CN105774870A - Large-roll movable vacuum device for lithium battery pole piece and working method of large-roll movable vacuum device - Google Patents
Large-roll movable vacuum device for lithium battery pole piece and working method of large-roll movable vacuum device Download PDFInfo
- Publication number
- CN105774870A CN105774870A CN201610119354.7A CN201610119354A CN105774870A CN 105774870 A CN105774870 A CN 105774870A CN 201610119354 A CN201610119354 A CN 201610119354A CN 105774870 A CN105774870 A CN 105774870A
- Authority
- CN
- China
- Prior art keywords
- vacuum
- lithium battery
- battery pole
- big volume
- casing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 title claims abstract description 48
- 229910052744 lithium Inorganic materials 0.000 title claims abstract description 48
- 238000000034 method Methods 0.000 title claims abstract description 18
- 230000007246 mechanism Effects 0.000 claims abstract description 21
- 238000007789 sealing Methods 0.000 claims abstract description 8
- 238000013519 translation Methods 0.000 claims description 19
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 238000012545 processing Methods 0.000 claims description 3
- 230000001737 promoting effect Effects 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 abstract description 5
- 230000008901 benefit Effects 0.000 abstract description 3
- 230000007547 defect Effects 0.000 abstract 2
- 238000005086 pumping Methods 0.000 abstract 1
- 230000007306 turnover Effects 0.000 abstract 1
- 230000008569 process Effects 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000001351 cycling effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B62—LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
- B62B—HAND-PROPELLED VEHICLES, e.g. HAND CARTS OR PERAMBULATORS; SLEDGES
- B62B3/00—Hand carts having more than one axis carrying transport wheels; Steering devices therefor; Equipment therefor
- B62B3/10—Hand carts having more than one axis carrying transport wheels; Steering devices therefor; Equipment therefor characterised by supports specially adapted to objects of definite shape
- B62B3/104—Hand carts having more than one axis carrying transport wheels; Steering devices therefor; Equipment therefor characterised by supports specially adapted to objects of definite shape the object being of cylindrical shape, e.g. barrels, buckets, dustbins
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
- B65D81/18—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient
- B65D81/20—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas
- B65D81/2007—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas under vacuum
- B65D81/2015—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas under vacuum in an at least partially rigid container
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B62—LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
- B62B—HAND-PROPELLED VEHICLES, e.g. HAND CARTS OR PERAMBULATORS; SLEDGES
- B62B2202/00—Indexing codes relating to type or characteristics of transported articles
- B62B2202/02—Cylindrically-shaped articles, e.g. drums, barrels, flasks
- B62B2202/025—Reels, e.g. for filamentary or sheet material
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Transportation (AREA)
- Secondary Cells (AREA)
- Primary Cells (AREA)
Abstract
The invention provides a large-coil movable vacuum device for a lithium battery pole piece, which comprises a box body, a box door, a support, a pole piece large-coil support rod, a vacuumizing conversion interface, a barometer and a roller supporting mechanism, wherein the box door is in sealing fit with the box body to form a sealing cavity capable of maintaining pressure in vacuum, the support is arranged in the box body, the pole piece large-coil support rod is arranged on the support, the vacuumizing conversion interface is arranged at the top of the box body, the barometer is arranged on the vacuumizing conversion interface, and the roller supporting. The invention further provides a working method of the large-coil movable vacuum device for the lithium battery pole piece. The invention not only can solve the defect that the fixed vacuum box body can not be moved quickly, but also can make up the defect that the vacuum environment required by large coils of the lithium battery pole pieces can not be realized by simply carrying the turnover vehicle, and has the advantages of convenient movement, convenient large coil of the pole pieces to be taken out of the box, difficult damage to the pole pieces, rapid vacuum pumping and unloading conversion and the like.
Description
Technical field
The present invention relates to the vacuum sealing technology field in Production Process of Lithium Battery, specifically a kind of big volume mobile vacuum device of lithium battery pole slice and method of work thereof.
Background technology
In lithium battery preparation process needed for electric automobile, the temporary quality of production to lithium battery of the vacuum of pole piece has material impact, owing to inter process transhipment number of times is various, it is impossible to ensure the vacuum environment of the big volume of lithium battery pole slice.Therefore, the vacuum environment maintenance in inter process is transported of the lithium battery pole slice big volume is one of key link of lithium battery quality of production optimization.
