CN105698820B - A kind of laser gyro cavity translatory mirror shakes deformation active compensation device - Google Patents

A kind of laser gyro cavity translatory mirror shakes deformation active compensation device Download PDF

Info

Publication number
CN105698820B
CN105698820B CN201610055265.0A CN201610055265A CN105698820B CN 105698820 B CN105698820 B CN 105698820B CN 201610055265 A CN201610055265 A CN 201610055265A CN 105698820 B CN105698820 B CN 105698820B
Authority
CN
China
Prior art keywords
laser gyro
deformation
active compensation
chamber
cavity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201610055265.0A
Other languages
Chinese (zh)
Other versions
CN105698820A (en
Inventor
谢元平
罗晖
黄云
于旭东
李耿
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National University of Defense Technology
Original Assignee
National University of Defense Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National University of Defense Technology filed Critical National University of Defense Technology
Priority to CN201610055265.0A priority Critical patent/CN105698820B/en
Publication of CN105698820A publication Critical patent/CN105698820A/en
Application granted granted Critical
Publication of CN105698820B publication Critical patent/CN105698820B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C25/00Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
    • G01C25/005Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass initial alignment, calibration or starting-up of inertial devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/58Turn-sensitive devices without moving masses
    • G01C19/64Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Manufacturing & Machinery (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Lasers (AREA)
  • Gyroscopes (AREA)

Abstract

A kind of laser gyro cavity translatory mirror shakes deformation active compensation device, including error processing circuitry, analog-digital converter, controller, digital analog converter, phase-shift circuit, multiplier, summing circuit, the light intensity signal of laser gyro output or orthogonal count signal are handled to obtain the error signal for representing jitter modulation, controller adjusts the amplitude of dither feedback signal according to the error signal and phase obtains shake deformation Active Compensation signal, shake deformation Active Compensation signal controls the chamber translatory mirror of laser gyro after growing control voltage superposition with chamber, the laser gyro change of cavity length and due to chamber translatory mirror radial direction deformation caused by mechanical shaking caused by compensation thermal expansion and thermal deformation, so as to gyro change of cavity length caused by mechanical shaking is reduced or eliminated, improve the precision of laser gyro.The present invention does not change the existing structure of laser gyro, only carries out Active Compensation to chamber translatory mirror radial direction deformation caused by mechanical shaking by electronic circuit and signal processing, and implementation cost is low.

