CN105695948B - The mass preprocess method of diamond coatings mechanical seal ring - Google Patents
The mass preprocess method of diamond coatings mechanical seal ring Download PDFInfo
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- CN105695948B CN105695948B CN201610048629.2A CN201610048629A CN105695948B CN 105695948 B CN105695948 B CN 105695948B CN 201610048629 A CN201610048629 A CN 201610048629A CN 105695948 B CN105695948 B CN 105695948B
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- sealing ring
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- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 71
- 239000010432 diamond Substances 0.000 title claims abstract description 71
- 238000000034 method Methods 0.000 title claims abstract description 60
- 238000000576 coating method Methods 0.000 title claims abstract description 43
- 238000007789 sealing Methods 0.000 claims abstract description 98
- 239000000956 alloy Substances 0.000 claims abstract description 29
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 29
- 239000011159 matrix material Substances 0.000 claims abstract description 28
- 238000007788 roughening Methods 0.000 claims abstract description 20
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 17
- 239000006004 Quartz sand Substances 0.000 claims abstract description 16
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 16
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 15
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 14
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 14
- 239000000919 ceramic Substances 0.000 claims abstract description 10
- 230000003628 erosive effect Effects 0.000 claims abstract description 10
- 239000000758 substrate Substances 0.000 claims description 20
- 238000005488 sandblasting Methods 0.000 claims description 16
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 14
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims description 10
- 230000005540 biological transmission Effects 0.000 claims description 10
- 229910017052 cobalt Inorganic materials 0.000 claims description 9
- 239000010941 cobalt Substances 0.000 claims description 9
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- 239000002253 acid Substances 0.000 claims description 8
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 6
- QAOWNCQODCNURD-UHFFFAOYSA-N sulfuric acid Substances OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- 239000004615 ingredient Substances 0.000 claims description 4
- 239000002344 surface layer Substances 0.000 claims description 4
- 238000011282 treatment Methods 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 239000012535 impurity Substances 0.000 claims description 3
- -1 potassium ferricyanide Chemical compound 0.000 claims description 3
- 238000002203 pretreatment Methods 0.000 claims description 3
- 229910003978 SiClx Inorganic materials 0.000 claims description 2
- 238000003491 array Methods 0.000 claims description 2
- JPNWDVUTVSTKMV-UHFFFAOYSA-N cobalt tungsten Chemical group [Co].[W] JPNWDVUTVSTKMV-UHFFFAOYSA-N 0.000 claims description 2
- 238000005530 etching Methods 0.000 claims description 2
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- 239000007921 spray Substances 0.000 claims description 2
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 2
- 238000002604 ultrasonography Methods 0.000 claims 1
- 230000008569 process Effects 0.000 abstract description 15
- 238000012545 processing Methods 0.000 abstract description 5
- 238000002360 preparation method Methods 0.000 abstract description 4
- 230000001737 promoting effect Effects 0.000 abstract 1
- 238000012876 topography Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 27
- 238000000151 deposition Methods 0.000 description 20
- 238000000227 grinding Methods 0.000 description 16
- 239000011248 coating agent Substances 0.000 description 13
- 239000000463 material Substances 0.000 description 10
- 239000002245 particle Substances 0.000 description 10
- 230000008021 deposition Effects 0.000 description 9
- 238000005516 engineering process Methods 0.000 description 7
- 239000010410 layer Substances 0.000 description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 239000012530 fluid Substances 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 238000004050 hot filament vapor deposition Methods 0.000 description 4
- 239000002113 nanodiamond Substances 0.000 description 4
- 238000004062 sedimentation Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000006911 nucleation Effects 0.000 description 3
- 238000010899 nucleation Methods 0.000 description 3
- 238000005381 potential energy Methods 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- 244000137852 Petrea volubilis Species 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000003763 carbonization Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 238000005087 graphitization Methods 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 238000010422 painting Methods 0.000 description 2
- 238000011056 performance test Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 2
- 240000006409 Acacia auriculiformis Species 0.000 description 1
- 239000004568 cement Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000008199 coating composition Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 238000013467 fragmentation Methods 0.000 description 1
- 238000006062 fragmentation reaction Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 239000003317 industrial substance Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000013332 literature search Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 230000007096 poisonous effect Effects 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000013139 quantization Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0254—Physical treatment to alter the texture of the surface, e.g. scratching or polishing
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Mechanical Sealing (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The present invention relates to a kind of mass preprocess methods of diamond coatings mechanical seal ring：Using the hard alloy of acid-base pretreatment or untreated silicon carbide/silicon nitride ceramics mechanical seal ring as matrix, the high pressure draught using quartz sand as medium is used to carry out erosion roughening to sealing ring working surface, sealed ring batch pretreatment unit, it is pre-processed by the pipeline system that sealing ring is completed by the automatic rotation of the auto-feed of erosion sealing ring and high-pressure nozzle, rapid batch prepares the surface topography being uniformly roughened of suitable diamond film growth.Sealing ring mass preprocess method of the present invention is compared with hand lapping is roughened preprocess method, processing efficiency can be obviously improved, and can guarantee same sealing ring different location and the uniform roughening of same batch sealing ring and the long-time stability of pretreating process, significance is respectively provided with to the preparation process for stablizing diamond coatings mechanical seal ring and the quality for promoting product.
