CN105704900B - 一种正负调幅脉冲驱动静电探针及数据采集分析一体装置 - Google Patents
一种正负调幅脉冲驱动静电探针及数据采集分析一体装置 Download PDFInfo
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- CN105704900B CN105704900B CN201610241321.XA CN201610241321A CN105704900B CN 105704900 B CN105704900 B CN 105704900B CN 201610241321 A CN201610241321 A CN 201610241321A CN 105704900 B CN105704900 B CN 105704900B
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
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CN201610241321.XA CN105704900B (zh) | 2016-04-19 | 2016-04-19 | 一种正负调幅脉冲驱动静电探针及数据采集分析一体装置 |
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CN201610241321.XA CN105704900B (zh) | 2016-04-19 | 2016-04-19 | 一种正负调幅脉冲驱动静电探针及数据采集分析一体装置 |
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CN105704900A CN105704900A (zh) | 2016-06-22 |
CN105704900B true CN105704900B (zh) | 2018-10-16 |
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Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN109219225A (zh) * | 2018-10-18 | 2019-01-15 | 哈尔滨工业大学 | 诊断交流放电等离子体参数的数据采集方法 |
CN112098811B (zh) * | 2020-10-11 | 2021-05-11 | 强一半导体(苏州)有限公司 | 一种用于调幅探针卡的驱动结构 |
CN113194590B (zh) * | 2021-04-20 | 2023-03-14 | 核工业西南物理研究院 | 一种静电探针探头 |
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US4006404A (en) * | 1976-01-30 | 1977-02-01 | The United States Of America As Represented By The Secretary Of The Navy | Pulsed plasma probe |
CN100508102C (zh) * | 2006-12-01 | 2009-07-01 | 大连理工大学 | 一种基于虚拟仪器的朗缪尔探针等离子体诊断方法 |
CN204652766U (zh) * | 2015-04-20 | 2015-09-16 | 安徽理工大学 | 基于脉冲调制扫描电源的朗缪尔探针诊断装置 |
CN205546169U (zh) * | 2016-04-19 | 2016-08-31 | 丘汉标 | 一种正负调幅脉冲驱动静电探针及数据采集分析一体装置 |
CN106413237A (zh) * | 2016-10-31 | 2017-02-15 | 大连理工大学 | 一种基于数据采集卡的多振幅交流偏置探针等离子体诊断方法 |
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Effective date of registration: 20210310 Address after: 243000 room 431, building 3, building 2, Rongji cloud Valley e-commerce Industrial Park, No. 51, information road, Huashan District, Ma'anshan City, Anhui Province Patentee after: Anhui Kuyi Electromagnetic Technology Co.,Ltd. Address before: Anhui University of technology, 168 Shungeng Middle Road, tianjia'an District, Huainan City, Anhui Province, 2001 Patentee before: Chen Zhaoquan Patentee before: Qiu Hanbiao |
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