CN105798773B - A kind of attrition process track uniformity detecting method based on latitude and longitude - Google Patents

Abstract

The invention discloses a method for detecting the uniformity of grinding processing tracks based on latitude and longitude. First, a model of latitude and longitude is established on a circular substrate, including warp (1, 2, ..., i, ..., n) and latitude (1, 2, ..., j, ..., m); successively calculate the number of times that the grinding processing trajectory passes through warp 1, warp 2 ..., warp i, ..., warp n; respectively calculate the grinding process trajectory on warp 1 passing through the latitude (j-1) The number of times between the latitude and the latitude j, the number of times the grinding process on the warp 2 passes between the latitude (j-1) and the latitude j, the number of the grinding process on the warp i passes between the latitude (j-1) and the latitude j ( 1≤j≤m), and so on, until the number of times that the grinding track on the warp line n on the warp line i passes through the latitude line (j‑1) and the latitude line j is obtained. The present invention only needs to rationally design a certain number of warp threads and weft threads, and can identify the density distribution of the grinding processing track lines one by one.

Description

A method for detecting the uniformity of grinding track based on latitude and longitude

technical field

The invention relates to the field of plane grinding, and more specifically, to a method for detecting the uniformity of grinding track based on latitude and longitude lines.

Background technique

Planar grinding is one of the important means to obtain high-precision surfaces such as optical components, sapphire substrates, and single-crystal silicon substrates. It is widely used in electronics, communications, computers, lasers, aerospace and other technical fields. Plane grinding must ensure flatness, surface roughness, surface and subsurface dislocation morphology and residual stress, etc. High-precision plane grinding is the necessary basis for ultra-smooth polishing. The detection method of the uniformity of the grinding track is one of the main factors restricting the precision of the plane grinding. However, the previous research mainly focused on how to improve the uniformity of grinding process, but the method of detecting the uniformity of grinding process track was seldom mentioned.

In the prior art, there are mainly two detection methods for the distribution of track lines in the grinding process of a circular substrate, the detection method of dividing the area according to the chip size, and the area dividing along the radius and circumference. The former can detect the number of times the grinding trajectory passes through the chip area, but does not consider the edge invalid chip area; the latter draws concentric circles at a certain distance in the radial direction with the center of the workpiece processed surface as the center, and the entire processed surface along the diameter direction The concentric circles are divided equally, which can realize the kinematics design of the global guidance grinding process. However, these two types of detection methods have common defects, which are specifically reflected in the following: they only count the number of times the trajectory lines in the local area pass through, but do not make a judgment on whether the trajectory lines in the local area are evenly distributed, which is prone to distortion problems and cannot be correctly guided. Design of milling kinematics.

Contents of the invention

The purpose of the present invention is to solve the problem that the trajectory line density is distributed in the chip and at the edge in the existing grinding process, and the measured value is distorted, and a method for detecting the uniformity of the grinding process track based on the latitude and longitude lines is proposed, which can detect with full coverage The density distribution of the grinding track of the circular substrate provides global technical support for the uniformity of the grinding track and the kinematics design of the uniform wear of the grinding disc.

The present invention achieves the above object through the following technical solutions: a method for detecting the uniformity of the grinding track based on the latitude and longitude, comprising the following steps:

1), first establish a warp and latitude model on a circular substrate, including warp (1, 2, ..., i, ..., n) and latitude (1, 2, ..., j, ..., m);

2), sequentially calculate the number of times that the grinding processing trajectory passes through warp 1, warp 2..., warp i,..., warp n;

3), respectively calculate the number of times that the grinding process track on the warp 1 passes between the latitude (j-1) and the latitude j, the number of times that the grinding process on the warp 2 passes between the latitude (j-1) and the latitude j, and the number of times on the warp i The number of times that the grinding track passes between the latitude (j-1) and the latitude j (1≤j≤m), and so on, until the grinding process on the warp n passes through the latitude (j-1) frequency;

4) Different values of j are taken in turn to obtain the distribution density of grinding processing tracks on local line segment intervals on different latitude and longitude segments, and the uniformity of grinding processing tracks can be obtained according to the above distribution density.

Further, the density distribution of grinding trajectory lines on local line segment intervals on different meridian line segments is identified one by one.

Further, the uniformity of the grinding processing trajectory is represented by the standard deviation C _d of the distribution density, C _d is the difference between the distribution density of the grinding processing trajectory on the local line segment interval on different latitude and longitude segments and the standard value, and the smaller the C _d is, the The more uniform the grinding track is.

The beneficial effect of the present invention is that: the present invention only needs to rationally design a certain number of warps and wefts, and can identify the density distribution of the grinding processing trajectory line one by one; the present invention can well solve the polar coordinate and Cartesian coordinate evaluation uniformity method The problem of distortion of the measured value at the edge of the circular substrate; the invention can judge the rationality of the grinding process trajectory under any grinding kinematic parameters by introducing secondary discrimination, and provide strong support for rationally optimizing the grinding kinematic parameters.

