CN105762047B - Space travelling wave tube and its collector, preparation method - Google Patents
Space travelling wave tube and its collector, preparation method Download PDFInfo
- Publication number
- CN105762047B CN105762047B CN201610232328.5A CN201610232328A CN105762047B CN 105762047 B CN105762047 B CN 105762047B CN 201610232328 A CN201610232328 A CN 201610232328A CN 105762047 B CN105762047 B CN 105762047B
- Authority
- CN
- China
- Prior art keywords
- collector
- wave tube
- sheet metal
- aperture
- travelling wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J25/00—Transit-time tubes, e.g. klystrons, travelling-wave tubes, magnetrons
- H01J25/34—Travelling-wave tubes; Tubes in which a travelling wave is simulated at spaced gaps
Abstract
A kind of collector of space travelling wave tube, the bottom of wherein collector offers an aperture；One sheet metal of closed covering on the aperture, equivalent to opening up one " window ".And a kind of collector preparation method and the space travelling wave tube comprising the collector." window " of collector electron bombardment for a period of time afterwards can gas leakage, the residual gas inside such space travelling wave tube will enter vacuum 1 × 10 by " window " of opening‑8In more than Pa space；So as to greatly improve the final vacuum in space travelling wave tube, and then the life-span of device is greatly prolonged, produce great economic benefit.Simple and easy to apply, cost of the invention is low, with very high economic value.
Description
Technical field
The present invention relates to long-life space travelling wave tube technology, more particularly to a kind of space travelling wave tube, and its collector, also
It is related to the preparation method of the travelling-wave tubes and collector.
Background technology
Long-life space travelling wave tube is widely used in terms of radar, satellite communication, global location, its unique function and excellent
Performance more, is that other devices can not replace particularly in the case of high-power and high band.
For long-life space travelling wave tube, in view of its structure, process characteristic and general work principle, are eliminating early stage mistake
After effect, device parameter performance tends towards stability, and vacuum device is to environmental factors such as temperature, radiation and insensitive in addition, the life-span just into
To characterize the important indicator of its reliability level.Influence the factor in electron tube life-span a lot, its failure mode and distribution because
Pipe kind is different and has differences.In complicated various factors, residual gas not only almost notes poly- to emission of cathode, electronics simultaneously
Vacuum has an impact in Jiao, power output, noise level and pipe, and can make in pipe precision component by the damage that can not be repaired
Wound, and this part can cause the premature breakdown of pipe.Therefore research meets high power, high efficiency, high-frequency, wideband carrying space
The ultrahigh vacuum of travelling-wave tubes obtains technology, for promoting the development tool of the technologies such as satellite communication to be of great significance.
Long-life space travelling wave tube is generally using the method reduction gas efficiency of bakeout degassing." baking " in vacuum refers to
In a certain stage of pumping, vacuum system is heated up, then is allowed to drop to the process of environment temperature again.The main purpose of baking is
The gas of absorption is set to be desorbed from heated surface, and its desorption rate will be far longer than desorption speed at ambient temperature
Rate, to the gas desorbed, is excluded with vavuum pump from system.The benefit of baking is：It can be reached in defined pumpdown time
Relatively low pressure；Or to reach defined pressure, total pumpdown time used is shorter.In the entire system, caused by toasting
The decline of the final gross pressure of system be usually very small (possibly even slightly rising), but just from the point of view of the essence of baking,
Be make to combine can relatively low adsorbed gas selectively removed from the surface of research so that in vacuum atmosphere by degassing
Position turn into and compare " clean fresh ".
