CN105784329A - Width measuring device and method for ridge of right-angle roof prism - Google Patents

Width measuring device and method for ridge of right-angle roof prism Download PDF

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Publication number
CN105784329A
CN105784329A CN201610236140.8A CN201610236140A CN105784329A CN 105784329 A CN105784329 A CN 105784329A CN 201610236140 A CN201610236140 A CN 201610236140A CN 105784329 A CN105784329 A CN 105784329A
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China
Prior art keywords
roof prism
right angle
ridge
width
laser power
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CN201610236140.8A
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CN105784329B (en
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陈少杰
王建宇
张亮
舒嵘
贾建军
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Shanghai Institute of Technical Physics of CAS
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Shanghai Institute of Technical Physics of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention discloses a width measuring device and a width measuring method for a ridge of a right-angle roof prism. The width measuring device adopts an optical difference measuring method, a laser device and a collimator generate long-distance-like collimated light which passes through a convergent optical system and forms a circular light spot irradiated on the ridge of the right-angle roof prism, two beams of light generated through reflection of two right-angle surfaces of the right-angle roof prism are converged through lenses and then detected by laser power meters, and the width of the ridge of the right-angle roof prism is derived according to numerical value information of the two laser power meters. The width measuring device and the width measuring method solve the measurement problem of the width of the ridge of the right-angle roof prism, and the width measuring method is simple and convenient.

