CN105789263B - Organic light emitting display and preparation method - Google Patents

Organic light emitting display and preparation method Download PDF

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Publication number
CN105789263B
CN105789263B CN201610288875.5A CN201610288875A CN105789263B CN 105789263 B CN105789263 B CN 105789263B CN 201610288875 A CN201610288875 A CN 201610288875A CN 105789263 B CN105789263 B CN 105789263B
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organic light
cathode layer
light emitting
emitting display
region
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CN105789263A (en
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冷传利
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Tianma Microelectronics Co Ltd
Shanghai Tianma Microelectronics Co Ltd
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Tianma Microelectronics Co Ltd
Shanghai Tianma Microelectronics Co Ltd
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/805Electrodes
    • H10K50/82Cathodes

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Optics & Photonics (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

The present invention provides a kind of organic light emitting displays characterized by comprising first substrate includes light emitting region and non-luminous region;And organic illuminating element, if on the first substrate, include: forming anode unit on the first substrate, it is connect with anode unit and is correspondingly arranged at the organic light-emitting units on light emitting region, the cathode electrode unit being connect with organic light-emitting units, wherein, organic light-emitting units include multiple Organic Light Emitting Diodes that distribution is arranged on the first substrate and separately, it is corresponding with Organic Light Emitting Diode in light emitting region to be partially shown as covering part, and, it is not corresponding with Organic Light Emitting Diode in light emitting region to be partially shown as non-covered part, cathode electrode unit includes the first cathode layer being formed on organic light-emitting units, and it is formed on the first cathode layer and the second cathode layer corresponding with non-covered part.

Description

Organic light emitting display and preparation method
Technical field
The invention belongs to organic light emitting display fields, and in particular to one kind can alleviate the organic light emission that cathode layer is corroded Display and preparation method.
Background technique
Currently, organic light emitting display has been widely used in flat-panel screens field.Organic light emitting display due to Its self luminous characteristic, thus back light system is not needed compared with traditional liquid crystal display, thus have frivolous, low-power consumption, The bigger equal good characteristics of visible angle.
In the prior art, the organic illuminating element of organic light emitting display includes anode, cathode and in anode and cathode Between organic light-emitting units.Fig. 1 is the partial structural diagram of existing organic light emitting display.As shown in Figure 1, organic hair The organic light-emitting units 101 of optical display unit are located in TFT substrate 102, also, vapor deposition is one layer thin on organic light-emitting units 101 Thin magnesium alloy is as cathode layer 103.Under normal conditions, in order to realize high light transmittance, magnesium alloy is usually made non- It is often thin, in addition, there is one layer of structure overlapped by organic layer and inorganic layer as thin-film encapsulation layer above cathode layer, prevent in this way The corrosion of steam and oxygen to cathode layer.
But thin-film encapsulation layer can only slow down the infiltration of water and oxygen, be unable to prevent completely water and oxygen to yin The corrosion of pole layer, therefore, with the intrusion of dampening and oxygen, after some point back on magnesium alloy aoxidizes, Organic Light Emitting Diode On just will appear a non-luminous stain, with the exacerbation of corrosion, stain can be more and more, in this way, not only increase power resistance, Luminous power can be also damaged, leads to the aging of organic light emitting display, influences display effect.
Summary of the invention
In view of this, the present invention, which provides one kind, can alleviate the organic light emitting display and preparation side that cathode layer is corroded Method.
The present invention provides a kind of organic light emitting displays characterized by comprising first substrate includes light emitting region And non-luminous region;And organic illuminating element, if on the first substrate, including: formed anode unit on the first substrate, The cathode for being connect with anode unit and being correspondingly arranged at the organic light-emitting units on light emitting region, being connect with organic light-emitting units Unit, wherein organic light-emitting units include multiple Organic Light Emitting Diodes that distribution is arranged on the first substrate and separately, It is corresponding with Organic Light Emitting Diode in light emitting region to be partially shown as covering part, also, in light emitting region not with it is organic Light emitting diode is corresponding to be partially shown as non-covered part, and cathode electrode unit includes the first yin being formed on organic light-emitting units It pole layer and is formed on the first cathode layer and the second cathode layer corresponding with non-covered part.