The many metals of research discovery are in a vacuum after 1000 DEG C of long-time heating, and oxide-film is still left on surface.Example
Such as must be 10-4Mo is heated to 1760 DEG C in Pa vacuum and the gas of ability emptying Mo dissolving metals is lasted for hours.Cause
This gas dissolved using metal parts in the long-life space travelling wave tube for toasting (400-600 DEG C) degasification and the oxide-film on surface
It is very difficult to except clean.Under the bombardment of electron beam, metal parts in long-life space travelling wave tube (especially collector, because its
Have received more than 90% electronics) it can release substantial amounts of gas, therefore long-life space travelling wave tube is in order to obtain and keep optimal
Ultrahigh vacuum required for performance, long-life and high reliability, it is necessary to by prolonged seasoned (500-1000 hours), even if
In this way, due to the limitation for the seasoned use titanium pump volume of long-life space travelling wave tube, their pumping speed is typically small (generally several
Liter/the second), thus long-life space travelling wave tube it is seasoned after end vacuum also be difficult to reach very high level, vacuum is generally 5
×10-6Pa or so.
The content of the invention
(1) technical problem to be solved
In view of above-mentioned technical problem, it is an object of the invention to provide a kind of space travelling wave tube and preparation method thereof.
(2) technical scheme
To achieve the above object, there is provided a kind of collector of space travelling wave tube, its feature according to an aspect of the present invention
It is：
The bottom of collector offers an aperture；
One sheet metal of closed covering on the aperture.
According to the specific embodiment of the present invention, a metal is covered by welding or laser fusion welding mode on the aperture
Piece.
According to the specific embodiment of the present invention, the sheet metal is the stainless steel material containing chromium.
According to the specific embodiment of the present invention, the thickness of the sheet metal is set as beam bombardment 2000-3000
Leak rate is higher than 1 × 10 after hour-8Pa·m3/s。
According to the specific embodiment of the present invention, leak rate is less than 1 × 10 between aperture and the sheet metal of covering-9Pa·
m3/s。
There is provided a kind of preparation method of the collector of space travelling wave tube, including step according to an aspect of the present invention：
(1) aperture is opened up in the bottom of collector；
(2) sheet metal is covered on the aperture, makes to form closed between sheet metal and aperture.
According to the specific embodiment of the present invention, in the preparation method of above-mentioned space travelling wave tube collector, in step (2)
The mode of the covering is welding or laser fusion welding.
There is provided a kind of preparation method of space travelling wave tube, including step according to an aspect of the present invention：
(1) aperture is opened up in the bottom of the collector of travelling-wave tubes；
(2) sheet metal is covered on the aperture, makes to form confined space between sheet metal and aperture；
(3) collector and slow-wave component that will be covered with sheet metal are welded, and slow-wave component is welded with electron gun, is made after welding
Sheet metal described in the gun alignment.
According to the specific embodiment of the present invention, in the preparation method of above-mentioned space travelling wave tube, the mode of the covering
For welding or laser fusion welding.
According to an aspect of the present invention there is provided a kind of space travelling wave tube, include the collection of above-described space travelling wave tube
Pole.
(3) beneficial effect
According to above-mentioned technical proposal as can be seen that the invention has the advantages that：
(1) by covering sheet metal on aperture, simple and easy to apply, cost is low, can be very cleverly by long-life space
Residual gas inside travelling-wave tubes is rejected to the working environment (space) of space travelling wave tube：
(2) by beam bombardment sheet metal, gas leakage is produced, it is to avoid because of the residual gas mistake of long-life space travelling wave tube
The damage of the negative electrode and parts that bring more, extends the life-span of space travelling wave tube, produces great economic benefit；
(3) by the sheet metal of covering, travelling-wave tubes is built with external environment with " window ", be somebody's turn to do " window " in electron bombardment
It can open and leak air after a period of time, because the vacuum in space is up to 1 × 10-8More than Pa, the vacuum of moonscape
Degree is more up to 10-10Residual gas inside more than Pa, such space travelling wave tube will be entered very by " window " of opening
In reciprocal of duty cycle very high space, so as to improve the final vacuum in space travelling wave tube.
Brief description of the drawings
Fig. 1 is the space travelling wave tube schematic device of prior art；
The space travelling wave tube schematic device of Fig. 2 one embodiment of the invention；
【Main element symbol description】
1- electron guns, 2- slow-wave components, 3- electron beams, 4- collectors, 5- windows, 6- storage rooms
Embodiment
The present invention basic conception be there is provided a kind of collector of space travelling wave tube, wherein, the bottom of collector is offered
One aperture；One sheet metal of closed covering on the aperture.
