CN105805411A - Novel micro valve device for disconnecting link - Google Patents
Novel micro valve device for disconnecting link Download PDFInfo
- Publication number
- CN105805411A CN105805411A CN201410841856.1A CN201410841856A CN105805411A CN 105805411 A CN105805411 A CN 105805411A CN 201410841856 A CN201410841856 A CN 201410841856A CN 105805411 A CN105805411 A CN 105805411A
- Authority
- CN
- China
- Prior art keywords
- fluid
- silicon chip
- silicon wafer
- gate
- mobile member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Micromachines (AREA)
- Electrically Driven Valve-Operating Means (AREA)
Abstract
The invention discloses a novel micro valve device for a disconnecting link. The novel micro valve device is formed by bonding an upper silicon wafer and a lower silicon wafer. The first silicon wafer layer is provided with an electrode port which is vertically through. A cavity is formed in the bottom surface of the first silicon wafer layer. Movable components are arranged in the cavity. A gate and a piezoelectric actuating part are arranged on the movable components. The second silicon wafer layer is provided with a liquid inlet, a liquid outlet and a control port which penetrate vertically. A groove is formed in the top surface of the second silicon wafer layer. A flow path is formed in the groove. After the first silicon wafer layer and the second silicon wafer layer are bonded, a closed cavity for liquid in the micro valve is formed by the cavity of the first silicon wafer layer, the liquid inlet, the liquid outlet, the control port and the groove of the second silicon wafer layer, the bottom surface of the first silicon wafer layer, and the top surface of the second silicon wafer layer. According to the novel micro valve device, the gate and the flow path are designed on the two different silicon wafer layers correspondingly, and the disturbance resistance of the structure is improved; and the low-leakage requirement of a micro valve is met through the formation of the internal closed cavity.
Description
Technical field
The present invention relates to the silicon valve of micro electro mechanical system field.
Background technology
Miniature valve is the Primary Component in microfluidic control, has important application in the field such as biologic medical, Industry Control.Based on the miniature valve of MEMS technology, there is the advantages such as control is accurate, cost is low, can be mass, stability and reliability is good.
Lock miniature valve can adapt to the working environment of high-pressure high-flow due to the advantage of structure, it is increasingly becoming the study hotspot in miniature valve commercial Application, and the structural design of actuator, gate and fluid passage in lock miniature valve, it is always up the key point of the micro-valve arrangement design of lock.
Patent US7011378 and patent US6523560 proposes the actuating form of the array V-type electric heating actuator adopting total silicon thickness, forms the gate of movement in silicon layer plane and controls the structure of plane outer fluid motion.Though adopting electric heating to activate form ensure that actuating displacement and output action power, but actuating structure and gate are in fluid chamber, actuation effect is easily subject to fluid heat transfer and the impact of fluid pressure, and under the version process conditions at home of three layers silicon-silicon bond conjunction, also owe maturation, yield rate and product effect are difficult to ensure that.
Patent US20070090314 designs and has manufactured hilted broadsword lock miniature valve, by integrated bi-morph piezo-electric executor, the structure of fluid in the outer disconnecting link chain of command in formation face, its gate and fluid passage are both formed in inside monolayer silicon chip, adopt two-sided deep silicon etching technology and silicon-silicon bond conjunction technology, form the two-layer miniature valve structure without closed cavity.The structure capacity of resisting disturbance obtained due to two-sided deep silicon etching technology is poor, it is easily destroyed in carrying out silicon-silicon bond conjunction process and makes yield rate relatively low, add in this bilayer miniature valve and do not form airtight fluid chamber, in the micro-valve actuation process of lock, fluid leakage amount is difficult to maintain industry allowed band, it is therefore desirable to this structure carries out the improvement of necessity.