Description
Technical field
Mass preprocess method more particularly to one kind the present invention relates to a kind of diamond coatings mechanical seal ring pass through
The mass preprocess method for the diamond coatings mechanical seal ring that sealing ring mass pretreatment unit carries out, belongs to film skill
Art field.
Background technology
With being constantly progressive for science and technology, mechanical seal has obtained widely should in various fluid machineries and equipment
With.According to investigations, more than 90% pump has used mechanical seal in equipment in Oil Refining.As it can be seen that mechanical seal is used in pump
Very important status is occupied in axle envelope.
Dynamic and static sealing ring is fitted closely by spring tension in mechanically-sealing apparatus, and the contact surface of two sealing rings is close
The key position of seal apparatus directly determines the performance of entire pump.Dynamic and static sealing loop interface it is prolonged at a high speed,
When in High Voltage and badness-media environment to mill, easily by quick wear out failure.Using conventional rigid alloy or silicon carbide/
Abrasion resistance properties of the mechanical seal ring of silicon nitride ceramic material manufacture under many bad working environments are all difficult to reach steady in a long-term
Requirement, service life is shorter, seriously affect pump equipment normal operation and increase equipment operation cost.Therefore, it is comprehensive
It closes and considers manufacture cost and service life cost performance, the higher superhard painting of hardness, wearability should be used on the basis of traditional material
Layer material.
Chemical vapor deposition (Chemical Vapor Deposition, CVD) diamond thin has hardness height (9000
~10000HV), friction coefficient is low, wearability is strong, surface chemistry inertia is high and weak adhesiveness etc. between many engineering material
Excellent machinery and tribological property.It is adopted on hard substrate with Derjaguin and the Fedoseev proposition of the former Soviet Union in 1975
HFCVD method successful depositions are used with the scholars such as Matsumoto, Setaka of the imagination of CVD method depositing diamond, nineteen eighty-two Japan
Diamond thin is the beginning, and researcher all over the world has started deposition of diamond thin films principle in the late three decades and its application is ground
The upsurge studied carefully.Since hot-wire chemical gas-phase deposition (Hot Filament CVD, HFCVD) method prepares diamond thin with equipment
Simple and easy to control, the advantages that deposition efficiency is high, depositional area is big, processing cost is low, base shape is unrestricted, leads in industry
Domain has obtained most common application.
By the literature search discovery to the prior art, United States Patent (USP) (US2009/0060408) " Diamond coated
Bearing or seal structure and fluid machine comprising the same " disclose diamond
The deposition preparation of coating sealing ring, but the preprocess method before shorter mention sealing depositing diamond film.Application No. is
The patent " sealing ring with the running-in characteristic improved " of CN102097574A is described coats uniqueness in mechanical sealing ring surface
Diamond coatings and the composite coating of lubricant coating composition carry out the running-in characteristic of elevating mechanism sealing ring.Patent is to thin diamond
The thickness proportion of film and lubricant coating is discussed in detail；But the patent is for pretreatment, the painting before diamond film coating layer
The specific thickness of layer process, coating and subsequent thin film polishing post processing are not directed to.
Before silicon carbide/silicon nitride ceramic substrate body surface face depositing diamond film, need artificially to be roughened grinding matrix surface,
To form the potential energy low spot for being easy to diamond nucleation growth, while enhance the work of the mechanical snap between diamond particles and blapharoplast
With.