Description

A kind of laser gyro cavity translatory mirror shakes deformation active compensation device
Technical field
The present invention relates to laser gyroes, refer in particular to a kind of laser gyro cavity translatory mirror shake deformation active compensation device, are used for Gyro radial direction change of cavity length caused by mechanical shaking is reduced or eliminated.
Background technology
Ring laser gyro is with wide dynamic range, the scale factor linearity is good, it is rapid, insensitive etc. to acceleration to start Series of advantages is the ideal element of strap-down inertial system, is widely used in the fields such as navigation, Aeronautics and Astronautics and land.
Laser gyro can eliminate locking there is latch-up phenomenon using mechanical shaking offset frequency.One typical machinery is trembled Dynamic offset frequency laser gyro is triangle or square configuration, includes three pieces or four speculums.Fig. 1 is the mechanical shaking of square configuration Offset frequency laser gyro structure diagram, two panels movable mirror 2,3 and two panels fixed mirror 4,5 form laser with square devitrified glass cavity 1 Resonator, intracavitary generate the laser that two beams are run in opposite directions.2,3 outside of two panels movable mirror is stained with piezoelectric ceramics (PZT), changes piezoelectricity Voltage on ceramics can generate stretching motion, movable mirror 2,3 be driven to be axially moveable, so that gyro resonator long hair changes Change.Movable mirror, piezoelectric ceramics and its component composition chamber translatory mirror (or the long control mechanism of chamber, the long control mechanism of journey, frequency regulator). Laser gyro can cause the variation of total chamber length due to the thermal expansion and thermal deformation of cavity in the process of running, for stabilized lasers frequency Rate is, it is necessary to which to stablize total chamber using chamber translatory mirror long.
Photodiode 7 is bonded on the light-combining prism of fixed mirror 4, for export the orthogonal gyro count signal A of two-way, B, photodiode 8 are bonded on fixed mirror 5 for output intensity signal LIM, and LIM can be used for light intensity to monitor or be used as chamber long The feed back input of control circuit.The center that wheel 6 is mounted on devitrified glass cavity 1 is trembled, trembles and PZT pieces is posted on the spoke of wheel, Trembling wheel by the driving of PZT pieces drives cavity to generate slightly quick oscillation exchange, so as to add in a positive and negative friendship to gyro The Dithered of change eliminates gyro latch up effect.
Tremble wheel drive cavity slightly quick oscillation exchange while, chamber translatory mirror also generates identical movement, shows as chamber Translatory mirror is subject to alternation inertia force.Gyro shake amplitude θ be usually 200~600 rads, chattering frequency f for 300Hz~ 1000Hz, shake angular acceleration a=θ (2 π f)2Very big, the tangential acceleration at chamber translatory mirror 3 is also very big, accordingly Chamber translatory mirror will bear very big alternation inertia force.Since the rigidity of chamber translatory mirror is small compared with devitrified glass cavity 1, and its each component Rigidity it is also different, therefore chamber translatory mirror necessarily leads to tangential deformation X, simultaneously because some non-ideal factors of chamber translatory mirror It can cause radial direction deformation Y.Radial direction deformation makes resonator cavity length modulated, and precision frequency stabilization is caused to decline, gyro performance is generated It influences, gyro output intensity LIM can be modulated with the amplitude of orthogonal count signal A, B, modulating frequency and chattering frequency phase It closes, modulation amplitude is related with radial direction deformation, and radial direction deformation is bigger, and amplitude modulation is bigger.Mechanical shaking feedback signal UdAnd shake Gyro output A under modulation is as shown in Figure 2, it is seen that the modulation that the amplitude of gyro output A is shaken, gyro output B is similar, together When light intensity signal LIM can also be subject to jitter modulation.Jitter modulation causes gyro hydraulic performance decline.
At present, there is the long control circuit of mating chamber (frequency stabilization circuit) when laser gyro works normally, it is swollen for compensating heat The variation that chamber caused by swollen and thermal deformation is grown.The specific schematic diagram of the long control circuit of chamber is as shown in figure 3, the light of photodiode output Strong LIM is input to the long control circuit 1 of chamber, and the long control circuit 1 of chamber exports corresponding chamber length control according to the variation of light intensity signal LIM Voltage VPLCGyro change of cavity length caused by being added to chamber translatory mirror after the amplification of voltage amplifier 2 to compensate thermal deformation.But due to chamber The frequency response of long control circuit is generally significantly less than mechanical shaking frequency, and chamber translatory mirror radial direction deformation caused by mechanical shaking and Gyro chamber length be with chattering frequency dynamic change, thus can not the long control circuit of transit chamber to chamber translatory mirror caused by mechanical shaking Radial direction deformation and gyro change of cavity length compensate;For chamber translatory mirror deformation caused by reducing mechanical shaking and its to gyro Can influence, the common practices under the prior art is optimization chamber translatory mirror structure design, increases the chamber translatory mirror rigidity of structure, be stranded Difficulty is to need to change the existing structure of gyro, of high cost.
