CN105673972A - Vacuum pipe - Google Patents

Vacuum pipe Download PDF

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Publication number
CN105673972A
CN105673972A CN201610153969.1A CN201610153969A CN105673972A CN 105673972 A CN105673972 A CN 105673972A CN 201610153969 A CN201610153969 A CN 201610153969A CN 105673972 A CN105673972 A CN 105673972A
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CN
China
Prior art keywords
straight tube
tube
corrugated
piece
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201610153969.1A
Other languages
Chinese (zh)
Other versions
CN105673972B (en
Inventor
何超峰
丁先庚
王辉
刘彦武
郁欢强
董相文
孙兴中
戴建彪
张海峰
卞荣耀
李阳
陈耀锋
张俊峰
武义锋
章学华
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Harbin Institute of Technology
Vacree Technologies Co Ltd
Original Assignee
Harbin Institute of Technology
Vacree Technologies Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harbin Institute of Technology, Vacree Technologies Co Ltd filed Critical Harbin Institute of Technology
Priority to CN201610153969.1A priority Critical patent/CN105673972B/en
Publication of CN105673972A publication Critical patent/CN105673972A/en
Application granted granted Critical
Publication of CN105673972B publication Critical patent/CN105673972B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L39/00Joints or fittings for double-walled or multi-channel pipes or pipe assemblies
    • F16L39/04Joints or fittings for double-walled or multi-channel pipes or pipe assemblies allowing adjustment or movement
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L27/00Adjustable joints, Joints allowing movement
    • F16L27/10Adjustable joints, Joints allowing movement comprising a flexible connection only, e.g. for damping vibrations
    • F16L27/1012Flanged joints
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L27/00Adjustable joints, Joints allowing movement
    • F16L27/10Adjustable joints, Joints allowing movement comprising a flexible connection only, e.g. for damping vibrations
    • F16L27/107Adjustable joints, Joints allowing movement comprising a flexible connection only, e.g. for damping vibrations the ends of the pipe being interconnected by a flexible sleeve
    • F16L27/11Adjustable joints, Joints allowing movement comprising a flexible connection only, e.g. for damping vibrations the ends of the pipe being interconnected by a flexible sleeve the sleeve having the form of a bellows with multiple corrugations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Diaphragms And Bellows (AREA)
  • Rigid Pipes And Flexible Pipes (AREA)

Abstract

The invention relates to the technical field of vacuum equipment, in particular to a vacuum pipe. The vacuum pipe comprises a first pipe body, a second pipe body and more than two corrugated pipes, wherein gas is distributed into the more than two corrugated pipes by the aid of the first pipe body, gas flowing through the corrugated pipes is converged together by the aid of the second pipe body, the first pipe body and the second pipe body are made of rigid materials, a gas inlet and a gas outlet of the vacuum pipe are arranged concentrically, the pipe length direction of the corrugated pipes is perpendicular to the axis direction of the gas inlet, and the more than two corrugated pipes are symmetrical about the axis. The corrugated pipes are symmetrical about the axis of the gas inlet and are perpendicular to the axis, thus, tensile deformation and compression deformation of the corrugated pipes are offset; the first pipe body and the second pipe body are rigid, so that displacement cannot occur between a vacuum pump and a vacuum cavity during gas pumping; meanwhile, the corrugated pipes are arranged, accordingly, vibration of the vacuum pump cannot be transferred to the vacuum cavity, and the vibration isolation effect is very good.