Description

The width of measuring device of a kind of right angle roof prism ridge and method
Technical field:
The present invention relates to high accuracy width measure, be specifically related to the width measure of a kind of right angle roof prism ridge, it is applied to aim at, catch and beacon hot spot centroid measurement system in tracking system.
Background technology:
Right angle roof prism has an exceedingly useful optical characteristics: when a branch of focusing light beam converges in above right angle roof prism ridge, can be divided into two bundles by it in opposite direction and be in the two-beam on same straight line.Utilize this characteristic, aiming at, catching and follow the tracks of the use of system localizer facula mass center detection system, the centroid detecting accuracy of beacon hot spot can be effectively improved.
Currently known aiming, catch and in tracking system, rarely have the centroid detection using right angle roof prism to carry out beacon hot spot, and roof prism causes being difficult to measure the width of its ridge owing to there is problems with:
1., owing to aiming at, catching and in tracking system, the ridge width of the right angle roof prism of use is less, and in micron dimension, very difficult dip stick is directly measured.
2. in order to strengthen the reflectance of two right-angle surface of right angle roof prism, silverskin need to be plated in two right-angle surface, plate the right angle roof prism transmittancy extreme difference after silverskin, it is impossible to use microscope to be amplified then measuring again to its ridge.
Summary of the invention:
In order to solve the technical problem existed in background technology, the method that present invention employs optical measurement, use the equipment such as laser instrument, collimator, condenser lens, laser power meter, measure the ridge width of right angle roof prism comparatively accurately.
The width of measuring device of a kind of right angle of present invention roof prism ridge includes: the first laser power meter 1, first condenser lens 2, right angle to be measured roof prism 3, second condenser lens 4, the second laser power meter 5, working computer 6, Focused Optical system 7, collimator 8, laser instrument 9, electricity driving displacement platform 10.
Described measurement apparatus is placed on stabilized platform, and is rigidly connected with stabilized platform;Described collimator 8 and the plane perpendicular of the optical axis of Focused Optical system 7 and right angle to be measured roof prism, contour with the right-angled edge midpoint of right angle to be measured roof prism 3, the ridge of described right angle to be measured roof prism 3 is positioned on the focal plane of described Focused Optical system 7;The laser that the laser instrument 9 being placed on described electricity driving displacement platform 10 sends becomes directional light after collimator 8, this directional light is radiated on the ridge of right angle to be measured roof prism 3 after converging then through Focused Optical system 7, converging beam by after two right-angle surface reflection of right angle to be measured roof prism 3 respectively by the first condenser lens 2 with the second condenser lens 4 focuses on and is received by the first laser power meter 1 and the second laser power meter 5, the light energy data of laser power meter detection gained are transferred to the ridge width obtaining right angle to be measured roof prism 3 after working computer 6 carries out data process.
The minimum step size of described electricity driving displacement platform 10 is in micron dimension.
Described laser instrument 9 wavelength is in visible waveband, and power is not less than 500mW, and the angle of divergence is not more than 1mrad.
The focal length of described collimator 8 is not less than 10m.
Described Focused Optical system 7 adopts Cassegrain's structure, and bore is 200mm, and focal length is 2m.
The first described condenser lens 2 is consistent with focal length parameter with the second condenser lens 4 size, and its focal length is 20cm.
First laser power meter 1 is identical with the second laser power meter 5 performance parameter, and the wave band of detecting band and laser instrument 9 matches, and light intensity rate respectively is better than 200pW.
The measuring method step of right angle roof prism ridge width is as follows:
1) use the first laser power meter 1 or the second laser power meter 5 to measure directional light energy of hot spot after Focused Optical system focuses on, record institute measured value x;
2) electricity driving displacement platform 10 moves laser instrument 9, make the ridge of the focus spot complete inswept right angle to be measured roof prism of Focused Optical system 7, calculated the minima y of the registration sum of shown first laser power meter 1 and described second laser power meter 5 by described working computer 6, by formula simultaneously:
D 1.0826 λ f ( x - y ) ∫ - n / 2 n / 2 exp ( - D 2 x 2 0.373248 λ 2 f 2 ) = 1
Solve the ridge width n drawing shown right angle to be measured roof prism;In formula: λ is laser instrument 9 wavelength, and D is the bore of Focused Optical system 7, and f is focal length.
The method have the advantages that:
1 uses laser as measuring light, and monochromaticity is good, and uses the corresponding good laser power meter of optical maser wavelength response linearity to be detected, it is possible to reach the certainty of measurement of high roof prism ridge.
2 system integrations are higher, have high-performance, the advantage of high reliability.
Accompanying drawing illustrates:
Fig. 1 is the width of measuring device structure chart of the right angle roof prism ridge of the present invention.
In figure: 1. the first laser power meter, 2. the first condenser lens, 3. right angle to be measured roof prism,
4. the second condenser lens, 5. the second laser power meter, 6. working computer,
7. Focused Optical system, 8. collimator, 9. laser instrument,
10. electricity driving displacement platform.
Fig. 2 is radiated at the spot energy distribution situation schematic diagram above right angle to be measured roof prism ridge.
Detailed description of the invention:
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is further described:
nullPlus lens and laser power meter is used to measure the light intensity x after converging optical system,Laser power meter adopts thorlabsS130VC photodiode power probe and thorlabsPM200 energy meter and energy meter gauge outfit,Light intensity resolution is 100pW,As shown in Figure 1,Electricity driving displacement platform uses thorlabsMT1-Z8,Its minimum step size is 0.1um,Regulation experiment device,The hot spot converging optics into focus is radiated in a right-angle surface of right angle to be measured roof prism,Regulate electricity driving displacement platform,Make the ridge of the focal plane hot spot complete inswept right angle to be measured roof prism of receiving optics,When the registration sum of two laser power meters minimum for y time receiving optics focal plane place light intensity space distribution situation as shown in Figure 2,Aperture and focal length in conjunction with laser wavelength used and receiving optics used,Carry out program operation by working computer and calculate the ridge width that can draw right angle to be measured roof prism.

Claims (8)