The content of the invention
The purpose of the present invention is:A kind of laser gyro cavity translatory mirror shake deformation active compensation device is provided, it can be in laser On the basis of gyro existing structure, by electronic circuit and signal processing to chamber translatory mirror radial direction deformation caused by mechanical shaking into Row Active Compensation, gyro change of cavity length caused by mechanical shaking is reduced or eliminated, so as to improve laser gyro precision.
To realize the present invention and use technical solution be:
Laser gyro cavity translatory mirror shakes deformation active compensation device, including the long control circuit of chamber, it is characterised in that:Also wrap It includes:Error processing circuitry (10), analog-digital converter (20), digital analog converter (40), phase-shift circuit (50), multiply controller (30) Musical instruments used in a Buddhist or Taoist mass (60), summing circuit (70);Error processing circuitry (10) receives the light intensity signal of laser gyro, and output error voltage passes through Analog-digital converter (20) is passed to controller (30);Mechanical shaking feedback signal after the phase-shift circuit (50) phase shift with controller (30) trembling for amplitude and phase-adjustable is obtained through multiplier (60) multiplication by the compensation controlled quentity controlled variable that digital analog converter (40) exports Dynamic deformation Active Compensation signal, the signal and original latter chamber translation with to laser gyro of existing chamber length control voltage superposition Mirror is controlled, and is compensated while laser gyro change of cavity length caused by compensating thermal expansion and thermal deformation since mechanical shaking is led The chamber translatory mirror radial direction deformation of cause, so as to gyro change of cavity length caused by mechanical shaking is reduced or eliminated.
The error processing circuitry (10) handles to obtain error voltage to gyro output intensity or orthogonal count signal.
The amplitude and phase of adjustment shake deformation Active Compensation signal make error voltage most I that machinery be reduced or eliminated to tremble Chamber translatory mirror radial direction deformation and gyro change of cavity length caused by dynamic.
The controller (30) is the controller that laser gyro carries or additional increased controller.
The error processing circuitry (10) be made of bandpass filter (11) and AC/DC converting circuit (12) or by Envelope detector (13) and AC/DC converting circuit (13) composition.
The controller (30) is microcontroller, FPGA or DSP.
The AC/DC converting circuit (12) is that the ac/dc being made of the chip of model AD736 converts electricity Road.
The phase-shift circuit (50) is the multiterminal feedback all-pass filter for including operational amplifier, resistance and capacitance, is led to It crosses and changes the value of resistance and capacitance so as to change the angle of phase shift.
The envelope detection circuit (13) is the circuit for including amplitude modulation resistance and amplitude modulation capacitance.
The advantage of the invention is that:
The present invention does not change the existing structure of laser gyro, and only mechanical shaking is caused by electronic circuit and signal processing The deformation of chamber translatory mirror radial direction carry out Active Compensation, improve laser gyro precision, while implementation cost is low.
Description of the drawings
Fig. 1 is the mechanical shaking offset frequency laser gyro structure diagram of square configuration.
Fig. 2 is the gyro output count signal A oscillograms under mechanical shaking feedback signal and jitter modulation.
Fig. 3 is the long control circuit schematic diagram of laser gyro cavity of background technology.
Fig. 4 is the structure diagram of first case laser gyro cavity translatory mirror shake deformation active compensation device of the present invention.
Fig. 5 is the structure diagram of second case laser gyro cavity translatory mirror shake deformation active compensation device of the present invention.
Fig. 6 is the circuit diagram of the specific embodiment of the AC/DC converting circuit of the present invention.
Fig. 7 is the circuit diagram of the specific embodiment of the phase-shift circuit of the present invention.
Fig. 8 is the circuit diagram of the specific embodiment of the multiplier circuit of the present invention.
Fig. 9 is the circuit diagram of the specific embodiment of the envelope detection circuit of the present invention.
Figure 10 is the circuit diagram of the specific embodiment of the summing circuit of the present invention.
Specific embodiment
The present invention is described in further details below with reference to specific embodiment and Figure of description.
As shown in figure 4, first case laser gyro cavity translatory mirror shake deformation active compensation device of the present invention is included at error Manage circuit 10, analog-digital converter 20, controller 30, digital analog converter 40, phase-shift circuit 50, multiplier 60, summing circuit 70.Institute Stating error processing circuitry 10 includes bandpass filter 11 and AC/DC converting circuit 12.The controller 20 for microcontroller, Existing controller in laser gyro support circuit may be employed in FPGA or DSP, can also additionally increase a controller. 20 preferred resolution of analog-digital converter is 10 or 10 or more, analog-to-digital conversion core of the conversion speed per second more than 100 times Piece.40 preferred resolution of digital analog converter is 10 or 10 or more, digital-to-analogue conversion of the conversion speed per second more than 100 times Chip.The long control circuit 1 of Fig. 4 lumens belongs to the support circuit needed for laser gyro normal work, Ke Yishi with voltage amplifier 2 The existing any type of circuit that can meet chamber length control needs.
