CN105703048B - A kind of ultra wide band Terahertz class surface plasma excimer coupler and coupling process - Google Patents
A kind of ultra wide band Terahertz class surface plasma excimer coupler and coupling process Download PDFInfo
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- CN105703048B CN105703048B CN201610021351.XA CN201610021351A CN105703048B CN 105703048 B CN105703048 B CN 105703048B CN 201610021351 A CN201610021351 A CN 201610021351A CN 105703048 B CN105703048 B CN 105703048B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P5/00—Coupling devices of the waveguide type
- H01P5/08—Coupling devices of the waveguide type for linking dissimilar lines or devices
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Abstract
The invention discloses a kind of ultra wide band Terahertz class surface plasma excimer coupler and coupling process.The present invention uses TEM mode compressor reducer, pattern matcher and surface modes radiator, and reasonably select the parameter of this three parts structure, greatly improve the transfer efficiency from TEM mode to class surface plasma excimer pattern, the excitation bandwidth of class surface plasma excimer pattern has been widened simultaneously, this practical application to this novel waveguide of class surface plasmon wave guide in terahertz wave band has strong impetus；Since the coupler of the present invention is all-metal construction, to reduce the electromagnetic energy loss of coupler introducing；Meanwhile of the invention coupler is easy to process and is easily integrated.
Description
Technical field
The present invention relates to Terahertz passive device fields more particularly to a kind of ultra wide band Terahertz class surface plasma to swash
First coupler and coupling process.
Background technology
Terahertz (THz) spectral range is 0.1THz~10THz, due to its abundant available frequency spectrum resource and too
The monopolizing characteristic of Hertz wave, in recent years Terahertz Technology obtained swift and violent development.Wherein, most typical application includes Terahertz
Communication and terahertz imaging.And terahertz waveguide device has indispensable status in these applications.But it is traditional
Rectangular waveguide, circular waveguide and coaxial line size and frequency there is the property spent together, performance parameter is greatly subject to processing essence
The influence of degree.It is newest the study found that can also realize Terahertz based on surface wave caused by class surface plasma excimer
The energy conduction of wave band.So-called class surface plasma excimer is referred to when electromagnetic wave is etching line with sub-wavelength period
The good conductor surface on road uploads sowing time, and electromagnetic wave is adjusted with a kind of surface wave forms induced similar to carrier collective oscillation
It is transmitted.It is most common can excite the device of class surface plasma excimer include plane sub-wave length metal grating and
Sub-wavelength metal fold line.When being transmitted on these novel waveguides, dramatically office is attached to waveguide surface to energy to electromagnetic wave.Cause
This this waveguide is that a kind of opening waveguide device is compared with conventional waveguide device, energy transmission it is more efficient, it is easier to
Processing, structure is compacter, and its performance parameter is influenced smaller by the deformation of structure.
But the surface wave wave vector and guided wave wave vector transmitted on this novel waveguide mismatch, therefore when this new
When type waveguide is directly connected to conventional waveguide, strong reflection is had in interface, to cause leading wave energy cannot be with very
High efficiency is coupled to surface wave up.To realize the wave vector matching between guided wave and surface wave, most common solution
It is to be coupled using prism-coupled, grating coupling, single slot coupling and probe.The basic principle of prism-coupled is electromagnetic wave in medium
Total reflection occurs to generate the surface wave to match with class surface plasma excimer with Air Interface.It is grating coupled basic
Principle is that the Equivalent Wave Vector realization wave vector matching of grating is superimposed in the wave vector of guided wave.Latter two coupled modes are to pass through excitation
The space harmonics of high order space wave vector component realizes the excitation of class surface plasma excimer.Problem is, these coupled modes
Coupling efficiency is all relatively low, and it is relatively more limited to couple bandwidth.The coupling efficiency and coupling of class surface plasma excimer are improved simultaneously
Crossed belt width will enable the novel terahertz waveguide based on class surface plasma excimer to be competent at more complicated application ring
Border.