For coverage mode, can be various coverage modes commonly used in the prior art, such as laser fusion welding, welding etc., only
Closed combination between sheet metal and aperture can be realized.It is preferred that coverage mode for welding or laser fusion welding, more
Preferably weld.Collector bottom is covered after a upper sheet metal, forms " window " structure, and the window can bang in electronics
Hit after a period of time and open, such travelling-wave tubes internal residual gas can be discharged by the window to the external world of more condition of high vacuum degree.
For closed, it is limited with air tight, leak rate preferably is less than 1 × 10-9Pa·m3/s.It is relative for the bottom of collector
For the direction of the launch of electron beam, the bottom is the distalmost end relative to electron beam.
For sheet metal, it is preferred that the material of sheet metal is stainless steel.It is preferred that, the thickness of sheet metal is set as electronics
Beam leaks air and is limited after bombarding 2000-3000 hours, mainly due to long-life space travelling wave tube under the normal pressure of ground it is seasoned
Time was at 1000 hours or so；Further preferred thickness is 0.05-5mm.
For the setting of aperture, hole diameter is unsuitable excessive, preferably in 0.4-1.6mm, it is further preferred for 0.7-
1.2mm, more preferably 0.9-1.1mm.Leak rate between aperture and sheet metal is as small as possible, it is preferred that less than 1 × 10- 9Pa·m3/s。
Based on same inventive concept, the present invention provides a kind of preparation method of the collector of space travelling wave tube, including step：
(1) aperture is opened up in the bottom of collector；
(2) sheet metal is covered on the aperture, makes to form closed between sheet metal and aperture.
Based on same inventive concept, the present invention provides a kind of preparation method of space travelling wave tube, it is characterised in that including step
Suddenly：
(1) aperture is opened up in the bottom of collector；
(2) sheet metal is covered on the aperture, makes to form confined space between sheet metal and aperture；
(3) collector and slow-wave component that will be covered with sheet metal are welded, and slow-wave component is welded with electron gun, the electronics
Rifle is directed at the sheet metal.
Further, in above-mentioned preparation method, include after step (3)：It will be welded using travelling-wave tubes baking exhaust station
Good travelling-wave tubes is vacuumized, preferably vacuum 1 × 10-6More than Pa, it is further preferred that being 5 × 10-7More than Pa；In this step
Vacuum is higher, is more conducive to being lifted the seasoned effect in travelling-wave tubes later stage.
Further, in above-mentioned preparation method, include after step (3)：The space travelling wave tube of sealed-off exhaust station is entered
Row power-up is seasoned, obtains the long-life space travelling wave tube of stability.
In the art, room temperature is generally to 20 DEG C~30 DEG C, and normal pressure refers to 1.013 × 105Pa。
For the object, technical solutions and advantages of the present invention are more clearly understood, below in conjunction with specific embodiment, and reference
Accompanying drawing, the present invention is described in more detail.It should be noted that in accompanying drawing or specification description, similar or identical portion
Divide and all use identical figure number.The implementation for not illustrating or describing in accompanying drawing, is those of ordinary skill in art
Known form.In addition, though the demonstration of the parameter comprising particular value can be provided herein, it is to be understood that parameter is without definite etc.
In corresponding value, but corresponding value can be similar in acceptable error margin or design constraint.
Referring to Fig. 2, there is provided a kind of preparation method of space travelling wave tube in one exemplary embodiment of the present invention.
