CN105673850B - A kind of vacuum and low temperature metal sealing device - Google Patents
A kind of vacuum and low temperature metal sealing device Download PDFInfo
- Publication number
- CN105673850B CN105673850B CN201610151601.1A CN201610151601A CN105673850B CN 105673850 B CN105673850 B CN 105673850B CN 201610151601 A CN201610151601 A CN 201610151601A CN 105673850 B CN105673850 B CN 105673850B
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- China
- Prior art keywords
- dewar vessel
- low temperature
- oil cylinder
- flange
- plug
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/08—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing
- F16J15/0881—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing the sealing effect being obtained by plastic deformation of the packing
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Furnace Details (AREA)
- Gasket Seals (AREA)
Abstract
The invention discloses a kind of vacuum and low temperature metal sealing device, including the first Dewar vessel that can be mutually butted（17）With the second Dewar vessel（28）, first Dewar vessel（17）Installed in heating mounting flange（4）On, second Dewar vessel（28）It is arranged on taper sealing flange（10）On, the heating mounting flange（4）With the taper sealing flange（10）Between be provided with for first Dewar vessel after to docking（17）With second Dewar vessel（28）The low temperature seal metal gasket for being sealed（11）, the low temperature seal metal gasket（11）In the heating mounting flange（4）Heating under and in the taper sealing flange（10）Force under produce plastotype so that the heating mounting flange（4）With the taper sealing flange（10）Between realize tight connecting.
Description
Technical field
The present invention relates to vacuum sealing, more particularly to a kind of vacuum and low temperature metal sealing device.
Background technology
Vacuum is essential condition on many science apparatus, and such as mass spectrograph, accelerator, probe etc. are only in vacuum
Ability normal work under certain condition is reached, vacuum is particularly important on many science apparatus.Often scientific instrument is true
Dry running condition is better than 1 × 10-3Pa, its seal request are high, and seal fitting all adopts precious metal material to constitute, and once makes
With causing very big waste.
In traditional metal hermetic seal, fastened using many hook bolts in sealing flange, in the docking fastening of flange two sides
When waste time and energy, also sealing surface can be caused not parallel due to stress surface discontinuity, affect sealing vacuum, specifically,
There is problems with traditional metal hermetic seal：（One）Vacuum equipment will be reached better than 1 × 10-3Pa, it is necessary to adopt metallic hard
Sealing member.But, sealing member has the vestige being extruded after tightening, can not repeat in original vestige during secondary coincidence use
On, thus leverage the tightness of sealing container.（Two）Metal seal generally adopts oxygen-free copper and gold material, by
In metal seal single use, the waste of Precious Metals Resources is caused.（Three）Sealing flange adopted many hook bolts in the past
Fastening, wastes time and energy during docking fastening on flange two sides, also sealing surface can be caused not parallel due to stress surface discontinuity,
Affect sealing vacuum.
Content of the invention
The main object of the present invention is at least one in the following：A kind of vacuum and low temperature metal sealing device is provided；
A kind of vacuum and low temperature metal sealing device of good sealing effect is provided；A kind of vacuum and low temperature metal sealing dress easy to use is provided
Put；There is provided a kind of metal material can Reusability so as to the vacuum and low temperature metal sealing device of reduces cost.
Various embodiments of the present invention propose a kind of vacuum and low temperature metal sealing device, it is characterised in that including being capable of phase
The first Dewar vessel for mutually docking（17）With the second Dewar vessel（28）, first Dewar vessel（17）Fix installed in heating
Flange（4）On, second Dewar vessel（28）It is arranged on taper sealing flange（10）On, the heating mounting flange（4）With
The taper sealing flange（10）Between be provided with for first Dewar vessel after to docking（17）With second vacuum
Container（28）The low temperature seal metal gasket for being sealed（11）, the low temperature seal metal gasket（11）In the heating mounting flange
（4）Heating under and in the taper sealing flange（10）Force under produce plastotype so that the heating mounting flange（4）With
The taper sealing flange（10）Between realize tight connecting.
According to one embodiment of the disclosure, the low temperature seal metal gasket（11）It is made up of low-temperature metal material, described
Heating mounting flange（4）It is provided with for the low temperature seal metal gasket（11）The heater for being heated.
According to one embodiment of the disclosure, the heater includes electric furnace heating wire（13）And to the electric furnace heating wire（13）
The thermocouple that is monitored of heating-up temperature（6）, the low temperature seal metal gasket（11）It is located at the heating mounting flange（4）'s
Groove is interior and is arranged in the electric furnace heating wire（13）Heating under and in the thermocouple（6）Lower within the temperature range of control
Intensity.
According to one embodiment of the disclosure, the heating mounting flange（4）It is provided with to the electric furnace heating wire（13）Carry out
First high-temperature insulation pipe of insulation protection（7）With the second high-temperature insulation pipe（12）, and to the electric furnace heating wire（13）Extraction lead
Line carries out the high-temperature insulation set of insulation protection（14）；The heating mounting flange（4）On be additionally provided with to the electric furnace heating wire（13）Enter
The fixed annular fixation clip of row（15）.