For this purpose, design a kind of ultra wide band and efficient class surface plasma excimer coupler to be based on class surface etc. from
The application of the novel terahertz waveguide (namely class surface plasmon wave guide) of daughter excimer in practice has extensive
And profound significance.
Invention content
For inefficient and narrow bandwidth problem present in current existing class surface plasma excimer coupling technique, originally
Invention provides a kind of ultra wide band Terahertz class surface plasma excimer coupler, can realize class surface in terahertz wave band
Plasmon wave guide is connect with the smooth high efficiency of the ultra wide band of conventional coaxial waveguide, is class surface plasma excimer wave
The application led in practice provides technical support.
It is an object of the present invention to provide a kind of ultra wide band Terahertz class surface plasma excimer couplers.
The present invention ultra wide band Terahertz class surface plasma excimer coupler include：TEM mode compressor reducer, pattern
Orchestration and surface modes radiator, three are sequentially connected along the direction of propagation of transverse electro-magnetic wave TEM and are integrated, and outer layer is hollow metal
Sleeve；The centre of hollow metal sleeve has through-hole；Through-hole includes the three parts being connected as one along the direction of propagation：First is logical
Hole, the second through-hole and third through-hole；The diameter of first through hole is tapered into along the direction of propagation, is internally provided with columned metal
Inner core constitutes TEM mode compressor reducer, realizes the smooth connection with the coaxial line waveguide of upper level, while by the coaxial of upper level
The TEM mode that line waveguide passes over is through TEM mode compressor reducer, energy compression to sub-wavelength dimensions range；Second through-hole it is straight
Diameter is constant along the direction of propagation, is internally provided with groove depth graded metal gauffer inner core, and groove depth graded metal gauffer inner core is in cylinder
There are periodically circular co-axial grooves, the depth of groove gradually to become along the direction of propagation for the outer surface of the metal inside of shape
It is deep, pattern matcher is constituted, the TEM electromagnetic waves after energy compression are converted into specific class surface plasma through pattern matcher
Body polariton modes；The diameter of third through-hole becomes larger along the direction of propagation, horn-like in being open, and it is uniformly golden to be internally provided with groove depth
Belong to gauffer inner core, groove depth homogeneous metal gauffer inner core is to have periodically annular shape in the outer surface of columned metal inside
Co-axial grooves, the depth of groove is constant along the direction of propagation, constitute surface modes radiator, class surface plasma excimer pattern
It is efficiently coupled into the class surface plasmon wave guide of next stage after surface modes radiator.
Smoothly connect between coaxial line waveguide to the class surface plasmon wave guide and upper level of realization next stage
It connects, it is important to solve the wave vector matching problem between transverse electromagnetic TEM mode and class surface plasma excimer pattern.When next
After the parameter of the co-axial grooves of periodic annular shape in the class surface plasmon wave guide of grade determines, on the surface thereof
Longitudinal wave vector component of the class surface plasma excimer pattern of transmission is assured that.When the groove depth of groove changes from big to small
When, longitudinal wave vector component of class surface plasma excimer pattern more level off to TEM mode longitudinal wave vector component (i.e. freely
Space wave vector).By the depth of the groove of the groove depth graded metal gauffer inner core in control model adaptation, class surface etc. is adjusted
Gas ions polariton modes.Based on this, the present invention using by the pattern matcher with groove depth graded metal gauffer inner core come real
Existing TEM mode is matched with the transition of class surface plasma excimer pattern.
If directly docked pattern matcher with the coaxial line waveguide of upper level, other than reflection loss, also have
More serious radiation loss is in the presence of (TEM mode is not coupled for class surface plasma excimer pattern but is radiated free sky
Between in).By introducing one section of TEM mode compressor reducer with through-hole diameter gradual change, the coaxial line wave with upper level may be implemented
Smooth connection between leading, so as to reduce reflection loss.TEM mode compressor reducer can also realize the compression of electromagnetic energy,
The more conducively conversion of pattern when within the scope of energy compression to sub-wavelength dimensions, so radiation loss can be reduced.In order to avoid drawing
Enter more serious energy reflection, the parameter of TEM mode compressor reducer should be reasonably selected, parameter includes the length of TEM mode compressor reducer
Degree and gradual change inclination angle, to improve the efficiency of pattern conversion.
