CN105806263A - Straightness error compensation method for etching echelle grating through precision guide rail - Google Patents
Straightness error compensation method for etching echelle grating through precision guide rail Download PDFInfo
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- CN105806263A CN105806263A CN201610261026.0A CN201610261026A CN105806263A CN 105806263 A CN105806263 A CN 105806263A CN 201610261026 A CN201610261026 A CN 201610261026A CN 105806263 A CN105806263 A CN 105806263A
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- guide rail
- echelle grating
- precise guide
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention relates to the technical field of optical devices, in particular to a straightness error compensation method for etching an echelle grating through a precision guide rail.The technical problem that a precision guide rail cannot be used for etching the echelle grating is solved.The method comprises the steps that straightness accumulative error data of the precision guide rail is firstly measured, a precision guide rail straightness accumulative error curve is drawn according to the measured data, and a linear compensation equation is set up according to the precision guide rail straightness accumulative error curve; diffracted wavefront data of the echelle grating etched by the precision guide rail with the linear compensation equation as a stepping value is measured, and a diffracted wavefront curve of the echelle grating is drawn according to the measured data; then a quadratic compensation equation is set up according to the diffracted wavefront curve of the echelle grating; then the precision guide rail with the quadratic compensation equation as a stepping value is used for etching the echelle grating.According to the method, the etched echelle grating has a good diffracted wave face.
Description
Technical field
The present invention relates to optic technology, particularly relate to the technology of a kind of straightness error compensation method utilizing precise guide rail delineation echelle grating.
Background technology
Along with the fast development of China's manufacturing, every profession and trade technical need constantly promotes, and the performance indications of precise guide rail are " when the river rises the boat goes up " also.The raising of guide precision has become important research direction, and guide rail linearity is the most important geometric accuracy index of precise guide rail.But owing to process equipment precision and equipment technology precision are limited, the linearity of precise guide rail just cannot improve again through the way of processing and debugging after having equipped.
The linearity of the precise guide rail that currently there are cannot meet the requirement of preparation echelle grating, its reason is in that existing precise guide rail exists bigger cumulative error, thus can cause that the point diffraction wave surface of echelle grating is poor, do not reach echelle grating and prepare requirement.
Summary of the invention
For the defect existed in above-mentioned prior art, the technical problem to be solved is to provide a kind of echelle grating prepared and has the straightness error compensation method utilizing precise guide rail delineation echelle grating of good point diffraction wave surface.
In order to solve above-mentioned technical problem, a kind of straightness error compensation method utilizing precise guide rail delineation echelle grating provided by the present invention, it is characterised in that specifically comprise the following steps that
1) utilize two-frequency laser interferometer, with the step value that the grating constant of echelle grating is measured for precise guide rail, with one stepping of every feeding, measure the mode of an actual mobile displacement, measure the linearity cumulative error data of precise guide rail；
2) according to the precise guide rail linearity cumulative error data recorded, draw out precise guide rail linearity cumulative error curve, and calculate precise guide rail linearity cumulative error curvilinear function fAccumulation；
3) setting up a single compensation equation according to precise guide rail linearity cumulative error curve is:
f1=fTheoretical-a×fAccumulation；
Wherein, f1For single compensation function, fTheoreticalFor the theory function of precise guide rail, a is precise guide rail straightness error penalty coefficient；
4) with single compensation function f1Being similar to once linear function is principle, and employing laboratory method draws the error compensation coefficient a of the single compensation equation of precise guide rail；
5) wavefront interferometer is utilized, with single compensation function f1For step value, measurement is with single compensation function f1For the diffraction wave front data of the echelle grating that the precise guide rail of step value depicts, and go out curve before the diffracted wave of this echelle grating according to Plotting data before the diffracted wave recorded, and calculate curvilinear function f before the diffracted wave of this echelle gratingWavefront；
6) according to curve before the diffracted wave of the echelle grating in step 5, setting up a second compensation equation is:
f2=f1-fWavefront,
Wherein, f2For second compensation function；
7) adopt with second compensation function f2Precise guide rail for step value delineates echelle grating finished product.
Further, in described step 4, show that the method for the error compensation coefficient a of the single compensation equation of precise guide rail is as follows:
4.1) initial value of specification error penalty coefficient a, and set 1 constant value as b；
4.2) adopt with single compensation function f1Precise guide rail for step value depicts an echelle grating, recycles wavefront interferometer, with single compensation function f1For step value, measure value before the diffracted wave of the echelle grating that precise guide rail depicts；
4.3) a=a+b is made；
4.4) adopt with single compensation function f1Precise guide rail for step value depicts an echelle grating, recycles wavefront interferometer, with single compensation function f1For step value, measure value before the diffracted wave of the echelle grating that precise guide rail depicts；
4.5) if value before the diffracted wave of current echelle grating, it is worth less than before the diffracted wave of previous echelle grating, then returns step 4.3, otherwise then using the currency of a end value as a.