According to one embodiment of the disclosure, the taper sealing flange（10）By fairlead（1）With top pressing board（31）
It is connected with each other, the fairlead（1）Inside it is provided with for the taper sealing flange（10）Apply the preloading spring of preload pressure
（2）, the top pressing board（31）By fastening thread set（3）Near the heating mounting flange（4）.
According to one embodiment of the disclosure, the heating mounting flange（4）By push rod（18）With the first plug-in type card
Disk（19）It is connected with each other, the taper sealing flange（10）By push rod（18）With the second plug-in type chuck（22）It is connected with each other,
The first plug-in type chuck（19）With the second plug-in type chuck（22）Respectively semi-circular plug-in type chuck docks to be formed
Annular chuck.
According to one embodiment of the disclosure, first Dewar vessel（17）With second Dewar vessel（28）Respectively
It is put into the first plug-in type chuck of chuck shape in a ring（19）With the second plug-in type chuck（22）Interior, through in a ring
The first plug-in type chuck of chuck shape（19）With the second plug-in type chuck（22）It is additionally provided with hydraulic pressure draw-bar bolt（21）,
The hydraulic pressure draw-bar bolt（21）In high-voltage oil cylinder（26）Effect is lower to drive first Dewar vessel（17）True with described second
Empty（28）Docked or separated.
According to one embodiment of the disclosure, the high-voltage oil cylinder（26）Inside it is provided with and the hydraulic pressure draw-bar bolt（21）Even
The piston for connecing（25）, the high-voltage oil cylinder（26）It is also associated with connecting container（50）, the connection container（50）Inside it is provided with and institute
State high-voltage oil cylinder（26）Five be interconnected on liquid are led to（30、33）, the high-voltage oil cylinder（26）Container is connected with described
（50）Between by liquid flow cause the piston（25）Travel forward or move backward to drive the hydraulic pressure draw-bar bolt
（21）, so that first Dewar vessel（17）With second Dewar vessel（28）Docked or separated.
According to one embodiment of the disclosure, the high-voltage oil cylinder（26）Container is connected with described（50）Between be provided with inner side
Lateral oil pipe（40、42）With the lateral oil pipe in outside（41、43）；Wherein, the medial side oil pipe（40、42）Institute is promoted during work
State piston（25）Move backward, to drive the hydraulic pressure draw-bar bolt（21）So that first Dewar vessel（17）With described
Two Dewar vessels（28）Docked；The lateral oil pipe in the outside（41、43）The piston is promoted during work（25）Travel forward,
To drive the hydraulic pressure draw-bar bolt（21）So that first Dewar vessel（17）With second Dewar vessel（28）Carry out
Separate.
According to one embodiment of the disclosure, the high-voltage oil cylinder（26）Including four groups of high-voltage oil cylinders, described five lead to（30、
33）Lead to including connecting first five of the front end path of four groups of high-voltage oil cylinders（30）With connection four groups of high-voltage oil cylinders
Second five of back-end path is led to（33）；The high-voltage oil cylinder（26）Both sides be additionally provided with oil respectively to being blocked before and after which
Nut is blocked up before cylinder（23）With stifled nut after oil cylinder（29）, after the oil cylinder, block up nut（29）On be additionally provided with for securing it within
State high-voltage oil cylinder（26）Nut spanner hole is blocked up after interior oil cylinder（27）；The hydraulic pressure draw-bar bolt（21）By hydraulic pressure draw-bar bolt
Sealing nut（35）And sealing ring（36）Nut is blocked up before being installed to the oil cylinder（23）On.
Compared with prior art, the present invention has advantages below：Due to the heating mounting flange（4）Close with the taper
Envelope flange（10）Between be provided with for first Dewar vessel after to docking（17）With second Dewar vessel（28）Enter
The low temperature seal metal gasket of row sealing（11）, the low temperature seal metal gasket（11）In the heating mounting flange（4）Heating
（For example pass through electric furnace heating wire（13）To heating mounting flange（4）Heated）Down and in the taper sealing flange（10）Force
Lower generation plastotype, so that the heating mounting flange（4）With the taper sealing flange（10）Between realize tight connecting, therefore
Compared with traditional vacuum sealing mode, the good sealing effect of this sealing means is easy to use, and low temperature seal metal gasket by
In metal material is used, therefore can Reusability with reduces cost.
Description of the drawings
For clearer explanation technical scheme, embodiment will be described below needed for accompanying drawing to be used
Be briefly described, it is clear that, drawings in the following description are only some embodiments of the present invention, for this area general
For logical technical staff, on the premise of not paying creative work, can be with according to these other accompanying drawings of accompanying drawings acquisition.
