CN105676597A - Reticle stage balance block combined centroid anti-drifting movement control method - Google Patents
Reticle stage balance block combined centroid anti-drifting movement control method Download PDFInfo
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- CN105676597A CN105676597A CN201610230822.8A CN201610230822A CN105676597A CN 105676597 A CN105676597 A CN 105676597A CN 201610230822 A CN201610230822 A CN 201610230822A CN 105676597 A CN105676597 A CN 105676597A
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70766—Reaction force control means, e.g. countermass
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Abstract
The invention relates to a reticle stage balance block combined centroid anti-drifting movement control method. The method comprises the steps that a relative displacement signal of a balance block relative to the y direction of a base station and a relative displacement signal of a coarse moving station relative to the y direction of the balance block are obtained respectively by adopting absolute grating rulers; a balance block and coarse moving station combined centroid displacement signal is obtained by calculating the displacement signals and serves as a feedback signal, nonlinear variable gain anti-drifting control is conducted on the balance block, and therefore the combined centroid position remains unchanged. According to the reticle stage balance block combined centroid anti-drifting movement control method, the influence of reactive force of a coarse moving station linear motor on the base station can be effectively eliminated, the combined centroid anti-drifting movement control method not only can ensure the balance block not to produce drifting exceeding the limit range in the coarse moving station linear motor moving process, but also can prevent larger reactive force from being transferred to the base station.
Description
Technical field
The present invention relates to a kind of motion accuracy control method of mask aligner mask platform, particularly relate to mask platform counterbalance weight and close the anti-drift motion control method of barycenter, belong to semi-conductor equipment technology field.
Background technology
Mask aligner mask platform to be realized nano level motion control accuracy, it may also be useful to the nano level that the measuring unit (multiaxis laser interferometer) being arranged on Ji Tai carries out multiple degree of freedom is measured. Mask aligner mask platform scanning process can be divided into acceleration, scanning, deceleration three phases, at acceleration and braking section, thick dynamic platform is corresponding when acceleration or retarded motion produces a bigger reactive force in counterbalance weight and Ji Tai, thus cause the vibration of counterbalance weight and Ji Tai, by other abutment portion parts, vibration passing is to the measuring unit of system, and then produces measuring error, worsens control performance.
In order to weaken the vibration impact that thick dynamic platform motion reactive force brings, the reactive force slightly moving platform motion is avoided to act directly on Ji Tai, it is connected by counterbalance weight between Ji Tai with thick dynamic platform, according to momentum conservation law, utilize the momentum that counterbalance weight system offsets produces when slightly dynamic platform moves. Specifically, counterbalance weight lower surface is connected with Ji Tai by the first air-bearing, and counterbalance weight upper surface is connected with thick dynamic platform mover by the 2nd air-bearing. Thick dynamic platform moves along the y-axis direction, and the reactive force of generation can finally be applied on counterbalance weight, makes counterbalance weight produce the motion of opposite direction.
Summary of the invention
It is an object of the invention to provide a kind of mask platform counterbalance weight and close the anti-drift motion control method of barycenter, realize adjusting counterbalance weight y in real time to degree of freedom drift value, prevent excessive drift, make the drift of counterbalance weight the normal operation of micropositioner, thick dynamic platform can not be produced interference simultaneously, and avoid making Ji Tai produce bigger vibration, affect the measurement of laser interferometer.
