CN105673972B - Vacuum pipe - Google Patents

Vacuum pipe Download PDF

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Publication number
CN105673972B
CN105673972B CN201610153969.1A CN201610153969A CN105673972B CN 105673972 B CN105673972 B CN 105673972B CN 201610153969 A CN201610153969 A CN 201610153969A CN 105673972 B CN105673972 B CN 105673972B
Authority
CN
China
Prior art keywords
bellows
piece
pipe
straight tube
axle center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201610153969.1A
Other languages
Chinese (zh)
Other versions
CN105673972A (en
Inventor
何超峰
丁先庚
王辉
刘彦武
郁欢强
董相文
孙兴中
戴建彪
张海峰
卞荣耀
李阳
陈耀锋
张俊峰
武义锋
章学华
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Harbin Institute of Technology
Vacree Technologies Co Ltd
Original Assignee
Harbin Institute of Technology
Vacree Technologies Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harbin Institute of Technology, Vacree Technologies Co Ltd filed Critical Harbin Institute of Technology
Priority to CN201610153969.1A priority Critical patent/CN105673972B/en
Publication of CN105673972A publication Critical patent/CN105673972A/en
Application granted granted Critical
Publication of CN105673972B publication Critical patent/CN105673972B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L39/00Joints or fittings for double-walled or multi-channel pipes or pipe assemblies
    • F16L39/04Joints or fittings for double-walled or multi-channel pipes or pipe assemblies allowing adjustment or movement
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L27/00Adjustable joints, Joints allowing movement
    • F16L27/10Adjustable joints, Joints allowing movement comprising a flexible connection only, e.g. for damping vibrations
    • F16L27/1012Flanged joints
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L27/00Adjustable joints, Joints allowing movement
    • F16L27/10Adjustable joints, Joints allowing movement comprising a flexible connection only, e.g. for damping vibrations
    • F16L27/107Adjustable joints, Joints allowing movement comprising a flexible connection only, e.g. for damping vibrations the ends of the pipe being interconnected by a flexible sleeve
    • F16L27/11Adjustable joints, Joints allowing movement comprising a flexible connection only, e.g. for damping vibrations the ends of the pipe being interconnected by a flexible sleeve the sleeve having the form of a bellows with multiple corrugations

Abstract

The present invention relates to technical field of vacuum equipment, more particularly to a kind of vacuum pipe, including the first body, the second body and bellows, described bellows is provided with two or more, gas is branched in more than two bellowss by the first body, the gas for flowing through bellows converges into together by the second body again, first body and the second body are made up of rigid material, the inlet, outlet arranged concentric of vacuum pipe, the pipe range direction of bellows are arranged symmetrically perpendicular to the axis direction of air inlet and more than two bellowss on the axle center.It is arranged symmetrically on the axle center of air inlet due to bellows and is cancelled each other with axis perpendicular, the stretching and compression of so each bellows, and first and second body is rigid, would not be subjected to displacement between vavuum pump and vacuum cavity when being so evacuated;Simultaneously as being provided with bellows here, the vibration of such vavuum pump is also not transferred to vacuum cavity, plays good vibration isolating effect.