Cross-sectional views of the Fig. 1 for the vacuum and low temperature metal sealing device of the embodiment of the present invention；
Overlooking the structure diagrams of the Fig. 2 for the vacuum and low temperature metal sealing device of the embodiment of the present invention；
Decomposing schematic representations of the Fig. 3 for the part-structure of the vacuum and low temperature metal sealing device of the embodiment of the present invention；
Overlooking the structure diagrams of the Fig. 4 for the semi-circular plug-in type chuck of the embodiment of the present invention；
Positive structure schematics of the Fig. 5 for the semi-circular plug-in type chuck of the embodiment of the present invention；
Side structure schematic diagrams of the Fig. 6 for the semi-circular plug-in type chuck of the embodiment of the present invention；
Positive structure schematics of the Fig. 7 for the annular chuck of the docking formation of the embodiment of the present invention；And
Side structure schematic diagrams of the Fig. 8 for the annular chuck of the docking formation of the embodiment of the present invention.
Description of reference numerals in accompanying drawing is as follows：
1- fairleads；2- preloading springs；3- fastening thread sets；4- heats mounting flange；5- thermocouple fixed screws；6- heat
Galvanic couple；7- the first high-temperature insulation pipes；8- fixing bolts；9- is welded；10- taper sealing flanges；11- low temperature seal metal gaskets；12-
Second high-temperature insulation pipe；13- electric furnace heating wires；14- high-temperature insulation sets；The ring-like fixed plates of 15-；16- Dewar vessel suction nozzles；17- first
Dewar vessel；18- push rods；19- the first plug-in type chucks；20- outer-hexagonal clamp nuts；21- hydraulic pressure draw-bar bolts；22- second
Plug-in type chuck；Nut is blocked up before 23- oil cylinders；24- piston packing rings；25- pistons；26- high-voltage oil cylinders；Nut is blocked up after 27- oil cylinders
Plank hole；The second Dewar vessels of 28-；Nut is blocked up after 29- oil cylinders；30- five leads to；31- top pressing boards；32- oil pipe clamp nuts；33-
Five lead to；34- seal snap rings；35- hydraulic pressure draw-bar bolt seal nuts；36- sealing rings；37- oil pipes；It is close that nut is blocked up before 38- oil cylinders
Seal ring；Nut seal ring is blocked up after 39- oil cylinders；The lateral oil pipes of 40-41-42-43-.
Specific embodiment
Accompanying drawing in below in conjunction with the embodiment of the present invention, to the embodiment of the present invention in technical scheme carry out clear, complete
Whole description, it is clear that described embodiment is only a part of embodiment of the present invention, is not all, of embodiment, based on this
Embodiment in bright, the every other enforcement obtained under the premise of creative work is not paid by those of ordinary skill in the art
Example, belongs to the scope of protection of the invention.
As shown in Figure 1-Figure 3, a kind of vacuum and low temperature metal sealing device is embodiments provided, including can be mutual
First Dewar vessel 17 and the second Dewar vessel 28 of docking, first Dewar vessel 17 are arranged on heating mounting flange 4,
Second Dewar vessel 28 on the taper sealing flange 10, the heating mounting flange 4 and the taper sealing flange
The low temperature sealed for first Dewar vessel 17 and second Dewar vessel 28 after to docking is provided between 10
Sealing metal pad 11, the low temperature seal metal gasket 11 is under the heating of the heating mounting flange 4 and in the taper sealing
Plastotype is produced under the force of flange 10, so as to realize closely between the heating mounting flange 4 and the taper sealing flange 10
It coincide.
For example, due to being provided between the heating mounting flange 4 and the taper sealing flange 10 for after to docking
The low temperature seal metal gasket 11 sealed by first Dewar vessel 17 and second Dewar vessel 28, the low temperature seal
Heating of the metal gasket 11 in the heating mounting flange 4（For example pass through electric furnace heating wire（13）To heating mounting flange（4）Carry out plus
Heat）Down and plastotype is produced under the force of the taper sealing flange 10, so that the heating mounting flange 4 and the taper are close
Tight connecting is realized between envelope flange 10, therefore compared with traditional vacuum sealing mode, the good sealing effect of this sealing means,
Easy to use, and low temperature seal metal gasket is due to using metal material, therefore can Reusability with reduces cost.
For example, Dewar vessel suction nozzle 16 can be welded on the first Dewar vessel 17, carry out suctioning out and air inlet
Passage.First Dewar vessel 17 is docked with the second Dewar vessel 28, forms an entirety.Welding 9 by the second Dewar vessel 28 with
Taper sealing flange 10 is welded into an entirety.Low temperature seal metal gasket in 10 pairs of heating mounting flanges 4 of taper sealing flange
11 form suppression, so as to produce sealing effectiveness.
According to one embodiment of the disclosure, the low temperature seal metal gasket 11 is made up of low-temperature metal material, described plus
Heat fixation flange 4 is provided with the heater for being heated to the low temperature seal metal gasket 11.