The technical scheme of the present invention is as follows:
One mask platform counterbalance weight closes the anti-drift motion control method of barycenter, and described mask platform comprises a Ji Tai, a counterbalance weight that degree of freedom is moved in the y-direction, a micropositioner and is arranged symmetrically in the thick dynamic platform of micropositioner both sides, measuring unit, anti-drift driving unit and control unit; Described counterbalance weight lower surface is connected with Ji Tai by the first air-bearing, and counterbalance weight upper surface is connected with thick dynamic platform mover by the 2nd air-bearing; Thick dynamic platform and micropositioner adopt non-contact type slightly essence rhythmo structure connection; Described anti-drift drives unit to comprise: along y to the first anti-drift straight line motor arranged and the 2nd anti-drift straight line motor;Described control unit contains the industrial computer of sequence of control, grating counting card and D/A card and driving mechanism, it is characterised in that the method comprises the steps:
1) start at servo period, it is zero that setting counterbalance weight and thick dynamic platform close barycenter displacement, the first counterbalance weight absolute grating ruler and the 2nd counterbalance weight absolute grating ruler is arranged respectively in counterbalance weight both sides, adopt grating counting card to gather the first counterbalance weight absolute grating ruler and the signal of the 2nd counterbalance weight absolute grating ruler respectively, count and be on average balanced the y of block relative to Ji Tai to relative displacement signal yb;
2) at the counterbalance weight disposed inboard first moved along thick dynamic platform slightly dynamic platform absolute grating ruler and the 2nd slightly dynamic platform absolute grating ruler; Adopt grating counting card to gather the signal of the first slightly dynamic platform absolute grating ruler and the 2nd slightly dynamic platform absolute grating ruler respectively, count and on average obtain slightly moving the y of platform relative to counterbalance weight to relative displacement signal yr;
3) by displacement signal ybAnd yrCalculate counterbalance weight and close barycenter displacement y with thick dynamic platformcog, calculation expression is:
Wherein ycogFor closing barycenter displacement, ybFor counterbalance weight barycenter displacement, yc=yb+yrFor slightly dynamic platform barycenter displacement, mcFor slightly moving platform mover quality, mbFor slightly moving the quality sum of platform linear motor stator electric, counterbalance weight and guide rail;
With (mb+mc)ycogAs the signal of feedback, reverse feedback obtains closing the offset deviation e of barycentercog, expression formula is:
ecog=0-(mb+mc)ycog
4) the offset deviation e of the involutory barycenter of Gain-scheduling control algorithm based on non-linear rigidity is adoptedcogProcess, wherein become gain term φ (ecog) expression formula is:
A in formulapFor biased coefficient, bpFor scale-up factor, cpFor rising velocity coefficient, ecogFor closing the offset deviation of barycenter;
5) after the output signal becoming gain term being processed by counterbalance weight Linear Control device, obtain the steering order of anti-drift motor, distributing decoupling zero by electric current, this steering order inputs to driving mechanism after sticking into line number mode convertion by D/A, and driving mechanism proportional ground outward current drives anti-drift motor;
6) at next servo period, 1 is repeated) to 5) step, and then driven equilibrium block moves to desired location.
Counterbalance weight Linear Control device of the present invention adopts PID controller, advanced hysteresis controller or robust controller.
The present invention has the following advantages and the technique effect of giving prominence to property: mask platform counterbalance weight provided by the invention can effectively eliminate thick dynamic platform straight line motor reactive force to the impact of Ji Tai based on the motion control method that counterbalance weight and thick dynamic platform close barycenter, the conjunction barycenter anti-drift motion control method proposed can ensure that counterbalance weight does not produce to exceed the drift of limit range in thick dynamic platform straight line motor moving process, can avoid again being passed on Ji Tai bigger reactive force.
Accompanying drawing explanation
Fig. 1 is mask platform structural principle schematic diagram (axonometric drawing) of the present invention.
Fig. 2 is mask platform structure vertical view of the present invention.
Fig. 3 is balance block structure principle schematic (axonometric drawing) of the present invention.
Fig. 4 is balance block structure upward view of the present invention.
Fig. 5 is that counterbalance weight of the present invention closes barycenter control theory structure block diagram.
Fig. 6 is that counterbalance weight of the present invention closes barycenter control block diagram.
Fig. 7 is that counterbalance weight of the present invention closes barycenter control method program flow chart.
In figure: 1-Ji Tai; 2-counterbalance weight; 3-is dynamic platform slightly; 4-micropositioner; 5a-first counterbalance weight absolute grating ruler; 5b-the 2nd counterbalance weight absolute grating ruler; 6a-first is dynamic platform absolute grating ruler slightly; 6b-the 2nd is dynamic platform absolute grating ruler slightly; 7-the 2nd air-bearing;8-first air-bearing; The anti-drift motor of 9a-first; The anti-drift motor of 9b-the 2nd; The change gain term of φ ()-non-linear rigidity.
Embodiment
Below in conjunction with accompanying drawing, the principle of the present invention, structure and working process are illustrated the present invention further.
