CN105783995B - Mems传感器、基于mems传感器的热力参数测量方法 - Google Patents
Mems传感器、基于mems传感器的热力参数测量方法 Download PDFInfo
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- CN105783995B CN105783995B CN201610173202.5A CN201610173202A CN105783995B CN 105783995 B CN105783995 B CN 105783995B CN 201610173202 A CN201610173202 A CN 201610173202A CN 105783995 B CN105783995 B CN 105783995B
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- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
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Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101504384A (zh) * | 2008-02-05 | 2009-08-12 | 株式会社山武 | 气体传感器芯片以及具有该芯片的气体传感器 |
CN102368042A (zh) * | 2011-06-27 | 2012-03-07 | 华中科技大学 | 微型流量传感器 |
CN102768093A (zh) * | 2011-05-04 | 2012-11-07 | Nxp股份有限公司 | Mems电容性压力传感器、操作方法和制造方法 |
CN103278200A (zh) * | 2013-05-20 | 2013-09-04 | 新奥科技发展有限公司 | 一种气体流量检测方法 |
CN103630286A (zh) * | 2012-08-23 | 2014-03-12 | Nxp股份有限公司 | 压力传感器 |
US8692340B1 (en) * | 2013-03-13 | 2014-04-08 | Invensense, Inc. | MEMS acoustic sensor with integrated back cavity |
CN205593561U (zh) * | 2016-03-24 | 2016-09-21 | 北京航空航天大学 | Mems传感器 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
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DE102010020264A1 (de) * | 2010-05-28 | 2011-12-01 | Continental Automotive Gmbh | Luftmassenmesser |
US8640552B2 (en) * | 2011-09-06 | 2014-02-04 | Honeywell International Inc. | MEMS airflow sensor die incorporating additional circuitry on the die |
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Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101504384A (zh) * | 2008-02-05 | 2009-08-12 | 株式会社山武 | 气体传感器芯片以及具有该芯片的气体传感器 |
CN102768093A (zh) * | 2011-05-04 | 2012-11-07 | Nxp股份有限公司 | Mems电容性压力传感器、操作方法和制造方法 |
CN102368042A (zh) * | 2011-06-27 | 2012-03-07 | 华中科技大学 | 微型流量传感器 |
CN103630286A (zh) * | 2012-08-23 | 2014-03-12 | Nxp股份有限公司 | 压力传感器 |
US8692340B1 (en) * | 2013-03-13 | 2014-04-08 | Invensense, Inc. | MEMS acoustic sensor with integrated back cavity |
CN103278200A (zh) * | 2013-05-20 | 2013-09-04 | 新奥科技发展有限公司 | 一种气体流量检测方法 |
CN205593561U (zh) * | 2016-03-24 | 2016-09-21 | 北京航空航天大学 | Mems传感器 |
Non-Patent Citations (3)
Title |
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A MEMS multi-sensor chip for gas flow sensing;Yong Xu,et al.;《Sensors and Actuators》;20050228;第253-261页 * |
一种热温差式悬空结构气体流量传感器设计;李辉 等;《传感器与微系统》;20131231;第32卷(第2期);第84-86页 * |
微槽道气体流动的统计模拟;谢翀 等;《计算物理》;20020930;第19卷(第5期);第377-382页 * |
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Inventor after: Tao Zhi Inventor after: Tan Xiao Inventor after: Xu Tiantong Inventor after: Li Haiwang Inventor after: Yu Mingxing Inventor after: Sun Jiamian Inventor before: Tao Zhi Inventor before: Li Qiushi Inventor before: Li Haiwang Inventor before: Tan Xiao Inventor before: Xu Tiantong Inventor before: Yu Mingxing |
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