Summary of the invention
The purpose that the present invention to reach just is to provide a kind of novel disconnecting link microvalve device, solves to realize under silicon bi-layer micro-valve arrangement form the silicon low leakage of micro-valve and a difficult problem that high anti-jamming capacity combines.
nullFor reaching above-mentioned purpose，The present invention adopts the following technical scheme that a kind of novel disconnecting link microvalve device，Formed by upper and lower two-layer wafer bonding，Ground floor silicon chip is provided with the electrode ports run through up and down，Ground floor silicon chip bottom surface is provided with cavity，It is provided with mobile member in described cavity，Described mobile member is provided with gate and piezoelectric actuated portion，Described mobile member includes the first mobile member and the second mobile member，Second layer silicon chip is provided with the fluid intake of up/down perforation，Fluid issuing and control port，Second layer silicon chip end face is provided with groove，It is provided with fluid passage in described groove，Described fluid passage includes inflow channel and goes out circulation road，Described inflow channel one end is fluid intake，The other end is the first fluid port controlled by the first gate on the first mobile member，Described go out circulation road one end be fluid issuing，The other end is the second fluid port controlled by the second gate on the second mobile member，After ground floor silicon chip and second layer wafer bonding，The fluid intake of the cavity of ground floor silicon chip and second layer silicon chip、Fluid issuing、Control port、The bottom surface of groove and ground floor silicon chip and the end face of second layer silicon chip，The airtight chamber of the fluid in the composition micro-valve of lock.
Preferably, described mobile member is T-shaped cantilever beam, and described T-shaped cantilever beam is made up of crossbeam and longeron, and described longeron is downwardly protrude to form the gate of the micro-valve of lock, and described crossbeam is provided with piezo-activator.
Preferably, described piezo-activator is formed on crossbeam, is made up of upper and lower two electrodes and piezoelectric, and piezoelectric is between upper and lower two electrodes, and external voltage is by being applied on the upper/lower electrode of piezo-activator through the electrode ports of ground floor silicon chip.
Preferably, the groove on second layer silicon chip includes yi word pattern pod and two translots with pod square crossing, and fluid intake and fluid issuing are arranged on the heteropleural end of two translots.
Preferably, the cavity on ground floor silicon chip includes the horizontal chamber that the vertical chamber of yi word pattern is vertical with vertical chamber with being located at two ends, vertical chamber heteropleural, and the crossbeam of T-shaped cantilever beam is positioned at horizontal intracavity, and longeron is positioned at vertical intracavity.
The present invention inflow channel by designing, go out circulation road, making at first fluid port all parallel with silicon layer plane with the direction of motion of second fluid passage port fluid, and the first gate and the second gate are when applying driving voltage, its shutter motion direction is all vertical with silicon layer plane.Therefore, in the micro-valve actuation process of lock, the actuating power of gate is vertical with fluid static pressure on wall before and after gate, is absent from situation about cancelling out each other, so that the actuating of gate will not be subject to the impact of fluid flowing, it is possible to adapt to the working environment of high-pressure high-flow.
And, by gate is separately designed with fluid passage on the silicon chip that two-layer is different, gate is made to be perpendicular to actuating power and the displacement of silicon layer plane through the generation that acts on of piezo-activator, and fluid is formed in parallel with the flow direction of silicon layer plane by fluid passage, so, allow for gate direction of actuation vertical with fluid flow direction, and improve the capacity of resisting disturbance of structure；Formation by internal airtight chamber, it is achieved that the low leakage requirement of micro-valve；Again through adopting piezo-activator, it is achieved that gate is being perpendicular to the effective exercise of fluid flow direction.
Accompanying drawing explanation
Below in conjunction with the drawings and specific embodiments, the invention will be further described:
Fig. 1 is the disconnecting link of the present invention micro-valve sectional structure chart at the first mobile member place；
Fig. 2 is the disconnecting link of the present invention micro-valve sectional structure chart at the second mobile member place；
Fig. 3 is ground floor silicon wafer horizontal sectional structure chart；
Fig. 4 is second layer silicon wafer horizontal sectional structure chart.