Description

Vacuum pipe
Technical field
The present invention relates to technical field of vacuum equipment, more particularly to a kind of vacuum pipe.
Background technology
With the continuous development of scientific technology, large-scale vacuum system is more and more in the application of every profession and trade, such as various grains The development of sub- accelerator, nuclear physics basis and application study, aerospace simulation device, semi-conductor industry, medical and health, ring Border protection, new material research etc. are required to vacuum environment.Conventional vacuum system includes vacuum cavity, vacuum pipe and true Empty pump, its intermediate pump are mainly used in extracting the gas in vacuum cavity, and vacuum pipe is mainly used in connecting vacuum cavity and true Empty pump.
At present, vacuum pipe mainly has two kinds of structures:One kind is straight tube, as Beijing North microelectronics base equipment technique is ground Study carefully patent of invention filed in 8 days April in 2013 of centered finite responsible company《Vacuum suction device and etching apparatus》(application Number:201310118631.9;Publication number:A kind of air extractor, including vacuum suction chamber, molecule are disclosed in 104103550A) Pump and the transition passage for connecting vacuum suction chamber and molecular pump, wherein transition passage are tubular structure, mistake mentioned here Cross the vacuum pipe that passage just belongs to straight tube class.Straight tube has certain rigidity, and it can avoid vacuum by the rigidity of itself Pump or vacuum cavity are dragged, but the vibration of vavuum pump can also be passed to vacuum cavity by rigid straight tube simultaneously.
Also one kind is bellows, bellows have it is flexible can effective isolated vacuum pump vibration, but due to During vacuumizing, vacuum pipe will bear very big pressure in the axial direction, probably there is 1kg/cm2, can thus lead Axial deformation is produced under the axial compressive force effect that cause bellows can be when vacuumizing, will band if not using requisite measure Dynamic vavuum pump or vacuum cavity are subjected to displacement.
The content of the invention
Vavuum pump or vacuum cavity quilt are avoided it is an object of the invention to provide a kind of vacuum pipe, while effective vibration isolation Dragging.
To realize object above, the technical solution adopted by the present invention is:A kind of vacuum pipe, including the first body, second Body and bellows, described bellows are provided with three, and gas is branched in bellows by the first body, flows through ripple The gas of pipe converges into together by the second body again, and the first body and the second body are made up of rigid material, vacuum pipe Inlet, outlet arranged concentric, bellows pipe range direction is perpendicular to the axis direction of air inlet and three bellowss are on the axle The heart is arranged symmetrically;In the axle center of three bellowss is generally aligned in the same plane and mutually angle is 120 degree, and three bellowss are located at inner side One end linked together by the first body, the other end of three bellowss is linked together by the second body.
Another technical scheme that the present invention uses for:A kind of vacuum pipe, including the first body, the second body and ripple Pipe, the setting of described bellows is N number of, and N is the integer more than or equal to 4, and gas is branched in bellows by the first body, flowed through The gas of bellows converges into together by the second body again, and the first body and the second body are made up of rigid material, vacuum tube The inlet, outlet arranged concentric in road, bellows pipe range direction is perpendicular to the axis direction of air inlet and N number of bellows is on this Axle center is arranged symmetrically;In the axle center of N number of bellows is generally aligned in the same plane and mutual angle is 360/N degree, and N number of bellows is positioned at interior One end of side is linked together by the first body, and the other end of N number of bellows is linked together by the second body.
Compared with prior art, there is following technique effect in the present invention:Because bellows is symmetrical on the axle center of air inlet Arrange and cancelled each other with axis perpendicular, the stretching and compression of so each bellows, and first and second body is rigidity , it would not be subjected to displacement between vavuum pump and vacuum cavity when being so evacuated;Simultaneously as bellows is provided with here, this The vibration of sample vavuum pump is also not transferred to vacuum cavity, plays good vibration isolating effect.
Brief description of the drawings
Fig. 1 is the dimensional structure diagram of the embodiment of the present invention one;
Fig. 2 is Fig. 1 front view;
Fig. 3 is the dimensional structure diagram of the embodiment of the present invention two;
Fig. 4 is Fig. 3 top view.
Embodiment