For example, low temperature seal metal gasket 11 can be made with low-temperature metal material.Low temperature seal metal gasket 11 can be put
In the groove of heating mounting flange 4.Heater can adopt electric furnace heating wire 13, and in heating mounting flange 4, electric furnace heating wire 13 is heated
During under uniform temperature, the intensity decreases of low temperature seal metal gasket 11 are conducive to taper sealing flange 10 to produce under pressure
Raw plastotype, is closely coincide low temperature seal metal gasket 11, reaches the effect of sealing with taper sealing flange 10.
According to one embodiment of the disclosure, the heater includes electric furnace heating wire 13 and adding to the electric furnace heating wire 13
The thermocouple 6 that hot temperature is monitored, the low temperature seal metal gasket 11 are located in the groove of the heating mounting flange 4 and are set
It is set under the heating of the electric furnace heating wire 13 and lowers intensity within the temperature range of the thermocouple 6 is controlled.
For example, in heating mounting flange 4, thermocouple fixed screw 5 is fastening thermocouple 6 to thermocouple fixed screw 5
Screw.Thermocouple 6 is used for the temperature for controlling to heat electric furnace heating wire 13 in mounting flange 4.It is solid that low temperature seal metal gasket 11 is located at heating
Determine in the groove of flange 4, in the case where electric furnace heating wire 13 is heated, and low temperature seal metal gasket 11 is made within the temperature range of thermocouple 6 is controlled
Intensity losses, be easy to make 11 metalwork plastotype of low temperature seal metal gasket under stress, closely kiss with taper sealing flange 10
Close, form an entirety.
For example, in heating mounting flange 4, when electric furnace heating wire 13 is heated under uniform temperature, low temperature seal metal gasket 11
Intensity decreases, are conducive to taper sealing flange 10 for example to produce plastotype under the pressure effect of high-voltage oil cylinder 25, closely low
Warm sealing metal pad 11 is coincide with taper sealing flange 10, reaches the effect of sealing.
According to one embodiment of the disclosure, the heating mounting flange 4 is provided with and the electric furnace heating wire 13 is insulated
The first high-temperature insulation pipe 7 and the second high-temperature insulation pipe 12 of protection, and the extraction wire of the electric furnace heating wire 13 is insulated
The high-temperature insulation set 14 of protection；It is additionally provided with, on the heating mounting flange 4, the annular is fixed by the electric furnace heating wire 13 fixed
Pressing plate 15.
For example, the first high-temperature insulation pipe 7 can be arranged in heating mounting flange 4, and 13 insulation protections of electric furnace heating wire are made
With.It is for instance possible to use fixing bolt 8 is to 15 fixations of ring-like fixation clip.For example, the second high-temperature insulation pipe 12 can be with
It is arranged in heating mounting flange 4 and plays the insulation protection effect to electric furnace heating wire 13.For example, high-temperature insulation set 14 can be to electric furnace
The extraction wire of silk 13 plays insulation protection effect.For example, ring-like fixation clip 15 can be electric furnace in heating 4 groove of mounting flange
The ring-like fixation clip of silk 13.
According to one embodiment of the disclosure, the taper sealing flange 10 is mutually interconnected with top pressing board 31 by fairlead 1
Connect, be provided with the fairlead 1 for the preloading spring 2 to the taper sealing flange 10 applying preload pressure, the top pressure
Plate（31）By fastening thread set（3）Near the heating mounting flange（4）.
For example, as shown in figure 3, fairlead 1 can be placed with preloading spring 2.For example, first by taper sealing flange 10, guiding
Set 1, preloading spring 2 and top pressing board 31 are combined together, are then installed fastening thread set 3 and are tightened the fastening thread set 3 so that top
Pressing plate（31）By fastening thread set（3）Near the heating mounting flange（4）, so as to realize fastening effect.Fairlead 1 can be with
As taper sealing flange 10 and the guider of top pressing board 31, reciprocal with top pressing board 31 so as to ensure that taper sealing flange 10
The repeatability of position, and guarantee being accurately positioned in fairlead 1 of preloading spring 2.Preloading spring 2 can be arranged on fairlead 1
Interior, mainly implement the preload pressure to taper sealing flange 10.Fastening thread set 3 can be connection heating mounting flange 4 and top
The adapter sleeve of pressing plate 31, it is, for example, by tightening the fastening thread set 3 which acts on so that top pressing board（31）By fastening thread set
（3）Near the heating mounting flange（4）, together with heating mounting flange 4 is tightly held in top pressing board 31.Accordingly
Ground, heating mounting flange 4 and top pressing board 31 can be tightly held in together by fastening thread set 3.