Fig. 1 is mask platform structural principle schematic diagram (axonometric drawing) of the present invention, and Fig. 2 is mask platform structural principle vertical view. This mask platform comprises a base platform 1, the counterbalance weight 2 that degree of freedom is moved in the y-direction, thick dynamic platform 3 and a micropositioner 4, and measuring unit, anti-drift driving unit and control unit.
The lower surface of counterbalance weight 2 is connected with base platform 1 by the first air-bearing 8, and counterbalance weight upper surface is connected with thick dynamic platform mover by the 2nd air-bearing 7; Thick dynamic platform 3 and micropositioner 4 adopt non-contact type slightly essence rhythmo structure connection; Measuring unit comprises: the first counterbalance weight absolute grating 5a and the 2nd counterbalance weight absolute grating 5b being positioned at counterbalance weight 2 both sides, for measure counterbalance weight 2 along y to the displacement relative to base platform 1; First thick dynamic platform absolute grating ruler 6a, the 2nd thick dynamic platform absolute grating ruler 6b are positioned at and slightly move platform two side rails place, for measuring the thick platform 3 that moves along y to the displacement relative to counterbalance weight 2.
Fig. 3 is balance block structure principle schematic (axonometric drawing), and Fig. 4 is balance block structure upward view. Anti-drift drive unit comprise: along y to arrange the first anti-drift straight line motor 9a, the 2nd anti-drift straight line motor 9b, for driven equilibrium block along y to anti-drift motion. The first counterbalance weight absolute grating 5a, the 2nd counterbalance weight absolute grating 5b are installed in counterbalance weight both sides, and corresponding read head is arranged on Ji Tai. On counterbalance weight, thick dynamic platform motion guide rail place installs first and slightly moves platform absolute grating ruler 6a, the 2nd slightly dynamic platform absolute grating ruler 6b, and corresponding grating ruler reading head is arranged on thick moving on platform.
Act directly on base platform 1 for avoiding slightly moving platform 3 straight line motor reactive force, mask platform adds counterbalance weight 2, the lower surface of counterbalance weight 2 is connected with base platform 1 by the first air-bearing 8, counterbalance weight 2 upper surface is connected with thick dynamic platform mover by the 2nd air-bearing 7, make counterbalance weight and Ji Tai, and without friction free movement between counterbalance weight and thick dynamic platform. The mass ratio of mask platform counterbalance weight of the present invention and thick dynamic platform is 20:1, when thick dynamic platform straight line motor produces thrust, its reactive force can make counterbalance weight move in the opposite direction proportionally, ideally, when thick dynamic platform straight line motor to-and-fro movement returns to starting position, counterbalance weight also can return to corresponding starting position, but due to factors such as processing installation error, extraneous disturbances, counterbalance weight can produce position excursion in moving process. For controlling the position of counterbalance weight, around counterbalance weight, arrange that ammoniacum is firmly spacing so that it is the far dynamic scope y of the limit not exceeding counterbalance weight is to ± 30mm. Anti-drift drive unit, comprise along y to the first anti-drift straight line motor 9a, the 2nd anti-drift straight line motor 9b. Anti-drift drives unit to be guaranteed that excessive drift does not occur counterbalance weight on the one hand, the precise flange of thick dynamic platform, micropositioner can not be produced interference on the other hand.
Fig. 5 is that counterbalance weight closes barycenter control theory structure block diagram. control unit comprises the industrial computer containing sequence of control, grating counting card, D/A card and driving mechanism, control unit gathers the first counterbalance weight absolute grating 5a respectively by grating counting card, 2nd counterbalance weight absolute grating 5b and first is dynamic platform absolute grating ruler 6a slightly, 2nd slightly moves platform absolute grating ruler 6b signal, first counterbalance weight absolute grating 5a, 2nd counterbalance weight absolute grating 5b measures the displacement of counterbalance weight 3 relative to base platform 1, both count and are on average balanced the displacement amount of block barycenter, first slightly moves platform absolute grating ruler 6a, 2nd slightly moves platform absolute grating ruler 6b measures the displacement of thick dynamic platform 3 relative to counterbalance weight 2, the displacement amount that both count and are on average balanced block barycenter relative to thick dynamic platform barycenter, the conjunction barycenter displacement amount that control unit calculates counterbalance weight and thick dynamic platform using above-mentioned signal is as feedback signal, unit is driven to control anti-drift, sequence of control runs in industrial computer, after receiving Displacement Feedback signal, calculate and close barycenter displacement amount, offset deviation is produced after reverse feedback, offset deviation produces steering order after treatment, then steering order exports driving mechanism to by D/A card, then anti-drift straight line motor is driven, counterbalance weight is made to reach specified location.