In this embodiment, the light intensity of the photodiode detection laser gyro of laser gyro, output intensity signal LIM, The light intensity signal is input to the long control circuit 1 of chamber and error processing circuitry 10 simultaneously.Light intensity signal is input to chamber length control all the way After circuit 1, the long controlled quentity controlled variable V of chamber is formedPLC, mended for change of cavity length caused by the thermal expansion and thermal deformation to laser gyro It repays.Another way light intensity signal LIM is input to the bandwidth-limited circuit 11 of error processing circuitry 10, the centre frequency of bandpass filter It being necessarily arranged to approach with mechanical shaking frequency, output error signal err reflects mechanical shaking and the amplitude of light intensity is modulated, The error signal is converted to direct-flow error voltage V by AC/DC converting circuit 12err.Direct-flow error voltage VerrTurn through modulus Parallel operation 20 is converted into digital signal and is input in controller 30, and controller is calculated according to the size of the error voltage and actively mends Repay controlled quentity controlled variable Vc, Active Compensation controlled quentity controlled variable VcIt is exported through digital analog converter 40.
Characterize the dither feedback signal U of mechanical shaking amplitude and frequencydIt is obtained after 50 phase shift angle θ of phase-shift circuit U, the dither feedback signal U after phase shiftMultiplier 60 is sent into, with Active Compensation controlled quentity controlled variable VcMultiplication obtains the shake of chamber translatory mirror Deformation Active Compensation signal UCOMP.Multiplier 60 exports UCOMP=SU·Vc, wherein S is the scale factor of multiplier, therefore Change compensation controlled quentity controlled variable VcShake deformation Active Compensation signal U can be changedCOMPAmplitude, change the phase shift angle θ of phase-shift circuit Shake deformation Active Compensation signal U can be changedCOMPPhase.The method of determination of the phase shift angle θ of phase-shift circuit is as follows:It keeps Compensate controlled quentity controlled variable VcShake deformation Active Compensation signal U that is constant, being correspondingly added on chamber translatory mirrorCOMPAmplitude is constant, changes The value of phase shift angle θ makes error voltage VerrMinimum angle, θ is required phase shift angle.
Chamber length control voltage VPLCWith shaking deformation Active Compensation signal UCOMPIt is added through summing circuit 70, voltage amplifier 2 Amplify latter with being added to chamber translatory mirror, lumen length control voltage VPLCChange of cavity length caused by compensating thermal expansion and thermal deformation, is trembled Dynamic deformation Active Compensation signal UCOMPChamber translatory mirror radial direction deformation and gyro change of cavity length caused by compensating mechanical shaking.
The process compensated according to the shake deformation of laser gyro cavity translatory mirror as described above, it can be seen that error voltage VerrSize and Active Compensation controlled quentity controlled variable VcSize it is directly related, therefore the purpose of controller is that calculating Active Compensation Controlled quentity controlled variable VcSize so that error voltage VerrIt is minimum.One optional control strategy is:Fix an incremental voltage value Δ V, controller export an initial Active Compensation controlled quentity controlled variable Vc, then make the Active Compensation controlled quentity controlled variable of next controlling cycle VcIncrease K Δ V, wherein K initial values are 1, the error voltage V after then controller detection changeserr:If VerrBecome smaller then K It is constant, if instead VerrBecome larger, change the symbol of K, this process of repetition, which can be found, makes VerrMinimum control voltage Vc, this When Active Compensation signal the influence that mechanical shaking grows chamber translatory mirror radial direction deformation and gyro chamber is minimized.
As shown in figure 5, second case laser gyro cavity translatory mirror shake deformation active compensation device of the present invention is included at error Manage circuit 10, analog-digital converter 20, controller 30, digital analog converter 40, phase-shift circuit 50, multiplier 60, summing circuit 70.Institute Stating error processing circuitry 10 includes envelope detection circuit 13 and AC/DC converting circuit 12.The controller 20 for microcontroller, Existing controller in laser gyro support circuit may be employed in FPGA or DSP, can also additionally increase a controller. 20 preferred resolution of analog-digital converter is 10 or 10 or more, analog-to-digital conversion core of the conversion speed per second more than 100 times Piece.40 preferred resolution of digital analog converter is 10 or 10 or more, digital-to-analogue conversion of the conversion speed per second more than 100 times Chip.The long control circuit 1 of Fig. 5 lumens belongs to the support circuit needed for laser gyro normal work, Ke Yishi with voltage amplifier 2 The existing any type of circuit that can meet chamber length control needs.
