CN1057910A - Scanning muti-spectrum imaging method and device thereof - Google Patents
Scanning muti-spectrum imaging method and device thereof Download PDFInfo
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- CN1057910A CN1057910A CN 90103416 CN90103416A CN1057910A CN 1057910 A CN1057910 A CN 1057910A CN 90103416 CN90103416 CN 90103416 CN 90103416 A CN90103416 A CN 90103416A CN 1057910 A CN1057910 A CN 1057910A
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Abstract
Scanning muti-spectrum imaging method and device thereof.
The invention belongs to the muti-spectrum imaging technology in the applied optics field, particularly a kind of method and apparatus that optical scanning micro-imaging and multi-spectral analysis technique are combined.The present invention is applied to multi-optical spectrum imaging technology in the microscope, can obtain the spectral image of a plurality of wave bands of sample simultaneously with computing machine with white-light illuminating, quantity of information can be multiplied, can be widely used in the detection of large scale integrated circuit, in the test of biomedical technology, the mineralogical analysis, can strengthen image in addition, subtract each other, multiple computing such as identification, make microscope move towards robotization and intellectuality.
Description
The invention belongs to the muti-spectrum imaging technology in the applied optics field, particularly a kind of method and apparatus that optical scanning micro-imaging and multi-spectral analysis technique are combined.
The optical scanning micro-imaging technique is the digital imaging technology of a kind of high precision scanning of growing up latter stage of the seventies, its resolution height (can reach 0.2 μ m), visual field are big, particularly combine, its function is greatly expanded with digital image processing techniques.LSM10 with West Germany Ka Ercaishi company (OPTON) production, LSM20, the 1LM11 that LSM30 laser scanning microscope and Japanese laser technology company produce, 2LM11 laser scanning microscope (" reflection information " 1988.1.) then is the embodiment of this technology for the product of representative, this technology is in the detection of large scale integrated circuit, biomedical, aspects such as mineralogical analysis obtain to use, but because they all are to adopt single laser as light source, so use and be subjected to certain limitation, during especially for the characteristic of amalyzing substances, because the transmissivity or the reflectivity of testing sample mostly are relevant with wavelength, thereby adopt the spectral characteristic of testing sample to come the characteristic of amalyzing substances then to become a difficult point of optical scanning micro-imaging technique.
In order to adapt to the development of remote sensing technology, the imaging spectral technology of Chu Xianing except the way with line sweep obtains also each pixel to be carried out spectral analysis the terrestrial information, formed the multispectral image of target in recent years.Quantity of information is increased exponentially.But the difficulty of making owing to the high resolving power surface array device has brought inconvenience for large information capacity in transmission, storage, processing at present, therefore also have suitable distance from practicality, and its system architecture is very complicated.
The objective of the invention is in order to compensate present optical scanning micro-imaging technique and the existing deficiency of imaging spectral technology, satisfy the requirement of micro-imaging technique better, the means that enhancing is observed micro-object, a kind of the optical scanning micro-imaging technique is combined with imaging spectral technology and seek, with the method for formation scanning muti-spectrum imaging, and provide a kind of utility unit of realizing this method.
The present invention utilizes white light source a bit very little (～1 μ m) on micro optical system irradiation sample, carry out high speed point by point scanning, in the time of scanning each picture point is carried out spectral resolution with the spectral resolution element, receive the light intensity of each wave band again with linear array detector, and be processed into picture.Its high speed point by point scanning can be adopted mechanical scanning mode or optical scanning way.Because target to be measured is different with reflection case to the absorption of the light of different wave length, and is treated to the information of pointwise, can obtain the image of the different-waveband of same target simultaneously, so can select wave band according to user's needs.
Utilize the present invention can make the scanning muti-spectrum imaging device of transmission-type (transmissivity imaging) or reflective (reflectivity imaging), also can be combined into a system two kinds.Fig. 1 is a transmission-type scanning muti-spectrum imaging schematic representation of apparatus, and Fig. 2 is a reflective scanning mode muti-spectrum imaging schematic representation of apparatus.Constitute by light source 1, condenser 2, smallcolumn diaphragm 3, object lens 4, collimating mirror 6, spectral resolution element 7, fourier transform lens 8, linear array detector 9, processor 10, control system 11, objective table 12 and display 13.The reflective scanning mode microscopic imaging device is provided with beam splitter 14.The light that is sent by light source 1 focuses on the smallcolumn diaphragm 3 through condenser 2 and forms point source, object lens 4 are imaged on (～1 μ m size) on the sample 5 to point source, sample is contained on the movably objective table of being controlled by control system 11 12, finish bidimensional scanning, collimating mirror 6 collimates imaging beam, simultaneously carry out spectral resolution through spectral resolution element 7, form the spectrum of different wave length by fourier transform lens 8, linear array detector 9 is surveyed the light intensity of different spectrum, treated device 10 is handled, and is demonstrated the image of the different wave length of same sample simultaneously by display 13.Wherein spectral resolution element 7 can adopt transmission-type or reflective.