With reference to Fig. 1 to Fig. 4, the present invention is described in further detail.
Refering to Fig. 1-Fig. 4, a kind of vacuum pipe, including the first body 10, the second body 20 and bellows 30, it is described Bellows 30 is provided with two or more, and gas is branched in bellows 30 by the first body 10, flows through the gas of bellows 30 Being converged into together by the second body 20 again, the first body 10 and the second body 20 are made up of rigid material, the entering of vacuum pipe, Gas outlet arranged concentric, the pipe range direction of bellows 30 are closed perpendicular to the axis direction and more than two bellowss 30 of air inlet It is arranged symmetrically in the axle center.In the present invention, as a result of the first body 10 made of rigid material and the second body 20, taking out Axial deformation will not occur under axial compressive force effect during vacuum, ensure that between the first body 10 and the second body 20 along air inlet The position of mouth axis direction is constant.In addition, the research influenceed on bellows 30 on fluid is still in elementary step, Primary Study knot Fruit shows that the stress of bellows 30 fluid affected is complicated, causes bellows 3 to have different zones periodically stretching and pressure To contract, the distribution of the ess-strain in bellows 30 is also in cyclically-varying, but in the solution of the present invention, due to two or more Bellows 30 there is symmetry, in the case of fluid identical, can be very good to solve the problems, such as the complicated stress of bellows 30, The stretching and compression of bellows 30 can be cancelled.Therefore, the vacuum pipe stress in all directions in the present invention is all Compare balanced, overall structure is highly stable, is not in the displacement of vavuum pump or vacuum cavity.Furthermore because there is provided ripple Pipe 30 so that the vibration of vavuum pump is not transferred to vacuum cavity, serves good vibration isolating effect.
Here the first body 10 is connected as isocon with vacuum cavity, and the second body 20 is used as collecting pipe and vavuum pump Or vacuum pump set is connected.In practical application, the first body 10 can also be selected to be connected with vavuum pump or vacuum pump set, the second pipe Body 20 is connected with vacuum cavity, and under this connected mode, gas is to be branched to by the second body 20 in bellows 30, then is led to It is converging together to cross the first body 10, in embodiments below, all can so connect.
The quantity that bellows 30 is set can be selected as needed, and numerous embodiments are provided below to explain in detail State the structure of vacuum pipe.
Refering to Fig. 1, Fig. 2, embodiment one, described bellows 30 is provided with two, the axle center weight of two bellowss 30 Close, the one end of two bellowss 30 toward each other is linked together by the first body 10, and the other end of two bellowss 30 leads to The second body 20 is crossed to link together.Due to needing that the power suffered by bellows 30 is cancelled out each other, therefore minimum needs two Bellows 30, what is used in the embodiment one is exactly two bellowss 30, is entered respectively after flowing through the gas distribution of the first body 10 Enter in two bellowss 30, due to the flow direction contrast of the gas in two bellowss 30, two such bellows 30 Suffered power is also opposite direction, it becomes possible to is completely counterbalanced by, avoids the stretching and compression of bellows 30.
The structure of first body 10 and the second body 20 has a many kinds, in embodiment one preferably, the first described body 10 include the first straight tube 11 and the second straight tube 12, and the second straight tube 12 is vertically connected on the middle part of the first straight tube 11, the first straight tube 11 T fonts are formed with the second straight tube 12, the both ends of the first straight tube 11 are connected with two bellowss 30 respectively;The second described body 20 Including the 3rd straight tube 21, the 4th straight tube 22 and two L-type pipes 23, the 4th straight tube 22 is vertically connected in the 3rd straight tube 21 Portion, one end of L-type pipe 23 is connected with bellows 30, the other end is vertically welded on the 3rd straight tube 21;First straight tube 11 and the 3rd The axis coinciding of the axis parallel of straight tube 21, the second straight tube 12 and the 4th straight tube 22, when in use, the second straight tube 12 and vacuum chamber Body phase connects, and the 4th straight tube 22 is connected with vavuum pump or vacuum pump set, it is of course also possible to connect in turn.The structure is easily worked, Convenient for assembly and dismounting.