For hard alloy, graphitization is urged since cobalt element existing for binding agent being used as to have in cemented carbide material
Effect, it can lead to be formed a large amount of graphite in the deposition process of diamond thin at the interface of film and matrix and without fixed
Type carbon component significantly reduces the adhesive strength between film and matrix.Therefore the pretreatment of hard alloy needs to complete to matrix
The roughening on surface and surface layer are gone to handle of both cobalt.General mode is that hard is closed using soda acid two-step method in the world now
Gold is pre-processed, but can retain one layer of carbonization damaged by the pretreated cemented carbide substrate surfaces of soda acid two-step method
Composition granule weaker zone, therefore still need to remove weaker zone by the way of artificial roughening grinding.
Hard alloy, silicon carbide/silicon nitride ceramics matrix pretreatment process in, artificial grinding roughening matrix worksheet
Face is the work of a time-consuming effort, and conventional method is using the fine grain sand paper manual grinding sealing for being moistened with diamond grinding fluid
Ring working surface.But this method efficiency is low, and technology stability is difficult to ensure that, there is an urgent need for carried using more stable efficient method
Rise the efficiency and technology stability of sealing ring pretreatment.
Invention content
The purpose of the present invention is be directed to hand lapping in the pretreatment process of hard alloy or ceramic mechanical seal rings to be roughened
Sealing ring working surface efficiency is low, the technological deficiency of the uniformity and technology stability difference, develops a kind of quick diamond coatings
Mechanical seal ring mass preprocess method.
The purpose of the present invention is what is be achieved through the following technical solutions：
A kind of mass preprocess method of diamond coatings mechanical seal ring, it is characterized in that, with the hard of acid-base pretreatment
Matter alloy mechanical sealing ring or untreated silicon carbide/silicon nitride ceramics mechanical seal ring are matrix, pre- by sealing ring batch
Processing unit carries out erosion roughening to above-mentioned sealing ring working surface using quartz sand high pressure draught, completes the pre- place of sealing ring
Reason；
The sealing ring batch pretreatment unit includes：Operating platform of one bottom with mobile rack is located at stent
Lower section, transmission gear are connected with a transmission electrical machine and are engaged with mobile rack；Cradle top drives big rotation gear equipped with one
Electric rotating machine, the big gear that rotates engage with 8 small rotation gear, small is rotated on gear equipped with axially different position each
Location hole, the high pressure draught conduit with nozzle are fixed in location hole, and high pressure draught conduit is vertical with operating platform；Operation is flat
Platform is equipped with the cylindrical seal ring groove of 8 circumferential arrays, when sealing ring groove is moved to sandblasting roughening area with mobile rack
When, seal the center of circle of ring groove and small rotation gear central coaxial；
The pre-treatment step of sealing ring is：By the hard alloy mechanical sealing ring of acid-base pretreatment or untreated carbonization
Silicon/silicon nitride ceramics mechanical seal ring and be placed on together with the close copper washer of sealing ring major diameter fit sealing ring groove in,
Enter sandblasting under transmission electrical machine drive and be roughened area；Electric rotating machine is opened, drives large and small rotation gear, nozzle is in sealing ring
The heart rotates in a circumferential direction one week, and the high pressure draught containing quartz sand is made to be completed to the sandblasting roughening of sealing ring working surface by nozzle
Reason；Processed sealing ring removes matrix surface impurity by the ultrasonic cleaning of pure water and acetone；
Wherein, the rotational velocity of rotation gear greatly is 0.32~0.4r/s, corresponding pinion gear rotational velocity for 0.8~
1r/s, the 0.05~0.1MPa of compressed air pressure containing quartz sand.
The acid-base pretreatment is：First, by the hard alloy substrate of sealing ring be immersed in Murakami solution into
Row is cleaned by ultrasonic for 30 minutes, makes tungsten carbide (WC) the particle fragmentation on hard alloy surface layer, and matrix surface is caused to be roughened；Then,
Hard alloy substrate is immersed in Caro mixed acid solutions and carries out the etching of 1~4 minute to remove the cobalt element on its surface layer；
Wherein, the hard alloy is tungsten-cobalt series hard alloy (YG6),
The ingredient of the Murakami solution is potassium hydroxide (KOH), the potassium ferricyanide (K3(Fe(CN)6)) and water
(H2O), quality proportioning KOH：K3(Fe(CN)6)：H2O=1：1：10,
The ingredient of the Caro mixed acid solutions is the concentrated sulfuric acid (H2SO4) and hydrogen peroxide (H2O2), volume proportion is
H2SO4：H2O2=1：10.
Preferably, work circle ring center linear diameter ranging from 35~80mm of mechanical seal ring, the annulus that works it is radially-wide
Spend ranging from 3~7mm, a diameter of 100~120 mesh of quartz sand.
