CN105657951A - Device for heating plasma by means of H11 mode electromagnetic waves in round waveguide - Google Patents
Device for heating plasma by means of H11 mode electromagnetic waves in round waveguide Download PDFInfo
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- CN105657951A CN105657951A CN201610165265.6A CN201610165265A CN105657951A CN 105657951 A CN105657951 A CN 105657951A CN 201610165265 A CN201610165265 A CN 201610165265A CN 105657951 A CN105657951 A CN 105657951A
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- waveguide
- circular waveguide
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/02—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma
- H05H1/16—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma using externally-applied electric and magnetic fields
- H05H1/18—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma using externally-applied electric and magnetic fields wherein the fields oscillate at very high frequency, e.g. in the microwave range, e.g. using cyclotron resonance
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- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
- Drying Of Semiconductors (AREA)
Abstract
The invention provides a device for heating plasma by means of H11 mode electromagnetic waves in a round waveguide and belongs to the technical field of heating plasma by means of the electromagnetic waves. The method is used for being applicable to research of effects generated when the plasma is heated by means of the H11 mode electromagnetic waves. Experiment requirements of microwaves with different powers on acceleration characteristics of the plasma are observed continuously by changing microwave power. The outline of a waveguide connection body is in a circular truncated cone shape, a small-end inlet of the waveguide connection body is vertically connected with an outlet of a receiving pipeline, and a ferrite insulator is arranged in the receiving pipeline. Microwave signals emitted by a microwave generator to an inlet of the receiving pipeline enter the small-end inlet of the waveguide connection body through the ferrite insulator, a large-end outlet of the waveguide connection body is communicated with an inlet of the round waveguide, a vacuum microwave window is disposed between the waveguide connection body and the round waveguide, and two pipelines are arranged on the left side and the right side of the round waveguide respectively and are vertically communicated with the round waveguide. The device is mainly used for heating the plasma.
Description
Technical field
The invention belongs to the technical field of heating of hertzian wave article on plasma body.
Background technology
1879, SirWilliamCrookes divided material the 4th state into plasma body. By this viewpoint, when a certain material is heated from low temperature, become liquid from solid-state thawing gradually, and then flash to gaseous state. Finally, if continuing heating further, temperature raises, and single atom will split into the ion of many electronics and positively charged, defines the 4th state, i.e. plasma body of material. This term of plasma body proposes by IrvingLangmuir nineteen eighty-two, and implication is the aggregate of the approximate electric neutrality of ion and electronic population. It is passable, also not necessarily must comprise background neutral gas, and Electric and magnetic fields can be responded by it. Plasma body is different from the main feature of common gases and common ionized gas: the particle in this collective, by electromagnetic field, namely novel interaction occurs by means of long range force. In fact, the particle in this collective and the electromagnetic field (people are referred to as self-consistent field (SCF)) of the electromagnetic field produced by these particles and particle interaction together form an entirety.
There is complex structure in the heating unit of existing hertzian wave article on plasma body, and environment in plasma body internal passages is poor, obstruction is caused to the acceleration of plasma, the problem making the corresponding accuracy of ionization plasma of investigation low, now needs a kind of a kind of plasma heating device high for experiment demand investigation accuracy badly.
Summary of the invention
The present invention adapts at H11In the research of the effect that the heating of pattern hertzian wave article on plasma body produces, for change microwave power, the time length investigates the experiment demand of different capacity microwave article on plasma body accelerating performance, thus provides H in a kind of circular waveguide11The heating unit of pattern hertzian wave article on plasma body.
H in circular waveguide11The heating unit of pattern hertzian wave article on plasma body, it comprises microwave generator, ferrite shackle, detector, waveguide junctor, vacuum microwave window, 4 vacuum pumps, circular waveguide, two pipelines, microwave pad and magnet-wire circle;
Waveguide junctor comprises waveguide and connects main body and accepts tubing, and it is truncated cone-shaped that waveguide connects the outline of main body, and waveguide connects the little end entrance of main body and is connected in vertical with the outlet of accepts tubing; Ferrite shackle is set in accepts tubing;
The microwave signal that described microwave generator is launched to accepts tubing entrance enters, through ferrite shackle, the little end entrance that waveguide connects main body, the mouth that brings out greatly that waveguide connects main body is connected with the entrance of circular waveguide, between waveguide connection main body and circular waveguide, vacuum microwave window is set, two pipelines are separately positioned on the left and right sides of circular waveguide, with circular waveguide vertical connection, and two pipelines are located on the same line
The tube wall of two pipelines is all wound with magnet-wire circle;
Accepts tubing is offered hole, in this hole, has been inserted with detector, for the microwave signal of detection flows after ferrite shackle;
In 4 described vacuum pumps, first vacuum pump is arranged on one end of circular waveguide, and the 2nd vacuum pump is arranged on the other end of circular waveguide, and the 3rd vacuum pump is arranged on a pipeline, and the 4th vacuum pump is arranged on another root pipeline;
It is inserted with microwave pad in the other end of circular waveguide.