For example, as shown in figure 3, top pressing board 31 can be arranged in fastening thread set 3, top pressing board 31 can contain fairlead
1, preloading spring 2 is placed in fairlead 1.What top pressing board 31 placed fairlead 1 is blind hole, is that preloading spring 2 provides stress support
Face.Taper sealing flange 10 also contains the symmetrical blind hole of identical, and its effect is consistent with top pressing board 31.Fairlead 1, taper sealing method
, after 3 fastening of fastening thread set, preloading spring 2 can still keep the pressure to taper sealing flange 10 for orchid 10 and top pressing board 31
Power, makes impact of the metal heat-expansion shrinkage to sealing so as to solve temperature change.
As shown in Fig. 1 and Fig. 4-Fig. 8, according to one embodiment of the disclosure, the heating mounting flange 4 passes through push rod 18
It is connected with each other with the first plug-in type chuck 19, the taper sealing flange 10 is mutual with the second plug-in type chuck 22 by push rod 18
Connection, the first plug-in type chuck 19 and the second plug-in type chuck 22 are respectively semi-circular plug-in type chuck and dock to be formed
Annular chuck.
For example, in the presence of hydraulic pressure draw-bar bolt 21 and high-voltage oil cylinder 26, can be to heating mounting flange 4 and top pressing board
31 generations are made a concerted effort, and the first Dewar vessel 17 is tightly coincide with the second Dewar vessel 28.Meanwhile, push rod 18 not only can be played
The effect of top pressure, and the support distances between the first plug-in type chuck 19 and heating mounting flange 4 can be formed, it is electric furnace heating wire
13 and thermocouple 6 extraction provide space.For example, the taper sealing flange 10 directly can be inserted by push rod 18 and second
Enter formula chuck 22 to be connected with each other, or the taper sealing flange 10 can be through top pressing board 31 again by push rod 18 and the second insertion
Formula chuck 22 is connected with each other.For example, a headband screw thread of push rod 18, is separately fixed at the first plug-in type chuck 19 and the second insertion
Formula chuck 22, other end are tack, can be used to hold out against heating mounting flange 4 and taper sealing flange 10（For example pass through top pressure
Plate 31 holds out against taper sealing flange 10）.For example, it is possible to first hold out against heating mounting flange 4 and taper sealing flange with push rod 18
10, then locked with fastening thread set 3, now can for example lay down the first plug-in type chuck 19, the second plug-in type chuck 22, height
Compressing cylinder 26 and hydraulic pressure draw-bar bolt 21, are only close to solid thread bush 3 to fix heating mounting flange 4 and taper sealing flange 10.
According to one embodiment of the disclosure, first Dewar vessel 17 and second Dewar vessel 28 are respectively put into
In a ring in the first plug-in type chuck 19 and the second plug-in type chuck 22 of chuck shape, through chuck shape in a ring
The first plug-in type chuck 19 and the second plug-in type chuck 22 are additionally provided with hydraulic pressure draw-bar bolt 21, the hydraulic pressure draw-bar spiral shell
Bolt 21 drives first Dewar vessel 17 and second Dewar vessel 28 to be docked or divided under the effect of high-voltage oil cylinder 26
From.
For example, the first plug-in type chuck 19 and the second plug-in type chuck 22 are respectively semi-circular plug-in type chuck（Such as Fig. 5 institutes
Show）The annular chuck that docking is formed（Namely two semi-circular plug-in type chucks dock to form the first plug-in type chuck 19 or the second
Plug-in type chuck 22）, as shown in Figure 7.Semi-circular plug-in type chuck docks the annular chuck to be formed and can form a ring method
Orchid, this flange arrangement are easily installed and dismantle.As shown in fig. 7, the central part of the annular chuck of docking formation is provided with hole
211, can be used for the first Dewar vessel 17 or the second Dewar vessel 28 are installed.
For example, it is possible to outer-hexagonal clamp nut 20 is placed on hydraulic tensioning bolt 21, to the first plug-in type chuck 19
Positioning fixation is played with the second plug-in type chuck 22.Hydraulic pressure draw-bar bolt 21 can run through the first plug-in type chuck 19 and the
Two plug-in type chucks 22, for example, as shown in fig. 7, the first plug-in type chuck 19 or the second plug-in type chuck 22 divide up and down
It is not provided with and comes through the first insertion for four hydraulic pressure draw-bar bolts 21 through the hole 210 of hydraulic pressure draw-bar bolt 21, can be arranged
Formula chuck 19 and the second plug-in type chuck 22 cause both to be connected with each other.In the case where high-voltage oil cylinder 26 is acted on, can be to the first vacuum
Container 17 and the second Dewar vessel 28 play the identical effect of fastening.
According to one embodiment of the disclosure, it is provided with the high-voltage oil cylinder 26 and is connected with the hydraulic pressure draw-bar bolt 21
Piston 25, second Dewar vessel 28 are also associated with connecting container 50（For example it is in cassette shapes, as shown in Figure 1）, the company
Five logical 30,33 be interconnected on liquid with the high-voltage oil cylinder 26, the high-voltage oil cylinder 26 and institute is provided with logical container 50
State and flowed by liquid between connection container 50 so that the piston 25 travels forward or moves backward to drive the hydraulic pressure to draw
Bar bolt 21, so that first Dewar vessel 17 and second Dewar vessel 28 are docked or are separated.