Preferably, the distance of nozzle diameter 1mm, nozzle and finished surface be 3cm, sealing ring surface, nozzle it is effective
Sandblasting circular diameter is 7mm.
Before hard alloy, silicon carbide/silicon nitride mechanical seal ring working surface depositing diamond film, need artificial thick
Change grinding matrix surface, to form the potential energy low spot for being easy to diamond nucleation growth, while enhance diamond particles and matrix
The mechanical snap effect of intergranular.
For hard alloy, graphitization is urged since cobalt element existing for binding agent being used as to have in cemented carbide material
Effect, it can lead to be formed a large amount of graphite in the deposition process of diamond thin at the interface of film and matrix and without fixed
Type carbon component significantly reduces the adhesive strength between film and matrix.Before grinding is roughened hard alloy substrate, hard need to be closed
Auri body carries out soda acid two-step method pretreatment, to remove the cobalt element of cemented carbide substrate surfaces and coarse surface.
Cemented carbide substrate surfaces after acid-base pretreatment retain one layer of carbide particle weaker zone damaged, therefore still
Sandblasting roughening need to be carried out to remove skim-coat weaker zone.Silicon carbide/silicon nitride matrix can directly carry out sandblasting roughening without pre-treatment
Pretreatment.
Mechanical seal ring sandblasting roughening treatment carries out on mechanical seal ring mass pretreatment unit, the work of the device
Principle carries out sandblasting roughening, and pass through high-pressure nozzle by nozzle for the high pressure draught containing quartz sand to sealing ring working surface
Automatic rotation and place the operating platform auto-translating of sealing ring and complete processing and self-feeding while 8 sealing rings
Journey, pretreatment efficiency are greatly improved compared with hand lapping treatment effeciency.
Corresponding, the method for hand lapping roughening mechanical seal ring is：Using the soft sand paper for being moistened with diamond grinding fluid
Hand lapping sealing ring working surface.Diamond grinding fluid uses 1~5 μm of diadust, matches as 1g diadusts：
10ml glycerine.
Finally, it is deposited by hot-wire chemical gas-phase deposition method in the pretreated mechanical seal ring working surface of mass
One layer of compact diamond thin between matrix.
Advantageous effect
Compared with the conventional method, the invention has the advantages that：
The present invention completes the mass pretreatment of mechanical seal ring working surface using sealing ring batch pretreatment unit,
Its advantage be obviously improved compared with hand lapping sealing ring pretreatment efficiency, ensure that pretreating process stability,
Surface coarsening rate uniformity and the high-adhesion of diamond thin and matrix.
Description of the drawings
Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other features of the invention,
Objects and advantages will be more obvious：
Fig. 1 mechanical seal structure schematic diagrames
Fig. 2 mechanical seal ring deposition of diamond thin films schematic surfaces
Fig. 3 sealing ring mass pretreatment unit schematic diagrames
Fig. 4 sealing ring mass pretreatment unit front views
Fig. 5 sealing ring mass pretreatment unit detail views
Fig. 6 hard alloy substrates pre-process front surface pattern
Fig. 7 hard alloy substrates batch pretreatment rear surface pattern
Fig. 8 silicon nitride matrix pre-processes front surface pattern
Fig. 9 silicon nitride matrix batch pretreatment rear surface pattern
Parts representated by figure label are respectively：1- springs；2- rotary packing rings；The dynamic and static sealing loop interfaces of 3-；4-
Stationary seal ring；The working surface of 5- mechanical seal rings；6- transmits gear；The big rotation gears of 7-；The small rotation gears of 8-；9- operations are flat
Platform；10- transmission electrical machines；11- electric rotating machines；12- stents；13- mechanical seal rings；14- copper washers；15- high pressure draught conduits；
16- products rest area；17- sandblastings are roughened area；18- takes out product zone；19- location holes；20- high-pressure nozzles；21- mobile racks；
22- seals ring groove.
Specific embodiment
With reference to specific embodiment, the present invention is described in detail.Following embodiment will be helpful to the technology of this field
Personnel further understand the present invention, but the invention is not limited in any way.It should be pointed out that the ordinary skill to this field
For personnel, without departing from the inventive concept of the premise, various modifications and improvements can be made.These belong to the present invention
Protection domain.
Mechanically-sealing apparatus, as shown in Figure 1, wherein stationary seal ring 4, rotary packing ring 2 are fitted closely by 1 tension of spring,
The contact surface 3 of two parts is the key position of sealing, directly determines the performance of entire pump.