In this embodiment, laser gyro light intensity signal LIM is input to the long control circuit 1 of chamber, forms chamber length control voltage VPLC, compensated for change of cavity length caused by the thermal expansion and thermal deformation to laser gyro.Laser gyro orthogonal signalling A (or B the envelope detection circuit 13 of error processing circuitry 10) is input to, 13 output error signal err of envelope detection circuit reflects machine Tool, which is shaken, modulates the amplitude of light intensity, which is converted to direct-flow error voltage V by AC/DC converting circuit 12err。 Direct-flow error voltage VerrDigital signal is converted into through analog-digital converter 20 and is input to controller 30, and controller 30 is used and implemented Identical method obtains shake deformation Active Compensation signal U in example oneCOMP, then grown with chamber and control voltage VPLCSuperposition is formed final Controlled quentity controlled variable the chamber translatory mirror of laser gyro is controlled.
As shown in fig. 6, the circuit diagram of the specific embodiment for the AC/DC converting circuit 12 of the present invention:At this In embodiment, AC/DC converting circuit is completed using the virtual value chip of model AD736.Bandpass filter 11 or envelope The output error signal err of wave detector 13 is input to No. 2 pins of AD736 chips, and 7 feet of chip are connected with power supply+15V, 4 feet It is connected with power supply -15V, 1 foot and 8 feet are grounded, and 5 feet pass through capacitance CavIt is connected with 4 feet, 6 foot of chip output VerrFor DC voltage, Its value is equal to the virtual value of input err, reflects mechanical shaking and the amplitude of light intensity is modulated.
As shown in fig. 7, the circuit diagram of the specific embodiment for the phase-shift circuit of the present invention:In this embodiment, move The multiterminal that circuitry phase is operational amplifier, resistance and capacitance form feed back all-pass filter.The resistance value of resistance R2 is resistance in figure The a quarter of the resistance value of R1, resistance R3 is identical with the resistance value of resistance R4, is twice of the resistance value of resistance R1;Capacitance C1 and C2 Capacitance it is identical.The size of phase shift angle θ can be changed by changing the resistance value of resistance or the capacitance of capacitance in circuit.In laser gyro In the course of work of the shake deformation compensating mechanism of chamber translatory mirror, the phase shift angle θ of above-mentioned phase-shift circuit can be in device the It is once corrected during power-up initializing or can also be in each power-up initializing by controller adjust automatically.It is right In the situation by controller adjust automatically, then need to use digital regulation resistance that resistance is replaced to ensure controller for phase shift angle The adjustment of θ.
As shown in figure 8, the circuit diagram of the specific embodiment for the multiplier of the present invention:In this embodiment, multiplication Device is formed using the multiplier chip of model AD633;1 foot and 3 feet of chip input Active Compensation controlled quentity controlled variable V respectivelycAnd shifting Dither feedback signal U after phase;Pin 2, pin 4 and the pin 6 of chip are directly grounded;5 feet of chip connect with power supply -15V It connects, while is grounded by the filter capacitor of a 0.1uF;8 feet of chip are connected with power supply+15V, while pass through a 0.1uF Filter capacitor ground connection;7 output signal U of output pin of chipCOMP=0.1U·Vc
As shown in figure 9, the circuit diagram of the specific embodiment for the envelope detection circuit of the present invention:In the embodiment In, envelope detection circuit is made of diode D1, filter capacitor C1, filter resistance R1 and isolation capacitance C2;The input terminal of circuit Laser gyro orthogonal signalling A or B are met, circuit output end is error signal e rr, reflects amplitude tune of the mechanical shaking to light intensity System.Selection C1, R1 allow am signals by and being filtered out higher than the carrier signal of chattering frequency, C2 is for isolating Direct current signal.
As shown in Figure 10, for the present invention summing circuit specific embodiment circuit diagram:In this embodiment, it is electric It is identical to hinder the resistance value of R1, R2, R3, R4, chamber length control voltage VPLCConnecting resistance R1, shake deformation Active Compensation signal UCOMPConnect electricity Hinder R2.Export VOUTFor VPLCWith UCOMPThe sum of.
In conclusion the present invention is due to the light intensity signal or orthogonal that by the way of Active Compensation, laser gyro is exported Count signal is handled to obtain the error signal for representing jitter modulation, and controller adjusts shake feedback letter according to the error signal Number amplitude and phase obtain shake deformation Active Compensation signal, shake deformation Active Compensation signal is controlled with original existing chamber length The latter chamber translatory mirror with to laser gyro of voltage superposition processed controls, the laser top caused by compensation thermal expansion and thermal deformation Compensation is due to chamber translatory mirror radial direction deformation caused by mechanical shaking while spiral shell change of cavity length, so as to which mechanical shaking be reduced or eliminated Caused gyro change of cavity length improves the precision of laser gyro;The present invention does not change the existing structure of laser gyro, only passes through Electronic circuit and signal processing carry out Active Compensation to chamber translatory mirror radial direction deformation caused by mechanical shaking, and implementation cost is low.