Existing problems: most of fixation type vacuum casees cannot realize the movement of inter process, do not design rapid vacuumizing interface, keeping in for the big volume of lithium battery pole slice, special stent-type load carrier is not had inside vacuum chamber, pole piece is caused to roll out greatly cartonning operating type complicated, need artificial free-hand carrying to place, it is possible to damage pole piece, there is also certain potential safety hazard;And be capable of the tote cart that inter process material moves and vacuum environment cannot be provided, this results in the big volume of lithium battery pole slice frequent cartonning outlet, upper and lower tote cart, and pole piece vacuum environment cannot be ensured in inter process circular flow, cause the big volume of lithium battery pole slice to contact with outside atmosphere, lithium battery pole tablet quality is had certain impact.In order to solve the problems referred to above, it is necessary to provide a kind of big volume mobile vacuum device of lithium battery pole slice and method of work thereof.
Summary of the invention
Present invention aims to the big volume vacuum of lithium battery pole slice keep in and cannot quickly move, and the problem that existing carrying tote cart cannot provide vacuum environment, it is provided that a kind of big volume mobile vacuum device of lithium battery pole slice and method of work thereof.
The technical scheme is that
A kind of big volume mobile vacuum device of lithium battery pole slice, including casing, chamber door, support, the big volume pressure pin of pole piece, take out and unload vacuum translation interface, air gauge and roller supporting mechanism, the recording quantity of described casing, described chamber door is coordinated by retaining mechanism sealing with casing, it is configured to the annular seal space of vacuum pressurize, described support is arranged on box house, the big volume pressure pin of described pole piece is arranged on support, described taking out is unloaded vacuum translation interface and is arranged on casing top, described air gauge is arranged on to take out and unloads on vacuum translation interface, and described roller supporting mechanism is arranged on box bottom.
The big volume mobile vacuum device of described lithium battery pole slice, also includes handrail, and described handrail is arranged on casing sidepiece.
The big volume mobile vacuum device of described lithium battery pole slice, described support is with V-groove.
The big volume mobile vacuum device of described lithium battery pole slice, described roller supporting mechanism includes directional wheel and universal wheel.
The method of work of the big volume mobile vacuum device of described lithium battery pole slice, comprises the following steps:
(1) open chamber door, big for the pole piece being arranged with the big volume of lithium battery pole slice volume rod supporting frame is located on the support of box house;
(2) it is closing and sealing off chamber door, promotes casing to vacuum source, locked roller supporting mechanism, will take out and unload vacuum translation interface connection vacuum source interface, and start evacuation;
(3) vacuum that air gauge shows is observed, when reaching required vacuum in the annular seal space that casing and chamber door are constituted, annular seal space vacuum pressurize;
(4) connection unloading vacuum translation interface with vacuum source interface is taken out in cancellation;
(5) promoting casing to subsequent processing staging area, the big volume vacuum of lithium battery pole slice is kept in;
(6) when the big volume of needs taking-up lithium battery pole slice, first opening retaining mechanism, chamber door, because being closed for vacuum in annular seal space, unloads vacuum translation interface place access nitrogen taking out, until the air pressure in annular seal space is consistent with external pressure, chamber door automatically turns on.
The invention have the benefit that
As shown from the above technical solution, the present invention can solve the drawback that fixation type vacuum casing cannot quickly move, can overcome the disadvantages that again simple carrying tote cart cannot realize the deficiency of vacuum environment needed for the big volume of lithium battery pole slice, there is mobile convenient, pole piece and roll out greatly that cartonning is convenient, pole piece is hardly damaged, vacuum is taken out and unloaded the advantages such as conversion is rapid.
Accompanying drawing explanation
Fig. 1 is assembly of the invention structural representation.
Detailed description of the invention
The present invention is further illustrated below in conjunction with the drawings and specific embodiments.
As shown in Figure 1, a kind of big volume mobile vacuum device of lithium battery pole slice, including casing 1, chamber door 2, support 3, the big volume pressure pin 4 of pole piece, take out and unload vacuum translation interface 5, air gauge 6, handrail 7 and roller supporting mechanism, the recording quantity of casing 1, chamber door 2 is coordinated by retaining mechanism sealing with casing 1, it is configured to provide the annular seal space of vacuum pressurize environment, it is internal that support 3 is arranged on casing 1, the big volume pressure pin 4 of pole piece is arranged on support 3, take out and unload vacuum translation interface 5 and be arranged on casing 1 top, air gauge 6 is arranged on to take out and unloads on vacuum translation interface 5, roller supporting mechanism is arranged on bottom casing 1, including directional wheel 7 and universal wheel 8, support 3 is stainless steel stent, with V-groove.