The present invention deposits one layer of thin diamond using working surface 5 of the hot filament CVD in mechanical seal ring
Film, as shown in Fig. 2, reduce working surface wear rate to reach, lift-off seal ring working life and reduction pump or a whole set of chemical industry
The purpose of equipment downtime number.
Sealing ring mass pretreatment unit, as shown in Fig. 3, Fig. 4, Fig. 5.Its workflow is：It is placed first in product
8 circumferential rows that mechanical seal ring 13 and copper washer close with its major diameter fit 14 are put on operating platform 9 by area 16 together
In the cylindrical seal ring groove 22 of row；Then, the rotation for being fixed on the transmission electrical machine 10 of 12 lower section of stent drives transmission gear
6, then mobile rack 21 is driven to convert rotational motion into linear motion by gear, operating platform is pushed to be sent into sealing ring and is sprayed
Coarsening area 17.By pinpointing bayonet unit, sealing ring is parked in the position coaxial with 8 small rotation gear 8 by fixed.Together
When, circle that 8 groove centers of circle on operating platform are formed and the circle that 8 pinion rotation centers surround are coaxial, to ensure to rotate
During gear, the nozzle in pinion gear can be roughened annulus rotation around sealing ring always.Then, the rotation being fixed on stent 12
Rotating motor 11 drives 8 small rotation gear to be rotated simultaneously around center by rotating gear 7 greatly, thus drives high pressure gas conductance
Pipe 15 and high-pressure nozzle 20 rotate in a circumferential direction around sealing ring center.8 nozzles with uniformly mixed quartz sand high pressure draught simultaneously
Sandblasting is carried out to mechanical seal ring working surface, is uniformly roughened the entire circumferential working surface of sealing ring.Nozzle is in sealing ring
After the heart rotates a circle, high-pressure nozzle stops sandblasting immediately, and the sealing ring pre-processed, which is admitted to, takes out product zone 18.So week and
It renews, which just can complete the rapid batch sandblasting roughening pretreatment of mechanical seal ring.On small rotation gear, have multiple
The location hole 19 of axially different position pre-processes various sizes of mechanical seal ring with cooperation.
The effect of mass pretreatment mechanical seal ring is as follows：
Hard alloy substrate is before pretreatment, as shown in fig. 6, surfacing, carbide particle is densely arranged, divides in gap
It is furnished with Binder Phase cobalt.The roughness (Ra) that white light interferometer measures in the range of 0.7mm × 0.7mm is 0.25 μm.By batch
After changing pretreatment, as shown in fig. 7, cemented carbide substrate surfaces are uniformly roughened, formd between carbide particle particle
Hole, these holes are since carbide particle is etched and cobalt element is caused by after acid solution oxidation disappearance.After pretreatment
The roughness (Ra) of matrix surface is increased to 0.98um.
Silicon carbide substrate before pretreatment, as shown in figure 8, any surface finish, granularity unobvious.It is surveyed using white light interferometer
It is 0.19 μm to have measured the roughness (Ra) in the range of 0.7mm × 0.7mm.Matrix surface is obtained after batch pre-processes, such as Fig. 9 institutes
Show, since certain particles are occurred by erosion uneven, its surface roughness (Ra) rises to 0.78 μm at this time.
Two kinds of basis material mass pre-process front and rear pattern and roughness contrast verification mass preprocess method
It is roughened the validity of matrix surface.
The substrate surface topographical of above two roughening suitably forms the potential energy low spot of diamond nucleation, convenient for diamond particles
Strong mechanical snap is formed between matrix.
Embodiment 1
The diamond coatings mechanical seal ring of the present embodiment is applied in the delivery pump of PTA Equipment.The device
In containing a large amount of poisonous and harmful, inflammable and explosive and strong corrosive industrial chemicals, therefore the seal to device and mechanical seal
Resistance to chemical corrosion requirement it is very high.
The mechanical seal ring base of the application is YG6 hard alloy, and appearance and size isWorking face is ring
Shape, internal diameter 34mm, outer diameter 40mm.
Conventional rigid alloy mechanical sealing ring working surface depositing diamond film the specific steps are：It first will sealing
Ring, which is immersed in Murakami solution, is ultrasonically treated 30min, is divided again using Caro solution treatments hard alloy substrate 1 after cleaning-drying
Clock is then roughened matrix table to remove the cobalt element of matrix skin using the method that hand lapping and automatic batchization pre-process
Face.When mass pre-processes, high pressure draught pressure is 0.05Mpa, and quartz sand size is 120 mesh, and high-pressure nozzle bore 1mm sprays
Head is with being 3cm by the distance on erosion surface.Finally sealing ring is cleaned by ultrasonic using acetone, removes matrix surface impurity.