For example, it is possible to piston packing ring 24 is placed in the 25 liang of end slots of piston in high-voltage oil cylinder 26, piston 25 and hydraulic pressure
Stay-bolt 21 can be connected.Hydraulic pressure draw-bar bolt 21 can pass through the first plug-in type chuck 19 and the second plug-in type chuck
22, above the first Dewar vessel 17 that fixes in outer-hexagonal fastening bolt 20 and the second Dewar vessel 28, through piston 25 in high pressure
Motion in oil cylinder 26, can produce making a concerted effort to the first Dewar vessel 17 and the second Dewar vessel 28.For example, five logical 30 can be with
It is the front end path for connecting four groups of high-voltage oil cylinders 26.Five logical 33 can be the back-end path for connecting four groups of high-voltage oil cylinders 26.For example,
Connection container 50 in cassette shapes can also be removed, and only retain and lead to the high-voltage oil cylinder 26 is interconnected on liquid five
30 and five logical 33, do not connect between therein five logical 30 and five logical 33, but respectively with corresponding oil pump（Not shown）Carry out
Connection, so as to control to be input to the such as hydraulic oil in high-voltage oil cylinder 26 through five logical 30, five logical 33 using oil pump respectively, finally
Realize the control for piston 25 being travelled forward or being moved backward（As shown in Figure 1）.For example, oil pump here can also be put in box
In the connection container 50 of shape so that overall structure is more succinct, convenient use.
According to one embodiment of the disclosure, the high-voltage oil cylinder 26 be provided with medial side between container 50
The lateral oil pipe 41,43 of oil pipe 40,42 and outside；Wherein, the medial side oil pipe 40,42 work when promote the piston 25 to
After move, to drive the hydraulic pressure draw-bar bolt 21 so that first Dewar vessel 17 and second Dewar vessel 28 are carried out
Docking；The lateral oil pipe 41,43 in the outside promotes the piston 25 to travel forward when working, to drive the hydraulic pressure draw-bar bolt
21 cause first Dewar vessel 17 and second Dewar vessel 28 to be separated.
For example, medial side oil pipe 40,42（For example connected by five logical 30, five logical 30 four ends respectively with inner side side
It is connected to oil pipe 40,42, remaining one end is connected with corresponding oil pump）With the lateral oil pipe 41,43 in outside（For example by five logical 33
Connection, five logical 33 four ends are connected with the lateral oil pipe 41,43 in outside respectively, and remaining one end is connected with corresponding oil pump）Can
To be referred to as lateral oil pipe；Oil pipe clamp nut 32 can be set, and which is for lateral oil pipe 40,41,42,43 and high-voltage oil cylinder
26 connection clamp nut.Seal snap ring 34 can be set, and which is for lateral oil pipe 40,41,42,43, high-voltage oil cylinder 26, five
Logical 30 and five lead to 33 seal snap rings being connected with lateral oil pipe 40,41,42,43.Oil pipe 37 can be set, and which is each height of connection
The passage of compressing cylinder 26.
For example, the lateral oil pipe 40,41,42,43 in oil pipe 37 is the passage for connecting each high-voltage oil cylinder 26, when lateral
Oil pipe 40,42 works, and promotes piston 25 in 26 interior motion backward of high-voltage oil cylinder, as hydraulic pressure draw-bar bolt 21 is inserted through first
Enter formula chuck 19 and the second plug-in type chuck 22, in the presence of high-voltage oil cylinder 26, to the first Dewar vessel 17 and the second vacuum
Container 28 plays the identical effect of fastening, and hydraulic oil discharged therewith by lateral oil pipe 41,43.Due to groups oil cylinders while stress, it is ensured that
The depth of parallelism of sealing, makes sealing surface uniform force, greatly improves vacuum-packed quality.
Conversely, lateral oil pipe 41,43 works, when promoting piston 25 to travel forward in the high-voltage oil cylinder 26, as hydraulic pressure draws
Bar bolt 21, is inserted to first through the first plug-in type chuck 19 and the second plug-in type chuck 22 in the presence of high-voltage oil cylinder 26
Enter formula chuck 19 and the second plug-in type chuck 22 plays relexation, hydraulic oil discharged therewith by lateral oil pipe 40,42.Meanwhile, the
After one plug-in type chuck 19 and the second plug-in type chuck 22 relax, make dismounting very convenient.
According to one embodiment of the disclosure, the high-voltage oil cylinder 26 includes four groups of high-voltage oil cylinders, described five logical 30,33 bags
Include first five logical 30 of the front end path for connecting four groups of high-voltage oil cylinders and the rear end of connection four groups of high-voltage oil cylinders leads to
Second five of road logical 33；The both sides of the high-voltage oil cylinder 26 are additionally provided with respectively to blocking up nut before the oil cylinder that blocked before and after which
23 and oil cylinder after block up nut 29, block up after the oil cylinder and be additionally provided with nut 29 for securing it within the high-voltage oil cylinder 26
Nut spanner hole 27 is blocked up after oil cylinder；The hydraulic pressure draw-bar bolt 21 is pacified by hydraulic pressure draw-bar bolt seal nut 35 and sealing ring 36
Block up on nut 23 before being attached to the oil cylinder.