The present invention keeps in and the carrying of different inter processes for the vacuum of the big volume of lithium battery pole slice 0.Casing 1 seals with chamber door 2 and coordinates, and constitutes the annular seal space that can provide vacuum pressurize environment, and is vertical structure;With roller supporting mechanism bottom casing 1, keeping straight on and controlled by directional wheel 7, angle rotates and is controlled by universal wheel 8, it is possible to realizes 360 ° and rotates freely and movement, and roller supporting mechanism has dead lock for safety function;Taking out and unload vacuum translation interface 5 and connect the vacuum source vacuum environment to realize in annular seal space, air gauge 6 is for being monitored the air pressure in annular seal space;The two ends of the big volume pressure pin 4 of pole piece are respectively erected on the V-groove of pair of brackets 3 so that the big volume 0 of lithium battery pole slice being set on pole piece big volume pressure pin 4 can hang that to be placed on casing 1 internal, the surface of the big volume 0 of lithium battery pole slice not with casing 1 contact internal walls.
The method of work of the big volume mobile vacuum device of a kind of lithium battery pole slice, comprises the following steps:
S1, open chamber door 2, big for the pole piece being arranged with the big volume of lithium battery pole slice 0 volume pressure pin 4 is alignd with the V-groove of support 3, slowly big for the pole piece being arranged with the big volume of lithium battery pole slice 0 volume pressure pin 4 is placed on support 3;Pair of brackets 3 can carry a big volume 0 of lithium battery pole slice.
S2, closedown with retaining mechanism sealed container door 2, promote casing 1 to vacuum source, be placed in appropriate location, locked roller supporting mechanism, will take out and unload vacuum translation interface 5 and connect vacuum source interface, beginning evacuation process.
S3, when reaching required vacuum in the annular seal space that casing 1 and chamber door 2 are constituted, annular seal space vacuum pressurize, air gauge 6 shows vacuum.
S4, guarantee that annular seal space is in packing state, cancel and take out the connection unloading vacuum translation interface 5 with vacuum source interface.
S5, promotion casing 1 to subsequent processing staging area, lithium battery pole slice big volume 0 vacuum is kept in.
S6, when needs take out the big volume 0 of lithium battery pole slice, first open retaining mechanism, chamber door 2 is because being closed for vacuum in annular seal space, vacuum translation interface 5 place access nitrogen is unloaded taking out, when the air pressure recovery constant value in annular seal space is consistent with external pressure, chamber door 2 automatically turns on, and can be taken off the big volume 0 of lithium battery pole slice.
From the above, assembly of the invention is capable of fixation type vacuum functions of the equipments when evacuation state, in inter process circular flow, play the big volume material cycling of lithium battery pole slice, temporary effect, and whole moving process is always maintained at vacuum state, and the vacuum dwell time is 4~6 hours, vacuum degree control is up to-0.04MP.
The above embodiment is only that the preferred embodiment of the present invention is described; not the scope of the present invention is defined; under the premise designing spirit without departing from the present invention; various deformation that technical scheme is made by those of ordinary skill in the art and improvement, all should fall in the protection domain that claims of the present invention are determined.
Claims (5)
1. the big volume mobile vacuum device of lithium battery pole slice, it is characterized in that: include casing, chamber door, support, the big volume pressure pin of pole piece, take out and unload vacuum translation interface, air gauge and roller supporting mechanism, the recording quantity of described casing, described chamber door is coordinated by retaining mechanism sealing with casing, it is configured to the annular seal space of vacuum pressurize, described support is arranged on box house, the big volume pressure pin of described pole piece is arranged on support, described taking out is unloaded vacuum translation interface and is arranged on casing top, described air gauge is arranged on to take out and unloads on vacuum translation interface, described roller supporting mechanism is arranged on box bottom.
2. the big volume mobile vacuum device of lithium battery pole slice according to claim 1, it is characterised in that: also including handrail, described handrail is arranged on casing sidepiece.
3. the big volume mobile vacuum device of lithium battery pole slice according to claim 1, it is characterised in that: described support is with V-groove.