In organic light emitting display embodiment provided by the invention, it can also have a feature in that the first cathode layer is complete Organic light-emitting units are lived in all standing.
In organic light emitting display embodiment provided by the invention, also the second cathode layer can be had a feature in that also It is located at position corresponding with non-luminous region.
In organic light emitting display embodiment provided by the invention, the second cathode layer can be also had a feature in that Metal active is greater than the metal active of the first cathode layer.
In organic light emitting display embodiment provided by the invention, it can also have a feature in that the first cathode layer is adopted It is made of magnesium silver alloy, the second cathode layer is made of magnesium silver alloy.
In organic light emitting display embodiment provided by the invention, it can also have a feature in that in the second cathode layer The mass fraction of magnesium is greater than the mass fraction of magnesium in the first cathode layer.
In organic light emitting display embodiment provided by the invention, it can also have a feature in that the second cathode layer is adopted It is made of any one in calcium, sodium, magnesium or any two kinds of combined materials.
In organic light emitting display embodiment provided by the invention, it can also have a feature in that the second cathode layer is adopted It is made of any one in calcium, sodium, magnesium or any two kinds of combined materials.
In organic light emitting display embodiment provided by the invention, the first cathode layer can be also had a feature in that Thickness range is 5nm to 25nm.
In organic light emitting display embodiment provided by the invention, the second cathode layer can be also had a feature in that Thickness is not more than 30nm.
In organic light emitting display embodiment provided by the invention, the second cathode layer can be also had a feature in that Light transmittance is greater than 5%.
In organic light emitting display embodiment provided by the invention, the second cathode layer can be also had a feature in that Light transmittance is zero.
It in organic light emitting display embodiment provided by the invention, can also have the feature that, further includes: encapsulation Layer, is located on the organic illuminating element, for being packaged to the organic illuminating element.
The present invention also provides a kind of preparation methods of organic light emitting display, which comprises the following steps: logical It crosses and forms organic light-emitting units on the light emitting region of first substrate;By the way that one layer of first cathode is deposited on organic light-emitting units Layer, first cathode layer cover entire prime number light emitting region;By forming the second cathode layer on the first cathode layer, wherein hair Part corresponding with the Organic Light Emitting Diode of organic light-emitting units is covering part in light region, also, in light emitting region Part mutually not corresponding with Organic Light Emitting Diode is non-covered part, the region and non-covered part of the covering of the second cathode layer It is corresponding.
The preparation method of organic light emitting display provided by the invention can also have a feature in that the second cathode layer institute It is greater than the activity of the first cathode layer material therefor with the activity of material.
The preparation method of organic light emitting display provided by the invention can also have a feature in that the second cathode layer is adopted It is formed on the first cathode layer with metal mask method.
Related organic light emitting display and preparation method according to the present invention, because organic illuminating element has first Cathode layer and the second cathode layer, also, the light emitting region of the first cathode layer covering organic light emitting display, the second cathode layer are formed Above the first cathode layer and no non-covered part for corresponding to Organic Light Emitting Diode is covered, by non-organic luminous two Pole pipe part increases by the second cathode layer so that the cathode electrode unit of organic reflecting element more after, water and oxygen can be delayed in this way Corrosion extends the service life of power organic light emitting display, meanwhile, the resistance of power cathode electrode unit is reduced, working efficiency is improved.
Detailed description of the invention
Fig. 1 is the partial structure diagram of organic light emitting display in the prior art;
Fig. 2 is the cross-sectional view of organic light emitting display in the embodiment of the present invention;
Fig. 3 is the top illumination mode structural schematic diagram of organic light emitting display in the embodiment of the present invention;
Fig. 4 is the structural schematic diagram of organic light emitting display in the embodiment of the present invention;
Fig. 5 is the top view of organic light emitting display in the embodiment of the present invention;
Fig. 6 is the work flow diagram of organic light emitting display preparation method in the embodiment of the present invention;
Fig. 7 is the operation schematic diagram of organic light emitting display preparation method in the embodiment of the present invention.