The length L of TEM mode compressor reducer1It should control in 3mm or less.The gradual change inclination angle theta of first through hole1≤12°.In metal
Core and hollow metal sleeve use oxygen-free copper.
Since the coaxial line waveguide of upper level is enclosed construction, and the class surface plasmon wave guide of next stage is
Open type structure, so in order to further increase efficiency, surface modes radiator is arranged in the present invention in coupler, for discharging
The class surface plasma excimer pattern being coupled to form.The parameter of surface modes radiator is reasonably selected, parameter includes surface modes
The length of formula radiator and gradual change inclination angle further increase the efficiency of pattern conversion.
The length L of surface modes radiator2Between 1mm~2.5mm, the gradual change inclination angle theta of third through-hole2At 25 °~40 °
Between.
It is another object of the present invention to provide a kind of ultra wide band Terahertz class surface plasma excimer coupling process.
The ultra wide band Terahertz class surface plasma excimer coupling process of the present invention, includes the following steps：
1) TEM mode that coaxial line waveguide passes over enters TEM mode compression, and TEM mode compressor reducer is realized and upper one
The smooth connection of the coaxial line waveguide of grade, while TEM mode is through TEM mode compressor reducer, energy compression to sub-wavelength dimensions range,
Wherein, TEM mode compressor reducer includes diameter along the gradually smaller first through hole in the direction of propagation, and is arranged inside first through hole
Columned metal inside；
2) the TEM electromagnetic waves after energy compression are converted into specific class surface plasma excimer mould through pattern matcher
Formula, wherein pattern matcher includes diameter along the second constant through-hole of the direction of propagation, and the slot inside the second through-hole is arranged
Deep graded metal gauffer inner core, groove depth graded metal gauffer inner core are to have periodically in the outer surface of columned metal inside
Circular co-axial grooves, the depth of groove gradually deepens along the direction of propagation；
3) class surface plasma excimer pattern is efficiently coupled into the class surface of next stage after surface modes radiator
In plasmon wave guide, wherein surface modes radiator includes that diameter becomes larger along the direction of propagation, horn-like in being open
Third through-hole, and the groove depth homogeneous metal gauffer inner core that is arranged inside third through-hole, groove depth homogeneous metal gauffer inner core
To have periodically circular co-axial grooves in the outer surface of columned metal inside, the depth of groove is along the direction of propagation
It is constant.
Wherein, in step 1), by adjusting the parameter of TEM mode compressor reducer, to improve the efficiency of pattern conversion, parameter
Length including TEM mode compressor reducer and gradual change inclination angle.
In step 2), by the depth of the groove of the groove depth graded metal gauffer inner core in control model adaptation, adjust
Save class surface plasma excimer pattern.
In step 3), by adjusting the parameter of surface modes radiator, the efficiency of pattern conversion, parameter are further increased
Length including surface modes radiator and gradual change inclination angle.
Advantages of the present invention：
The present invention uses TEM mode compressor reducer, pattern matcher and surface modes radiator, and reasonably selects this three parts
The parameter of structure greatly improves the transfer efficiency from TEM mode to class surface plasma excimer pattern, while widening
The excitation bandwidth of class surface plasma excimer pattern, this is to class surface plasmon wave guide this novel waveguide in terahertz
Hereby the practical application of wave band has strong impetus；Since the coupler of the present invention is all-metal construction, to reduce
The electromagnetic energy loss that coupler introduces；Meanwhile of the invention coupler is easy to process and is easily integrated.
Description of the drawings
Fig. 1 is the structural schematic diagram of the ultra wide band Terahertz class surface plasma excimer coupler of the present invention, wherein
(a) it is stereogram, is (b) sectional view；
Fig. 2 is the schematic diagram of the class surface plasmon wave guide of next stage；
Fig. 3 is dispersion curve figure and the field of the class surface plasma excimer pattern on class surface plasmon wave guide
Distribution schematic diagram；
Fig. 4 is the dispersion curve figure of the class surface plasma excimer pattern of different groove depths；
Fig. 5 is the transmission of the ultra wide band Terahertz class surface plasma excimer coupler of the present invention and reflection characteristic with frequency
The curve graph of rate.