The straightness error compensation method utilizing precise guide rail delineation echelle grating provided by the invention, according to precise guide rail linearity cumulative error curve, echelle grating diffracted wave before curve precise guide rail is compensated, such that it is able to significantly improve the straightness error of precise guide rail, meeting the dividing precision requirement of echelle grating, the echelle grating depicted has good point diffraction wave surface.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the precise guide rail linearity cumulative error curve in the straightness error compensation method utilizing precise guide rail delineation echelle grating of the embodiment of the present invention, the actual mobile displacement that transverse axis (X-axis) in Fig. 1 is precise guide rail, the straightness error that the longitudinal axis (Y-axis) in Fig. 1 is precise guide rail；
Fig. 2 is in the straightness error compensation method utilizing precise guide rail delineation echelle grating of the embodiment of the present invention.
Detailed description of the invention
Illustrate embodiments of the invention are described in further detail below in conjunction with accompanying drawing; but the present embodiment is not limited to the present invention; the analog structure of every employing present invention and similar change thereof, all should list protection scope of the present invention in, and the pause mark in the present invention all represents the relation of sum.
A kind of straightness error compensation method utilizing precise guide rail delineation echelle grating that the embodiment of the present invention provides, it is characterised in that specifically comprise the following steps that
1) utilize two-frequency laser interferometer, with the step value that the grating constant of echelle grating is measured for precise guide rail, with one stepping of every feeding, measure the mode of an actual mobile displacement, measure the linearity cumulative error data of precise guide rail；
2) according to the precise guide rail linearity cumulative error data recorded, draw out precise guide rail linearity cumulative error curve (as shown in Figure 1), and calculate precise guide rail linearity cumulative error curvilinear function fAccumulation, fAccumulationComputational methods be prior art, it is possible to adopt existing software (such as MATLAB software) calculate obtain；
3) setting up a single compensation equation according to precise guide rail linearity cumulative error curve is:
f1=fTheoretical-a×fAccumulation；
Wherein, f1For single compensation function, fTheoreticalFor the theory function (this function is prior art) of precise guide rail, a is precise guide rail straightness error penalty coefficient；
4) with single compensation function f1Being similar to once linear function is principle, and employing laboratory method draws the error compensation coefficient a of the single compensation equation of precise guide rail, and specific experiment method is:
4.1) initial value of specification error penalty coefficient a, and set 1 constant value as b；
4.2) adopt with single compensation function f1Precise guide rail for step value depicts an echelle grating, recycles wavefront interferometer, with single compensation function f1For step value, measure value before the diffracted wave of the echelle grating that precise guide rail depicts；
4.3) a=a+b is made；
4.4) adopt with single compensation function f1Precise guide rail for step value depicts an echelle grating, recycles wavefront interferometer, with single compensation function f1For step value, measure value before the diffracted wave of the echelle grating that precise guide rail depicts；
4.5) if value before the diffracted wave of current echelle grating, it is worth less than before the diffracted wave of previous echelle grating, then returns step 4.3, otherwise then using the currency of a end value as a；
5) wavefront interferometer is utilized, with single compensation function f1For step value, measurement is with single compensation function f1Diffraction wave front data for the echelle grating that the precise guide rail of step value depicts, and go out curve (as shown in Figure 2) before the diffracted wave of this echelle grating according to Plotting data before the diffracted wave recorded, and calculate curvilinear function f before the diffracted wave of this echelle gratingWavefront, fWavefrontComputational methods be prior art, it is possible to adopt existing software (such as MATLAB software) calculate obtain；
6) according to curve before the diffracted wave of the echelle grating in step 5, setting up a second compensation equation is:
f2=f1-fWavefront,
Wherein, f2For second compensation function；
7) adopt with second compensation function f2Precise guide rail for step value delineates echelle grating finished product.