Best device for carrying out said of the present invention is, light source 1 adopts the halogen tungsten lamp of continuous spectrum and the high-pressure sodium lamp of discrete spectrum, spectral resolution element 7 adopts reflective or transmission-type diffraction grating, linear array detector 9 adopts the CCD linear array, control system 11 adopts by the micro-processor controlled electrical control mechanism that bidimensional moves, the processor 10 employing microcomputers of carrying out.
The present invention is novel, system architecture is simple, can demonstrate the transmissivity or the albedo image of needed different wave length simultaneously to same target, quantity of information is multiplied, also can handle simultaneously, as figure image intensifying, coloud coding, image subtraction etc. the picture of each spectrum or the picture of a plurality of spectrum.For the characteristic that reflective devices also can be used to observe transparency material inside, has the chromatography effect.Can be widely used in making microscope move towards robotization and intellectuality in the test, mineralogical analysis of the detection of large scale integrated circuit, biomedical sample.
Claims (4)
1, a kind of the optical scanning micro-imaging technique is combined with imaging spectral technology, method with the formation scanning muti-spectrum imaging is to utilize light source to shine sample through micro optical system, sample zone to be measured is carried out handling with the detector reception after the high speed point by point scanning, it is characterized in that light source adopt white light source on micro optical system irradiation sample very little a bit, when carrying out high speed point by point scanning each picture point is carried out spectral resolution with the spectral resolution element, receive the light intensity of each wave band again with linear array detector, and be processed into picture.
2, the scanning muti-spectrum imaging device that utilizes the optical scanning micro-imaging technique to combine with imaging spectral technology and form is by light source 1, condenser 2, smallcolumn diaphragm 3, object lens 4, collimating mirror 6, detector 9, processor 10, control system 11, objective table 12 and display 13 constitute, it is characterized in that light source 1 adopts white light source, detection device 9 adopts linear array detector, and be provided with spectral resolution element 7, focus on the smallcolumn diaphragm 3 through condenser 2 and form point source to constitute the light that sends by white light source 1, object lens 4 the point source imaging on by the sample 5 on the moveable stage 12 of control system 11 control, collimating mirror 6 collimates imaging beam, carry out spectral resolution by spectral resolution element 7, through fourier transform lens 8 and 10 imagings of linear array detector 9 sending processors, by the system of display 13 demonstrations.
3, scanning muti-spectrum imaging device according to claim 2 is characterized in that 3 of condenser 2 and smallcolumn diaphragms have beam splitter 14, to constitute reflective scanning mode muti-spectrum imaging system.
4, according to claim 2 or 3 described scanning muti-spectrum imaging devices, it is characterized in that spectral resolution element 7 can adopt transmission-type or reflective.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 90103416 CN1057910A (en) | 1990-07-04 | 1990-07-04 | Scanning muti-spectrum imaging method and device thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 90103416 CN1057910A (en) | 1990-07-04 | 1990-07-04 | Scanning muti-spectrum imaging method and device thereof |
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| CN1057910A true CN1057910A (en) | 1992-01-15 |
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| CN 90103416 Pending CN1057910A (en) | 1990-07-04 | 1990-07-04 | Scanning muti-spectrum imaging method and device thereof |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100365436C (en) * | 2006-04-26 | 2008-01-30 | 浙江大学 | Regionalized lighting detection method |
| CN101325647B (en) * | 2007-06-12 | 2010-06-02 | 东友科技股份有限公司 | Imaging method for image |
| CN104040409A (en) * | 2011-11-12 | 2014-09-10 | 约翰逊控股公司 | Display with virtual representation in a plurality of planes |
| CN112147770A (en) * | 2020-09-30 | 2020-12-29 | 广州大秦光镊科学仪器科技有限公司 | Digital hyperspectral imaging microscopic image system and scanning method thereof |
-
1990
- 1990-07-04 CN CN 90103416 patent/CN1057910A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100365436C (en) * | 2006-04-26 | 2008-01-30 | 浙江大学 | Regionalized lighting detection method |
| CN101325647B (en) * | 2007-06-12 | 2010-06-02 | 东友科技股份有限公司 | Imaging method for image |
| CN104040409A (en) * | 2011-11-12 | 2014-09-10 | 约翰逊控股公司 | Display with virtual representation in a plurality of planes |
| CN112147770A (en) * | 2020-09-30 | 2020-12-29 | 广州大秦光镊科学仪器科技有限公司 | Digital hyperspectral imaging microscopic image system and scanning method thereof |
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