Detailed description of the invention
This novel disconnecting link miniature valve is formed by two-layer wafer bonding, as shown in Figures 1 to 4, ground floor silicon chip 1 is provided with the electrode ports run through up and down, and ground floor silicon chip bottom surface is provided with cavity, being provided with mobile member in described cavity, described mobile member is provided with gate and piezoelectric actuated portion.Second layer silicon chip 2 is provided with the fluid intake 21 of up/down perforation, fluid issuing 22 and control port, and second layer silicon chip end face is provided with groove, forms fluid passage in described groove.After ground floor silicon chip and second layer wafer bonding, the bottom surface of fluid intake on the cavity of ground floor silicon chip and second layer silicon chip, fluid issuing, control port, groove and ground floor silicon chip and the end face of second layer silicon chip, the airtight chamber of the fluid in the composition micro-valve of lock.
Described mobile member includes the first mobile member 31 and the second mobile member 32, described fluid passage includes inflow channel and goes out circulation road, described inflow channel one end is fluid intake 21, the other end is the first fluid port 211 controlled by the first gate on the first mobile member, described go out circulation road one end be fluid issuing 22, the other end is the second fluid port 221 controlled by the second gate on the second mobile member.First fluid port 211 and second fluid port 221 are the vertical mouths on second layer silicon chip, and when gate down moves in vertical direction, this mouthful is closed by the perpendicular end surface of gate.
Described mobile member is T-shaped cantilever beam, and described T-shaped cantilever beam is made up of crossbeam and longeron, and described longeron is downwardly protrude to form the gate of the micro-valve of lock, described crossbeam is provided with piezo-activator and forms piezoelectric actuated portion.First T-shaped cantilever beam 31 includes the first gate 311, the first piezo-activator 313 that first crossbeam 312 is installed, and the second T-shaped cantilever beam 32 includes the second gate 321, the second piezo-activator 323 that second cross beam 322 is installed.Corresponding first piezo-activator of ground floor silicon chip is provided with the first electrode ports 13, and corresponding second piezo-activator is provided with the second electrode ports 14.
Owing to gate longeron place is downwardly protrude to form thick beam region, crossbeam is then relatively thin thin beam region, the width ratio of thick beam and thin beam is about 3:1, thickness ratio is about 4:1, define T-shaped cantilever beam movable structure, piezo-activator is close to thin beam region, it is made up of electrode and piezoelectric, and piezoelectric is between upper and lower two electrodes, external voltage is by being applied on the upper/lower electrode of piezo-activator through the electrode ports of the first silicon chip, inverse piezoelectric effect due to piezoelectric, when upper/lower electrode applies voltage, piezoelectric can deform, drive the gate generation action on cantilever beam, realize being turned on and off of gate.
Groove on second layer silicon chip 2 includes yi word pattern pod 23 and two translots 24 with pod square crossing, and fluid intake and fluid issuing are arranged on the heteropleural end of two translots.Cavity on ground floor silicon chip 1 includes the horizontal chamber 12 that the vertical chamber 11 of yi word pattern is vertical with vertical chamber with being located at two ends, vertical chamber heteropleural, and the crossbeam of T-shaped cantilever beam is positioned at horizontal intracavity, and longeron is positioned at vertical intracavity.
After ground floor silicon chip and second layer wafer bonding, fluid passage, fluid intake, fluid issuing, the groove controlling port and the cavity of ground floor silicon chip, second layer silicon chip collectively constitutes the fluid chamber within the micro-valve of lock, in the process that the micro-valve of lock is turned on and off, by the action of piezo-activator regulating gate, thus the fluid flowing controlled in fluid chamber.
When the micro-valve of lock is opened, upper/lower electrode at the first piezo-activator 313 does not apply voltage and applies voltage on the second piezo-activator 323, the first gate 311 at first fluid port 211 place is in opening, and second gate 321 at second fluid port 221 place is closed.Now, fluid flows into after the micro-valve of lock through fluid intake 21, under the guiding of inflow channel, flow through first fluid port 211 and be blocked at second fluid port 221 place, go out and circulation road no longer has fluid pass through, so that fluid is blocked in inflow channel and retention passages, under fluid intake 21 pressure effect, flowed out by controlling port, to externally applied control action.