Claims (9)

1. a kind of laser gyro cavity translatory mirror shakes deformation active compensation device, including the long control circuit of chamber, it is characterised in that:Also Including:Error processing circuitry (10), analog-digital converter (20), controller (30), digital analog converter (40), phase-shift circuit (50), Multiplier (60), summing circuit (70);Error processing circuitry(10)The light intensity signal of laser gyro is received, output error voltage leads to Cross analog-digital converter(20)Incoming controller(30);Mechanical shaking feedback signal is through the phase-shift circuit(50)After phase shift with control Device(30)Pass through digital analog converter(40)The compensation controlled quentity controlled variable of output is through multiplier(60)It is multiplied and obtains amplitude and phase-adjustable Deformation Active Compensation signal is shaken, which puts down with original existing chamber length control latter chamber with to laser gyro of voltage superposition It moves mirror to be controlled, compensation is due to mechanical shaking while laser gyro change of cavity length caused by compensating thermal expansion and thermal deformation Caused chamber translatory mirror radial direction deformation, so as to gyro change of cavity length caused by mechanical shaking is reduced or eliminated.
2. laser gyro cavity translatory mirror according to claim 1 shakes deformation active compensation device, it is characterised in that:It is described Error processing circuitry(10)Gyro output intensity or orthogonal count signal are handled to obtain error voltage.
3. laser gyro cavity translatory mirror according to claim 1 shakes deformation active compensation device, it is characterised in that:Adjustment Shake deformation Active Compensation signal amplitude and phase make error voltage most I mechanical shaking is reduced or eliminated caused by chamber put down Move the deformation of mirror radial direction and gyro change of cavity length.
4. laser gyro cavity translatory mirror according to claim 1 shakes deformation active compensation device, it is characterised in that:It is described Controller(30)The controller or additional increased controller carried for laser gyro.
5. the laser gyro cavity translatory mirror shake deformation active compensation device according to one of claim 1 ~ 4, feature exist In:The error processing circuitry(10)By bandpass filter(11)And AC/DC converting circuit(12)Composition is examined by envelope Ripple device(13)And AC/DC converting circuit(12)Composition.
6. the laser gyro cavity translatory mirror shake deformation active compensation device according to one of claim 1 ~ 4, feature exist In:The controller(30)For microcontroller, FPGA or DSP.
7. laser gyro cavity translatory mirror according to claim 5 shakes deformation active compensation device, it is characterised in that:It is described AC/DC converting circuit(12)For the AC/DC converting circuit being made of the chip of model AD736.
8. the laser gyro cavity translatory mirror shake deformation active compensation device according to one of claim 1 ~ 4, feature exist In:The phase-shift circuit(50)It is the multiterminal feedback all-pass filter for including operational amplifier, resistance and capacitance, passes through change The value of resistance and capacitance is so as to changing the angle of phase shift.
9. laser gyro cavity translatory mirror according to claim 5 shakes deformation active compensation device, it is characterised in that:It is described Envelope detector(13)It is the circuit for including amplitude modulation resistance and amplitude modulation capacitance.
CN201610055265.0A 2016-01-27 2016-01-27 A kind of laser gyro cavity translatory mirror shakes deformation active compensation device Expired - Fee Related CN105698820B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610055265.0A CN105698820B (en) 2016-01-27 2016-01-27 A kind of laser gyro cavity translatory mirror shakes deformation active compensation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610055265.0A CN105698820B (en) 2016-01-27 2016-01-27 A kind of laser gyro cavity translatory mirror shakes deformation active compensation device