Fig. 1 is the structural representation of general spatial travelling-wave tubes；Fig. 2 is the structural representation of long-life of embodiment of the present invention space travelling wave tube
Figure；Stainless steel thickness is 1mm, and in 200V, 70mA, beam spot 2.5mm beam bombardment leaks air after 20 hours, leakage rate
Higher than 1 × 10-8Pa·m3/s.Referring to Fig.1 and 2, the present embodiment includes：
Step A, an aperture is opened by the bottom of part collector 4；
The aperture can be got to when travelling-wave tubes works by electronics, and " window " should be after 2000 hours in beam bombardment
Leak air and be advisable because long-life space travelling wave tube under the normal pressure of ground the seasoned time at 1000 hours or so.Hole diameter
It is unsuitable excessive, typically in 1mm or so.
Step B, " window " 5 that metal is made welds together with narrow meshed collector, and forms storeroom 6；
Using soldering tech welding between " window " 5 and narrow meshed collector that metal makes, its leak rate should be less than 1
×10-9Pa·m3/s." window " 5 can use the stainless steel material containing Cr, be somebody's turn to do " window " and afterwards can for a period of time in electron bombardment
Open and leak air, leak rate starts to be more than 1 × 10-8Pa·m3/ s, and speed can be with the extension of electron bombardment time
It is increasing.The Cr elements that beam bombardment is produced are stored in storeroom 6.Because the vacuum in space is up to 1 × 10-8Pa
More than, the residual gas inside such space travelling wave tube will enter vacuum very high space by " window " of opening
In, so as to greatly improve the final vacuum in space travelling wave tube, and then greatly prolong the life-span of device.
Step C, the collector that metal " window " is welded is welded with slow-wave component 2, slow-wave component 2 is welded with electron gun 1
Connect；
Using soldering tech welding between collector and slow-wave component 2, between slow-wave component 2 and electron gun 1；
Step D, toasts exhaust station using travelling-wave tubes and the travelling-wave tubes being welded is evacuated into 1 × 10-6More than Pa；
Vacuum is higher in this step, is more conducive to being lifted the seasoned effect in travelling-wave tubes later stage.In currently preferred reality
Apply in example, final vacuum should be 5 × 10-7More than Pa.
Step E, seasoned, the long-life spatial row of acquisition stability is powered up to the space travelling wave tube of sealed-off exhaust station
Wave duct.
In the art, room temperature is generally to 20 DEG C~30 DEG C, and normal pressure refers to 1.013 × 105Pa。
So far, the present embodiment is described in detail combined accompanying drawing.According to above description, those skilled in the art
There should be clear understanding to the collector degasification method of long-life space travelling wave tube of the invention.
In addition, the above-mentioned definition to each method is not limited in the various concrete forms mentioned in embodiment, this area
Those of ordinary skill it can be carried out simply know replace.
In summary, the present invention is by the welding of collector bottom one " window " (stainless steel etc.), being somebody's turn to do " window " and existing
Electron bombardment for a period of time afterwards can gas leakage, (vacuum is generally 5 × 10 inside such space travelling wave tube-6Pa residual gas) is just
Vacuum 1 × 10 can be entered by opening " window "-8In more than Pa space；So as to greatly improve in space travelling wave tube
Final vacuum, and then the life-span of device is greatly prolonged, produce great economic benefit.Simple and easy to apply, cost of the invention is low, has
Very high economic value.
Particular embodiments described above, has been carried out further in detail to the purpose of the present invention, technical scheme and beneficial effect
Describe in detail it is bright, should be understood that the foregoing is only the present invention specific embodiment, be not intended to limit the invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution and improvements done etc., should be included in the guarantor of the present invention
Particular embodiments described above within the scope of shield, has been carried out further to the purpose of the present invention, technical scheme and beneficial effect
Describe in detail, it should be understood that the foregoing is only the specific embodiment of the present invention, be not intended to limit the invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution and improvements done etc., should be included in the guarantor of the present invention
Within the scope of shield.
Claims (10)
1. a kind of collector of space travelling wave tube, it is characterised in that：
The bottom of the collector offers one sheet metal of closed covering on an aperture, the aperture, forms a window structure, should
Window can afterwards be opened for a period of time in electron bombardment, and such travelling-wave tubes internal residual gas, can be to more Gao Zhen by the window
The extraneous discharge of reciprocal of duty cycle.