Specific embodiment
To make the above purposes, features and advantages of the invention more obvious and understandable, below in conjunction with attached drawing and implementation The present invention will be further described for example.
It should be noted that elaborating detail in the following description to fully understand the present invention.But this hair Bright to be different from other way described herein with a variety of and be implemented, those skilled in the art can be without prejudice in the present invention Similar popularization is done in the case where culvert.Therefore the present invention is not limited by following public specific embodiment.
One > of < embodiment
Fig. 2 is the cross-sectional view of organic light emitting display in the embodiment of the present invention.
As shown in Fig. 2, organic light emitting display 10 provided by the present embodiment is for showing image, organic light emitting display 10 include substrate 11, display function part 21, anti-reflective film 31, light absorbing layer 41 and cover plate 51.Also, organic light emitting display Device 10 also there is thin-film encapsulation layer 18 to be used as packing component.
Substrate 11 can for glass system at insulating substrate, also, buffer layer 13 is additionally provided on substrate 11, the buffer layer 13 can stop the infiltration of foreign substance or moisture.As the variation in the present embodiment, substrate 11 can be flexible plastics Substrate.
Display function part 21 is formed on substrate 11.Wherein, display function part 21 includes drive circuit unit 14, sun Pole unit 15, middle layer 16 and cathode layer 17.
Wherein, middle layer 16 may include the organic luminous layer that can emit red, green, blue or white light, in addition, middle layer 16 is also With hole injection layer (HIL), hole transmission layer (HTL), electron transfer layer (ETL) and electron injecting layer (ETL).
For drive circuit unit 14 for providing electric signal, drive circuit unit 14 may include thin film transistor (TFT), public power Line and data line etc..
Anti-reflective film 31 is arranged on display function part 21, for reducing the reflection of exterior light, so as to improve organic hair The contrast of optical display unit.
Light absorbing layer 41 is formed on anti-reflective film 31, for absorbing the light of non-luminous region NA.As the present embodiment In variation, such as Flexible Displays, light absorbing layer can also be not provided with.
The outermost of organic light emitting display is arranged in cover plate 51, for protecting extraneous impact.
Further, direction is projected according to the light of Organic Light Emitting Diode, organic light emitting display can be divided into bottom hair Injection device, top emitting device and penetration emitter.Wherein, top emitting mode refers to that light is directly penetrated from transparent cathode Out, high aperture and high-luminous-efficiency be can be realized in this way.
Fig. 3 is the top illumination mode structural schematic diagram of organic light emitting display in the embodiment of the present invention.
As shown in figure 3, the thin film transistor (TFT) 141 in organic light emitting display 10 is formed in the non-emission region on substrate 11 Domain.Anode unit 15 is reflecting electrode, so that the light that the Organic Light Emitting Diode of organic light emitting display 10 issues is sent out upwards Light, to realize top emitting.
Fig. 4 is the structural schematic diagram of organic light emitting display in the embodiment of the present invention.
Display function part 21 in the main corresponding diagram 1 of Fig. 4, organic light emitting display is that top shines in this embodiment Mode.
As shown in figure 4, organic light emitting display includes first substrate 210, the second substrate 220 and organic illuminating element 230.This figure simplifies the structure in Fig. 1 in order to which technical solution is better described, wherein first substrate 210 may include The existing structures such as substrate 11, the thin film transistor (TFT) 141 for being located at substrate 11 and other function layer, are not set forth in detail herein.The Two substrates 220 may include the existing structures such as anti-reflective film 31 and cover plate 51, omit respective description herein.
In the present embodiment, first substrate 210 is TFT substrate, comprising glass substrate and sets film on the glass substrate Transistor.Also, according to the corresponding relationship of first substrate 210 and luminous component, define first substrate 210 include light emitting region and Non-luminous region.