Publications (2)

Publication Number Publication Date
CN105698820A CN105698820A (en) 2016-06-22
CN105698820B true CN105698820B (en) 2018-05-25

Family

ID=56228683

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201610055265.0A Expired - Fee Related CN105698820B (en) 2016-01-27 2016-01-27 A kind of laser gyro cavity translatory mirror shakes deformation active compensation device

Country Status (1)

Country Link
CN (1) CN105698820B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107727638B (en) * 2017-11-02 2020-08-14 嘉兴镭光仪器科技有限公司 Laser Raman spectrum gas analyzer with resonant cavity enhancement
CN110174074B (en) * 2019-06-27 2024-02-02 南京工程学院 Measuring device and method for thermal deformation error compensation of industrial robot
CN110514196A (en) * 2019-08-13 2019-11-29 中国航空工业集团公司西安飞行自动控制研究所 The calibration factor compensation method of the long control system of chamber and loop laser angle-measuring equipment
CN113188535A (en) * 2021-05-27 2021-07-30 湖南二零八先进科技有限公司 Laser gyroscope jitter offset frequency control device and method based on frequency modulation
CN117367400B (en) * 2023-12-04 2024-03-05 江西驰宇光电科技发展有限公司 Laser frequency stabilization method based on resonant cavity path length adjustment and laser gyro

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5208653A (en) * 1991-08-06 1993-05-04 Litton Systems, Inc. Multioscillator ring laser gyroscope adaptive digitally controlled cavity length control system
US5450198A (en) * 1993-10-01 1995-09-12 Honeywell Inc. Laser gyro microprocessor based smart mode acquisition and high performance mode hopping
CN101975574A (en) * 2010-10-01 2011-02-16 中国人民解放军国防科学技术大学 Small jitter frequency stabilization method of four-frequency laser gyro
CN102147254A (en) * 2010-10-01 2011-08-10 中国人民解放军国防科学技术大学 Four-frequency laser gyro control method
CN102445198A (en) * 2011-09-19 2012-05-09 中国航空工业第六一八研究所 Alternating-current frequency stabilization system and method for four-frequency laser gyroscope
CN104713539A (en) * 2013-12-11 2015-06-17 中国航空工业第六一八研究所 Laser gyro cavity length control system and control method thereof