2. the collector of space travelling wave tube according to claim 1, it is characterised in that pass through welding manner on the aperture
Cover a sheet metal.
3. the collector of space travelling wave tube according to claim 1, it is characterised in that the sheet metal is containing the stainless of chromium
Steel material.
4. the collector of space travelling wave tube according to claim 1, it is characterised in that the thickness of the sheet metal is set as
Beam bombardment after 2000-3000 hours leak rate be higher than 1 × 10-8Pa·m3/s。
5. the collector of space travelling wave tube according to claim 1, it is characterised in that between aperture and the sheet metal of covering
Leak rate is less than 1 × 10-9Pa·m3/s。
6. a kind of preparation method of the collector of space travelling wave tube, it is characterised in that including step：
(1) aperture is opened up in the bottom of collector；
(2) sheet metal is covered on the aperture, makes to form confined space between sheet metal and aperture, the covering of collector bottom
After a upper sheet metal, a window structure is formed, the window can afterwards be opened for a period of time in electron bombardment, inside such travelling-wave tubes
Residual gas can be discharged by the window to the external world of more condition of high vacuum degree.
7. the preparation method of the collector of space travelling wave tube according to claim 6, it is characterised in that institute in step (2)
It is welding to state the mode of covering.
8. a kind of preparation method of space travelling wave tube, it is characterised in that including step：
(1) aperture is opened up in the bottom of the collector of travelling-wave tubes；
(2) sheet metal is covered on the aperture, makes to form confined space between sheet metal and aperture, the covering of collector bottom
After a upper sheet metal, a window structure is formed, the window can afterwards be opened for a period of time in electron bombardment, inside such travelling-wave tubes
Residual gas can be discharged by the window to the external world of more condition of high vacuum degree；
(3) collector and slow-wave component that will be covered with sheet metal are welded, and slow-wave component is welded with electron gun, are made after welding described
Sheet metal described in gun alignment.
9. the preparation method of space travelling wave tube according to claim 8, it is characterised in that the mode of the covering is weldering
Connect.
10. a kind of space travelling wave tube, it is characterised in that include the receipts of the space travelling wave tube described in claim 1-5 any one
Collector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610232328.5A CN105762047B (en) | 2016-04-14 | 2016-04-14 | Space travelling wave tube and its collector, preparation method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610232328.5A CN105762047B (en) | 2016-04-14 | 2016-04-14 | Space travelling wave tube and its collector, preparation method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105762047A CN105762047A (en) | 2016-07-13 |
| CN105762047B true CN105762047B (en) | 2017-08-11 |
Family
ID=56333930
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610232328.5A Active CN105762047B (en) | 2016-04-14 | 2016-04-14 | Space travelling wave tube and its collector, preparation method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105762047B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106683959B (en) * | 2017-01-25 | 2018-10-02 | 中国科学院电子学研究所 | Collector and preparation method thereof, space travelling wave tube and preparation method thereof |
| CN109192637B (en) * | 2018-09-14 | 2019-09-17 | 电子科技大学 | A kind of heat-insulated collection device of ion and the electron gun with the device |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1198532A (en) * | 1968-02-16 | 1970-07-15 | English Electric Vave Company | Improvements in or relating to the Cooling of Electron Beam Discharge Tube Collectors. |
| JPS5671250A (en) * | 1979-11-14 | 1981-06-13 | Nec Corp | High frequency electronic tube |
| GB2312323B (en) * | 1996-04-20 | 2000-06-14 | Eev Ltd | Collector for an electron beam tube |
| US6060832A (en) * | 1997-07-24 | 2000-05-09 | Hughes Electronics Corporation | Self-biasing collector elements for linear-beam microwave tubes |