The second substrate 220 is arranged with respect to first substrate 210, has light transmission.
In the present embodiment, organic illuminating element 230 is located between first substrate 210 and the second substrate 220, also, is had Machine light-emitting component 230 is top luminous organic element.Organic illuminating element 230 include anode unit (not shown), Organic light-emitting units 231 and cathode electrode unit 232.
In the present embodiment, anode unit is formed on first substrate 210, also, due to the organic light emission of the present embodiment Display is top light-emitting mode, therefore, in order to further increase the luminous efficiency of organic light emitting display, anode unit be with The emission electrode of metallic reflector.
Organic light-emitting units 231 are mutually conductively connected with anode unit.Organic light-emitting units 231 include it is multiple juxtaposed and And separately it is distributed in (the full name in English Organic Light-Emitting of the Organic Light Emitting Diode on first substrate 210 Diode, abbreviation OLED).In the present embodiment, Organic Light Emitting Diode is red OLED, green OLED, tri- color OLED of indigo plant OLED.
Fig. 5 is the top view of organic light emitting display in the embodiment of the present invention.
As shown in figure 5, first substrate 210 includes the light emitting region A and non-luminous region B for surrounding light emitting region A.
The corresponding light emitting region A setting of organic light-emitting units 231.Also, by Organic Light Emitting Diode hanging down in light emitting region A Histogram to projection section be defined as covering part, equally, Organic Light Emitting Diode is not covered in the A of light emitting region part is fixed Justice is non-covered part.
In addition, cathode electrode unit 232 is conductively connected with 231 phase of organic light-emitting units, cathode electrode unit 232 includes the first cathode layer 2321 and second cathode layer 2322.
First cathode layer 2321 is formed on organic light-emitting units 231, also, the first cathode layer 2321 is completely covered Machine luminescence unit 231, the first cathode layer 2321 are conductively connected with 231 phase of organic light-emitting units.First cathode layer 2321 is organic The common cathode layer of luminescence unit 231.In addition, in order to realize high transmitance, the first cathode layer 2321 is relatively thin transparent Conductive material.First cathode layer is made of magnesium silver alloy, and the thickness of the first cathode layer 2321 is less than 25nm.As this hair Bright variation, the first cathode layer can also be one or more of and Ag in the metals such as Mg, Li, K, Ca, Na, Sr, Cs, Ba, Yb Alloy.In the present embodiment, the light transmittance of the first cathode layer is greater than 20%.
Second cathode layer 2322 is formed on the first cathode layer 2321, and is corresponded to non-covered part and be formed in non-luminescent Region B.I.e., the second cathode layer 2322 is in non-OLED covering part.In the present embodiment, material used in the second cathode layer 2322 Material activity is greater than the activity of material used in the first cathode layer 2321, and the second cathode layer 2322 is made of magnesium silver alloy, meanwhile, The mass fraction of magnesium is greater than the mass fraction of magnesium in the first cathode layer 2321 in second cathode layer 2322.In the present embodiment, Two cathode layers can also be made of any one in calcium, sodium, magnesium or any two kinds of combined materials, also, the second cathode layer Thickness is within 30nm.
Since the second cathode layer 2322 increases the thickness of cathode electrode unit 232, in this way, not only reducing the resistance of power cathode layer Power efficiency is improved, moreover, because the thickness of cathode electrode unit 232 thickeies, so that extending compared with the display of same encapsulating material The water and oxygen of entrance are to the etching time of cathode electrode unit, in this way, extending the service life of power organic light emitting display.In addition, due to The activity of second cathode layer 2322 is higher than the activity of the first cathode layer 2321, therefore, in the first cathode layer 2321 and the second cathode Layer 2322 between form micro cell effect so that originally to above OLED water and oxygen can go first to corrode the second cathode layer, In this way, further slowing down the formation of stain.
Fig. 6 is the work flow diagram of organic light emitting display preparation method in the embodiment of the present invention.
