectric rods and acceleration measurement method |
| CN202975039U (en) * | 2012-09-17 | 2013-06-05 | 华北电力大学 | Device for measuring rotating speed of rotating member through electrostatic sensor |
-
2016
- 2016-03-15 CN CN201610146726.5A patent/CN105807085A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5247252A (en) * | 1988-12-22 | 1993-09-21 | Robert Bosch Gmbh | Sensor for determining angular velocity with piezoceramic component formed as thickness shear oscillator |
| CN1738725A (en) * | 2003-01-17 | 2006-02-22 | Vasa传感器股份公司 | Sensor arrangement |
| CN101505978A (en) * | 2006-09-20 | 2009-08-12 | 米其林技术公司 | In-tire multi-element piezoelectric sensor |
| CN101949951A (en) * | 2009-05-13 | 2011-01-19 | 罗伯特·博世有限公司 | The rotation sensor that has Vehicular electric generator |
| CN102175892A (en) * | 2011-01-26 | 2011-09-07 | 边义祥 | Multidimensional acceleration sensor with cored piezoelectric rods and acceleration measurement method |
| CN202975039U (en) * | 2012-09-17 | 2013-06-05 | 华北电力大学 | Device for measuring rotating speed of rotating member through electrostatic sensor |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111766400A (en) * | 2019-04-02 | 2020-10-13 | 南京大学 | Method for judging positive and negative rotation of rotor based on charge induction |
| CN110595686A (en) * | 2019-09-29 | 2019-12-20 | 深圳和而泰家居在线网络科技有限公司 | Method and equipment for testing sensitivity of piezoelectric film |
| WO2022078228A1 (en) * | 2020-10-15 | 2022-04-21 | 国能大渡河检修安装有限公司 | Radial fault simulation test system for rotary mechanical apparatus |
| GB2605260A (en) * | 2020-10-15 | 2022-09-28 | Chn Energy Dadu River Repair & Installation Co Ltd | Radial fault simulation test system for rotary mechanical apparatus |
| CN114560257A (en) * | 2022-02-25 | 2022-05-31 | 四川数字经济产业发展研究院 | Device and method for monitoring running state of conveying belt carrier roller based on electrostatic induction |
| CN114560257B (en) * | 2022-02-25 | 2023-12-26 | 四川数字经济产业发展研究院 | Device and method for monitoring running state of conveyor belt carrier roller based on electrostatic induction |
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Application publication date: 20160727 |