Plasma body generally can comprise the incomplete ionization plasma body of part ionization, and this type of plasma body is continued heating, finally can become fully ionized plasma. Therefore significant with the heating of hertzian wave article on plasma body in this experiment.
The useful effect that the present invention brings is that the present invention can study H11The effect that the heating of pattern hertzian wave article on plasma body produces. Can by changing microwave power, the time length investigates the accelerating performance of different capacity microwave article on plasma body.
H in circular waveguide of the present invention11The structure of the heating unit of pattern hertzian wave article on plasma body is simple, provides good movement environment to the acceleration of plasma body so that the accuracy of the accelerating performance investigating plasma body improves more than 5%.
Accompanying drawing explanation
Fig. 1 is H in circular waveguide of the present invention11The principle schematic of the heating unit of pattern hertzian wave article on plasma body;
Fig. 2 is the Distribution of Magnetic Field figure of the multistage focusing magnetic field produced in pipeline.
Embodiment
Embodiment one: present embodiment is described see Fig. 1 and Fig. 2, H in the circular waveguide described in present embodiment11The heating unit of pattern hertzian wave article on plasma body, it comprises microwave generator 1, ferrite shackle 2, detector 3, waveguide junctor 4, vacuum microwave window 5,4 vacuum pumps 6, circular waveguide 7, two pipelines 8, microwave pad 9 and magnet-wire circle 10;
Waveguide junctor 4 comprises waveguide and connects main body 4-1 and accepts tubing 4-2, and it is truncated cone-shaped that waveguide connects the outline of main body 4-1, and waveguide connects the little end entrance of main body 4-1 and is connected in vertical with the outlet of accepts tubing 4-2; Ferrite shackle 2 is set in accepts tubing 4-2;
The microwave signal that described microwave generator 1 is launched to accepts tubing 4-2 entrance enters, through ferrite shackle 2, the little end entrance that waveguide connects main body 4-1, the mouth that brings out greatly that waveguide connects main body 4-1 is connected with the entrance of circular waveguide 7, between waveguide connection main body 4-1 and circular waveguide 7, vacuum microwave window 5 is set, two pipelines 8 are separately positioned on the left and right sides of circular waveguide 7, with circular waveguide 7 vertical connection, and two pipelines 8 are located on the same line
The tube wall of two pipelines 8 is all wound with magnet-wire circle 10;
Accepts tubing 4-2 offers hole, in this hole, has been inserted with detector 3, for the microwave signal of detection flows after ferrite shackle 2;
In 4 described vacuum pumps 6, first vacuum pump 6 is arranged on one end of circular waveguide 7, and the 2nd vacuum pump 6 is arranged on the other end of circular waveguide 7, and the 3rd vacuum pump 6 is arranged on a pipeline 8, and the 4th vacuum pump 6 is arranged on another root pipeline 8;
Microwave pad 9 it is inserted with in the other end of circular waveguide 7.
In present embodiment, there is microwave in microwave generator 1, the H in waveguide junctor 410The H that pattern hertzian wave is converted in circular waveguide 711Pattern hertzian wave, 4 vacuum pumps 6 are respectively used to be vacuumized by the air in the passage at its place, remove and affect response when plasma body affects by microwave, it is to increase the accuracy accelerating performance of different capacity microwave article on plasma body investigated.
The electric field formed that is energized because of magnet-wire circle 10 is zero on the axis of circular waveguide 7, and diameter axially is namely: level off to two pipelines 8 end direction on increase gradually, make the motion of plasma body in circular waveguide 7 by the interference of ambient conditions, it is to increase the accuracy accelerating performance of different capacity microwave article on plasma body investigated.
H in circular waveguide described in embodiment two: present embodiment is described see Fig. 1, present embodiment and embodiment one11The difference of the heating unit of pattern hertzian wave article on plasma body is, it also comprises electrostatic analyzer 11 and mass spectrograph 12;
The electrostatic of the ionic fluid that described electrostatic analyzer 11 exports for detecting the other end of circular waveguide 7;
Mass spectrograph 12 is for carrying out separation and detection to the ionic fluid that the other end of circular waveguide 7 exports.