Wherein, the oil being also provided between nut 23 for forward end seal is blocked up before the high-voltage oil cylinder 26 and the oil cylinder
Nut seal ring 38 is blocked up before cylinder, is also provided between stifled nut 29 after the high-voltage oil cylinder 26 and the oil cylinder close for rear end
Nut seal ring 39 is blocked up after the oil cylinder of envelope.
For example, first five logical 30 can be the front end path for connecting four groups of high-voltage oil cylinders 26.Second five logical 33 can be with
It is the back-end path for connecting four groups of high-voltage oil cylinders 26.Block up nut 23 to act in the front end of high-voltage oil cylinder 26 before oil cylinder, with
Nut 29 is blocked up after oil cylinder and acts on identical, closure before and after carrying out to high-voltage oil cylinder 26 respectively, form a complete high-voltage oil cylinder.Oil
Block up nut spanner hole 27 to could be for being fastened on the spanner hole in high-voltage oil cylinder 26 nut 29 is blocked up after oil cylinder after cylinder.
For example, hydraulic pressure draw-bar bolt seal nut 35 and sealing ring 36 can be enclosed within outside hydraulic pressure draw-bar bolt 21, hydraulic pressure
Stay-bolt 21 is blocked up on nut 23 before being fixed on oil cylinder, while hydraulic pressure draw-bar bolt seal nut 35 can compress sealing ring 36,
Sealing function is played to hydraulic pressure draw-bar bolt 21.For example, block up nut seal ring 38 to act in high-voltage oil cylinder 26 before oil cylinder
Block up before oil cylinder under nut 23, seal for 26 Inner Front End of high-voltage oil cylinder.Nut seal ring 39 is blocked up after oil cylinder can act on high pressure
Block up under nut 29, for back-end sealing in high-voltage oil cylinder 26 after 26 inner cylinder of oil cylinder.
Through the above description of the embodiments, those skilled in the art can be understood that the present invention can be with
Realized by other structures, the feature of the present invention is not limited to above-mentioned preferred embodiment.Any it is familiar with the technology
In the technical field of the present invention, the patent protection model in the present invention should be all covered in the change that can be readily occurred in or modification to personnel
Within enclosing.
Claims (9)
1. a kind of vacuum and low temperature metal sealing device, it is characterised in that including the first Dewar vessel (17) that can be mutually butted
With the second Dewar vessel (28), described first Dewar vessel (17), in heating mounting flange (4), second vacuum is held
Device (28) is arranged on taper sealing flange (10), between heating mounting flange (4) and the taper sealing flange (10)
It is provided with the low temperature sealed for the first Dewar vessel (17) and second Dewar vessel (28) after to docking close
Envelope metal gasket (11), low temperature seal metal gasket (11) are under the heating of heating mounting flange (4) and in the taper
Under the force of sealing flange (10) produce plastotype so that described heating mounting flange (4) and the taper sealing flange (10) it
Between realize tight connecting；Described taper sealing flange (10) are connected with each other with top pressing board (31) by fairlead (1), the guiding
It is provided with set (1) for the preloading spring (2) to described taper sealing flange (10) applying preload pressure, top pressing board (31)
By fastening thread set (3) near heating mounting flange (4).
2. vacuum and low temperature metal sealing device according to claim 1, it is characterised in that the low temperature seal metal gasket
(11) it is made up of low-temperature metal material, heating mounting flange (4) is provided with for low temperature seal metal gasket (11)
The heater for being heated.
3. vacuum and low temperature metal sealing device according to claim 2, it is characterised in that the heater includes electric furnace
Silk (13) and the thermocouple (6) is monitored by the heating-up temperature of the electric furnace heating wire (13), the low temperature seal metal gasket
(11) it is located in the groove of heating mounting flange (4) and is arranged under the heating of the electric furnace heating wire (13) and described
Lower intensity within the temperature range of thermocouple (6) control.
4. vacuum and low temperature metal sealing device according to claim 3, it is characterised in that heating mounting flange (4)
Be provided with carries out the first high-temperature insulation pipe (7) and the second high-temperature insulation pipe (12) of insulation protection to the electric furnace heating wire (13), with
And the high-temperature insulation set (14) of insulation protection is carried out to the extraction wire of the electric furnace heating wire (13)；Heating mounting flange (4)
On be additionally provided with the annular fixation clip (15) is fixed by the electric furnace heating wire (13).