During depositing diamond film, heated filament is parallel to be placed in sealing ring top, sealing ring annular distribution, sealing ring upper surface with
Heated filament spacing is 11mm.In two stages in cemented carbide substrate surfaces depositing diamond film.Micron diamond is deposited first
The time of film is 9 hours, heater power 13kw, air pressure 27Torr, carbon source concentration 1%, substrate temperature for 800~
900 DEG C, bias current 5.0A.Then deposition nano-diamond film, heater power 10kw, reaction gas pressure
22Torr, carbon source concentration 4%, substrate temperature are 800~900 DEG C, bias current 3.0A, sedimentation time 3 hours.It is using
Before, diamond coating for hard alloy mechanical seal ring need to pass through the flat polish of 5 hours.
Certain company subscribes 20 the type sealing rings in total, hand lapping 4, process used time 30min；Mass is pre-
16 are handled, process used time 10min.The efficiency of mass pretreatment is 12 times of hand lapping.It is meanwhile pre- using mass
Pretreatment workshop worker is kept to 2 people from 4 people after processing method, and company's employment cost substantially reduces.
Employ multiple mechanical pumps in the PTA Equipment of the said firm, the seal of mechanical seal directly concerning
The safety in production of package unit.For the diamond coatings mechanical seal ring of mass pretreatment using 3, the service life is respectively 8 months,
6 months and 7 months；Hand lapping diamond coatings mechanical seal ring uses 3, and the service life is respectively 1 month, 5 months and 9
Month.It can be seen that although mass preprocess method obtains diamond coatings mechanical seal ring MaLS not as good as hand lapping
Pretreatment, but its average length of working life is longer, technology stability higher.
Embodiment 2
Mechanical seal ring in the present embodiment directly applies to standard sealing ring performance test in 100 hours, seals ring base
Material is silicon carbide, and appearance and size isWorking face is annular, internal diameter 40mm, outer diameter 45mm.
4 sealing rings have been handled using mass method for pretreating and hand grinding method respectively.Mass method for pretreating takes
5min, hand grinding method take 30min.The working efficiency of mass method for pretreating is 6 times of hand grinding method.Mass is located in advance
During reason, high pressure draught pressure be 0.1Mpa, quartz sand size be 120 mesh, high-pressure nozzle bore 1mm, nozzle with by erosion surface
Distance be 3cm.
Then, sealing ring is cleaned by ultrasonic, then locating in advance simultaneously by parallel heated filament arrangement mode using pure water and acetone
8 mechanical seal ring working surface depositing diamond films after reason.Finally, working surface is thrown using flat polisher
Light.
It is prepared using 100 hours sealing ring performance test Experimental comparison hand grinding methods of standard and mass method for pretreating
The comprehensive performance of diamond coatings mechanical seal ring.The thickness of diamond thin is 30 microns.Medium is water, temperature 120~
150 DEG C, pressure 0.9Mpa, 6000 revs/min of rotating speed.After 100 hours modular mechanical seal test experiments, 4 mass
Diamond coatings sealing ring prepared by method for pretreating is showed no noticeable wear, and film is complete；And prepared by a hand grinding method
There is part after test in 50 hours and falls film in diamond coatings mechanical seal ring, and test partly falls film after 75 hours,
Remaining two 100 hours test rear film is complete, no noticeable wear.Illustrate that mass method for pretreating can reduce compared with hand grinding method
The otherness of different sealing ring performance ensures the stability of product quality.
Embodiment 3
The diamond coatings mechanical seal ring of the present embodiment is applied on high-pressure pump, and pumped (conveying) medium is sticky cement slurry,
Sealing ring basic material is silicon nitride, and appearance and size isWorking face is annular, internal diameter 30mm, outer diameter 35mm.
The specific preparation method of the sealing ring is：First using mass preprocess method grinding roughening sealing ring worksheet
Face.Mass pre-process when, high pressure draught pressure be 0.1Mpa, quartz sand size be 120 mesh, high-pressure nozzle bore 1mm, nozzle
With being 3cm by the distance on erosion surface.Then workpiece is cleaned using pure water and acetone.Utilize parallel heated filament arrangement side
Formula seals ring surface depositing diamond film at 12 simultaneously, and heated filament is 10mm in the distance of deposition surface.Micron diamond is thin
The heated filament general power of film depositional phase is 12kw, and air pressure is that 26Torr sedimentation times are 9 hours；Nano-diamond film deposits rank
The heater power of section is 10kw, air pressure 20Torr, sedimentation time 2.5 hours.Finally, using the smooth diamond of flat polisher
Coating sealing ring working surface, polishing time are 6 hours.