4. the big volume mobile vacuum device of lithium battery pole slice according to claim 1, it is characterised in that: described roller supporting mechanism includes directional wheel and universal wheel.
5. the method for work of the big volume mobile vacuum device of lithium battery pole slice according to claim 1, it is characterised in that comprise the following steps:
(1) open chamber door, big for the pole piece being arranged with the big volume of lithium battery pole slice volume rod supporting frame is located on the support of box house;
(2) it is closing and sealing off chamber door, promotes casing to vacuum source, locked roller supporting mechanism, will take out and unload vacuum translation interface connection vacuum source interface, and start evacuation;
(3) vacuum that air gauge shows is observed, when reaching required vacuum in the annular seal space that casing and chamber door are constituted, annular seal space vacuum pressurize;
(4) connection unloading vacuum translation interface with vacuum source interface is taken out in cancellation;
(5) promoting casing to subsequent processing staging area, the big volume vacuum of lithium battery pole slice is kept in;
(6) when the big volume of needs taking-up lithium battery pole slice, first opening retaining mechanism, chamber door, because being closed for vacuum in annular seal space, unloads vacuum translation interface place access nitrogen taking out, until the air pressure in annular seal space is consistent with external pressure, chamber door automatically turns on.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610119354.7A CN105774870A (en) | 2016-03-03 | 2016-03-03 | Large-roll movable vacuum device for lithium battery pole piece and working method of large-roll movable vacuum device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610119354.7A CN105774870A (en) | 2016-03-03 | 2016-03-03 | Large-roll movable vacuum device for lithium battery pole piece and working method of large-roll movable vacuum device |
Publications (1)
Publication Number | Publication Date |
---|---|
CN105774870A true CN105774870A (en) | 2016-07-20 |
Family
ID=56386855
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610119354.7A Pending CN105774870A (en) | 2016-03-03 | 2016-03-03 | Large-roll movable vacuum device for lithium battery pole piece and working method of large-roll movable vacuum device |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN105774870A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106144244A (en) * | 2016-08-26 | 2016-11-23 | 江苏天鹏电源有限公司 | A kind of lithium battery pole slice storage transport nitrogen cabinet |
CN107651398A (en) * | 2017-10-31 | 2018-02-02 | 无锡唯勒科技有限公司 | A kind of pole plate preserves turnover device |
CN110871957A (en) * | 2018-08-31 | 2020-03-10 | 天津银隆新能源有限公司 | Lithium ion battery pole piece transportation and storage protection device |
CN111900324A (en) * | 2020-07-17 | 2020-11-06 | 合肥国轩高科动力能源有限公司 | Lithium battery pole piece rolling device |
CN114056722A (en) * | 2021-10-13 | 2022-02-18 | 新乡市阳光电源制造有限公司 | Lithium battery pole piece large-coil movable vacuum device |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0267507A2 (en) * | 1986-11-06 | 1988-05-18 | Meissner & Wurst GmbH & Co. Lufttechnische Anlagen Gebäude- und Verfahrenstechnik | Container for manipulating semiconductor elements |
CN202529008U (en) * | 2012-02-13 | 2012-11-14 | 协鑫动力新材料(盐城)有限公司 | Trolley for lithium battery coiled materials |
CN202966367U (en) * | 2012-12-03 | 2013-06-05 | 天津中聚电池技术有限公司 | Battery pole piece and battery core pack revolving car |
CN103840211A (en) * | 2012-11-20 | 2014-06-04 | 江苏富朗特新能源有限公司 | Movable lithium ion battery forming apparatus |
CN104442968A (en) * | 2014-11-21 | 2015-03-25 | 广西智通节能环保科技有限公司 | Duplex type transport cart |
CN204441400U (en) * | 2015-02-28 | 2015-07-01 | 合肥国轩高科动力能源股份公司 | A kind of lithium battery rouleau pole piece mobile vacuum device |
CN204549443U (en) * | 2015-04-29 | 2015-08-12 | 浙江中科立德新材料有限公司 | Lithium battery semi-finished-product transporter |
CN205440467U (en) * | 2016-03-03 | 2016-08-10 | 合肥国轩高科动力能源有限公司 | Lithium battery pole piece large-coil movable vacuum device |