Preferably, the 3rd straight tube 21 is provided at both ends with end socket 40, and the both ends of the 3rd straight tube 21 are not easy to be processed into Closing, closed by end socket 40 more reliable, conveniently.Between first straight tube 11 and bellows 30, bellows 30 and L-type Be fixedly connected between pipe 23, between the 3rd straight tube 21 and end socket 40 by bump joint, bump joint refer to by a pair of flanges, One pad and several bolt and nuts are connected with each other the removable connector as one group of combined sealing structure, are connect using flange Head connects, have it is easy to use, bear the advantages of pressure is big, meanwhile, the pad that bump joint includes can ensure junction Air-tightness.Second straight tube 12 is welded on the first body 10 that formula is integrally formed on the first straight tube 11, the 4th straight tube 22 and L-type pipe 23 are welded on the second body 20 that formula is integrally formed on the 3rd straight tube 21.
Refering to Fig. 3, Fig. 4, embodiment two, described bellows 30 is provided with three, the axle center position of three bellowss 30 In in same plane and mutually angle be 120 degree, one end that three bellowss 30 are located at inner side is connected to by the first body 10 Together, the other end of three bellowss 30 is linked together by the second body 20.Because bellows 30 is difficult to protect in processing It is consistent to demonstrate,prove structure, when using two bellows 30, because of the error of structure stress will be caused to offset well; But when using three bellowss 30, the stress suffered by bellows 30 is easier to offset.
Similarly, the structure of the first body 10 and the second body 20 has many kinds, also provides here a kind of more preferred Structure for reference:The first described body 10 includes the first Y-piece 13 and the second straight tube 12, and the first Y-piece 13 includes three Identical lateral, it is 120 ° that the axle center of three laterals, which is generally aligned in the same plane interior and mutually angle, and the second straight tube 12 hangs down The direct-connected center for being connected on the first Y-piece 13, three terminations of the first Y-piece 13 are connected with three bellowss 30 respectively;Described Second body 20 includes the second Y-piece 24, the 4th straight tube 22 and three L-type pipes 23, and the second Y-piece 24 includes three identicals Lateral, it is 120 ° that the axle center of three laterals, which is generally aligned in the same plane interior and mutually angle, the vertical connection of the 4th straight tube 22 At the center of the second Y-piece 24, one end of L-type pipe 23 is connected with bellows 30, the other end is vertically welded in the second Y-piece 24 On lateral;Face and three lateral axles of the second Y-piece 24 where three lateral axle center of the first Y-piece 13 Face where the heart is parallel, the axis coinciding of the second straight tube 12 and the 4th straight tube 22.The structure is easily worked, convenient for assembly and tear open Unload.
Similarly, similar with embodiment one, three terminations of second Y-piece 24 are provided with end socket 40, the Pass through method between one Y-piece 13 and bellows 30, between bellows 30 and L-type pipe 23, between the second Y-piece 24 and end socket 40 Blue joint is fixedly connected, and the second straight tube 12 is welded on the first Y-piece 13, and the 4th straight tube 22 and L-type pipe 23 are welded on the 2nd Y types On pipe 24.It is just no longer superfluous here due to end socket 40, bump joint being all described in detail in embodiment one State.
Further, embodiment three, described bellows 30 are provided with N number of, and N is integer more than or equal to 4, N number of ripple In the axle center of line pipe 30 is generally aligned in the same plane and mutually angle is 360/N degree, and N number of bellows 30 is located at one end of inner side by the One body 10 is linked together, and the other end of N number of bellows 30 is linked together by the second body 20.For in theory, ripple Line pipe 30 can be set more, it is contemplated that more bellowss 30 causes the overall structure of vacuum pipe to become complicated, together It is also more inconvenient that Shi Jiagong gets up, and the structure with regard to the vacuum pipe no longer to employing more than four bellowss 30 is carried out detailed here Carefully describe, direct reference implementation example one and embodiment two.
As the preferred scheme of the present invention, described bellows 30 is welding bellows, and welding bellows includes annular shape Stainless steel thin slice, internal diameter and external diameter the alternating welding of each stainless steel thin slice forms thin-walled fold flexible pipe, its welding manner for etc. Ion welds, and the material of stainless steel thin slice is SUS316 steel, and this bellows 30 has great retractility, is ultra-high vacuum system Connection and it is various motion inducting device in indispensable part, the natural length of reasonable selection bellows 30, service life can Up to more than hundreds thousand of times.The material of first body 10 and the second body 20 is 304 steel, and bump joint selects 316LN stainless steels, this Sample being capable of proof strength and hardness.