| JP2005228628A (en) * | 2004-02-13 | 2005-08-25 | Mitsubishi Electric Corp | Microwave tube collector structure |
| CN200965859Y (en) * | 2006-09-29 | 2007-10-24 | 安徽华东光电技术研究所 | A multi-beam traveling wave tube step-down collector |
| DE102011053949A1 (en) * | 2011-09-27 | 2013-03-28 | Thales Air Systems & Electron Devices Gmbh | A vacuum electron beam device and method of making an electrode therefor |
| CN103160901A (en) * | 2011-12-13 | 2013-06-19 | 中国科学院电子学研究所 | Protective fixture for anode oxidation of radiation radiator of space travelling wave tube |
| CN102806348A (en) * | 2012-08-09 | 2012-12-05 | 安徽华东光电技术研究所 | Method for manufacturing space traveling wave tube from porous titanium material |
| CN102810443A (en) * | 2012-08-09 | 2012-12-05 | 安徽华东光电技术研究所 | Space travelling wave tube collector component and assembly method thereof |
| CN104157536B (en) * | 2014-08-21 | 2016-04-27 | 中国科学院电子学研究所 | The bibeveled multi-level depressurization collector electrode of non-axis symmetry |
-
2016
- 2016-04-14 CN CN201610232328.5A patent/CN105762047B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN105762047A (en) | 2016-07-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105762047B (en) | Space travelling wave tube and its collector, preparation method | |
| CN102522298B (en) | Oval sheet beam electron gun | |
| CN100450696C (en) | Laser welding method for sealing hollow thin case aluminum alloy piston body | |
| CN106449335B (en) | A kind of preparation method of traveling wave tube electron gun and traveling wave tube electron gun | |
| CN105826148A (en) | Method, device and system for degassing of part of microwave vacuum electronic device | |
| CN107346722A (en) | The method for exhausting of Terahertz backward wave tube vacuum device | |
| CN109817499A (en) | High power density water cooling anode | |
| CN114284121B (en) | Electron gun for traveling wave tube and preparation method thereof | |
| CN204441244U (en) | Cathode assembly, ray tube and imaging device | |
| CN105762049B (en) | A kind of high voltage inflatable collector on travelling-wave tubes | |
| CN203277310U (en) | Getter and anode integrated assembling structure | |
| CN204905208U (en) | X -ray tube of area side flange | |
| CN203277309U (en) | Electron gun assembly structure for onboard travelling wave tube | |
| CN102393093B (en) | Line focus solar energy enhanced collector tube provided with composite getter device | |
| CN104091741A (en) | Multifunctional ion gun | |
| CN201138653Y (en) | Bimodule multi-pouring travelling-wave tube grid controlled electronic gun | |
| CN112803225A (en) | Non-glass device for laser gyro connection exhaust platform | |
| CN207731893U (en) | A kind of hollow structure X-ray tube | |
| CN114487074B (en) | Structure for analyzing residual gas after aging of space traveling wave tube and preparation method thereof | |
| CN218677034U (en) | Rod anode X-ray tube capable of uninterrupted detection | |
| CN216015286U (en) | Rotary anode X-ray tube bearing fixing device | |
| CN202888117U (en) | Cathode air-intake structure and travelling wave tube with the same | |
| CN202940208U (en) | Exhaust structure suitable for vacuum electronic device | |
| CN201918349U (en) | Composite outer barrel structure of electron gun | |
| CN211823187U (en) | Straight-through solar vacuum tube |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210303 Address after: 100190 No. 19 West North Fourth Ring Road, Haidian District, Beijing Patentee after: Research Institute of aerospace information innovation, Chinese Academy of Sciences Address before: 100190 No. 19 West North Fourth Ring Road, Haidian District, Beijing Patentee before: Institute of Electronics, Chinese Academy of Sciences Effective date of registration: 20210303 Address after: 250101 Room 101, 1st floor, building 15, No.9, Kuangyuan Road, Gongye North Road, Wangsheren street, Licheng District, Jinan City, Shandong Province Patentee after: Shandong Microwave Vacuum Technology Co.,Ltd. Address before: 100190 No. 19 West North Fourth Ring Road, Haidian District, Beijing Patentee before: Research Institute of aerospace information innovation, Chinese Academy of Sciences |
|
| TR01 | Transfer of patent right |