Claims (2)
1. the straightness error compensation method utilizing precise guide rail delineation echelle grating, it is characterised in that specifically comprise the following steps that
1) utilize two-frequency laser interferometer, with the step value that the grating constant of echelle grating is measured for precise guide rail, with one stepping of every feeding, measure the mode of an actual mobile displacement, measure the linearity cumulative error data of precise guide rail；
2) according to the precise guide rail linearity cumulative error data recorded, draw out precise guide rail linearity cumulative error curve, and calculate precise guide rail linearity cumulative error curvilinear function fAccumulation；
3) setting up a single compensation equation according to precise guide rail linearity cumulative error curve is:
f1=fTheoretical-a×fAccumulation；
Wherein, f1For single compensation function, fTheoreticalFor the theory function of precise guide rail, a is precise guide rail straightness error penalty coefficient；
4) with single compensation function f1Being similar to once linear function is principle, and employing laboratory method draws the error compensation coefficient a of the single compensation equation of precise guide rail；
5) wavefront interferometer is utilized, with single compensation function f1For step value, measurement is with single compensation function f1For the diffraction wave front data of the echelle grating that the precise guide rail of step value depicts, and go out curve before the diffracted wave of this echelle grating according to Plotting data before the diffracted wave recorded, and calculate curvilinear function f before the diffracted wave of this echelle gratingWavefront；
6) according to curve before the diffracted wave of the echelle grating in step 5, setting up a second compensation equation is:
f2=f1-fWavefront,
Wherein, f2For second compensation function；
7) adopt with second compensation function f2Precise guide rail for step value delineates echelle grating finished product.
2. the straightness error compensation method utilizing precise guide rail delineation echelle grating according to claim 1, it is characterised in that in described step 4, show that the method for the error compensation coefficient a of the single compensation equation of precise guide rail is as follows:
4.1) initial value of specification error penalty coefficient a, and set 1 constant value as b；
4.2) adopt with single compensation function f1Precise guide rail for step value depicts an echelle grating, recycles wavefront interferometer, with single compensation function f1For step value, measure value before the diffracted wave of the echelle grating that precise guide rail depicts；
4.3) a=a+b is made；
4.4) adopt with single compensation function f1Precise guide rail for step value depicts an echelle grating, recycles wavefront interferometer, with single compensation function f1For step value, measure value before the diffracted wave of the echelle grating that precise guide rail depicts；
4.5) if value before the diffracted wave of current echelle grating, it is worth less than before the diffracted wave of previous echelle grating, then returns step 4.3, otherwise then using the currency of a end value as a.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114101766A (en) * | 2021-12-20 | 2022-03-01 | 哈尔滨工业大学 | Compensation method for lateral return error of linear shaft of ultra-precision machine tool |
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| CN103399585A (en) * | 2013-08-14 | 2013-11-20 | 中国科学院长春光学精密机械与物理研究所 | Adjusting device for grating ruling knife and method thereof |
| US20130335825A1 (en) * | 2012-06-13 | 2013-12-19 | The Board Of Trustees Of The University Of Illinois | Method of Manufacture of X-Ray Diffraction Gratings |
| CN104237987A (en) * | 2014-08-27 | 2014-12-24 | 中国科学院长春光学精密机械与物理研究所 | Grating groove bending automatic control and correcting method |
| CN104516037A (en) * | 2014-12-17 | 2015-04-15 | 中国科学院长春光学精密机械与物理研究所 | Mechanical ruling method for aberration-reducing plane diffraction grating |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20130335825A1 (en) * | 2012-06-13 | 2013-12-19 | The Board Of Trustees Of The University Of Illinois | Method of Manufacture of X-Ray Diffraction Gratings |
| CN103399585A (en) * | 2013-08-14 | 2013-11-20 | 中国科学院长春光学精密机械与物理研究所 | Adjusting device for grating ruling knife and method thereof |
| CN104237987A (en) * | 2014-08-27 | 2014-12-24 | 中国科学院长春光学精密机械与物理研究所 | Grating groove bending automatic control and correcting method |
| CN104516037A (en) * | 2014-12-17 | 2015-04-15 | 中国科学院长春光学精密机械与物理研究所 | Mechanical ruling method for aberration-reducing plane diffraction grating |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114101766A (en) * | 2021-12-20 | 2022-03-01 | 哈尔滨工业大学 | Compensation method for lateral return error of linear shaft of ultra-precision machine tool |
| CN114101766B (en) * | 2021-12-20 | 2022-10-25 | 哈尔滨工业大学 | Compensation method for lateral return error of linear shaft of ultra-precision machine tool |
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Effective date of registration: 20191127 Address after: Room 1410-1411, North building, No. 1699, Zuchongzhi South Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Patentee after: Kunshan Shangli Optoelectronic Information Application Technology Research Institute Co., Ltd Address before: 200093 Shanghai military road, Yangpu District, No. 516 Patentee before: University of Shanghai for Science and Technology |
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Address after: Room 1410-1411, North building, No. 1699, Zuchongzhi South Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Patentee after: Kunshan Shangli Optoelectronic Information Application Technology Research Institute Co., Ltd Address before: Room 1410-1411, North building, No. 1699, Zuchongzhi South Road, Yushan Town, Kunming City, Jiangsu Province 215000 Patentee before: Kunshan Shangli Optoelectronic Information Application Technology Research Institute Co., Ltd |
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