Description

Vacuum pipe
Technical field
The present invention relates to technical field of vacuum equipment, particularly to a kind of vacuum pipe.
Background technology
Development along with science and technology; large-scale vacuum system gets more and more in the application of every profession and trade, for instance the aspects such as the development of various particle accelerators, nuclear physics basis and applied research, aerospace simulation device, semi-conductor industry, medical and health, environmental conservation, new material research all need vacuum environment. Conventional vacuum system includes vacuum cavity, vacuum pipe and vacuum pump, and its intermediate pump is mainly used in the gas in extracting vacuum cavity, and vacuum pipe is mainly used in connecting vacuum cavity and vacuum pump.
At present, vacuum pipe mainly has two kinds of structures: a kind of is straight tube, such as patent of invention " vacuum suction device and the etching apparatus " (application number: 201310118631.9 that Beijing Beifang Micro-electronic Base Equipment Craft Research Centre Co., Ltd applied on April 8th, 2013; Publication number: 104103550A) disclosed in a kind of air extractor, including vacuum suction chamber, molecular pump and the transition passage for connecting vacuum suction chamber and molecular pump, wherein transition passage is tubular structure, and transition passage mentioned here just belongs to the vacuum pipe of straight tube class. Straight tube has certain rigidity, and it relies on the rigidity of self it can be avoided that vacuum pump or vacuum cavity are dragged, but the vibration of vacuum pump also can be passed to vacuum cavity by the straight tube of rigidity simultaneously.
Also having one is corrugated tube, the flexibility that corrugated tube has can the vibration of effective isolated vacuum pump, but owing to, in the process of evacuation, vacuum pipe to bear very big pressure in the axial direction, probably has 1kg/cm2, so may result in corrugated tube and can produce axial deformation under the axial compressive force effect when evacuation, without adopting requisite measure, vacuum pump or vacuum cavity will be driven to be subjected to displacement.
Summary of the invention
It is an object of the invention to provide a kind of vacuum pipe, while effective vibration isolation, avoid vacuum pump or vacuum cavity dragged.
For realizing object above, the technical solution used in the present invention is: a kind of vacuum pipe, including the first body, the second body and corrugated tube, described corrugated tube is provided with two or more, gas branches in plural corrugated tube through the first body, the gas flowing through corrugated tube converges into together then through the second body, first body and the second body are that rigid material is made, the inlet, outlet arranged concentric of vacuum pipe, the pipe range direction of corrugated tube is perpendicular to the axis direction of air inlet and plural corrugated tube is arranged symmetrically with about this axle center.
Further, described corrugated tube is provided with two, the axis coinciding of two corrugated tubes, and two corrugated tubes one end toward each other is linked together by the first body, and the other end of two corrugated tubes is linked together by the second body.
Further, described corrugated tube is provided with three, it is 120 degree that the axle center of three corrugated tubes is generally aligned in the same plane interior and mutual angle, and three corrugated tubes are positioned at one end of inner side and are linked together by the first body, and the other end of three corrugated tubes is linked together by the second body.
Further, described corrugated tube is provided with N number of, N is the integer be more than or equal to 4, it is 360/N degree that the axle center of N number of corrugated tube is generally aligned in the same plane interior and mutual angle, N number of corrugated tube is positioned at one end of inner side and is linked together by the first body, and the other end of N number of corrugated tube is linked together by the second body.
Further, the first described body includes the first straight tube and the second straight tube, and the second straight tube is vertically connected on the middle part of the first straight tube, and the two ends of the first straight tube are connected with two corrugated tubes respectively; The second described body includes the 3rd straight tube, the 4th straight tube and two L-type pipes, and the 4th straight tube is vertically connected on the middle part of the 3rd straight tube, and one end of L-type pipe is connected with corrugated tube, the other end is vertically welded on the 3rd straight tube; The axis parallel of the first straight tube and the 3rd straight tube, the axis coinciding of the second straight tube and the 4th straight tube.
