CN105737851A - 面向精度设计的硅微机械陀螺系统参数获取方法 - Google Patents
面向精度设计的硅微机械陀螺系统参数获取方法 Download PDFInfo
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- CN105737851A CN105737851A CN201610067133.XA CN201610067133A CN105737851A CN 105737851 A CN105737851 A CN 105737851A CN 201610067133 A CN201610067133 A CN 201610067133A CN 105737851 A CN105737851 A CN 105737851A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
- G01C25/005—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass initial alignment, calibration or starting-up of inertial devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Manufacturing & Machinery (AREA)
- Gyroscopes (AREA)
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CN201610067133.XA CN105737851B (zh) | 2016-01-30 | 2016-01-30 | 面向精度设计的硅微机械陀螺系统参数获取方法 |
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CN201610067133.XA CN105737851B (zh) | 2016-01-30 | 2016-01-30 | 面向精度设计的硅微机械陀螺系统参数获取方法 |
Publications (2)
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CN105737851A true CN105737851A (zh) | 2016-07-06 |
CN105737851B CN105737851B (zh) | 2018-08-21 |
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CN201610067133.XA Active CN105737851B (zh) | 2016-01-30 | 2016-01-30 | 面向精度设计的硅微机械陀螺系统参数获取方法 |
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Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011039074A (ja) * | 1999-10-13 | 2011-02-24 | Analog Devices Inc | 機械式センサとこれを含む機械式レートジャイロスコープとその操作方法 |
CN104897150A (zh) * | 2015-06-16 | 2015-09-09 | 中北大学 | 一种提升硅微机械陀螺仪带宽全温性能的方法 |
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2016
- 2016-01-30 CN CN201610067133.XA patent/CN105737851B/zh active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011039074A (ja) * | 1999-10-13 | 2011-02-24 | Analog Devices Inc | 機械式センサとこれを含む機械式レートジャイロスコープとその操作方法 |
CN104897150A (zh) * | 2015-06-16 | 2015-09-09 | 中北大学 | 一种提升硅微机械陀螺仪带宽全温性能的方法 |
Non-Patent Citations (2)
Title |
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FARROKH AYAZI: ""A HARPSS Polysilicon Vibrating Ring Gyroscope"", 《JOURNAL OF MICROELECTROMECHANICAL SYSTEMS》 * |
蒋庆华: ""电容式z轴微机械陀螺的噪声抑制"", 《微纳电子技术》 * |
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Publication number | Publication date |
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CN105737851B (zh) | 2018-08-21 |
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Effective date of registration: 20180815 Address after: 710072 No. 127 Youyi West Road, Shaanxi, Xi'an Co-patentee after: RESEARCH & DEVELOPMENT INSTITUTE OF NORTHWESTERN POLYTECHNICAL University IN SHENZHEN Patentee after: Northwestern Polytechnical University Address before: 710072 No. 127 Youyi West Road, Shaanxi, Xi'an Patentee before: Northwestern Polytechnical University |
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Effective date of registration: 20230802 Address after: 710072 No. 127 Youyi West Road, Shaanxi, Xi'an Patentee after: Northwestern Polytechnical University Address before: 710072 No. 127 Youyi West Road, Shaanxi, Xi'an Patentee before: Northwestern Polytechnical University Patentee before: RESEARCH & DEVELOPMENT INSTITUTE OF NORTHWESTERN POLYTECHNICAL University IN SHENZHEN |
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