Present embodiment, the effect that the heating of application hertzian wave article on plasma body produces. Can by changing microwave power, the time length investigates the accelerating performance of different capacity microwave article on plasma body, is directly analyzed the characteristic of plasma body by electrostatic analyzer 11 and mass spectrograph 12.
H in circular waveguide described in embodiment three: present embodiment is described see Fig. 1, present embodiment and embodiment one11The difference of the heating unit of pattern hertzian wave article on plasma body is, the diameter of described circular waveguide 7 is 14cm, and the length of pipeline 8 is 6m, and the diameter of pipeline 8 is 4cm.
Present embodiment, in use, microwave is produced with pulse form by microwave generator 1, and in circular waveguide 7, field intensity can reach 7kVcm in the present invention-1, the H in waveguide junctor 410The H that pattern hertzian wave is converted in circular waveguide 711Pattern hertzian wave. The end of two pipelines 8 is the input terminus of the plasma source of pulsed plasma discharge type. End at two pipelines 8 leads to into gas, and its gaseous tension is higher at the end of two pipelines 8, arrives in circular waveguide 7 lower. The magnet-wire circle 10 being wound around on the tube wall of two pipelines 8 is energized in the form of a pulse, longitudinal magnetic field B=100G to 200G is produced in two pipelines 8, T=20ms, voltage U=the 10kV of the pulse that magnet-wire circle 10 is connected joins in the discharge tube of two pipelines 8, forming multistage focusing magnetic field in two pipelines 8 is 50cm length, the electric field formed is zero on the axis of circular waveguide 7, and diameter axially is namely: level off to two pipelines 8 end direction on increase gradually.
H in circular waveguide described in embodiment four: present embodiment is described see Fig. 1, present embodiment and embodiment one11The difference of the heating unit of pattern hertzian wave article on plasma body is, it also comprises two vacuum pumps 6, these two vacuum pumps 6 are defined as the 5th vacuum pump 6 and the 6th vacuum pump 6 respectively, and the 5th vacuum pump 6 and the 6th vacuum pump 6 are separately positioned on two pipelines 8.
In present embodiment, the 5th vacuum pump 6 and the 6th vacuum pump 6 that increase are separately positioned on two pipelines 8, make the intensity vacuumized in two pipelines 8 stronger, in two pipelines 8, vacuum environment is more good makes the plasma body led to from two pipeline 8 end directions can move to more smoothly in circular waveguide 7, make the movement environment of plasma body not by the impact of external environment so that the response of plasma body under microwave heating condition is more accurate.
Claims (4)
1. H in circular waveguide11The heating unit of pattern hertzian wave article on plasma body, it is characterized in that, it comprises microwave generator (1), ferrite shackle (2), detector (3), waveguide junctor (4), vacuum microwave window (5), 4 vacuum pumps (6), circular waveguide (7), two pipelines (8), microwave pad (9) and magnet-wire circle (10);
Waveguide junctor (4) comprises waveguide and connects main body (4-1) and accepts tubing (4-2), it is truncated cone-shaped that waveguide connects the outline of main body (4-1), and waveguide connects the little end entrance of main body (4-1) and is connected in vertical with the outlet of accepts tubing (4-2); Ferrite shackle (2) is set in accepts tubing (4-2);
The microwave signal that described microwave generator (1) is launched to accepts tubing (4-2) entrance enters, through ferrite shackle (2), the little end entrance that waveguide connects main body (4-1), the mouth that brings out greatly that waveguide connects main body (4-1) is connected with the entrance of circular waveguide (7), between waveguide connection main body (4-1) and circular waveguide (7), vacuum microwave window (5) is set, two pipelines (8) are separately positioned on the left and right sides of circular waveguide (7), with circular waveguide (7) vertical connection, and two pipelines (8) are located on the same line,
The tube wall of two pipelines (8) is all wound with magnet-wire circle (10);
Accepts tubing (4-2) offers hole, in this hole, has been inserted with detector (3), for the microwave signal of detection flows after ferrite shackle (2);
In 4 described vacuum pumps (6), first vacuum pump (6) is arranged on one end of circular waveguide (7), 2nd vacuum pump (6) is arranged on the other end of circular waveguide (7), 3rd vacuum pump (6) is arranged on a pipeline (8), and the 4th vacuum pump (6) is arranged on another root pipeline (8);
Microwave pad (9) it is inserted with in the other end of circular waveguide (7).