Specific implementation mode
Below in conjunction with the accompanying drawings, by embodiment, the present invention will be further described.
As shown in Figure 1, ultra wide band Terahertz class surface plasma excimer coupler includes：TEM mode compressor reducer 1, mould
Formula adaptation 2 and surface modes radiator 3, three are sequentially connected along the direction of propagation of transverse electro-magnetic wave TEM and are integrated, and outer layer is outer
Sleeve；The centre of outer sleeve has through-hole；Through-hole includes the three parts being connected as one along the direction of propagation：First through hole 11,
Two through-holes 21 and third through-hole 31；The diameter of first through hole is tapered into along the direction of propagation, is internally provided with columned metal
Inner core 12 constitutes TEM mode compressor reducer 1；The diameter of second through-hole 21 is constant along the direction of propagation, is internally provided with groove depth gradual change gold
Belong to gauffer inner core 22, groove depth graded metal gauffer inner core is to have periodic annulus in the outer surface of columned metal inside
The depth of the co-axial grooves of shape, groove is gradually deepened along the direction of propagation, constitutes pattern matcher 2；The diameter edge of third through-hole 31
The direction of propagation becomes larger, horn-like in being open, and is internally provided with groove depth homogeneous metal gauffer inner core 32, groove depth homogeneous metal wrinkle
Pleat inner core is to have periodically circular co-axial grooves 3 in the outer surface of columned metal inside.
The structure of the class surface plasmon wave guide of next stage is as shown in Fig. 2, class surface plasmon wave guide
It is to be carved with the co-axial grooves of periodic annular shape in the outer surface of columned metal inside, the depth of groove is identical, two
Rosette is formed among adjacent groove.Wherein a, d and h are respectively width, period and the depth of groove, rsAnd r is respectively
The inside radius and outer radius of rosette, h=r-rs.The class surface plasma excimer mould transmitted in metal fold line waveguide
Longitudinal wave vector component of formula can be with this configuration dispersion obtain.Use pattern matching method is expressed to derive the dispersion relation
Formula, derivation result are as follows
Wherein
kzn=kz+ 2n π/d, (3)
kzFor longitudinal wave vector component of class surface plasma excimer pattern, JiAnd NiRespectively the i-th rank Bessel and
Neuman functions, KiFor i rank metamorphosis Neumann functions, i=0 or 1.Due to it is considered here be sub-wavelength class surface etc. from
Daughter excimer waveguide, the period of groove and width be much smaller than free space in wavelength, so in formula (1) higher order term (| n |>
3) very small, it can be ignored.Fig. 3 gives class surface plasma excimer pattern on class surface plasmon wave guide
Dispersion curve, the parameter of corresponding class surface plasmon wave guide is a=0.03mm, d=0.06mm, rs=
0.02mm, r=0.1mm.It can be seen that longitudinal wave vector component k of class surface plasma excimer patternzMore than k0, horizontal
To wave vector componentWork as kzMore than k0When, kθFor imaginary number, this also just explains why class surface plasma swashs
Meta schema exponential damping on the direction perpendicular to metal surface, field distribution is as shown in inset of fig. 3.On the other hand, kz
More than k0Longitudinal wave vector component of the longitudinal wave vector component and TEM mode that also illustrate class surface plasma excimer pattern is not
Match, so if without pattern matcher 2, the TEM mode in TEM mode compressor reducer 1 can not possibly efficiently be coupled into class surface
Plasmon modes.
When the depth h of class surface plasmon wave guide inner groovy is tapered into, class surface plasma excimer mould
The cutoff frequency of formula becomes larger, and longitudinal wave vector component k of same frequency class surface plasma excimer patternzGradually tend to
In k0, as shown in figure 4, the parameter of metal fold line waveguide is a=0.03mm, d=0.06mm, r=0.1mm, rs=(0.02+
0.008n) mm, n=0,1,2 ..., 9.So as long as when changing the depth h of groove according to this parameter LINEAR CONTINUOUS, so that it may with
Realize seamlessly transitting between TEM mode and class surface plasma excimer pattern.