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5208653A (en) * 1991-08-06 1993-05-04 Litton Systems, Inc. Multioscillator ring laser gyroscope adaptive digitally controlled cavity length control system
US5450198A (en) * 1993-10-01 1995-09-12 Honeywell Inc. Laser gyro microprocessor based smart mode acquisition and high performance mode hopping
CN101975574A (en) * 2010-10-01 2011-02-16 中国人民解放军国防科学技术大学 Small jitter frequency stabilization method of four-frequency laser gyro
CN102147254A (en) * 2010-10-01 2011-08-10 中国人民解放军国防科学技术大学 Four-frequency laser gyro control method
CN102445198A (en) * 2011-09-19 2012-05-09 中国航空工业第六一八研究所 Alternating-current frequency stabilization system and method for four-frequency laser gyroscope
CN104713539A (en) * 2013-12-11 2015-06-17 中国航空工业第六一八研究所 Laser gyro cavity length control system and control method thereof

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
基于单片机ADuC812的四频差动激光陀螺腔长控制系统;杨建强等;《传感器与微系统》;20091231;第28卷(第4期);全文 *
棱镜激光陀螺数字稳光强稳腔长控制系统;黄勇等;《弹箭与制导学报》;20081231;第28卷(第6期);全文 *
激光陀螺腔长控制机构研究与改进;兰佩锋等;《应用光学》;20130131;第34卷(第1期);全文 *

Also Published As

Publication number Publication date
CN105698820A (en) 2016-06-22

Similar Documents

Publication Publication Date Title
CN105698820B (en) A kind of laser gyro cavity translatory mirror shakes deformation active compensation device
US7898448B2 (en) Sigma-delta type analog-to-digital (AD) converter and angular velocity sensor using same
US9618361B2 (en) MEMS device automatic-gain control loop for mechanical amplitude drive
CN101464611B (en) Jitter correction control circuit and imaging device having jitter correction control circuit
JP6397115B2 (en) Acceleration sensor
US9602117B2 (en) Detection device, sensor, electronic apparatus, and moving object
KR101803990B1 (en) Method for the decoupled control of the quadrature and the resonance frequency of a micro-mechanical rotation rate sensor by means of sigma-delta-modulation
US10113874B2 (en) Detection device, sensor, electronic apparatus and moving object
US7891245B2 (en) Inertial force sensor including a sense element, a drive circuit, a sigma-delta modulator and a signal processing circuit
CN104655116B (en) Detection device, sensor, electronic equipment and moving body
CN101470318A (en) Image stabilization control circuit
CN111412907B (en) Full-angle measurement and control circuit system of micro-electromechanical multi-ring gyroscope
CN114396928B (en) Laser gyro frequency stabilization method and system
CN107238381A (en) For mode vectors correlation state silicon micromechanical gyroscope bandwidth broadning less digit correction method
Northemann et al. Drive and sense interface for gyroscopes based on bandpass sigma-delta modulators
CN1844996A (en) Technology and apparatus for precise control of femtosecond laser pulse phase
JP2017053704A (en) Physical quantity detection system, electronic apparatus and mobile body
CN114152266B (en) MEMS gyroscope quadrature error correction system
CN100386600C (en) Laser gyro light path control system
Barbieri et al. Fully integrated system-in-package device for drive, sense, and control of MEMS µmirrors for Raster scan projection
CN219178583U (en) MEMS gyroscope with three-channel time-sharing multiplexing detection circuit
CN219368773U (en) MEMS gyroscope
JP2012098033A (en) Angular velocity sensor
US20220412739A1 (en) Driving circuit for controlling a mems oscillator of resonant type
CN118424247A (en) Integrated optical chip frequency noise detection and suppression method and structure for silicon photon gyro

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20180525

Termination date: 20210127

CF01 Termination of patent right due to non-payment of annual fee