Certain company disposably buys this diamond-like coating mechanical seal ring 4 (spare containing 1), and 3 currently in use
Mechanical seal ring continuously works normally 14 months, does not occur leakage phenomenon so far.And original non-coating silicon nitride machinery is close
The average life span of seal ring is only 3 months.
Embodiment 4
The diamond coatings mechanical seal ring of the present embodiment is applied in higfh-tension ceramics powder transmission device.Seal ring material is
Silicon carbide, appearance and size areWorking face is annular, internal diameter 50mm, outer diameter 55mm.The diamond coatings are carbonized
The specific preparation flow of silicon mechanical seal ring is：Sealing ring working surface is pre-processed using mass preprocess method first.Batch
During quantization pretreatment, high pressure draught pressure is 0.1Mpa, and quartz sand size is 120 mesh, high-pressure nozzle bore 1mm, nozzle and quilt
The distance on erosion surface is 3cm.Sealing ring is finally cleaned by ultrasonic using pure water and acetone.Then, it is parallel using 10 heated filaments
Arrangement mode is simultaneously in 17 silicon carbide mechanical sealing ring surface depositing diamond films, wherein micron diamond thin film deposition
Between for 8.5 hours, nano-diamond film sedimentation time is 2.5 hours.Finally, using the smooth diamond thin of flat polisher
Surface, flat polish time are 5 hours.
Certain company has purchased 2 diamond coatings mechanical seal rings to substitute original non-coating mechanical seal ring.Using
Diamond coatings mechanical seal ring prepared by this method can significantly reduce the abrasion of sealing ring working surface in use.Not
, there is severe leakage phenomenon in working surface serious wear after coated silicon carbide mechanical seal ring uses 3 months；And diamond coatings
For sealing ring using not revealed yet after 1 year, working life is 4 times or more of non-coating sealing ring.Meanwhile diamond coatings
Contact surface friction coefficient is low during mechanical seal ring use, energy consumption is small, and temperature, which rises, is substantially less than non-coating mechanical seal ring.
Embodiment 5
The diamond coatings mechanical seal ring of the present embodiment is applied on olefines chemical medium pump.Sealing ring material is nitrogen
SiClx, appearance and size areWorking face is annular, internal diameter 40mm, outer diameter 44mm.Diamond-like coating machinery
The specific make step of sealing ring is：Sealing ring working surface is pre-processed using mass preprocess method first.Mass is pre-
During processing, high pressure draught pressure be 0.1Mpa, quartz sand size be 120 mesh, high-pressure nozzle bore 1mm, nozzle with by erosion table
The distance in face is 3cm.Finally it is cleaned by ultrasonic sealing ring with pure water and acetone again.Then, 11 heated filament parallel arrangement sides are utilized
Formula is simultaneously in 18 silicon nitride ceramics mechanical sealing ring surface deposition microns and nano-diamond film.Finally, it is thrown using plane
The smooth diamond film surface of ray machine, flat polish time are 5 hours.
Before mass preprocess method, the silicon nitride mechanical seal ring of one outer diameter 44mm of worker's hand lapping needs to consume
When 8 minutes；And mass preprocess method is used to handle a sealing ring and is averagely taken less than 1 minute, pretreatment efficiency is significantly
It improves.Meanwhile 2 people are kept to from 4 people using pretreatment workshop worker after mass preprocess method, greatly reduce the use of company
People's cost.
Using the work of diamond coatings mechanical seal ring prepared by this method when being used on olefines chemical medium pump
Service life is 6 times or more of non-coating ceramic-seal ring.Meanwhile sealing ring amount of leakage is minimum during use, the more non-coatings of Wen Sheng
Mechanical seal ring is about 15 DEG C low.