It should be noted that the gradual change when TEM mode compressor reducer 1 is inclined when adjusting the structural parameters of TEM mode compressor reducer 1
Angle θ1When smaller (representative value is less than 10 degree), the electromagnetic energy reflection caused by the TEM mode compressor reducer 1 does not exceed 3%,
Therefore it almost can be ignored.And the increase of the length L1 with TEM mode compressor reducer 1, in certain length range
The change of (representative value 1cm) reflection size also almost can be ignored.This is the structural parameters for neatly adjusting coupler
So that the coaxial line waveguide with standard be smoothly connected providing possibility.When adiabatic compression, 1 inner biography of TEM mode compressor reducer
Defeated pattern is TEM basic modes, and longitudinal wave vector component is k0, k0=2 π/λ, λ are free space wavelength.
In Fig. 1 (b), L1、θ1The respectively length of TEM mode compressor reducer 1 and gradual change inclination angle, L2、θ2Respectively surface modes
The length of radiator 3 and gradual change inclination angle, dgFor 1 tip gap of TEM mode compressor reducer, dsFor the gradual change step-length of pattern matcher 2,
The chamfer radius of each corner is 0.5mm.For specific implementation case, table 1 gives the parameter value of each section.
The performance of the coupler of the present embodiment is verified using business electromagnetic simulation software Comsol and CST, in order to
The coupling performance for facilitating assessment coupler establishes a two-port model, i.e., respectively in class surface plasma in emulation
Excimer waveguide both ends connect the coupler, in this way by the S parameter that emulates the two-port model it is known that the coupling of coupler
Close performance.Simulation result is as shown in Figure 5.It can see that the simulation result of Liang Zhong simulation softwares coincide very first from the figure
It is good, it is therefore evident that the reliability of simulation result.Secondly, it can be seen that in 0.07THz~0.5THz frequency ranges, the coupler
It can realize that the coupling of efficient class surface plasma excimer pattern, reflection loss are less than -10dB.And it is flat in passband
Smooth degree is fairly good, and 95% or more energy can be transmitted to right output port from left port with class surface plasma excimer pattern.
It is finally noted that the purpose for publicizing and implementing mode is to help to further understand the present invention, but ability
The technical staff in domain is appreciated that：Without departing from the spirit and scope of the invention and the appended claims, it is various replacement and
Modification is all possible.Therefore, the present invention should not be limited to embodiment disclosure of that, the scope of protection of present invention with
Subject to the range that claims define.
Claims (10)
1. a kind of ultra wide band Terahertz class surface plasma excimer coupler, which is characterized in that the class surface plasma
Excimer coupler includes：TEM mode compressor reducer, pattern matcher and surface modes radiator, biography of the three along transverse electro-magnetic wave TEM
It broadcasts direction and is sequentially connected and be integrated, outer layer is hollow metal sleeve；The centre of the hollow metal sleeve has through-hole；It is described logical
Hole includes the three parts being connected as one along the direction of propagation：First through hole, the second through-hole and third through-hole；The first through hole
Diameter is tapered into along the direction of propagation, is internally provided with columned metal inside, constitutes TEM mode compressor reducer, realize with it is upper
The smooth connection of the coaxial line waveguide of level-one, while the TEM mode passed over by the coaxial line waveguide of upper level is through TEM mode
Compressor reducer, energy compression to sub-wavelength dimensions range；The diameter of second through-hole is constant along the direction of propagation, is internally provided with slot
Deep graded metal gauffer inner core, groove depth graded metal gauffer inner core are to have periodically in the outer surface of columned metal inside
Circular co-axial grooves, the depth of groove gradually deepens along the direction of propagation, constitutes pattern matcher, after energy compression
TEM electromagnetic waves are converted into specific class surface plasma excimer pattern through pattern matcher；The diameter edge of the third through-hole
The direction of propagation becomes larger, horn-like in being open, and is internally provided with groove depth homogeneous metal gauffer inner core, groove depth homogeneous metal gauffer
Inner core is to have periodically circular co-axial grooves in the outer surface of columned metal inside, and the depth edge of groove is propagated
Direction is constant, constitutes surface modes radiator, and class surface plasma excimer pattern is coupled into down after surface modes radiator
In the class surface plasmon wave guide of level-one.