And when the micro-valve of lock cuts out, the upper/lower electrode of the first piezo-activator 313 loads certain voltage and on the second piezo-activator 323, does not apply voltage, now it is closed at first gate 311 at first fluid port 211 place, and the second gate 321 at second fluid port 221 place is in opening.Thus pass the fluid through inflow channel enter fluid chamber path be blocked at first fluid port 211 place, pressure owing to controlling port is big compared with the pressure of fluid issuing 22, so that fluid from control port, through retention passages, second fluid port and go out circulation road to fluid issuing reflux.
Claims (5)
1. a novel disconnecting link microvalve device, formed by upper and lower two-layer wafer bonding, it is characterized in that: ground floor silicon chip is provided with the electrode ports run through up and down, ground floor silicon chip bottom surface is provided with cavity, it is provided with mobile member in described cavity, described mobile member is provided with gate and piezoelectric actuated portion, and described mobile member includes the first mobile member and the second mobile member；Second layer silicon chip is provided with the fluid intake of up/down perforation, fluid issuing and control port, second layer silicon chip end face is provided with groove, it is provided with fluid passage in described groove, described fluid passage includes inflow channel and goes out circulation road, described inflow channel one end is fluid intake, the other end is the first fluid port controlled by the first gate on the first mobile member, described go out circulation road one end be fluid issuing, the other end is the second fluid port controlled by the second gate on the second mobile member, after ground floor silicon chip and second layer wafer bonding, the fluid intake of the cavity of ground floor silicon chip and second layer silicon chip, fluid issuing, control port, the bottom surface of groove and ground floor silicon chip and the end face of second layer silicon chip, the airtight chamber of the fluid in the composition micro-valve of lock.
2. the novel disconnecting link microvalve device of one according to claim 1, it is characterized in that: described mobile member is T-shaped cantilever beam, described T-shaped cantilever beam is made up of crossbeam and longeron, and described longeron is downwardly protrude to form the gate of the micro-valve of lock, and described crossbeam is provided with piezo-activator.
3. the novel disconnecting link microvalve device of one according to claim 2, it is characterized in that: described piezo-activator is formed on crossbeam, it is made up of upper and lower two electrodes and piezoelectric, and piezoelectric is between upper and lower two electrodes, external voltage is by being applied on the upper/lower electrode of piezo-activator through the electrode ports of ground floor silicon chip.
4. the novel disconnecting link microvalve device of one according to claim 2, it is characterised in that: the groove on second layer silicon chip includes yi word pattern pod and two translots with pod square crossing, and fluid intake and fluid issuing are arranged on the heteropleural end of two translots.
5. the novel disconnecting link microvalve device of one according to claim 4, it is characterized in that: the cavity on ground floor silicon chip includes the horizontal chamber that the vertical chamber of yi word pattern is vertical with vertical chamber with being located at two ends, vertical chamber heteropleural, the crossbeam of T-shaped cantilever beam is positioned at horizontal intracavity, and longeron is positioned at vertical intracavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410841856.1A CN105805411B (en) | 2014-12-30 | 2014-12-30 | A kind of disconnecting link microvalve assembly |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410841856.1A CN105805411B (en) | 2014-12-30 | 2014-12-30 | A kind of disconnecting link microvalve assembly |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105805411A true CN105805411A (en) | 2016-07-27 |
| CN105805411B CN105805411B (en) | 2019-02-01 |
Family
ID=56980177