Further, the two ends of described 3rd straight tube are provided with end socket, connecting each through bump joint is fixing between first straight tube and corrugated tube, between corrugated tube and L-type pipe, between the 3rd straight tube and end socket, the second straight tube welding is on the first straight tube, and the 4th straight tube and L-type sealing of tube are on the 3rd straight tube.
Further, the first described body includes the first Y-piece and the second straight tube, first Y-piece includes three identical laterals, article three, the axle center of lateral is generally aligned in the same plane interior and mutual angle is 120 °, second straight tube is vertically connected on the center of the first Y-piece, and three terminations of the first Y-piece are connected with three corrugated tubes respectively; The second described body includes the second Y-piece, the 4th straight tube and three L-type pipes, second Y-piece includes three identical laterals, article three, the axle center of lateral is generally aligned in the same plane interior and mutual angle is 120 °, 4th straight tube is vertically connected on the center of the second Y-piece, and one end of L-type pipe is connected with corrugated tube, the other end is vertically welded on the lateral of the second Y-piece; The face at the place, three lateral axle center of the first Y-piece is parallel with the face at place, the three of the second Y-piece lateral axle center, the axis coinciding of the second straight tube and the 4th straight tube.
Further, three terminations of described second Y-piece are provided with end socket, connect each through bump joint is fixing between first Y-piece and corrugated tube, between corrugated tube and L-type pipe, between the second Y-piece and end socket, second straight tube welding is on the first Y-piece, and the 4th straight tube and L-type sealing of tube are on the second Y-piece.
Further, described corrugated tube is welding bellows, and welding bellows includes the alternately welding of circular rustless steel thin slice, the internal diameter of each rustless steel thin slice and external diameter and forms thin-walled fold flexible pipe, and its welding manner is plasma weldering; The material of rustless steel thin slice is SUS316 steel, and the material of the first body and the second body is 304 steel.
Compared with prior art, there is techniques below effect in the present invention: due to corrugated tube be arranged symmetrically with about the axle center of air inlet and and axis perpendicular, stretching and the compression of so each corrugated tube are cancelled each other, and first and second body is rigidity, would not be subjected to displacement between vacuum pump and vacuum cavity when so bleeding;Simultaneously as be provided with corrugated tube here, the vibration of such vacuum pump, without passing to vacuum cavity, plays good vibration isolating effect.
Accompanying drawing explanation
Fig. 1 is the perspective view of the embodiment of the present invention one;
Fig. 2 is the front view of Fig. 1;
Fig. 3 is the perspective view of the embodiment of the present invention two;
Fig. 4 is the top view of Fig. 3.
Detailed description of the invention
Below in conjunction with Fig. 1 to Fig. 4, the present invention is described in further detail.
Consult Fig. 1-Fig. 4, a kind of vacuum pipe, including the first body the 10, second body 20 and corrugated tube 30, described corrugated tube 30 is provided with two or more, gas branches in corrugated tube 30 through the first body 10, the gas flowing through corrugated tube 30 converges into together then through the second body 20, first body 10 and the second body 20 are made for rigid material, the inlet, outlet arranged concentric of vacuum pipe, the pipe range direction of corrugated tube 30 is perpendicular to the axis direction of air inlet and plural corrugated tube 30 is arranged symmetrically with about this axle center. In the present invention, owing to have employed the first body 10 and the second body 20 that rigid material is made, under the axial compressive force effect when evacuation, axial deformation will not be there is, it is ensured that along the invariant position of air inlet axis direction between the first body 10 and the second body 20. Additionally, research corrugated tube 