2. class surface plasma excimer coupler as described in claim 1, which is characterized in that the TEM mode compressor reducer
Length L1≤3mm。
3. class surface plasma excimer coupler as described in claim 1, which is characterized in that the gradual change of the first through hole
Inclination angle theta1≤12°。
4. class surface plasma excimer coupler as described in claim 1, which is characterized in that the metal inside and hollow
Metal sleeve uses oxygen-free copper.
5. class surface plasma excimer coupler as described in claim 1, which is characterized in that the surface modes radiator
Length L2Between 1mm~2.5mm.
6. class surface plasma excimer coupler as described in claim 1, which is characterized in that the gradual change of the third through-hole
Inclination angle theta2Between 25 °~40 °.
7. a kind of ultra wide band Terahertz class surface plasma excimer coupling process, which is characterized in that the class surface plasma
Body excimer coupling process includes the following steps：
1) TEM mode that coaxial line waveguide passes over enters TEM mode compressor reducer, and TEM mode compressor reducer is realized and upper level
Coaxial line waveguide smooth connection, while TEM mode is through TEM mode compressor reducer, energy compression to sub-wavelength dimensions range,
In, TEM mode compressor reducer includes diameter along the gradually smaller first through hole in the direction of propagation, and is arranged inside first through hole
Columned metal inside；
2) the TEM electromagnetic waves after energy compression are converted into specific class surface plasma excimer pattern through pattern matcher,
In, pattern matcher includes diameter along the second constant through-hole of the direction of propagation, and the groove depth being arranged inside the second through-hole is gradually
Become metal gauffer inner core, groove depth graded metal gauffer inner core is to have periodically circle in the outer surface of columned metal inside
The depth of cricoid co-axial grooves, groove is gradually deepened along the direction of propagation；
3) class surface plasma excimer pattern be coupled into after surface modes radiator next stage class surface plasma swash
In first waveguide, wherein surface modes radiator includes that diameter becomes larger along the direction of propagation, logical in the horn-like third that is open
Hole, and the groove depth homogeneous metal gauffer inner core that is arranged inside third through-hole, groove depth homogeneous metal gauffer inner core are in cylinder
The outer surface of the metal inside of shape has periodically circular co-axial grooves, the depth of groove constant along the direction of propagation.
8. coupling process as claimed in claim 7, which is characterized in that in step 1), by adjusting TEM mode compressor reducer
Parameter, to improve the efficiency of pattern conversion, parameter includes length and the gradual change inclination angle of TEM mode compressor reducer.
9. coupling process as claimed in claim 7, which is characterized in that in step 2), by control model adaptation
The depth of the groove of groove depth graded metal gauffer inner core adjusts class surface plasma excimer pattern.
10. coupling process as claimed in claim 7, which is characterized in that in step 3), by adjusting surface modes radiator
Parameter, further increase pattern conversion efficiency, parameter includes length and the gradual change inclination angle of surface modes radiator.
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| CN107528106B (en) * | 2017-07-19 | 2019-08-13 | 北京大学 | A kind of Gaussian beam mode filter and its implementation with diagonal horn structure |
| CN109545639B (en) * | 2018-11-06 | 2019-12-13 | 北京大学 | terahertz traveling wave tube ultra-wideband quasi-optical output system and preparation method thereof |
| CN111697337B (en) * | 2020-06-04 | 2021-03-23 | 北京大学 | Millimeter wave terahertz wave multimode orbital angular momentum beam scanning antenna and method |
| CN111697338B (en) * | 2020-06-16 | 2021-04-30 | 北京大学 | Artificial surface plasmon orbit angular momentum beam scanning antenna and method thereof |
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