2. H in circular waveguide according to claim 111The heating unit of pattern hertzian wave article on plasma body, it is characterised in that, it also comprises electrostatic analyzer (11) and mass spectrograph (12);
The electrostatic of the ionic fluid that described electrostatic analyzer (11) exports for detecting the other end of circular waveguide (7);
Mass spectrograph (12) is for carrying out separation and detection to the ionic fluid that the other end of circular waveguide (7) exports.
3. H in circular waveguide according to claim 111The heating unit of pattern hertzian wave article on plasma body, it is characterised in that, the diameter of described circular waveguide (7) is 14cm, and the length of pipeline (8) is 6m, and the diameter of pipeline (8) is 4cm.
4. H in circular waveguide according to claim 111The heating unit of pattern hertzian wave article on plasma body, it is characterized in that, it also comprises two vacuum pumps (6), these two vacuum pumps (6) are defined as the 5th vacuum pump (6) and the 6th vacuum pump (6) respectively, and the 5th vacuum pump (6) and the 6th vacuum pump (6) are separately positioned on two pipelines (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610165265.6A CN105657951B (en) | 2016-03-22 | 2016-03-22 | H in circular waveguide11The heating unit of pattern electromagnetic wave plasma |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610165265.6A CN105657951B (en) | 2016-03-22 | 2016-03-22 | H in circular waveguide11The heating unit of pattern electromagnetic wave plasma |
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| CN105657951A true CN105657951A (en) | 2016-06-08 |
| CN105657951B CN105657951B (en) | 2018-06-12 |
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| CN201610165265.6A Expired - Fee Related CN105657951B (en) | 2016-03-22 | 2016-03-22 | H in circular waveguide11The heating unit of pattern electromagnetic wave plasma |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108243550A (en) * | 2016-12-23 | 2018-07-03 | 韩国基础科学支援研究院 | Linear electromagnetic wave plasma source and use its plasma processing apparatus |
Citations (5)
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|---|---|---|---|---|
| US5361016A (en) * | 1992-03-26 | 1994-11-01 | General Atomics | High density plasma formation using whistler mode excitation in a reduced cross-sectional area formation tube |
| US20040140778A1 (en) * | 2003-01-15 | 2004-07-22 | Andrei Petrin | Plasma generation system |
| CN103945625A (en) * | 2014-05-12 | 2014-07-23 | 哈尔滨工业大学 | Heating device for plasmas by use of H01-mode electromagnetic waves in circular waveguide |
| CN103974516A (en) * | 2014-05-22 | 2014-08-06 | 哈尔滨工业大学 | Microwave and plasma interacting device in magnetic plasma under condition that magnetic field and electric field are perpendicular |
| CN103968882A (en) * | 2014-05-22 | 2014-08-06 | 哈尔滨工业大学 | Test device for mutual action of microwaves and flux-weakening plasma |
-
2016
- 2016-03-22 CN CN201610165265.6A patent/CN105657951B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5361016A (en) * | 1992-03-26 | 1994-11-01 | General Atomics | High density plasma formation using whistler mode excitation in a reduced cross-sectional area formation tube |
| US20040140778A1 (en) * | 2003-01-15 | 2004-07-22 | Andrei Petrin | Plasma generation system |
| CN103945625A (en) * | 2014-05-12 | 2014-07-23 | 哈尔滨工业大学 | Heating device for plasmas by use of H01-mode electromagnetic waves in circular waveguide |
| CN103974516A (en) * | 2014-05-22 | 2014-08-06 | 哈尔滨工业大学 | Microwave and plasma interacting device in magnetic plasma under condition that magnetic field and electric field are perpendicular |
| CN103968882A (en) * | 2014-05-22 | 2014-08-06 | 哈尔滨工业大学 | Test device for mutual action of microwaves and flux-weakening plasma |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108243550A (en) * | 2016-12-23 | 2018-07-03 | 韩国基础科学支援研究院 | Linear electromagnetic wave plasma source and use its plasma processing apparatus |
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Inventor after: Wang Jinyu Inventor after: Jiang Xiaonan Inventor after: Jiang Nan Inventor after: Ren Shuang Inventor after: Zhang Yuxin Inventor after: Xu Yang Inventor before: Zhao Hailong Inventor before: Zhang Yan Inventor before: Jiang Nan Inventor before: Fu Guangjie Inventor before: Sun Zhigang Inventor before: Zhao Kun |
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