30 affected about fluid is still in the elementary step, Preliminary Results shows, corrugated tube 30 stress fluid affected is complicated, cause that corrugated tube 3 has zones of different and periodically stretches and compress, the distribution of the ess-strain in corrugated tube 30 is also in cyclically-varying, but in the solution of the present invention, owing to plural corrugated tube 30 has symmetry, when fluid is identical, the stress problem of corrugated tube 30 complexity, the stretching of corrugated tube 30 and compression can well be solved be cancelled. Therefore, the stress in all directions of the vacuum pipe in the present invention is all more balanced, and overall structure is highly stable, does not have the displacement of vacuum pump or vacuum cavity. Furthermore, owing to being provided with corrugated tube 30 so that the vibration of vacuum pump is not transferred to vacuum cavity, serve good vibration isolating effect.
Here the first body 10 is connected with vacuum cavity as isocon, and the second body 20 is connected with vacuum pump or vacuum pump set as collecting pipe. When practical application, the first body 10 can also be selected to be connected with vacuum pump or vacuum pump set, second body 20 is connected with vacuum cavity, under this connected mode, gas is to branch in corrugated tube 30 through the second body 20, converging together again through the first body 10, in embodiments below, all can so connect.
The quantity that corrugated tube 30 is arranged can select as required, provided below is numerous embodiments to elaborate the structure of vacuum pipe.
Consult Fig. 1, Fig. 2, embodiment one, described corrugated tube 30 is provided with two, the axis coinciding of two corrugated tubes 30, two corrugated tubes 30 one end toward each other is linked together by the first body 10, and the other end of two corrugated tubes 30 is linked together by the second body 20. Owing to needing the power suffered by corrugated tube 30 to be cancelled out each other, therefore two corrugated tubes 30 of minimum needs, what adopt in this embodiment one is exactly two corrugated tubes 30, respectively enter in two corrugated tubes 30 after flowing through the gas distribution of the first body 10, due to the flow direction contrast of gas in two corrugated tubes 30, power suffered by two such corrugated tube 30 is also rightabout, it becomes possible to be completely counterbalanced by, it is to avoid the stretching of corrugated tube 30 and compression.
The structure of the first body 10 and the second body 20 has a variety of, in embodiment one preferably, the first described body 10 includes the first straight tube 11 and the second straight tube 12, second straight tube 12 is vertically connected on the middle part of the first straight tube 11, first straight tube 11 and the second straight tube 12 form T font, and the two ends of the first straight tube 11 are connected with two corrugated tubes 30 respectively; The second described body 20 includes the 3rd straight tube the 21, the 4th straight tube 22 and two L-type pipes 23, and the 4th straight tube 22 is vertically connected on the middle part of the 3rd straight tube 21, and one end of L-type pipe 23 is connected with corrugated tube 30, the other end is vertically welded on the 3rd straight tube 21; The axis parallel of the first straight tube 11 and the 3rd straight tube 21, the axis coinciding of the second straight tube 12 and the 4th straight tube 22, in use, the second straight tube 12 is connected with vacuum cavity, and the 4th straight tube 22 is connected with vacuum pump or vacuum pump set, it is of course also possible to connect in turn. This structure is easily worked, convenient for assembly and dismounting.
Preferably, the two ends of described 3rd straight tube 21 are provided with end socket 40, and the two ends of the 3rd straight tube 21 are not easy to be processed into closing, are undertaken closing more reliable, convenience by end socket 40. Connect each through bump joint is fixing between first straight tube 11 and corrugated tube 30, between corrugated tube 30 and L-type pipe 23, between the 3rd straight tube 21 and end socket 40, bump joint refers to and is connected with each other the removable connector as one group of combined sealing structure by a pair flange, a pad and several bolt and nuts, bump joint is adopted to connect, have easy to use, bear the advantage that pressure is big, meanwhile, the pad that bump joint includes can ensure that the air-tightness of junction. Second straight tube 12 is welded on the first straight tube 11 to be integrally formed the first body 10 of formula, and the 4th straight tube 22 and L-type pipe 23 are welded on the 3rd straight tube 21 to be integrally formed the second body 20 of formula.
Consult Fig. 3, Fig. 4, embodiment two, described corrugated tube 30 is provided with three, it is 120 degree that the axle center of three corrugated tubes 30 is generally aligned in the same plane interior and mutual angle, three corrugated tubes 30 are positioned at one end of inner side and are linked together by the first body 10, and the other end of three corrugated tubes 30 is linked together by the second body 20. Owing to corrugated tube 30 is adding man-hour it is difficult to ensure that structure is consistent, in time adopting two corrugated tube 30, will cause that stress can not well be offset because of the error of structure; But when adopting three corrugated tubes 30, the stress suffered by corrugated tube 30 is easier to offset.
Similarly, the structure of the first body 10 and the second body 20 has a variety of, here the comparatively preferred structure of one is also provided for reference: the first described body 10 includes the first Y-piece 13 and the second straight tube 12, first Y-piece 13 includes three identical laterals, article three, the axle center of lateral is generally aligned in the same plane interior and mutual angle is 120 °, second straight tube 12 is vertically connected on the center of the first Y-piece 13, and three terminations of the first Y-piece 13 are connected with three corrugated tubes 30 respectively; The second described body 20 includes the second Y-piece the 24, the 4th straight tube 22 and three L-type pipes 23, second Y-piece 24 includes three identical laterals, article three, the axle center of lateral is generally aligned in the same plane interior and mutual angle is 120 °, 4th straight tube 22 is vertically connected on the center of the second Y-piece 24, and one end of L-type pipe 23 is connected with corrugated tube 30, the other end is vertically welded on the lateral of the second Y-piece 24; The face at the place, three lateral axle center of the first Y-piece 13 is parallel with the face at the place, three lateral axle center of the second Y-piece 24, the axis coinciding of the second straight tube 12 and the 4th straight tube 22.This structure is easily worked, convenient for assembly and dismounting.
Similarly, similar with embodiment one, three terminations of described second Y-piece 24 are provided with end socket 40, connect each through bump joint is fixing between first Y-piece 13 and corrugated tube 30, between corrugated tube 30 and L-type pipe 23, between the second Y-piece 24 and end socket 40, second straight tube 12 is welded on the first Y-piece 13, and the 4th straight tube 22 and L-type pipe 23 are welded on the second Y-piece 24. Owing to end socket 40, bump joint being all described in detail in embodiment one, just repeat no more here.
Further, embodiment three, described corrugated tube 30 is provided with N number of, N is the integer be more than or equal to 4, it is 360/N degree that the axle center of N number of corrugated tube 30 is generally aligned in the same plane interior and mutual angle, N number of corrugated tube 30 is positioned at one end of inner side and is linked together by the first body 10, and the other end of N number of corrugated tube 30 is linked together by the second body 20. In theory, corrugated tube 30 can arrange more, it is contemplated that more many corrugated tubes 30 make the overall structure of vacuum pipe become complicated, it is also more inconvenient that processing simultaneously is got up, here just no longer the structure of the vacuum pipe that have employed more than four corrugated tubes 30 is described in detail, direct reference example one and embodiment two.
Preferred version as the present invention, described corrugated tube 30 is welding bellows, welding bellows includes circular rustless steel thin slice, the alternately welding of the internal diameter of each rustless steel thin slice and external diameter forms thin-walled fold flexible pipe, its welding manner is plasma weldering, the material of rustless steel thin slice is SUS316 steel, this corrugated tube 30 has great retractility, it is indispensable parts in the connection of ultra-high vacuum system and various motion introducer, rationally selecting the natural length of corrugated tube 30, service life is up to more than hundreds thousand of times. The material of the first body 10 and the second body 20 is 304 steel, and bump joint selects 316LN rustless steel, so ensure that intensity and hardness.

Claims (9)

1. a vacuum pipe, it is characterized in that: include the first body (10), second body (20) and corrugated tube (30), described corrugated tube (30) is provided with two or more, gas branches in corrugated tube (30) through the first body (10), the gas flowing through corrugated tube (30) converges into together then through the second body (20), first body (10) and the second body (20) are made for rigid material, entering of vacuum pipe, gas outlet arranged concentric, the pipe range direction of corrugated tube (30) is perpendicular to the axis direction of air inlet and plural corrugated tube (30) is arranged symmetrically with about this axle center.
2. vacuum pipe as claimed in claim 1, it is characterized in that: described corrugated tube (30) is provided with two, the axis coinciding of two corrugated tubes (30), two corrugated tubes (30) one end toward each other is linked together by the first body (10), and the other end of two corrugated tubes (30) is linked together by the second body (20).
3. vacuum pipe as claimed in claim 1, it is characterized in that: described corrugated tube (30) is provided with three, it is 120 degree that the axle center of three corrugated tubes (30) is generally aligned in the same plane interior and mutual angle, three corrugated tubes (30) are positioned at one end of inner side and are linked together by the first body (10), and the other end of three corrugated tubes (30) is linked together by the second body (20).
4. vacuum pipe as claimed in claim 1, it is characterized in that: described corrugated tube (30) is provided with N number of, N is the integer be more than or equal to 4, it is 360/N degree that the axle center of N number of corrugated tube (30) is generally aligned in the same plane interior and mutual angle, N number of corrugated tube (30) is positioned at one end of inner side and is linked together by the first body (10), and the other end of N number of corrugated tube (30) is linked together by the second body (20).
5. vacuum pipe as claimed in claim 2, it is characterized in that: described the first body (10) includes the first straight tube (11) and the second straight tube (12), second straight tube (12) is vertically connected on the middle part of the first straight tube (11), and the two ends of the first straight tube (11) are connected with two corrugated tubes (30) respectively; Described the second body (20) includes the 3rd straight tube (21), the 4th straight tube (22) and two L-type pipes (23), 4th straight tube (22) is vertically connected on the middle part of the 3rd straight tube (21), and one end of L-type pipe (23) is connected with corrugated tube (30), the other end is vertically welded on the 3rd straight tube (21); The axis parallel of the first straight tube (11) and the 3rd straight tube (21), the axis coinciding of the second straight tube (12) and the 4th straight tube (22).
6. vacuum pipe as claimed in claim 5, it is characterized in that: the two ends of described 3rd straight tube (21) are provided with end socket (40), connect each through bump joint is fixing between first straight tube (11) and corrugated tube (30), between corrugated tube (30) and L-type pipe (23), between the 3rd straight tube (21) and end socket (40), second straight tube (12) is welded on the first straight tube (11), and the 4th straight tube (22) and L-type pipe (23) are welded on the 3rd straight tube (21).
7. vacuum pipe as claimed in claim 3, it is characterized in that: described the first body (10) includes the first Y-piece (13) and the second straight tube (12), first Y-piece (13) includes three identical laterals, article three, the axle center of lateral is generally aligned in the same plane interior and mutual angle is 120 °, second straight tube (12) is vertically connected on the center of the first Y-piece (13), and three terminations of the first Y-piece (13) are connected with three corrugated tubes (30) respectively; Described the second body (20) includes the second Y-piece (24), the 4th straight tube (22) and three L-type pipes (23), second Y-piece (24) includes three identical laterals, article three, the axle center of lateral is generally aligned in the same plane interior and mutual angle is 120 °, 4th straight tube (22) is vertically connected on the center of the second Y-piece (24), and one end of L-type pipe (23) is connected with corrugated tube (30), the other end is vertically welded on the lateral of the second Y-piece (24); The face at the place, three lateral axle center of the first Y-piece (13) is parallel with the face at the place, three lateral axle center of the second Y-piece (24), the axis coinciding of the second straight tube (12) and the 4th straight tube (22).
8. vacuum pipe as claimed in claim 7, it is characterized in that: three terminations of described second Y-piece (24) are provided with end socket (40), connect each through bump joint is fixing between first Y-piece (13) and corrugated tube (30), between corrugated tube (30) and L-type pipe (23), between the second Y-piece (24) and end socket (40), second straight tube (12) is welded on the first Y-piece (13), and the 4th straight tube (22) and L-type pipe (23) are welded on the second Y-piece (24).
9. the vacuum pipe as described in claim 1-8, it is characterized in that: described corrugated tube (30) is welding bellows, welding bellows includes circular rustless steel thin slice, the alternately welding of the internal diameter of each rustless steel thin slice and external diameter forms thin-walled fold flexible pipe, and its welding manner is plasma weldering; The material of rustless steel thin slice is SUS316 steel, and the material of the first body (10) and the second body (20) is 304 steel.
CN201610153969.1A 2016-03-16 2016-03-16 Vacuum pipe Expired - Fee Related CN105673972B (en)

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CN105673972B CN105673972B (en) 2017-11-17

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Publication number Priority date Publication date Assignee Title
CN114180513A (en) * 2021-12-08 2022-03-15 三沙供电局有限责任公司 Semi-automatic device of injecting oil

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114180513A (en) * 2021-12-08 2022-03-15 三沙供电局有限责任公司 Semi-automatic device of injecting oil

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