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410841856.1A Active CN105805411B (en) | 2014-12-30 | 2014-12-30 | A kind of disconnecting link microvalve assembly |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105805411B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110269991A (en) * | 2018-03-14 | 2019-09-24 | 意法半导体股份有限公司 | Piezoelectricity valve module, manufacture and the method and respiratory auxiliary system that operate valve module |
| TWI709509B (en) * | 2019-02-20 | 2020-11-11 | 研能科技股份有限公司 | Micro detecting device |
| TWI741581B (en) * | 2020-04-30 | 2021-10-01 | 研能科技股份有限公司 | Heterogeneous integration chip of micro fluid actuator |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61167785A (en) * | 1985-01-17 | 1986-07-29 | Nippon Denso Co Ltd | Actuator utilizing piezoelectric element |
| US5161774A (en) * | 1989-06-19 | 1992-11-10 | Robert Bosch Gmbh | Microvalve |
| US20080265192A1 (en) * | 2005-10-04 | 2008-10-30 | Nanospace Ab | High Pressure Isolation Valve System |
| CN202100824U (en) * | 2011-06-01 | 2012-01-04 | 浙江师范大学 | Piezoelectric drive type micro-flow valve |
| CN102884352A (en) * | 2010-03-05 | 2013-01-16 | 弗兰霍菲尔运输应用研究公司 | Method for manufacturing a bending transducer, a micro pump and a micro valve, micro pump and micro valve |
-
2014
- 2014-12-30 CN CN201410841856.1A patent/CN105805411B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61167785A (en) * | 1985-01-17 | 1986-07-29 | Nippon Denso Co Ltd | Actuator utilizing piezoelectric element |
| US5161774A (en) * | 1989-06-19 | 1992-11-10 | Robert Bosch Gmbh | Microvalve |
| US20080265192A1 (en) * | 2005-10-04 | 2008-10-30 | Nanospace Ab | High Pressure Isolation Valve System |
| CN102884352A (en) * | 2010-03-05 | 2013-01-16 | 弗兰霍菲尔运输应用研究公司 | Method for manufacturing a bending transducer, a micro pump and a micro valve, micro pump and micro valve |
| CN202100824U (en) * | 2011-06-01 | 2012-01-04 | 浙江师范大学 | Piezoelectric drive type micro-flow valve |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110269991A (en) * | 2018-03-14 | 2019-09-24 | 意法半导体股份有限公司 | Piezoelectricity valve module, manufacture and the method and respiratory auxiliary system that operate valve module |
| TWI709509B (en) * | 2019-02-20 | 2020-11-11 | 研能科技股份有限公司 | Micro detecting device |
| US11383825B2 (en) | 2019-02-20 | 2022-07-12 | Microjet Technology Co., Ltd. | Micro detecting device |
| TWI741581B (en) * | 2020-04-30 | 2021-10-01 | 研能科技股份有限公司 | Heterogeneous integration chip of micro fluid actuator |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105805411B (en) | 2019-02-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2807085B2 (en) | Micro valve | |
| DE10048376C2 (en) | Micro valve with a normally closed state | |
| CN102884352B (en) | Method for manufacturing a bending transducer, a micro pump and a micro valve, micro pump and micro valve | |
| CN102812276B (en) | Microvalve | |
| CN105805411A (en) | Novel micro valve device for disconnecting link | |
| CN105805412B (en) | Based on the piezoelectric actuated two blade type lock microvalve device of PZT | |
| US20140352819A1 (en) | Membrane microfluidic valve and process for manufacturing a membrane microfluidic valve | |
| CN101303085B (en) | Microfluid active control valve with toroid boundary | |
| CN105659013A (en) | Microvalve device and manufacturing method therefor | |
| CN112340690A (en) | Microstructured fluid flow control device | |
| CN105443802B (en) | The three port miniature valves with improved sealing mechanism | |
| CN105570530B (en) | Switch miniature valve with improved sealing mechanism | |
| CN104884851B (en) | Micro valve device and valve body assembly | |
| TWI342831B (en) | Fluid transmission device | |
| CN208967171U (en) | A kind of normally closed microfluidic valve of piezoelectric stack drive-type | |
| TWM573400U (en) | The electromagnetic valve | |
| CN104487748B (en) | The method of microvalve device and control flow of fluid | |
| CN105805328B (en) | Rail mounted lock microvalve device | |
| CN204083443U (en) | Threeway lever diaphragm type medical electric magnet valve | |
| JP4529814B2 (en) | Micro valve | |
| CN104445043A (en) | An MEMS microvalve and the process of manufacturing the same | |
| CN112814880B (en) | Micropump chip structure for realizing injection charge driving | |
| CN203384451U (en) | Miniature hydraulic piezoelectric switching valve | |
| JPS6228507A (en) | Actuator driven by electrostriction body | |
| CN104896190A (en) | One-way valve with plane structure |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |