CN105653100B - A kind of array substrate and preparation method thereof, display panel - Google Patents

A kind of array substrate and preparation method thereof, display panel Download PDF

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Publication number
CN105653100B
CN105653100B CN201610200669.4A CN201610200669A CN105653100B CN 105653100 B CN105653100 B CN 105653100B CN 201610200669 A CN201610200669 A CN 201610200669A CN 105653100 B CN105653100 B CN 105653100B
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China
Prior art keywords
line
supporting block
touch
control sensing
insulating layer
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CN105653100A (en
Inventor
于泉鹏
袁永
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Tianma Microelectronics Co Ltd
Shanghai Tianma Microelectronics Co Ltd
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Tianma Microelectronics Co Ltd
Shanghai Tianma Microelectronics Co Ltd
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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0412Digitisers structurally integrated in a display

Abstract

The invention discloses a kind of array substrate and preparation method thereof, display panels, wherein the array substrate includes:Underlay substrate, and multiple data lines, multi-strip scanning line, at least one touch-control sensing line and at least one supporting block on underlay substrate;Supporting block is corresponded with touch-control sensing line, and touch-control sensing line is arranged in the top of corresponding supporting block;Supporting block is adjacent at least one data line and/or at least one scan line and is arranged in parallel;The height of supporting block is more than the height of data line, and/or, the height of supporting block is more than the height of scan line.The present invention can not only solve the problems, such as that touch-control sensing line and the data line parallel with touch-control sensing line and/or scan line have overlapping, additionally it is possible to increase aperture opening ratio.

Description

A kind of array substrate and preparation method thereof, display panel
Technical field
The present invention relates to display technology field more particularly to a kind of array substrate and preparation method thereof, display panels.
Background technology
With the rapid development of display technology, the application of display device is also more and more extensive.With the development of science and technology, only having There is the display device of display function that cannot meet the needs of people.In order to meet the needs of people, production firm works out The display device of integrated touch function.
The display device of integrated touch function is to integrate touch function in existing display device to be formed.In order to realize Touch function can be made touch-control sensing line in a display device and be sensed with the touching signals to user.It is simple in order to design And it is simple for production, generally touch-control sensing line and original data line and/or scan line in display device are arranged in parallel, and will touch Control the region (light tight region) of the black matrix" covering of sense wire, data line and scan line setting in a display device.
It is above-mentioned by touch-control sensing line and data line and/or scan line scheme disposed in parallel for touch-control sensing line and with touch The spacing controlled between sense wire parallel data line and/or scan line is a kind of challenge:If spacing is excessive, although making simpler It is single, still, since touch-control sensing line, data line and scan line are arranged in light tight region, holding for display device can be reduced Mouth rate;If spacing is too small, when making due to aligning accuracy, touch-control sensing line and parallel with touch-control sensing line can be caused Data line and/or scan line have the phenomenon that overlapping, can increase touch-control sensing line and the data line parallel with touch-control sensing line and/ Or the parasitic capacitance between scan line, to will increase the load of touch-control.
Invention content
A kind of array substrate of offer of the embodiment of the present invention and preparation method thereof, display panel, to solve to touch in the prior art Control the excessive or too small problem of spacing between sense wire and the data line parallel with touch-control sensing line and/or scan line.
For this purpose, the present invention uses following technical scheme:
In a first aspect, an embodiment of the present invention provides a kind of array substrates, including:Underlay substrate, and it is located at the lining Multiple data lines, multi-strip scanning line, at least one touch-control sensing line on substrate and at least one supporting block;
The supporting block is corresponded with the touch-control sensing line, and the touch-control sensing line is arranged in the corresponding support The top of block;
The supporting block is adjacent at least one data line and/or at least one scan line and is arranged in parallel;
The height of the supporting block is more than the height of the data line, and/or, the height of the supporting block is more than described sweep Retouch the height of line.
Second aspect, the embodiment of the present invention additionally provide a kind of display panel, including:Array base described in first aspect Plate.
The third aspect, the production method that the embodiment of the present invention additionally provides a kind of array substrate as described in relation to the first aspect, Including:
Underlay substrate is provided;
Multiple data lines, multi-strip scanning line, at least one touch-control sensing line and at least are formed on the underlay substrate One supporting block;
Wherein, the supporting block is corresponded with the touch-control sensing line, and the touch-control sensing line is arranged in corresponding institute State the top of supporting block;
The supporting block is adjacent at least one data line and/or at least one scan line and is arranged in parallel;
The height of the supporting block is more than the height of the data line, and/or, the height of the supporting block is more than described sweep Retouch the height of line.
Array substrate provided in an embodiment of the present invention and preparation method thereof, display panel, by under touch-control sensing line Side's setting supporting block, and supporting block is adjacent at least one data line and/or scan line and is arranged in parallel, and realizes touch-control sensing Not the phenomenon that line and the data line parallel with touch-control sensing line and/or scan line do not have overlapping, to which touch-control sensing will not be increased Parasitic capacitance between line and the data line parallel with touch-control sensing line and/or scan line, into the load without increasing touch-control; And using supporting block realize touch-control sensing line and the distance between the data line parallel with touch-control sensing line and/or scan line compared with It is small, so as to increase aperture opening ratio.
Description of the drawings
By reading a detailed description of non-restrictive embodiments in the light of the attached drawings below, of the invention other Feature, objects and advantages will become more apparent upon:
Fig. 1 is a kind of schematic top plan view of the structure of realization method of array substrate provided in an embodiment of the present invention.
Fig. 2 is the schematic cross-sectional view of the structure along line A-A in Fig. 1.
Fig. 3 is the schematic top plan view of the structure of another realization method of array substrate provided in an embodiment of the present invention.
Fig. 4 is the schematic cross-sectional view of the structure along line B-B in Fig. 3.
Fig. 5 is the schematic top plan view of the structure of another realization method of array substrate provided in an embodiment of the present invention.
Fig. 6 is the schematic cross-sectional view of the structure along line C-C in Fig. 5.
Fig. 7 is a kind of schematic top plan view of the structure of realization method of color membrane substrates provided in an embodiment of the present invention.
Fig. 8 is a kind of flow diagram of realization method of the production method of array substrate provided in an embodiment of the present invention.
Fig. 9 is the flow signal of another realization method of the production method of array substrate provided in an embodiment of the present invention Figure.
Figure 10 is the flow signal of another realization method of the production method of array substrate provided in an embodiment of the present invention Figure.
Figure 11 is the flow signal of another realization method of the production method of array substrate provided in an embodiment of the present invention Figure.
Figure 12 is that supporting block is formed on insulating layer in the production method of array substrate provided in an embodiment of the present invention A kind of realization method flow diagram.
Figure 13 is step in the production method of the array substrate provided in an embodiment of the present invention shape successively on insulating layer At the schematic cross-sectional view of insulating layer and the structure on barrier layer.
Figure 14 be step in the production method of array substrate provided in an embodiment of the present invention to insulating layer and barrier layer into Row etching, forms the schematic cross-sectional view of the structure of collets and stopper.
Figure 15 is structure of the step in the production method of array substrate provided in an embodiment of the present invention in formation supporting block On formed metal layer structure schematic cross-sectional view.
Specific implementation mode
The present invention is described in further detail with reference to the accompanying drawings and examples.It is understood that this place is retouched The specific embodiment stated is used only for explaining the present invention rather than limitation of the invention.It also should be noted that in order to just In description, only some but not all contents related to the present invention are shown in the drawings.
An embodiment of the present invention provides a kind of array substrates.
Fig. 1 is a kind of schematic top plan view of the structure of realization method of array substrate provided in an embodiment of the present invention.Fig. 2 is Along the schematic cross-sectional view of the structure of line A-A in Fig. 1.As depicted in figs. 1 and 2, which includes:Underlay substrate 101, and Multiple data lines 102, multi-strip scanning line 103, at least one touch-control sensing line 104 and at least one on underlay substrate 101 A supporting block 105.
Wherein, supporting block 105 is corresponded with touch-control sensing line 104, and touch-control sensing line 104 is arranged in corresponding supporting block 105 top;Supporting block 105 is adjacent at least one data line 102 and is arranged in parallel;The height of supporting block 105 is more than data The height (realizing the electrical isolation between touch-control sensing line 104 and data line 102) of line 102.
The array substrate that Fig. 1 and Fig. 2 is provided by the way that supporting block 105 is arranged in the lower section of touch-control sensing line 104, and supports Block 105 is adjacent at least one data line 102 and is arranged in parallel, and realizes touch-control sensing line 104 and flat with touch-control sensing line 104 Not the phenomenon that capable data line 102 does not have overlapping, to which touch-control sensing line 104 and parallel with touch-control sensing line 104 will not be increased Data line 102 between parasitic capacitance, into without increase touch-control load;And realize touch-control sense using supporting block 105 The distance between survey line 104 and the data line 102 parallel with touch-control sensing line 104 are smaller, so as to increase aperture opening ratio.
Fig. 1 and Fig. 2 shows array substrate realization method in, touch-control sensing line 104 and all data lines 102 are homogeneous It is adjacent, it is to be understood that due in actual design process, the number of the quantity of required touch-control sensing line 104 than data line 102 Amount is few, and therefore, touch-control sensing line 104 can also be only adjacent with segment data line 102.Fig. 1 and Fig. 2 shows array substrate In data line 102, scan line 103, length, the width and thickness of touch-control sensing line 104 and support column 105 be for illustrating The structure of array substrate provided in an embodiment of the present invention is schematically described and is illustrated, and is not limited it at this It is fixed, such as:Data line 102, scan line 103 and touch-control sensing line 104 are generally made by metal wire, at this point, it is thinner, I.e.:Width is smaller.It is understood that Fig. 1 and Fig. 2 illustrate only the knot of part related to the present invention in array substrate Structure does not show that the entire infrastructure of array substrate, those skilled in the art can be retouched in conjunction with the prior art and the embodiment of the present invention The content stated obtains the entire infrastructure of array substrate.
Touch-control sensing line 104 and adjacent at least one data line of supporting block 105 corresponding with touch-control sensing line 104 102 can be made in same manufacture craft.Such manufacture craft mode, can be formed simultaneously touch-control sensing line 104 and with touch At least one adjacent data line 102 of sense wire 104 is controlled, technological process can be saved.
Since in actual design process, the quantity of required touch-control sensing line 104 is fewer than the quantity of data line 102, because This, manufactured data line 102 is the data line in array substrate in same manufacture craft with touch-control sensing line 104 at this time 102 part, in addition, data line 102 not adjacent with touch-control sensing line 104 can also be with touch-control sensing line 104 same It is made in manufacture craft, such manufacture craft can save technological process and reduce process complexity.
Particularly, can be identical as the quantity of data line 102 by the quantitative design of touch-control sensing line 104, at this point, all Data line 102 can be made in same manufacture craft with touch-control sensing line 104, manufacture craft can be simplified, made Required touch-control sensing line 104 is only electrically connected by Cheng Hou with chip, and unwanted touch-control sensing line 104 is not electric with chip Connection, since the distance between touch-control sensing line 104 and the data line 102 adjacent with touch-control sensing line 104 are smaller and touch-control sense Survey line 104 is relatively thin, and the touch-control sensing line 104 not being electrically connected with chip will not increase aperture opening ratio.
As shown in Fig. 2, supporting block 105 may include the collets 106 stacked gradually from bottom to top and stopper 107.
Wherein, the material of collets 106 can be silicon nitride or organic film;The material of stopper 107 can be titanium.
It should be noted that when the material of stopper 107 is titanium, it, can be conductive although titanium is metal, due to it Resistivity is larger, cannot be multiplexed with touch-control sensing line 104, therefore, it is also desirable to smaller using resistivity in the top of stopper 107 (such as:Aluminium) material make touch-control sensing line 104.The presence of stopper 107 be in order to form collets 106, it is specific in Hold the production method that can be found in the array substrate that the following embodiments of the present invention provide, details are not described herein.
As shown in Fig. 2, the cross sectional shape of supporting block 105 can be inverted trapezoidal.It should be noted that supporting block 105 is cut Face shape can also be rectangle.It, can be same in utilization by setting the cross sectional shape of supporting block 105 to rectangle or inverted trapezoidal Manufacture craft is made touch-control sensing line 104 and when with touch-control sensing 104 adjacent data line 102 of line, realizes touch-control sensing line The edge 108 and data line 102 of the 104 close data lines 102 adjacent with touch-control sensing line 104 are close adjacent with data line 102 The distance between the edge 109 of touch-control sensing line 104 be 0.
As shown in Fig. 2, touch-control sensing line 104, and supporting block 105 corresponding with touch-control sensing line 104 are adjacent at least The spacing that a data line 102 projects on underlay substrate 101 is 0, i.e.,:It is described above " touch-control sensing line 104 it is close with it is tactile Control the edge 108 and the close touch-control sensing line adjacent with data line 102 of data line 102 of the adjacent data line 102 of sense wire 104 The distance between 104 edge 109 is 0 ".Such set-up mode, can by touch-control sensing line 104 and with touch-control sensing line 104 The distance between adjacent data line 102 accomplishes minimum, so as to increase aperture opening ratio to the full extent.
As shown in Fig. 2, the array substrate further includes:First insulating layer 110.
Wherein, scan line 103 is located at (not shown) between underlay substrate 101 and the first insulating layer 110;Supporting block 105 and data line 102 be located on the first insulating layer 110.I.e.:Scan line 103 is located at the lower section of 102 place film layer of data line.
As shown in Figure 1, the array substrate further includes:Multiple pixel units 111.
Fig. 3 is the schematic top plan view of the structure of another realization method of array substrate provided in an embodiment of the present invention.Fig. 4 It is the schematic cross-sectional view of the structure in Fig. 3 along line B-B.As Figure 1-Figure 4, with Fig. 1 and Fig. 2 shows array substrate realization Mode is no to be, in the realization method of Fig. 3 and the array substrate shown in Fig. 4, supporting block 105 and at least one scan line 103 It is adjacent and be arranged in parallel;The height that the height of supporting block 105 is more than scan line 103 (realizes touch-control sensing line 104 and scan line Electrical isolation between 103).The array substrate further includes:Second insulating layer 112.Wherein, data line 102 is located at underlay substrate 101 The (not shown) between second insulating layer 112;Supporting block 105 and scan line 103 are located on second insulating layer 112.
The array substrate that Fig. 3 and Fig. 4 is provided by the way that supporting block 105 is arranged in the lower section of touch-control sensing line 104, and supports Block 105 is adjacent at least one scan line 103 and is arranged in parallel, and realizes touch-control sensing line 104 and flat with touch-control sensing line 104 Not the phenomenon that capable scan line 103 does not have overlapping, to which touch-control sensing line 104 and parallel with touch-control sensing line 104 will not be increased Scan line 103 between parasitic capacitance, into without increase touch-control load;And realize touch-control sense using supporting block 105 The distance between survey line 104 and the scan line 103 parallel with touch-control sensing line 104 are smaller, so as to increase aperture opening ratio.
Details are not described herein for other contents in array substrate shown in Fig. 3 and Fig. 4, reference can be made to Fig. 1 and Fig. 2 shows battle array Row substrate.
Fig. 5 is the schematic top plan view of the structure of another realization method of array substrate provided in an embodiment of the present invention.Fig. 6 It is the schematic cross-sectional view of the structure in Fig. 5 along line C-C.As shown in Figure 1, Figure 2, shown in Fig. 5 and Fig. 6, with Fig. 1 and Fig. 2 shows array Unlike substrate, Fig. 5 and the array substrate shown in Fig. 6 further include:A plurality of grid line 113.
Wherein, grid line 113 is vertical with data line 102, and scan line 103 is parallel with data line 102;Every scan line 103 with Corresponding at least one grid line 113 is electrically connected.Scan line 103 is provided for often row pixel unit 111 by grid line 113 and is swept accordingly Retouch signal.
Supporting block 105 is adjacent at least one data line 102 and at least one scan line 103 and is arranged in parallel;Supporting block 105 height is more than the height of data line 102, and the height of supporting block 105 is more than the height of scan line 103.
As shown in figure 5, every scan line 103 can be electrically connected with corresponding at least one grid line 113 by via 114. I.e.:At this point, grid line 113 and scan line 103 are located at different film layers.
As shown in fig. 6, the array substrate further includes:Third insulating layer 115.
Wherein, the (not shown) between underlay substrate 101 and third insulating layer 115 of grid line 113;Supporting block 105, Scan line 103 and data line 102 are located on third insulating layer 115.
As shown in figure 5, being provided with gap 117 between per two adjacent pixel unit row 116, pixel unit row 116 prolong The direction stretched is identical with the direction that data line 102 extends, the vertical direction in as Fig. 5;Every two data line 102 is adjacent, and Two adjacent data lines 102 are set at the gap 117 of even number position;Adjacent and adjacent two of every two scan lines 103 Scan line 103 is set at the gap 117 of odd positions.It is respectively the pixel unit of both sides per two adjacent data lines 102 Row 116 provide corresponding data-signal.In addition to this, two adjacent data lines 102 can be set to the gap of odd positions At 117, adjacent two scan lines 103 can be set at the gap 117 of even number position.
As shown in fig. 6, supporting block 105 is arranged between two adjacent data lines 102, and/or, supporting block 105 is arranged Between two adjacent scan lines 103.
It should be noted that the array substrate shown in Fig. 5 and Fig. 6, since scan line 103 is corresponding by grid line 113 Pixel unit row provides corresponding scanning signal, and therefore, grid line 113 no longer needs to draw from the both sides of array substrate, therefore, battle array The both sides of row substrate do not need frame, therefore, Fig. 5 and the array substrate shown in Fig. 6 are suitble to the display panel of large scale Rimless.
The embodiment of the present invention additionally provides a kind of display panel.The display panel includes what the above embodiment of the present invention provided Array substrate.The display panel can be liquid crystal display panel, can also be organic light emitting display panel.
It can be understood that:When display panel is liquid crystal display panel, display panel further includes:It is opposite with array substrate The color membrane substrates of setting.Fig. 7 is a kind of vertical view signal of the structure of realization method of color membrane substrates provided in an embodiment of the present invention Figure.As shown in fig. 7, color membrane substrates include multiple colored light-filtering units 118 arranged in arrays, and it is located at colored light-filtering units Black matrix 119 between 118;View field of the black matrix 118 on the underlay substrate 101 in array substrate covers touch-control sensing Line 104, and at least one data line 102 and/or at least one that supporting block 105 corresponding with touch-control sensing line 104 is adjacent View field of the scan line 103 on underlay substrate 101.Since black matrix 118 is made by light-proof material, because This, such set-up mode is realized touch-control sensing line 104, and supporting block 105 corresponding with touch-control sensing line 104 is adjacent extremely Few a data line 102 and/or at least one scan line 103 are arranged in light tight region, and then do not interfere with display panel Display effect.
The embodiment of the present invention additionally provides a kind of display device.The display device includes what the above embodiment of the present invention provided Display panel.
It is understood that being integrated with touch function in the display panel and display device.It is provided in an embodiment of the present invention Display panel and display device have the attainable advantageous effect of above-mentioned array substrate institute, for details, reference can be made to above-described embodiment, This is repeated no more.
The embodiment of the present invention additionally provides a kind of production method of array substrate.
Fig. 8 is a kind of flow diagram of realization method of the production method of array substrate provided in an embodiment of the present invention. As shown in figure 8, this approach includes the following steps:
Step 801 provides underlay substrate.
Step 802, on underlay substrate formed multiple data lines, multi-strip scanning line, at least one touch-control sensing line and At least one supporting block.
Wherein, supporting block is corresponded with touch-control sensing line, and touch-control sensing line is arranged in the top of corresponding supporting block;Branch Bracer is adjacent at least one data line and/or at least one scan line and is arranged in parallel;The height of supporting block is more than data line Height, and/or, the height of supporting block is more than the height of scan line.
It can make to obtain the array substrate of above-described embodiment offer by this method.Therefore, the embodiment of the present invention provides The production method of array substrate there is the attainable advantageous effect of above-mentioned array substrate institute, for details, reference can be made to above-described embodiment, Details are not described herein.
It should be noted that the only making side with array substrate provided in an embodiment of the present invention of above method description The related part of inventive point of method, and whole contents is not depicted, those skilled in the art can be in conjunction with the prior art and this The production method for the array substrate that inventive embodiments provide obtains the full content of the production method of array substrate.In underlay substrate On form multiple data lines, multi-strip scanning line, the formation sequence of at least one touch-control sensing line and at least one supporting block can To be arbitrary, can according to the structure of array substrate to be formed specifically design.Below to Fig. 1-arrays shown in fig. 6 The production method of substrate carries out illustrative explanation.
Fig. 9 is the flow signal of another realization method of the production method of array substrate provided in an embodiment of the present invention Figure.Method shown in Fig. 9 can make to obtain Fig. 1 and Fig. 2 shows array substrate.As shown in figure 9, this method includes following step Suddenly:
Step 901 provides underlay substrate.
Step 902 forms multi-strip scanning line on underlay substrate.
The scan line that this step 902 is formed is the scan line 103 in Fig. 1.
Step 903 forms the first insulating layer on scan line.
The first insulating layer that this step 903 is formed is the first insulating layer 110 in Fig. 2.
Step 904 forms at least one supporting block on the first insulating layer.
The supporting block that this step 904 is formed is the supporting block 105 in Fig. 2, and detailed process can be found in the following examples Described content.
Step 905 forms multiple data lines on the first insulating layer, and is formed on supporting block simultaneously corresponding Touch-control sensing line, wherein supporting block are adjacent at least one data line and are arranged in parallel.
This step 905 realizes touch-control sensing line and the data line adjacent with touch-control sensing line is made in same manufacture craft It forms.Its detailed process can be:One layer of metal layer is made on the structure that step 904 is formed, due to depositing for supporting block , make metal layer when, metal layer can two edges of supporting block break, a part is retained on supporting block, a part It falls on the first insulating layer (and adjacent with supporting block), concrete structure can be found in the content described in following example;It carves again The unwanted part of eating away, the metal layer (metal layer herein forms data line) and supporting block of retention data line position it On metal layer (metal layer herein forms touch-control sensing line).
Figure 10 is the flow signal of another realization method of the production method of array substrate provided in an embodiment of the present invention Figure.Method shown in Figure 10 can make to obtain the array substrate shown in Fig. 3 and Fig. 4.As shown in Figure 10, this method includes following Step:
Step 1001 provides underlay substrate.
Step 1002 forms multiple data lines on underlay substrate.
The data line that this step 1002 is formed is the data line 102 in Fig. 3.
Step 1003 forms second insulating layer on data line.
The second insulating layer that this step 1003 is formed is the second insulating layer 112 in Fig. 4.
Step 1004 forms at least one supporting block on second insulating layer.
The supporting block that this step 1004 is formed is the supporting block 105 in Fig. 4, and detailed process can be found in the following examples Described content.
Step 1005 forms multi-strip scanning line on second insulating layer, and is formed correspond on supporting block simultaneously Touch-control sensing line, wherein supporting block is adjacent at least one scan line and is arranged in parallel.
This step 1005 realizes touch-control sensing line and the scan line adjacent with touch-control sensing line in same manufacture craft It is made.Its detailed process can be:One layer of metal layer is made on the structure that step 1004 is formed, due to supporting block In the presence of when making metal layer, metal layer can be broken at two edges of supporting block, and a part is retained on supporting block, one Divide and fall on the first insulating layer (and adjacent with supporting block), concrete structure can be found in the content described in following example;Again Unwanted part is etched away, the metal layer (metal layer herein forms scan line) and supporting block of scan line position are retained On metal layer (metal layer herein forms touch-control sensing line).
Figure 11 is the flow signal of another realization method of the production method of array substrate provided in an embodiment of the present invention Figure.Method shown in Figure 11 can make to obtain the array substrate shown in Fig. 5 and Fig. 6.As shown in figure 11, this method includes following Step:
Step 1101 provides underlay substrate.
Step 1102 forms a plurality of grid line on underlay substrate.
The grid line that this step 1102 is formed is the grid line 113 in Fig. 5.
Step 1103 forms third insulating layer on grid line.
The third insulating layer that this step 1103 is formed is the third insulating layer 115 in Fig. 6.
In addition, further including step after step 1103:The mistake in Fig. 5 is formed in third insulating layer above grid line 113 Hole 114, to be electrically connected grid line 113 with the scan line formed in corresponding following step by via 114.
Step 1104 forms at least one supporting block on third insulating layer.
The supporting block that this step 1104 is formed is the supporting block 105 in Fig. 6, and detailed process can be found in the following examples Described content.
Step 1105 forms multi-strip scanning line and multiple data lines on third insulating layer, and simultaneously in supporting block On form corresponding touch-control sensing line, wherein supporting block is adjacent at least one scan line and/or data line and is arranged in parallel.
This step 1105 realizes touch-control sensing line and the data line adjacent with touch-control sensing line and scan line in same system Make to be made in technique.Its detailed process can be:One layer of metal layer is made on the structure that step 1104 is formed, due to The presence of supporting block, make metal layer when, metal layer can two edges of supporting block break, a part be retained in supporting block it On, a part falls on the first insulating layer (and adjacent with supporting block), and concrete structure can be found in described in following example Content;Unwanted part, the metal layer (metal layer herein forms data line) of retention data line position, scanning are etched away again Metal layer (metal layer shape herein on the metal layer (metal layer herein forms scan line) and supporting block of line position At touch-control sensing line).
Figure 12 is that supporting block is formed on insulating layer in the production method of array substrate provided in an embodiment of the present invention A kind of realization method flow diagram, wherein the insulating layer can be the first insulating layer described in above-described embodiment, Two insulating layers or third insulating layer.As shown in figure 12, this approach includes the following steps:
Step 1201 sequentially forms insulating layer and barrier layer on insulating layer.
Figure 13 is step in the production method of the array substrate provided in an embodiment of the present invention shape successively on insulating layer At the schematic cross-sectional view of insulating layer and the structure on barrier layer.As shown in figure 13, insulating layer is sequentially formed on insulating layer 1301 1302 and barrier layer 1303.It should be noted that the part under insulating layer 1301, those skilled in the art are not shown in Figure 13 The structure under insulating layer 1301 can be obtained according to the content that the prior art and the embodiment of the present invention describe.
Step 1202 performs etching insulating layer and barrier layer, forms collets and stopper.
Figure 14 be step in the production method of array substrate provided in an embodiment of the present invention to insulating layer and barrier layer into Row etching, forms the schematic cross-sectional view of the structure of collets and stopper.As shown in figure 14, due to insulating layer 1302 and barrier layer The etching speed of the difference of 1303 materials, the two is also different, therefore, when being performed etching to the two, can form the knot of inverted trapezoidal Structure, collets 106 and stopper 107 constitute supporting block 105.
Figure 15 is structure of the step in the production method of array substrate provided in an embodiment of the present invention in formation supporting block On formed metal layer structure schematic cross-sectional view.As shown in figure 15, due to the presence of supporting block 105, metal layer is made When 1501, metal layer 1501 can be broken at two edges of supporting block 105, and a part is retained on supporting block 105, a part Fall that (insulating layer 1301 herein can be the first insulating layer described in above-described embodiment, second insulating layer in insulating layer 1301 Or third insulating layer) on (and adjacent with supporting block 105).
Note that above are only presently preferred embodiments of the present invention and institute's application technology principle.It will be appreciated by those skilled in the art that The present invention is not limited to specific embodiments described here, can carry out for a person skilled in the art it is various it is apparent variation, It readjusts and substitutes without departing from protection scope of the present invention.Therefore, although being carried out to the present invention by above example It is described in further detail, but the present invention is not limited only to above example, without departing from the inventive concept, also May include other more equivalent embodiments, and the scope of the present invention is determined by scope of the appended claims.

Claims (19)

1. a kind of array substrate, which is characterized in that including:Underlay substrate, and a plurality of data on the underlay substrate Line, multi-strip scanning line, at least one touch-control sensing line and at least one supporting block;
The supporting block is corresponded with the touch-control sensing line, and the touch-control sensing line is arranged in the corresponding supporting block Top;
The supporting block is adjacent at least one data line and/or at least one scan line and is arranged in parallel;
The height of the supporting block is more than the height of the data line, and/or, the height of the supporting block is more than the scan line Height;
Wherein, the touch-control sensing line, and at least one number that supporting block corresponding with the touch-control sensing line is adjacent It is 0 according to the spacing that line and/or at least one scan line project on the underlay substrate.
2. array substrate according to claim 1, which is characterized in that the touch-control sensing line, and with the touch-control sense At least one adjacent data line of the corresponding supporting block of survey line and/or at least one scan line are in same manufacture craft In be made.
3. array substrate according to claim 1, which is characterized in that the supporting block includes stacking gradually from bottom to top Collets and stopper.
4. array substrate according to claim 3, which is characterized in that the material of the collets is silicon nitride or organic Film;The material of the stopper is titanium.
5. array substrate according to claim 1, which is characterized in that the cross sectional shape of the supporting block is rectangle or the ladder that falls Shape.
6. array substrate according to claim 1, which is characterized in that further include:First insulating layer;
The scan line is between the underlay substrate and first insulating layer;
The supporting block and the data line bit are on first insulating layer.
7. array substrate according to claim 1, which is characterized in that further include:Second insulating layer;
The data line bit is between the underlay substrate and the second insulating layer;
The supporting block and the scan line are located on the second insulating layer.
8. array substrate according to claim 1, which is characterized in that further include:A plurality of grid line;
The grid line is vertical with the data line, and the scan line is parallel with the data line;
Every scan line is electrically connected with corresponding at least one grid line.
9. array substrate according to claim 8, which is characterized in that every scan line and corresponding at least one institute Grid line is stated to be electrically connected by via.
10. array substrate according to claim 8, which is characterized in that further include:Third insulating layer;
The grid line is between the underlay substrate and the third insulating layer;
The supporting block, the scan line and the data line bit are on the third insulating layer.
11. array substrate according to claim 10, which is characterized in that further include:Multiple pixel units;
It is provided with gap per between adjacent two pixel units row, the pixel unit arranges the direction extended and the data line The direction of extension is identical;
Two adjacent and adjacent data lines of every two data lines are set between odd positions or even number position At gap;
Two adjacent and adjacent scan lines of every two scan lines are set between even number position or odd positions At gap.
12. array substrate according to claim 11, which is characterized in that the supporting block be arranged it is adjacent at two described in Between data line, and/or, the supporting block is arranged between two adjacent scan lines.
13. a kind of display panel, which is characterized in that including:Any array substrates of claim 1-12.
14. display panel according to claim 13, which is characterized in that the display panel is liquid crystal display panel or has Machine light emitting display panel.
15. display panel according to claim 13, which is characterized in that further include:Color membrane substrates;
The color membrane substrates are oppositely arranged with the array substrate;
The color membrane substrates include multiple colored light-filtering units arranged in arrays, and between the colored light-filtering units Black matrix;
View field of the black matrix on the underlay substrate covers the touch-control sensing line, and with the touch-control sensing At least one adjacent data line of the corresponding supporting block of line and/or at least one scan line are on the underlay substrate View field.
16. a kind of production method of array substrate as described in claim 1-12 is any, which is characterized in that including:
Underlay substrate is provided;
Multiple data lines, multi-strip scanning line, at least one touch-control sensing line and at least one are formed on the underlay substrate Supporting block;
Wherein, the supporting block is corresponded with the touch-control sensing line, and the touch-control sensing line is arranged in the corresponding branch The top of bracer;
The supporting block is adjacent at least one data line and/or at least one scan line and is arranged in parallel;
The height of the supporting block is more than the height of the data line, and/or, the height of the supporting block is more than the scan line Height;
The touch-control sensing line, and at least one data line that supporting block corresponding with the touch-control sensing line is adjacent And/or at least one the spacing that is projected on the underlay substrate of the scan line be 0.
17. according to the method for claim 16, which is characterized in that on the underlay substrate formed multiple data lines, Multi-strip scanning line, at least one touch-control sensing line and at least one supporting block include:
Multi-strip scanning line is formed on the underlay substrate;
The first insulating layer is formed on the scan line;
At least one supporting block is formed on first insulating layer;
Multiple data lines are formed on first insulating layer, and form corresponding touch-control on the supporting block simultaneously Sense wire, wherein the supporting block is adjacent at least one data line and is arranged in parallel.
18. according to the method for claim 16, which is characterized in that on the underlay substrate formed multiple data lines, Multi-strip scanning line, at least one touch-control sensing line and at least one supporting block include:
Multiple data lines are formed on the underlay substrate;
Second insulating layer is formed on the data line;
At least one supporting block is formed on the second insulating layer;
Multi-strip scanning line is formed on the second insulating layer, and forms corresponding touch-control on the supporting block simultaneously Sense wire, wherein the supporting block is adjacent at least one scan line and is arranged in parallel.
19. according to the method for claim 16, which is characterized in that the array substrate further includes:A plurality of grid line, the grid Line is vertical with the data line, and the scan line is parallel with the data line, every scan line and corresponding at least one The grid line electrical connection;
Multiple data lines, multi-strip scanning line, at least one touch-control sensing line and at least one are formed on the underlay substrate Supporting block, including:
A plurality of grid line is formed on the underlay substrate;
Third insulating layer is formed on the grid line;
At least one supporting block is formed on the third insulating layer;
Multi-strip scanning line and multiple data lines, and the shape on the supporting block simultaneously are formed on the third insulating layer At corresponding touch-control sensing line, wherein the supporting block and at least one scan line and/or the data line are adjacent and flat Row setting.
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