Claims (4)
1. a kind of mass preprocess method of diamond coatings mechanical seal ring, it is characterized in that, with the hard of acid-base pretreatment
Alloy mechanical sealing ring or untreated silicon carbide/silicon nitride ceramics mechanical seal ring are matrix, pass through the pre- place of sealing ring batch
Device is managed, erosion roughening is carried out to above-mentioned sealing ring working surface using quartz sand high pressure draught, completes the pretreatment of sealing ring；
The sealing ring batch pretreatment unit includes：Operating platform of one bottom with mobile rack is located under stent
Side, transmission gear are connected with a transmission electrical machine and are engaged with mobile rack；Cradle top drives big rotation gear equipped with one
Electric rotating machine, the big gear that rotates are engaged with 8 small rotation gear, and determining for axially different position is equipped on each small rotation gear
Position hole, the high pressure draught conduit with nozzle are fixed in location hole, and high pressure draught conduit is vertical with operating platform；Operating platform
The cylindrical seal ring groove of 8 circumferential arrays is equipped with, when sealing ring groove is moved to sandblasting roughening area with mobile rack,
Seal the center of circle of ring groove and small rotation gear central coaxial；
The pre-treatment step of sealing ring is：By the hard alloy mechanical sealing ring of acid-base pretreatment or untreated silicon carbide/nitrogen
SiClx ceramic mechanical seal rings and be placed on together with the close copper washer of its major diameter fit sealing ring groove in, in transmission electrical machine
It drives lower into sandblasting roughening area；Electric rotating machine is opened, drives large and small rotation gear, nozzle rotates in a circumferential direction around sealing ring center
One week, the high pressure draught containing quartz sand is made to complete the sandblasting roughening treatment to sealing ring working surface by nozzle；It is processed
Sealing ring by pure water and acetone ultrasonic cleaning removal matrix surface impurity；
Wherein, the rotational velocity of rotation gear greatly is 0.32~0.4r/s, and corresponding pinion gear rotational velocity is 0.8~1r/s,
The pressure of high pressure draught containing quartz sand is 0.05~0.1MPa.
2. the mass preprocess method of diamond coatings mechanical seal ring as described in claim 1, it is characterized in that, it is described
Acid-base pretreatment is：First, the hard alloy substrate of sealing ring is immersed in Murakami solution and carries out 30 minutes ultrasounds clearly
It washes；Then, hard alloy substrate is immersed in Caro mixed acid solutions and carries out the etching of 1~4 minute to remove its surface layer
Cobalt element；
Wherein, the hard alloy is tungsten-cobalt series hard alloy,
The ingredient of the Murakami solution be potassium hydroxide, the potassium ferricyanide and water, quality proportioning KOH：K3(Fe
(CN)6)：H2O=1：1：10,
The ingredient of the Caro mixed acid solutions be the concentrated sulfuric acid and hydrogen peroxide, volume proportion H2SO4：H2O2=1：10.
3. the mass preprocess method of diamond coatings mechanical seal ring as described in claim 1, it is characterized in that, it is described
Work circle ring center linear diameter ranging from 35~80mm of mechanical seal ring, the radial width ranging from 3~7mm for the annulus that works,
A diameter of 100~120 mesh of quartz sand.
4. the mass preprocess method of diamond coatings mechanical seal ring as described in claim 1, it is characterized in that, the spray
The nozzle diameter of head is 1mm, and the distance of nozzle and finished surface is 3cm, in sealing ring surface, effective sandblasting circular diameter of nozzle
For 7mm.
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| CN101941184A (en) * | 2010-08-20 | 2011-01-12 | 江苏凯特汽车部件有限公司 | Intelligent sanding device of automotive aluminum alloy hub low-pressure die and using method |
| CN202225082U (en) * | 2011-08-09 | 2012-05-23 | 华闽南配集团股份有限公司 | Bar type sand blasting device for inner circle and excircle of piston ring |
| CN102729162A (en) * | 2012-04-19 | 2012-10-17 | 浙江工业大学 | Device for manufacturing full-automatic soft fixed abrasive particle air pressure grinding wheel |
| CN202985355U (en) * | 2012-12-20 | 2013-06-12 | 江苏凯特汽车部件有限公司 | Sandblast equipment for aluminum alloy wheel hub mold |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101941184A (en) * | 2010-08-20 | 2011-01-12 | 江苏凯特汽车部件有限公司 | Intelligent sanding device of automotive aluminum alloy hub low-pressure die and using method |
| CN202225082U (en) * | 2011-08-09 | 2012-05-23 | 华闽南配集团股份有限公司 | Bar type sand blasting device for inner circle and excircle of piston ring |
| CN102729162A (en) * | 2012-04-19 | 2012-10-17 | 浙江工业大学 | Device for manufacturing full-automatic soft fixed abrasive particle air pressure grinding wheel |
| CN202985355U (en) * | 2012-12-20 | 2013-06-12 | 江苏凯特汽车部件有限公司 | Sandblast equipment for aluminum alloy wheel hub mold |
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