As shown in fig. 6, the preparation method of organic light emitting display, the organic light emission for obtaining more highly resistance water oxygen ability is aobvious Show device comprising the steps of:
Step S1 forms anode unit on first substrate 210;
Step S2 forms organic light-emitting units 230 on anode unit, also, in the light emitting region A of first substrate 210 Upper formation organic light-emitting units 230, organic light-emitting units 230 include red OLED, green OLED and the indigo plant of array arrangement Color OLED;
Step S3 is deposited the first of one layer of covering organic light-emitting units 230 by universal metal mask plate (OPEN MASK) Cathode layer 2321, first cathode layer cover entire light emitting region on upright projection direction;
Step S4 is vertically being thrown by forming the second cathode layer 2322, the second cathode layer 2322 on the first cathode layer 2321 The region covered on shadow direction is corresponding with non-covered part;
Step S5 forms the light of covering the first cathode layer 2321 and the second cathode layer 2322 on organic illuminating element 230 Learn coating.
Wherein, the activity of the second cathode layer 2322 is higher than the activity of the first cathode layer 2321, in 2321 He of the first cathode layer Form micro cell effect between second cathode layer 2322 so that originally to above OLED water and oxygen can go first to corrode second Cathode layer slows down the formation of stain in this way.
Fig. 7 is the operation schematic diagram of organic light emitting display preparation method in the embodiment of the present invention.
As shown in fig. 7, the second cathode layer 2322 is formed using fine metal mask method, it is formed in the first cathode layer 2321 On.
Metal mask 300 corresponds to light emitting region, also, metal mask 300 is equipped with multiple apertures 310, the position of aperture 310 It sets corresponding with non-OLED covering part.
Second cathode layer 2322 is deposited on the first yin of corresponding no-coverage by the aperture 310 of metal mask 300 On pole layer 2321.In the present embodiment, the second cathode layer can also be prepared using the method for sputtering or printing.
The action and effect of embodiment
Organic light emitting display and preparation method according to involved in the present embodiment, because organic illuminating element has the One cathode layer and the second cathode layer, also, since the metal active of the second cathode layer is greater than the first cathode layer, this implementation When being corroded by water oxygen, the second cathode layer can first be reacted with water oxygen organic light emitting display in example, avoid water oxygen directly rotten The first cathode layer is lost, to improve the water resistant oxygen ability of organic light emitting display, and then extends the service life.
In addition, since the second cathode layer is also located at non-luminous region, the second cathode layer can be further reduced entrance The moisture and oxygen of first cathode layer, to further extend the service life of organic light emitting display.
< variation >
The present embodiment is similar to above-described embodiment structure, and difference is, the light transmittance of the second cathode layer of the present embodiment is 0.
Since the second cathode layer is arranged between two OLED, lighttight second cathode layer be can be avoided between two OLED Crosstalk between the light of generation, to further increase display effect.
Two > of < embodiment
Organic light emitting display provided by the present embodiment is penetration emitter.Wherein, penetration transmitting refers to light Line is directly projected from transparent anode unit, meanwhile, the pixel circuit that light also projects from transparent anode and passes through thin film transistor (TFT) Layer.The structure of organic light emitting display is similar to the structure of embodiment one in the present embodiment, and therefore not to repeat here, only describes and real Apply the different places of example one.
In the present embodiment, first substrate also has light transmission.In addition, anode unit is transparent electrode, for example, by using ITO (tin indium oxide) or Ag (silver) are as the material for preparing anode.There is good translucency as material is prepared using ITO (> 90%).
The above content is a further detailed description of the present invention in conjunction with specific preferred embodiments, and it cannot be said that Specific implementation of the invention is only limited to these instructions.For those of ordinary skill in the art to which the present invention belongs, exist Under the premise of not departing from present inventive concept, a number of simple deductions or replacements can also be made, all shall be regarded as belonging to of the invention Protection scope.
Organic light emitting display in the present invention may be flexible display, be able to carry out bending.Flexible display It is similar to the organic illuminated display structure in above-described embodiment, still, for realizing the flexibility function structure of flexible display It is different from the part-structure in above-described embodiment, for example, substrate is plastic supporting base flexible etc., structure is not carried out one by one herein Description.