1. the width of measuring device of a right angle roof prism ridge, including: the first laser power meter (1), first condenser lens (2), right angle to be measured roof prism (3), second condenser lens (4), second laser power meter (5), working computer (6), Focused Optical system (7), collimator (8), laser instrument (9), electricity driving displacement platform (10), it is characterised in that:
Described measurement apparatus is placed on stabilized platform, and is rigidly connected with stabilized platform;The optical axis of described collimator (8) and Focused Optical system (7) and the plane perpendicular of right angle to be measured roof prism, contour with the right-angled edge midpoint at right angle to be measured roof prism (3), the ridge at described right angle to be measured roof prism (3) is positioned on the focal plane of described Focused Optical system (7);The laser that the laser instrument (9) being placed on described electricity driving displacement platform (10) sends becomes directional light after collimator (8), this directional light is radiated on the ridge at right angle to be measured roof prism (3) after converging then through Focused Optical system (7), converging beam is by being focused on by the first condenser lens (2) and the second condenser lens (4) respectively after two right-angle surface reflections at right angle to be measured roof prism (3) and being received by the first laser power meter (1) and the second laser power meter (5), the light energy data of laser power meter detection gained are transferred to the ridge width obtaining right angle to be measured roof prism (3) after working computer (6) carries out data process.
2. the width of measuring device of a kind of right angle according to claim 1 roof prism ridge, it is characterised in that: the minimum step size of described electricity driving displacement platform (10) is in micron dimension.
3. the width of measuring device of a kind of right angle according to claim 1 roof prism ridge, it is characterised in that: described laser instrument (9) wavelength is in visible waveband, and power is not less than 500mW, and the angle of divergence is not more than 1mrad.
4. the width of measuring device of a kind of right angle according to claim 1 roof prism ridge, it is characterised in that: the focal length of described collimator (8) is not less than 10m.
5. the width of measuring device of a kind of right angle according to claim 1 roof prism ridge, it is characterised in that: described Focused Optical system (7) adopts Cassegrain's structure, and bore is 200mm, and focal length is 2m.
6. the width of measuring device of a kind of right angle according to claim 1 roof prism ridge, it is characterised in that: described the first condenser lens (2) is consistent with focal length parameter with the second condenser lens (4) size, and its focal length is 20cm.
7. the width of measuring device of a kind of right angle according to claim 1 roof prism ridge, it is characterized in that: described the first laser power meter (1) is identical with the second laser power meter (5) performance parameter, the wave band of detecting band and laser instrument (9) matches, and light intensity rate respectively is better than 200pW.
8. the measuring method based on the right angle roof prism ridge width of the width of measuring device of right angle roof prism ridge described in claim 1, it is characterised in that measuring method step is as follows:
1) use the first laser power meter (1) or the second laser power meter (5) to measure directional light energy of hot spot after Focused Optical system focuses on, record institute measured value x;
2) the mobile laser instrument (9) of electricity driving displacement platform (10), make the ridge of the focus spot complete inswept right angle to be measured roof prism of Focused Optical system (7), calculated the minima y of the registration sum of shown first laser power meter (1) and described second laser power meter (5) by described working computer (6), by formula simultaneously:
D 1.0826 λ f ( x - y ) ∫ - n / 2 n / 2 exp ( - D 2 x 2 0.373248 λ 2 f 2 ) = 1
Solve the ridge width n drawing shown right angle to be measured roof prism;In formula: λ is laser instrument (9) wavelength, and D is the bore of Focused Optical system (7), and f is focal length.
CN201610236140.8A 2016-04-15 2016-04-15 A kind of width of measuring device and method of right angle roof prism ridge Active CN105784329B (en)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101839761A (en) * 2009-03-19 2010-09-22 中国科学院物理研究所 System and method for measuring diameter of laser beam
CN101893426A (en) * 2010-07-02 2010-11-24 西安交通大学 Method for detecting and controlling laser metal forming height on line
CN203385666U (en) * 2013-07-30 2014-01-08 中国科学院上海技术物理研究所 LIBS (Laser-induced Breakdown Spectroscopy) testing system based on remote zooming light path multiplexing
CN104406518A (en) * 2014-11-14 2015-03-11 中国科学院上海光学精密机械研究所 Large size laser neodymium glass cladding size and angle non-contact detection device and method
US20160261084A1 (en) * 2015-03-06 2016-09-08 3Dfamily Technology Co., Ltd. Real-time wavelength correction system for visible light
CN205719476U (en) * 2016-04-15 2016-11-23 中国科学院上海技术物理研究所 A kind of width of measuring device of right angle roof prism ridge

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101839761A (en) * 2009-03-19 2010-09-22 中国科学院物理研究所 System and method for measuring diameter of laser beam
CN101893426A (en) * 2010-07-02 2010-11-24 西安交通大学 Method for detecting and controlling laser metal forming height on line
CN203385666U (en) * 2013-07-30 2014-01-08 中国科学院上海技术物理研究所 LIBS (Laser-induced Breakdown Spectroscopy) testing system based on remote zooming light path multiplexing
CN104406518A (en) * 2014-11-14 2015-03-11 中国科学院上海光学精密机械研究所 Large size laser neodymium glass cladding size and angle non-contact detection device and method
US20160261084A1 (en) * 2015-03-06 2016-09-08 3Dfamily Technology Co., Ltd. Real-time wavelength correction system for visible light
CN205719476U (en) * 2016-04-15 2016-11-23 中国科学院上海技术物理研究所 A kind of width of measuring device of right angle roof prism ridge

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