5. the vacuum and low temperature metal sealing device according to any one of claim 1-4, it is characterised in that the heating is fixed
Flange (4) is connected with each other with the first plug-in type chuck (19) by push rod (18), and described taper sealing flange (10) pass through push rod
(18) it is connected with each other with the second plug-in type chuck (22), the first plug-in type chuck (19) and the second plug-in type chuck
(22) it is respectively semi-circular plug-in type chuck and docks the annular chuck to be formed.
6. vacuum and low temperature metal sealing device according to claim 5, it is characterised in that the first Dewar vessel (17)
The first plug-in type chuck (19) and described second of chuck shape in a ring are respectively put into the second Dewar vessel (28)
In plug-in type chuck (22), through the first plug-in type chuck (19) of chuck shape in a ring and the second plug-in type chuck
(22) hydraulic pressure draw-bar bolt (21) is additionally provided with, and hydraulic pressure draw-bar bolt (21) are in lower drive of high-voltage oil cylinder (26) effect described the
One Dewar vessel (17) and second Dewar vessel (28) are docked or are separated.
7. vacuum and low temperature metal sealing device according to claim 6, it is characterised in that sets in high-voltage oil cylinder (26)
There are the piston (25) being connected with hydraulic pressure draw-bar bolt (21), high-voltage oil cylinder (26) to be also associated with connecting container (50),
Five logical (30,33) being interconnected on liquid with the high-voltage oil cylinder (26), the height is provided with connection container (50)
Being flowed by liquid between compressing cylinder (26) and connection container (50) causes piston (25) to travel forward or transport backward
Move to drive hydraulic pressure draw-bar bolt (21), so that first Dewar vessel (17) and second Dewar vessel
(28) docked or separated.
8. vacuum and low temperature metal sealing device according to claim 7, it is characterised in that high-voltage oil cylinder (26) and institute
State medial side oil pipe (40,42) and the lateral oil pipe in outside (41,43) is provided between connection container (50)；Wherein, the inner side
Lateral oil pipe (40,42) promotes the piston (25) to move backward when working, to drive described hydraulic pressure draw-bar bolt (21) to cause
First Dewar vessel (17) and second Dewar vessel (28) are docked；Outside lateral oil pipe (41,43) work
As when promote the piston (25) to travel forward, with drive described hydraulic pressure draw-bar bolt (21) cause first Dewar vessel
(17) separated with second Dewar vessel (28).
9. vacuum and low temperature metal sealing device according to claim 8, it is characterised in that high-voltage oil cylinder (26) include
Four groups of high-voltage oil cylinders, described five logical (30,33) include that first five of the front end path of connection four groups of high-voltage oil cylinders is led to
(30) and connect four groups of high-voltage oil cylinders back-end path second five logical (33)；The both sides of high-voltage oil cylinder (26) are also
Be provided with nut (29) is blocked up after nut (23) and oil cylinder to blocking up before the oil cylinder that blocked before and after which respectively, stifled nut after the oil cylinder
(29) it is additionally provided with and block up after the oil cylinder in the high-voltage oil cylinder (26) nut spanner hole (27) for secures it within；The hydraulic pressure
Stay-bolt (21) is installed to before the oil cylinder by hydraulic pressure draw-bar bolt seal nut (35) and sealing ring (36) and blocks up nut
(23) on.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610151601.1A CN105673850B (en) | 2016-03-16 | 2016-03-16 | A kind of vacuum and low temperature metal sealing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610151601.1A CN105673850B (en) | 2016-03-16 | 2016-03-16 | A kind of vacuum and low temperature metal sealing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105673850A CN105673850A (en) | 2016-06-15 |
| CN105673850B true CN105673850B (en) | 2017-03-15 |
Family
ID=56215245
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610151601.1A Expired - Fee Related CN105673850B (en) | 2016-03-16 | 2016-03-16 | A kind of vacuum and low temperature metal sealing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105673850B (en) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4372565A (en) * | 1981-03-17 | 1983-02-08 | Baker Manufacturing Company | Soft metal seal |
| US6678937B2 (en) * | 2000-10-26 | 2004-01-20 | Kimball Physics, Inc. | Alternative method for sealing all-metal vacuum joints |
| US20050173870A1 (en) * | 2004-02-05 | 2005-08-11 | Seagate Technology Llc | Heat-assisted hermetic spring seal |
| CN100584581C (en) * | 2007-12-21 | 2010-01-27 | 广东联塑科技实业有限公司 | Connection sealing device for cooling case-hardening vacuum box on pipe production line |
| CN202756611U (en) * | 2012-08-11 | 2013-02-27 | 宁波康润机械科技有限公司 | Box seal device |
| CN103968073B (en) * | 2014-05-05 | 2016-03-02 | 中国科学院长春光学精密机械与物理研究所 | In ultrahigh vacuum, high heat carries the connection set of optical element cooling water channel sealing |
-
2016
- 2016-03-16 CN CN201610151601.1A patent/CN105673850B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN105673850A (en) | 2016-06-15 |
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