Fig. 6 is that counterbalance weight of the present invention closes barycenter control block diagram. Counterbalance weight closes barycenter control block diagram and describes the detailed process that counterbalance weight closes barycenter negative feedback control:
1) base platform system of coordinates is as absolute coordinate system, and the first counterbalance weight absolute grating 5a, the 2nd counterbalance weight absolute grating 5b measure the displacement of counterbalance weight 3 relative to Ji Tai, counts after on average and is balanced block barycenter displacement yb. First slightly moves platform absolute grating ruler 6a, the 2nd slightly dynamic platform absolute grating ruler 6b observed value, counts after on average and obtains slightly moving platform relative to counterbalance weight barycenter relative shift yr. Thick dynamic platform barycenter is relative to the displacement y of Ji Taic, calculation expression is:
yc=yb+yr
2) calculating counterbalance weight and close barycenter displacement with thick dynamic platform, calculation expression is:
Wherein ycogFor closing barycenter displacement, ycFor slightly dynamic platform barycenter displacement, ybFor counterbalance weight barycenter displacement, mcFor slightly moving platform mover quality, mbFor slightly moving the quality sum of platform linear motor stator electric, counterbalance weight and guide rail.
3) to close barycenter ycogAs feedback signal, realizing in process in working control, in order to the convenience realized, the signal of actual feedback is: (mb+mc)ycog. Reverse feedback obtains closing the offset deviation e of barycentercog, expression formula is:
ecog=0-(mb+mc)ycog
4) adopt the Gain-scheduling control algorithm based on non-linear rigidity to offset deviation ecogProcess, wherein become gain term φ (ecog) expression formula is:
φ(ecog)=ap+bp[1-sech(cp·ecog)]
Wherein
Wherein apFor biased coefficient, bpFor scale-up factor, cpFor rising velocity coefficient, ecogFor closing the offset deviation of barycenter;
Consider the output accuracy of Controlling System and calculate real-time, it is possible to do and simplify: with the natural logarithm e in 2 replacements sech (); By 2^ (cp·ecog) carry out Taylor series expansion, it is simplified to multi-form form and obtains:
5) by the output signal of change gain term by counterbalance weight Linear Control device CcS () processes after, obtaining the steering order of anti-drift motor, distribute decoupling zero by electric current, this steering order inputs to driving mechanism after sticking into line number mode convertion by D/A, driving mechanism proportional ground outward current drives anti-drift motor, and then driven equilibrium block moves to desired location.
Counterbalance weight Linear Control device CcS () adopts PID controller, advanced hysteresis controller or robust controller.
Fig. 7 is that counterbalance weight of the present invention closes barycenter control method program flow chart, and the method comprises the steps:
1) starting at servo period, it is zero that setting counterbalance weight and thick dynamic platform close barycenter displacement.
2) grating counting card is adopted to gather the signal of the first counterbalance weight absolute grating 5a, the 2nd counterbalance weight absolute grating 5b respectively, the displacement signal y counting and being on average balanced block barycenter relative to Ji Taib;
3) adopt grating counting to block and gather the signal that the first thick dynamic platform absolute grating ruler 6a, the 2nd slightly moves platform absolute grating ruler 6b respectively, count and on average obtain slightly moving the relative displacement signal y of platform relative to counterbalance weightr;
4) thick dynamic platform and counterbalance weight conjunction barycenter displacement y is calculated by two paths of signalscog;
5) as feedback signal, obtain closing the offset deviation e of barycentercog;
6) the change gain term φ (e based on non-linear rigidity is adoptedcog) to offset deviation ecogProcess.
7) by the output signal of change gain term by counterbalance weight Linear Control device CcS () obtains the steering order of anti-drift motor after processing.
8) distributing decoupling zero by electric current, this steering order inputs to driving mechanism after sticking into line number mode convertion by D/A, and driving mechanism proportional ground outward current drives anti-drift motor, and then driven equilibrium block moves to desired location.