Claims (12)

1. a kind of organic light emitting display characterized by comprising
First substrate includes light emitting region and non-luminous region;And
Organic illuminating element, if on the first substrate, including: forming anode unit on the first substrate and institute State the organic light-emitting units and organic light-emitting units company that anode unit is connected and is correspondingly arranged on the light emitting region The cathode electrode unit connect,
Wherein, the organic light-emitting units include multiple organic light emissions that distribution is arranged on the first substrate and separately Diode,
It is corresponding with the Organic Light Emitting Diode in the light emitting region to be partially shown as covering part, also, the hair It is not corresponding with the Organic Light Emitting Diode in light region to be partially shown as non-covered part,
The cathode electrode unit includes the first cathode layer for being formed on the organic light-emitting units and is formed in first yin Pole layer is upper and corresponding with the non-covered part the second cathode layer;
First cathode layer is made of magnesium silver alloy,
Second cathode layer is made of magnesium silver alloy;
The mass fraction of magnesium is greater than the mass fraction of magnesium in the first cathode layer in second cathode layer.
2. organic light emitting display as described in claim 1, it is characterised in that:
First cathode layer covers all the organic light-emitting units.
3. organic light emitting display as described in claim 1, it is characterised in that:
Second cathode layer is also located at position corresponding with the non-luminous region.
4. organic light emitting display as described in claim 1, it is characterised in that:
The metal active of second cathode layer is greater than the metal active of first cathode layer.
5. organic light emitting display as described in claim 1, it is characterised in that:
The thickness range of first cathode layer is 5nm to 25nm.
6. organic light emitting display as described in claim 1 or 4, it is characterised in that:
The thickness of second cathode layer is not more than 30nm.
7. organic light emitting display as described in claim 1, it is characterised in that:
The light transmittance of second cathode layer is less than 5%.
8. organic light emitting display as described in claim 1, it is characterised in that:
The light transmittance of second cathode layer is zero.
9. organic light emitting display as described in claim 1, which is characterized in that further include:
Encapsulated layer is located on the organic illuminating element, for being packaged to the organic illuminating element.
10. a kind of preparation method of organic light emitting display, which is characterized in that have follow steps:
By forming organic light-emitting units on the light emitting region of first substrate;
By the way that one layer of first cathode layer is deposited on the organic light-emitting units, which covers the entire luminous zone Domain;
By forming the second cathode layer on first cathode layer,
Wherein, part corresponding with the Organic Light Emitting Diode of organic light-emitting units is covering part in the light emitting region, Also, part not corresponding with the Organic Light Emitting Diode is non-covered part in the light emitting region,
The region of the second cathode layer covering is corresponding with the non-covered part;
First cathode layer is made of magnesium silver alloy,
Second cathode layer is made of magnesium silver alloy;
The mass fraction of magnesium is greater than the mass fraction of magnesium in the first cathode layer in second cathode layer.
11. preparation method as claimed in claim 10, it is characterised in that:
The activity of the second cathode layer material therefor is greater than the activity of the first cathode layer material therefor.
12. preparation method as claimed in claim 10, it is characterised in that:
Second cathode layer is formed on first cathode layer using fine metal mask method.
CN201610288875.5A 2016-05-03 2016-05-03 Organic light emitting display and preparation method Active CN105789263B (en)

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CN106654047B (en) * 2016-12-22 2019-02-01 武汉华星光电技术有限公司 OLED display panel and preparation method thereof
CN107749443A (en) * 2017-09-27 2018-03-02 武汉华星光电半导体显示技术有限公司 Organic luminescent device and organic light-emitting display device
CN109273495B (en) * 2018-09-21 2021-04-20 上海天马有机发光显示技术有限公司 OLED display panel and display device
CN110112324A (en) * 2019-06-17 2019-08-09 湖畔光电科技(江苏)有限公司 A kind of top emitting OLED metallic cathode structure and its manufacturing method

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