Description of drawings

Figure 1 is a schematic diagram of latitude and longitude on the surface of the earth.

Fig. 2 is a schematic diagram of the shape of longitude and latitude according to the oblique-axis equal-area conic projection.

Fig. 3 is a schematic meridian diagram of a circular substrate of the present invention.

Fig. 4 is a schematic diagram of the latitude of the circular substrate of the present invention.

Fig. 5 is a schematic diagram of the linear density distribution of the grinding track on warp 1 and warp i according to the present invention.

detailed description

The present invention will be further described below in conjunction with accompanying drawing:

As shown in Figure 1, Figure 2, Figure 3, Figure 4 and Figure 5, according to the principle that any point on the earth's surface can be positioned by longitude and latitude, as shown in Figure 1, the longitude and latitude lines of Figure 1 are projected according to the oblique axis equal-area conic projection The shape is obtained in Figure 2. According to this idea, it can be projected onto the equatorial base circle to form plane latitude and longitude lines. Through the number of passes of the grinding process track on the reasonably divided meridian and latitude line segments, the density distribution of the grinding process track can be evaluated in full coverage. To this end, the longitude and latitude of the circular substrate can be constructed, and the diameter line segment in the substrate with the center as the starting point and the outer circle as the focus is defined as the meridian, and the circle can be divided into meridian 1, meridian 2, meridian i... , Longitude n. Similarly, with the center of the circle as the dot, we can construct weft 1, weft 2, weft j..., weft m. The warp and weft of the circular substrate are shown in Figures 3 and 4, respectively.

In order to judge the density distribution of the grinding process track in full coverage, only the following two steps are required: first, first calculate the number of times that the grinding process track line passes through warp line 1, warp line 2, warp line i..., and warp line n; secondly, Calculate the number of passing times of the grinding track on warp 1 between latitude (j-1) and latitude j, the number of times of grinding track passing on warp 2 between latitude (j-1) and latitude j, and the number of times of warp i The number of passing times of the upper grinding track between the latitude line (j-1) and the latitude line j (1≤j≤m), and so on, can obtain the grinding process track distribution density on the local line segment intervals on different meridian segments.

In the present embodiment, taking warp 1 and warp i as an example for comparative analysis, as shown in Figure 5, the number of grinding trajectory lines passing through warp 1 and warp i is N=8, but the density distribution of the trajectory lines is completely different Yes, by introducing another criterion, that is, the number of trajectory lines between latitude (j-1) and latitude j for secondary discrimination, it can be known that the grinding kinematics parameters of the grinding trajectory of warp 1 are more reasonable. Therefore, only a certain number of warps and wefts need to be reasonably designed to identify the density distribution of the grinding trajectory lines one by one, which provides a strong support for rationally optimizing the kinematic parameters of the grinding process.

The above-described embodiments are only preferred embodiments of the present invention, and are not limitations to the technical solutions of the present invention. As long as they are technical solutions that can be realized on the basis of the above-mentioned embodiments without creative work, they should be regarded as falling into the scope of the patent of the present invention. within the scope of protection of rights.

Claims (3)

1. a kind of attrition process track uniformity detecting method based on latitude and longitude, it is characterised in that：Comprise the following steps：

1) longitude and latitude line model, is set up on circular substrate first, including warp (1,2 ..., i ..., n) and parallel (1, 2、…、j、…、m)；

2), calculate successively attrition process trajectory by warp 1, warp 2 ..., warp i ..., warp n number of times；

3) attrition process track on warp 1, is calculated respectively passes through grinding on the number of times between parallel (j-1) and parallel j, warp 2 Machining locus passes through parallel (j-1) and parallel by attrition process track on the number of times between parallel (j-1) and parallel j, warp i Number of times (1≤j≤m) between j, by that analogy, until obtaining attrition process track on warp n passes through parallel (j-1) and parallel j Between number of times；

4) j different value is taken successively, obtains the distribution density of the attrition process track on the different upper local line segment intervals of longitude and latitude section, Attrition process track uniformity is drawn according to above-mentioned distribution density.

2. a kind of attrition process track uniformity detecting method based on latitude and longitude according to claim 1, its feature exists In：The Density Distribution of the different attrition process trajectories through on line segment on local line segment interval is recognized one by one.

3. a kind of attrition process track uniformity detecting method based on latitude and longitude according to claim 1, its feature exists In：The uniformity of attrition process track passes through distribution density standard deviation C_dRepresent, C_dFor on the upper local line segment interval of different longitudes and latitudes section Attrition process track distribution density and standard value between difference, C_dSmaller expression attrition process track is more uniform.