-
2016
- 2016-03-03 CN CN201610119354.7A patent/CN105774870A/en active Pending
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0267507A2 (en) * | 1986-11-06 | 1988-05-18 | Meissner & Wurst GmbH & Co. Lufttechnische Anlagen Gebäude- und Verfahrenstechnik | Container for manipulating semiconductor elements |
CN202529008U (en) * | 2012-02-13 | 2012-11-14 | 协鑫动力新材料(盐城)有限公司 | Trolley for lithium battery coiled materials |
CN103840211A (en) * | 2012-11-20 | 2014-06-04 | 江苏富朗特新能源有限公司 | Movable lithium ion battery forming apparatus |
CN202966367U (en) * | 2012-12-03 | 2013-06-05 | 天津中聚电池技术有限公司 | Battery pole piece and battery core pack revolving car |
CN104442968A (en) * | 2014-11-21 | 2015-03-25 | 广西智通节能环保科技有限公司 | Duplex type transport cart |
CN204441400U (en) * | 2015-02-28 | 2015-07-01 | 合肥国轩高科动力能源股份公司 | A kind of lithium battery rouleau pole piece mobile vacuum device |
CN204549443U (en) * | 2015-04-29 | 2015-08-12 | 浙江中科立德新材料有限公司 | Lithium battery semi-finished-product transporter |
CN205440467U (en) * | 2016-03-03 | 2016-08-10 | 合肥国轩高科动力能源有限公司 | Lithium battery pole piece large-coil movable vacuum device |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106144244A (en) * | 2016-08-26 | 2016-11-23 | 江苏天鹏电源有限公司 | A kind of lithium battery pole slice storage transport nitrogen cabinet |
CN106144244B (en) * | 2016-08-26 | 2019-01-15 | 江苏天鹏电源有限公司 | A kind of lithium battery pole slice storage transport nitrogen cabinet |
CN107651398A (en) * | 2017-10-31 | 2018-02-02 | 无锡唯勒科技有限公司 | A kind of pole plate preserves turnover device |
CN110871957A (en) * | 2018-08-31 | 2020-03-10 | 天津银隆新能源有限公司 | Lithium ion battery pole piece transportation and storage protection device |
CN111900324A (en) * | 2020-07-17 | 2020-11-06 | 合肥国轩高科动力能源有限公司 | Lithium battery pole piece rolling device |
CN111900324B (en) * | 2020-07-17 | 2022-11-15 | 合肥国轩高科动力能源有限公司 | Lithium-ion battery pole piece rolling device |
CN114056722A (en) * | 2021-10-13 | 2022-02-18 | 新乡市阳光电源制造有限公司 | Lithium battery pole piece large-coil movable vacuum device |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN105774870A (en) | Large-roll movable vacuum device for lithium battery pole piece and working method of large-roll movable vacuum device | |
JP4642608B2 (en) | Substrate processing apparatus and substrate processing system | |
TWI630671B (en) | Gate valve and substrate processing device | |
KR101464039B1 (en) | Substrate conveying container opening/closing device, lid opening/closing device and semiconductor manufacturing apparatus | |
CN108695207B (en) | Substrate processing apparatus | |
CN104347460A (en) | Wafer transferring chamber | |
CN102376609A (en) | Load port | |
CN102420156A (en) | Processing device and maintenance method thereof | |
CN205440467U (en) | Lithium battery pole piece large-coil movable vacuum device | |
KR20110013318A (en) | Assembly method of transfer mechanism and transfer chamber | |
CN201601119U (en) | Storing and transportation system of wafer storing box | |
CN204441400U (en) | A kind of lithium battery rouleau pole piece mobile vacuum device | |
TWI616386B (en) | Cover opening and closing device | |
KR20180011970A (en) | The apparatus for manufacturing a vacuum glass | |
KR100622846B1 (en) | Apparatus for manufacturing fpd | |
KR20110140084A (en) | Substrate processing apparatus | |
US20120288355A1 (en) | Method for storing wafers | |
KR101258350B1 (en) | Substrate processing apparatus | |
JP2012018940A (en) | Substrate processing apparatus | |
CN103625881B (en) | Closed self-cleaning transporting system | |
JP2006300417A (en) | Decompression type container drying method and device | |
CN204161993U (en) | A kind of battery unit unloading equipment | |
KR100740452B1 (en) | Apparatus for vacuum processing | |
JP2018513772A (en) | Storage enclosure having two different closed positions | |
KR100752934B1 (en) | Apparatus for vacuum processing |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
RJ01 | Rejection of invention patent application after publication |
Application publication date: 20160720 |
|
RJ01 | Rejection of invention patent application after publication |