9) at next servo period, 1 is repeated) to 8) step,
The Linear Control device of counterbalance weight adopts PID controller, advanced hysteresis controller or robust controller, becomes the non-linear anti-drift control realized together with gain link based on closing barycenter displacement with non-linear rigidity.
Claims (2)
1. mask platform counterbalance weight closes the anti-drift motion control method of barycenter, and described mask platform comprises a Ji Tai (1), a counterbalance weight (2) that degree of freedom is moved in the y-direction, a micropositioner (3) and is arranged symmetrically in the thick dynamic platform (4) of micropositioner both sides, measuring unit, anti-drift driving unit and control unit; Described counterbalance weight (2) lower surface is connected with Ji Tai (1) by the first air-bearing (8), and counterbalance weight (2) upper surface is connected with thick dynamic platform mover by the 2nd air-bearing (7); Thick dynamic platform and micropositioner adopt non-contact type slightly essence rhythmo structure connection; Described anti-drift drives unit to comprise: along y to the first anti-drift straight line motor (9a) arranged and the 2nd anti-drift straight line motor (9b); Described control unit contains the industrial computer of sequence of control, grating counting card and D/A card and driving mechanism, it is characterised in that the method comprises the steps:
1) start at servo period, it is zero that setting counterbalance weight and thick dynamic platform close barycenter displacement, the first counterbalance weight absolute grating ruler (5a) and the 2nd counterbalance weight absolute grating ruler (5b) is arranged respectively in counterbalance weight both sides, adopt grating counting card to gather the first counterbalance weight absolute grating ruler (5a) and the signal of the 2nd counterbalance weight absolute grating ruler (5b) respectively, count and be on average balanced the y of block relative to Ji Tai to relative displacement signal yb;
2) at the counterbalance weight disposed inboard first moved along thick dynamic platform slightly dynamic platform absolute grating ruler (6a) and the 2nd slightly dynamic platform absolute grating ruler (6b); Adopt grating counting card gather respectively first slightly dynamic platform absolute grating ruler (6a) and the 2nd slightly move the signal of platform absolute grating ruler (6b), count and on average obtain slightly moving the y of platform relative to counterbalance weight to relative displacement signal yr;
3) by displacement signal ybAnd yrCalculate counterbalance weight and close barycenter displacement y with thick dynamic platformcog, calculation expression is:
Wherein ycogFor closing barycenter displacement, ybFor counterbalance weight barycenter displacement, yc=yb+yrFor slightly dynamic platform barycenter displacement, mcFor slightly moving platform mover quality, mbFor slightly moving the quality sum of platform linear motor stator electric, counterbalance weight and guide rail;
With (mb+mc)ycogAs the signal of feedback, reverse feedback obtains closing the offset deviation e of barycentercog, expression formula is:
ecog=0-(mb+mc)ycog
4) the offset deviation e of the involutory barycenter of Gain-scheduling control algorithm based on non-linear rigidity is adoptedcogProcess, wherein become gain term φ (ecog) expression formula is:
A in formulapFor biased coefficient, bpFor scale-up factor, cpFor rising velocity coefficient, ecogFor closing the offset deviation of barycenter;
5) after the output signal becoming gain term being processed by counterbalance weight Linear Control device, obtain the steering order of anti-drift motor, distributing decoupling zero by electric current, this steering order inputs to driving mechanism after sticking into line number mode convertion by D/A, and driving mechanism proportional ground outward current drives anti-drift motor;
6) at next servo period, 1 is repeated) to 5) step, and then driven equilibrium block moves to desired location.
2. a kind of mask platform counterbalance weight as claimed in claim 1 closes the anti-drift motion control method of barycenter, it is characterised in that: counterbalance weight Linear Control device adopts PID controller, advanced hysteresis controller or robust controller.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114253085A (en) * | 2020-09-23 | 2022-03-29 | 株式会社斯库林集团 | Drawing device |
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| US20060019177A1 (en) * | 2004-06-25 | 2006-01-26 | Hoya Corporation | Lithographic mask and manufacturing method thereof |
| JP2007258272A (en) * | 2006-03-20 | 2007-10-04 | Kobe Steel Ltd | Ion beam processing method and apparatus |
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| CN102722086A (en) * | 2011-06-28 | 2012-10-10 | 清华大学 | Non-contact single-degree-of-freedom positioning device and synchronous movement control method thereof |
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