Claims (5)

  1. A kind of 1. vacuum pipe, it is characterised in that:Including the first body (10), the second body (20) and bellows (30), institute The bellows (30) stated is provided with three, and gas is branched in bellows (30) by the first body (10), flows through bellows (30) gas converges into together by the second body (20) again, and the first body (10) and the second body (20) are rigid material system Into the inlet, outlet arranged concentric of vacuum pipe, the pipe range direction of bellows (30) is perpendicular to the axis direction of air inlet and three Individual bellows (30) is arranged symmetrically on the axle center;In the axle center of three bellowss (30) is generally aligned in the same plane and mutually angle is 120 degree, one end that three bellowss (30) are located at inner side is linked together by the first body (10), three bellowss (30) The other end is linked together by the second body (20).
  2. 2. vacuum pipe as claimed in claim 1, it is characterised in that:Described the first body (10) includes the first Y-piece (13) and the second straight tube (12), the first Y-piece (13) include three identical laterals, and the axle center of three laterals is located at In same plane and mutually angle is 120 °, and the second straight tube (12) is vertically connected on the center of the first Y-piece (13), the first Y types Three terminations of pipe (13) are connected with three bellowss (30) respectively;Described the second body (20) include the second Y-piece (24), 4th straight tube (22) and three L-type pipes (23), the second Y-piece (24) include three identical laterals, three branched pipes In the axle center in road is generally aligned in the same plane and mutually angle is 120 °, and the 4th straight tube (22) is vertically connected on the second Y-piece (24) Center, one end of L-type pipe (23) is connected with bellows (30), the other end is vertically welded in the laterals of the second Y-piece (24) On;Face and three lateral axle center institutes of the second Y-piece (24) where three lateral axle center of the first Y-piece (13) Face it is parallel, the axis coinciding of the second straight tube (12) and the 4th straight tube (22).
  3. 3. vacuum pipe as claimed in claim 2, it is characterised in that:Three terminations of second Y-piece (24) are respectively provided with Have end socket (40), between the first Y-piece (13) and bellows (30), between bellows (30) and L-type pipe (23), the second Y-piece (24) it is fixedly connected between end socket (40) by bump joint, the second straight tube (12) is welded on the first Y-piece (13), the Four straight tubes (22) and L-type pipe (23) are welded on the second Y-piece (24).
  4. 4. vacuum pipe as claimed in claim 1, it is characterised in that:Described bellows (30) is welding bellows, welding Bellows includes circular stainless steel thin slice, and it is soft that internal diameter and external diameter the alternating welding of each stainless steel thin slice forms thin-walled fold Pipe, its welding manner weld for plasma;The material of stainless steel thin slice is SUS316 steel, the first body (10) and the second body (20) Material be 304 steel.
  5. A kind of 5. vacuum pipe, it is characterised in that:Including the first body (10), the second body (20) and bellows (30), institute Bellows (30) setting stated is N number of, and N is the integer more than or equal to 4, and gas branches to bellows (30) by the first body (10) In, the gas for flowing through bellows (30) converges into together by the second body (20) again, the first body (10) and the second body (20) it is made up of rigid material, the inlet, outlet arranged concentric of vacuum pipe, the pipe range direction of bellows (30) is perpendicular to air inlet The axis direction and N number of bellows (30) of mouth are arranged symmetrically on the axle center;The axle center of N number of bellows (30) is generally aligned in the same plane Interior and mutual angle is 360/N degree, and one end that N number of bellows (30) is located at inner side is linked together by the first body (10), N The other end of individual bellows (30) is linked together by the second body (20).
CN201610153969.1A 2016-03-16 2016-03-16 Vacuum pipe Expired - Fee Related CN105673972B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610153969.1A CN105673972B (en) 2016-03-16 2016-03-16 Vacuum pipe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610153969.1A CN105673972B (en) 2016-03-16 2016-03-16 Vacuum pipe

Publications (2)

Publication Number Publication Date
CN105673972A CN105673972A (en) 2016-06-15
CN105673972B true CN105673972B (en) 2017-11-17

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CN201610153969.1A Expired - Fee Related CN105673972B (en) 2016-03-16 2016-03-16 Vacuum pipe

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Country Link
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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114180513A (en) * 2021-12-08 2022-03-15 三沙供电局有限责任公司 Semi-automatic device of injecting oil

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2009227A1 (en) * 1970-02-27 1971-09-02 Westerbarkey Westaflex
US4239267A (en) * 1979-09-10 1980-12-16 The Dow Chemical Company Internal-bellows, pressure-balanced, angled-flowpath expansion joint
DE10301374B4 (en) * 2003-01-16 2005-07-07 Airbus Deutschland Gmbh Bellows for the mechanical connection of two tubes arranged at a predetermined distance
CN201731216U (en) * 2010-07-30 2011-02-02 中冶赛迪工程技术股份有限公司 Tube compensation device
US9316136B2 (en) * 2012-07-05 2016-04-19 Komatsu Ltd. Engine unit and work vehicle
CN204879239U (en) * 2015-07-21 2015-12-16 洛阳双瑞特种装备有限公司 Branching is displacement compensation ripple tube swelling festival for pipeline
CN205447065U (en) * 2016-03-16 2016-08-10 安徽万瑞冷电科技有限公司 Vacuum pipe

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Granted publication date: 20171117

Termination date: 20190316